JP2005313196A - Dust collection method and dust collection device in laser beam machining - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To efficiently remove foreign matters even when any solvent cannot be used for a work. <P>SOLUTION: The dust collection device comprises a film material 1 which covers the surface of a work 2, less prone to absorb laser beams, and is not peeled by laser beams, a covering mechanism 4 to cover the film material 1 on the surface of the work 2, a film peeling and collecting mechanism 5 which peels and collects the film material 1 from the surface of the work 2 after the laser beam machining, a device 6 to separate and remove foreign matters 7 adhered to the film material 1 collected by the film peeling and collecting mechanism 5, and a suction device to suck the foreign matters 7 separated and removed from the film material 1 by the separating and removing device 6. Foreign matters causing problems in the laser beam machining are not scattered, and the film can be reliably collected in a recyclable condition. Further, the film material can be used repeatedly, and dust collection device can be applied to any work since no solvent is used. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method and apparatus for efficiently recovering foreign matter removed from the surface of a workpiece such as a substrate by laser processing.

Conventionally, removal of dust and other foreign substances such as particles in a laser processing apparatus is generally performed by suction mainly using a dust collection nozzle (dust collection duct). As another method, a method of applying a resist or the like on the surface of a workpiece and removing it with a solvent after laser processing is used.
Japanese Patent Laid-Open No. 9-271980 Japanese Patent Laid-Open No. 7-185875

  However, in the former method of sucking with a dust collection nozzle (dust collection duct), the foreign matter is instantaneously scattered by laser irradiation, so it is difficult to reliably remove the foreign matter at the laser irradiation portion.

  In addition, the latter method of applying resist, etc. has a greater effect of removing foreign matter than the former method using a dust collection nozzle (dust collection duct), but of course a solvent is used to remove the foreign matter. It cannot be applied to workpieces that cannot.

  The problem to be solved by the present invention is that a foreign object cannot be efficiently removed by a workpiece that cannot use a solvent.

The dust collection method in laser processing according to the present invention,
To remove foreign matter efficiently without using a solvent,
In laser processing to remove the thin film on the workpiece surface by irradiating the workpiece surface with laser,
Prior to laser processing, the surface of the workpiece is coated with a coating material that is difficult to absorb the laser and is not peeled off by the laser,
After that, the surface of the workpiece is irradiated with a laser through this coating material,
The most important feature is that after the laser processing, the coating material and the foreign matter adhering to the coating material are collected.

  In the dust collection method in the laser processing according to the present invention, it is desirable to use an adhesive material or a charged material as the coating material.

Further, a dust collector in laser processing according to the present invention for carrying out the method of the present invention,
A coating material that is difficult to absorb the laser that coats the workpiece surface and that does not peel off by the laser,
A coating mechanism for coating the surface of the workpiece with this coating material;
After laser processing, a film peeling recovery mechanism that peels and recovers the film material from the surface of the workpiece,
An apparatus for separating and removing foreign substances adhering to the film material collected by the film peeling and collecting mechanism from the film material;
The most important feature is that a suction device for sucking foreign matter separated and removed from the film material by the separation and removal device is provided.

In the dust collector in laser processing according to the present invention,
The coating mechanism, a rotatable roller that winds the coating material and coats the coating material on the workpiece surface by rotation accompanying relative movement with the workpiece;
Further, when the film peeling / recovery mechanism is a film peeling / recovering roller that rotates in association with the relative movement with the workpiece, a necessary effect can be obtained with a simple configuration.

  Further, in the dust collector in laser processing according to the present invention, when the coating material has adhesiveness, the separation / removal device includes a rotating brush that contacts the coating peeling / recovery roller, and the coating material In the case where has a charging property, the separation / removal device may be a neutralization device.

  In the dust collector in laser processing according to the present invention, the coating material is coated on the workpiece, the coating material is peeled off from the workpiece surface, and the collected coating material is attached to the workpiece. It is desirable from the viewpoint of work efficiency that a series of operations of separating and removing the foreign matter from the coating material and suctioning the separated and removed foreign matter can be performed in parallel with the laser processing.

  In the present invention, the coating material is coated on the surface of the workpiece, laser processing is performed, and after the laser processing, the coating material and foreign matter adhering to the coating material are collected. It can be reliably recovered in a usable state. According to the experiment results of the inventors, the recovery rate of foreign matters was 70% or more. In addition, since the coating material can be used repeatedly and no solvent is used, it can be applied regardless of the workpiece.

Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 and FIG. 2 are drawings for explaining a first example of the present invention, and 1 is a coating material that covers the surface of the workpiece 2 before laser processing. It is an essential requirement that the coating material 1 hardly absorbs the laser 3 and is not peeled off by the laser.

  Examples of the coating material 1 having the above requirements include celluloid, cellulose, acetate, acetyl sheet, acetyl resin, petit sheet, polyvinyl alcohol, carboxymethyl cellulose, polyethylene glycol, polyvinyl pyrrolidone, nylon, polyethylene glycol, polyvinyl bratilal, polystyrene, poly There are vinyl chloride, polyester resin, polyimide, polymer and the like.

  Reference numeral 4 denotes a coating mechanism for coating the surface of the workpiece 2 with the coating material 1 in which, for example, an acrylic adhesive is applied to the contact surface with the workpiece 2, and in the example shown in FIG. A rotatable roller that coats the surface of the workpiece 2 with the coating material 1 wound around the outer peripheral surface by rotation accompanying the movement of the workpiece 2 (hereinafter, the coating mechanism 4 is also referred to as “roller 4”). An example using is shown.

  The pressure-sensitive adhesive for imparting adhesiveness to the coating material 1 is not limited to the acrylic pressure-sensitive adhesive as long as it has transparency to the laser 3. In addition, it is desirable to use a pressure-sensitive adhesive whose adhesiveness is increased by irradiation with a laser (for example, a thermosetting pressure-sensitive adhesive). It is important.

  Reference numeral 5 denotes a film peeling / recovery mechanism for removing the foreign material 7 removed from the surface of the workpiece 2 after the laser processing and adhering to the film material 1 from the film material 1 and collecting it. In this example, a film peeling / collecting roller rotating in synchronization with the roller 4 (hereinafter, the film peeling / collecting mechanism 5 is also referred to as “film peeling / collecting roller 5”) is shown.

  6 is an apparatus for separating and removing dust and dusty foreign matter 7 attached to the film material 1 collected by the film peeling / collecting roller 5 from the film material 1, and in the example shown in FIG. A rotating brush in contact with the roller 5 is shown. In FIG. 2, in order to efficiently separate and remove the foreign matter 7 adhering to the film material 1, a first rotating brush 6a that rotates in synchronization with the film peeling / recovery roller 5 and the first rotating brush 6a. And the second rotating brush 6b that scrapes off the foreign matter 7 collected in the first rotating brush 6a by rotating in the same direction.

  1 and 2, reference numeral 8 denotes a suction nozzle that sucks the foreign matter 7 separated and removed from the coating material 1 by the separation / removal device 6 to a suction device (not shown).

  In the first example of the dust collector in the laser processing shown in FIGS. 1 and 2 having such a configuration, for example, a dust collector in a state where the roller 4 around which the film material 1 is wound is brought into contact with the workpiece 2. If the workpiece 2 is moved relative to the workpiece 2, the roller 4 rotates as the workpiece 2 moves, and the coating material 1 is rewound from the roller 4 to cover the surface of the workpiece 2. become.

  Then, the surface of the workpiece 2 is irradiated with a laser 3 from above the coating material 1 to remove the foreign matter 7 on the surface of the workpiece 2. The removed foreign matter 7 adheres to the coating material 1, and the coating material 1 is wound around the coating peeling / recovering roller 5 as the workpiece 2 is moved. Is scraped off from the coating material 1 and is sucked and collected by a suction device.

  The above operations are continuously performed as the workpiece 2 moves. This is the dust collection method in laser processing according to the first aspect of the present invention.

  FIG. 3 shows a second example of the present invention. The second example shown in FIG. 3 is suitable when the foreign substance 7 to be collected is charged. In this case, the coating material 1 has a charging property unlike the first example. I am using something.

  In this second example, the foreign matter 7 is attached to the coating material 1 by electric charge. Therefore, the separation / removal device 6 replaces the rotating brush as in the first example with a neutralization device 6c. By disposing in the vicinity of the outer periphery of the roller 5, when the film material 1 is wound up, the foreign matter 7 adhering to the film material 1 is separated by the static eliminator 6c.

  In the second example, depending on the chargeability of the foreign matter 7, it is necessary to arrange the charging device 9 on the upstream side where laser processing is performed, but this is not an essential component. FIG. 3 shows the charging device 9 which is unwound from the roller 4 and charges the coating material 1 after being coated on the workpiece 2. FIG. As shown in Fig. 5, the film material 1 wound around the roller 4 may be placed at a position where it is charged immediately before rewinding.

  The present invention is not limited to the above examples, and it is needless to say that the embodiments may be appropriately changed within the scope of the technical idea described in each claim. For example, in the above example, the workpiece 2 is moved and the dust collector and the laser processing device according to the present invention are fixed. However, the workpiece 2 is fixed as in the example shown in FIG. Thus, the dust collector according to the present invention and the laser head 10 for laser processing may be moved.

  In the case of FIG. 4, first, the coating mechanism 4 is moved from the right side to the left side of the workpiece 2 to coat the surface of the workpiece 2 with the coating material 1 (FIG. 4A), and then the laser head. Similarly, laser processing is performed by moving 10 from the right side to the left side of the drawing. Thereafter, the film peeling / recovery device 5 and the separation / removal device 6 are moved from the right to the left in the drawing to separate and collect the foreign matter 7 adhering to the film material 1. In the example of FIG. 4 as well, the above operations may be performed continuously in parallel.

  The present invention is not merely as a dust collector, for example, when patterning the ITO film on the substrate surface, as shown in FIG. 5, only the processed portion of the ITO film 7a is attached to the coating material 1 and collected, Applicable to recycling. In addition, since there is no adhesion of foreign matter to other than the processed portion, it can be applied to fine processing for forming electrodes and the like.

It is a figure explaining the schematic structure of the dust collector in the laser processing of this invention. It is a schematic block diagram of the film | membrane peeling collection | recovery roller and separation / removal apparatus which comprise the dust collector in the laser processing of this invention shown in FIG. (A) is a figure explaining schematic structure of the other dust collector in the laser processing of this invention, (b) is a schematic block diagram of the film | membrane peeling collection | recovery roller and separation / removal apparatus which comprise the dust collector of (a). is there. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a drawing when the dust collecting apparatus of the present invention is incorporated in a laser processing machine, where (a) shows a coating material coating, (b) shows a laser processing, and (c) shows a coating material peeling and recovery time. It is. It is a figure explaining the situation where the ITO film | membrane of a process part adheres to film | membrane material at the time of peeling collection | recovery of film | membrane material by this invention method.

Explanation of symbols

1 Film Material 2 Workpiece 3 Laser 4 Film Mechanism (Roller)
5 Film peeling recovery mechanism (film peeling recovery roller)
6 Separation and removal device 6a First rotating brush 6b Second rotating brush 6c Static eliminator 7 Foreign matter 8 Suction nozzle

Claims (8)

In laser processing to remove the thin film on the workpiece surface by irradiating the workpiece surface with laser,
Prior to laser processing, the surface of the workpiece is coated with a coating material that is difficult to absorb the laser and is not peeled off by the laser,
After that, the surface of the workpiece is irradiated with a laser through this coating material,
A dust collection method in laser processing, wherein after the laser processing, the coating material and foreign matter adhering to the coating material are collected.   2. The dust collection method in laser processing according to claim 1, wherein an adhesive material is used as the coating material.   2. The dust collection method in laser processing according to claim 1, wherein a material having charging properties is used as the coating material. An apparatus for performing the dust collection method in laser processing according to any one of claims 1 to 3,
A coating material that is difficult to absorb the laser that coats the workpiece surface and that does not peel off by the laser,
A coating mechanism for coating the surface of the workpiece with this coating material;
After laser processing, a film peeling recovery mechanism that peels and recovers the film material from the surface of the workpiece,
An apparatus for separating and removing foreign substances adhering to the film material collected by the film peeling and collecting mechanism from the film material;
A dust collecting device in laser processing, comprising a suction device for sucking foreign matter separated and removed from a coating material by the separation and removal device. In the dust collector in the laser processing according to claim 4,
The coating mechanism is a rotatable roller that winds the coating material and coats the coating material on the workpiece surface by rotation accompanying relative movement with the workpiece,
The dust collecting apparatus in laser processing, wherein the film peeling / recovering mechanism is a film peeling / recovering roller that rotates in association with a relative movement with the workpiece.   6. The method according to claim 5, wherein the film material has adhesiveness, and the separation and removal device is a rotating brush that contacts the film peeling / recovery roller. Dust collector in laser processing.   The dust collecting apparatus for laser processing according to claim 4 or 5, wherein the coating material is charged, and the separation / removal apparatus is a static elimination apparatus. . Coating of the coating material onto the workpiece, separation and recovery of the coating material from the surface of the workpiece, separation and removal of foreign matter adhering to the collected coating material from the coating material, and suction of the separated and removed foreign matter 8. A dust collector in laser processing according to claim 4, wherein a series of operations can be performed in parallel with laser processing.

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