JP2005315788A5 - - Google Patents

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Publication number
JP2005315788A5
JP2005315788A5 JP2004135963A JP2004135963A JP2005315788A5 JP 2005315788 A5 JP2005315788 A5 JP 2005315788A5 JP 2004135963 A JP2004135963 A JP 2004135963A JP 2004135963 A JP2004135963 A JP 2004135963A JP 2005315788 A5 JP2005315788 A5 JP 2005315788A5
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JP
Japan
Prior art keywords
lid
measurement chamber
circuit board
groove
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004135963A
Other languages
English (en)
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JP2005315788A (ja
JP4079116B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2004135963A external-priority patent/JP4079116B2/ja
Priority to JP2004135963A priority Critical patent/JP4079116B2/ja
Priority to KR1020050031276A priority patent/KR100589845B1/ko
Priority to EP05103335A priority patent/EP1591760A1/en
Priority to CNB2005100667980A priority patent/CN100368780C/zh
Priority to US11/118,114 priority patent/US7100440B2/en
Publication of JP2005315788A publication Critical patent/JP2005315788A/ja
Publication of JP2005315788A5 publication Critical patent/JP2005315788A5/ja
Publication of JP4079116B2 publication Critical patent/JP4079116B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Claims (4)

  1. 上部が開放した溝部を設け、該溝部の両端に前記溝部と外部とを連通する接続部を設けた本体と、
    第1の面と第2の面とを有し、前記第1の面が前記溝部の開放した上部を封止して断面形状が矩形の、被測定流体が流れる測定室を構成する着脱可能な蓋体と、
    前記蓋体の前記第2の面に密接する回路基板とからなり、
    前記溝部は、底壁と両側の側壁とを有し、
    前記蓋体には、前記測定室に開口するセンサ孔が設けられ、
    前記回路基板には、前記センサ孔の中に配置され、検出面が前記測定室に臨むようにフローセンサが設けられており、
    前記センサ孔が前記回路基板によって封止されることを特徴とする流量計。
  2. 前記フローセンサの検出面は、前記蓋体の前記第1の面と前記第2の面との間に、または、前記蓋体の前記第1の面と同じ平面上に配置されることを特徴とする請求項1に記載の流量計。
  3. 前記測定室の前記フローセンサの上流側および下流側に、メッシュ状の網体を、前記本体および前記蓋体に設けた溝に係合させて固定したことを特徴とする請求項1または2に記載の流量計。
  4. 前記接続部は、硬質材料からなる継手部材を有することを特徴とする請求項1から3のいずれかに記載の流量計。
JP2004135963A 2004-04-30 2004-04-30 流量計 Expired - Fee Related JP4079116B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2004135963A JP4079116B2 (ja) 2004-04-30 2004-04-30 流量計
KR1020050031276A KR100589845B1 (ko) 2004-04-30 2005-04-15 유량계
EP05103335A EP1591760A1 (en) 2004-04-30 2005-04-25 Flow meter
US11/118,114 US7100440B2 (en) 2004-04-30 2005-04-29 Flow meter
CNB2005100667980A CN100368780C (zh) 2004-04-30 2005-04-29 流量计

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004135963A JP4079116B2 (ja) 2004-04-30 2004-04-30 流量計

Publications (3)

Publication Number Publication Date
JP2005315788A JP2005315788A (ja) 2005-11-10
JP2005315788A5 true JP2005315788A5 (ja) 2007-06-14
JP4079116B2 JP4079116B2 (ja) 2008-04-23

Family

ID=34939487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004135963A Expired - Fee Related JP4079116B2 (ja) 2004-04-30 2004-04-30 流量計

Country Status (5)

Country Link
US (1) US7100440B2 (ja)
EP (1) EP1591760A1 (ja)
JP (1) JP4079116B2 (ja)
KR (1) KR100589845B1 (ja)
CN (1) CN100368780C (ja)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7415895B2 (en) * 2005-08-26 2008-08-26 Smc Kabushiki Kaisha Flow meter with a rectifying module having a plurality of mesh members
JP5066675B2 (ja) 2006-07-05 2012-11-07 Smc株式会社 フローセンサ
US7603898B2 (en) * 2007-12-19 2009-10-20 Honeywell International Inc. MEMS structure for flow sensor
JP5135136B2 (ja) * 2008-09-12 2013-01-30 アズビル株式会社 流量計及び流量制御装置
JP2010210496A (ja) * 2009-03-11 2010-09-24 Yamatake Corp 流量計
US8418549B2 (en) * 2011-01-31 2013-04-16 Honeywell International Inc. Flow sensor assembly with integral bypass channel
CN103573199B (zh) * 2012-08-03 2015-12-09 中国石油化工股份有限公司 钻井液流变性在线测量装置
US9354095B2 (en) * 2012-10-02 2016-05-31 Honeywell International Inc. Modular flow sensor
US9952079B2 (en) 2015-07-15 2018-04-24 Honeywell International Inc. Flow sensor
CN106841669A (zh) * 2015-12-04 2017-06-13 无锡乐华自动化科技有限公司 一种弹性应变式管道流速传感器以及使用方法
JP1560787S (ja) * 2016-02-29 2016-10-17
USD904213S1 (en) 2019-03-21 2020-12-08 Orbis Intelligent Systems, Inc. Hydrant sensor device
USD900656S1 (en) * 2019-03-21 2020-11-03 Orbis Intelligent Systems, Inc. Flow detection device

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ATE70911T1 (de) * 1983-05-18 1992-01-15 Bronkhorst High Tech Bv Durchflussmessgeraet.
US4776214A (en) * 1985-08-09 1988-10-11 Motorola, Inc. Mass air flow sensor
US4918995A (en) * 1988-01-04 1990-04-24 Gas Research Institute Electronic gas meter
JP2787785B2 (ja) * 1990-07-02 1998-08-20 山武ハネウエル株式会社 流量計および流量測定方法
JPH0666612A (ja) 1991-07-18 1994-03-11 Ricoh Seiki Co Ltd 流量センサー
WO1997021986A1 (de) * 1995-12-08 1997-06-19 Micronas Semiconductor S.A. Mikrosensoren mit siliziummembranen und verfahren zur herstellung derselben
DE19808248A1 (de) * 1998-02-27 1999-09-02 Pierburg Ag Meßvorrichtung zur Messung der Masse eines strömenden Mediums
JP3655593B2 (ja) 2002-02-20 2005-06-02 株式会社山武 フローセンサ
DE10217884B4 (de) * 2002-04-22 2004-08-05 Siemens Ag Vorrichtung zur Messung der in einer Leitung strömenden Luftmasse
US6647809B1 (en) * 2002-08-29 2003-11-18 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Silicon carbide high temperature anemometer and method for assembling the same

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