JP2005315788A5 - - Google Patents

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Publication number
JP2005315788A5
JP2005315788A5 JP2004135963A JP2004135963A JP2005315788A5 JP 2005315788 A5 JP2005315788 A5 JP 2005315788A5 JP 2004135963 A JP2004135963 A JP 2004135963A JP 2004135963 A JP2004135963 A JP 2004135963A JP 2005315788 A5 JP2005315788 A5 JP 2005315788A5
Authority
JP
Japan
Prior art keywords
lid
measurement chamber
circuit board
groove
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004135963A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005315788A (ja
JP4079116B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2004135963A external-priority patent/JP4079116B2/ja
Priority to JP2004135963A priority Critical patent/JP4079116B2/ja
Priority to KR1020050031276A priority patent/KR100589845B1/ko
Priority to EP05103335A priority patent/EP1591760A1/en
Priority to US11/118,114 priority patent/US7100440B2/en
Priority to CNB2005100667980A priority patent/CN100368780C/zh
Publication of JP2005315788A publication Critical patent/JP2005315788A/ja
Publication of JP2005315788A5 publication Critical patent/JP2005315788A5/ja
Publication of JP4079116B2 publication Critical patent/JP4079116B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2004135963A 2004-04-30 2004-04-30 流量計 Expired - Fee Related JP4079116B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2004135963A JP4079116B2 (ja) 2004-04-30 2004-04-30 流量計
KR1020050031276A KR100589845B1 (ko) 2004-04-30 2005-04-15 유량계
EP05103335A EP1591760A1 (en) 2004-04-30 2005-04-25 Flow meter
CNB2005100667980A CN100368780C (zh) 2004-04-30 2005-04-29 流量计
US11/118,114 US7100440B2 (en) 2004-04-30 2005-04-29 Flow meter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004135963A JP4079116B2 (ja) 2004-04-30 2004-04-30 流量計

Publications (3)

Publication Number Publication Date
JP2005315788A JP2005315788A (ja) 2005-11-10
JP2005315788A5 true JP2005315788A5 (https=) 2007-06-14
JP4079116B2 JP4079116B2 (ja) 2008-04-23

Family

ID=34939487

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004135963A Expired - Fee Related JP4079116B2 (ja) 2004-04-30 2004-04-30 流量計

Country Status (5)

Country Link
US (1) US7100440B2 (https=)
EP (1) EP1591760A1 (https=)
JP (1) JP4079116B2 (https=)
KR (1) KR100589845B1 (https=)
CN (1) CN100368780C (https=)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI292473B (en) * 2005-08-26 2008-01-11 Smc Kk Flow meter
JP5066675B2 (ja) 2006-07-05 2012-11-07 Ｓｍｃ株式会社 フローセンサ
TWD126228S1 (zh) * 2007-11-13 2008-12-01 股份有限公司 流量感測器
US7603898B2 (en) * 2007-12-19 2009-10-20 Honeywell International Inc. MEMS structure for flow sensor
JP5135136B2 (ja) * 2008-09-12 2013-01-30 アズビル株式会社 流量計及び流量制御装置
JP2010210496A (ja) * 2009-03-11 2010-09-24 Yamatake Corp 流量計
US8418549B2 (en) * 2011-01-31 2013-04-16 Honeywell International Inc. Flow sensor assembly with integral bypass channel
CN103573199B (zh) * 2012-08-03 2015-12-09 中国石油化工股份有限公司 钻井液流变性在线测量装置
US9354095B2 (en) * 2012-10-02 2016-05-31 Honeywell International Inc. Modular flow sensor
US9952079B2 (en) 2015-07-15 2018-04-24 Honeywell International Inc. Flow sensor
CN106841669A (zh) * 2015-12-04 2017-06-13 无锡乐华自动化科技有限公司 一种弹性应变式管道流速传感器以及使用方法
JP1560787S (https=) * 2016-02-29 2016-10-17
USD904213S1 (en) 2019-03-21 2020-12-08 Orbis Intelligent Systems, Inc. Hydrant sensor device
USD900656S1 (en) * 2019-03-21 2020-11-03 Orbis Intelligent Systems, Inc. Flow detection device
US12399046B2 (en) * 2023-03-03 2025-08-26 Honeywell International Inc. Flow sensing apparatus

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3485381D1 (de) * 1983-05-18 1992-02-06 Bronkhorst High Tech Bv Durchflussmessgeraet.
US4776214A (en) * 1985-08-09 1988-10-11 Motorola, Inc. Mass air flow sensor
US4918995A (en) * 1988-01-04 1990-04-24 Gas Research Institute Electronic gas meter
JP2787785B2 (ja) * 1990-07-02 1998-08-20 山武ハネウエル株式会社 流量計および流量測定方法
JPH0666612A (ja) 1991-07-18 1994-03-11 Ricoh Seiki Co Ltd 流量センサー
WO1997021986A1 (de) * 1995-12-08 1997-06-19 Micronas Semiconductor S.A. Mikrosensoren mit siliziummembranen und verfahren zur herstellung derselben
DE19808248A1 (de) * 1998-02-27 1999-09-02 Pierburg Ag Meßvorrichtung zur Messung der Masse eines strömenden Mediums
JP3655593B2 (ja) * 2002-02-20 2005-06-02 株式会社山武 フローセンサ
DE10217884B4 (de) * 2002-04-22 2004-08-05 Siemens Ag Vorrichtung zur Messung der in einer Leitung strömenden Luftmasse
US6647809B1 (en) * 2002-08-29 2003-11-18 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Silicon carbide high temperature anemometer and method for assembling the same

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