JP2006002041A - Epoxy resin molding material for encapsulation and electronic component device - Google Patents

Epoxy resin molding material for encapsulation and electronic component device Download PDF

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JP2006002041A
JP2006002041A JP2004180032A JP2004180032A JP2006002041A JP 2006002041 A JP2006002041 A JP 2006002041A JP 2004180032 A JP2004180032 A JP 2004180032A JP 2004180032 A JP2004180032 A JP 2004180032A JP 2006002041 A JP2006002041 A JP 2006002041A
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epoxy resin
molding material
component
resin molding
sealing
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Hisanori Watanabe
尚紀 渡辺
Hideyuki Chagi
秀幸 茶木
Toshihiro Hayashi
智弘 林
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Showa Denko Materials Co Ltd
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Hitachi Chemical Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an epoxy resin composition molding material for encapsulation excellent in flame resistance, heat resistance and thermal cycle resistance and an electronic component device equipped with an element encapsulated with the epoxy resin composition molding material. <P>SOLUTION: The epoxy resin composition molding material for encapsulation contains (A) an epoxy resin, (B) a hardener expressed by general formula (I) (wherein, n is 0 or a positive integer; and a hydrogen on the benzene ring may be substituted with a hydrocarbon group) and (C) an inorganic filler. Component (C) accounts for ≥70 wt.% and ≤88 wt.% of the total weight of the molding material. At least one component of the component (C) has a specific surface area of ≤2.0 m<SP>2</SP>/g. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、封止用エポキシ樹脂成形材料、及びこの封止用エポキシ樹脂成形材料で封止した素子を備えた電子部品装置に関する。   The present invention relates to an epoxy resin molding material for sealing, and an electronic component device including an element sealed with the epoxy resin molding material for sealing.

従来から、トランジスタ、IC、LSI等の電子部品装置の素子封止の分野では生産性、コスト等の面から樹脂封止が主流となり、エポキシ樹脂成形材料が広く用いられている。この理由としては、エポキシ樹脂が電気特性、耐湿性、耐熱性、機械特性、インサート品との接着性などの諸特性にバランスがとれているためである。   Conventionally, in the field of element sealing of electronic component devices such as transistors, ICs, and LSIs, resin sealing has been the mainstream in terms of productivity, cost, etc., and epoxy resin molding materials have been widely used. This is because epoxy resins are balanced in various properties such as electrical properties, moisture resistance, heat resistance, mechanical properties, and adhesiveness with inserts.

近年は、自動車分野においても電子機器化が進んでいる。自動車用途の電子機器には、耐冷熱サイクル性等の信頼性において、パーソナルコンピュータ、家電等のいわゆる民生用途より一段と厳しい信頼性が求められることが多い。耐冷熱サイクル性を高める為には半導体内部部材と封止用エポキシ樹脂成形材料の熱膨張係数を近づける等の手法が挙げられる。
封止用エポキシ樹脂成形材料には、従来よりデカブロムをはじめとするハロゲン化樹脂やアンチモン化合物が難燃剤として用いられていたが、近年、環境保護の観点からこれらの化合物に量規制の動きがあり、ノンハロゲン化(ノンブロム化)及びノンアンチモン化の要求が出てきている。また、プラスチック封止ICの高温放置特性にブロム化合物が悪影響を及ぼすことが知られており、この観点からもブロム化樹脂量の低減が望まれている。
ブロム化樹脂や酸化アンチモンを用いずに難燃化を達成する手法としては、有機リン系化合物を添加する方法(例えば、特許文献1参照。)、金属水酸化物を添加する方法(例えば、特許文献2参照。)等の提案がなされている。しかしながら、特に銅リードフレームパッケージにおいて耐冷熱サイクル性を高める為に封止用エポキシ樹脂成形材料の線膨張係数をリードフレームに近づけようとした場合、無機質充填材料の配合量の低下から難燃性の確保が困難となり、これら難燃剤を多量に添加する必要が生じる。難燃剤の多量の添加は耐熱性や成形性等に悪影響を及ぼす等の問題を引き起こし、未だ充分な解決をみていないのが現状である。
特開平9−235449公報 特開平9−241483公報
In recent years, electronic devices are also being developed in the automobile field. Electronic devices for automobiles are often required to have more stringent reliability than so-called consumer applications such as personal computers and home appliances in terms of reliability such as cold and heat cycle resistance. In order to improve the cold heat cycle resistance, a technique such as bringing the coefficient of thermal expansion between the semiconductor internal member and the epoxy resin molding material for sealing close to each other can be used.
In epoxy resin molding materials for sealing, halogenated resins such as decabromo and antimony compounds have been used as flame retardants in the past, but in recent years there has been a movement to regulate the amount of these compounds from the viewpoint of environmental protection. There is a demand for non-halogenation (non-bromo) and non-antimony. In addition, it is known that a bromo compound has an adverse effect on the high temperature storage characteristics of a plastic encapsulated IC. From this viewpoint, reduction of the amount of bromo resin is desired.
As a method for achieving flame retardancy without using brominated resin or antimony oxide, a method of adding an organic phosphorus compound (for example, see Patent Document 1), a method of adding a metal hydroxide (for example, a patent) (See Document 2). However, especially in the case of copper lead frame packages, if the linear expansion coefficient of the epoxy resin molding material for sealing is to be close to that of the lead frame in order to improve the thermal cycle resistance, the flame retardancy is reduced due to the decrease in the amount of inorganic filler material. It becomes difficult to ensure, and it becomes necessary to add a large amount of these flame retardants. Addition of a large amount of flame retardant causes problems such as adverse effects on heat resistance, moldability, etc., and at present, no sufficient solution has been found.
JP 9-235449 A Japanese Patent Laid-Open No. 9-241383

ブロム化樹脂や酸化アンチモンを用いない封止用エポキシ樹脂成形材料において、耐冷熱サイクル性を高める為に封止用エポキシ樹脂成形材料の線膨張係数と半導体内部部材とのそれを近づけようとすると、特に銅リードフレームを使用したパッケージでの難燃性確保が困難となる。一方、難燃性確保の為に有機リン系化合物、金属水酸化物等の難燃剤を用いると、耐熱性や成形性等に悪影響を及ぼす等の問題を抱える。   In an epoxy resin molding material for sealing that does not use brominated resin or antimony oxide, when trying to bring the coefficient of linear expansion of the epoxy resin molding material for sealing close to that of the semiconductor internal member in order to increase the thermal cycle resistance, In particular, it is difficult to ensure flame retardancy in a package using a copper lead frame. On the other hand, when flame retardants such as organophosphorus compounds and metal hydroxides are used to ensure flame retardancy, there are problems such as adverse effects on heat resistance and moldability.

本発明はかかる状況に鑑みなされたもので、ハロゲン化樹脂やアンチモン化合物、さらには有機リン系難燃剤や金属水酸化物等の難燃剤を実質的に用いることなく高い難燃性を実現し、耐熱性や耐冷熱サイクル性等の信頼性に優れる封止用エポキシ樹脂成形材料、及びこれにより封止した素子を備えた電子部品装置を提供しようとするものである。   The present invention has been made in view of such a situation, and realizes high flame retardancy without substantially using a flame retardant such as a halogenated resin, an antimony compound, or an organic phosphorus flame retardant or a metal hydroxide, An object of the present invention is to provide an epoxy resin molding material for sealing excellent in reliability such as heat resistance and cold-heat cycle resistance, and an electronic component device including an element sealed thereby.

発明者らは上記の課題を解決するために鋭意検討を重ねた結果、封止用エポキシ樹脂成形材料に、特定の構造を有する硬化剤、及び特定の比表面積を有する無機質充填剤とを添加することにより上記の目的を達成しうることを見い出し、本発明を完成するに至った。   As a result of intensive studies to solve the above problems, the inventors add a curing agent having a specific structure and an inorganic filler having a specific specific surface area to the epoxy resin molding material for sealing. Thus, the inventors have found that the above object can be achieved, and have completed the present invention.

本発明は
(1)(A)エポキシ樹脂、(B)下記一般式(I)で表される化合物を含む硬化剤、(C)無機質充填剤を含有し、(C)成分が、成形材料全体の70重量%以上88重量%以下で、かつ、少なくとも1種成分の比表面積が2.0m2/g以下である封止用エポキシ樹脂成形材料、

Figure 2006002041
(一般式(I)で、nは0又は正の整数を表す。ベンゼン環の水素は炭化水素基で置換されていても良い。)
(2)(C)成分のうち、比表面積が2.0m2/g以下である成分が結晶シリカ、溶融シリカ、及び合成シリカの内の少なくとも一つを含む前記(1)に記載の封止用エポキシ樹脂成形材料、
(3)(C)成分のうち、比表面積が2.0m2/g以下である成分が、(C)成分全体の30重量%以上である前記(2)に記載の封止用エポキシ樹脂成形材料、
(4)臭素系難燃剤及びアンチモン系難燃剤を含有しない前記(1)〜(3)のいずれかに記載の封止用エポキシ樹脂成形材料、
(5)(D)硬化促進剤を含み、該硬化促進剤に有機リン系化合物を含有する前記(1)〜(4)のいずれかに記載の封止用エポキシ樹脂成形材料、
(6)前記(1)〜(5)のいずれかに記載の封止用エポキシ樹脂成形材料により封止された素子を備えた電子部品装置、
に関する。 The present invention comprises (1) (A) an epoxy resin, (B) a curing agent containing a compound represented by the following general formula (I), (C) an inorganic filler, and (C) component is the entire molding material An epoxy resin molding material for sealing wherein the specific surface area of at least one component is 2.0 m 2 / g or less.
Figure 2006002041
(In general formula (I), n represents 0 or a positive integer. The hydrogen of the benzene ring may be substituted with a hydrocarbon group.)
(2) Among the components (C), the component having a specific surface area of 2.0 m 2 / g or less contains at least one of crystalline silica, fused silica, and synthetic silica. Epoxy resin molding material,
(3) Among the components (C), the component having a specific surface area of 2.0 m 2 / g or less is 30% by weight or more of the entire component (C). material,
(4) The epoxy resin molding material for sealing according to any one of (1) to (3), which does not contain a brominated flame retardant and an antimony flame retardant,
(5) The epoxy resin molding material for sealing according to any one of the above (1) to (4), comprising (D) a curing accelerator and containing an organophosphorus compound in the curing accelerator,
(6) An electronic component device including an element sealed with the sealing epoxy resin molding material according to any one of (1) to (5),
About.

本発明になる封止用エポキシ樹脂成形材料は、難燃性や耐熱性、耐冷熱サイクル性等の信頼性に優れ、この封止用エポキシ樹脂成形材料を用いてIC、LSI等の電子部品を封止すれば、難燃性や耐熱、耐冷熱サイクル性等の信頼性に優れた電子部品装置を得ることができ、その工業的価値は大である。   The epoxy resin molding material for sealing according to the present invention is excellent in reliability such as flame retardancy, heat resistance, and cold cycle resistance, and electronic components such as ICs, LSIs and the like are made using this epoxy resin molding material for sealing. If sealed, an electronic component device having excellent reliability such as flame retardancy, heat resistance, and thermal cycle resistance can be obtained, and its industrial value is great.

本発明では、(A)成分として封止用エポキシ樹脂成形材料に一般に使用されているエポキシ樹脂を特に制限なく使用することが可能である。例示すれば、フェノールノボラック型エポキシ樹脂、オルソクレゾールノボラック型エポキシ樹脂をはじめとするフェノール、クレゾール、キシレノール、レゾルシン、カテコール、ビスフェノールA、ビスフェノールF等のフェノール類及び/又はα−ナフトール、β−ナフトール、ジヒドロキシナフタレン等のナフトール類とホルムアルデヒド、アセトアルデヒド、プロピオンアルデヒド、ベンズアルデヒド、サリチルアルデヒド等のアルデヒド基を有する化合物とを酸性触媒下で縮合又は共縮合させて得られるノボラック樹脂をエポキシ化したもの、ビスフェノールA、ビスフェノールF、ビスフェノールS、ビスフェノールA/D等のジグリシジルエーテル、アルキル置換又は非置換のビフェノールのジグリシジルエーテルであるビフェニル型エポキシ樹脂、フェノール類及び/又はナフトール類とジメトキシパラキシレン又はビス(メトキシメチル)ビフェニルから合成されるフェノール・アラルキル樹脂、ナフトール・アラルキル樹脂、ビフェニル・アラルキル樹脂のエポキシ化物、スチルベン型エポキシ樹脂、ハイドロキノン型エポキシ樹脂、フタル酸、ダイマー酸等の多塩基酸とエピクロルヒドリンの反応により得られるグリシジルエステル型エポキシ樹脂、ジアミノジフェニルメタン、イソシアヌル酸等のポリアミンとエピクロルヒドリンの反応により得られるグリシジルアミン型エポキシ樹脂、シクロペンタジエンとフェノール類の共縮合樹脂のエポキシ化物であるジシクロペンタジエン型エポキシ樹脂、ナフタレン環を有するエポキシ樹脂、トリフェノールメタン型エポキシ樹脂、トリメチロールプロパン型エポキシ樹脂、テルペン変性エポキシ樹脂、オレフィン結合を過酢酸等の過酸で酸化して得られる線状脂肪族エポキシ樹脂、脂環族エポキシ樹脂、及びこれらのエポキシ樹脂をシリコーン、アクリロニトリル、ブタジエン、イソプレン系ゴム、ポリアミド系樹脂等により変性したエポキシ樹脂などが挙げられる。   In the present invention, it is possible to use an epoxy resin that is generally used as an epoxy resin molding material for sealing as the component (A) without any particular limitation. For example, phenol novolac type epoxy resin, orthocresol novolac type epoxy resin and other phenols, cresol, xylenol, resorcin, catechol, bisphenol A, bisphenol F and other phenols and / or α-naphthol, β-naphthol, Epoxidized novolak resin obtained by condensation or cocondensation of naphthols such as dihydroxynaphthalene and a compound having an aldehyde group such as formaldehyde, acetaldehyde, propionaldehyde, benzaldehyde, salicylaldehyde under an acidic catalyst, bisphenol A, Biglycidyl ethers such as bisphenol F, bisphenol S, bisphenol A / D, and diglycidyl ethers of alkyl-substituted or unsubstituted biphenols Phenyl type epoxy resins, phenol / aralkyl resins synthesized from phenols and / or naphthols and dimethoxyparaxylene or bis (methoxymethyl) biphenyl, naphthol / aralkyl resins, epoxidized biphenyl / aralkyl resins, stilbene type epoxy resins, Hydroquinone type epoxy resins, glycidyl ester type epoxy resins obtained by the reaction of polybasic acids such as phthalic acid and dimer acid and epichlorohydrin, glycidyl amine type epoxy resins obtained by the reaction of polyamines such as diaminodiphenylmethane and isocyanuric acid and epichlorohydrin, cyclohexane Dicyclopentadiene type epoxy resin, epoxidized product of co-condensation resin of pentadiene and phenol, epoxy resin having naphthalene ring, triphenol Type epoxy resin, trimethylolpropane type epoxy resin, terpene modified epoxy resin, linear aliphatic epoxy resin obtained by oxidizing olefinic bond with peracid such as peracetic acid, alicyclic epoxy resin, and these epoxy resins And epoxy resin modified with silicone, acrylonitrile, butadiene, isoprene-based rubber, polyamide-based resin and the like.

本発明の(B)硬化剤には、特に難燃性の点から、下記一般式(I)で表される化合物を単独又は併用して用いることが必要である。

Figure 2006002041
(一般式(I)で、nは0又は正の整数を表す。ベンゼン環の水素は炭化水素基で置換されていても良い。)
本発明の効果である高い難燃性を実現する為には、一般式(I)で表される硬化剤を(B)成分の50重量%以上とすることが好ましく、60重量%以上がより好ましく、70重量%以上が特に好ましい。一般式(I)で表される硬化剤としては、n=1〜10程度で、ベンゼン環の側鎖がすべて水素であるMEH-7851(明和化成株式会社製商品名)が市場で入手可能である。
本発明では(B)成分として、一般式(I)で表される硬化剤の他に、封止用エポキシ樹脂成形材料に一般に使用されている硬化剤を、その発明の効果を失わない範囲において併用することができる。例えば、フェノール、クレゾール、レゾルシン、カテコール、ビスフェノールA、ビスフェノールF、フェニルフェノール、アミノフェノール等のフェノール類及び/又はα−ナフトール、β−ナフトール、ジヒドロキシナフタレン等のナフトール類とホルムアルデヒド、ベンズアルデヒド、サリチルアルデヒド等のアルデヒド基を有する化合物とを酸性触媒下で縮合又は共縮合させて得られるノボラック型フェノール樹脂、ジシクロペンタジエン型フェノール樹脂、テルペン変性フェノール樹脂、トリフェノールメタン型フェノール樹脂等が挙げられ、信頼性や難燃性の点からは、下記一般式(II)〜(IV)で表されるフェノール・アラルキル樹脂、ナフトール・アラルキル樹脂等を併用することが好ましい。
Figure 2006002041
(一般式(II)で、nは0又は1〜10の整数を表す。ベンゼン環の水素は炭化水素基で置換されていても良い。)
Figure 2006002041
(一般式(III)で、nは0又は正の整数を表す。ベンゼン環、ナフタレン環の水素は炭化水素基で置換されていても良い。)
Figure 2006002041
(一般式(IV)で、nは0又は正の整数を表す。ベンゼン環、ナフタレン環の水素は炭化水素基で置換されていても良い。)
上記一般式(II)で示されるフェノール・アラルキル樹脂としては三井化学株式会社製商品名XLC等が、上記一般式(III)で示されるナフトール・アラルキル樹脂としては新日鐵化学株式会社製商品名SN−475等が、上記一般式(IV)で示されるナフトール・アラルキル樹脂としては新日鐵化学株式会社製商品名SN−170等が、それぞれ市場で入手可能である。 In the curing agent (B) of the present invention, it is necessary to use a compound represented by the following general formula (I) alone or in combination, particularly from the viewpoint of flame retardancy.
Figure 2006002041
(In general formula (I), n represents 0 or a positive integer. The hydrogen of the benzene ring may be substituted with a hydrocarbon group.)
In order to achieve the high flame retardancy that is the effect of the present invention, the curing agent represented by the general formula (I) is preferably 50% by weight or more of the component (B), more preferably 60% by weight or more. Preferably, 70% by weight or more is particularly preferable. As the curing agent represented by the general formula (I), MEH-7851 (trade name, manufactured by Meiwa Kasei Co., Ltd.) in which n = 1 to 10 and all side chains of the benzene ring are hydrogen is available on the market. is there.
In the present invention, as the component (B), in addition to the curing agent represented by the general formula (I), the curing agent generally used in the epoxy resin molding material for sealing is within a range not losing the effect of the invention. Can be used together. For example, phenols such as phenol, cresol, resorcin, catechol, bisphenol A, bisphenol F, phenylphenol, aminophenol and / or naphthols such as α-naphthol, β-naphthol, dihydroxynaphthalene and formaldehyde, benzaldehyde, salicylaldehyde, etc. Such as novolak-type phenolic resin, dicyclopentadiene-type phenolic resin, terpene-modified phenolic resin, and triphenolmethane-type phenolic resin obtained by condensation or cocondensation with a compound having an aldehyde group under an acidic catalyst. From the viewpoint of flame retardancy, it is preferable to use a phenol / aralkyl resin, a naphthol / aralkyl resin, or the like represented by the following general formulas (II) to (IV) in combination.
Figure 2006002041
(In the general formula (II), n represents 0 or an integer of 1 to 10. The hydrogen of the benzene ring may be substituted with a hydrocarbon group.)
Figure 2006002041
(In general formula (III), n represents 0 or a positive integer. Hydrogen in the benzene ring and naphthalene ring may be substituted with a hydrocarbon group.)
Figure 2006002041
(In general formula (IV), n represents 0 or a positive integer. Hydrogen in the benzene ring and naphthalene ring may be substituted with a hydrocarbon group.)
The phenolic aralkyl resin represented by the general formula (II) is trade name XLC manufactured by Mitsui Chemicals, and the naphthol aralkyl resin represented by the general formula (III) is trade name manufactured by Nippon Steel Chemical Co., Ltd. As a naphthol-aralkyl resin in which SN-475 and the like are represented by the above general formula (IV), trade name SN-170 manufactured by Nippon Steel Chemical Co., Ltd. is available on the market.

(A)成分のエポキシ樹脂と(B)成分の硬化剤との当量比、すなわち、エポキシ樹脂中のエポキシ基数/硬化剤中の水酸基数の比は、特に制限はないが、それぞれの未反応分を少なく抑えるために0.5〜2の範囲に設定されることが好ましく、0.6〜1.5がより好ましい。成形性や信頼性に優れる封止用エポキシ樹脂成形材料を得るためには0.8〜1.2の範囲に設定されることがさらに好ましい。   The equivalent ratio of the (A) component epoxy resin and the (B) component curing agent, that is, the ratio of the number of epoxy groups in the epoxy resin / the number of hydroxyl groups in the curing agent is not particularly limited. Is preferably set in the range of 0.5 to 2, more preferably 0.6 to 1.5. In order to obtain an epoxy resin molding material for sealing which is excellent in moldability and reliability, it is more preferable to set in the range of 0.8 to 1.2.

本発明では、線膨張係数低減、吸湿性及び強度向上等の為に、(C)無機質充填剤を配合することが必要であり、特に難燃性の観点から、比表面積が2.0m2/g以下の成分(以下、(C1)成分とする。)を少なくとも1種配合することが必要である。無機質充填剤としては、例えば、溶融シリカ、結晶シリカ、合成シリカ、アルミナ、ジルコン、珪酸カルシウム、炭酸カルシウム、チタン酸カリウム、炭化珪素、窒化珪素、窒化アルミ、窒化ホウ素、ベリリア、ジルコニア、ジルコン、フォステライト、ステアタイト、スピネル、ムライト、チタニア等の粉体、又はこれらを球形化したビーズ、ガラス繊維などが挙げられる。さらに、本発明の効果を失わない範囲で、難燃効果のある水酸化アルミニウム、水酸化マグネシウム等の金属水酸化物系無機質充填剤を添加してもよい。
流動性や線膨張係数、難燃性、信頼性といった総合的観点からは(C)成分の一部又は全部を結晶シリカ、溶融シリカ、又は合成シリカとすることが好ましく、特に難燃性の点から(C1)成分が結晶シリカ溶融シリカ及び合成シリカからなるシリカ群の内の少なくとも一つを含むことがより好ましい。
また、(C1)成分を(C)成分全体の30重量%以上とすることが好ましく、さらにこの(C1)成分に上記シリカ群の内の少なくとも一つを含むことがより好ましい。(C1)成分を(C)成分の30重量%以上とすることは、特に無機質充填剤量の相対的に少ない領域での難燃性確保に効果的である。比表面積の小さい無機質充填剤、特に結晶シリカ、溶融シリカ、又は合成シリカは、封止用エポキシ樹脂成形材料の燃焼時に相対的に断熱効果の大きな厚い表面膨張層を与え、それによって高い難燃性を与えると考えられる。
なお、本発明における結晶シリカ、溶融シリカ、又は合成シリカとは、天然シリカ、天然シリカを破砕後に溶射工程を経てガラス化したもの、又はシリコン単体あるいはテトラクロロシラン等を例とするシリコン化合物を出発物質として得られたシリカ(シリコンジオキサイド)を合成中又は合成後に溶射工程を経てガラス化したものを指す。流動性の観点からは、下記方法(1)により測定された球形度が0.70以上の、いわゆる球形シリカを用いることが好ましい。なお、本発明における比表面積とは、下記(2)により得られた値を指す。
(1)球形度
測定装置:FPIA‐2100
対象粒子径:45μm以上(JIS篩45μmにて篩上に残った粒子)
対象粒子数:200個
測定方法等:
1)(試料20g/純水80ml)+超音波3分間。
2)JIS篩(45μm)にて45μm以下の粒子を除く。
3)篩上の粒子1.0gにエチレングリコール50%溶液20mlを加え、超音
波にて3分間分散。
4)分析装置にかけ、以下の式に従って球形度を求める。
(球形度)=(投影面積/粒子の投影周囲長と同じ円周を持つ円の面積)
(2)比表面積
測定装置:ユアサアイオニクス株式会社製流動法BET一点法比表面積測定装置モノソーブ
キャリアガス:窒素/ヘリウム混合ガス1.5kg/cm、窒素ガス0.7kg/cm
試料脱気条件:200℃/30分
無機質充填剤の配合量は、特に銅リードフレームパッケージでの耐冷熱サイクル性の点から、成形材料全体の70〜88重量%とすることが必要で、72〜88重量%とすることがより好ましく、75〜85重量%とすることが特に好ましい。(C)成分が70重量%未満でも88重量%を超えても、ともに封止用エポキシ樹脂成形材料とリードフレームとの線膨張係数のミスマッチが顕著となり、耐冷熱サイクル性に不利となる。
In the present invention, it is necessary to add (C) an inorganic filler for the purpose of reducing the linear expansion coefficient, improving the hygroscopicity and improving the strength, and in particular, from the viewpoint of flame retardancy, the specific surface area is 2.0 m 2 / It is necessary to blend at least one component (hereinafter referred to as the component (C1)) of g or less. Examples of the inorganic filler include fused silica, crystalline silica, synthetic silica, alumina, zircon, calcium silicate, calcium carbonate, potassium titanate, silicon carbide, silicon nitride, aluminum nitride, boron nitride, beryllia, zirconia, zircon, phospho Examples thereof include powders such as stellite, steatite, spinel, mullite, and titania, beads formed by spheroidizing these, and glass fibers. Furthermore, you may add metal hydroxide type inorganic fillers, such as aluminum hydroxide and magnesium hydroxide with a flame-retardant effect, in the range which does not lose the effect of this invention.
From a comprehensive viewpoint such as fluidity, linear expansion coefficient, flame retardancy, and reliability, it is preferable that part or all of the component (C) is crystalline silica, fused silica, or synthetic silica, particularly in terms of flame retardancy. More preferably, the components (C1) to (C1) contain at least one of the silica group consisting of crystalline silica fused silica and synthetic silica.
The component (C1) is preferably 30% by weight or more of the total component (C), and more preferably, the component (C1) contains at least one of the above silica group. Setting the component (C1) to 30% by weight or more of the component (C) is effective for ensuring flame retardancy particularly in a region where the amount of the inorganic filler is relatively small. Inorganic fillers with a small specific surface area, especially crystalline silica, fused silica, or synthetic silica, provide a thick surface expansion layer with a relatively large thermal insulation effect during the burning of the epoxy resin molding material for sealing, and thereby high flame resistance It is thought to give.
The crystalline silica, fused silica, or synthetic silica in the present invention is natural silica, natural silica obtained by crushing and then vitrifying through a thermal spraying process, or a silicon compound such as silicon alone or tetrachlorosilane as a starting material. The silica obtained as above (silicon dioxide) is vitrified through a thermal spraying process during or after synthesis. From the viewpoint of fluidity, it is preferable to use so-called spherical silica having a sphericity measured by the following method (1) of 0.70 or more. In addition, the specific surface area in this invention points out the value obtained by following (2).
(1) Sphericality Measuring device: FPIA-2100
Target particle size: 45 μm or more (particles remaining on the sieve with JIS sieve 45 μm)
Number of target particles: 200 Measurement method, etc .:
1) (sample 20 g / pure water 80 ml) + ultrasound 3 minutes.
2) Remove particles of 45 μm or less with a JIS sieve (45 μm).
3) Add 20 ml of a 50% ethylene glycol solution to 1.0 g of the particles on the sieve, and disperse for 3 minutes using ultrasonic waves.
4) Apply to the analyzer and determine the sphericity according to the following formula.
(Sphericity) = (projection area / area of a circle having the same circumference as the projected perimeter of the particle)
(2) Specific surface area measuring device: flow method BET single point method specific surface area measuring device monosorb manufactured by Yuasa Ionics Co., Ltd. Carrier gas: nitrogen / helium mixed gas 1.5 kg / cm 2 , nitrogen gas 0.7 kg / cm 2
Sample degassing condition: 200 ° C./30 minutes The blending amount of the inorganic filler is required to be 70 to 88% by weight of the entire molding material, particularly from the viewpoint of thermal cycle resistance in a copper lead frame package. It is more preferable to set it as -88 weight%, and it is especially preferable to set it as 75-85 weight%. Even if the component (C) is less than 70% by weight or more than 88% by weight, mismatch of the linear expansion coefficient between the epoxy resin molding material for sealing and the lead frame becomes remarkable, which is disadvantageous for the thermal cycle resistance.

本発明では、(D)硬化促進剤をさらに含むのが好ましく、特に硬化促進剤として有機リン系化合物を用いると、難燃性や信頼性の点で効果的である。本発明における有機リン系化合物とは、分子内に、アルキル基、フェニル基、及びフェニル基の水素原子の一部又は全部をアルキル基又はアルコキシ基で置換したフェニル基誘導体の、少なくともいずれかと直接結合するリン原子を有する化合物を指し、これらに無水マレイン酸、キノン化合物、ジアゾフェニルメタン、フェノール樹脂等のπ結合をもつ化合物やテトラフェニルボロン塩及びその誘導体等を付加してなる分子内分極を有する化合物をも含む。
例えばトリブチルホスフィン、メチルジフェニルホスフィン、トリフェニルホスフィン、トリス(4−メチルフェニル)ホスフィン、ジフェニルホスフィン、フェニルホスフィン、トリフェニルホスフィンとp−ベンゾキノンとの付加物、トリス(4−メチルフェニル)ホスフィンとp−ベンゾキノンとの付加物、トリブチルホスフィンとp−ベンゾキノンとの付加物、テトラフェニルホスフィンテトラフェニルボレート、トリフェニルホスフィンテトラフェニルボレート、等を例示することができ、これらは単独で用いても2種以上を併用して用いても構わない。
また、本発明の効果を失わない範囲において、1,8−ジアザ−ビシクロ(5,4,0)ウンデセン−7、1,5−ジアザ−ビシクロ(4,3,0)ノネン、5,6−ジブチルアミノ−1,8−ジアザ−ビシクロ(5,4,0)ウンデセン−7等のシクロアミジン化合物及びこれらの化合物に無水マレイン酸、1,4−ベンゾキノン、2,5−トルキノン、1,4−ナフトキノン、2,3−ジメチルベンゾキノン、2,6−ジメチルベンゾキノン、2,3−ジメトキシ−5−メチル−1,4−ベンゾキノン、2,3−ジメトキシ−1,4−ベンゾキノン、フェニル−1,4−ベンゾキノン等のキノン化合物、ジアゾフェニルメタン、フェノール樹脂等のπ結合をもつ化合物を付加してなる分子内分極を有する化合物、ベンジルジメチルアミン、トリエタノールアミン、ジメチルアミノエタノール、トリス(ジメチルアミノメチル)フェノール等の3級アミン化合物及びこれらの誘導体、2−メチルイミダゾール、2−フェニルイミダゾール、2−フェニル−4−メチルイミダゾール等のイミダゾール化合物及びこれらの誘導体、2−エチル−4−メチルイミダゾールテトラフェニルボレート、N−メチルモルホリンテトラフェニルボレート等のテトラフェニルボロン塩及びこれらの誘導体等の窒素系硬化促進剤を上記有機リン系硬化促進剤と併用して用いることもできる。
In the present invention, it is preferable to further include (D) a curing accelerator. Particularly, when an organic phosphorus compound is used as the curing accelerator, it is effective in terms of flame retardancy and reliability. The organophosphorus compound in the present invention is directly bonded to at least one of an alkyl group, a phenyl group, and a phenyl group derivative in which part or all of the hydrogen atoms of the phenyl group are substituted with an alkyl group or an alkoxy group in the molecule. This compound has an intramolecular polarization formed by adding a compound having a π bond such as maleic anhydride, a quinone compound, diazophenylmethane, or a phenol resin, or a tetraphenylboron salt or a derivative thereof. Also includes compounds.
For example, tributylphosphine, methyldiphenylphosphine, triphenylphosphine, tris (4-methylphenyl) phosphine, diphenylphosphine, phenylphosphine, adduct of triphenylphosphine and p-benzoquinone, tris (4-methylphenyl) phosphine and p- Examples include adducts with benzoquinone, adducts with tributylphosphine and p-benzoquinone, tetraphenylphosphine tetraphenylborate, triphenylphosphinetetraphenylborate, and the like. You may use together.
In addition, 1,8-diaza-bicyclo (5,4,0) undecene-7,1,5-diaza-bicyclo (4,3,0) nonene, 5,6- Cycloamidine compounds such as dibutylamino-1,8-diaza-bicyclo (5,4,0) undecene-7 and these compounds include maleic anhydride, 1,4-benzoquinone, 2,5-toluquinone, 1,4- Naphthoquinone, 2,3-dimethylbenzoquinone, 2,6-dimethylbenzoquinone, 2,3-dimethoxy-5-methyl-1,4-benzoquinone, 2,3-dimethoxy-1,4-benzoquinone, phenyl-1,4- Benzyldimethylamine, a compound with intramolecular polarization formed by adding a quinone compound such as benzoquinone, diazophenylmethane, a compound having a π bond such as a phenol resin, etc. Tertiary amine compounds such as triethanolamine, dimethylaminoethanol, tris (dimethylaminomethyl) phenol, and derivatives thereof, imidazole compounds such as 2-methylimidazole, 2-phenylimidazole, 2-phenyl-4-methylimidazole, and the like Derivatives of 2-ethyl-4-methylimidazole tetraphenylborate, tetraphenylboron salts such as N-methylmorpholine tetraphenylborate and nitrogen-based curing accelerators such as these derivatives are used in combination with the organophosphorus curing accelerator. Can also be used.

硬化促進剤の配合量は、硬化促進効果が達成される量であれば特に制限されるものではないが、エポキシ樹脂(A)に対して0.1〜10重量%が好ましく、より好ましくは1〜5重量%である。0.1重量%未満では短時間での硬化性に劣る傾向があり、10重量%を超えると硬化速度が速すぎて未充填等により良好な成形品を得ることが困難になる傾向がある。   The blending amount of the curing accelerator is not particularly limited as long as the curing acceleration effect is achieved, but is preferably 0.1 to 10% by weight, more preferably 1 with respect to the epoxy resin (A). ~ 5% by weight. If it is less than 0.1% by weight, the curability in a short time tends to be inferior. If it exceeds 10% by weight, the curing rate tends to be too fast, and it tends to be difficult to obtain a good molded product due to unfilling or the like.

本発明では(A)〜(D)成分以外にも、必要に応じて、エポキシシラン、メルカプトシラン、アミノシラン、アルキルシラン、ウレイドシラン、ビニルシラン等のシラン系カップリング剤、アルミネート系カップリング剤、チタネート系カップリング剤等、封止用エポキシ樹脂成形材料に従来より使用されている公知のカップリング剤を添加することができる。
カップリング剤を添加する場合、信頼性や、特に無機質充填剤が相対的に少ない領域(70重量%〜85重量%)での難燃性確保の為に、その添加量を成形材料全体の0.5重量%以下とすることが好ましい。
In the present invention, in addition to the components (A) to (D), if necessary, silane coupling agents such as epoxy silane, mercapto silane, amino silane, alkyl silane, ureido silane, vinyl silane, aluminate coupling agent, Known coupling agents conventionally used in sealing epoxy resin molding materials such as titanate coupling agents can be added.
When a coupling agent is added, the addition amount is set to 0% of the entire molding material in order to ensure reliability and particularly flame retardance in a region (70 wt% to 85 wt%) where the inorganic filler is relatively small. It is preferable that the content be 5% by weight or less.

本発明の成形材料においては、特に耐熱性の観点から、臭素化エポキシ樹脂等のハロゲン系難燃剤の含有量と、三酸化アンチモン、四酸化アンチモン、五酸化アンチモン等のアンチモン系難燃剤の含有量とは、いずれも成形材料全体の0.1重量%以下であることが好ましい。ハロゲン系難燃剤及びアンチモン系難燃剤のいずれも含まないことがより好ましい。
本発明では又、成形時の金型からの円滑な離型性を確保する為に、ステアリン酸、モンタン酸等の高級脂肪酸系ワックス、ステアリン酸エステル、モンタン酸エステル等の高級脂肪酸エステル系ワックス、ポリエチレンワックス等、封止用エポキシ樹脂成形材料に用いられる従来公知の離型剤を用いることができる。
In the molding material of the present invention, particularly from the viewpoint of heat resistance, the content of halogenated flame retardants such as brominated epoxy resins and the content of antimony flame retardants such as antimony trioxide, antimony tetroxide, and antimony pentoxide. Is preferably 0.1% by weight or less of the entire molding material. More preferably, neither halogen-based flame retardant nor antimony-based flame retardant is included.
In the present invention, in order to ensure smooth releasability from the mold during molding, higher fatty acid waxes such as stearic acid and montanic acid, higher fatty acid ester waxes such as stearic acid ester and montanic acid ester, A conventionally known release agent used for an epoxy resin molding material for sealing, such as polyethylene wax, can be used.

本発明の封止用エポキシ樹脂成形材料には、IC等の半導体素子の耐湿性、高温放置特性を向上させる観点から陰イオン交換体を添加することもできる。陰イオン交換体としては特に制限はなく、従来公知のものを用いることができるが、例えば、ハイドロタルサイトや、ビスマス、ジルコニウム、チタン、スズ、マグネシウム、アルミニウムから選ばれる元素の含水酸化物等が挙げられ、これらを単独で又は2種以上を組み合わせて用いることができる。中でも、下記一般式(V)で示されるハイドロタルサイト及びビスマスの含水酸化物が好ましい。
(化6)
Mg1−XAl(OH)(COX/2・mHO ……(V)
(0<X≦0.5、mは正の整数)
陰イオン交換体の配合量は、ハロゲンイオン等のイオン性不純物を捕捉できる十分な量であれば特に制限はないが、(A)成分のエポキシ樹脂に対して0.1〜30重量%が好ましく、1〜10重量%がより好ましく、2〜5重量%がさらに好ましい。配合量が0.1重量%未満ではイオン性不純物の捕捉が不十分になる傾向があり、30重量%を超えた場合それ以下に比べて効果に大差がないため経済的に不利である。
An anion exchanger can be added to the sealing epoxy resin molding material of the present invention from the viewpoint of improving the moisture resistance and high temperature storage characteristics of a semiconductor element such as an IC. The anion exchanger is not particularly limited, and conventionally known anion exchangers can be used. Examples thereof include hydrotalcite and hydrated oxides of elements selected from bismuth, zirconium, titanium, tin, magnesium, and aluminum. These may be used alone or in combination of two or more. Of these, hydrotalcite and bismuth hydrous oxide represented by the following general formula (V) are preferable.
(Chemical formula 6)
Mg 1-X Al X (OH) 2 (CO 3 ) X / 2 · mH 2 O (V)
(0 <X ≦ 0.5, m is a positive integer)
The amount of the anion exchanger is not particularly limited as long as it is sufficient to capture ionic impurities such as halogen ions, but is preferably 0.1 to 30% by weight with respect to the epoxy resin of component (A). 1-10 weight% is more preferable, and 2-5 weight% is further more preferable. If the blending amount is less than 0.1% by weight, trapping of ionic impurities tends to be insufficient, and if it exceeds 30% by weight, there is no significant difference in the effect compared to the amount less than that, which is economically disadvantageous.

さらに、本発明の封止用エポキシ樹脂成形材料には、本発明の効果を損なわない範囲で、カーボンブラック、有機染料、有機顔料、酸化チタン、鉛丹、ベンガラ等の着色剤、イミダゾール、トリアゾール、テトラゾール、トリアジン等及びこれらの誘導体、アントラニル酸、没食子酸、マロン酸、リンゴ酸、マレイン酸、アミノフェノール、キノリン等及びこれらの誘導体、脂肪族酸アミド化合物、ジチオカルバミン酸塩、チアジアゾール誘導体等の接着促進剤などを必要に応じて配合することができる。   Furthermore, in the epoxy resin molding material for sealing of the present invention, the colorant such as carbon black, organic dye, organic pigment, titanium oxide, red lead, bengara, imidazole, triazole, as long as the effects of the present invention are not impaired. Adhesion promotion of tetrazole, triazine, etc. and their derivatives, anthranilic acid, gallic acid, malonic acid, malic acid, maleic acid, aminophenol, quinoline, etc. and their derivatives, aliphatic acid amide compounds, dithiocarbamates, thiadiazole derivatives, etc. An agent etc. can be mix | blended as needed.

本発明の封止用エポキシ樹脂成形材料は、各種原材料を均一に分散混合できるのであれば、いかなる手法を用いても調製できるが、一般的な手法として、所定の配合量の原材料をミキサー等によって十分混合した後、ミキシングロール、ニーダ、押出機等によって溶融混練した後、冷却、粉砕する方法を挙げることができる。成形条件に合うような寸法及び重量でタブレット化すると使いやすい。
また、本発明の封止用エポキシ樹脂成形材料は、各種有機溶剤に溶かして液状封止用エポキシ樹脂成形材料として使用することもでき、この液状封止用エポキシ樹脂成形材料を板又はフィルム上に薄く塗布し、樹脂の硬化反応が余り進まないような条件で有機溶剤を飛散させることによって得られるシートあるいはフィルム状の封止用エポキシ樹脂成形材料として使用することもできる。
The epoxy resin molding material for sealing of the present invention can be prepared by any method as long as various raw materials can be uniformly dispersed and mixed. However, as a general method, a raw material having a predetermined blending amount is mixed with a mixer or the like. A method of sufficiently cooling and pulverizing after mixing and melting and kneading with a mixing roll, a kneader, an extruder or the like can be mentioned. It is easy to use if it is tableted with dimensions and weight that match the molding conditions.
Moreover, the epoxy resin molding material for sealing of the present invention can be dissolved in various organic solvents and used as a liquid epoxy resin molding material for liquid sealing. This liquid epoxy resin molding material for liquid sealing can be used on a plate or a film. It can also be used as an epoxy resin molding material for sealing in the form of a sheet or film obtained by coating thinly and scattering the organic solvent under conditions that do not allow the resin curing reaction to proceed so much.

本発明で得られる封止用エポキシ樹脂成形材料により素子を封止して得られる電子部品装置としては、リードフレーム、配線済みのテープキャリア、配線板、ガラス、シリコンウエハ等の支持部材に、半導体チップ、トランジスタ、ダイオード、サイリスタ等の能動素子、コンデンサ、抵抗体、コイル等の受動素子等の素子を搭載し、必要な部分を本発明の封止用エポキシ樹脂成形材料で封止した、電子部品装置などが挙げられる。このような電子部品装置としては、例えば、リードフレーム上に半導体素子を固定し、ボンディングパッド等の素子の端子部とリード部をワイヤボンディングやバンプで接続した後、本発明の封止用エポキシ樹脂成形材料を用いてトランスファ成形などにより封止してなる、DIP(Dual Inline Package)、PLCC(Plastic Leaded Chip Carrier)、QFP(Quad Flat Package)、SOP(Small Outline Package)、SOJ(Small Outline J-lead package)、TSOP(Thin Small Outline Package)、TQFP(Thin Quad Flat Package)等の一般的な樹脂封止型IC、テープキャリアにバンプで接続した半導体チップを、本発明の封止用エポキシ樹脂成形材料で封止したTCP(Tape Carrier Package)、配線板やガラス上に形成した配線に、ワイヤボンディング、フリップチップボンディング、はんだ等で接続した半導体チップ、トランジスタ、ダイオード、サイリスタ等の能動素子及び/又はコンデンサ、抵抗体、コイル等の受動素子を、本発明の封止用エポキシ樹脂成形材料で封止したCOB(Chip On Board)モジュール、ハイブリッドIC、マルチチップモジュール、配線板接続用の端子を形成した有機基板に素子を搭載し、バンプまたはワイヤボンディングにより素子と有機基板に形成された配線を接続した後、本発明の封止用エポキシ樹脂成形材料で素子を封止したBGA(Ball Grid Array)、CSP(Chip Size Package)などが挙げられる。また、プリント回路板にも本発明の封止用エポキシ樹脂成形材料は有効に使用できる。   As an electronic component device obtained by sealing an element with the sealing epoxy resin molding material obtained in the present invention, a lead frame, a wired tape carrier, a wiring board, glass, a silicon wafer, a support member such as a semiconductor Electronic components equipped with active elements such as chips, transistors, diodes, and thyristors, and passive elements such as capacitors, resistors, and coils, and encapsulated with the epoxy resin molding material for sealing of the present invention. Examples thereof include devices. As such an electronic component device, for example, a semiconductor element is fixed on a lead frame, and a terminal portion and a lead portion of an element such as a bonding pad are connected by wire bonding or bump, and then the epoxy resin for sealing of the present invention is used. DIP (Dual Inline Package), PLCC (Plastic Leaded Chip Carrier), QFP (Quad Flat Package), SOP (Small Outline Package), SOJ (Small Outline J-) General resin-encapsulated ICs such as lead package (TSP), TSOP (Thin Small Outline Package), and TQFP (Thin Quad Flat Package), and semiconductor chips connected to the tape carrier by bumps are molded with epoxy resin for sealing. TCP (Tape Carrier Package) sealed with materials, wire bonding, flip chip bonding to wiring formed on wiring boards and glass COB (Chip On) in which active elements such as semiconductor chips, transistors, diodes, thyristors and / or passive elements such as capacitors, resistors, coils, etc., which are connected by solder or the like, are sealed with the sealing epoxy resin molding material of the present invention. Board) module, hybrid IC, multi-chip module, an element mounted on an organic substrate on which a wiring board connection terminal is formed, and after connecting the element and the wiring formed on the organic substrate by bump or wire bonding, Examples thereof include BGA (Ball Grid Array) and CSP (Chip Size Package) in which the element is sealed with a sealing epoxy resin molding material. Moreover, the epoxy resin molding material for sealing of the present invention can also be used effectively for printed circuit boards.

本発明の封止用エポキシ樹脂成形材料を用いて素子を封止する方法としては、低圧トランスファ成形法が最も一般的であるが、インジェクション成形法、圧縮成形法等を用いてもよい。封止用エポキシ樹脂成形材料が常温で液状又はペースト状の場合は、ディスペンス方式、注型方式、印刷方式等が挙げられる。
また、素子を直接樹脂封止する一般的な封止方法ばかりではなく、素子に直接電子部品封止用エポキシ樹脂成形材料が接触しない形態である中空パッケージの方式もあり、中空パッケージ用の封止用エポキシ樹脂成形材料としても好適に使用できる。
As a method for sealing an element using the epoxy resin molding material for sealing of the present invention, a low-pressure transfer molding method is the most common, but an injection molding method, a compression molding method, or the like may be used. When the sealing epoxy resin molding material is liquid or pasty at normal temperature, a dispensing method, a casting method, a printing method, and the like can be given.
Also, not only a general sealing method for directly sealing an element with a resin, but also a hollow package system in which an epoxy resin molding material for sealing an electronic component is not in direct contact with the element, sealing for a hollow package Also suitable for use as an epoxy resin molding material.

実施例1〜9、及び比較例1〜8
(A)成分のエポキシ樹脂として、エポキシ当量200、軟化点60℃のオルソクレゾールノボラック型エポキシ樹脂(エポキシ樹脂1、大日本インキ化学工業株式会社製商品名EPICLON N500P-1)、エポキシ当量196、融点106℃のビフェニル型エポキシ樹脂(エポキシ樹脂2、ジャパンエポキシレジン株式会社製商品名エピコートYX−4000H)、
(B)成分の硬化剤として水酸基当量200、軟化点65℃、下記一般式(I)でベンゼン環の側鎖がすべて水素であるビフェニル・アラルキル型フェノール樹脂(硬化剤1、硬化剤明和化成株式会社製商品名MEH-7851)、水酸基当量175、軟化点70℃のフェノール・アラルキル樹脂(比較硬化剤1、三井化学株式会社製商品名ミレックスXL−225)、水酸基当量185、軟化点67℃のβ−ナフトール・アラルキル樹脂(比較硬化剤2、新日鉄化学株式会社製商品名SN−170L)、
(C)成分として平均粒径25μm、比表面積1.5m2/gの溶融球状シリカ(電気化学工業株式会社製商品名FB−950)と平均粒径20μm、比表面積3.3m2/gの溶融球状シリカ(マイクロン株式会社製商品名S‐COX31)、及び平均粒径0.5μm、比表面積6.5m2/gの合成球状シリカ(株式会社アドマテックス製商品名SO−25R)の5/4/1(重量比)混合品(シリカ1)、
同じく2/7/1混合品(シリカ2)、
前記FB−950と平均粒径20μm、比表面積3.5m2/gの溶融球状シリカ(龍森株式会社製商品名MSR‐2212)、及び前記SO−25Rの5/4/1混合品(シリカ3)、
同じく2/7/1混合品(シリカ4)、
前記FB‐950と平均粒径5.0μm、比表面積6.0m2/gの破砕シリカ(福島窯業株式会社製商品名F‐205)、及び前記SO‐25Rとの7/2/1の混合品(シリカ5)、
平均粒径20μm、比表面積1.6m2/gの球状シリカ(株式会社マイクロン製商品名S‐125)、及び前記SO‐25Rとの9/1の混合品(シリカ6)、
(C)成分の比較成分として前記S‐COX31とSO‐25Rの9/1混合品(比較シリカ1)、前記MSR‐2212とSO‐25Rの9/1混合品(比較シリカ2)、
(D)成分としてトリフェニルホスフィン(硬化促進剤1)、トリフェニルホスフィンとp−ベンゾキノンの付加物(硬化促進剤2)、1,8−ジアザビシクロ(5,4,0)ウンデセン−7(DBU、硬化促進剤3)、
カップリング剤としてγ-グリシドキシプロピルトリエトキシシラン、離型剤として酸化型ポリエチレンワックス、着色剤としてカーボンブラック(三菱化学株式会社製商品名MA−100)を、それぞれ表1及び表2に示す重量部で配合し、混練温度80℃、混練時間10分の条件でロール混練を行い、実施例及び比較例の封止用エポキシ樹脂成形材料を作製した。なお、及び(C)成分の平均粒径、比表面積はそれぞれ以下の方法により測定した。
(1)平均粒径
測定装置:(株)堀場製作所製LA-920
分散媒:ヘキサメタリン酸ナトリウム0.2wt/vol%水溶液
相対屈折率:1.10
透過率:70〜90%
循環速度:7
超音波時間:3分
超音波強度:7
(2)比表面積
測定装置:ユアサアイオニクス株式会社製流動法BET一点法比表面積測定装置モノソーブ
キャリアガス:窒素/ヘリウム混合ガス1.5kg/cm、窒素ガス0.7kg/cm
試料脱気条件:200℃/30分

Figure 2006002041
(一般式(I)で、nは0又は正の整数を表す。ベンゼン環の水素は炭化水素基で置換されていても良い。) Examples 1-9 and Comparative Examples 1-8
As the epoxy resin of component (A), an ortho-cresol novolak type epoxy resin having an epoxy equivalent of 200 and a softening point of 60 ° C. (epoxy resin 1, trade name EPICLON N500P-1 manufactured by Dainippon Ink and Chemicals, Inc.), an epoxy equivalent of 196, a melting point 106 ° C. biphenyl type epoxy resin (epoxy resin 2, Japan Epoxy Resin Co., Ltd. trade name Epicoat YX-4000H),
As a curing agent for component (B), a biphenyl aralkyl type phenolic resin (curing agent 1, curing agent Meiwa Kasei Co., Ltd.) having a hydroxyl group equivalent of 200, a softening point of 65 ° C., and the side chain of the benzene ring is all hydrogen in the following general formula (I) Company product name MEH-7851), hydroxyl group equivalent 175, softening point 70 ° C phenol aralkyl resin (comparative curing agent 1, Mitsui Chemicals product name Millex XL-225), hydroxyl group equivalent 185, softening point 67 ° C β-naphthol / aralkyl resin (comparative curing agent 2, Nippon Steel Chemical Co., Ltd., trade name SN-170L),
As component (C), fused spherical silica (trade name FB-950, manufactured by Denki Kagaku Kogyo Co., Ltd.) having an average particle size of 25 μm and a specific surface area of 1.5 m 2 / g, an average particle size of 20 μm and a specific surface area of 3.3 m 2 / g 5 / of fused spherical silica (trade name S-COX31 manufactured by Micron Co., Ltd.) and synthetic spherical silica (trade name SO-25R, manufactured by Admatex Co., Ltd.) having an average particle size of 0.5 μm and a specific surface area of 6.5 m 2 / g. 4/1 (weight ratio) mixture (silica 1),
Similarly 2/7/1 mixed product (silica 2),
Fused spherical silica (trade name MSR-2212 manufactured by Tatsumori Co., Ltd.) having a mean particle size of 20 μm and a specific surface area of 3.5 m 2 / g, and a 5/4/1 mixture of the SO-25R (silica) 3),
Similarly 2/7/1 mixed product (silica 4),
7/2/1 mixing of FB-950 with crushed silica (trade name F-205, manufactured by Fukushima Ceramics Co., Ltd.) having an average particle size of 5.0 μm and a specific surface area of 6.0 m 2 / g, and SO-25R Product (silica 5),
Spherical silica having an average particle size of 20 μm and a specific surface area of 1.6 m 2 / g (trade name S-125 manufactured by Micron Co., Ltd.), and a 9/1 mixed product with the SO-25R (silica 6),
(C) 9/1 mixed product of S-COX31 and SO-25R (comparative silica 1), 9/1 mixed product of MSR-2212 and SO-25R (comparative silica 2) as comparative components of component (C),
As component (D), triphenylphosphine (curing accelerator 1), adduct of triphenylphosphine and p-benzoquinone (curing accelerator 2), 1,8-diazabicyclo (5,4,0) undecene-7 (DBU, Curing accelerator 3),
Tables 1 and 2 show γ-glycidoxypropyltriethoxysilane as a coupling agent, oxidized polyethylene wax as a release agent, and carbon black (trade name MA-100 manufactured by Mitsubishi Chemical Corporation) as a colorant, respectively. Blended in parts by weight, roll kneading was carried out under conditions of a kneading temperature of 80 ° C. and a kneading time of 10 minutes to produce the epoxy resin molding materials for sealing of Examples and Comparative Examples. The average particle diameter and specific surface area of the component (C) were measured by the following methods.
(1) Average particle diameter measuring device: LA-920 manufactured by Horiba, Ltd.
Dispersion medium: Sodium hexametaphosphate 0.2 wt / vol% aqueous solution Relative refractive index: 1.10
Transmittance: 70-90%
Circulation speed: 7
Ultrasonic time: 3 minutes Ultrasonic intensity: 7
(2) Specific surface area measuring device: flow method BET single point method specific surface area measuring device monosorb manufactured by Yuasa Ionics Co., Ltd. Carrier gas: nitrogen / helium mixed gas 1.5 kg / cm 2 , nitrogen gas 0.7 kg / cm 2
Sample degassing conditions: 200 ° C./30 minutes
Figure 2006002041
(In general formula (I), n represents 0 or a positive integer. The hydrogen of the benzene ring may be substituted with a hydrocarbon group.)

配合組成

Figure 2006002041
Composition
Figure 2006002041

配合組成

Figure 2006002041
Composition
Figure 2006002041

作製した実施例及び比較例の封止用エポキシ樹脂成形材料を、次の各試験により評価した。評価結果を表3及び表4に示す。
なお、封止用エポキシ樹脂成形材料の成形は、トランスファ成形機により、金型温度180℃、成形圧力6.9MPa、硬化時間90秒の条件で行った。また、後硬化は175℃で6時間行った。
(1)燃焼性
94UL規格に従い、後硬化後の試験片厚み1/8inchでの試験を行い、燃焼性の判定を行った。
(2)耐熱性
SOP-28p(42Alloy リードフレーム)にTEG-ML1020チップ(Line/Space=20μm/20μm領域2ヶ所:1.90×4.20mm、Line/Space=10μm/10μm領域2ヶ所:1.90×4.20mm)を搭載し、リードフレームとチップとをφ20μmの金線により接続した。その後、作製した成形材料による封止を行い、後硬化の後、195℃環境中に1000時間放置した。各成形材料による作製パッケージN=10のうち、放置後の電気導通の有無を測定し、計4配線のうち、1配線でも導通不具合のあるパッケージをNGパッケージとしてカウントした。
(3)耐冷熱サイクル性
QFP1420×2.0mmt(EFTEC-64Tリードフレーム/フラットアイランド)にシリコンチップ(8×10mm/窒化珪素保護膜)を搭載した。ダイボンド材には日立化成工業(株)社製EN-4065Dを用いた。ダイボンド材の硬化条件は210℃/2分とした。成形材料による封止を行い、後硬化させた後、パッケージを液体窒素(−196℃)とシリコーンオイル(150℃)とに各2分間ずつ交互に浸す形での冷熱サイクル試験を行った。50サイクル後のパッケージを株式会社日立製作所製SATを用いて観察し、チップ剥離、リードフレーム剥離、パッケージクラックの有無を判定した。各成形材料による作製パッケージN=10のうち、剥離やクラック等の不具合の発生したパッケージをNGパッケージとしてカウントした。
The produced epoxy resin molding materials for sealing of Examples and Comparative Examples were evaluated by the following tests. The evaluation results are shown in Tables 3 and 4.
The epoxy resin molding material for sealing was molded by a transfer molding machine under conditions of a mold temperature of 180 ° C., a molding pressure of 6.9 MPa, and a curing time of 90 seconds. Further, post-curing was performed at 175 ° C. for 6 hours.
(1) Flammability According to 94UL standard, the test piece thickness after post-curing was tested at 1/8 inch to determine the flammability.
(2) Heat resistance TEG-ML1020 chip on SOP-28p (42Alloy lead frame) (Line / Space = 20 μm / 20 μm area 2 locations: 1.90 × 4.20 mm, Line / Space = 10 μm / 10 μm area 2 locations: 1 .90 × 4.20 mm), and the lead frame and the chip were connected by a gold wire of φ20 μm. Then, sealing with the produced molding material was performed, and after post-curing, it was left in an environment of 195 ° C. for 1000 hours. Of the manufactured packages N = 10 made of each molding material, the presence or absence of electrical continuity after being left was measured, and among the total of 4 wirings, the package having continuity failure even with one wiring was counted as an NG package.
(3) Cold and heat cycle resistance A silicon chip (8 × 10 mm / silicon nitride protective film) was mounted on QFP1420 × 2.0 mmt (EFTEC-64T lead frame / flat island). EN-4065D manufactured by Hitachi Chemical Co., Ltd. was used as the die bond material. The curing condition of the die bond material was 210 ° C./2 minutes. After sealing with a molding material and post-curing, a thermal cycle test was performed in which the package was alternately immersed in liquid nitrogen (-196 ° C.) and silicone oil (150 ° C.) for 2 minutes each. The package after 50 cycles was observed using SAT manufactured by Hitachi, Ltd., and the presence or absence of chip peeling, lead frame peeling, or package cracking was determined. Of the production packages N = 10 made of each molding material, the packages with defects such as peeling and cracking were counted as NG packages.

Figure 2006002041
Figure 2006002041

Figure 2006002041
Figure 2006002041

(B)成分として硬化剤1を含まない比較例1〜4は難燃性に劣り、(C)成分が規定より外れる比較例5〜8は難燃性、又は耐冷熱サイクル性のいずれかに劣る。
これに対し、(B)成分として硬化剤1及び(C1)成分を含む実施例1〜9は難燃性や耐熱性、耐冷熱サイクル性等に優れ、(C1)成分を(C)成分の30重量%以上含む実施例1、3、5、6の難燃性、(D)成分として有機リン系硬化促進剤を用いた実施例1〜8の耐熱性等の信頼性は特に優れることがわかる。

(B) Comparative Examples 1 to 4 not containing curing agent 1 as a component are inferior in flame retardancy, and Comparative Examples 5 to 8 in which component (C) deviates from the specifications are either flame retardant or cold cycle resistance. Inferior.
On the other hand, Examples 1 to 9 containing the curing agent 1 and the (C1) component as the (B) component are excellent in flame retardancy, heat resistance, cold cycle resistance, and the like. The flame retardancy of Examples 1, 3, 5 and 6 containing 30% by weight or more, and the heat resistance and the like of Examples 1 to 8 using an organophosphorus curing accelerator as the component (D) are particularly excellent. Recognize.

Claims (6)

(A)エポキシ樹脂、(B)下記一般式(I)で表される化合物を含む硬化剤、(C)無機質充填剤を含有し、該(C)成分が、成形材料全体の70重量%以上88重量%以下で、かつ、少なくとも1種成分の比表面積が2.0m2/g以下である封止用エポキシ樹脂成形材料。
Figure 2006002041
(一般式(I)で、nは0又は正の整数を表す。ベンゼン環の水素は炭化水素基で置換されていても良い。)
(A) an epoxy resin, (B) a curing agent containing a compound represented by the following general formula (I), (C) an inorganic filler, and the component (C) is 70% by weight or more of the entire molding material An epoxy resin molding material for sealing which is 88% by weight or less and the specific surface area of at least one component is 2.0 m 2 / g or less.
Figure 2006002041
(In general formula (I), n represents 0 or a positive integer. The hydrogen of the benzene ring may be substituted with a hydrocarbon group.)
(C)成分のうち、比表面積が2.0m2/g以下である成分が結晶シリカ、溶融シリカ及び合成シリカの内の少なくとも一つを含む請求項1に記載の封止用エポキシ樹脂成形材料。 The epoxy resin molding material for sealing according to claim 1, wherein the component having a specific surface area of 2.0 m 2 / g or less among the component (C) includes at least one of crystalline silica, fused silica and synthetic silica. . (C)成分のうち、比表面積が2.0m2/g以下である成分が、(C)成分全体の30重量%以上である請求項2に記載の封止用エポキシ樹脂成形材料。 3. The epoxy resin molding material for sealing according to claim 2, wherein a component having a specific surface area of 2.0 m 2 / g or less among the component (C) is 30% by weight or more of the total component (C). ハロゲン系難燃剤及びアンチモン系難燃剤を含有しない請求項1〜3のいずれかに記載の封止用エポキシ樹脂成形材料。   The epoxy resin molding material for sealing according to any one of claims 1 to 3, which does not contain a halogen flame retardant and an antimony flame retardant. (D)硬化促進剤を含み、該硬化促進剤に有機リン系化合物を含有する請求項1〜4のいずれかに記載の封止用エポキシ樹脂成形材料。   (D) The epoxy resin molding material for sealing according to any one of claims 1 to 4, comprising a curing accelerator, wherein the curing accelerator contains an organic phosphorus compound. 請求項1〜5のいずれかに記載の封止用エポキシ樹脂成形材料により封止された素子を備えた電子部品装置。

The electronic component apparatus provided with the element sealed with the epoxy resin molding material for sealing in any one of Claims 1-5.

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010093036A (en) * 2008-10-08 2010-04-22 Sumitomo Electric Ind Ltd Superconducting coil, superconducting magnet, epoxy resin varnish and method for manufacturing them

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010093036A (en) * 2008-10-08 2010-04-22 Sumitomo Electric Ind Ltd Superconducting coil, superconducting magnet, epoxy resin varnish and method for manufacturing them

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