JP2005340510A - Method for manufacturing wiring board - Google Patents

Method for manufacturing wiring board Download PDF

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JP2005340510A
JP2005340510A JP2004157631A JP2004157631A JP2005340510A JP 2005340510 A JP2005340510 A JP 2005340510A JP 2004157631 A JP2004157631 A JP 2004157631A JP 2004157631 A JP2004157631 A JP 2004157631A JP 2005340510 A JP2005340510 A JP 2005340510A
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conductive
shaped
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power supply
wiring
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JP4455935B2 (en
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Hiroyasu Oshiro
裕康 大代
Satoshi Nakao
敏 中尾
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Yamaichi Electronics Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a wiring board suitable for a mounted circuit device for easily forming a plated layer for enabling highly reliable bonding, and for executing fine wiring patterning. <P>SOLUTION: This method for manufacturing a wiring board comprises a process to carry out the pattern etching of the first face side conductive region of a conductive sheet 8, and to form a projecting conductive part including a plurality of independent wiring layers 9, 10, 11a and 11b of a wiring board on the second face side conductive region; a process to laminate the projecting conductive part of the conductive sheet oppositely to an insulating layer, and to embed and integrate the projecting conductive part in an insulating layer; a process to remove the second face side conductive layer by etching while a band-shaped plated electrode is made to remain for commonly connecting the independent wiring layers; a process to coat an insulating layer for plating so that the region to be plated can be exposed; a process to plate the region to be plated; and a process to remove the band-shaped plate electrode part, and to electrically separate the independent wiring layers. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、実装回路装置用やパッケージ用等、ボンディングパッドを有する配線パターン部を備えた配線板の製造方法に関する。   The present invention relates to a method for manufacturing a wiring board having a wiring pattern portion having a bonding pad, such as for a mounted circuit device or a package.

周知のように配線板に、IC素子や抵抗体素子等の電子部品を実装して成る実装回路装置乃至パッケージは、各種電子機器類の高機能化や小型化等を目的に実用化が進められている。そして、この種の実装回路装置乃至パッケージの構成には、例えばワイヤボンディングパッド、半田ボンディングパッド等を含む配線パターン部、島状パッド等を備えた配線板が使用されている。なお、配線板は、多層的に信号配線パターンを絶縁体層に内蔵させた構成を採った片面型や両面型があり、或いは、裏面(他主面)に接地層若しくは放熱層を設置した構成を採ることもある。   As is well known, mounting circuit devices or packages in which electronic components such as IC elements and resistor elements are mounted on a wiring board are being put to practical use for the purpose of enhancing the functionality and miniaturization of various electronic devices. ing. In this type of mounting circuit device or package configuration, for example, a wiring board having a wiring pattern portion including a wire bonding pad, a solder bonding pad, etc., an island pad, etc. is used. In addition, the wiring board has a single-sided type or a double-sided type in which signal wiring patterns are built in an insulating layer in multiple layers, or a configuration in which a ground layer or a heat dissipation layer is installed on the back surface (other main surface). May be taken.

図7は、この種の片面型配線板について、一構成例を拡大して平面的に示したもので、絶縁体層1の一主面にワイヤボンディングパッド2a、半田ボンディングパッド2b等を含む配線パターン部2、さらには島状パッド(電子部品塔載部)3が設けられている。ここで、ワイヤボンディングパッド2a、半田ボンディングパッド2b及び島状パッド3は、銅箔等の選択的なエッチングによって、所謂配線パターン2cと同時にパターンニングされるが、信頼性の高い接続を形成し易いように、これらの表面を金等でメッキ処理してある。   FIG. 7 is an enlarged plan view of an example of a single-sided wiring board of this type, and includes a wire bonding pad 2a, a solder bonding pad 2b, etc. on one main surface of the insulator layer 1. A pattern portion 2 and further an island-shaped pad (electronic component mounting portion) 3 are provided. Here, the wire bonding pad 2a, the solder bonding pad 2b, and the island-like pad 3 are patterned simultaneously with the so-called wiring pattern 2c by selective etching of copper foil or the like, but it is easy to form a highly reliable connection. Thus, these surfaces are plated with gold or the like.

即ち、配線板の製造工程において、ワイヤボンディングパッド2a、半田ディングパッド2b等を含む配線パターン部2、島状パッド3を選択的なエッチングによって形成するとき、図7に示すように、配線パターン部2が接続する給電端子部4a,4bを外周縁部にパターニングし、さらに、給電端子部4a,4bの先端側の被外形加工部5をメッキ電極として利用する。そして、ワイヤボンディングパッド2a面、半田ボンディングパッド2b面、島状パッド3面及び給電端子部4a,4b面(点線で区画してある領域)を除く全面に、メッキレジスト層を被覆する。その後、電気メッキ処理して、所要の金属メッキ層、例えば金メッキ層を選択的に設けてから、予め設定しておいた外形加工線、例えばA−A線及びB−B線に沿った領域で切断分離して配線板を製造している。   That is, when the wiring pattern part 2 including the wire bonding pad 2a, the soldering pad 2b, and the island-like pad 3 are formed by selective etching in the manufacturing process of the wiring board, as shown in FIG. The power supply terminal portions 4a and 4b to which 2 is connected are patterned on the outer peripheral edge portion, and the outer shape processed portion 5 on the tip side of the power supply terminal portions 4a and 4b is used as a plating electrode. Then, a plating resist layer is coated on the entire surface except the surface of the wire bonding pad 2a, the surface of the solder bonding pad 2b, the surface of the island-shaped pad 3 and the surface of the power supply terminal portions 4a and 4b (regions partitioned by dotted lines). Then, after electroplating and selectively providing a required metal plating layer, for example, a gold plating layer, in a region along preset outline processing lines, for example, AA and BB lines The wiring board is manufactured by cutting and separating.

なお、上記配線板の製造工程においては、島状パッド3の一部は、所謂配線パターン2と電気的に独立しているため、図8に一部を拡大して平面的に示すように、引き回し線6をパターンニングしてメッキ電極5に接続し、メッキ終了後に穿孔7加工等によって断線化している。また、この種の配線板の製造手段では、生産性、量産性を考慮して、一般的に、配線板を多面取りに設計している。即ち、絶縁体層の一主面に単位配線パターン部2及び給電端子部4a,4b等を複数群パターンニングし、かつメッキ電極を被外形加工部5で共通化させ、一括して選択メッキ処理を行った後、単位配線板に外形加工を兼ねて分離する方式が採られている。   In addition, in the manufacturing process of the wiring board, a part of the island-shaped pad 3 is electrically independent from the so-called wiring pattern 2, and as shown in FIG. The lead wire 6 is patterned and connected to the plating electrode 5, and after the completion of plating, the lead wire 6 is broken by drilling 7 processing or the like. Further, in this type of wiring board manufacturing means, the wiring board is generally designed to have multiple layouts in consideration of productivity and mass productivity. That is, a plurality of groups of unit wiring pattern portions 2 and power supply terminal portions 4a and 4b are patterned on one main surface of the insulator layer, and plating electrodes are made common in the outer shape processing portion 5 to perform selective plating processing collectively. After performing the above, a method of separating the unit wiring board also for external processing is adopted.

実装回路装置用の配線板は、その用途拡大、機能向上等のため、島状パッドを備えた構成が望まれる傾向にあるが、一方では、表面メッキ処理が煩雑であるだけでなく、配線パターン2cの設計が制約されると言う不都合がある。即ち、島状パッド3は、ワイヤボンディングパッド2a等のように、所謂配線パターン部2と一体化していないため、電気メッキ処理に当たっては、別途、給電用配線パターン6を引き回し形成する必要がある。しかし、この給電用配線パターン6の引き回しは、配線の微細化や高密度配線化の設計を制約することになる。   Wiring boards for mounting circuit devices tend to require a configuration with island-like pads for expanding applications, improving functions, etc. On the other hand, not only the surface plating process is complicated, but also the wiring pattern There is a disadvantage that the design of 2c is restricted. That is, since the island-shaped pad 3 is not integrated with the so-called wiring pattern portion 2 like the wire bonding pad 2a or the like, it is necessary to separately form the power supply wiring pattern 6 in the electroplating process. However, the routing of the power supply wiring pattern 6 restricts the design of wiring miniaturization and high density wiring.

さらに言及すると、給電用配線パターン6の引き回しは、近接領域部の配線パターン2cの微細化や高密度配線、強いては配線板のコンパクト化を損なう恐れがある。また、上記設計の自由度を上げるため、層間接続方式を採った場合は、引き回し配線6が複雑化するだけでなく、引き回し配線6の断線化等の後処理を要するので、製造工程が煩雑化して生産性の低下等を招来する。   Furthermore, if the power supply wiring pattern 6 is routed, there is a risk that the miniaturization of the wiring pattern 2c in the proximity region, the high density wiring, and the compactness of the wiring board may be impaired. Further, in order to increase the degree of freedom of the design, when the interlayer connection method is adopted, not only the routing wiring 6 is complicated, but also post-processing such as disconnection of the routing wiring 6 is required, so that the manufacturing process becomes complicated. This causes a decrease in productivity.

特に、絶縁体層1を貫挿する導電体で電気的に接続した島状パッド3が、図9(a)に一部を平面的に、図9(b)に一部を断面的にそれぞれ拡大して示すような両面配線板のインターポーザー型の場合、島状パッド3に接続する被外形加工部(メッキ電極)5間の引き回し線6の配設が複雑化し、配線パターン2cの高密度化が阻害される。   In particular, an island-shaped pad 3 electrically connected by a conductor penetrating the insulator layer 1 is partially planar in FIG. 9A and partially cross-sectional in FIG. 9B. In the case of an interposer type of double-sided wiring board as shown in an enlarged manner, the arrangement of the lead wires 6 between the outer shape processed parts (plating electrodes) 5 connected to the island-like pads 3 is complicated, and the wiring pattern 2c has a high density. Is inhibited.

なお、何れの場合も、配線パターン部2の被メッキ領域に比べて、給電用配線パターン6の形状や太さ等に起因して、析出形成する電気メッキ層厚の制御難が懸念される。 In any case, compared to the plated area of the wiring pattern portion 2, there is a concern that it is difficult to control the thickness of the electroplated layer formed due to the shape and thickness of the power supply wiring pattern 6.

こうした問題に対して、電気メッキに代えて,無電解メッキ法の適用も考慮されるが、メッキ温度による悪影響の受け易さ、メッキ層厚の制御の難しさ、及びコスト面等の問題がある。   To deal with these problems, electroless plating may be applied instead of electroplating. However, there are problems such as ease of adverse effects due to plating temperature, difficulty in controlling the plating layer thickness, and cost. .

本発明は、上記事情に対処してなされたもので、信頼性の高いボンディングを可能にするメッキ層を容易に形成でき、かつより微細な配線パターン化もできる実装回路装置用に適する配線板の製造方法の提供を目的とする。   The present invention has been made in response to the above-described circumstances, and is a wiring board suitable for a mounting circuit device that can easily form a plating layer that enables highly reliable bonding and can also form a finer wiring pattern. The purpose is to provide a manufacturing method.

本発明の第1の発明は、第1面側の導電領域と第2面側の導電領域によって形成された導電シートの前記第1面側の導電領域をパターンエッチングし、前記第2面側の導電領域上に配線回路となる複数の独立配線層を含む凸形導電部を形成する工程と、
前記導電シートの前記凸形導電部を絶縁体層に対向させて積層し、前記凸形導電部を前記絶縁体層に埋め込み一体化する工程と、
前記独立配線層同士を共通接続するように帯状メッキ電極部を残して前記第2面側の導電領域をエッチングにより除去する工程と、
前記エッチング除去により露出された凸形導電部の前記第2面側に前記メッキされる領域が露出するようにメッキ用絶縁層を被覆する工程と、
前記帯状メッキ電極部を通して前記メッキされる領域をメッキする工程と、
前記帯状メッキ電極部を除去し前記独立配線層同士を電気的に分離する工程と
を具備することを特徴とする配線板の製造方法にある。
In the first aspect of the present invention, the conductive region on the first surface side of the conductive sheet formed by the conductive region on the first surface side and the conductive region on the second surface side is subjected to pattern etching, and the second surface side Forming a convex conductive portion including a plurality of independent wiring layers to be a wiring circuit on the conductive region;
Laminating the convex conductive portion of the conductive sheet facing the insulator layer, and embedding and integrating the convex conductive portion into the insulator layer;
Removing the conductive region on the second surface side by etching, leaving a strip-shaped plating electrode portion so as to commonly connect the independent wiring layers; and
Coating the insulating layer for plating so that the region to be plated is exposed on the second surface side of the convex conductive portion exposed by the etching removal;
Plating the region to be plated through the strip-like plating electrode portion;
And a step of electrically separating the independent wiring layers from each other by removing the strip-like plated electrode portion.

前記独立配線層の一部と前記帯状メッキ電極部との接続は、前記独立配線層と前記帯状メッキ電極部間に形成された前記凸形導電部の延長線によりなされていることが好ましい。   It is preferable that the connection between a part of the independent wiring layer and the strip-shaped plated electrode portion is made by an extension line of the convex conductive portion formed between the independent wiring layer and the strip-shaped plated electrode portion.

本発明の第2の発明は、導電シートの第1面にボンディングパッドを含む独立分離した配線パターン部、前記各配線パターンに連接して端縁外形加工側に延出する給電端子部、島状パッド部及び前記給電端子部側を一体化する被外形加工部を有し、かつ前記配線パターン部、給電端子部並びに島状のパッド部を選択的なハーフエッチング処理で凸形導電部に形成する工程と、
前記導電シートの凸形導電部形成面を絶縁体層に対向させて積層し、この積層体を厚さ方向に加圧し前記導電シートの凸形導電部形成領域を絶縁体層へ埋め込み一体化して第2面に露出した導電シート張り板を形成する工程と、
前記導電シート張り板の前記配線パターン部並びに前記給電端子部の間、及び前記島状パッド部に隣接する対応領域を帯状メッキ電極部形成のためにエッチングレジスト層で被覆し、露出している導電シートの平坦第2面側を選択的にエッチング処理して除去し前記配線パターン及び給電端子を分離する工程と、
前記分離化した配線パターン部のボンディングパッド並びに給電端子部、及び島状パッド部のメッキ領域を除いた面にメッキレジスト層を被覆し、前記帯状メッキ電極部を電極として選択的なメッキ処理を行う工程と、
前記帯状メッキ電極部を選択的にエッチング除去して各配線パターン、給電端子部及び島状パッドの間を絶縁隔離する工程と、
前記各配線パターン、給電端子部及び島状パッドの間を絶縁隔離して得られる配線板の被メッキ領域面以外をソルダーレジスト層で被覆する工程と、
前記ソルダーレジスト層を被覆した前記配線板を外形加工線に沿って切断分離する工程と、
を具備することを特徴とする配線板の製造方法にある。
According to a second aspect of the present invention, there is provided an independently separated wiring pattern portion including a bonding pad on the first surface of the conductive sheet, a power supply terminal portion connected to each of the wiring patterns and extending toward the edge outer shape processing side, an island shape A contoured part that integrates the pad part and the power supply terminal part side is formed, and the wiring pattern part, the power supply terminal part, and the island-shaped pad part are formed on the convex conductive part by selective half-etching. Process,
The conductive sheet forming surface of the conductive sheet is laminated facing the insulator layer, and this laminate is pressed in the thickness direction so that the convex conductive part forming region of the conductive sheet is embedded in the insulator layer and integrated. Forming a conductive sheet-clad plate exposed on the second surface;
A conductive region covered with an etching resist layer for forming a strip-shaped plating electrode portion is formed between the wiring pattern portion and the power supply terminal portion of the conductive sheet-clad plate and adjacent to the island-shaped pad portion with an etching resist layer. A step of selectively etching and removing the flat second surface side of the sheet to separate the wiring pattern and the power supply terminal;
A plating resist layer is coated on the surface of the separated wiring pattern portion excluding the bonding pad, the power supply terminal portion, and the island-like pad portion, and selective plating is performed using the strip-like plating electrode portion as an electrode. Process,
A step of selectively removing the strip-shaped plated electrode portion to insulate and isolate each wiring pattern, the power supply terminal portion and the island-shaped pad;
The step of covering the wiring pattern other than the plated area of the wiring board obtained by insulating and isolating between each wiring pattern, the power supply terminal portion and the island-shaped pad, and
Cutting and separating the wiring board coated with the solder resist layer along an outline processing line;
It is in the manufacturing method of the wiring board characterized by comprising.

本発明の第3の発明は、導電シートの第1面にボンディングパッドを含む独立分離した配線パターン部、前記各配線パターンに連接して端縁外形加工側に延出する給電端子部、島状パッド部及び前記給電端子部側を一体化する被外形加工部を有し、かつ前記配線パターン部、給電端子部並びに島状のパッド部を選択的にハーフエッチング処理で凸形導電部に形成する工程と、
前記導電シートの凸形導電部形成面を絶縁体層に対向させて積層し、この積層体を厚さ方向に加圧し前記導電シートの凸形導電部を絶縁体層に埋め込み一体化し第2面を露出した導電シート張り板を形成する工程と、
前記導電シート張り板の給電端子部の被外形加工部及び島状パッド部に導通し前記導電シート張り板を横切る帯状メッキ電極を形成するために帯状メッキ電極領域をエッチングレジスト層で被覆し、露出している導電シートの第2面側を選択的にエッチング処理して前記帯状メッキ電極を残して配線パターン及び給電端子を分離化する工程と、
前記分離化した配線パターン部のボンディングパッド並びに給電端子部、及び島状パッド部を除いた面にメッキレジスト層を被覆し、前記帯状のメッキ電極を一電極として選択的なメッキ処理を行う工程と、
前記電気メッキ処理後に帯状メッキ電極を選択的にエッチング除去して島状パッドとの間を絶縁隔離する工程と、
前記島状パッドの間を絶縁隔離して得られる配線板の被メッキ領域面以外をソルダーレジスト層で被覆する工程と、
前記ソルダーレジスト層を被覆した配線板を外形加工線に沿って切断分離する工程と、
を具備することを特徴とする配線板の製造方法にある。
According to a third aspect of the present invention, there is provided an independently separated wiring pattern portion including a bonding pad on the first surface of the conductive sheet, a power supply terminal portion connected to each of the wiring patterns and extending toward the edge outer shape processing side, an island shape A contoured portion that integrates the pad portion and the power supply terminal portion side is formed, and the wiring pattern portion, the power supply terminal portion, and the island-shaped pad portion are selectively formed into a convex conductive portion by a half-etching process. Process,
The conductive sheet forming surface of the conductive sheet is laminated so as to face the insulator layer, and the laminate is pressed in the thickness direction so that the convex conductive portion of the conductive sheet is embedded in the insulator layer and integrated. A step of forming a conductive sheet-clad plate that is exposed;
Cover the strip-shaped plating electrode region with an etching resist layer to form a strip-shaped plating electrode that conducts to the contoured portion and island-shaped pad portion of the power supply terminal portion of the conductive sheet stretching plate and crosses the conductive sheet stretching plate, and is exposed A step of selectively etching the second surface side of the conductive sheet and separating the wiring pattern and the power supply terminal leaving the strip-shaped plating electrode;
Coating the plating resist layer on the surface of the separated wiring pattern portion excluding the bonding pad, the power supply terminal portion, and the island-shaped pad portion, and performing a selective plating process using the strip-shaped plating electrode as one electrode; ,
A step of selectively etching away the strip-shaped plating electrode after the electroplating process to insulate and isolate the island-shaped pad;
A step of coating the area other than the plated area of the wiring board obtained by insulating and isolating the island-shaped pads with a solder resist layer;
Cutting and separating the wiring board coated with the solder resist layer along the outer shape processing line;
It is in the manufacturing method of the wiring board characterized by comprising.

本発明の一態様によれば、導電シートは、例えば厚さ12〜35μm程度の銅箔、アルミ箔、ニッケル箔等であり、経済性や加工性の点等から銅箔が望ましい。そして、この導電シートの選択的なハーフエッチング(片面側の突起状パターニング)は、後続のエッチング処理の場合を含め、例えばドライフィルム等のエッチングレジスによるマスキング、対応するエッチング液による処理、若しくはフラッシュエッチング処理で行われる。   According to one aspect of the present invention, the conductive sheet is, for example, a copper foil, an aluminum foil, a nickel foil, or the like having a thickness of about 12 to 35 μm, and a copper foil is desirable from the viewpoint of economy and workability. This selective half-etching (projection patterning on one side) of the conductive sheet includes, for example, subsequent etching processing, masking with an etching resist such as a dry film, processing with a corresponding etching solution, or flash etching. Done in the process.

また、絶縁体層は、例えばエポキシ樹脂、フェノール樹脂,ポリイミド樹脂、ポリアミドイミド樹脂、ポリエーテルイミド樹脂、ポリエーテルエーテルケトン樹脂、液晶ポリマー等の1種若しくは2種以上の混合系、或いはガラスクロスやマット、繊維類等との組み合わせたシート(フィルム状)である。そして、これら絶縁体層の厚さは、10〜1000μm程度、好ましくは50〜200μm程度であり、両面に配線パターンを有する構成としてもよい。   The insulator layer may be, for example, an epoxy resin, a phenol resin, a polyimide resin, a polyamideimide resin, a polyetherimide resin, a polyetheretherketone resin, a liquid crystal polymer, or a mixed system such as glass cloth, It is a sheet (film-like) combined with mats, fibers and the like. And the thickness of these insulator layers is about 10-1000 micrometers, Preferably it is about 50-200 micrometers, and it is good also as a structure which has a wiring pattern on both surfaces.

なお、上記絶縁体層は、例えばキシダール(商品名,Dartco社製)、べクトラ(商品名,Clanese社製)等で代表される多軸配向の熱可塑性液晶ポリマー層が望ましい。即ち、この種の液晶ポリマーは、吸湿性が殆ど無く、誘電率が約3.0(1MHz)程度であり、広い周波数領域で安定しているためである。 The insulator layer is preferably a multiaxially oriented thermoplastic liquid crystal polymer layer represented by, for example, xidar (trade name, manufactured by Dartco), Vectra (trade name, manufactured by Clanese), or the like. That is, this type of liquid crystal polymer has almost no hygroscopicity, has a dielectric constant of about 3.0 (1 MHz), and is stable in a wide frequency range.

本発明において、電気メッキに先立って被メッキ領域、即ちボンディングパッド、島状パッド及び給電端子の各領域を除いて被覆するメッキレジストは、通常、この種配線板の製造で使用されているものであり、その厚さなど等も特には限定されない。なお、配線パターン部に含まれるボンディングパッドな並びに給電端子部、及び島状パッドに対しては、被外形加工部を成す導体箔をメッキ電極として使用することもできる。   In the present invention, the plating resist that covers the areas to be plated prior to electroplating, that is, the bonding pads, the island-shaped pads, and the power supply terminals, is usually used in the manufacture of this type of wiring board. There is no particular limitation on the thickness and the like. For the bonding pads, the power supply terminal portions, and the island-shaped pads included in the wiring pattern portion, the conductor foil that forms the outer shape processed portion can also be used as a plating electrode.

帯状メッキ電極部は配線パターン領域上を一側から他側にかけて横切るように形成され、帯状とは広い意味に解し、長さに対する幅の比率は1以上のみならず機能を同じにする限り1以下のものも含むものである。線状のほか、格子状、蛇行、その他のパターン配置も含むものである。   The band-shaped plated electrode portion is formed so as to cross the wiring pattern region from one side to the other side. The band shape is understood to have a broad meaning, and the ratio of the width to the length is 1 as long as the function is the same as well as 1 or more. The following are also included. In addition to the linear shape, it also includes a lattice shape, meandering, and other pattern arrangements.

本発明によれば、一主面すなわち第1面側に対する所謂ハーフエッチングによる配線パターン等の形成に伴って薄膜化及び微細化が可能であるだけでなく、それら配線パターン等が絶縁体層表面部へ埋め込み配設された構成を採る。一方、ボンディングパッド面及び島状パッド面に対するメッキ層の形成に当たっては、他主面すなわち第2面側に配線パターン群等と交叉・導通させて選択的に非エッチング領域を残し、この非エッチング領域層を共通の帯状メッキ電極として機能させる。   According to the present invention, not only thinning and miniaturization are possible with the formation of a wiring pattern or the like by so-called half-etching on one main surface, that is, the first surface side, but these wiring patterns and the like are also formed on the surface of the insulator layer. A configuration in which it is embedded and arranged is adopted. On the other hand, when forming the plating layer on the bonding pad surface and the island-shaped pad surface, the non-etching region is selectively left by crossing and conducting the wiring pattern group on the other main surface, that is, the second surface side. Make the layer function as a common strip-like plating electrode.

つまり、配線パターン部のボンディングパッドだけでなく、島状パッドに対する電気メッキ用の給電に、配線パターンニングに使用する導電シートの一部を使用し、電気メッキ処理後、ハーフエッチングによって導通を切り離す手段を採っている。このため、各島状パッドに対する給電用の引き回しパターンの形設が省略され、高精度の配線パターンの微細化乃至高密度化等も可能となり、信頼性の高い実装回路装置用の配線板を歩留まりよく、かつ量産的に提供できる。ここにハーフエッチングとは導電シート表裏面の一方の面から貫通させずにシート中間部までエッチングすることを意味し、この中間部は必ずしもシートの1/2厚の位置でなくてもよい。   In other words, a part of the conductive sheet used for wiring patterning is used for feeding power for electroplating not only to the bonding pads of the wiring pattern part but also to the island-shaped pads, and after the electroplating process, the means for separating conduction by half etching Is adopted. For this reason, it is possible to omit the formation of a power supply routing pattern for each island-shaped pad, and it is possible to reduce the size or increase the density of a highly accurate wiring pattern, thereby yielding a highly reliable wiring board for a mounted circuit device. Good and can be offered in mass production. Here, half-etching means that etching is performed up to the middle portion of the sheet without penetrating from one surface of the front and back surfaces of the conductive sheet, and this middle portion does not necessarily have to be at a half thickness position of the sheet.

また第1面側、第2面側の導電領域とは各一方の面側からハーフエッチされる厚みの領域である。エッチングされた残りが他方の導電領域となる。   The conductive regions on the first surface side and the second surface side are regions having a thickness that is half-etched from one surface side. The remaining etched portion becomes the other conductive region.

以下、実施態様の概要を示す図1〜図5を参照して説明する。   A description will be given below with reference to FIGS.

(実施形態1)
先ず、導電シートとして厚さ35μmの導電シート、例えば銅箔を用意し、この銅箔の少なくとも片面にエッチングレジスト層、例えば光硬化性のドライフィルムを一体的に配設し、一主面側のドライフィルムに露光現像処理を施し、被外形加工領域及び配線パターンに応じたレジストマスキングを行う。その後、ハーフエッチング処理を施して、ボンディングパッドを含む独立分離した配線パターン部、前記各配線パターンに連接して端縁外形加工側に延出する給電端子部、島状パッド部及び前記給電端子部側を一体化する被外形加工部を有し、かつ前記配線パターン、ボンディングパッド、島状パッド、及び被外形加工領域を高さ18μm程度の凸形導電部に形成具備した銅箔パターンとする。
(Embodiment 1)
First, a conductive sheet having a thickness of 35 μm, for example, a copper foil is prepared as a conductive sheet, and an etching resist layer, for example, a photo-curable dry film is integrally disposed on at least one surface of the copper foil. The dry film is exposed and developed, and resist masking is performed according to the outer shape processing region and the wiring pattern. Thereafter, a half-etching process is performed to independently separate wiring pattern portions including bonding pads, power supply terminal portions that are connected to the respective wiring patterns and extend to the edge outer shape processing side, island-shaped pad portions, and the power supply terminal portions. A copper foil pattern having a contoured portion that integrates the sides and having the wiring pattern, bonding pad, island pad, and contoured region formed on a convex conductive portion having a height of about 18 μm is provided.

図1は、前記エッチングレジスト層を除去して、銅箔8のハーフエッチング面8、即ち、ワイヤボンディングパッド9a、半田ボンディングパッド9b及び配線パターン9cから成る配線パターン部9と、島状パッド10と、給電端子部11a,11bと、被外形加工部12が突起化して凸形導電部(9,10,11a,11b,12)となっている一主面(第1面)81をエッチングしない裏面である他の主面(第2面)82側から見た透視平面図である。図2(a),(b)はハーフエッチングした銅箔8の一部を拡大して示すもので、(a)は平面図、(b)は(a)のC−C線及びD−D線に沿った断面図である。   FIG. 1 shows a half-etched surface 8 of a copper foil 8 after removing the etching resist layer, that is, a wiring pattern portion 9 composed of a wire bonding pad 9a, a solder bonding pad 9b and a wiring pattern 9c, and an island-shaped pad 10 The back surface of the main surface (first surface) 81 where the power supply terminal portions 11a and 11b and the contoured processed portion 12 are projected to form a convex conductive portion (9, 10, 11a, 11b, 12) is not etched. It is the see-through | perspective plan view seen from the other main surface (2nd surface) 82 side which is. 2 (a) and 2 (b) are enlarged views of a part of the half-etched copper foil 8, (a) is a plan view, and (b) is a CC line and DD in (a). It is sectional drawing along a line.

次に、前記導電シート8の凸形導電部化面を絶縁体層13に対向させて積層し、この積層体を厚さ方向に加圧し、図3(a)に一部を拡大して断面的に示すように、また、図3(b)に一部を拡大して斜視的に示すように銅箔8の凸形導電部化面(ハーフエッチングパターン面、第1面)81を絶縁体層13へ埋め込み一体化して片面銅箔張り板14化する。   Next, the conductive sheet 8 is laminated with the convex conductive portion facing the insulator layer 13, and the laminate is pressed in the thickness direction, and a part of FIG. Further, as shown in FIG. 3 (b), a partially enlarged perspective view of the convex conductive portion (half-etched pattern surface, first surface) 81 of the copper foil 8 is an insulator. It is embedded in the layer 13 and integrated into a single-sided copper foil-clad plate 14.

その後、図4に透視的に示すように、前記片面銅箔張り板14の配線パター部9並びに給電端子部11aの間、及び島状パッド部10に隣接する対応領域を帯状メッキ電極をつくるためにエッチングレジスト層(例えばドライフィルム)15a,15b,15cで被覆し、露出している銅箔8の平坦面(第2面)82側を選択的にエッチング(例えばフラッシュエッチング)処理して配線パター9c及び給電端子11a,11bを分離化する。即ち、図5に一部を拡大して斜視的に示すように、配線パター9cをマスキングした部分15a,15b,15cは、残余の銅箔である帯状メッキ電極部8a(8b)で一体的に接続され、島状パッド10を含む被メッキ領域が全体的に導電接続する構成に加工する。なお、帯状メッキ電極部は線状などの形状を含むものである。   Thereafter, as shown in a perspective view in FIG. 4, in order to form a belt-like plated electrode in the corresponding region between the wiring pattern portion 9 and the power supply terminal portion 11 a of the single-sided copper foil-clad plate 14 and adjacent to the island-like pad portion 10. Are coated with an etching resist layer (for example, dry film) 15a, 15b, 15c, and the exposed flat surface (second surface) 82 side of the copper foil 8 is selectively etched (for example, flash etching) to form a wiring pattern. 9c and the power supply terminals 11a and 11b are separated. That is, as shown in a partially enlarged perspective view in FIG. 5, the portions 15a, 15b, and 15c masked with the wiring pattern 9c are integrally formed by the strip-like plated electrode portion 8a (8b) that is the remaining copper foil. The region to be plated including the island-like pad 10 is processed so as to be conductively connected as a whole. The strip-shaped plated electrode portion includes a shape such as a line.

次いで、前記分離した配線パターン部9のボンディングパッド9a並びに給電端子部11a,11b、及び島状パッド部10を除いた面にメッキレジスト層(メッキ用絶縁層)30を被覆し、対向電極と共に電気メッキ液に浸して帯状のメッキ電極部8a,8bとの間にメッキ電圧を加えて選択的なメッキ処理を行う。なお、この電気メッキ時の電圧印加は、帯状のメッキ電極部8a,8bが連接する被外形加工部12としてもよい。   Next, a plating resist layer (insulating layer for plating) 30 is coated on the surface of the separated wiring pattern portion 9 excluding the bonding pad 9a, the power supply terminal portions 11a and 11b, and the island-like pad portion 10, and is electrically connected with the counter electrode. A selective plating process is performed by applying a plating voltage between the strip-shaped plating electrode portions 8a and 8b by dipping in a plating solution. The voltage application at the time of electroplating may be applied to the outer shape processed portion 12 where the strip-shaped plated electrode portions 8a and 8b are connected.

上記電気メッキ処理によって、ボンディングパッド9a並びに給電端子部11a,11b、及び島状パッド部10等の露出している面にメッキ層(例えば金層)を選択的に被覆形成する。この電気メッキ処理後に、前記帯状メッキ電極用導電性箔8a,8bを選択的にエッチング除去して各配線パターン9c、給電端子部11a,11b及び島状パッド10の間を絶縁隔離する。このエッチング処理において、露出しているボンディングパッド9a,給電端子部11a,11b及び島状パッド10は、露出面が金メッキ層で被覆されているため、エッチングされず所要の寸法形状を維持する。   By the electroplating process, a plating layer (for example, a gold layer) is selectively formed on the exposed surfaces of the bonding pad 9a, the power supply terminal portions 11a and 11b, the island-shaped pad portion 10, and the like. After the electroplating process, the conductive foils 8a and 8b for the strip-like plating electrode are selectively removed by etching to insulate and isolate the wiring patterns 9c, the power supply terminal portions 11a and 11b, and the island-like pads 10. In this etching process, the exposed bonding pads 9a, the power supply terminal portions 11a and 11b, and the island-shaped pads 10 are not etched and maintain the required dimensional shape because the exposed surfaces are covered with the gold plating layer.

引き続き、上記各配線パターン9c、給電端子部11a,11b及び島状パッド10の間を絶縁隔離した配線板の被メッキ領域面以外(帯状メッキ電極用導電性箔8a,8bを選択的にエッチング除去した領域面を含めて)にソルダーレジスト層を被覆する。つまり、ボンディングパッド9a,9b、給電端子部11a,11b及び島状パッド10の各領域を除いて全面的にソルダーレジスト層で被覆する。その後、前記ソルダーレジスト層を被覆した配線板を外形加工線(図1,4のA−A線,B−B線)に沿って切断分離することにより片面型の配線板を得る。   Subsequently, the conductive patterns 8a and 8b for the strip-shaped plating electrodes are selectively etched away except for the surface of the wiring board where the wiring patterns 9c, the power supply terminal portions 11a and 11b, and the island-shaped pads 10 are insulated and isolated. The solder resist layer is coated on the surface (including the region surface). That is, the entire surface is covered with the solder resist layer except for the bonding pads 9a and 9b, the power supply terminal portions 11a and 11b, and the island-like pads 10. Thereafter, the wiring board coated with the solder resist layer is cut and separated along outline processing lines (AA lines and BB lines in FIGS. 1 and 4) to obtain a single-sided wiring board.

(実施形態2)
この実施形態は、所謂両面型(インターポーザータイプ)の配線板の製造方法である。
(Embodiment 2)
This embodiment is a method for manufacturing a so-called double-sided (interposer type) wiring board.

実施例1の場合と同様に、導電シート、例えば厚さ35μm程度の銅箔を用意し、この銅箔の少なくとも片面にエッチングレジスト層、例えば光硬化性のドライフィルムを一体的に配設し、一主面側のドライフィルムに露光現像処理を施し、被外形加工領域及び格子状に配置される浮き島型ボンディングパッドに応じたレジストマスキングを行う。次いで、ハーフエッチング処理を施して、図6(a)に平面的に、図6(b)に断面的に、また、図6(c)に透視的に、それぞれ拡大して示す如く、浮き島型ボンディングパッド16a,16b及び被外形加工領17a,17bを高さ18μm程度の凸状に形成具備した銅箔18a,18b化する。ここで、浮き島型ボンディングパッド16a,16b及び被外形加工領17a,17bは、それぞれ対応して配設される。ここに浮き島型ボンディングパッドは周囲を他の導電領域に囲まれて基板縁部に導体を引き出すのがむずかしい領域の電極パッドである。 As in the case of Example 1, a conductive sheet, for example, a copper foil having a thickness of about 35 μm is prepared, and an etching resist layer, for example, a photocurable dry film is integrally disposed on at least one surface of the copper foil. The dry film on one main surface side is subjected to exposure and development processing, and resist masking is performed according to the outer shape processing region and floating island type bonding pads arranged in a grid pattern. Next, a half-etching process is performed so that the floating island type is enlarged as shown in a plan view in FIG. 6 (a), a cross-section in FIG. 6 (b), and a perspective view in FIG. 6 (c). The bonding pads 16a and 16b and the outer shape processing regions 17a and 17b are formed into copper foils 18a and 18b having a convex shape with a height of about 18 μm. Here, the floating island type bonding pads 16a and 16b and the outer shape processing areas 17a and 17b are respectively arranged correspondingly. Here, the floating island type bonding pad is an electrode pad in a region where it is difficult to draw a conductor to the edge of the substrate surrounded by other conductive regions.

その後、一方の銅箔、例えば、銅箔18aの突起状のボンディングパッド16aの頂面に、スクリーン印刷法によって導電性ペーストを印刷し、円錐状の導電性バンプ19を形成する。ここで、導電性バンプ19の形成は、通常、スクリーン印刷及び乾燥処理の繰り返しで行われる。次に、上記導電性バンプ19の形成面側に、絶縁体層、例えば厚さ50μm程度の液晶ポリマーフィルム20、及び前記の他の銅箔18bを位置合せ積層し、この積層体を加熱加圧して、図6(d)に拡大して断面的に示すように、液晶ポリマーフィルム20を貫挿した導電性バンプ19で両面銅箔18a,18bが電気的に接続すると共に、浮き島型ボンディングパッド16a,16b等の突起部が液晶ポリマーフィルム20に埋め込まれた状態の両面銅箔張り板21を製作する。なお、導電性バンプのかわりにスルーホールでもよいことは言うまでもない。   Thereafter, a conductive paste is printed on the top surface of one copper foil, for example, the protruding bonding pad 16a of the copper foil 18a, by a screen printing method to form a conical conductive bump 19. Here, the formation of the conductive bumps 19 is usually performed by repeating screen printing and drying processing. Next, an insulating layer, for example, a liquid crystal polymer film 20 having a thickness of about 50 μm and the other copper foil 18b are aligned and laminated on the surface where the conductive bump 19 is formed, and this laminated body is heated and pressurized. 6D, the double-sided copper foils 18a and 18b are electrically connected by the conductive bumps 19 through which the liquid crystal polymer film 20 is inserted, and the floating island type bonding pad 16a. , 16b and the like, and the double-sided copper foil-clad plate 21 in a state where the protrusions are embedded in the liquid crystal polymer film 20 is manufactured. Needless to say, through holes may be used instead of the conductive bumps.

次いで、図6(e)に透視的に示す如く、浮き島型ボンディングパッド16bの列を対とし、これら浮き島型ボンディングパッド16bの列に跨るように、銅箔18bの露出面へエッチングレジスト(ドライフィルム)22を貼り合せる。このドライフィルム22を貼り合せた両面銅箔張り板21の両面銅箔18a,18bを、例えばフラッシュエッチング処理して、図6(f)に平面的に示す如く、液晶ポリマーフィルム20面に、前記浮き島型ボンディングパッド16a,16bが島状に露出した構成とする。   Next, as shown in a perspective view in FIG. 6 (e), a pair of floating island type bonding pads 16b is paired, and an etching resist (dry film) is formed on the exposed surface of the copper foil 18b so as to straddle the row of floating island type bonding pads 16b. ) 22 is pasted. The double-sided copper foils 18a and 18b of the double-sided copper foil-clad plate 21 to which the dry film 22 is bonded are subjected to, for example, flash etching treatment, and the surface of the liquid crystal polymer film 20 as shown in FIG. The floating island type bonding pads 16a and 16b are exposed in an island shape.

このフラッシュエッチング処理で、両面銅箔張り板21の銅箔18aは,浮き島型ボンディングパッド16a領域で全面的にハーフエッチングが進められ、浮き島型ボンディングパッド16aは互いに絶縁離隔した構成を採っている。一方、銅箔18bは、マスキング22領域のエッチングが抑止されるため、選択的なエッチングとなって残った帯状電極部22aによって、浮き島型ボンディングパッド16b対が外形加工部17b側と電気的に接続する形を採っている。   With this flash etching process, the copper foil 18a of the double-sided copper foil-clad plate 21 is half-etched entirely in the floating island type bonding pad 16a region, and the floating island type bonding pad 16a is insulated from each other. On the other hand, in the copper foil 18b, since the etching of the masking 22 region is suppressed, the pair of floating island type bonding pads 16b is electrically connected to the outer shape processing portion 17b side by the strip-shaped electrode portion 22a remaining as a selective etching. The shape to take.

そして、この状態で電気メッキ液に、対向電極と共に浸漬してメッキ電圧を印加すると、連接するマスキング22で残存した帯状電極部22aを介した通電で、前記浮き島型ボンディングパッド16a,16b面にメッキ金属層が形成される。この電気メッキ処理後、浮き島型ボンディングパッド16b対に連接していた帯状銅箔を選択的にエッチング除去し、さらに、要すれば半田レジスト層を設けて、図6(g)に平面的に示すように、互いに電気的に離隔し、かつ表面が金メッキ層などで被覆された浮き島型ボンディングパッド16a,16bを備えた両面型配線板が得られる。勿論、最終的には、所謂外形加工が行われる。   In this state, when a plating voltage is applied by immersing it in the electroplating solution together with the counter electrode, the surfaces of the floating island type bonding pads 16a and 16b are plated by energization through the strip electrode portion 22a remaining in the connected masking 22. A metal layer is formed. After this electroplating process, the strip-shaped copper foil connected to the floating island type bonding pad 16b pair is selectively removed by etching, and if necessary, a solder resist layer is provided, which is shown in a plan view in FIG. Thus, a double-sided wiring board having floating island type bonding pads 16a and 16b which are electrically separated from each other and whose surfaces are covered with a gold plating layer or the like is obtained. Of course, so-called outer shape processing is finally performed.

上記各実施形態から分かるように、導電シートのハーフエッチング処理によって、配線パターン部のボンディングパッド、給電端子部、島状パッド等を一次的に形設する一方、導電シートの反対面側の一部を電気メッキ用の給電に一時的に使用した後、ハーフエッチングによって除去、切り離す手段を採っている。従って、各島状パッドに対する給電用の引き回しパターンの形設を省略できるため、配線パターンの微細化、高密度化等も容易になって、信頼性が高くて,かつコンパクト化できる配線板を歩留まりよく量産的に提供できた。   As can be seen from each of the above embodiments, a bonding pad, a power supply terminal portion, an island pad, etc. of the wiring pattern portion are temporarily formed by half etching treatment of the conductive sheet, while a part on the opposite surface side of the conductive sheet. Is temporarily used for power supply for electroplating and then removed and cut off by half etching. Accordingly, since it is possible to omit the formation of a power supply routing pattern for each island-shaped pad, it is easy to miniaturize and increase the density of the wiring pattern, and it is possible to obtain a highly reliable and compact wiring board. We were able to provide mass production well.

なお、本発明は、上記実施形態に限定されるものでなく、発明の主旨を逸脱しない範囲でいろいろの変形を採ることができる。例えば絶縁体層及び導電シートの材質、或いはそれらの厚さなど任意に選択できる。   In addition, this invention is not limited to the said embodiment, A various deformation | transformation can be taken in the range which does not deviate from the main point of invention. For example, the material of the insulator layer and the conductive sheet, or their thicknesses can be arbitrarily selected.

実施形態1において導電シート面をハーフエッチング処理で凹凸状に配線パターン化した面を示す平面図。The top view which shows the surface which made the conductive sheet surface into the uneven | corrugated shape by half etching process in Embodiment 1. FIG. (a)は図1に図示した配線パターン化面の一部を拡大して示す平面図、(b)は(a)のC−C線に沿った断面図、(c)は(a)のD−D線に沿った断面図。(A) is a plan view showing a part of the wiring patterning surface shown in FIG. Sectional drawing along a DD line. 実施形態1において凹凸状に配線パターン化した面を絶縁体層に積層一体化した片面銅箔張り板の一部を示し、(a)は断面図、(b)は斜視図。The part of the single-sided copper foil clad board which laminated | stacked and integrated the surface patterned into the uneven | corrugated shape in the insulator layer in Embodiment 1 is shown, (a) is sectional drawing, (b) is a perspective view. 実施形態1において片面銅箔張り板の銅箔面に選択的にエッチングレジスト層を被覆した態様を示す透視図。The perspective view which shows the aspect which selectively coat | covered the etching resist layer on the copper foil surface of the single-sided copper foil tension board in Embodiment 1. FIG. 実施形態1において片面銅箔張り板の銅箔を表面側から選択的にエッチングして凸状配線パターンを露出させた状態の一部を示す斜視図。The perspective view which shows a part of state which selectively etched the copper foil of the single-sided copper foil-clad board from the surface side in Embodiment 1, and exposed the convex wiring pattern. 実施形態2において両面浮島パッド型配線板の製造実施態様を模式的示したもので、(a)はハーフエッチング処理で凹凸状に配線パターン化した銅箔面の一部を示す平面図、(b)は断面図、(c)は透視図、(d)は配線パターン化面を絶縁体層の両面に積層一体化した両面銅箔張り板の一部を示す断面図、(e)は一方の銅箔面に選択的にメッキレジスト層を被覆した態様を示す透視図、(f)は電気メッキ処理後に銅箔を表面側から選択的にハーフエッチングして凸形導電部の配線パターンを露出させた状態の一部を示す平面図、(g)はエッチングレジスト層下の銅箔を再度のハーフエッチング処理で除去しそれぞれ絶縁離隔した浮島パッド面を露出させた平面図。The manufacturing embodiment of a double-sided floating island pad type wiring board in Embodiment 2 is shown schematically, (a) is a plan view showing a part of a copper foil surface patterned into a concavo-convex shape by a half-etching process, (b) ) Is a cross-sectional view, (c) is a perspective view, (d) is a cross-sectional view showing a part of a double-sided copper foil-clad plate in which a wiring pattern surface is laminated and integrated on both sides of an insulator layer, and (e) is one side. A perspective view showing a state in which a plating resist layer is selectively coated on the copper foil surface, (f) is a half-etching selectively from the surface side after the electroplating process to expose the wiring pattern of the convex conductive portion. The top view which shows a part of the state which removed the copper foil under an etching resist layer by the half-etching process again, and the top view which exposed the floating island pad surface each insulated. 従来の製造方法において使用する片面型配線板の配線パターン例を示す平面図。The top view which shows the example of a wiring pattern of the single-sided type | mold wiring board used in the conventional manufacturing method. 図7の一部を拡大して示す平面図。The top view which expands and shows a part of FIG. 従来の両面浮島パッド型配線板の製造において、(a)第1面側の浮き島パッドに対するメッキ給電用配線例の一部を示す平面図、(b)は両面銅通構造を示す断面図。In manufacture of the conventional double-sided floating island pad type | mold wiring board, (a) The top view which shows a part of example of the wiring for plating electric power feeding with respect to the floating island pad of the 1st surface side, (b) is sectional drawing which shows a double-sided copper passage structure.

符号の説明Explanation of symbols

13,20…絶縁体層
9…配線パターン部
9a…ワイヤボンディングパッド
9b…半田ボンディングパッド
9c…配線パターン
10,16a,16b…島状パッド
11a,11b,22…給電端子部
12,17a,17b…被外形加工部
6…引き回し線(パターン)
8,18a,18b…導電シート(銅箔)
14…片面銅箔張り板
15a,15b,20…エッチングレジスト層(ドライフィルム)
19…導電性バンプ
21…両面銅箔張り板
30…メッキレジスト層(メッキ用絶縁層)
81…第1面
82…第2面
DESCRIPTION OF SYMBOLS 13,20 ... Insulator layer 9 ... Wiring pattern part 9a ... Wire bonding pad 9b ... Solder bonding pad 9c ... Wiring pattern 10, 16a, 16b ... Island-like pad 11a, 11b, 22 ... Feeding terminal part 12, 17a, 17b ... Processed part 6: Drawing line (pattern)
8, 18a, 18b ... conductive sheet (copper foil)
14 ... Single-sided copper foil-clad plate 15a, 15b, 20 ... Etching resist layer (dry film)
DESCRIPTION OF SYMBOLS 19 ... Conductive bump 21 ... Double-sided copper foil board 30 ... Plating resist layer (insulating layer for plating)
81 ... first surface 82 ... second surface

Claims (4)

第1面側の導電領域と第2面側の導電領域によって形成された導電シートの前記第1面側の導電領域をパターンエッチングし、前記第2面側の導電領域上に配線回路となる複数の独立配線層を含む凸形導電部を形成する工程と、
前記導電シートの前記凸形導電部を絶縁体層に対向させて積層し、前記凸形導電部を前記絶縁体層に埋め込み一体化する工程と、
前記独立配線層同士を共通接続するように帯状メッキ電極部を残して前記第2面側の導電領域をエッチングにより除去する工程と、
前記エッチング除去により露出された凸形導電部の前記第2面側に前記メッキされる領域が露出するようにメッキ用絶縁層を被覆する工程と、
前記帯状メッキ電極部を通して前記メッキされる領域をメッキする工程と、
前記帯状メッキ電極部を除去し前記独立配線層同士を電気的に分離する工程と
を具備することを特徴とする配線板の製造方法。
A plurality of conductive regions on the first surface side of the conductive sheet formed by the conductive region on the first surface side and the conductive region on the second surface side are subjected to pattern etching to form a wiring circuit on the conductive region on the second surface side. Forming a convex conductive part including the independent wiring layer of
Laminating the convex conductive portion of the conductive sheet facing the insulator layer, and embedding and integrating the convex conductive portion into the insulator layer;
Removing the conductive region on the second surface side by etching, leaving a strip-shaped plating electrode portion so as to commonly connect the independent wiring layers; and
Coating the insulating layer for plating so that the region to be plated is exposed on the second surface side of the convex conductive portion exposed by the etching removal;
Plating the region to be plated through the strip-like plating electrode portion;
And a step of electrically separating the independent wiring layers from each other by removing the belt-like plated electrode portion.
前記独立配線層の一部と前記帯状メッキ電極部との接続は前記独立配線層と前記帯状メッキ電極部間に形成された前記凸形導電部の延長線によりなされている請求項1に記載の配線板の製造方法。 2. The connection between the part of the independent wiring layer and the strip-shaped plated electrode portion is made by an extension line of the convex conductive portion formed between the independent wiring layer and the strip-shaped plated electrode portion. A method for manufacturing a wiring board. 導電シートの第1面にボンディングパッドを含む独立分離した配線パターン部、前記各配線パターンに連接して端縁外形加工側に延出する給電端子部、島状パッド部及び前記給電端子部側を一体化する被外形加工部を有し、かつ前記配線パターン部、給電端子部並びに島状のパッド部を選択的なハーフエッチング処理で凸形導電部に形成する工程と、
前記導電シートの凸形導電部形成面を絶縁体層に対向させて積層し、この積層体を厚さ方向に加圧し前記導電シートの凸形導電部形成領域を絶縁体層へ埋め込み一体化して第2面に露出した導電シート張り板を形成する工程と、
前記導電シート張り板の前記配線パターン部並びに前記給電端子部の間、及び前記島状パッド部に隣接する対応領域を帯状メッキ電極部形成のためにエッチングレジスト層で被覆し、露出している導電シートの平坦第2面側を選択的にエッチング処理して除去し前記配線パター及び給電端子を分離する工程と、
前記分離化した配線パターン部のボンディングパッド並びに給電端子部、及び島状パッド部のメッキ領域を除いた面にメッキレジスト層を被覆し、前記帯状メッキ電極部を電極として選択的なメッキ処理を行う工程と、
前記帯状メッキ電極部を選択的にエッチング除去して各配線パターン、給電端子部及び島状パッドの間を絶縁隔離する工程と、
前記各配線パターン、給電端子部及び島状パッドの間を絶縁隔離して得られる配線板の被メッキ領域面以外をソルダーレジスト層で被覆する工程と、
前記ソルダーレジスト層を被覆した前記配線板を外形加工線に沿って切断分離する工程と、
を具備することを特徴とする配線板の製造方法。
An independently separated wiring pattern portion including a bonding pad on the first surface of the conductive sheet, a power supply terminal portion connected to each of the wiring patterns and extending to the edge outer shape processing side, an island-shaped pad portion, and the power supply terminal portion side A step of forming a contoured portion to be integrated, and forming the wiring pattern portion, the power supply terminal portion, and the island-shaped pad portion into a convex conductive portion by selective half-etching;
The conductive sheet forming surface of the conductive sheet is laminated facing the insulator layer, and this laminate is pressed in the thickness direction so that the convex conductive part forming region of the conductive sheet is embedded in the insulator layer and integrated. Forming a conductive sheet-clad plate exposed on the second surface;
A conductive region covered with an etching resist layer for forming a strip-shaped plating electrode portion is formed between the wiring pattern portion and the power supply terminal portion of the conductive sheet-clad plate and adjacent to the island-shaped pad portion with an etching resist layer. A step of selectively etching and removing the flat second surface side of the sheet to separate the wiring pattern and the power supply terminal;
A plating resist layer is coated on the surface of the separated wiring pattern portion excluding the bonding pad, the power supply terminal portion, and the island-like pad portion, and selective plating is performed using the strip-like plating electrode portion as an electrode. Process,
A step of selectively removing the strip-shaped plated electrode portion to insulate and isolate each wiring pattern, the power supply terminal portion and the island-shaped pad;
The step of covering the wiring pattern other than the plated area of the wiring board obtained by insulating and isolating between each wiring pattern, the power supply terminal portion and the island-shaped pad, and
Cutting and separating the wiring board coated with the solder resist layer along an outline processing line;
A method for manufacturing a wiring board, comprising:
導電シートの第1面にボンディングパッドを含む独立分離した配線パターン部、前記各配線パターンに連接して端縁外形加工側に延出する給電端子部、島状パッド部及び前記給電端子部側を一体化する被外形加工部を有し、かつ前記配線パターン部、給電端子部並びに島状のパッド部を選択的にハーフエッチング処理で凸形導電部に形成する工程と、
前記導電シートの凸形導電部形成面を絶縁体層に対向させて積層し、この積層体を厚さ方向に加圧し前記導電シートの凸形導電部を絶縁体層に埋め込み一体化し第2面を露出した導電シート張り板を形成する工程と、
前記導電シート張り板の給電端子部の被外形加工部及び島状パッド部に導通し前記導電シート張り板を横切る帯状メッキ電極を形成するために帯状メッキ電極領域をエッチングレジスト層で被覆し、露出している導電シートの第2面側を選択的にエッチング処理して前記帯状メッキ電極を残して配線パターン及び給電端子を分離化する工程と、
前記分離化した配線パターン部のボンディングパッド並びに給電端子部、及び島状パッド部を除いた面にメッキレジスト層を被覆し、前記帯状のメッキ電極を一電極として選択的なメッキ処理を行う工程と、
前記電気メッキ処理後に帯状メッキ電極を選択的にエッチング除去して島状パッドとの間を絶縁隔離する工程と、
前記島状パッドの間を絶縁隔離して得られる配線板の被メッキ領域面以外をソルダーレジスト層で被覆する工程と、
前記ソルダーレジスト層を被覆した配線板を外形加工線に沿って切断分離する工程と、
を具備することを特徴とする配線板の製造方法。
An independently separated wiring pattern portion including a bonding pad on the first surface of the conductive sheet, a power supply terminal portion connected to each of the wiring patterns and extending to the edge outer shape processing side, an island-shaped pad portion, and the power supply terminal portion side A step of forming an outer shape processing portion to be integrated, and selectively forming the wiring pattern portion, the power supply terminal portion, and the island-shaped pad portion in a convex conductive portion by a half etching process;
The conductive sheet forming surface of the conductive sheet is laminated so as to face the insulator layer, and the laminate is pressed in the thickness direction so that the convex conductive portion of the conductive sheet is embedded in the insulator layer and integrated. A step of forming a conductive sheet-clad plate that is exposed;
Cover the strip-shaped plating electrode region with an etching resist layer to form a strip-shaped plating electrode that conducts to the contoured portion and island-shaped pad portion of the power supply terminal portion of the conductive sheet stretching plate and crosses the conductive sheet stretching plate, and is exposed A step of selectively etching the second surface side of the conductive sheet and separating the wiring pattern and the power supply terminal leaving the strip-shaped plating electrode;
Coating the plating resist layer on the surface of the separated wiring pattern portion excluding the bonding pad, the power supply terminal portion, and the island-shaped pad portion, and performing a selective plating process using the strip-shaped plating electrode as one electrode; ,
A step of selectively etching away the strip-shaped plating electrode after the electroplating process to insulate and isolate the island-shaped pad;
A step of coating the area other than the plated area of the wiring board obtained by insulating and isolating the island-shaped pads with a solder resist layer;
Cutting and separating the wiring board coated with the solder resist layer along the outer shape processing line;
A method for manufacturing a wiring board, comprising:
JP2004157631A 2004-05-27 2004-05-27 Wiring board manufacturing method Expired - Fee Related JP4455935B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106325629A (en) * 2015-07-06 2017-01-11 湖州胜僖电子科技有限公司 ITO wiring design method capable of optimizing separation of chemical plated gold

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106325629A (en) * 2015-07-06 2017-01-11 湖州胜僖电子科技有限公司 ITO wiring design method capable of optimizing separation of chemical plated gold
CN106325629B (en) * 2015-07-06 2024-01-02 湖州胜僖电子科技有限公司 ITO wiring design method for optimizing electroless gold plating precipitation

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