JP2005310659A - Manufacturing method for organic el panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To prevent a failure caused by the growth of a defective part and a failure caused by a predetermined acceleration test in a latent failure point accompanying stress applied by aging processing. <P>SOLUTION: In a first leak inspection process S4, a predetermined reverse bias voltage is impressed between a positive electrode and a negative electrode after an element formation process A1 for measuring a first leak current value. In a stress impression process S5, a second reverse bias voltage higher than the first reverse bias voltage impressed in the first leak inspection process S4 is impressed. In a second leak inspection process S6, a third reverse bias voltage substantially equal to the first reverse bias voltage is impressed after the stress impression process S5 for measuring a second leak current value. In an element determination process S7, it is determined whether the organic EL element is good or defective based on results of the first leak inspection process S4 and the second leak inspection process S6. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for manufacturing an organic EL (electroluminescence) panel in which an organic EL element having an organic layer having at least a light emitting layer sandwiched between an anode and a cathode is disposed on a translucent support substrate. is there.

  Conventionally, as an organic EL panel, a transparent electrode serving as an anode made of ITO (indium tin oxide) or the like, a hole injection layer, a hole transport layer, a light emitting layer, and an electron transport layer are formed on a transparent substrate made of a glass material. An organic EL element that is a laminated body is formed by sequentially laminating an organic layer made of aluminum and a non-transparent back electrode such as aluminum (Al) that becomes a cathode, and a sealing made of a glass material that covers the laminated body A member in which a member is disposed on a translucent substrate is known. Such an organic EL panel is disclosed in Patent Document 1, for example.

  In the manufacturing process of such an organic EL panel, foreign matter such as dust and debris in units of submicrons (several μm or less) is mixed in the vacuum chamber when the electrodes and the layers are formed by vapor deposition or sputtering. It is practically impossible to prevent this contamination. Accordingly, after the transparent electrode is formed, the foreign matter adheres on the transparent electrode, and when the organic layer is formed in a state where the foreign matter is attached, the very thin organic layer having a thickness of 10 nm to 100 nm is partially formed. When the back electrode is deposited on the organic layer having the defective portion, the transparent electrode and the back electrode are short-circuited, or There is a possibility that leakage may occur, and the organic layer which is a light emitting portion does not emit light, so that the yield of the organic EL panel is lowered.

In order to solve such problems, the present applicant has proposed a method for manufacturing an organic EL panel disclosed in Patent Document 2. The manufacturing method includes an organic EL element forming step of forming an organic EL element having an organic layer including at least a light emitting layer between an anode and a cathode, and both the anode and the cathode in the organic EL element. And an aging treatment step of performing an aging treatment in which a reverse bias voltage is applied between the electrodes to open-break the defective portion of the organic EL element and prevent a short circuit and a leak.
JP 2001-267066 A JP 2003-282249 A

  However, even in the manufacturing process including the above-described aging process, a failure due to the growth of the defective part due to long-term product driving or a predetermined accelerated test of a potential failure point due to stress applied in the aging process There was room for improvement in terms of failure.

  Paying attention to the above-mentioned problems of the present invention, it is possible to prevent a failure due to a growth of a defective portion and a failure due to a predetermined acceleration test of a potential failure point accompanying a stress applied by an aging process, and between electrodes. An organic EL panel manufacturing method capable of suppressing the occurrence of short circuit and leakage and improving the yield of the organic EL panel is provided.

  In order to solve the above-described problems, the present invention provides an organic EL element having an organic layer having at least a light-emitting layer sandwiched between an anode and a cathode as in the method for producing an organic EL panel according to claim 1. After forming the organic EL element formed on the conductive support substrate and the organic EL element forming step, a predetermined reverse bias voltage is applied between the anode and the cathode, and the leakage current value is measured. And a device determination step for determining the quality of the organic EL device based on a measurement result of the leak inspection step.

  Moreover, the manufacturing method of the organic electroluminescent panel of Claim 1 WHEREIN: The manufacturing method of the organic electroluminescent panel of Claim 2 includes an aging process in the said leak test process.

  Moreover, in the manufacturing method of the organic EL panel according to claim 1, in the manufacturing method of the organic EL panel according to claim 3, the element determination step includes: an absolute value of the leakage current value and a predetermined standard value. The quality of the organic EL element is determined based on the comparison result.

  In addition, as in the method of manufacturing an organic EL panel according to claim 4, an organic EL element having an organic layer having at least a light emitting layer sandwiched between an anode and a cathode is formed on a translucent support substrate. A first first reverse bias voltage is applied between both the anode and the cathode after the organic EL element forming step and the organic EL element forming step, and a first leakage current value is measured. A leak inspection step; a stress application step of applying a second reverse bias voltage equal to or higher than the first reverse bias voltage applied in the first leak inspection step; and the first reverse bias after the stress application step. A second leak inspection step of applying a third reverse bias voltage substantially equal to the bias voltage and measuring a second leakage current value; the first leak inspection step; and the second leak inspection step. Based on measurement results Quality and device determination step of determining the organic EL element includes at least the.

  Moreover, the manufacturing method of the organic electroluminescent panel of Claim 4 WHEREIN: The manufacturing method of the organic electroluminescent panel of Claim 5 is an aging process between the said organic EL element formation process and the said 1st leak test process. It includes a process.

  Moreover, the manufacturing method of the organic EL panel of Claim 4 WHEREIN: The manufacturing method of the organic EL panel of Claim 6 comprises an aging process process in the said stress application process.

  Moreover, in the manufacturing method of the organic EL panel according to claim 4, as in the manufacturing method of the organic EL panel according to claim 7, the element determination step includes the first leakage current value and the second leakage current value. A difference from the leakage current value is obtained, and the quality of the organic EL element is judged based on a comparison result between the difference and a predetermined standard value.

  The present invention relates to a method for manufacturing an organic EL panel in which an organic EL element having at least an organic layer having a light emitting layer sandwiched between an anode and a cathode is disposed on a translucent support substrate, and by growth of a defect portion It is possible to suppress a failure due to a predetermined acceleration test at a potential failure point due to a stress applied by the failure and the aging process, and it is possible to suppress a short circuit and a leak between both electrodes, and the organic EL The yield of the panel can be improved.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

  1 and 2, an organic EL panel 1 is formed by sequentially laminating a glass substrate (support substrate) 2, a transparent electrode (anode) 3, an insulating layer 4, an organic layer 5 and a back electrode (cathode) 6. The organic EL element 7 which is a laminate is covered with a sealing cap 8.

  The glass substrate 2 is a translucent support substrate having a rectangular shape.

  The transparent electrode 3 is made of a conductive material such as ITO on the glass substrate 2, and is formed of a sun-shaped display segment portion 3a, a lead portion 3b formed by being drawn from each segment, and a terminal end of the lead portion 3b. The electrode part 3c provided in a part is provided. The electrode portion 3c is intensively disposed on one side of the glass substrate 2.

  The insulating layer 4 is made of an insulating material such as polyimide, and has a window portion 4a corresponding to the display segment portion 3a and a notch portion 4b corresponding to an electrode portion described later of the back electrode 6, and has a contour of the light emitting region. In order to display the image clearly, a window portion 4a is formed so as to slightly overlap the peripheral edge portion of the display segment portion 3a of the transparent electrode 3, and a lead portion 3b is provided to ensure insulation between the transparent electrode 3 and the back electrode 6. It is arranged so as to cover the top.

  The organic layer 5 may have at least a light emitting layer, but in the embodiment of the present invention, a hole injection layer, a hole transport layer, a light emitting layer, and an electron transport layer are sequentially laminated. is there. The organic layer 5 is disposed with a predetermined size so as to correspond to the location of the window 4a in the insulating layer 4.

  The back electrode 6 is made of a metallic conductive material such as aluminum (Al), aluminum lithium (Al-Li), or magnesium silver (Mg-Ag), and is disposed on the organic layer 5. The back electrode 6 is electrically connected to a lead portion 6a provided on one side of the glass substrate 2 on which each electrode portion 3c in the transparent electrode 3 is formed. Note that an electrode portion (leading portion) 6b is provided at the terminal portion of the lead portion 6a, and the lead portion 6a and the electrode portion 6b are formed of the same material as the transparent electrode 3.

  As described above, the organic EL element 7 is configured by sequentially laminating the transparent electrode 3, the insulating layer 4, the organic layer 5, and the back electrode 6 on the glass substrate 2.

  The sealing cap 8 is formed so as to surround the recessed storage portion 8 a for storing the organic EL element 7 and the storage portion 8 a, and is bonded to the glass substrate via the UV curable adhesive 9. Part 8b. The sealing cap 8 is configured to be slightly smaller than the glass substrate 2 so that the electrode portion 3b of the transparent electrode 3 and the electrode portion 6a of the back electrode 6 are exposed.

  The segment display type organic EL panel 1 is configured by the above-described units.

  A drive circuit (not shown) including at least a driver unit, a power supply unit, and a control unit is electrically connected to the electrode units 3c and 6b of the organic EL panel 1 obtained as described above. A predetermined drive having a light emission drive voltage component in at least a forward direction (a direction in which the back electrode 6 is set to a negative potential and the transparent electrode 3 is set to a positive potential when the organic EL element 7 is a diode component) by the drive circuit. A display on the organic EL panel 1 can be obtained by generating a waveform and applying it to the organic EL panel 1.

  The light emission drive voltage component may be a constant voltage or a constant current, and is preferably a constant current in order to ensure the luminance stability and the light emission life of the organic EL panel 1.

  The drive waveform may include different voltage components such as a ground voltage (0 V) component and a reverse voltage component in addition to the light emission drive voltage component. The ground voltage component or the reverse voltage component may be included due to control restrictions relating to the driving method, improve display quality, suppress luminance attenuation, and the transparent electrode 3 and the back electrode 6 during product driving. It may be included for the purpose of repairing a defective portion (described later) that occurs as an electrical short between the two.

  The drive waveform is determined by selecting a display design (size, number of segments or dots, color, brightness) of the organic EL panel 1 or a drive method (DC lighting, simple matrix drive, active matrix drive, etc.).

  Next, a method for manufacturing the organic EL panel 1 according to the first embodiment of the present invention will be described with reference to FIGS.

  First, a transparent electrode 3, an insulating layer 4, an organic layer 5 and a back electrode 6 are sequentially stacked on the glass substrate 2 by appropriately performing vapor deposition and etching treatment in an element forming step (organic EL element forming step) S1. Thus, an organic EL element 7 having a predetermined light emission shape is obtained. FIG. 4 is a partial enlarged cross-sectional view of the organic EL element 7. In the formation process of the organic EL element 7, after the formation process of the transparent electrode 3, the foreign material 11 adheres on the transparent electrode 3, and in this state An insulating layer 4, an organic layer 5, and a back electrode 6 are sequentially stacked.

  Then, after the element forming step S1, in a panel forming step S2, a sealing glass 8 is disposed on the glass substrate 2 via a UV curable adhesive 9 in a nitrogen atmosphere having a predetermined oxygen concentration, and UV. , The organic EL element 7 is hermetically sealed, and the organic EL panel 1 is obtained.

  Next, in the aging treatment step S3, the power supply device P is connected to the electrode portions 3c and 6b of the transparent electrode 3 and the back electrode 6 of the organic EL panel 1 having the organic EL element 7 with the foreign matter 11 attached. The light emission drive voltage (for example, 5 V) applied between the electrodes 3 and 6 when driving the product is forward (when the organic EL element 7 is a diode component, the back electrode 6 is set to a negative potential, and the transparent electrode 3 Is applied for a predetermined time, and thereafter, a repair voltage (for example, −25V) having an absolute value larger than either the light emission drive voltage or the reverse drive voltage applied when the product is driven is applied in the reverse bias direction ( When the organic EL element 7 is a diode component, it is applied for a predetermined time (reverse bias voltage) in a direction in which the back electrode 6 has a positive potential and the transparent electrode 3 has a negative potential), and the organic layer 5 is partially thin. The became point defect part 12 of the organic EL element 7 is (part indicated by a circle) is opened fracture, to prevent a short circuit and leakage. FIG. 5 is a diagram showing a state in which the defect portion 12 is open broken in the aging treatment step S3.

  Next, in the first leak inspection step S4, a first reverse bias voltage (for example, −15 V) is applied from the power supply device P to each electrode portion 3c, 6b of the organic EL element 7, and the organic EL element at that time 7 first leakage current (leakage current) I1 is measured. The first leakage current value I1 is measured in a room temperature atmosphere, and can be arbitrarily set to a segment display unit 3a unit, a panel unit for the entire segment display unit 3a, or a plurality of predetermined segment units. It is possible to set and measure.

  The value of the first reverse bias voltage is desirably a minimum value sufficient to detect the leakage current of the organic EL panel. This is because increasing the reverse bias value increases the leakage current value, thereby facilitating the inspection, but it also accelerates the progress and expansion of the defective portion due to the leakage current during the inspection.

  Next, in the stress application step S5, the organic EL element 7 is driven at a predetermined temperature for a predetermined time under a stress voltage (for example, −20 V) that is stricter than the normal driving conditions of the organic EL panel 1.

  The stress voltage value needs to be within a range that is sufficient for detecting a delta value, which will be described later, and that does not cause defects such as dielectric breakdown of the organic EL element 7. In addition, it is preferable that the driving is performed in a short time at room temperature from the viewpoint of productivity. One method for obtaining high productivity is to perform the first leak inspection step S4, the stress application step S5, and the second leak inspection step S6 in succession on the same apparatus.

  Next, in the second leak inspection step S6, substantially the same conditions as the first leak inspection step S3, that is, a reverse bias voltage (second reverse bias voltage) substantially equal to the normal drive voltage of the organic EL panel 1 is used. ) Is applied to each electrode 3c, 6b of the organic EL element 7 from the power supply device P, and the second leakage current (leakage) is measured according to the measurement content equivalent to the measurement of the first leakage current I2 of the organic EL element 7 at that time. Current) I2 is measured. The second leakage current value is measured in a room temperature atmosphere.

  The following (1) to (4) are listed as elements to be considered in the detection of the first leak inspection step S4 and the second leak inspection step S6.

(1) Current detection accuracy: The current detection accuracy required for leak inspection varies depending on the area to be measured at once, the wiring resistance, the configuration of the organic layer 5, and the like. According to the knowledge of the inventors, the leak current value obtained as a measured value is several nA at most. The current detection accuracy is preferably 1 nA, more preferably 0.2 nA.
(2) Panel temperature at the time of detection: The leak current of the organic EL panel 1 made of an organic semiconductor has a large temperature dependence. As the temperature at the time of detection rises, the leak current value tends to increase. The panel temperature in the inspection process should preferably be controlled at ± 5 ° C.
(3) Light shielding during detection: In the organic EL panel 1 made of an organic semiconductor, an electromotive force is generated in the element due to a so-called photoelectric effect when visible or ultraviolet light is incident from the outside, and a photocurrent is generated. According to the knowledge of the inventors, the photocurrent in a normal working environment (for example, 500 LUX under a fluorescent lamp) is a magnitude that cannot be ignored with respect to the value of the leakage current to be detected. The leak inspection in the detection process needs to be performed in a light shielding environment.
(4) Time constant of detection: The transparent electrode 3, the organic layer 5 and the back electrode 6 constituting the organic EL element 7 are regarded as a parallel circuit of a capacitor and a resistor under a reverse bias, and an inspection circuit is also provided. Has a finite circuit constant. For this reason, immediately after the first and second reverse bias application starts, charging / discharging of the capacitor component is observed with a capacitance-resistance (CR) time constant. According to the knowledge of the inventors, the charge / discharge current is sufficiently larger than the leak current to be detected. In actual measurement, a certain standby time is provided between the start of reverse bias application and the start of current measurement, and the charge / discharge current becomes sufficiently small with respect to the leakage current to be detected. Consideration is required.

  Next, in the element determination step S7, the quality of the organic EL element 7 is determined using the first and second leakage currents I1 and I2 obtained in the first and second leak inspection steps S4 and S6. . The element determination step S6 is a difference between the first and second leakage current values I1 and I2 (hereinafter, referred to as failure points) obtained by endurance tests such as a cooling cycle and high-temperature driving of the organic EL panel 1 (organic EL element 7) A predetermined standard value (standard value of the delta value) X1 is determined based on the delta value, and this standard value X1 and a subtraction value obtained by subtracting the first leakage current value I1 from the second leakage current value I2 The quality of the organic EL element 7 (the quality of the organic EL panel) is determined based on the comparison result. The standard value X1 is desirably set according to the model of the organic EL panel 1 because it has model dependence.

That is, the element determination step S6 subtracts the first leakage current value I1 obtained in the first leakage inspection step S4 from the second leakage current value I2 obtained in the second leakage inspection step S6 (I2 -I1) When the result of this subtraction value is less than or equal to the standard value X1 (see formula (1)), in the organic EL element 7, potential failure points due to failure caused by growth of defective portions and stress applied by aging treatment Is determined to be a non-defective product that does not cause a failure due to a predetermined acceleration test within a predetermined continuous drive time (for example, 5000 hours to 10000 hours), and the organic EL panel 1 is connected to a drive circuit (not shown). When the result of the subtraction value exceeds the standard value X1 (see Expression (2)), the failure occurs in the organic EL element 7 for a predetermined continuous drive time. A step of determining as defective is likely to occur in.
Standard value X1 ≧ I2-I1 (1)
Standard value X1 <I2-I1 (2)

  In the method of manufacturing the organic EL panel 1, after the aging treatment step S2, the first leakage current I1 is measured by the first leakage inspection step S3, and a predetermined stress (reverse bias voltage application is applied in the stress application step S4. ), The second leakage current I2 is measured by the second leakage inspection step S5 in the same manner as the first leakage inspection step S3, and then the second leakage current I2 and the first leakage current are measured in the subsequent steps. The difference between I1 and the predetermined standard value X1 obtained by the durability test is compared, and the result of this comparison is used to determine whether the organic EL element 7 is durable or not due to continuous driving. It is characterized by finding that the product life (continuous driving) of the EL panel 1 can be secured.

  Therefore, the manufacturing method of the organic EL panel 1 includes the first leak inspection step S4, the stress application step S5, the second leak inspection step S6, and the element determination step S7. It is possible to prevent the organic EL panel 1 from flowing out to the market, which may cause a failure due to a predetermined accelerated test of a potential failure point due to a failure caused by the growth of the unit 12 and a stress applied by the aging process. Become.

  Next, a second embodiment of the present invention will be described with reference to FIG. 6. However, the same reference numerals are used for the same portions as in the first embodiment described above, and detailed descriptions thereof are omitted.

  The difference between the manufacturing method of the organic EL panel 1 in the second embodiment and the manufacturing method of the organic EL panel 1 in the first embodiment is that the aging treatment step S3 after the paneling step S2 is not provided, The stress application process S10 performed after the leak inspection process S4 also serves as an aging process.

  In the stress application step S10, the power supply device P is connected to the electrode portions 3c and 6b of the transparent electrode 3 and the back electrode 6 of the organic EL panel 1 having the organic EL element 7 in a state in which the foreign matter 11 is adhered. , 6, a light emission drive voltage applied during product driving is applied in a forward direction for a predetermined time, and then a repair voltage having an absolute value larger than either the light emission drive voltage or reverse drive voltage applied during product drive. Is applied in a reverse bias direction for a predetermined time, and an aging process is performed to open-break the defective portion 12 of the organic EL element 7 where the organic layer 5 is partially thinned, thereby forming a stress application step.

  Therefore, in the stress application step S10, the standard value X2 in the element determination step S11 is different from the standard value X1 in the first embodiment by combining the aging process and the stress application. About element determination process S11 which performs quality determination of the organic EL element 7, it is the same as that of element determination process S7 mentioned above.

  The manufacturing method of the organic EL panel 1 according to the second embodiment can simplify the manufacturing process by combining the stress application and the aging process in the stress application step S10, and can also provide a defect in the organic EL element 7. It is possible to prevent the organic EL panel 1 from being put into the market, which may cause a failure due to a predetermined acceleration test of a potential failure point due to a failure caused by the growth of the unit 12 and stress applied by the aging process. Become.

  Next, a third embodiment of the present invention will be described with reference to FIG. 7. The same reference numerals are used for the same parts as in the first and second embodiments described above, and the detailed description thereof is as follows. Omit.

  The manufacturing method of the organic EL panel 1 in the third embodiment is not provided with the aging treatment step S3 after the paneling step S2 as in the manufacturing method of the organic EL panel 1 in the second embodiment, and the stress applying step S12. This also serves as an aging treatment step, and has a feature in that the leak inspection step S13 is one step and the quality of the organic EL panel 1 is determined based on the leakage current value obtained in the leak inspection step S13.

  In the stress application step S12, each electrode of the transparent electrode 3 and the back electrode 6 of the organic EL panel 1 having the organic EL element 7 in a state in which the foreign matter 11 is adhered, after the paneling step S2, as in the second embodiment. The power supply device P is connected to the parts 3c and 6b, and a light emission drive voltage applied when the product is driven is applied between the electrodes 3 and 6 in the forward direction for a predetermined time, and thereafter the light emission drive voltage applied when the product is driven. A repair voltage having an absolute value larger than any of the reverse drive voltages is applied in the reverse bias direction for a predetermined time, and the defective portion 12 of the organic EL element 7 where the organic layer 5 is partially thinned is open broken. By performing the aging process, the stress application process is performed.

In the leak inspection step S13, after the stress application step S12, the leakage current I3 is detected as in the first and second leak inspection steps S4 and S6 in the first and second embodiments. Then, in the element determination step S14, the absolute value Y of the leakage current I3 obtained in the leakage inspection step S13, and the leakage current of the fault location obtained by the durability test such as the cooling cycle and high temperature driving in the organic EL panel 1 A predetermined standard value X3 determined based on the value is compared, and when the absolute value Y is equal to or smaller than the standard value X3 (see Expression (3)), in the organic EL element 7, failure due to the growth of the defective portion 12 and aging processing It is determined that the failure caused by the predetermined acceleration test at the potential failure point due to the stress applied in step 1 does not occur within a predetermined continuous drive time, and the organic EL panel 1 is connected to a drive circuit (not shown). In the case where the comparison result exceeds the standard value X3 (see formula (4)), the organic EL element 7 has the above-mentioned reason. There is for determining as defective is likely to occur within a predetermined continuous driving time.
Standard value X3 ≦ absolute value Y (3)
Standard value X3 <absolute value Y (4)

  The manufacturing method of the organic EL panel 1 according to the third embodiment combines the stress application and the aging process in the stress application step S12, and the leak inspection step S13 including one step after the stress application step S12. Since the quality of the organic EL panel 1 is determined in the element determination step S14 based on the measurement result obtained in the inspection step S13, the manufacturing process is changed to the manufacturing process of the organic EL panel 1 in the first and second embodiments. Organic EL that can be further simplified and that may cause failure due to a predetermined accelerated test of potential failure points due to failure caused by growth of defective portion 12 in organic EL element 7 and stress applied by aging treatment The panel 1 can be prevented from entering the market.

  In each embodiment of the present invention, the segment display type organic EL panel 1 has been described as an example. However, the present invention includes a plurality of first and second electrode lines each having at least one of light transmission, The electrode lines are arranged so as to intersect with each other, and an organic layer including at least a light emitting layer is sandwiched between the electrode lines so that a dot matrix organic EL element (light emitting portion) is formed on a light transmitting substrate. You may apply to the manufacturing method of the organic electroluminescent panel to do. Further, in the case of measuring the leakage current in an organic EL panel provided with a dot matrix type organic EL element, it may be in units of dots, scan lines, display areas, or the like.

  In each embodiment of the present invention, the quality of the organic EL panel 1 is determined through a series of determination steps including a stress application step, a leak inspection step, and an element determination step. This determination step is repeated. It may be a thing. In addition, the organic EL panel 1 determined to be defective can be re-determined by putting it again into the determination step, and as a result of the re-determination, a non-defective organic EL panel 1 can be obtained. The process yield can be improved.

  In each of the embodiments described above, a series of the determination steps are provided after the panel formation step S2. However, the determination step is provided after the element formation step S1, and the panel formation step S2 is provided after the determination step. The determination process of the present invention may be performed after the element formation process S1.

  Further, in each of the embodiments described above, the standard value and the leakage current value are compared and treated as a non-defective product when the leakage current value is equal to or less than the standard value. In comparison, when the leakage current value is less than the standard value, it is possible to make the determination condition in the element determination process more severe, and the determination condition can be set in relation to the yield of the organic EL panel. desirable.

  In the second and third embodiments described above, in the stress applying steps S10 and S12, the aging process step in the first embodiment is used as the stress applying step. However, in the present invention, the stress applying step is described above. Instead of the aging treatment step, the stress application steps S10 and S12 in the second and third embodiments may be processed under the same conditions as the stress application step S5 described in the first embodiment. In the manufacturing method of the organic electroluminescent panel of Claim 1 and Claim 4, an aging process process is not necessarily required.

It is a perspective view which shows the organic electroluminescent panel of embodiment of this invention. It is a fragmentary sectional view of the organic electroluminescent panel of embodiment same as the above. It is a principal part expanded sectional view which shows the state to which the foreign material of the organic electroluminescent panel of embodiment same as the above adhered. It is a principal part expanded sectional view which shows the state from which the foreign material of the organic electroluminescent panel of embodiment same as the above was removed. It is a figure which shows the manufacturing process of the organic electroluminescent panel of the 1st Embodiment of this invention. It is a figure which shows the manufacturing process of the organic electroluminescent panel of the 2nd Embodiment of this invention. It is a figure which shows the manufacturing process of the organic electroluminescent panel of the 3rd Embodiment of this invention.

Explanation of symbols

1 Organic EL panel 2 Glass substrate (support substrate)
3 Transparent electrode (anode)
5 Organic layer 6 Back electrode (cathode)
7 Organic EL element 11 Foreign matter 12 Defect part S1 Element formation process (organic EL element formation process)
S3 Aging process S4 First leak inspection process S5, S10, S12 Stress application process S6 Second leak inspection process S7, S11, S14 Element determination process P Power supply device

Claims (7)

An organic EL element forming step in which an organic EL element having at least an organic layer having a light emitting layer sandwiched between an anode and a cathode is formed on a translucent support substrate;
After the organic EL element forming step, a leakage inspection step of measuring a leakage current value by applying a predetermined reverse bias voltage between both the anode and the cathode,
An element determination process for determining the quality of the organic EL element based on the measurement result of the leak inspection process;
A method for producing an organic EL panel comprising: 2. The method of manufacturing an organic EL panel according to claim 1, wherein an aging process is included in the leak inspection process. 2. The organic EL panel according to claim 1, wherein the element determination step determines the quality of the organic EL element based on a comparison result between an absolute value of the leakage current value and a predetermined standard value. Production method. An organic EL element forming step in which an organic EL element having at least an organic layer having a light emitting layer sandwiched between an anode and a cathode is formed on a translucent support substrate;
After the organic EL element forming step, a first leakage inspection step of applying a predetermined first reverse bias voltage between both the anode and the cathode and measuring a first leakage current value;
Applying a second reverse bias voltage equal to or higher than the first reverse bias voltage applied in the first leak inspection step;
After the stress applying step, applying a third reverse bias voltage substantially equal to the first reverse bias voltage and measuring a second leakage current value;
An element determination step for determining pass / fail of the organic EL element based on measurement results of the first leak inspection step and the second leak inspection step;
A method for producing an organic EL panel comprising: The method of manufacturing an organic EL panel according to claim 4, further comprising an aging process step between the organic EL element forming step and the first leak inspection step. The method for producing an organic EL panel according to claim 4, further comprising an aging treatment step in the stress application step. The element determination step obtains a difference between the first leakage current value and the second leakage current value, and determines whether the organic EL element is acceptable based on a comparison result between the difference and a predetermined standard value. The manufacturing method of the organic electroluminescent panel of Claim 4 characterized by the above-mentioned.

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