JP2005349377A - Washing and drying method, and washing and drying apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for washing and drying electric parts, precise mechanical parts, in particular drill hole inside and screw hole inside thereof, and a method and an apparatus for washing substrates of polarizing plates and module boards. <P>SOLUTION: Jetting ports of two air nozzles are facingly disposed, an exhaust duct is set at an approximately central position between the two air nozzles, the duct having an exhausting function at an upper part, an enclosure is provided to prevent dispersion of air flowing between the jetting ports and the exhaust duct to the surrounding, to wash and dry by suction force generated between the approximately central position between the two air nozzles and the upper part of the exhaust nozzle. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a cleaning / drying method and a cleaning / drying apparatus for cleaning and drying mechanical / electrical parts, and a substrate cleaning method and a substrate cleaning apparatus such as a polarizing plate.

  Machine parts, especially precision machine parts, etc. are contaminated with oil, particles, etc., and products assembled using these contaminated parts adversely affect their quality. It is necessary to remove particles and maintain a clean state. Ultrasonic cleaning is performed using a cleaning agent, and rinsing is performed with pure water to remove particles adhering to these electric parts or machine parts, and degreasing cleaning is performed. After washing, the machine parts are put in an oven and dried, and a series of washing and drying steps is completed.

  In addition, contaminants adhere to the substrates such as polarizing plates and module plates, and these contaminants adversely affect the quality of the final product, so it is necessary to clean them and maintain them in a clean state. is there. This is mainly performed by air blow cleaning in which air is blown onto these substrates to remove contaminants such as particles.

JP2000-258057
The above document describes a drying method in which a part to be dried in a short time is dried while being rotated without generating a stain due to a rotating centrifugal force and a spiral air flow. This allows the surface of the part to dry, but not to the blind screw hole. JP-A-8-309299
The above document describes a method of cleaning by spraying a cleaning liquid onto a machine part having a rough surface and a complicated shape such as a machine part.

  However, when cleaning and drying machine parts, etc., there are various drill holes and screw holes in machine parts, and it is very difficult to clean and dry these so-called blind drill holes and screw holes that are not penetrated. In particular, it is difficult to clean and dry a hole having a smaller hole diameter and a deeper depth, and it has been an eternal problem to solve these problems. Conventionally, the inside of these drill holes and screw holes cannot be cleaned, and drying is performed by placing in an oven and heating for about 20 minutes. Therefore, the efficiency of cleaning and drying of these machine parts is poor, which is a great obstacle to productivity improvement.

  There are two reasons why it is difficult to clean the blind drill hole and screw hole. One is that air exists in the drill hole and the screw hole, and this air is difficult to escape from the screw hole and the like, and the cleaning liquid does not enter into the drill hole and the screw hole without being able to escape. Another reason is that the cleaning liquid itself has a surface tension, and this surface tension makes it difficult for the cleaning liquid to enter at the entrance of the drill hole and screw hole.

  Also, drying in the drill hole and screw hole cannot be removed by vacuum suction or air blow. The remaining cleaning liquid in the drill hole and screw hole cannot be removed, and it is heated and evaporated in a clean oven for 20 minutes. To make it dry.

However, this method requires a lot of time and labor for drying, and the productivity is not improved, and it is a big problem how to solve these problems.
Recent mechanical parts, especially precision machine parts used for hard disks, etc., have many drill holes and screw holes with small hole diameters, and contaminants of minute particles greatly affect product performance. Whether it should be cleaned and dried below was an eternal task.

  Also, personal computers, etc. use polarizing plates, module boards equipped with LSI, etc., and these substrates cannot be cleaned for the following reasons. It is.

  Both sides of the polarizing plate are attached with an adhesive and covered with a protective film, and when this is wet cleaned, the protective film peels off. Also, the module board is not suitable for wet cleaning because it is equipped with electronic parts such as LSI. In any case, it is difficult to clean with water or the like, and dry cleaning without using water or the like is desired.

Means for Solving the Problems and Effects of the Invention

In order to solve such a problem, the present invention employs the following means.
First, an air blow apparatus having the following configuration according to the present invention is used to perform cleaning and drying as a problem. The air outlets of at least two air nozzles are arranged to face each other, an exhaust duct is installed at a substantially central position between the at least two air nozzles, and the exhaust duct has an exhaust function above, and the air An enclosure is provided so that air flowing between the nozzle outlet and the exhaust duct does not diffuse around, and an aperture is provided in the vicinity of the central portion.

  By adopting such a configuration, most of the air ejected from the air nozzle is placed in the center between the two air nozzles by the enclosure provided so that the air flowing between the air nozzle ejection port and the exhaust duct does not diffuse around. A frontal collision occurs and a large pressure is generated at the center of both air nozzles. Since the upper part of the exhaust duct is exhausted, the upper part has a negative pressure, and a large pressure difference is generated between the front collision position and the upper part of the exhaust duct. As a result, a tornado phenomenon occurs at this position. Due to the force of this tornado, contaminants and moisture are peeled off by suction and can be washed and dried. Moreover, this enclosure is comprised by the shielding board, for example. This shielding plate is provided with an aperture at a substantially central position between the two air nozzles, and the air collided from the front is guided to the exhaust duct.

  The main point of the present invention described above is that at least two air nozzle outlets are arranged to face each other, and most of the air ejected from the air nozzle outlet collides at the approximate center between the at least two air nozzles. Thus, an enclosure is provided so that air does not diffuse around. With such a configuration, most of the air jetted from the air nozzle works effectively, sucks away moisture remaining in blind drill holes and screw holes of machine parts, and adheres to thin plate substrates such as polarizing plates. A force to peel off and remove contaminants is generated.

  Using a conveyor that transports machine parts or electrical parts after wet cleaning, this air blower is automatically transported by placing one or more of them facing each other up and down. The inside of the drill hole and screw hole can be dried. A plurality of air blow devices arranged to face each other in the vertical direction can be arranged to further improve the drying effect. Further, the mechanical parts and the like do not float upward due to the simultaneous suction action, and the inside of the drill holes and screw holes on the side surfaces of the mechanical parts and the like can be dried by the synergistic effect of the vertical suction. The drying effect can be further enhanced by ejecting warm air after preliminarily heating the air ejected from the ejection ports of the at least two air nozzles.

  By using a conveyor for transporting the thin plate substrate and arranging one or a plurality of air blow devices facing each other up and down, it is automatically transported, and the contaminants on both the front and back surfaces of the thin plate substrate can be peeled and removed.

  In addition, vacuuming is performed after mechanical parts or electrical parts are placed in a vacuum container, and air in the drill holes and screw holes of machine parts is removed by placing cleaning liquid in the vacuum container while maintaining the vacuum inside the vacuum container. Then, since the cleaning liquid is added, the cleaning liquid easily enters the drill holes and screw holes, so that the drill holes and screw holes can be cleaned.

  After evacuating the vacuum vessel after putting mechanical parts or electrical parts in the vacuum vessel, the cleaning solution is put in the vacuum vessel and pressurizing the vacuum vessel makes it difficult for the cleaning solution to enter the drill hole and screw hole. The cleaning liquid itself overcomes the surface tension of the cleaning liquid itself so that the cleaning liquid enters these holes.

Moreover, after putting a mechanical part or an electrical part in a vacuum vessel, and evacuating the vacuum vessel, a cleaning liquid is put in the vacuum vessel, and the inside of the vacuum vessel is set to 4 to 6 kg / cm ² . This level of pressure is sufficient to break the surface tension.

  After putting mechanical parts or electrical parts in a vacuum vessel, the vacuum vessel is evacuated, and then a cleaning solution is put in the vacuum vessel, and the inside of the vacuum vessel is repeatedly cleaned in a vacuum state and a pressurized state. By this method, the force for pushing the cleaning liquid into the drill hole and the screw hole is further increased.

Further, as a cleaning method, cleaning is performed by ultrasonic waves or ultrasonic vibrations. This ultrasonic cleaning or ultrasonic vibration cleaning is more appropriate for cleaning in the drill hole and screw hole, and exerts a force to scrape contaminants out of these holes.
Further, by putting a stirrer in the vacuum container and stirring the cleaning liquid in the vacuum container, the contaminants drifting on the drill hole and the screw hole are diffused to enhance the cleaning effect. Note that this vacuum vessel may be applied to both vacuum and pressurization because the inside of the vessel may be in a pressurized state.

Embodiments of the present invention will be described in detail with reference to the drawings as appropriate.
FIG. 1 is a diagram showing a configuration of an air blow device according to the present invention. In FIG. 1, an object 2 such as a machine part to be dried or a thin plate substrate is placed on a belt conveyor 1. An air blow device according to the present invention is arranged immediately above. The air ejected from the two air nozzles 3 of the air blower flows almost horizontally along the object 2 toward the center between the two air nozzles 3.

  At this time, the air ejected from the air nozzle 3 is not pulled into the exhaust pipe 7 immediately above by the shielding plate 4, and almost all of the air flows below the shielding plate 4 and between the two air nozzles 3. Head-on collision at the center of Therefore, a large pressure Pc is generated in this central portion (Bernoulli's theorem).

  This air passes through the aperture 5, rises in the exhaust duct 6, and is exhausted by the exhaust pipe 7. In the exhaust pipe 7, air is drawn by the exhaust fan, so that a negative pressure Pu is generated. Therefore, a large pressure difference (Pc) between the central portion where the air between the two air nozzles 3 collides head-on and the exhaust pipe 7. ) Pu) occurs, and a tornado phenomenon occurs between them. This tornado force generates a large suction force that lifts the object upward. With this suction force, moisture present in the screw holes of the machine parts can be removed, and contaminants on the thin plate substrate can be removed.

  FIG. 2 is a diagram showing an embodiment of a drying apparatus according to the present invention. In FIG. 2, an air blow device 8 is disposed so as to face the belt conveyor 1 vertically. Moreover, the air nozzle 3 is arrange | positioned facing the left and right across the exhaust duct 6. A basket 9 containing wet machine parts after wet cleaning is placed on the belt conveyor 1. The belt conveyor 1 moves from left to right in the direction of the arrow, and the basket 9 on the belt conveyor 1 also moves. When the basket 9 passes through the upper and lower air blow devices 8, the water adhering to the machine parts due to the tornado phenomenon generated in the air blow device 8, especially the water present in the drill holes and screw holes, is sucked and stored in the basket 9. The machine parts are dry.

  Since the peeling force due to the tornado phenomenon generated in the air blowing device 8 is very strong, even the water present in the blind screw hole of the machine part is scraped and completely dried. Moreover, since both the air blow devices 8 arranged opposite to each other cause a tornado at the same time, the synergistic effect improves the peeling force and increases the drying force. Further, if a plurality of air blow devices 8 arranged facing each other in order to increase the drying power are arranged side by side, the effect is further improved.

  In addition, water drops may be strongly scattered on the chips present in the blind screw hole, and in order to remove these, it is a powerful means to cause a tornado by sending warm air to the air nozzle 3 to some extent. It is. The warm air temperature is suitably 40 ° C to 100 ° C. If the electrical component or mechanical component is made of resin or other material that is vulnerable to heat, heated air of about 40 ° C. to 60 ° C. is used, and the belt conveyor speed is set to 0.8 m / min to 1.5 m / min. The machine parts in the basket 9 that the belt conveyor 1 moves and passes through the air blowing device 8 are not only on the surface but also in the blind screw holes, and the coils in which the motor coils are built in like the hard disk machine parts. Line gaps are also completely dry.

The objects to be cleaned and the results of the drying experiments are shown below.
Drying experiment (1) Drying object (1) Hard disk motor rotor (2) Hard disk case 2 inches (3) Hard disk case 3 1/2 inches

  Wet the motor rotor for hard disk (material; aluminum) with water, and in particular, observe the state after filling the water in the screw hole shown in Fig. 3 and drying the motor rotor for hard disk with a dryer. did. Under the conditions of this experiment, 80 to 90% are completely dry with no water droplets, but the remaining 10 to 20% have slight water droplets as shown in FIG. However, when warm air of about 60 ° C. is sent to the air nozzle 3, almost no water droplets remain and the air nozzle 3 is dry. It seems that these remaining water droplets were evaporated and dried by hot air.

  FIG. 5 is a diagram showing an embodiment of a cleaning apparatus for a thin substrate 10 according to the present invention. Here, the thin plate substrate 10 includes, for example, a module plate, a polarizing plate, and the like. The thin plate substrate 10 may be contaminated in the manufacturing process. Since the protective sheet is affixed by this, a thread piece or the like may be further adhered at that time.

  In FIG. 5, the arrangement of the air blowing device 8 and the air nozzle 3 and the installation of the belt conveyor 1 and the tornado phenomenon that occurs in the air blowing device 8 are the same as those in the drying device of FIG. . When the thin plate substrate 10 placed on the belt conveyor 1 passes through the air blowing device 8, contaminants such as dust on the thin plate substrate 10 and thread pieces attached to the polarizing plate are also caused by the strong peeling force by the tornado. It is cleaned by peeling off.

吹出量（給気量）と吸込量（排気量）は、ほぼ同一で給気エアーが有効に使用されていることが分かる。The conditions for the thin plate substrate cleaning experiment according to the present invention are shown below.

It can be seen that the blowout amount (supply amount) and the suction amount (exhaust amount) are substantially the same, and the supply air is effectively used.

  Here, the principle of cleaning or drying according to the present invention will be described together with reference to FIG. In FIG. 6, the jet flow from the air nozzles 2 on both sides flows toward the center of the air blow device 8. Here, the entirety of FIG. 6 represents the air blowing device 8. At this time, a shielding plate 4 is provided to increase the probability that the jet flow from the air nozzle 3 collides frontally at the center.

  The shielding plate 4 prevents the jet flow from the air nozzle 3 from being sucked upward before colliding with the central portion, and the jet flow from the majority of the air nozzles 3 collides with the central portion. It collides at this position and the velocity of the jet flow becomes 0, and a large pressure Pc is generated at the center. Since the upper part is exhausted, a negative pressure Pu is generated, and a relatively large pressure difference Pu << Pc is generated between Pc and Pu. From the lower part of the exhaust duct 6 to the upper part in the central part of the air blowing device 8. A tornado phenomenon occurs in the tornado generation area 11. An aperture 5 is provided on the shielding plate 4 in the vicinity of the central portion.

  This tornado phenomenon has a great effect on the separation of moisture, dust and the like. In addition, an aperture 5 is opened on the shielding plate 4 at the center of the air blow device 8, and the air passes through the aperture 5 from the center where the jet flow from the air nozzle 3 collides and enters the exhaust duct 6. .

That is, air coming from both sides collides with each other at this portion, and an ascending air current is generated. Moisture, dust, etc. are swung upward and sucked into the exhaust pipe 7 (suction nozzle).
The air velocity of the air flowing into the shielding plate 4 due to the air collision is extremely reduced and the pressure is increased. A large pressure difference is generated by the suction on the upper side, and dust is sucked upward. This phenomenon is supported by Bernoulli's theorem. According to Bernoulli's theorem, the higher the fluid velocity, the smaller the fluid pressure. Conversely, the slower the fluid velocity, the greater the pressure from the fluid.
Therefore, when the air ejected from both air nozzles 3 collides front, the flow velocity of the air becomes 0, and the pressure increases accordingly.

FIG. 7 shows an embodiment of a machine parts cleaning apparatus according to the present invention. FIG. 8 shows a flow of a cleaning method for machine parts, which will be described in order.
The basket 9 containing the machine parts to be cleaned is placed on the support base 14 in the vacuum vessel 13. At this time, the vacuum vessel 13 is still in the atmospheric state. Next, the vacuum chamber 17 is evacuated by the vacuum pump 17. The vacuum pump 17 is a rotary pump and pulls the inside of the vacuum device 13 to about 1 to 3 × 10 ⁻³ torr. At this point, almost all of the air in the screw holes of the machine parts escapes, so that the cleaning liquid easily enters the screw holes.

Under this state, the cleaning liquid in the storage tank 15 is sent into the vacuum container 13 by the cleaning liquid supply pump 16. However, since the cleaning liquid has surface tension as described above, the cleaning liquid may still be prevented from entering at the screw hole entrance. Therefore, the inside of the vacuum vessel 13 is once returned from the vacuum state to the atmosphere, and further pressurized by the accumulator 20 to about 5 to 6 kg / cm ² . This pressure overcomes the force that the cleaning liquid eliminates the surface tension of the cleaning liquid, and the cleaning liquid enters the screw hole. Then, if ultrasonic cleaning is performed by the ultrasonic oscillator 18 attached to the vacuum vessel 13, it is possible to clean the inside of the screw hole, which has been conventionally difficult. The accumulator 20 is always maintained at a constant pressure by the compressor 19.

  If the ultrasonic oscillator 18 is used instead of the ultrasonic oscillator 18 or the ultrasonic oscillator 18 is used for cleaning, the screw hole, which has been conventionally difficult, can be cleaned. The accumulator 20 is always maintained at a constant pressure by the compressor 19. The super-vibration agitator transmits vibration generated at low frequency output of 15 to 50 Hz to multistage vibrating blades (various materials), and agitation based on high-speed three-dimensional turbulent flow of fluid generated by the vibration. Machine.

Furthermore, if the ultrasonic cleaning is performed while alternately repeating the vacuum container 13 in a vacuum state and a pressurized state of 5 to 6 kg / cm ^{2 over} a certain period of time, the cleaning liquid itself is shaken, so that the cleaning liquid is more It becomes easy to enter the screw hole, and the cleaning effect is further enhanced. Further, if the flow of the cleaning liquid is caused in the vacuum vessel 13 by the stirrer 22, the contaminants in the vicinity of the screw hole are diffused and scattered, so that the possibility of entering the screw hole again is reduced. Further, after the cleaning is completed, the cleaning liquid is discharged through the drainage pipe 23.

    This machine parts drying device is a device that dries precision machine parts such as hard disks at high speed after wet cleaning. Especially, the cleaning liquid (chemical solution, pure water, etc.) remaining in blind drill holes, blind screw holes, etc. It is a device for removing and drying.

  In general, the smaller the hole diameter of these blind drill holes and blind screw holes and the deeper the hole depth, the more difficult it is to remove the cleaning liquid (chemical solution, pure water, etc.). The method made it possible to remove them. Moreover, the peeling force of the contaminants on the thin plate substrate such as a polarizing plate can be increased, and the cleaning efficiency can be improved. Further, in the blind drill hole and the blind screw hole, the blind drill hole and the blind screw hole can be cleaned by repeating the air venting and vacuum-pressurization operation in these holes.

The figure which shows the structure of the air blow unit by this invention. The figure which shows embodiment of the drying apparatus by this invention. Sectional drawing of the blind screw hole opened to machine parts. The figure which shows the dry state in a blind screw hole (state in which the water droplet remained slightly). An air blow device for cleaning a substrate according to the present invention. The figure which shows the principle of the air blow washing | cleaning and drying by this invention. The wet cleaning apparatus according to the present invention. The figure which shows the washing | cleaning process of the wet washing by this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Belt conveyor 2 Object 3 Air nozzle 4 Shielding plate 5 Aperture 6 Exhaust duct 7 Exhaust pipe 8 Air blow device 9 Basket 10 Thin board 11 Tornado generation area 12 Air passage 13 Vacuum vessel 14 Support stand 15 Storage tank 16 Cleaning liquid supply pump 17 Vacuum pump 18 Ultrasonic oscillator 19 Compressor 20 Accumulator 21 Super vibration stirrer 22 Stirrer 23 Drain pipe

Claims (13)

  At least two air nozzles are arranged to face each other, an exhaust duct is installed at a substantially central position between the two air nozzles, and the exhaust duct has an exhaust function upward, and the air nozzle An air blow device provided with an enclosure so that the air flowing between the air outlet and the exhaust duct is not diffused to the surroundings, and the enclosure is provided with an aperture near the center.   The air outlets of the at least two air nozzles are arranged so as to face each other, and the air diffuses to the surroundings so that most of the air ejected from the air nozzles collides at the approximate center between the two air nozzles. An air blow device in which an enclosure is provided so as not to occur, and an aperture is provided in the enclosure near the center.   3. A drying method comprising drying a mechanical part or an electric part after wet cleaning by a suction force generated by the air blowing device according to claim 1 or 2.   A drying apparatus for mechanical parts or electrical parts, in which a conveyor for transporting mechanical parts or electrical parts after wet cleaning and one or a plurality of air blow devices opposed to each other in the vertical direction are arranged.   The drying apparatus according to claim 4, wherein warm air is jetted after preliminarily heating the air jetted from the jet ports of the at least two air nozzles.   A cleaning method for removing contaminants on a thin plate substrate by a suction force generated by the air blowing device according to claim 1 or 2.   A cleaning apparatus for a thin substrate, wherein the conveyor for transporting the thin substrate and the air blow device according to claim 1 or 2 are arranged to face each other vertically.   A cleaning method in which vacuuming is performed after mechanical parts or electrical parts are put in a vacuum container, and cleaning is performed by putting a cleaning liquid in the vacuum container while maintaining the vacuum inside the vacuum container.   A cleaning method in which a mechanical part or an electrical part is placed in a vacuum container and then the vacuum container is evacuated, and then a cleaning liquid is placed in the vacuum container and the inside of the vacuum container is pressurized to perform cleaning. The cleaning method according to claim 9, wherein mechanical parts or electric parts are placed in a vacuum container and then the vacuum container is evacuated, then a cleaning liquid is placed in the vacuum container, and the inside of the vacuum container is set to 4 to 6 kg / cm ^2. .   A cleaning method in which, after putting a machine or an electrical part in a vacuum vessel, the vacuum vessel is evacuated, then a cleaning liquid is put in the vacuum vessel, and the inside of the vacuum vessel is repeatedly cleaned in a vacuum state and a pressurized state.   The cleaning method according to claim 8, 9, 10, or 11, wherein the cleaning is performed by ultrasonic waves or ultrasonic vibrations.   The cleaning method according to claim 8, 9, 10, 11, or 12, wherein a stirrer is placed in the vacuum container and the cleaning liquid in the vacuum container is stirred.

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