JP2005315582A - Three-dimensional ultrasonic inspection device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a three-dimensional ultrasonic inspection device capable of inspecting the inside of an object to be inspected precisely and rapidly in a non-destructive manner to quantitatively and automatically judge the presence of abnormality. <P>SOLUTION: The three-dimensional ultrasonic inspection device is equipped with an ultrasonic transducer 11 having a plurality of piezoelectric vibrators 20 arranged thereto in a matrix or array state, a drive element selecting part 13 for selectively operating a piezoelectric vibrator 20 mn for ultrasonic oscillation, a signal detection circuit 16 for receiving the reflected echo from the joint 15 of the object 14 to be inspected due to oscillated ultrasonic waves to detect the electric signal, a signal processing part 17 for processing the detected electric signal to form three-dimensional imaging data corresponding to the mesh in the three-dimensional imaging region of the object 14 to be inspected and a display processing device 18 for detecting the size and position of a melt coagulation part 27 and the position or size of a welding flaw part 28 of the joint 15 from the intensity distribution of the formed three-dimensional imaging data and displaying the detection result and the three-dimensional imaging data from the signal processing part 17. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a three-dimensional ultrasonic inspection apparatus that performs non-destructive inspection of the internal structure of an inspection object, the state of a joint, and the state of a defect with an ultrasonic wave. The present invention relates to a three-dimensional ultrasonic inspection apparatus that three-dimensionally inspects a state.

  There is an ultrasonic flaw detection technique as one of the techniques for nondestructive inspection of the welded state and welded defect state of the joints between the plate-like structures that are inspection objects.

  As an ultrasonic inspection apparatus employing this ultrasonic flaw detection technology, there are those described in Japanese Patent Application Laid-Open No. 2003-149213 (Patent Document 1) and Japanese Patent Application Laid-Open No. 2004-53360 (Patent Document 2).

  These ultrasonic inspection apparatuses use an ultrasonic transducer in which a large number of piezoelectric vibrators are arranged in a matrix to generate and detect ultrasonic waves. Ultrasonic waves oscillated from the piezoelectric vibrators of the ultrasonic transducers are used. The sound wave is sent to the welded part that is the joint of the object to be inspected, the reflected echo reflected from the welded part is received by the ultrasonic transducer, and the received echo signal is sent to the signal processing part through the signal detection circuit. Parallel calculation processing is performed in the part, and the welded part of the inspection object is imaged. The ultrasonic image of the welded part that has been imaged is displayed on a display device, and by visually observing this ultrasonic image, the state of the welded part and the state of the weld defect can be inspected nondestructively. Yes.

  A conventional ultrasonic inspection apparatus irradiates a welded portion of an inspection object with ultrasonic waves, images the reflected echo, displays the ultrasonic image on a display device, and visually displays the displayed image of the welded portion. Judgment is made and the state of the welded part and the state of the weld defect are inspected nondestructively.

  Specifically, as described in Japanese Patent Application Laid-Open No. 11-326287 (Patent Document 3), the plate-like structure portion is used as an inspection object, and two plate-like structures are overlapped and joined by spot welding. When the state of the welded part between the flat structures and the state of the weld defect are nondestructively inspected with an ultrasonic inspection device, whether or not a melt-solidified part is formed in the welded part, whether there is a weld defect such as a blowhole・ Check the condition.

In addition, the joint strength of the welded part of the inspection object depends on the size of the melted and solidified part, and the boundary between the joined part and the melted and solidified part formed on the inside is a reflection echo of the bottom part of the jointed part of the inspected object. It is known from Japanese Patent Application Laid-Open No. 6-265529 (Patent Document 4) that it is obtained from the inflection point of the intensity distribution curve.
JP 2003-149213 A JP 2004-53360 A JP 11-326287 A JP-A-6-265529

  In conventional ultrasonic inspection equipment, it is possible to visualize the layer structure of inspection objects having different acoustic characteristics and defects, voids and peeling of welded parts in the inspection object with ultrasonic waves. Judgment is made by visually observing the displayed ultrasonic image of the welded part, but since the two-dimensional ultrasonic image is visually judged, the judgment result may vary due to individual differences, or the inspection object It was difficult to quantitatively inspect the positional relationship of the weld with respect to the three-dimensionally accurately and accurately.

In conventional ultrasonic inspection equipment,
1. Since the internal inspection of the inspection object is performed by observing the imaged ultrasonic image, it is difficult to objectively and quantitatively inspect the state of the welded part and the state of the weld defect accurately. is there.

  2. It was difficult to automatically determine the presence or absence of abnormality quantitatively and accurately from information indicating the state of the welded part and the state of the weld defect displayed in the ultrasonic image obtained by imaging processing inside the inspection object. It was.

  The present invention has been made in consideration of the above-described circumstances, and can perform an internal inspection of an inspection object accurately and accurately in a non-destructive manner in a three-dimensional manner and quantitatively determine whether there is an abnormality due to the internal inspection. An object of the present invention is to provide a three-dimensional ultrasonic inspection apparatus capable of automatic determination.

  Another object of the present invention is to detect and process signal processing by detecting reflection echoes of ultrasonic waves oscillated from the respective piezoelectric vibrators of the ultrasonic transducers arranged in a matrix or array. Therefore, the present invention provides a three-dimensional ultrasonic inspection apparatus in which the size and position of a melt-solidified part, a solid-phase joint (corona bond), and a melt defect of a joint can be obtained quickly and as a high-resolution ultrasonic flaw detection image. is there.

  Furthermore, another object of the present invention is to provide a quantitative and stable acceptance / rejection by collating a database storing acceptance / rejection determination pattern images with an ultrasonic inspection image in an appropriate welded state as a reference, and the inspected ultrasonic inspection image. It is possible to provide a three-dimensional ultrasonic inspection apparatus that can make a quick determination.

  In order to solve the above-described problem, a three-dimensional ultrasonic inspection apparatus according to the present invention includes an ultrasonic transducer in which a plurality of piezoelectric vibrators are arranged in a matrix or an array, as described in claim 1; Among the plurality of piezoelectric vibrators of the ultrasonic transducer, a driving element selection unit that sequentially selects a piezoelectric vibrator that oscillates ultrasonic waves, and an ultrasonic wave oscillated from the piezoelectric vibrator selected by the driving element selection unit. A signal detection circuit that receives the reflected echo from the junction and detects an electrical signal of the reflected echo, and an electrical signal detected by the signal detection circuit. A signal processing unit that performs signal processing of the signal and generates three-dimensional imaging data corresponding to a mesh partitioned in a three-dimensional imaging region set inside the inspection object; While detecting the size and position of the melt-solidified part and the position and size of the weld defect at the joint from the intensity distribution of the three-dimensional imaging data generated by the physical part, the detection result and the three-dimensional from the signal processing part And a display processing device for displaying image data.

  According to the three-dimensional ultrasonic inspection apparatus according to the present invention, the internal inspection of the joint portion of the inspection object can be quickly and accurately performed with non-destructive inspection with ultrasonic waves. The size and position of the melt-solidified part and melt defect can be inspected quantitatively and accurately, and automatic determination can be performed.

  In addition, the ultrasonic transducer has a matrix or array arrangement of piezoelectric vibrators, and each piezoelectric vibrator is sequentially operated to oscillate ultrasonic waves and detect reflected echoes reflected from the joint portion of the inspection object. By performing the signal processing, the size and position of the melt-solidified portion, the solid-phase joint portion, and the weld defect of the joint portion can be quickly obtained as a high-resolution ultrasonic diagnostic image.

  Furthermore, a pass / fail judgment pattern image is stored in a database based on an ultrasonic flaw detection image in an appropriate welding state, and compared with a reference ultrasonic flaw detection image in which the ultrasonic flaw detection image of the detected inspection object is stored. By doing so, it is possible to quickly and automatically and quantitatively perform stable pass / fail determination.

  Embodiments of a three-dimensional ultrasonic inspection apparatus according to the present invention will be described with reference to the accompanying drawings.

  FIG. 1 is a configuration diagram showing an embodiment of a three-dimensional ultrasonic inspection apparatus according to the present invention.

  The three-dimensional ultrasonic inspection apparatus 10 includes an ultrasonic transducer 11 that mutually converts ultrasonic vibration and electrical signals and transmits / receives ultrasonic waves of a required frequency, and a signal generator that generates a drive signal that drives the ultrasonic transducer 11. 12, a drive signal selection unit 13 that selects a drive signal from the signal generation unit 12 and selectively drives a piezoelectric vibrator of the ultrasonic transducer 11, and an ultrasonic wave oscillated from the ultrasonic transducer 11 is an inspection object. 14, a signal detection circuit 16 that irradiates the welded portion 15, which is a joint portion 14, and detects the reflected echo signal from the welded portion via the ultrasonic transducer 11, and the reflected echo detected by the signal detection circuit 16. The signal processing unit 17 that generates a three-dimensional (3D) ultrasonic image by performing parallel arithmetic processing on the electrical signal, and the signal processing unit 17 processes the electrical signal. Data processing of the ultrasonic flaw detection image is further performed to obtain a high-resolution three-dimensional ultrasonic flaw detection image, and the internal structure, the state of the welded portion 15 and the state of the weld defect 16 are automatically and accurately determined, and the determination result is displayed. And a display processing device 18.

  The ultrasonic transducer 11 comprises a matrix sensor 11 in which a large number of piezoelectric vibration elements 20 made of piezoelectric elements are arranged in a matrix of m rows and n columns on a substrate 21. The drive signal generated by the signal generator 12 is selected and applied to each piezoelectric vibrator 20 mn of the ultrasonic transducer 11 by the drive element selector 13. The drive order of each piezoelectric vibrator 20mn is determined one by one or a plurality by the selection of the drive element selection unit 13, and each piezoelectric vibrator 20mn is driven at a required drive timing. The piezoelectric vibration elements 20 may be arranged in a line or a cross line instead of being arranged in a matrix to constitute an array sensor.

  A liquid or solid acoustic propagation medium 23 is brought into close contact with an ultrasonic wave transmitting / receiving surface which is a sensor surface of the ultrasonic transducer 11, specifically, an inspection object 14 side. A coupling 24 is provided between the acoustic propagation medium 23 and the inspection object 14 to achieve ultrasonic acoustic matching. The coupling 24 is not necessary when the acoustic propagation medium 23 uses a liquid such as water.

  The acoustic propagation medium 23 has a box shape, and the opening area thereof is formed in accordance with the size of the joint portion 15 that is the inspection region (target region) of the inspection object 14, and the height of the acoustic propagation medium 23 is It is determined by the oscillation angle (spreading angle) of the ultrasonic wave oscillated from the piezoelectric vibrator 20.

  The inspection object 14 is, for example, two plate-like structures 14a and 14b joined by spot welding, and the spot welded portions of the plate-like structures 14a and 14b are formed by the three-dimensional ultrasonic inspection apparatus 10. Internally inspected non-destructively using ultrasound. The inspection object 14 may be one in which three or more plate-like structures are overlapped and welded. The inspection object 14 may be a metal material or a resin material.

  When the two plate-like structures 14a and 14b, which are the inspection object 14, are overlapped and joined by spot welding, the plate-like structure 14 is formed on the outer surface of the joint 15 with a recess 25 as a dent portion by a welding electrode. Is formed, and the thickness T of the joint portion 15 is smaller than the non-joint portion 26 around the joint portion 15 by the formation of the recess 25.

  In addition, the code | symbol 27 shows the welding defects, such as the blow hole which a weld solidification part 28 of the junction part 15 produced in the junction part 15. FIG.

  On the other hand, the signal generator 12 that applies a drive signal to the ultrasonic transducer 11 generates a pulsed or continuous drive signal by applying an external voltage in order to drive the piezoelectric body of the piezoelectric vibrator 20 to generate an ultrasonic wave. generate. The generated driving signal is selected by each driving element 20mn to be driven by the driving element selector 13, and the driving signal is applied to the selected piezoelectric element 20mn at a required timing. The drive element selection unit 13 sequentially selects one or more piezoelectric vibrators 20 to be driven at a required timing, and when a drive signal from the signal generation unit 12 is added to the selected piezoelectric vibrators 20. The piezoelectric vibrator 20 is driven to oscillate an ultrasonic wave U having a required frequency.

  The ultrasonic waves sequentially oscillated from the respective piezoelectric vibrators 20 mn of the ultrasonic transducer 11 pass through the acoustic propagation medium 23, enter the inspection object 14 through the coupling 24, and are inspected in the inspection region 15 ( It reaches the non-joined portion 26, the melt-solidified portion 27, the weld defect portion 28 such as a blowhole, and the bottom surface 29), and is reflected by each boundary layer.

  The reflected echoes of the ultrasonic waves reflected by the boundary layers of the bottom surface 29, the non-joined portion 26, the melt-solidified portion 27, and the weld defect portion 28 of the inspection object 14 are transmitted from the inspection object 14 via the acoustic propagation medium 23 as a matrix sensor. The reflected echoes input to the piezoelectric transducers 20 of the ultrasonic transducers 11 with a time difference are converted into electric signals and input to the signal detection circuit 16 where the reflected echoes are reflected. An electric signal is detected for each piezoelectric vibrator 20.

  When a drive signal is applied to the piezoelectric vibrator 20 mn selected by the drive element selection unit 13 among the piezoelectric vibrators 20 of the ultrasonic transducer 11, the three-dimensional ultrasonic inspection apparatus 10 Operates and oscillates the ultrasonic wave U. The oscillated ultrasonic wave U is applied to the inspection region which is the joint 15 of the inspection object 14 through the acoustic propagation medium 23 and the coupling 24 as necessary. A part of the ultrasonic wave U irradiated to the inspection region 15 of the inspection object 14 is reflected from the density boundary layer of the inspection region 15 to be a reflection echo. The reflected echo is received by the piezoelectric vibrators 20 of the matrix sensor (ultrasonic transducer 11) through the coupling 24 and the acoustic propagation medium 23 with a time difference, and reflected by the piezoelectric conversion by the piezoelectric vibrators 20. It is sent to the signal detection circuit 16 as an electrical signal of an echo and detected.

  The ultrasonic transducer 11 causes the piezoelectric vibrators 20mn to sequentially act on the piezoelectric vibrators 20mn by the drive signal selector 13 so that the piezoelectric vibrators 20mn are sequentially driven at a required timing and oscillate from the piezoelectric vibrators 20mn. The reflected ultrasonic echoes are received two-dimensionally by the matrix sensor 11. When 100 rows of 10 × 10, for example, m × n columns of the piezoelectric vibrator 20 mn are arranged in a matrix, each piezoelectric vibrator 20 mn is driven when a drive signal is sequentially applied by the drive element selector 13. The ultrasonic waves U are sequentially oscillated from the respective piezoelectric vibrators 20mn at the timing when the signals are sequentially applied, and the reflected echoes of the ultrasonic waves sequentially oscillated from the respective piezoelectric vibrators 20mn are sequentially received by the matrix sensor 11, and the received signals are used. An electric signal of a certain reflection echo is sent to the signal detection circuit 16 each time.

  Therefore, the matrix sensor 11 receives two-dimensionally the reflected echoes of the ultrasonic waves oscillated from the individual piezoelectric vibrators 20 mn of the matrix arrangement by the operation of the ultrasonic transducer 11. The matrix sensor 11 receives reflected echoes for 20 mn of individual ultrasonic transducers that oscillate ultrasonic waves, and sends them to the signal detection circuit 16 as electrical signals of the reflected echoes. The signal processing unit 17 passes through this signal detection circuit 16. Sent to.

  The signal detection circuit 16 detects an electrical signal of a reflected echo generated by the matrix sensor 11. Among the detected electrical signals, a plurality of necessary electrical signals are led to amplifiers 31a, 31b,..., 31i in the signal processing unit 70, respectively.

  The amplifiers 31a, 31b,..., 31i amplify the respective reflected echo electrical signals and supply them to the A / D converters 32a, 32b,. The A / D converters 32a, 32b,..., 32i perform A / D conversion on the derived electrical signals and guide them to the parallel processors 33a, 33b,.

  The parallel processor 33 in the signal processing unit 17 performs arithmetic processing on the digital signals derived from the A / D converters 32a, 32b,..., 32i in parallel and quickly, and each of them is applied to the inspection area (imaging area). The reflection intensity from each sectioned mesh is specified. The identified reflection intensity is integrated by the three-dimensional image generation unit 34 that is an integrated processor to become three-dimensional imaging information (data), and is sent to the display processing device 18. The display processing device 18 processes the derived three-dimensional imaging data by the intermediate data processing unit 35 and the bottom surface data processing unit 36 to determine whether the inspection area (measurement unit) 15 of the inspection object 14 is good or bad. While the determination is made by the unit 37, the quality determination result and the three-dimensional ultrasonic image from the three-dimensional image generation unit 35 are displayed on the display unit 38 as an ultrasonic flaw detection image.

  The signal processing unit 17 is configured as shown in FIG.

  The parallel processor 33 provided in the signal processing unit 17 includes internal memories 40a, 40b,..., 40i and arithmetic circuits 41a, 41b,. The three-dimensional image generation unit 34 that is an integrated processor has an image integration processing unit 44, a boundary extraction processing unit 45, a shape data storage unit 46, and a table data storage unit 47.

  The internal memories 40a, 40b, ..., 40i temporarily store the A / D conversion signals supplied from the A / D converters 32a, 32b, ..., 32i and the propagation time data obtained from the table data storage unit 47, respectively. Is. Arithmetic circuits 41a, 41b,..., 41i are respectively obtained from A / D conversion signals and propagation time data stored in internal memories 40a, 40b,. The reflection intensity is specified, and each mesh is associated with the reflection intensity. The associated reflection intensity is supplied to the image integration processing unit 44 of the three-dimensional image generation unit (integrated processor) 34.

  The image integration processing unit 44 adds the supplied reflection intensity for each mesh in the inspection region to generate three-dimensional imaging data. The generated three-dimensional (3D) imaging data is guided to the display processing device 18.

  On the other hand, the boundary extraction processing unit 45 extracts a boundary existing inside the inspection object 14 from the result output by the image integration processing unit 44. Information about the extracted boundary is sent to the table data storage unit 47.

  The shape data storage unit 46 stores in advance information related to the surface shape and boundary layer structure related to the inspection object 14. The stored information is sent to the table data storage unit 47 as necessary.

  The table data storage unit 47 tabulates ultrasonic propagation times (or equivalent distances) between the piezoelectric vibrators 20 mn of the matrix sensor 11 and stores them in advance. A part or all of the stored ultrasonic propagation time is transferred to the internal memories 40a, 40b,..., 40i of the parallel processors 33 as necessary.

  Further, the ultrasonic wave propagation time stored in the table data storage unit 47 is supplied by the boundary extraction processing unit 45, or the inspection target supplied by the information about the extracted boundary in the inspection object 14 or the shape data storage unit 46. It can be reset by information on the surface shape and the layer structure related to the object 14.

  As described above, the parallel processor 33 and the three-dimensional (3D) image generation unit 34 of the signal processing unit 17 process the digital signals derived from the A / D converters 32a, 32b,. The three-dimensional imaging data I for visualizing the state of the joint 15 is generated. Three-dimensional imaging data is generated in correspondence with each mesh in the three-dimensional imaging region set in the inspection object 14 by aperture synthesis processing from the electrical signal of the reflected echo detected by the signal detection circuit 46. .

  The three-dimensional image generation unit 34 is perpendicular to the direction of the front surface (XY plane) when viewed from the ultrasonic transducer 11, the two side surfaces (YZ plane) orthogonal to the front surface, and the (ZX plane). The three-dimensional imaging data I is seen through from a total of three directions, and the largest value of the three-dimensional imaging data I that overlaps the perspective direction is projected onto the plane. By doing so, three plane (two-dimensional) images are generated through each direction. The three-dimensional imaging data I generated by the three-dimensional image generation unit 34 is output to the display processing device 18.

  The intermediate data processing unit 35 of the display processing device 18 extracts a transmission front image of the intermediate layer area in the vicinity of the joint 15 of the two plate-like structures 14a and 14b from the intensity distribution of the three-dimensional imaging data I and joins them. The joining state of the part 15 is detected, and the bottom face data processing part 36 extracts the transmission front image of the bottom face part 29 from the intensity distribution of the three-dimensional imaging data I to detect the size of the melt-solidified part 27, and the judging part 37 compares and determines the results obtained from the intermediate data processing unit 35 and the bottom surface data processing unit 36. The display unit 38 displays the comparison determination results obtained from the intermediate data processing unit 35, the bottom surface data processing unit 36, and the determination unit 37 and the three-dimensional imaging data I from the three-dimensional image generation unit 34.

  Next, functions of the display processing device 18 of the three-dimensional ultrasonic inspection apparatus 10 will be described with reference to FIG.

  The intermediate data processing unit 35 of the display processing device 18 includes an intermediate detection unit 50 and a center position / junction measurement unit 51. The intermediate detection unit 50 extracts the three-dimensional imaging data of the intermediate joint 15 from the three-dimensional imaging data I generated from the signal processing unit 17, generates a transmission plane image of the intermediate joint, and the plate-like structure 14a. The plate thickness t is measured. In addition, the center position / joint measurement unit 51 determines the center position of the intermediate joint, the size and position of the joint 15, and the size of the welding defect such as a blowhole from the transmission plane image of the intermediate joint generated by the intermediate detection unit 50. And measure the position.

  On the other hand, the bottom surface data processing unit 36 of the display processing device 18 includes a bottom surface detection unit 53 and a melted and solidified part detection unit 54. The bottom surface detection unit 53 generates a transmission plane image of the bottom surface 29 of the inspection object 14 from the three-dimensional imaging data I generated from the signal processing unit 17 and measures the thickness T of the joint 15. Further, the melt solidification part detection unit 54 determines the size of the melt solidification part 27 from the transmission plane image of the bottom face 29 generated by the bottom face detection part 53 and the center position of the intermediate joint 15 taken from the center position / joint part measurement part 51. Measure the position.

  Further, the determination unit 37 of the display processing device 18 calculates the minimum required size of the melt-solidified portion 27 from the plate thickness t of the plate-like structure 14 a taken in from the intermediate detector 50, and this melt-solidified portion 27. Is determined, and compared with a determination reference value in which the size and position of the melted and solidified portion 27 fetched from the melted and solidified portion detecting portion 54 are set, and quality is determined. This determination criterion is determined by a pass / fail determination pattern image stored in the database with an ultrasonic flaw detection image in an appropriate state as a reference, and this pass / fail determination pattern image is stored and stored in advance in the database of the determination unit 37.

  The display section 38 is a transmission plane image of the intermediate joint surface used in the center position / joint measurement section 51, the center position of the intermediate joint measured from now on, the size and position of the joint 15, and the weld defect portion 28 such as a blowhole. The size and position, the transmission plane image of the bottom surface used by the melted and solidified part detecting unit 54, the size and position of the measured melted and solidified part, the determination reference value set by the determining unit 37 and the pass / fail judgment are displayed.

  FIG. 4 is a diagram illustrating functions in the intermediate detection unit 50 of the display processing device 18 of the three-dimensional ultrasonic inspection apparatus 10.

  The intermediate detection unit 50 of the display processing device 18 includes a surface / intermediate position detection unit 50a of the inspection object 14, a plate thickness measurement unit 50b that measures the plate thickness t of the plate-like structure 14a, and a planar image of the intermediate layer region. And an intermediate position plane image generation unit 50c.

  The imaging data of the side surface orthogonal to the front surface in the three-dimensional imaging data I generated from the signal processing unit 17 includes information on the thickness direction of a plurality of flat plate inspection objects having the joint 15. The bottom surface of the plate-like structure (flat plate) 14a is utilized by utilizing the high reflection intensity from the bottom surface of the first flat plate as viewed from the matrix sensor 11 at the non-bonded portion where the front surface / intermediate position detection unit 50a is not bonded. That is, the intermediate layer position (thickness direction) of the joint 15 is determined.

  The plate thickness measuring unit 50b measures the first flat plate thickness t from the bottom surface position (thickness direction) of the first flat plate determined by the surface / intermediate position detecting unit 50a.

  The intermediate position plane image generation unit 50c of the intermediate detection unit 50 extracts imaging data in the front direction of only the intermediate layer part from the three-dimensional imaging data I generated by the signal processing unit 17. Since the non-joint part 26 with high reflection intensity and the joint part 15 with low reflection intensity exist in this intermediate layer part, the boundary between the non-joint part 26 and the joint part 15 appears remarkably as the joint part contour shape. Further, a weld defect portion 28 such as a blow hole generated in the melted and solidified portion 27 inside the joint portion 15 also appears in the imaging data in the front direction of the intermediate layer portion.

  FIG. 5 is a diagram for explaining functions in the center position / joint portion measuring unit 51 of the display processing device 18 of the three-dimensional ultrasonic inspection apparatus 10.

  The joint contour determination unit 51a recognizes, as image data, the size and position of the joint contour shape that appears as a difference in reflection intensity in the imaging data in the front direction of only the intermediate layer extracted by the intermediate detection unit 50. At the same time, the shape, size and position of the blow hole 28 generated in the melted and solidified portion 27 in the joint portion 15 are also recognized as image data.

  The center position determination unit 51b calculates the center position from the contour data of the joint 15 recognized by the joint contour determination unit 51a.

  The joint measurement unit 51c measures the size and position of the joint contour shape from the contour data of the joint 15 recognized by the joint contour determination unit 51a. Note that there is a difference in reflection intensity between the melt-solidified portion 27 inside the joint portion 15 and the weld defect portion 28 such as a blowhole, and the difference is used to distinguish them.

  FIG. 6 is a diagram for explaining functions of the bottom surface detection unit 53 of the display processing device 18 of the three-dimensional ultrasonic inspection apparatus 10.

  The bottom surface detection unit 53 of the surface treatment apparatus 18 detects the concave portion (the dent portion) of the inspection object 14 and the position of the bottom surface position detection portion 53a that detects the position of the bottom surface 29, and the thickness T of the joint portion 15. And a bottom surface position plane image generation unit 53c.

  The imaging data of the side surface orthogonal to the front surface in the three-dimensional imaging data I generated from the signal processing unit 17 includes information on the thickness direction of the plurality of flat inspection objects 14 having the joints 15. Yes. The dent / bottom surface position detection unit 53a determines the bottom surface position of the plurality of flat plate inspection objects 14 from the reflection position at the thickest portion.

  The joint thickness measurement unit 53b measures the thickness T from the bottom surface position (thickness direction) of the entire inspection object 14 determined by the dent / bottom surface position detection unit 53a.

  The bottom surface position plane image generation unit 53c extracts imaging data in the front direction of only the bottom surface portion from the three-dimensional imaging data I generated by the signal processing unit 17. The bottom surface imaging data includes information on the welded portion 28 such as the joint, the melt-solidified portion 27 in the joint 15 and the blowhole in the melt-solidified portion 27. 28 can be discriminated from the difference in reflection intensity, but the junction 15 and the melted and solidified portion 27 have a small difference in reflection intensity and cannot be discriminated.

  FIG. 7 is a diagram for explaining the function of the melted and solidified part detecting unit 54 of the display processing apparatus 18 of the three-dimensional ultrasonic inspection apparatus 10.

  The melt solidification detection unit 54 of the display processing device 18 includes an intensity distribution creation unit 54a that creates an ultrasonic intensity distribution image of the bottom surface position of the detection target 14, and a smoothing process that smoothes the created ultrasonic intensity distribution image data. Processing unit 54b, a primary difference (primary differentiation) processing unit 54c that performs (primary) difference processing on the bottom surface transmission plane image of the joint 15 subjected to smoothing processing, and a bottom surface transmission plane of the difference processed joint 15 A secondary difference (secondary differential) processing unit 54d that further performs differential processing (secondary differential processing or second-order differential processing) on the image, a melt-solidified portion specifying unit 54e that specifies the melt-solidified portion 27 of the joint portion 15, and melting It has a melted and solidified part specifying part 54e for specifying the melted and solidified part 27 for measuring the size and position of the solidified part 27, and a melted and solidified part measuring part 54f for measuring the size and position of the melted and solidified part 27.

  The intensity distribution creating unit 54 a of the melted and solidified part detecting unit 54 includes a bottom surface transmission plane image generated by the bottom detecting unit 53 and the center position of the joined part 15 taken in from the center position / joined part measuring unit 51. An ultrasonic intensity distribution image of the bottom surface position including the center position information is created.

  The smoothing processing part 54b of the melt solidification part detecting part 54 smoothes the ultrasonic intensity distribution image data in order to remove noise included in the ultrasonic intensity distribution image data generated by the intensity distribution creating part 54a.

  The bottom surface imaging data smoothed by the smoothing processing unit 54b includes information on the welded portion 28 such as the joint 15, the melt-solidified portion 27 in the joint 15, and the blowhole in the melt-solidified portion 27. It is. Even if the bottom surface imaging data remains as it is, the boundary between the joint 15 and the blow hole 28 can be discriminated from the difference in reflection intensity, but the junction 15 and the melted and solidified portion 27 have a small difference in reflection intensity and cannot be discriminated.

  However, the boundary between the joined portion 15 and the melted and solidified portion 27 inside the joined portion is the reflection echo intensity of the bottom surface transmission plane image smoothed by the smoothing processing portion 54b as shown in FIG. It appears as an inflection point P when viewed from the center direction. Therefore, the first-order difference (differential) processing unit 54c performs first-order difference (first-order differentiation) processing from the outside to the center position direction on the bottom surface transmission plane image of the joint 15 smoothed by the smoothing processing unit 54b, and further performs secondary processing. Similarly, when the difference (differentiation) processing unit 54d performs the second-order difference (differentiation) processing, imaging data of the inflection point P of the bottom surface transmission plane image is obtained.

  In the melt solidification part specifying part 54e, from the imaging data of the inflection point P of the bottom surface transmission plane image obtained by the secondary difference (differentiation) processing part 54d, the melt solidification part 27 referred to as a nugget part in spot welding. Is identified. The imaging data of the inflection point P should be a continuous curve indicating the outline of the melt-solidified portion 27, but in reality, only discontinuous curve data may be obtained. When only discontinuous curve data can be obtained, the intensity distribution creation unit 54a uses the center position data of the joint 15 taken from the center position / joint measurement unit 51, and uses the discontinuous curve data and the center position data. It can be obtained by calculation as a continuous curve indicating the contour of the melt-solidified portion 27.

  The melted and solidified part measuring unit 54f recognizes the size and position of the shape of the melted and solidified part 27 as image data from the contour data of the melted and solidified part 27 obtained by the melted and solidified part specifying unit 54e. The solid-phase bonded portion (nugget) of the heat-affected layer formed on the outer peripheral portion of the melt-solidified portion 27 can be obtained by arithmetic processing based on the analysis of the bonded portion 15 and the melt-solidified portion 27.

  FIG. 9 is a diagram for explaining functions in the determination unit 37 of the display processing device 18 of the three-dimensional ultrasonic inspection device 10.

  The determination unit 37 of the display processing device 18 includes a determination reference creation unit 37a and a pass / fail determination unit 37b.

  The determination criterion creation unit 37 a of the determination unit 37 calculates the minimum required size of the melt-solidified portion 27 from the plate thickness value t obtained by the center position / joint measurement unit 51.

  The pass / fail judgment unit 37b compares the size of the minimum required melt-solidified portion 27 calculated by the determination criterion creating unit 37a with the size of the melt-solidified portion 27 obtained by the melt-solidified portion detecting unit 54 to determine whether the pass / fail is good. It is judged and automatically judged.

  Next, the operation of the three-dimensional ultrasonic inspection apparatus 10 will be described.

  In order to obtain an ultrasonic flaw detection image of the joint 15 which is an inspection region (target region) of the inspection object 14 by the three-dimensional ultrasonic inspection apparatus 10, the ultrasonic transducer 11 which is a matrix sensor is operated.

  One or a plurality of ultrasonic transducers 11 are applied to each of the piezoelectric vibrators 20 in the form of a matrix by using the drive element selector 13 with the pulse or continuous drive signal generated by the signal generator 12. Add sequentially. When the piezoelectric vibrator 20 to be operated is selected by the drive element selection unit 13 and a drive signal (electrical signal) acts on the selected piezoelectric vibrator 20mn, the piezoelectric vibrator 20mn is piezoelectrically converted and an ultrasonic wave having a required frequency is oscillated. I'm damned.

  The ultrasonic wave U oscillated from the selected piezoelectric vibrator 20 mn passes through the acoustic propagation medium 23 and enters the inspection region (joint portion) 15 of the inspection object 14 with a required spread. The ultrasonic wave U incident on the inspection region 15 of the inspection object 14 sequentially reaches the boundary layers having different densities in the inspection object 14 and is irradiated with the surface. A part of the ultrasonic wave irradiated to the inside of the inspection object 14 (two-dimensionally) is reflected by the boundary layer, and the reflected wave becomes a reflected echo and enters the matrix sensor 11 through the acoustic propagation medium 23. , And enters each piezoelectric vibrator 20 of the matrix sensor 11.

  Each piezoelectric vibrator 20 of the matrix sensor 11 that has received the reflected echo acts as a piezoelectric transducer, and outputs an electric signal corresponding to the magnitude of the reflected echo to the signal detection circuit 16. The ultrasonic transducers 11 constituting the matrix sensor 11 are provided with a large number of piezoelectric vibrators 20 mn, and ultrasonic waves sequentially oscillated from the piezoelectric vibrators 20 mn at different oscillation positions are detected on the inspection object 14. Reflected one after another at the joint (inspection area), becomes reflected echoes and enters the matrix sensor 11, and is successively converted into electrical signals of reflected echoes from the piezoelectric vibrators 20 of the matrix sensor 11 to the signal detection circuit 16. Sent.

  The electrical signal of the reflected echo sent to the signal detection circuit 16 is subsequently incident on the signal processing unit 17, and the electrical signal of the reflected echo is signal-processed by this signal processing unit 17, and is an inspection region of the inspection object 14. Three-dimensional imaging data is created by the parallel processor 33 of the joint unit 15 and the three-dimensional image generation unit 34 that is an integrated processor.

  At this time, the signal processor 17 includes a parallel processor 33, and the parallel processor 33 performs arithmetic processing on the electrical signals of the reflected echoes input to the signal processor 17, so that the arithmetic processing can be performed in a short time. Can be done quickly.

  From the three-dimensional imaging data generated by the signal processing unit 17, the three-dimensional image generation unit 34 looks at the inspection object 14 from the ultrasonic transducer 11 and the front direction and two side surfaces orthogonal to the front side. Projecting three-dimensional ultrasound imaging data from a total of three directions in the vertical direction, and projecting the largest value of the three-dimensional ultrasound imaging data in the imaging data overlapping in the perspective direction onto a plane 3 plane images in each direction are generated.

  The imaging data of the two side surfaces orthogonal to the front includes a large amount of information in the thickness direction of the plurality of flat plate inspection objects 14 having the joints 15. Since the reflection intensity from the bottom surface of the first flat structure 14a as viewed from the transducer 11 is high, the position of the bottom surface portion of the flat structure 14a can be determined. On the other hand, since the ultrasonic transmittance is high at the portion where the plurality of flat inspection objects 14 are joined, the position of the bottom surface portion 29 of the plurality of flat inspection objects 14 can be determined as the portion having the highest reflection intensity.

  When the imaging data in the front direction of only the bottom surface of the non-joint portion 26, that is, the intermediate layer portion is extracted from the three-dimensional imaging data, the joint 15 and the non-joint portion 26 have greatly different reflection intensities. The boundary of the joint portion 26 appears remarkably as the joint contour shape. From the joint contour data, the state of the joint 15 in the intermediate layer portion of the plurality of flat plate inspection objects 14, that is, the size of the joint and the center position of the joint can be determined. In addition, a welding defect portion 28 such as a blow hole generated in the melted and solidified portion 27 inside the joint portion 15 also appears in the imaging data in the front direction of the intermediate layer portion, and the size and position can be determined.

  When the imaging data in the front direction of only the bottom surface 29 of the plurality of flat plate inspection objects 14, that is, only the bottom surface portion is extracted from the three-dimensional imaging data, the intensity distribution of the reflected echo due to the bonding state difference in the bonding portion 15 is obtained. It is done.

  The joint strength of the joint 15 depends on the size of the melt-solidified part 27 existing in the joint 15, but the boundary between the simple joint 15 and the melt-solidified part 27 generated in the joint 15 is a flat plate inspection. It is known that the determination can be made at the inflection point P of the reflection intensity distribution of the bottom surface portion 29 of the object 14.

  Therefore, theoretically, the reflection intensity distribution data of the bottom surface portion 29 of the flat test object 14 is subjected to difference processing twice from the outside of the melt-solidified portion 27 toward the center position, and the inflection point P of the reflection intensity is obtained. Is calculated, the contour data of the melt-solidified portion 27 in the joint 15 can be obtained, and the size and position of the melt-solidified portion 27 can be measured.

  However, in reality, only discontinuous contour data may be obtained, and the size of the melt-solidified portion 27 may not be measured depending on the amount and location of the obtained continuous portion.

  However, it is considered that the center of the joint portion 15 and the center of the melt-solidified portion 27 coincide.

  In the three-dimensional ultrasonic inspection apparatus 10, since the center position of the joint portion 15 is measured from the size of the joint portion 15 in the intermediate layer portion of the plurality of flat plate inspection objects 14, the contour of the melt-solidified portion 27 is measured. Even if the data is partially discontinuous data, the center position is used to calculate continuous contour data from the discontinuous contour data of the melt-solidified portion 27, and the size of the melt-solidified portion 27 is measured. be able to.

  Since the joint strength of the joint portion 15 depends on the size of the melt-solidified portion 27 existing in the joint portion 15, the minimum joint strength required for the plurality of flat plate-like joint portions 15 is required. This is the same as the size of the melt-solidified portion 27.

  On the other hand, the minimum bonding strength required for the plurality of flat plate-like joint portions 15, that is, the minimum required size of the melt-solidified portion 27 is the thickness value t of the plate-like structure 14a of the inspection object 14. It is prescribed from.

  Therefore, the determination as to whether or not the plurality of flat plate-like joint portions 15 of the inspection object 14 satisfy the minimum required joint strength is calculated from the plate thickness value t of the plate-like structure 14a that is a flat plate. This can be achieved by comparing the size of the melt-solidified portion 27 with the size of the melt-solidified portion 27 obtained as a measurement result of the inspection object 14.

  The three-dimensional ultrasonic inspection apparatus according to the present invention is not limited to the one described in the above embodiment, and various modifications can be considered.

  In one embodiment of the three-dimensional ultrasonic inspection apparatus, the signal processing unit 17 and the display processing apparatus 18 are provided in the three-dimensional imaging apparatus 10, but may be realized by independent computers. In addition, the three-dimensional image generation unit 34 of the signal processing unit 17 may be provided by being shifted into the display processing device 18.

  The computer executes each process in the present embodiment based on a program stored in a storage medium. The computer includes a computer device such as a personal computer or a computer system in which a plurality of computer devices are connected to a network. Any configuration may be used. The computer is not limited to a personal computer (personal computer), and includes a communication device, an arithmetic processing device included in an information processing device, a microcomputer, etc., and a device or device that can realize the functions of the present invention by a program. Collectively.

  The internal configuration of the display processing device 18 can be realized by software. The software may be stored in a computer-readable storage medium such as a flexible disk, or may be transmitted over a network such as a LAN or the Internet as a single software (program). In this case, the computer reads out the software (program) stored in the storage medium, or the computer downloads from a site (server) on the LAN or the Internet and installs it on the hard disk, thereby enabling processing in the computer.

  That is, the software (program) in the present invention is not limited to software stored in a storage medium independent of the computer, but includes software distributed via a transmission medium such as a LAN or the Internet.

  The program is stored in a storage medium such as a memory, a flexible disk, a hard disk, an optical disk (CD-ROM, CD-R, DVD, etc.), a magneto-optical disk (MO, etc.), a semiconductor memory, etc. so that it can be read by a computer. As long as it is, the language format and the storage format may be any form.

  Further, an OS (operating system) running on the computer, MW (middleware) such as database management software, network software, and the like implement the present embodiment based on instructions from a program installed in the computer from the storage medium. A part of each process may be executed.

  Furthermore, the storage medium is not limited to a medium independent of the computer, but also includes a storage medium in which a program transmitted via a LAN or the Internet is downloaded and stored or temporarily stored. Further, the number of storage media is not limited to one, and the case where the processing in the present embodiment is executed from a plurality of media is also included in the storage media in the present invention, and the media configuration may be any configuration.

  According to the three-dimensional ultrasonic inspection apparatus 10, it is possible to provide a three-dimensional ultrasonic inspection apparatus that improves the accuracy of internal inspection using ultrasonic waves and enables automatic determination of inspection.

1 is an overall configuration diagram showing an embodiment of a three-dimensional ultrasonic inspection apparatus according to the present invention. The figure which shows the structure of the signal processing part with which the said three-dimensional ultrasonic inspection apparatus is equipped. The figure which shows the data processing relationship in the display processing apparatus with which the three-dimensional ultrasonic inspection apparatus of this invention is equipped. The block diagram explaining the data processing of the intermediate | middle detection part in the display processing apparatus shown by FIG. The block diagram explaining the data processing of the center position and junction part measurement part in the display processing apparatus shown by FIG. The block diagram explaining the data processing of the bottom face detection part in the display processing apparatus shown by FIG. The block diagram explaining the data processing of the melt solidification detection part in the display processing apparatus shown by FIG. The figure which shows the fusion | melting solidification part detection concept of the test | inspection area | region which is a junction part of a test target object. The block diagram explaining the data processing of the quality determination part in the display processing apparatus shown by FIG.

Explanation of symbols

10 3D Ultrasonic Inspection Equipment 11 Ultrasonic Transducer (Matrix Sensor)
12 signal generator 13 drive element selector 14 inspection object 14a, 14b plate-like structure 15 joint (welded part, inspection area, target area)
Reference Signs List 16 Signal Detection Circuit 17 Signal Processing Unit 18 Display Processing Device 20 (20 mn) Piezoelectric Vibrator 21 Substrate 23 Acoustic Propagation Medium 24 Coupling 25 Concave portion (dented portion)
26 Non-bonded portion 27 Melted solidified portion 28 Weld defect portion 29 Bottom surface 31a, 31b, ..., 31i Amplifier 32a, 32b, ..., 32i A / D converter 33 Parallel processor 34 Three-dimensional image generator (integrated processor)
35 Intermediate data processing unit 36 Bottom surface data processing unit 37 Determination unit (good / bad determination unit)
38i display units 40a, 40b,..., 40i internal memories 41a, 41b,..., 41i arithmetic circuit 44 image integration processing unit 45 boundary extraction processing unit 46 shape data storage unit 47 table data storage unit 50 intermediate detection unit 51 center position / joint Measurement unit 53 bottom detection unit 54 melt solidification detection unit

Claims (10)

An ultrasonic transducer in which a plurality of piezoelectric vibrators are arranged in a matrix or array; and
A drive element selection unit that sequentially selects a piezoelectric vibrator that oscillates an ultrasonic wave among the plurality of piezoelectric vibrators of the ultrasonic transducer;
The ultrasonic wave oscillated from the piezoelectric vibrator selected by the drive element selection unit is incident on the joint portion of the inspection object via the acoustic propagation medium, and the reflected echo from the joint portion is received. A signal detection circuit for detecting an electrical signal;
Signal processing for processing the electrical signal detected by the signal detection circuit and generating three-dimensional imaging data corresponding to the mesh defined in the three-dimensional imaging region set inside the inspection object And
While detecting the size and position of the melt-solidified portion and the position and size of the weld defect at the joint from the intensity distribution of the three-dimensional imaging data generated by the signal processing unit, the detection result and the signal processing unit A three-dimensional ultrasonic inspection apparatus comprising: a display processing device that displays three-dimensional image data. The display processing device includes a bottom surface data processing unit that detects the size of the melt-solidified portion from the intensity distribution of the three-dimensional imaging data of the bottom surface of the joint portion of the inspection object generated by the signal processing unit,
An intermediate data processing unit for detecting the presence / absence / size of a fusion defect in the joint from the intensity distribution of the three-dimensional imaging data of the intermediate joint to be inspected of the inspection object;
A determination unit that compares the results detected by the bottom surface data processing unit and the intermediate data processing unit and determines pass / fail,
2. A display unit for displaying the results obtained from the bottom surface data processing unit, the intermediate data processing unit and the determination unit and the three-dimensional imaging data generated by the signal processing unit. The three-dimensional ultrasonic inspection apparatus described. The intermediate data processing unit of the display processing device extracts the three-dimensional imaging data of the intermediate part of the joint part of the inspection object from the three-dimensional imaging data generated from the signal processing part, and transmits the transmission plane of the intermediate joint surface. An intermediate detection unit for generating an image and measuring the plate thickness;
The center position of the intermediate joint, the size and position of the joint, and the center position / joint measurement unit for measuring the size and position of the weld defect such as a blowhole from the transmission plane image captured from the intermediate detector are provided. The three-dimensional ultrasonic inspection apparatus according to claim 2. The bottom surface data processing unit of the display processing device extracts the three-dimensional imaging data of the bottom surface of the joint portion of the inspection object from the three-dimensional imaging data generated from the signal processing unit, and generates a transmission plane image of the bottom surface of the joint portion. A bottom detection unit to be generated;
A melt solidification part detection unit for measuring the size and position of the melt solidification part from the transmission plane image taken from the bottom face detection part and the center position of the intermediate joint taken from the center position / joint measurement part; The three-dimensional ultrasonic inspection apparatus according to claim 2 or 3. The display processing device includes a determination criterion obtained from a thickness of an inspection object captured from the intermediate detection unit of the intermediate data processing unit, and a size of the melt solidification unit captured from the melt solidification detection unit of the bottom surface data processing unit. A determination unit that performs pass / fail determination by comparing the position;
3D generated by the signal processing unit and the determination result obtained by comparing the state of the joined portion taken in from the center position / joining portion judging unit of the bottom surface data processing unit and the state of the melted and solidified portion taken in from the judging unit A display for displaying the imaging data;
The three-dimensional ultrasonic inspection apparatus according to claim 2, further comprising: The display processing device includes an intermediate detection unit in the intermediate data processing unit, and detects a surface position and a joint position of an inspection target from the three-dimensional imaging data generated by the signal processing unit. When,
A plate thickness measuring unit that measures the plate thickness from the data of the surface position and the joint position acquired from the surface / intermediate position detecting unit;
An intermediate position plane image generation unit that generates a transmission plane image of an intermediate position from the intermediate position data captured from the surface / intermediate position detection unit and the three-dimensional imaging data generated from the signal processing unit;
The three-dimensional ultrasonic inspection apparatus according to claim 2 or 3, characterized by comprising: The display processing apparatus includes a center position / joint part measuring unit in the intermediate part data processing unit, and the center position / joint part measuring unit is configured to generate a contour of the joint from the intermediate position transmission plane image generated by the intermediate detecting unit. A joint contour determination unit for determining
A center position determination unit for determining the center position of the joint from the contour data of the joint taken in from the joint contour determination unit;
A joint measuring unit that measures the size of the joint from the contour data of the joint captured from the joint contour determination unit;
The three-dimensional ultrasonic inspection apparatus according to claim 2, wherein: The display processing device includes a bottom surface detection unit in a bottom surface data processing unit,
The bottom surface detection unit is a dent / bottom position detection unit that detects a concave portion position and a bottom position representing a dent portion of the joint portion of the inspection object from the three-dimensional imaging data generated by the signal processing unit,
A junction thickness measurement unit that measures the thickness of the junction from the data of the concave portion and the bottom surface position captured from the dent portion and bottom surface position detection unit;
A bottom surface position plane image generation unit that generates a bottom surface position transmission plane image from the concave portion / bottom surface position data captured from the dent portion / bottom surface position detection unit and the three-dimensional imaging data generated from the signal processing unit;
The three-dimensional ultrasonic inspection apparatus according to claim 2 or 4, characterized by comprising: The display processing device includes a melt solidification part detection unit in a bottom surface data processing unit,
This melt-solidified part detection part is obtained from the bottom surface position transmission plane image generated by the bottom part detection part of the bottom part data processing part and the center position of the intermediate part data processing part and the center position of the joint part taken in from the joint part measurement part. An intensity distribution creation unit for creating an ultrasonic intensity distribution image;
A smoothing processing unit that smoothes the ultrasonic intensity distribution image generated by the intensity distribution creating unit;
A primary difference processing unit that performs a primary difference process on the smoothed bottom surface position transmission plane image from the outside toward the center position direction;
A secondary difference processing unit that performs secondary difference processing from the outside of the melt-solidified part to the center position direction of the bottom surface transmission plane image subjected to the primary difference processing by the primary difference processing unit;
A melt-solidified part identifying unit for identifying a melt-solidified part of the joint from the inflection point data of the bottom surface transmission plane image subjected to the secondary difference processing;
A melt-solidified part measuring unit that measures the size of the melt-solidified part from the melt-solidified part data identified by the melt-solidified part identifying unit;
The three-dimensional ultrasonic inspection apparatus according to claim 2 or 4, characterized by comprising: The display processing apparatus includes a determination unit that determines whether or not the bonding state of the bonding portion is good, and the determination portion is necessary based on the plate thickness value t measured by the center position / bonding portion measurement unit of the intermediate data processing unit. A criterion creation part for calculating the size of the melt-solidified part,
A pass / fail judgment unit for comparing / determining the required size of the melt-solidified part generated by the determination reference creating unit and the size of the melt-solidified part measured by the melt-solidified part detecting unit of the bottom surface data processing unit; ,
The three-dimensional ultrasonic inspection apparatus according to claim 2, wherein:

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