JP2005343784A - ナノ構造炭素材料の製造方法及び製造装置 - Google Patents
ナノ構造炭素材料の製造方法及び製造装置 Download PDFInfo
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- JP2005343784A JP2005343784A JP2005134686A JP2005134686A JP2005343784A JP 2005343784 A JP2005343784 A JP 2005343784A JP 2005134686 A JP2005134686 A JP 2005134686A JP 2005134686 A JP2005134686 A JP 2005134686A JP 2005343784 A JP2005343784 A JP 2005343784A
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- 239000003575 carbonaceous material Substances 0.000 title claims abstract description 54
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 36
- 239000002086 nanomaterial Substances 0.000 title abstract description 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims abstract description 63
- 229910052799 carbon Inorganic materials 0.000 claims abstract description 46
- 238000010891 electric arc Methods 0.000 claims abstract description 29
- 239000007789 gas Substances 0.000 claims description 32
- 239000003054 catalyst Substances 0.000 claims description 27
- 239000002994 raw material Substances 0.000 claims description 17
- 239000011261 inert gas Substances 0.000 claims description 16
- 239000007769 metal material Substances 0.000 claims description 16
- 230000003197 catalytic effect Effects 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 abstract description 10
- 239000002041 carbon nanotube Substances 0.000 description 12
- 229910021393 carbon nanotube Inorganic materials 0.000 description 12
- 230000002093 peripheral effect Effects 0.000 description 10
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 239000000126 substance Substances 0.000 description 7
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002826 coolant Substances 0.000 description 5
- 229910002804 graphite Inorganic materials 0.000 description 5
- 239000010439 graphite Substances 0.000 description 5
- 229910001220 stainless steel Inorganic materials 0.000 description 5
- 239000010935 stainless steel Substances 0.000 description 5
- 230000008016 vaporization Effects 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- XMWRBQBLMFGWIX-UHFFFAOYSA-N C60 fullerene Chemical compound C12=C3C(C4=C56)=C7C8=C5C5=C9C%10=C6C6=C4C1=C1C4=C6C6=C%10C%10=C9C9=C%11C5=C8C5=C8C7=C3C3=C7C2=C1C1=C2C4=C6C4=C%10C6=C9C9=C%11C5=C5C8=C3C3=C7C1=C1C2=C4C6=C2C9=C5C3=C12 XMWRBQBLMFGWIX-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910003472 fullerene Inorganic materials 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000002109 single walled nanotube Substances 0.000 description 4
- 238000003786 synthesis reaction Methods 0.000 description 4
- 238000009834 vaporization Methods 0.000 description 4
- 238000001241 arc-discharge method Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 230000007847 structural defect Effects 0.000 description 3
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 2
- 238000001069 Raman spectroscopy Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 239000002048 multi walled nanotube Substances 0.000 description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910021387 carbon allotrope Inorganic materials 0.000 description 1
- 239000002134 carbon nanofiber Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 238000011031 large-scale manufacturing process Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000003863 physical function Effects 0.000 description 1
- 125000005575 polycyclic aromatic hydrocarbon group Chemical group 0.000 description 1
- 239000001294 propane Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 238000001308 synthesis method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/44—Plasma torches using an arc using more than one torch
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J19/088—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/05—Preparation or purification of carbon not covered by groups C01B32/15, C01B32/20, C01B32/25, C01B32/30
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/15—Nano-sized carbon materials
- C01B32/158—Carbon nanotubes
- C01B32/16—Preparation
- C01B32/162—Preparation characterised by catalysts
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00002—Chemical plants
- B01J2219/00004—Scale aspects
- B01J2219/00006—Large-scale industrial plants
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- B01J2219/0824—Details relating to the shape of the electrodes
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- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0837—Details relating to the material of the electrodes
- B01J2219/0839—Carbon
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
- B01J2219/0803—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
- B01J2219/0805—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges
- B01J2219/0807—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy giving rise to electric discharges involving electrodes
- B01J2219/0837—Details relating to the material of the electrodes
- B01J2219/0841—Metal
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- B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
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Abstract
【解決手段】放電容器1の側面部2に12個の放電電極を上下2段に6個ずつ水平に配置する。上下の6個の放電電極は、それぞれ60度の角度ずつずらして配置されており、上方からみると、上下の放電電極は30度の角度ずつずらして配置されるように設定されている。12個の放電電極には、交流電源部30からそれぞれ位相差のある交流が印加されるようになっており、交流の印加により各放電電極にアーク放電が発生して放電電極に囲まれる領域にプラズマ領域6が形成される。放電電極を炭素電極とすることで、プラズマ領域の高温により放電電極から炭素が気化して高純度のナノ構造炭素材料が合成される。
【選択図】図1
Description
<端子> <電圧>
10’ Vx
11’ Vz’
12’ Vy
13’ Vx’
14’ Vz
15’ Vy’
そして、各出力電圧は、時間tに基づいて以下の数式1及び数式2により求められる。なお、Vmは、商用電源の最大電圧値で、ωは、角周波数で商用電源の周波数から算出される。
<端子> <電圧>
20’ Vxδ
21’ Vz’δ
22’ Vyδ
23’ Vx’δ
24’ Vzδ
25’ Vy’δ
そして、各出力電圧は、時間tに基づいて以下の数式3及び数式4により求められる。
2 側面部
3 冷却空間部
4 上面部
5 下面部
6 プラズマ領域
7 触媒体
10,11,12,13,14,15 上段放電電極
20,21,22,23,24,25 下段放電電極
30 交流電源部
40 供給タンク
41 供給タンク
42 供給弁
43 供給弁
44 混合器
45 ガス供給口
46 ガス排気口
47 排気ポンプ
50,51,52,53 永久磁石
Claims (10)
- 不活性ガス雰囲気中において、2次元又は3次元に配置された3つ以上の放電電極にそれぞれ位相差のある交流を印加してアーク放電を発生させ、アーク放電により形成されたプラズマ領域を用いて炭素原料からナノ構造炭素材料を生成することを特徴とするナノ構造炭素材料の製造方法。
- 前記炭素原料は、前記放電電極に含まれる炭素であることを特徴とする請求項1に記載のナノ構造炭素材料の製造方法。
- 前記炭素原料は、前記不活性ガス中に含まれる原料ガスであることを特徴とする請求項1又は2に記載のナノ構造炭素材料の製造方法。
- ナノ構造炭素材料の生成に対して触媒作用を有する金属材料を用いることを特徴とする請求項1から3のいずれかに記載のナノ構造炭素材料の製造方法。
- 内部に3つ以上の炭素放電電極が2次元又は3次元に配置された放電容器と、前記放電容器内に不活性ガスを供給するガス供給部と、前記炭素放電電極にそれぞれ位相差のある交流を印加して前記炭素放電電極の間にアーク放電を発生させる交流電源部とを備えていることを特徴とするナノ構造炭素材料の製造装置。
- 内部に3つ以上の放電電極が2次元又は3次元に配置された放電容器と、前記放電容器内に原料ガスを含む不活性ガスを供給するガス供給部と、前記放電電極にそれぞれ位相差のある交流を印加して前記放電電極の間にアーク放電を発生させる交流電源部とを備えていることを特徴とするナノ構造炭素材料の製造装置。
- 前記放電容器内には、ナノ構造炭素材料の生成に対して触媒作用を有する金属材料を含む触媒電極が設置されていることを特徴とする請求項5又は6に記載のナノ構造炭素材料の製造装置。
- 前記放電容器内には、ナノ構造炭素材料の生成に対して触媒作用を有する金属材料からなる触媒体が設置されていることを特徴とする請求項5から7のいずれかに記載のナノ構造炭素材料の製造装置。
- 請求項7に記載の触媒電極又は請求項8に記載の触媒体の表面温度を調節する温度調節手段を備えていることを特徴とするナノ構造炭素材料の製造装置。
- 前記放電容器の外部に設置されて前記放電容器内に磁界を発生させる磁界発生手段を備えていることを特徴とする請求項5から9のいずれかに記載のナノ構造炭素材料の製造装置。
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JP2012184128A (ja) * | 2011-03-04 | 2012-09-27 | Japan Atomic Energy Agency | 金属炭化物内包カーボンナノカプセル前駆体の製造方法 |
JP2015205247A (ja) * | 2014-04-21 | 2015-11-19 | Jfeエンジニアリング株式会社 | 微粒子材料製造装置 |
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JP2016536267A (ja) * | 2013-11-12 | 2016-11-24 | 厦▲門▼福▲納▼新材料科技有限公司Xiamen Funano New Material Technology Company.Ltd | フラーレンアーク源およびアーク源を備えるフラーレン製造装置 |
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