JP2005347337A - Solid-state imaging device storage package and its manufacturing method - Google Patents

Solid-state imaging device storage package and its manufacturing method Download PDF

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JP2005347337A
JP2005347337A JP2004162353A JP2004162353A JP2005347337A JP 2005347337 A JP2005347337 A JP 2005347337A JP 2004162353 A JP2004162353 A JP 2004162353A JP 2004162353 A JP2004162353 A JP 2004162353A JP 2005347337 A JP2005347337 A JP 2005347337A
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solid
frame
state image
printed circuit
circuit board
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JP4453447B2 (en
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Kiwamu Shibata
究 柴田
Masaya Hirata
雅也 平田
Yoshitake Shimada
佳武 島田
Osamu Watanabe
治 渡辺
Makoto Sato
信 佐藤
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Panasonic Electric Works Co Ltd
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Matsushita Electric Works Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/44Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001Core members of the connector
    • H01L2224/45099Material
    • H01L2224/451Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144Gold (Au) as principal constituent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched

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  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Studio Devices (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a solid-state imaging device storage package which can be manufactured at a low cost while improving the reliability in image quality, and also to provide its manufacturing method. <P>SOLUTION: A frame 2 is formed of a thermoplastic resin having a water absorption property such as polyamide and polyphthalamide, and consists of a nearly rectangular frame 20 and a nearly rectangular opening 2b formed in a top face 2a extended from the outer edge of the frame 20 as an integral body thereof. The lower surface side of the frame 20 is airtightly joined to a printed board 1 by a thermosetting adhesive such an epoxy resin. On the upper surface side of the opening 2b, a lid 3 consisting of a transparent glass plate, etc. is airtightly joined to the top face 2a by a thermosetting adhesive such as an epoxy resin, with the lid 3 covering the opening 2b. The opening 2b is formed in a direction of the field of view of the solid-state imaging device 5 in order not to interrupt the field of view. An electrode of the solid-state imaging device 5 is electrically connected to a terminal 1b via bonding wires 6 such as gold wires. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、固体撮像素子収納パッケージ、および固体撮像素子収納パッケージの製造方法に関するものである。   The present invention relates to a solid-state image sensor housing package and a method for manufacturing the solid-state image sensor housing package.

従来、固体撮像素子を収容するための固体撮像素子収納パッケージ、特に廉価な固体撮像素子収納パッケージは一般に、リードフレームとエポキシ樹脂とを用いたプリモールドパッケージ構造から成り、図13に示すように、上面に固体撮像素子103を収容するための凹部101aを有する絶縁基体101と、絶縁基体101の凹部101a内側から外側にかけて導出するリードフレームからなる複数個のリード端子105と、絶縁基体101の上面に封止材を介して取着され、絶縁基体101の凹部101aを塞ぐ蓋体102とから構成されており、絶縁基体101の凹部101a底面に固体撮像素子103を樹脂接着剤を介して取着するとともに固体撮像素子103の各電極を外部リード端子105の一端にボンディングワイヤ106を介して電気的に接続し、しかる後、絶縁基体101の上面に蓋体102を樹脂封止材を介して接合させ、固体撮像素子103を絶縁基体101と蓋体102とから成る容器104内部に気密に封止することによって最終製品としての固体撮像装置となる。   Conventionally, a solid-state image pickup device storage package for storing a solid-state image pickup device, in particular, an inexpensive solid-state image pickup device storage package generally includes a pre-molded package structure using a lead frame and an epoxy resin, as shown in FIG. An insulating base 101 having a recess 101 a for accommodating the solid-state imaging element 103 on the upper surface, a plurality of lead terminals 105 made of lead frames extending from the inner side to the outer side of the concave part 101 a of the insulating base 101, and an upper surface of the insulating base 101 The lid 102 is attached via a sealing material and closes the recess 101a of the insulating base 101. The solid-state image sensor 103 is attached to the bottom surface of the recess 101a of the insulating base 101 via a resin adhesive. At the same time, each electrode of the solid-state image sensor 103 is bonded to one end of the external lead terminal 105 with a bonding wire 106. After that, the lid 102 is joined to the upper surface of the insulating base 101 via a resin sealing material, and the solid-state imaging device 103 is placed inside the container 104 composed of the insulating base 101 and the lid 102. By sealing hermetically, a solid-state imaging device as a final product is obtained.

この従来の固体撮像素子収納パッケージにおいては、絶縁基体101がエポキシ樹脂から成り、該エポキシ樹脂は耐湿性に劣るため絶縁基体101と蓋体102とから成る容器104内部に固体撮像素子103を気密に収容した後、大気中に含まれる水分が絶縁基体101を通して固体撮像素子103が収容されている凹部101a内に入り込み易く、凹部101a内に水分が入り込むと固体撮像素子103の電極やボンディングワイヤ106等に酸化腐食が発生し、電極やボンディングワイヤ106に断線が発生して固体撮像装置としての機能が喪失するという欠点を有していた。   In this conventional solid-state image pickup device storage package, the insulating base 101 is made of an epoxy resin, and the epoxy resin is inferior in moisture resistance, so that the solid-state image pickup device 103 is hermetically sealed inside the container 104 composed of the insulating base 101 and the lid 102. After the housing, moisture contained in the atmosphere easily enters the recess 101a in which the solid-state image sensor 103 is housed through the insulating substrate 101. Oxidation corrosion occurs, and the electrode and the bonding wire 106 are disconnected, resulting in a loss of function as a solid-state imaging device.

また、蓋体102がガラス等の透明部材から成るために、容器104内部に水分が入り込み、滞留すると蓋体102に結露によるくもりが発生し、撮像画像に欠陥が生じるという欠点も有する。   In addition, since the lid body 102 is made of a transparent member such as glass, when moisture enters and stays inside the container 104, the lid body 102 is clouded due to condensation, resulting in a defect in the captured image.

そこで従来は上記問題を解決するために、プリモールドパッケージ構造の絶縁基体101中に吸湿材を含有させることによって水分が容器104内部に入り込まないようにしていた。(例えば、特許文献1参照)。
特許第2750254号公報
Therefore, conventionally, in order to solve the above problem, moisture is prevented from entering the inside of the container 104 by incorporating a hygroscopic material into the insulating substrate 101 of the pre-mold package structure. (For example, refer to Patent Document 1).
Japanese Patent No. 2750254

しかし、上記従来例では、絶縁基体101と蓋体102との接合部が、容器104の側面に一周に亘って形成されており、該接合部から水分が入り込みやすくなっていた。さらに、温度変化時には凹部101a内の空気が膨張し、この膨張空気による圧力が蓋体102に加わり、気密性が低下し、パッケージ内へ水分、粉塵が侵入していた。また、絶縁基体101と蓋体102との接合部に発生するうねり等によっても気密性が低下していた。   However, in the above-described conventional example, the joint portion between the insulating base 101 and the lid body 102 is formed over the side surface of the container 104, and moisture easily enters from the joint portion. Furthermore, when the temperature changes, the air in the recess 101a expands, and the pressure due to the expanded air is applied to the lid 102, airtightness is reduced, and moisture and dust have entered the package. Further, the airtightness was also lowered by the undulation generated at the joint between the insulating base 101 and the lid 102.

さらに、絶縁基体101の材料としてエポキシ樹脂等の熱硬化性樹脂を用いた場合、熱硬化性樹脂に吸湿材を含有させるとバリの発生が多く、このバリが固体撮像素子103表面に付着すると、撮像画像に黒点等が入るという不具合が発生していた。   Furthermore, when a thermosetting resin such as an epoxy resin is used as the material of the insulating substrate 101, if a moisture absorbing material is included in the thermosetting resin, burrs are often generated, and when these burrs adhere to the surface of the solid-state imaging element 103, There was a problem that black spots or the like were included in the captured image.

そして、絶縁基体101と蓋体102との接合部からパッケージ内への水分の侵入、気密性の低下によるパッケージ内への水分、粉塵の侵入、熱硬化性樹脂のバリの発生は、映像品質の信頼性を低下させていた。   Then, the intrusion of moisture into the package from the joint between the insulating base 101 and the lid 102, the penetration of moisture, dust, and burr of the thermosetting resin due to the deterioration of the airtightness, Reliability was reduced.

また、上記プリモールドパッケージ構造の固体撮像素子収納パッケージは、リードフレームと樹脂との同時成形が必要であり、そのため金型のコストが高く、また、各種仕様の固体撮像素子毎に金型を製造する必要があり、コストが高いものになっていた。さらに、バリ取りの工程が必要であり、工程数の増加による製造コストの上昇もあった。さらに、熱硬化性樹脂を成形する金型は摩耗が早いので、メンテナンスに要するコストも高くなっていた。   Also, the solid-state image sensor housing package with the above pre-mold package structure requires simultaneous molding of the lead frame and the resin, so that the cost of the mold is high, and the mold is manufactured for each solid-state image sensor of various specifications. It was necessary to do so, and the cost was high. Furthermore, a deburring process is required, and the manufacturing cost is increased due to an increase in the number of processes. Furthermore, since the mold for molding the thermosetting resin wears quickly, the cost required for maintenance is high.

本発明は、上記事由に鑑みてなされたものであり、その目的は、映像品質の信頼性を向上させて、低コストで製造できる固体撮像素子収納パッケージ、および固体撮像素子収納パッケージの製造方法を提供することにある。   The present invention has been made in view of the above-described reasons, and an object of the present invention is to provide a solid-state imaging device storage package that can be manufactured at low cost by improving the reliability of video quality, and a method for manufacturing the solid-state imaging device storage package. It is to provide.

請求項1の発明は、固体撮像素子を実装し固体撮像素子の電極に電気的に接続される端子を形成したプリント基板と、プリント基板に気密接合して固体撮像素子を収容し固体撮像素子の視野方向に開口部を形成した熱可塑性樹脂からなる枠体と、前記開口部に覆設する透明な蓋体とを備え、前記開口部は前記枠体の外縁から枠内に延設された面内に形成され、前記蓋体は該面に気密接合することを特徴とする。   According to a first aspect of the present invention, there is provided a printed circuit board on which a solid-state image sensor is mounted and a terminal electrically connected to an electrode of the solid-state image sensor is formed; A surface made of a thermoplastic resin having an opening in the viewing direction, and a transparent lid that covers the opening, and the opening extends from the outer edge of the frame into the frame. The lid body is hermetically bonded to the surface.

この発明によれば、蓋体が覆設する開口部の面積が小さくなるので、枠体と蓋体との接合部から水分が侵入しにくくなるとともに、温度変化時に生じるパッケージ内の膨張空気による圧力も低下し、さらに枠体と蓋体との接合部に発生するうねりも小さくなって、パッケージの気密性が向上して、映像品質の信頼性を向上させることができる。また、従来のようにリードフレームと樹脂との同時成形用の高価な金型を必要とせず、低コストに製造でき、また、プリント基板のパターンを変更することで、各種仕様の固体撮像素子に対してもフレキシブル且つ低コストに対応できる。さらに、熱可塑性樹脂を用いることで、バリ取りの工程が不要となり、金型の摩耗速度も遅くなり、また蓋体にガラスを用いる場合は、開口部の面積が小さいので高価なガラスの使用を削減でき、さらなるコスト低減を図ることができる。   According to the present invention, since the area of the opening covered by the lid is reduced, it is difficult for moisture to enter from the joint between the frame and the lid, and the pressure due to the expanded air in the package that occurs when the temperature changes In addition, the undulation generated at the joint between the frame and the lid is also reduced, the airtightness of the package is improved, and the reliability of the video quality can be improved. In addition, it does not require an expensive metal mold for simultaneous molding of the lead frame and resin as in the past, and can be manufactured at low cost, and by changing the pattern of the printed circuit board, it can be used for solid-state imaging devices of various specifications. Also, it can be flexible and low cost. Furthermore, by using a thermoplastic resin, the deburring process is unnecessary, the wear rate of the mold is also slowed down, and when glass is used for the lid, the opening area is small, so expensive glass should be used. The cost can be reduced and further cost reduction can be achieved.

請求項2の発明は、請求項1において、前記枠体は、前記開口部に覆設した蓋体を囲むように外側に向かって突出した壁部を形成することを特徴とする。   A second aspect of the present invention is characterized in that, in the first aspect, the frame body is formed with a wall portion projecting outward so as to surround the lid body covering the opening portion.

この発明によれば、蓋体は壁部によって周囲を囲まれてその表面を保護されており、製造時に他の物体との接触によって蓋体の表面に傷が生じて撮像画像に欠陥が生じる可能性が低減するので、映像品質の信頼性を向上させることができる。また、製造時の不良が減るとともに取り扱いが容易となって検査時間を削減でき、低コストでの製造が可能になる。   According to the present invention, the cover is surrounded by the wall and the surface thereof is protected, and the surface of the cover is damaged by contact with other objects during manufacturing, and the captured image may be defective. Therefore, the reliability of video quality can be improved. In addition, defects during manufacturing are reduced, handling is facilitated, inspection time can be reduced, and manufacturing at low cost is possible.

請求項3の発明は、請求項1または2において、前記開口部は、固体撮像素子を収納した側に向かって広がるテーパー形状に形成されることを特徴とする。   According to a third aspect of the present invention, in the first or second aspect, the opening is formed in a tapered shape that expands toward the side in which the solid-state imaging device is accommodated.

この発明によれば、テーパー部を設けることによって、けられ、反射によるノイズ等の欠陥が固体撮像素子の撮像画像に生じないようにしながら、開口部の面積をできるだけ小さくでき、枠体と蓋体との間の気密の信頼性を大幅に向上させることができて、映像品質の信頼性を向上させることができる。また、蓋体にガラスを用いる場合は、高価なガラスの使用を削減でき、低コスト化を図ることができる。   According to the present invention, by providing the tapered portion, the area of the opening can be made as small as possible while preventing defects such as noise caused by reflection from occurring in the captured image of the solid-state imaging device, and the frame and lid The reliability of the airtightness between the image quality and the image quality can be greatly improved, and the reliability of the video quality can be improved. Moreover, when using glass for a cover body, use of expensive glass can be reduced and cost reduction can be achieved.

請求項4の発明は、請求項1乃至3いずれか記載の固体撮像素子収納パッケージの製造方法において、プリント基板は枠体との接合部より内側の部位にスルーホールを形成され、プリント基板と枠体および枠体と蓋体とを各々気密接合した後、半田によってスルーホールを気密封止することを特徴とする。   According to a fourth aspect of the present invention, in the method for manufacturing a solid-state image pickup device storage package according to any one of the first to third aspects, the printed circuit board has a through-hole formed in a portion inside the joint portion with the frame body. The through hole is hermetically sealed with solder after the body, the frame body, and the lid body are hermetically joined.

この発明によれば、プリント基板と枠体および枠体と蓋体とを各々気密接合するときに発生する膨張空気を、プリント基板に設けたスルーホールより逃がし、最後にスルーホールを密閉することで、気密接合時の膨張空気による接合部の欠陥発生を防止でき、安定した気密接合が可能になるので、映像品質の信頼性を向上させることができる。   According to the present invention, the expansion air generated when the printed circuit board and the frame body and the frame body and the lid body are each hermetically joined is released from the through hole provided in the printed circuit board, and finally the through hole is sealed. Further, it is possible to prevent the occurrence of defects in the joint portion due to the expanded air at the time of airtight joining, and stable airtight joining is possible, so that the reliability of video quality can be improved.

請求項5の発明は、請求項1乃至3いずれか記載の固体撮像素子収納パッケージの製造方法において、枠体は、固体撮像素子を収容した空間を外部に連続させる貫通孔を形成され、プリント基板と枠体および枠体と蓋体とを各々気密接合した後、熱融着によって貫通孔を気密封止することを特徴とする。   According to a fifth aspect of the present invention, in the method for manufacturing a solid-state image pickup device storage package according to any one of the first to third aspects, the frame is formed with a through-hole that continues the space containing the solid-state image pickup device to the outside. And the frame body and the frame body and the lid body are hermetically joined, and then the through hole is hermetically sealed by heat sealing.

この発明によれば、プリント基板と枠体および枠体と蓋体とを各々気密接合するときに発生する膨張空気を、枠体に設けた貫通孔より逃がし、最後に貫通孔を密閉することで、気密接合時の膨張空気による接合部の欠陥発生を防止でき、安定した気密接合が可能になるので、映像品質の信頼性を向上させることができる。   According to the present invention, the expansion air generated when the printed circuit board and the frame body and the frame body and the lid body are each hermetically joined is released from the through hole provided in the frame body, and finally the through hole is sealed. Further, it is possible to prevent the occurrence of defects in the joint portion due to the expanded air at the time of airtight joining, and stable airtight joining is possible, so that the reliability of video quality can be improved.

請求項6の発明は、請求項1乃至3いずれか記載の固体撮像素子収納パッケージの製造方法において、枠体は、プリント基板との接合面および蓋体との接合面にBステージ状の熱硬化性の接着剤層を各々形成しておき、枠体とプリント基板との気密接合と、枠体と蓋体との気密接合を同時に行うことを特徴とする。   A sixth aspect of the present invention is the method for manufacturing a solid-state imaging device storage package according to any one of the first to third aspects, wherein the frame is a B-stage thermoset on the joint surface with the printed circuit board and the joint surface with the lid. Each of the adhesive layers is formed, and airtight joining between the frame and the printed circuit board and airtight joining between the frame and the lid are performed simultaneously.

この発明によれば、Bステージ状の接着剤層の形状を設計、調整することによって、プリント基板と枠体および枠体と蓋体とを気密接合するときに発生する膨張空気の流通路を制御することが可能となり、気密接合時の膨張空気による接着剤層の欠陥を効率的に防止できて、安定した気密接合が可能となるので、映像品質の信頼性を向上させることができる。また、液体状接着剤を用いる場合に生じるダレや、接着剤量、面積のバラツキ等も抑制することができ、安定した製造が可能となる。さらに、プリント基板と枠体および枠体と蓋体を同時に気密接合するので、製造時間の短縮、およびそれに伴う低コスト化を図ることができる。   According to the present invention, the flow path of the expansion air generated when the printed circuit board and the frame and the frame and the lid are hermetically bonded is controlled by designing and adjusting the shape of the B-stage adhesive layer. This makes it possible to efficiently prevent defects in the adhesive layer due to the expanded air during hermetic joining and to achieve stable hermetic joining, thereby improving the reliability of video quality. In addition, sagging that occurs when a liquid adhesive is used, variation in the amount of adhesive, area variation, and the like can be suppressed, and stable production becomes possible. Furthermore, since the printed circuit board and the frame body and the frame body and the lid body are air-tightly joined at the same time, the manufacturing time can be shortened and the cost can be reduced accordingly.

請求項7の発明は、請求項1乃至3いずれか記載の固体撮像素子収納パッケージの製造方法において、少なくとも組立工程では、プリント基板の側縁を発塵しない物質で覆うことを特徴とする。   According to a seventh aspect of the present invention, in the method of manufacturing a solid-state imaging device storage package according to any one of the first to third aspects, the side edge of the printed circuit board is covered with a substance that does not generate dust at least in the assembly process.

この発明によれば、プリント基板の側縁の切断面からのガラス繊維や成形粉等の粉塵の発生を抑制するので、組立時にプリント基板より生じる粉塵が固体撮像素子の表面に付着して固体撮像素子の撮像画像に黒点等が入るという欠陥を防止でき、映像品質の信頼性を向上させることができる。   According to the present invention, since generation of dust such as glass fiber and molding powder from the cut surface of the side edge of the printed circuit board is suppressed, the dust generated from the printed circuit board at the time of assembly adheres to the surface of the solid-state image sensor and is solid-state imaged. It is possible to prevent defects such as black spots in the captured image of the element and improve the reliability of the video quality.

請求項8の発明は、請求項7において、少なくとも組立工程では、プリント基板の側縁に着脱自在であり且つ発塵しない物質で形成した治具でプリント基板の側縁を覆うことを特徴とする。   The invention of claim 8 is characterized in that, in at least the assembly step, the side edge of the printed board is covered with a jig that is detachable from the side edge of the printed board and formed of a material that does not generate dust. .

この発明によれば、プリント基板の側縁の切断面からのガラス繊維や成形粉等の粉塵の発生を抑制するので、組立時にプリント基板より生じる粉塵が固体撮像素子の表面に付着して固体撮像素子の撮像画像に黒点等が入るという欠陥を防止でき、映像品質の信頼性を向上させることができる。さらに、治具の再利用が可能であり、低コストで粉塵の発生を抑制することができる。   According to the present invention, since generation of dust such as glass fiber and molding powder from the cut surface of the side edge of the printed circuit board is suppressed, the dust generated from the printed circuit board at the time of assembly adheres to the surface of the solid-state image sensor and is solid-state imaged. It is possible to prevent defects such as black spots in the captured image of the element and improve the reliability of the video quality. Furthermore, the jig can be reused, and the generation of dust can be suppressed at low cost.

請求項9の発明は、請求項1乃至3いずれか記載の固体撮像素子収納パッケージの製造方法において、メッキを施したスルーホールをプリント基板に形成するとともに、枠体には前記スルーホールに嵌合する突起を形成し、プリント基板と枠体との位置決めは、前記突起を前記スルーホールに嵌合させることで行うことを特徴とする。   According to a ninth aspect of the present invention, in the method of manufacturing a solid-state image pickup device storage package according to any one of the first to third aspects, a plated through hole is formed in a printed circuit board, and a frame is fitted into the through hole. Protrusion to be formed is formed, and positioning of the printed board and the frame is performed by fitting the protrusion into the through hole.

この発明によれば、プリント基板と枠体との位置決め精度が向上するので、固体撮像素子と蓋体との位置精度が向上し、映像品質の信頼性を向上させることができるとともに、組立作業を短時間で高精度に行うことができる。また、スルーホールに施されたメッキにより、スルーホールからのガラス繊維や成形粉等の粉塵の発生を抑制できるので、映像品質の信頼性を向上させることができ、且つ製品不良の発生を防止している。   According to the present invention, since the positioning accuracy between the printed circuit board and the frame is improved, the positional accuracy between the solid-state imaging device and the lid is improved, the reliability of the image quality can be improved, and the assembling work can be performed. It can be performed with high accuracy in a short time. In addition, the plating applied to the through hole can suppress the generation of dust such as glass fiber and molding powder from the through hole, so that the reliability of video quality can be improved and the occurrence of product defects can be prevented. ing.

請求項10の発明は、請求項1乃至3いずれか記載の固体撮像素子収納パッケージの製造方法において、複数のプリント基板を一体に形成したプリント基板部上に複数の固体撮像素子を実装して、各固体撮像素子の電極を各端子に電気的に接続し、次にプリント基板部と複数の枠体を一体に形成した枠体部、および枠体部と枠体部全体を覆う蓋体部とを各々気密接合することで、各固体撮像素子を各枠体内に収容するとともに蓋体部を各枠体の開口部に覆設させ、次にプリント基板部と枠体部と蓋体部とを同時に切断して、各固体撮像素子収納パッケージに分離することを特徴とする。   The invention of claim 10 is the method of manufacturing a solid-state image pickup device storage package according to any one of claims 1 to 3, wherein a plurality of solid-state image pickup devices are mounted on a printed board portion integrally formed with a plurality of print boards. A frame part that electrically connects the electrodes of each solid-state imaging device to each terminal, and then integrally forms a printed circuit board part and a plurality of frames, and a cover part that covers the frame part and the entire frame part; Each solid-state image pickup element is housed in each frame, and the lid portion is covered with the opening of each frame, and then the printed circuit board portion, the frame portion, and the lid portion are It cut | disconnects simultaneously and isolate | separates into each solid-state image sensor storage package.

この発明によれば、部品コストおよび組立コストを大幅に低減することができる。   According to this invention, parts cost and assembly cost can be significantly reduced.

以上説明したように、本発明では、蓋体が覆設する開口部の面積が小さくなるので、枠体と蓋体との接合部から水分が侵入しにくくなるとともに、温度変化時に生じるパッケージ内の膨張空気による圧力も低下し、さらに枠体と蓋体との接合部に発生するうねりも小さくなって、パッケージの気密性が向上して、映像品質の信頼性を向上させることができるという効果がある。また、従来のようにリードフレームと樹脂との同時成形用の高価な金型を必要とせず、低コストに製造でき、また、プリント基板のパターンを変更することで、各種仕様の固体撮像素子に対してもフレキシブル且つ低コストに対応できる。さらに、熱可塑性樹脂を用いることで、バリ取りの工程が不要となり、金型の摩耗速度も遅くなり、また蓋体にガラスを用いる場合は、開口部の面積が小さいので高価なガラスの使用を削減できて、さらなるコスト低減を図ることができるという効果もある。   As described above, in the present invention, the area of the opening covered by the lid is reduced, so that moisture is less likely to enter from the joint between the frame and the lid, and the inside of the package that occurs when the temperature changes The pressure caused by the expanded air is also reduced, and the undulation generated at the joint between the frame and lid is reduced, improving the airtightness of the package and improving the reliability of the video quality. is there. In addition, it does not require an expensive metal mold for simultaneous molding of the lead frame and resin as in the past, and can be manufactured at low cost, and by changing the pattern of the printed circuit board, it can be used for solid-state imaging devices of various specifications. Also, it can be flexible and low cost. Furthermore, by using a thermoplastic resin, the deburring process is unnecessary, the wear rate of the mold is also slowed down, and when glass is used for the lid, the opening area is small, so expensive glass should be used. There is also an effect that the cost can be reduced and further cost reduction can be achieved.

以下、本発明の実施の形態を図面に基づいて説明する。   Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(実施形態1)
図1,図2(a)(b)は本発明の固体撮像素子収納用パッケージの一実施例を示すものであり、パッケージ4は、プリント基板1と、枠体2と、蓋体3とを備え、内部には固体撮像素子5が収容される。図3は、蓋体3を外したときの上面図を示す。
(Embodiment 1)
1, 2 (a) and 2 (b) show an embodiment of a solid-state image pickup device storage package according to the present invention. The package 4 includes a printed circuit board 1, a frame body 2, and a lid body 3. FIG. The solid-state image sensor 5 is accommodated inside. FIG. 3 shows a top view when the lid 3 is removed.

プリント基板1には固体撮像素子5が実装され、ダイボンディングによって接合されており、プリント基板1上には、固体撮像素子5の電極に金線等のボンディングワイヤ6を介して電気的に接続されるパターン1aが固体撮像素子5の電極形状に対応して形成され、プリント基板1の側縁には、外部に信号を出力するための端子1bが各パターン1aに連続して形成されている。端子1bは、プリント基板1に形成されたスルーホールにメッキを施し、スルーホールを略真中で略半円状に切断することによって形成される。   A solid-state imaging device 5 is mounted on the printed circuit board 1 and bonded by die bonding. The printed circuit board 1 is electrically connected to electrodes of the solid-state imaging device 5 via bonding wires 6 such as gold wires. A pattern 1a is formed corresponding to the electrode shape of the solid-state imaging device 5, and a terminal 1b for outputting a signal to the outside is formed on the side edge of the printed circuit board 1 continuously with each pattern 1a. The terminal 1b is formed by plating a through hole formed in the printed circuit board 1 and cutting the through hole into a substantially semicircular shape in the middle.

枠体2は、例えばポリアミド、ポリフタルアミド等の吸水特性を有する熱可塑性樹脂からなり、略矩形の枠部20と、枠部20の上面側を覆うように枠部20の外縁から一体に延設された天面2aと、天面2aの略中央に形成された略矩形の開口部2bとから構成されており、枠部20の下面側は、エポキシ樹脂等の熱硬化性の接着剤によってプリント基板1に気密接合され、枠部20、天面2aに囲まれて固体撮像素子5が収容される。開口部2bの上面側はエポキシ樹脂等の熱硬化性の接着剤によって蓋体3が天面2aに気密接合されて、蓋体3は開口部2bに覆設している。ここで開口部2bは、固体撮像素子5の視野を遮らないように視野方向に形成される。   The frame body 2 is made of a thermoplastic resin having water absorption characteristics such as polyamide and polyphthalamide, and extends integrally from the outer edge of the frame portion 20 so as to cover the substantially rectangular frame portion 20 and the upper surface side of the frame portion 20. The top surface 2a is provided and a substantially rectangular opening 2b formed substantially at the center of the top surface 2a. The lower surface side of the frame portion 20 is formed by a thermosetting adhesive such as an epoxy resin. Airtightly joined to the printed circuit board 1 and surrounded by the frame 20 and the top surface 2a, the solid-state imaging device 5 is accommodated. On the upper surface side of the opening 2b, the lid 3 is hermetically bonded to the top surface 2a by a thermosetting adhesive such as an epoxy resin, and the lid 3 covers the opening 2b. Here, the opening 2 b is formed in the visual field direction so as not to block the visual field of the solid-state imaging device 5.

このようにパッケージ4内部の空気は気密的に密閉されているため、パッケージ4の温度が変動したときには、その温度変動にしたがって蓋体3に力Fが生じる。この力Fは、温度変化による圧力変化に開口部2bの面積を乗じた値となるので、開口部2bの面積が小さい方が、力Fも小さくなる。しかし本実施形態では、天面2aに開口部2bを設けているので、開口部2bの面積を、枠部20の大きさに関わらず小さくできる。したがって、枠体2の天面2aと蓋体3との接合時に、天面2aと蓋体3との接着部のうねり等の表面状態の影響も受け難くなり、枠体2と蓋体3との間の気密の信頼性を大幅に向上させることができる。また、蓋体3が覆設する開口部2bの面積が小さくなるので、枠体2と蓋体3との接合部から水分が侵入しにくくなる。   Thus, since the air inside the package 4 is hermetically sealed, when the temperature of the package 4 fluctuates, a force F is generated in the lid 3 according to the temperature fluctuation. Since the force F is a value obtained by multiplying the pressure change due to the temperature change by the area of the opening 2b, the force F becomes smaller as the area of the opening 2b is smaller. However, in the present embodiment, since the opening 2b is provided on the top surface 2a, the area of the opening 2b can be reduced regardless of the size of the frame 20. Therefore, when the top surface 2a of the frame body 2 and the lid body 3 are joined, it is difficult to be affected by the surface state such as the undulation of the bonding portion between the top surface 2a and the lid body 3, and the frame body 2 and the lid body 3 The reliability of airtightness can be greatly improved. In addition, since the area of the opening 2b covered by the lid 3 is reduced, it is difficult for moisture to enter from the joint between the frame 2 and the lid 3.

また、この枠体2は、吸水率0.5〜5%の熱可塑性樹脂により構成されているので、プリント基板1に固体撮像素子5を実装後、プリント基板1と枠体2と蓋体3とを気密接合して構成されるパッケージ4内部に、大気中に含まれる水分が枠体2を通して入り込もうとしても、その水分は樹脂材料の吸水特性によって阻止され、その結果、パッケージ4内部に入り込む水分量は抑制され、さらにパッケージ4内部に入り込んだ水分も樹脂材料の吸水特性によって枠体2内部に吸水される。本実施形態では天面2aを設けているので、パッケージ4内における熱可塑性樹脂の表面積が増加し、吸水性はさらに向上している。したがって、パッケージ4内部に収容する固体撮像素子5の電極等に酸化腐食が発生することなく、固体撮像素子5を長期間にわたって、正常且つ安定に動作させることができる。   Further, since the frame body 2 is made of a thermoplastic resin having a water absorption rate of 0.5 to 5%, the printed circuit board 1, the frame body 2, and the lid body 3 are mounted after the solid-state imaging device 5 is mounted on the printed circuit board 1. Even if moisture contained in the atmosphere tries to enter through the frame body 2 into the package 4 configured by hermetically bonding the two, the moisture is blocked by the water absorption characteristics of the resin material, and as a result, enters the package 4. The amount of moisture is suppressed, and moisture that has entered the package 4 is also absorbed into the frame 2 by the water absorption characteristics of the resin material. In this embodiment, since the top surface 2a is provided, the surface area of the thermoplastic resin in the package 4 is increased, and the water absorption is further improved. Therefore, the solid-state imaging device 5 can be operated normally and stably over a long period of time without causing oxidative corrosion on the electrodes of the solid-state imaging device 5 accommodated in the package 4.

このように本実施形態では、蓋体3が覆設する開口部2bの面積が小さくなるので、枠体2と蓋体3との接合部から水分が侵入しにくくなるとともに、温度変化時に生じるパッケージ4内の膨張空気による圧力も低下し、さらに枠体2と蓋体3との接合部に発生するうねりも小さくなって、パッケージ4の気密性が向上して、映像品質の信頼性を向上させている。   As described above, in this embodiment, since the area of the opening 2b covered by the lid 3 is reduced, it is difficult for moisture to enter from the joint between the frame 2 and the lid 3, and a package generated when the temperature changes. 4 also reduces the pressure due to the expanded air, reduces the undulation generated at the joint between the frame 2 and the lid 3, improves the airtightness of the package 4, and improves the reliability of the video quality. ing.

また、蓋体3はガラス等の透明な板材からなり、気密性を保持しながら固体撮像素子5の視野を遮らないように構成される。そして、本実施形態では上記のように構成することによって、急激な温度変化によってパッケージ4内の水分が結露して蓋体3内面が曇り、固体撮像素子5の撮像画像に欠陥が生じるということはなくなる。また、蓋体3にガラスを用いる場合は、開口部2bの面積が小さいので高価なガラスの使用を削減でき、低コスト化を図ることができる。   The lid 3 is made of a transparent plate material such as glass, and is configured not to block the visual field of the solid-state imaging device 5 while maintaining airtightness. And in this embodiment, by having comprised as mentioned above, the water | moisture content in the package 4 dew condensation by the rapid temperature change, the inner surface of the cover body 3 becomes cloudy, and a defect arises in the picked-up image of the solid-state image sensor 5. Disappear. Further, when glass is used for the lid 3, since the area of the opening 2 b is small, the use of expensive glass can be reduced, and the cost can be reduced.

さらに、吸水特性を有する熱可塑性樹脂によって枠体2を構成することで、吸湿材等を添加しなくともパッケージ4内部への水分の侵入、滞留を防止することができるという効果を低コストに実現でき、さらには成形性も良好なものとなる。   Furthermore, by constituting the frame body 2 with a thermoplastic resin having water absorption characteristics, it is possible to achieve the effect of preventing moisture from entering and staying in the package 4 without adding a moisture absorbent or the like at a low cost. In addition, the moldability is also good.

そして、パッケージ4をプリント基板1と枠体2と蓋体3とで構成するので、従来のようにリードフレームと樹脂との同時成形用の高価な金型を必要とせず、低コストに製造できる。また、プリント基板1のパターン1aを変更することで、各種仕様の固体撮像素子5に対してもフレキシブル且つ低コストに対応できる。   And since the package 4 is comprised by the printed circuit board 1, the frame body 2, and the cover body 3, it does not require the expensive metal mold | die for simultaneous shaping | molding of a lead frame and resin like the past, and can manufacture at low cost. . In addition, by changing the pattern 1a of the printed circuit board 1, it is possible to deal with the solid-state imaging device 5 of various specifications flexibly and at low cost.

(実施形態2)
図4は本発明の固体撮像素子収納用パッケージの一実施例を示すものであり、枠体2は、例えばポリアミド、ポリフタルアミド等の吸水特性を有する熱可塑性樹脂からなり、枠体2の上面に形成された円筒形の凹部2cと、枠体2の下面に形成された円筒形の凹部2dと、枠体2の外縁から一体に延設されて凹部2c,2dの各底面間を仕切る仕切板2eとを設けて、断面が略H型となるように形成される。そして、枠体2の下面側は、エポキシ樹脂等の熱硬化性の接着剤によってプリント基板1に気密接合され、凹部2d内に固体撮像素子5が収容される。仕切板2eは略中央に開口部2fが形成されており、開口部2fの上面側にはエポキシ樹脂等の熱硬化性の接着剤によって蓋体3が気密接合されて、蓋体3は開口部2fに覆設している。ここで開口部2fは、固体撮像素子5の視野を遮らないように視野方向に形成される。
(Embodiment 2)
FIG. 4 shows an embodiment of the solid-state image pickup device storage package of the present invention. The frame 2 is made of a thermoplastic resin having water absorption characteristics such as polyamide and polyphthalamide, and the upper surface of the frame 2 is shown. A cylindrical recess 2c formed on the lower surface of the frame 2 and a partition that is integrally extended from the outer edge of the frame 2 and separates the bottom surfaces of the recesses 2c and 2d. The plate 2e is provided, and the cross section is substantially H-shaped. The lower surface side of the frame 2 is hermetically bonded to the printed circuit board 1 with a thermosetting adhesive such as an epoxy resin, and the solid-state imaging device 5 is accommodated in the recess 2d. The partition plate 2e has an opening 2f formed substantially at the center, and the lid 3 is hermetically bonded to the upper surface side of the opening 2f by a thermosetting adhesive such as an epoxy resin. 2f is covered. Here, the opening 2 f is formed in the visual field direction so as not to block the visual field of the solid-state imaging device 5.

そして、凹部2cの側壁2gは仕切板2eの周縁より上方に突出しており、蓋体3は側壁2gによって周囲を囲まれてその表面を保護されており、製造時に他の物体との接触によって蓋体3の表面に傷が生じて撮像画像に欠陥が生じる可能性が低下する。したがって、映像品質の信頼性が向上し、また製造時の不良を減らして低コストでの製造が可能となる。   The side wall 2g of the recess 2c protrudes upward from the peripheral edge of the partition plate 2e, and the lid 3 is surrounded by the side wall 2g to protect the surface thereof. The possibility that the surface of the body 3 is damaged and a captured image is defective is reduced. Therefore, the reliability of the video quality is improved, and it is possible to manufacture at a low cost by reducing defects during manufacturing.

また、本実施形態では凹部2c内に円筒状のレンズブロック7を配置するが、このとき、側壁2g内面にねじ山2hを螺刻することで、外周にねじ山7aを螺刻したレンズブロック7を凹部2c内に螺設して、レンズブロック7を調整可能に位置決めすることができ、レンズブロック7の位置決め用部品を削減でき、低コスト化が可能となる。   In this embodiment, the cylindrical lens block 7 is disposed in the recess 2c. At this time, the thread block 2h is threaded on the inner surface of the side wall 2g, so that the thread block 7a is threaded on the outer periphery. Can be screwed into the recess 2c to position the lens block 7 so that the lens block 7 can be adjusted, and the number of positioning parts for the lens block 7 can be reduced, and the cost can be reduced.

さらに、図5(a)(b)に示すように、開口部2fの下部に、固体撮像素子5に向かって広がるテーパー部2iを形成すれば、蓋体3を介してテーパー部2iで集光された光は、テーパー部2iに沿って広がりながら固体撮像素子5に入射する。このようにテーパー部2iを設けることによって、けられ、反射によるノイズ等の欠陥が固体撮像素子5の撮像画像に生じないようにしながら、開口部2fの面積をできるだけ小さくできる。したがって、開口部2fの面積が小さければ、枠体2と蓋体3との接合時に、枠体2と蓋体3との接着部のうねり等の表面状態の影響も受け難くなり、枠体2と蓋体3との間の気密の信頼性を実施形態1よりさらに向上させて、映像品質の信頼性をさらに向上させている。   Further, as shown in FIGS. 5A and 5B, if a tapered portion 2 i that spreads toward the solid-state imaging device 5 is formed in the lower portion of the opening 2 f, the light is condensed by the tapered portion 2 i through the lid 3. The emitted light enters the solid-state imaging device 5 while spreading along the tapered portion 2i. By providing the tapered portion 2 i in this manner, the area of the opening 2 f can be made as small as possible while preventing defects such as noise caused by reflection from occurring in the captured image of the solid-state imaging device 5. Therefore, if the area of the opening 2f is small, it is difficult to be affected by the surface state such as the undulation of the bonding portion between the frame 2 and the lid 3 when the frame 2 and the lid 3 are joined. The reliability of the airtightness between the cover 3 and the lid 3 is further improved from that of the first embodiment, and the reliability of the video quality is further improved.

なお、実施形態1と同様の構成には同一の符号を付して説明は省略する。   In addition, the same code | symbol is attached | subjected to the structure similar to Embodiment 1, and description is abbreviate | omitted.

(実施形態3)
図6は本発明の固体撮像素子収納用パッケージの一実施例を示すものであり、基本的には実施形態2と同様の構成を備えるが、プリント基板1にはスルーホール1cが形成されており、プリント基板1と枠体2との接合時には、スルーホール1cは凹部2d内に位置する。スルーホール1cはその内面およびランド部に金メッキが施されている。
(Embodiment 3)
FIG. 6 shows one embodiment of the solid-state image pickup device storage package of the present invention, which basically has the same configuration as that of the second embodiment, but has a through hole 1c formed in the printed circuit board 1. At the time of joining the printed circuit board 1 and the frame body 2, the through hole 1c is located in the recess 2d. The through hole 1c is gold-plated on the inner surface and the land portion.

以下、本実施形態の固体撮像素子収納用パッケージの製造方法について説明する。まず、プリント基板1に固体撮像素子5をダイボンディングし、固体撮像素子5の電極とプリント基板1上のパターン1aとの間をボンディングワイヤ6を介して電気的に接続した後、プリント基板1と枠体2とをエポキシ樹脂等の熱硬化性の接着剤によって気密接合し、次に枠体2と蓋体3とをエポキシ樹脂等の熱硬化性の接着剤によって気密接合する。実施形態1,2では、このような気密接合過程において、接着剤硬化時の熱によってパッケージ4内の空気が膨張し、この膨張空気が、プリント基板1と枠体2との間、および枠体2と蓋体3との間に形成された接着層8に空気の流通路を形成する場合があり、パッケージ4の気密接合を安定して実施することは困難であった。しかし、本実施形態では、プリント基板1にスルーホール1cを形成することにより、気密接合過程における膨張空気はスルーホール1cを通過して外部に排出されるので、接着層8に空気の流通路が形成されることはない。   Hereinafter, a method for manufacturing the solid-state imaging device storage package of the present embodiment will be described. First, the solid-state imaging device 5 is die-bonded to the printed circuit board 1, and the electrodes of the solid-state imaging device 5 and the pattern 1 a on the printed circuit board 1 are electrically connected via the bonding wires 6. The frame 2 is hermetically joined with a thermosetting adhesive such as an epoxy resin, and then the frame 2 and the lid 3 are hermetically joined with a thermosetting adhesive such as an epoxy resin. In the first and second embodiments, in such an airtight joining process, the air in the package 4 expands due to heat at the time of curing the adhesive, and this expanded air is between the printed circuit board 1 and the frame body 2 and the frame body. In some cases, an air flow path is formed in the adhesive layer 8 formed between the cover 2 and the lid 3, and it is difficult to stably carry out airtight joining of the package 4. However, in this embodiment, by forming the through hole 1c in the printed circuit board 1, the expanded air in the hermetic bonding process passes through the through hole 1c and is discharged to the outside. Never formed.

そして、最終的な気密封止は、スルーホール1cを半田9で塞ぐことで行う。このとき、スルーホール1cの面積が小さく、また半田熱量も小さくて、短時間で密閉が完了するので、空気の膨張量は小さく、パッケージ4の気密接合を安定して実施することができ、映像品質の信頼性が向上している。   The final hermetic sealing is performed by closing the through hole 1 c with the solder 9. At this time, the area of the through hole 1c is small, the amount of solder heat is small, and the sealing is completed in a short time. Therefore, the expansion amount of air is small, and the hermetic joining of the package 4 can be stably performed. Quality reliability is improved.

また、次工程にて、固体撮像素子収納用パッケージをリフロー炉に搬入する場合は、リフロー時に半田9が溶けて気密特性が劣化する恐れがあるが、このような場合には、リフロー温度より高温で溶融する半田9を使用すれば気密特性の劣化を防止することができる。   In the next process, when the solid-state image pickup device storage package is carried into the reflow furnace, the solder 9 may be melted during reflow and the airtightness may be deteriorated. In such a case, the temperature is higher than the reflow temperature. By using the solder 9 that melts in this way, it is possible to prevent the deterioration of the airtight characteristics.

なお、実施形態2と同様の構成には同一の符号を付して説明は省略する。   In addition, the same code | symbol is attached | subjected to the structure similar to Embodiment 2, and description is abbreviate | omitted.

(実施形態4)
図7は本発明の固体撮像素子収納用パッケージの一実施例を示すものであり、基本的には実施形態2と同様の構成を備えるが、枠体2の仕切板2eには凹部2cと凹部2dとを連結する貫通孔2jが、蓋体3の覆設位置からずれて形成されている。
(Embodiment 4)
FIG. 7 shows an embodiment of the solid-state image pickup device storage package according to the present invention, which basically has the same configuration as that of the second embodiment, but the partition plate 2e of the frame 2 has a recess 2c and a recess. A through hole 2j that connects 2d is formed so as to deviate from the covering position of the lid 3.

以下、本実施形態の固体撮像素子収納用パッケージの製造方法について説明する。まず、プリント基板1に固体撮像素子5をダイボンディングし、固体撮像素子5の電極とプリント基板1上のパターン1aとの間をボンディングワイヤ6を介して電気的に接続した後、プリント基板1と枠体2とをエポキシ樹脂等の熱硬化性の接着剤によって気密接合し、次に枠体2と蓋体3とをエポキシ樹脂等の熱硬化性の接着剤によって気密接合する。実施形態1,2では、このような気密接合過程において、接着剤硬化時の熱によってパッケージ4内の空気が膨張し、この膨張空気が、プリント基板1と枠体2との間、および枠体2と蓋体3との間に形成された接着層8に空気の流通路を形成する場合があり、パッケージ4の気密接合を安定して実施することは困難であった。しかし、本実施形態では、枠体2に貫通孔2jを形成することにより、気密接合過程における膨張空気は貫通孔2jを通過して外部に排出されるので、接着層8に空気の流通路が形成されることはない。   Hereinafter, a method for manufacturing the solid-state imaging device storage package of the present embodiment will be described. First, the solid-state imaging device 5 is die-bonded to the printed circuit board 1, and the electrodes of the solid-state imaging device 5 and the pattern 1 a on the printed circuit board 1 are electrically connected via the bonding wires 6. The frame 2 is hermetically joined with a thermosetting adhesive such as an epoxy resin, and then the frame 2 and the lid 3 are hermetically joined with a thermosetting adhesive such as an epoxy resin. In the first and second embodiments, in such an airtight joining process, the air in the package 4 expands due to heat at the time of curing the adhesive, and this expanded air is between the printed circuit board 1 and the frame body 2 and the frame body. In some cases, an air flow path is formed in the adhesive layer 8 formed between the cover 2 and the lid 3, and it is difficult to stably carry out airtight joining of the package 4. However, in the present embodiment, by forming the through hole 2j in the frame body 2, the expanded air in the hermetic joining process passes through the through hole 2j and is discharged to the outside. Never formed.

そして、最終的な気密封止は、貫通孔2jを熱で融着した熱融着部10を形成し、貫通孔2jを熱融着部10で塞ぐことで行う。このとき、貫通孔2jの面積が小さく、また融着熱量も小さくて、短時間で密閉が完了するので、空気の膨張量は小さく、パッケージ4の気密接合を安定して実施することができ、映像品質の信頼性が向上している。   Then, the final hermetic sealing is performed by forming the heat-sealed portion 10 in which the through-hole 2j is fused by heat and closing the through-hole 2j with the heat-fused portion 10. At this time, since the area of the through-hole 2j is small, the heat of fusion is small, and the sealing is completed in a short time, the amount of expansion of air is small, and the package 4 can be stably sealed. Reliability of video quality has been improved.

なお、実施形態2と同様の構成には同一の符号を付して説明は省略する。   In addition, the same code | symbol is attached | subjected to the structure similar to Embodiment 2, and description is abbreviate | omitted.

(実施形態5)
図8は本発明の固体撮像素子収納用パッケージの一実施例を示すものであり、基本的には実施形態2と同様の構成を備えるが、枠体2は、気密接合前に、プリント基板1との気密接合面および蓋体3との気密接合面にBステージ接着剤層11を各々形成している。
(Embodiment 5)
FIG. 8 shows an embodiment of the solid-state image pickup device storage package of the present invention, which basically has the same configuration as that of the second embodiment, but the frame body 2 is formed on the printed circuit board 1 before the airtight joining. The B-stage adhesive layer 11 is formed on the airtight joint surface with the lid 3 and the airtight joint surface with the lid 3.

以下、本実施形態の固体撮像素子収納用パッケージの製造方法について説明する。まず、プリント基板1に固体撮像素子5をダイボンディングし、固体撮像素子5の電極とプリント基板1上のパターン1aとの間をボンディングワイヤ6を介して電気的に接続する。次に、枠体2のプリント基板1との接合面および枠体2の蓋体3との接合面にBステージ接着剤層11を各々形成した後、枠体2に対してプリント基板1と蓋体3とを同時に気密接合する。   Hereinafter, a method for manufacturing the solid-state imaging device storage package of the present embodiment will be described. First, the solid-state imaging device 5 is die-bonded to the printed circuit board 1, and the electrodes of the solid-state imaging device 5 and the pattern 1 a on the printed circuit board 1 are electrically connected via bonding wires 6. Next, after forming the B-stage adhesive layer 11 on the joint surface of the frame body 2 to the printed circuit board 1 and the joint surface of the frame body 2 to the lid body 3, the printed circuit board 1 and the lid are attached to the frame body 2. The body 3 is hermetically joined at the same time.

ここで、Bステージ接着剤層11は半硬化状態の接着剤層であり、Bステージ接着剤層11の形状を設計、調整することによって、プリント基板1と枠体2および枠体2と蓋体3を気密接合するときに発生する膨張空気の流通路を制御することが可能となり、気密接合時の膨張空気による接着剤層の欠陥を効率的に防止できて、パッケージ4の気密接合を安定して実施することができ、映像品質の信頼性が向上している。また、液体状接着剤を用いる場合に生じるダレや、接着剤量、面積のバラツキ等も抑制することができ、安定した製造が可能となる。さらに、プリント基板1と枠体2および枠体2と蓋体3を同時に気密接合することができるので、製造時間の短縮、およびそれに伴う低コスト化を図ることができる。   Here, the B-stage adhesive layer 11 is a semi-cured adhesive layer, and by designing and adjusting the shape of the B-stage adhesive layer 11, the printed circuit board 1 and the frame body 2 and the frame body 2 and the lid body. It is possible to control the flow path of the expanded air generated when the 3 is hermetically bonded, and it is possible to efficiently prevent defects in the adhesive layer due to the expanded air during the hermetic bonding, thereby stabilizing the hermetic bonding of the package 4. The reliability of video quality is improved. In addition, sagging that occurs when a liquid adhesive is used, variation in the amount of adhesive, area variation, and the like can be suppressed, and stable production becomes possible. Furthermore, since the printed circuit board 1 and the frame body 2 and the frame body 2 and the lid body 3 can be hermetically bonded at the same time, the manufacturing time can be shortened and the cost can be reduced accordingly.

なお、実施形態2と同様の構成には同一の符号を付して説明は省略する。   In addition, the same code | symbol is attached | subjected to the structure similar to Embodiment 2, and description is abbreviate | omitted.

(実施形態6)
図9は本発明の固体撮像素子収納用パッケージの組立工程での一状態を示すものであり、固体撮像素子収納用パッケージは実施形態1と同様の構成を備える。なお、本実施形態では、組立工程において図9に示すように、複数のプリント基板1を一体に形成した1枚のプリント基板部1’上に複数の枠体2,蓋体3を接合しており、最終的にはプリント基板部1’を切断して各固体撮像素子収納用パッケージ毎に分離するものである。
(Embodiment 6)
FIG. 9 shows one state in the assembly process of the solid-state image pickup device storage package of the present invention. The solid-state image pickup device storage package has the same configuration as that of the first embodiment. In the present embodiment, as shown in FIG. 9, in the assembly process, a plurality of frames 2 and lids 3 are joined on one printed circuit board portion 1 ′ integrally formed with a plurality of printed circuit boards 1. Finally, the printed circuit board portion 1 ′ is cut and separated for each solid-state image pickup device storage package.

一般に、プリント基板部1’の面内のスルーホールおよび切断面は金メッキ等で覆われているが、プリント基板部1’の側縁(最外周面)は基板部材がそのまま露出した切断面となっている。プリント基板部1’側縁の切断面からは、プリント基板部1’に含まれるガラス繊維や成形粉等の粉塵が発生し、洗浄等を入念に実施しても組立時においては粉塵が発生し、この粉塵が固体撮像素子5の表面に付着すると、固体撮像素子5の撮像画像に黒点等が入るという欠陥が発生していた。   In general, the through-hole and the cut surface in the surface of the printed circuit board portion 1 ′ are covered with gold plating or the like, but the side edge (outermost peripheral surface) of the printed circuit board portion 1 ′ is a cut surface with the substrate member exposed as it is. ing. From the cut surface of the printed circuit board part 1 'side edge, dust such as glass fiber and molding powder contained in the printed circuit board part 1' is generated, and dust is generated at the time of assembly even if cleaning is performed carefully. When the dust adheres to the surface of the solid-state image sensor 5, there is a defect that black spots or the like appear in the captured image of the solid-state image sensor 5.

そこで本実施形態では、プリント基板部1’の側縁をメッキまたは接着剤等の発塵しない物質12で覆うことによって、プリント基板部1’側縁の切断面からのガラス繊維や成形粉等の粉塵の発生を抑制している。したがって、粉塵が固体撮像素子5の表面に付着することによって発生する固体撮像素子5の撮像画像に黒点等が入るという欠陥を防止することができ、映像品質の信頼性が向上している。   Therefore, in the present embodiment, by covering the side edge of the printed circuit board portion 1 ′ with a material 12 that does not generate dust such as plating or adhesive, glass fiber or molding powder from the cut surface of the side edge of the printed circuit board portion 1 ′ is used. The generation of dust is suppressed. Therefore, it is possible to prevent defects such as black spots in the captured image of the solid-state imaging device 5 generated by dust adhering to the surface of the solid-state imaging device 5, and the reliability of video quality is improved.

なお、本実施形態では実施形態1と同様の構成を備えた固体撮像素子収納用パッケージで説明したが、実施形態2乃至5いずれかの固体撮像素子収納用パッケージにおいても、上記同様に構成すれば同様の効果を奏し得る。   In this embodiment, the solid-state image sensor housing package having the same configuration as that of the first embodiment has been described. However, any of the solid-state image sensor housing packages of the second to fifth embodiments may be configured in the same manner as described above. Similar effects can be achieved.

(実施形態7)
図10(a)(b)は本発明の固体撮像素子収納用パッケージの組立工程での一状態を示すものであり、実施形態6では、プリント基板部1’側縁の切断面からのガラス繊維や成形粉等の粉塵の発生を抑制するために、プリント基板部1’の側縁をメッキまたは接着剤等の発塵しない物質12で覆ったが、本実施形態では、上面を開口した函状の治具13の底面13a上にプリント基板部1’を配して、プリント基板部1’の側縁1dを治具13の内側面に当設させることで、ガラス繊維や成形粉等の粉塵の発生を抑制し、映像品質の信頼性の向上を図っている。治具13は発塵しない材料で形成され、治具12に対して着脱自在に構成されるので、再利用が可能であり、粉塵の抑制を低コストに行うことができる。
(Embodiment 7)
10 (a) and 10 (b) show one state in the assembly process of the solid-state image pickup device storage package of the present invention. In the sixth embodiment, the glass fiber from the cut surface of the printed circuit board portion 1 'side edge is shown. In order to suppress the generation of dust such as molding powder or the like, the side edge of the printed circuit board 1 'is covered with a material 12 that does not generate dust such as plating or adhesive. By placing the printed circuit board portion 1 ′ on the bottom surface 13 a of the jig 13 and placing the side edge 1 d of the printed circuit board portion 1 ′ against the inner surface of the jig 13, dust such as glass fiber and molding powder To improve the reliability of video quality. Since the jig 13 is made of a material that does not generate dust and is configured to be detachable from the jig 12, it can be reused and dust can be suppressed at low cost.

なお、治具13は、枠状に形成して、枠内にプリント基板部1’を嵌めて、プリント基板部1’の側縁1dを治具13の内側面に当接させてもよい。   Note that the jig 13 may be formed in a frame shape, and the printed board portion 1 ′ may be fitted into the frame so that the side edge 1 d of the printed board portion 1 ′ is brought into contact with the inner side surface of the jig 13.

(実施形態8)
図11は本発明の固体撮像素子収納用パッケージの一実施例を示すものであり、基本的には実施形態2と同様の構成を備えるが、プリント基板1には位置決め用スルーホール14が形成され、枠体2の下面には位置決め用ピン15が形成されている。そして、プリント基板1と枠体2との接合時には、位置決め用ピン15を位置決め用スルーホール14に嵌合させることで、プリント基板1と枠体2との位置決めを精度よく行うことができ、組立作業を短時間で高精度に行うことができる。
(Embodiment 8)
FIG. 11 shows an example of a solid-state image pickup device storage package according to the present invention. The package basically has the same configuration as that of the second embodiment, but a positioning through-hole 14 is formed in the printed circuit board 1. A positioning pin 15 is formed on the lower surface of the frame 2. When the printed circuit board 1 and the frame body 2 are joined, the positioning pins 15 are fitted into the positioning through holes 14 so that the printed circuit board 1 and the frame body 2 can be positioned with high accuracy. Work can be performed with high accuracy in a short time.

また、スルーホール14の内面には金メッキが施されており、スルーホール14の内面からのガラス繊維や成形粉等の粉塵の発生を抑制でき、映像品質の信頼性の向上を図るとともに、製品不良の発生を防止している。   In addition, the inner surface of the through hole 14 is gold-plated, so that generation of dust such as glass fiber and molding powder from the inner surface of the through hole 14 can be suppressed, and the reliability of the video quality is improved and the product is defective. Is prevented.

(実施形態9)
図12は本発明の固体撮像素子収納用パッケージの製造過程での一状態を示すものであり、固体撮像素子収納用パッケージは実施形態1と同様の構成を備える。本実施形態では、図12に示すように、複数のプリント基板1を一体に形成した1枚のプリント基板部1’上に複数の固体撮像素子5が実装できるパターンが形成されており、複数の固体撮像素子5をプリント基板部1’にダイボンディングし、各固体撮像素子5の電極とプリント基板部1’上の各パターン1aとの間をボンディングワイヤ6を介して電気的に接続する。そして、プリント基板部1’、各固体撮像素子5に対応する複数個の枠体2を一体に形成した枠体部2’、および各枠体2の開口部2bに一括して覆設する蓋体部3をエポキシ樹脂等の熱硬化性の接着剤によって気密接合した後、ダイサー等を用いて図12中の切断箇所Xに沿ってプリント基板部1’、枠体部2’、蓋体部3’を同時に切断することで、各固体撮像素子収納用パッケージ毎に分離する。このような製造方法を採用することで、部品コストおよび組立コストを大幅に低減することができる。
(Embodiment 9)
FIG. 12 shows one state in the manufacturing process of the solid-state image sensor housing package of the present invention. The solid-state image sensor housing package has the same configuration as that of the first embodiment. In the present embodiment, as shown in FIG. 12, a pattern on which a plurality of solid-state imaging devices 5 can be mounted is formed on a single printed circuit board portion 1 ′ in which a plurality of printed circuit boards 1 are integrally formed. The solid-state imaging device 5 is die-bonded to the printed board portion 1 ′, and the electrodes of each solid-state imaging device 5 and the patterns 1 a on the printed board portion 1 ′ are electrically connected via bonding wires 6. Then, a printed circuit board portion 1 ′, a frame portion 2 ′ in which a plurality of frames 2 corresponding to the respective solid-state imaging elements 5 are integrally formed, and a lid that collectively covers the opening 2 b of each frame 2. After airtightly bonding the body part 3 with a thermosetting adhesive such as an epoxy resin, the printed circuit board part 1 ′, the frame part 2 ′, and the lid part along the cutting portion X in FIG. By cutting 3 ′ at the same time, each solid-state image pickup device storage package is separated. By adopting such a manufacturing method, the part cost and the assembly cost can be significantly reduced.

本発明の実施形態1の固体撮像素子収納用パッケージを示す側面断面図である。It is side surface sectional drawing which shows the solid-state image sensor accommodation package of Embodiment 1 of this invention. 同上の外観を示し(a)側面図、(b)は下面図である。The external appearance is shown (a) side view and (b) is a bottom view. 同上の蓋体を外した状態での上面図である。It is a top view in the state where the same lid was removed. 本発明の実施形態2の固体撮像素子収納用パッケージを示す一部破断した分解斜視図である。It is the disassembled perspective view partly fractured | ruptured which shows the solid-state image sensor accommodation package of Embodiment 2 of this invention. 同上のレンズブロックを外した状態での別の固体撮像素子収納用パッケージを示し、(a)は上面図、(b)は側面断面図である。The other solid-state image sensor accommodation package in the state which removed the lens block same as the above is shown, (a) is a top view, (b) is side sectional drawing. 本発明の実施形態3の固体撮像素子収納用パッケージを示す側面断面図である。It is side surface sectional drawing which shows the package for solid-state image sensor accommodation of Embodiment 3 of this invention. 本発明の実施形態4の固体撮像素子収納用パッケージを示す側面断面図である。It is side surface sectional drawing which shows the package for solid-state image sensor accommodation of Embodiment 4 of this invention. 本発明の実施形態5の固体撮像素子収納用パッケージを示す側面断面図である。It is side surface sectional drawing which shows the package for solid-state image sensor accommodation of Embodiment 5 of this invention. 本発明の実施形態6の固体撮像素子収納用パッケージの製造方法を示す斜視図である。It is a perspective view which shows the manufacturing method of the package for solid-state image sensor accommodation of Embodiment 6 of this invention. 本発明の実施形態7の固体撮像素子収納用パッケージの製造方法を示し、(a)は治具装着前の状態、(b)は治具装着後の状態を示す図である。FIGS. 8A and 8B show a method for manufacturing a solid-state image pickup device storage package according to a seventh embodiment of the present invention, where FIG. 9A shows a state before mounting a jig, and FIG. 本発明の実施形態8の固体撮像素子収納用パッケージを示す側面断面図である。It is side surface sectional drawing which shows the package for solid-state image sensor accommodation of Embodiment 8 of this invention. 本発明の実施形態9の固体撮像素子収納用パッケージの製造方法を示す斜視図である。It is a perspective view which shows the manufacturing method of the package for solid-state image sensor accommodation of Embodiment 9 of this invention. 従来の固体撮像素子収納用パッケージを示す側面断面図である。It is side surface sectional drawing which shows the conventional package for solid-state image sensor accommodation.

符号の説明Explanation of symbols

1 プリント基板
1b 端子
2 枠体
20 枠部
2a 天面
2b 開口部
3 蓋体
4 パッケージ
5 固体撮像素子
6 ボンディングワイヤ
DESCRIPTION OF SYMBOLS 1 Printed circuit board 1b Terminal 2 Frame body 20 Frame part 2a Top surface 2b Opening part 3 Cover body 4 Package 5 Solid-state image sensor 6 Bonding wire

Claims (10)

固体撮像素子を実装し固体撮像素子の電極に電気的に接続される端子を形成したプリント基板と、プリント基板に気密接合して固体撮像素子を収容し固体撮像素子の視野方向に開口部を形成した熱可塑性樹脂からなる枠体と、前記開口部に覆設する透明な蓋体とを備え、前記開口部は前記枠体の外縁から枠内に延設された面内に形成され、前記蓋体は該面に気密接合することを特徴とする固体撮像素子収納パッケージ。 A printed circuit board on which a solid-state image sensor is mounted and terminals that are electrically connected to the electrodes of the solid-state image sensor are formed, and the solid-state image sensor is accommodated in an airtight connection to the printed circuit board to form an opening in the visual field direction of the solid-state image sensor A frame made of thermoplastic resin and a transparent lid that covers the opening, the opening being formed in a plane extending from the outer edge of the frame into the frame, and the lid A solid-state image pickup device storage package, wherein the body is hermetically bonded to the surface. 前記枠体は、前記開口部に覆設した蓋体を囲むように外側に向かって突出した壁部を形成することを特徴とする請求項1記載の固体撮像素子収納パッケージ。 The solid-state image pickup device storage package according to claim 1, wherein the frame body forms a wall portion protruding outward so as to surround a lid body that covers the opening portion. 前記開口部は、固体撮像素子を収納した側に向かって広がるテーパー形状に形成されることを特徴とする請求項1または2記載の固体撮像素子収納パッケージ。 3. The solid-state image sensor housing package according to claim 1, wherein the opening is formed in a tapered shape that widens toward a side housing the solid-state image sensor. 請求項1乃至3いずれか記載の固体撮像素子収納パッケージの製造方法において、プリント基板は枠体との接合部より内側の部位にスルーホールを形成され、プリント基板と枠体および枠体と蓋体とを各々気密接合した後、半田によってスルーホールを気密封止することを特徴とする固体撮像素子収納パッケージの製造方法。 4. The method of manufacturing a solid-state image pickup device storage package according to claim 1, wherein the printed circuit board is formed with a through hole in a portion inside a joint portion with the frame body, and the printed circuit board, the frame body, the frame body, and the lid body. And a through hole is hermetically sealed with solder, and then a method for manufacturing a solid-state image pickup device storage package. 請求項1乃至3いずれか記載の固体撮像素子収納パッケージの製造方法において、枠体は、固体撮像素子を収容した空間を外部に連続させる貫通孔を形成され、プリント基板と枠体および枠体と蓋体とを各々気密接合した後、熱融着によって貫通孔を気密封止することを特徴とする固体撮像素子収納パッケージの製造方法。 4. The method for manufacturing a solid-state image pickup device storage package according to claim 1, wherein the frame is formed with a through hole that continues a space containing the solid-state image pickup device to the outside, and the printed circuit board, the frame, and the frame A method for manufacturing a solid-state imaging device storage package, wherein after sealing each of the lids, the through holes are hermetically sealed by heat sealing. 請求項1乃至3いずれか記載の固体撮像素子収納パッケージの製造方法において、枠体は、プリント基板との接合面および蓋体との接合面にBステージ状の熱硬化性の接着剤層を各々形成しておき、枠体とプリント基板との気密接合と、枠体と蓋体との気密接合を同時に行うことを特徴とする固体撮像素子収納パッケージの製造方法。 4. The method of manufacturing a solid-state image pickup device storage package according to claim 1, wherein the frame includes a B-stage thermosetting adhesive layer on the bonding surface with the printed circuit board and the bonding surface with the lid. A method of manufacturing a solid-state imaging device storage package, wherein the solid-state image pickup device package is formed and airtight joining between the frame body and the printed circuit board and airtight joining between the frame body and the lid body are simultaneously performed. 請求項1乃至3いずれか記載の固体撮像素子収納パッケージの製造方法において、少なくとも組立工程では、プリント基板の側縁を発塵しない物質で覆うことを特徴とする固体撮像素子収納パッケージの製造方法。 4. The method for manufacturing a solid-state image pickup device storage package according to claim 1, wherein the side edge of the printed circuit board is covered with a substance that does not generate dust at least in an assembly process. 少なくとも組立工程では、プリント基板の側縁に着脱自在であり且つ発塵しない物質で形成した治具でプリント基板の側縁を覆うことを特徴とする請求項7記載の固体撮像素子収納パッケージの製造方法。 8. The solid-state imaging device storage package according to claim 7, wherein the side edge of the printed circuit board is covered with a jig formed of a material that is detachable from the side edge of the printed circuit board and does not generate dust at least in an assembly process. Method. 請求項1乃至3いずれか記載の固体撮像素子収納パッケージの製造方法において、メッキを施したスルーホールをプリント基板に形成するとともに、枠体には前記スルーホールに嵌合する突起を形成し、プリント基板と枠体との位置決めは、前記突起を前記スルーホールに嵌合させることで行うことを特徴とする固体撮像素子収納パッケージの製造方法。 4. The method of manufacturing a solid-state image pickup device storage package according to claim 1, wherein a plated through hole is formed on the printed circuit board, and a projection that fits into the through hole is formed on the frame body, The method of manufacturing a solid-state imaging device storage package, wherein the positioning of the substrate and the frame is performed by fitting the protrusion into the through hole. 請求項1乃至3いずれか記載の固体撮像素子収納パッケージの製造方法において、複数のプリント基板を一体に形成したプリント基板部上に複数の固体撮像素子を実装して、各固体撮像素子の電極を各端子に電気的に接続し、次にプリント基板部と複数の枠体を一体に形成した枠体部、および枠体部と枠体部全体を覆う蓋体部とを各々気密接合することで、各固体撮像素子を各枠体内に収容するとともに蓋体部を各枠体の開口部に覆設させ、次にプリント基板部と枠体部と蓋体部とを同時に切断して、各固体撮像素子収納パッケージに分離することを特徴とする固体撮像素子収納パッケージの製造方法。 4. The method of manufacturing a solid-state image pickup device storage package according to claim 1, wherein a plurality of solid-state image pickup devices are mounted on a printed circuit board portion integrally formed with a plurality of print boards, and the electrodes of the respective solid-state image pickup devices are provided. By electrically connecting to each terminal, and then airtightly joining the frame body part integrally formed with the printed circuit board part and the plurality of frame bodies, and the frame body part and the lid body part covering the whole frame body part, respectively. Each solid-state imaging device is accommodated in each frame, and the lid is covered with the opening of each frame, and then the printed circuit board, the frame, and the lid are cut at the same time. A method for manufacturing a solid-state image pickup device storage package, wherein the solid-state image pickup device storage package is separated into an image pickup device storage package.
JP2004162353A 2004-05-31 2004-05-31 Solid-state image pickup device storage package and method for manufacturing solid-state image pickup device storage package Expired - Fee Related JP4453447B2 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
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JP2007208045A (en) * 2006-02-02 2007-08-16 Sony Corp Imaging device, camera module, and method for manufacturing electronic equipment and imaging device
JP2008103460A (en) * 2006-10-18 2008-05-01 Sony Corp Semiconductor package and method for manufacturing same
JP2017126673A (en) * 2016-01-14 2017-07-20 株式会社フジクラ Optical device and manufacturing method of optical device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007208045A (en) * 2006-02-02 2007-08-16 Sony Corp Imaging device, camera module, and method for manufacturing electronic equipment and imaging device
JP2008103460A (en) * 2006-10-18 2008-05-01 Sony Corp Semiconductor package and method for manufacturing same
JP2017126673A (en) * 2016-01-14 2017-07-20 株式会社フジクラ Optical device and manufacturing method of optical device
WO2017122413A1 (en) * 2016-01-14 2017-07-20 株式会社フジクラ Optical device and method for manufacturing optical device
US10254537B2 (en) 2016-01-14 2019-04-09 Fujikura Ltd. Optical device and method of producing same

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