JP2005345959A5 - - Google Patents

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Publication number
JP2005345959A5
JP2005345959A5 JP2004168402A JP2004168402A JP2005345959A5 JP 2005345959 A5 JP2005345959 A5 JP 2005345959A5 JP 2004168402 A JP2004168402 A JP 2004168402A JP 2004168402 A JP2004168402 A JP 2004168402A JP 2005345959 A5 JP2005345959 A5 JP 2005345959A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004168402A
Other languages
Japanese (ja)
Other versions
JP2005345959A (ja
JP4617459B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004168402A priority Critical patent/JP4617459B2/ja
Priority claimed from JP2004168402A external-priority patent/JP4617459B2/ja
Publication of JP2005345959A publication Critical patent/JP2005345959A/ja
Publication of JP2005345959A5 publication Critical patent/JP2005345959A5/ja
Application granted granted Critical
Publication of JP4617459B2 publication Critical patent/JP4617459B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2004168402A 2004-06-07 2004-06-07 反射型光学系 Expired - Lifetime JP4617459B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004168402A JP4617459B2 (ja) 2004-06-07 2004-06-07 反射型光学系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004168402A JP4617459B2 (ja) 2004-06-07 2004-06-07 反射型光学系

Publications (3)

Publication Number Publication Date
JP2005345959A JP2005345959A (ja) 2005-12-15
JP2005345959A5 true JP2005345959A5 (uk) 2006-02-02
JP4617459B2 JP4617459B2 (ja) 2011-01-26

Family

ID=35498379

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004168402A Expired - Lifetime JP4617459B2 (ja) 2004-06-07 2004-06-07 反射型光学系

Country Status (1)

Country Link
JP (1) JP4617459B2 (uk)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007066379A1 (ja) * 2005-12-05 2007-06-14 The University Of Tokyo 反射型光学系、及び反射型光学系の制御方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3022708A (en) * 1957-12-16 1962-02-27 James G Baker Correcting optical system
US3252373A (en) * 1961-05-26 1966-05-24 Farrand Optical Co Inc High speed catadioptric objective in which three corrector elements define two power balanced air lenses
JPH0683418A (ja) * 1992-09-04 1994-03-25 Kobe Steel Ltd ワークの位置測定方法
JPH1026728A (ja) * 1996-07-09 1998-01-27 Nikon Corp 反射屈折型光学系
JP4107559B2 (ja) * 2000-04-20 2008-06-25 三菱電機株式会社 結像光学系

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