JP2005310403A - Manufacturing method and manufacturing device of organic el display device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method and a manufacturing device of an organic EL display device capable of precisely carrying out patterning on a glass substrate by a printing method when a pattern of ink is formed. <P>SOLUTION: This manufacturing method of an organic EL display device is used for manufacturing an organic EL display device having an organic EL layer sandwiched between electrodes. The manufacturing method includes: a heating process for selectively heating parts on the surface of a body to be transferred intended to transfer an organic medium thereon; and a transfer process for tightly fitting a transfer body with ink applied thereto to the surface of the body to be transferred and for relatively moving them. Patterns of ink are formed in predetermined parts by selectively separating the ink from the transfer body in the heated parts. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a technique for forming an image by patterning and printing ink on a glass substrate with high accuracy, and for example, in the production of an organic electroluminescence element (hereinafter referred to as an organic EL element), an organic light emission that is converted into an ink. The present invention relates to a manufacturing method and a manufacturing apparatus of an organic EL display device in which a material is patterned on a glass substrate.

In recent years, organic electroluminescent elements (hereinafter referred to as organic EL elements) using organic light-emitting materials have been developed as flat panel displays.
This organic EL element is expected to realize a flat panel display that is self-luminous, has a high response speed, and has no viewing angle dependency by using an organic compound as a light emitting material.
The organic EL element is configured by sequentially laminating a transparent electrode of an anode, an organic functional layer, and a metal electrode of a cathode on a transparent substrate (for example, a glass substrate).

This organic functional layer is, for example, a single layer of a light-emitting layer, or a two-layer structure of an organic hole transport layer and a light-emitting layer, or a three-layer structure of an organic hole transport layer, a light-emitting layer, and an organic electron transport layer. It is a laminate in which an electron or hole injection layer is inserted between various layers.
The organic EL display panel can obtain a matrix display panel by forming a plurality of organic EL elements on a substrate with a predetermined pattern. A color display is a light emitting device having an image display array composed of light emitting pixels of a plurality of organic EL elements arranged in intersecting rows and columns.

As a method of patterning each phase with high definition on the glass substrate described above, that is, printing an ink of an organic material that is a material of each organic functional layer, a method by offset printing, a method by letterpress printing, and a screen A printing method or the like can be considered.
Here, since the substrate is a hard glass substrate, a direct printing type printing method using a metal plate like gravure printing cannot be used because it damages the substrate, and a soft rubber blanket is used to change the glass substrate. This is a printing method capable of printing such as offset printing for transferring ink, letterpress printing for transferring ink from a soft rubber plate, or non-transfer screen printing.

On the other hand, in the production of an organic EL element, as a method of patterning an organic light emitting material with high definition, a method of patterning by a mask vapor deposition method using a low molecular organic material is generally used.
However, this method has a problem that as the glass substrate becomes larger, the patterning accuracy cannot be satisfied.
For this reason, as described above, a method of forming a polymer organic light emitting material into an ink and patterning the same by a printing method has been attempted. A method by offset printing (Patent Document 1), a method by letterpress printing (patent) Document 2), a method by screen printing (Patent Document 3), a letterpress inversion offset method (Patent Document 4), and the like have been proposed.

  For example, according to the relief reversal offset method shown in FIG. 8, the ink 103 (electron) is applied to the blanket 100 (FIG. 8A) provided with the silicon resin 102 on the surface of the roll 101 by a wire bar or the like (not shown). The transport light emitting layer) is applied to a predetermined thickness (FIG. 8B), and the blanket 100 is brought into close contact with the glass relief plate 104 (the reversal mask of the pattern to be transferred) so that the roll 101 and the relief plate 104 are relatively moved. The ink is moved to transfer unnecessary ink to the protrusions of the relief plate 104 to form a pattern on the surface of the blanket 100 (FIG. 8C).

Then, the pattern of the ink 103 is transferred to the position corresponding to the anode (transparent pixel electrode) 11 of each R / G / B on the surface of the hole transport layer 10 (FIG. 8D), and here the R light emitting layer 12R Ink 103).
Here, the anode 11 is formed on the glass substrate 13.
Thereafter, for the G and B light-emitting layers, the pattern of the ink 103 for the light-emitting layers 12G and 12B (shown by dotted lines) of the organic electronic materials of G / B is sequentially applied to the G and B light-emitting layers. Formed on the anode corresponding to / B.
JP 2001-93668 A JP 2001-155858 A Japanese Patent Laid-Open No. 3-269995 JP 2003-17248 A

However, in offset printing and letterpress printing, the ink once formed as a pattern is transferred to a base material and printed on a rubber blanket or rubber plate, but the ink pattern on the rubber blanket or rubber plate and the material to be transferred And the pattern forming portion are difficult to align, and it is difficult to transfer the ink pattern to the treatment position with high accuracy.
In the present invention, when an ink pattern is formed, a manufacturing method and a manufacturing apparatus for manufacturing an organic EL display device capable of patterning ink with high definition on a glass substrate by a printing method are provided. Objective.

  The invention according to claim 1 is a manufacturing method for manufacturing an organic EL display device having an organic EL layer sandwiched between electrodes, and selectively heats a portion of the surface of the transfer target to which an organic medium is to be transferred. A heating process and a transfer process in which a transfer body coated with ink is brought into close contact with the surface of the transfer object and moved relatively, and the ink is selectively transferred from the transfer body at a heated location. And an ink pattern is formed at a predetermined location.

  According to a second aspect of the present invention, in the method of manufacturing an organic EL display device according to the first aspect, the electrode corresponding to the pattern is selectively energized among the electrodes under the transferred body to generate The portion to be transferred is heated by Joule heat.

  According to a third aspect of the present invention, in the method for manufacturing an organic EL display device according to the first aspect, among the electrodes under the transferred body, the radiation corresponding to the pattern is selectively irradiated with laser light. To heat the portion to be transferred.

  According to a fourth aspect of the present invention, there is provided a manufacturing apparatus for manufacturing an organic EL display device having an organic EL layer sandwiched between electrodes, which selectively heats a portion on the surface of an object to be transferred to which an organic medium is to be transferred. A heating control unit, and a transfer control unit that moves the ink-applied transfer member in close contact with the surface of the transfer target member, and selectively moves the transfer member from the transfer member at a heated location. Ink is peeled off to form an ink pattern at a predetermined location.

  According to a fifth aspect of the present invention, in the apparatus for manufacturing an organic EL display device according to the fourth aspect, the electrode corresponding to the pattern is selected from the electrodes where the heating unit is located below the transferred object. The selected electrode is energized, and the portion to be transferred is heated by Joule heat generated in the electrode.

  According to a sixth aspect of the present invention, in the organic EL display device manufacturing apparatus according to the fourth aspect of the present invention, the heating unit selects an electrode corresponding to the pattern from among the electrodes under the transferred body, The selected electrode is irradiated with laser light, and the portion to be transferred is heated by radiant heat generated at the electrode.

  As described above, according to the manufacturing method and manufacturing apparatus of the organic EL display device of the present invention, when the ink is patterned on the glass substrate with high precision by the printing method, the organic light emission that particularly constitutes the organic EL element. When printing and patterning a layer, the part where the ink pattern is to be transferred is selectively heated, and the ink in a predetermined pattern shape is peeled off from the transfer body at a required position, and transferred to the transfer body. In particular, a highly accurate ink pattern can be formed without the need for a highly accurate alignment mechanism, and an organic EL display device can be produced by a more refined process.

Hereinafter, a method and apparatus for manufacturing an organic EL display device according to an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a conceptual diagram showing a cross-sectional structure of the organic EL display device for each process, showing a manufacturing process of the organic EL display device of the embodiment.
Here, as shown in FIG. 1D, for example, the organic EL element has a transparent electrode of the anode 11 on the transparent substrate (glass substrate 13), an organic functional layer (light emitting layers 12R, 12G, and 12B), The metal electrode of the cathode 14 is sequentially laminated.
The organic functional layer is, for example, a single layer of a light emitting layer, or a two-layer structure of an organic hole transporting layer 10 and light emitting layers 12R, 12G, and 12B as shown in FIG. 1, or an organic hole transporting layer, a light emitting layer, and an organic electron transport. It is a laminated body in which an electron or hole injection layer is inserted between these three layers and an appropriate layer between them.

The organic EL display panel can obtain a matrix display panel by forming a plurality of organic EL elements on a transparent substrate with a predetermined pattern.
A color display is a light emitting device having an image display array composed of light emitting pixels of a plurality of organic EL elements arranged in intersecting rows and columns.
For example, the matrix display type as shown in FIG. 1 has a row electrode including the anode 11 as a transparent electrode on the transparent substrate such as the glass substrate 13, the organic functional layers of the light emitting layers 12R, 12G, and 12B, and the above row. Stripes formed between a plurality of organic EL elements in which a column electrode including a metal electrode layer of the cathode 14 intersecting the electrodes is sequentially stacked, and each organic EL element for the purpose of preventing a short circuit between the row electrode and the column electrode And an insulating film 15 having a lattice shape or the like.

The row electrodes are each formed in a strip shape and are arranged so as to be parallel to each other at a predetermined interval, and the same applies to the column electrodes.
As described above, the matrix display type display panel has an image display array including light emitting pixels of a plurality of organic EL elements located at intersections of a plurality of row and column electrodes.
Conventionally, the insulating film 15 is made of a relatively transparent material such as polyimide or a material used in a black matrix of a liquid crystal display.

<First Embodiment>
With reference to FIGS. 1-3, the manufacturing method of the 1st Embodiment of this invention is demonstrated. 2 and 3 are conceptual diagrams showing a manufacturing apparatus for manufacturing the organic EL display device 16 of the present invention.
As shown in FIG. 1 (a), the transparent glass substrate 13 has a hydrophobic surface, and the substrate is cleaned by ultrasonic cleaning using a cleaning agent, and rinsed with ultrapure water and an organic solvent. Done.
Further, instead of the glass substrate 13, a plastic film or sheet can be used.

If the plastic film is used, the polymer EL element can be produced by winding, and the element can be provided at low cost. As the plastic film, polyethylene terephthalate, polypropylene, cycloolefin polymer, polyamide, polyether sulfone, polymethyl methacrylate, polycarbonate and the like can be used.
Furthermore, other gas barrier films such as a ceramic vapor-deposited film, polyvinylidene chloride, polyvinyl chloride, ethylene-vinyl acetate copolymer saponified product may be laminated on the side where the anode 11 is not formed.

The glass substrate 13 (an example of a light-transmitting substrate) is irradiated with ultraviolet-ozone after drying, and then the anode 11 (as a material, a composite oxide of indium and tin, that is, an ITO film) is applied. A film was formed by vacuum deposition and sputtering, and an ITO film was formed by patterning into a strip pattern having a pitch width of 106 μm and a gap width of 10 μm by a photolithography method and a wet etching method.
Alternatively, a precursor such as indium octylate or indium acetone can be applied to the glass substrate 13 and then formed by an application pyrolysis method in which an oxide is formed by thermal decomposition.
Alternatively, a material in which a metal such as aluminum, gold, or silver is vapor-deposited in a translucent state can be used. Alternatively, an organic semiconductor such as polyaniline can also be used.

Next, an insulator 15 is formed between and above each pattern of the anode 11, leaving a portion (contact) where the surface of the anode 11 is exposed, and the pattern of each anode 11 is insulated and separated (FIG. 1A). )).
Then, the hole transport layer 10 is formed on the insulator 15, and is electrically connected to each anode 11 through the contact portion (FIG. 1B).
The hole transport layer 10 was coated with a mixture of poly (3,4-ethylenedioxythiophene) and polystyrene sulfonic acid (hereinafter referred to as PEDOT / PSS) to a thickness of 0.1 μm by a spin coating method.

The hole transport layer 10 is a material dissolved or dispersed in a single or mixed solvent such as toluene, xylene, acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, methanol, ethanol, isopropyl alcohol, ethyl acetate, butyl acetate, water, and the like. Can be used, and can be applied by a coating method such as spin coating, bar coating, wire coating, slit coating, etc., and patterning may be performed as necessary.
Moreover, you may add surfactant, antioxidant, a viscosity modifier, a ultraviolet absorber etc. to a positive hole transport layer as needed. The film thickness is 0.01 to 0.2 μm.

Next, the electron transport light emitting layers 12R, 12G, and 12B are sequentially formed (FIG. 1C), but it will be described that they are formed in the order of 12R → 12G → 12B.
The light-emitting layer 12 (the light-emitting layers 12R, 12G, and 12B are generic names) is not limited to a single-layer structure having only a polymeric phosphor layer, but may have a multilayer structure provided with a charge transport layer or the like.
Examples of the polymer phosphor used in the polymer phosphor layer include coumarin, perylene, pyran, anthrone, porphyrene, quinacridone, N, N′-dialkyl-substituted quinacridone, naphthalimide, N, N. Fluorescent dyes such as' -diaryl-substituted pyrrolopyrrole, indium complex, etc. dissolved in polymers such as polystyrene, polymethyl methacrylate, polyvinylcarbazole, polyarylene, polyarylene vinylene, polyfluorene, etc. It is possible to use a polymeric fluorescent substance.

These polymeric fluorescent substances are dissolved in a single or mixed solvent such as toluene, xylene, acetone, methyl ethyl ketone, methyl isobutyl ketone, cyclohexanone, methanol, ethanol, isopropyl alcohol, ethyl acetate, butyl acetate, water, spin coating method, curtain It can be applied to the surface of the blanket 100 by a coating method such as a coating method, a bar coating method, a wire coating method, or a slit coating method.
Moreover, you may add surfactant, antioxidant, a viscosity modifier, a ultraviolet absorber etc. to a polymeric fluorescent substance layer as needed. The film thickness is 1000 nm or less in combination with either a single layer or a multilayer structure, preferably 50 to 150 nm.

Here, an organic EL display device manufacturing apparatus according to the first embodiment of the present invention, for example, an organic EL display device manufacturing apparatus that forms a pattern of the light emitting layers 12R, 12G, and 12B on the surface of the hole transport layer 10 is provided. explain.
First, in the organic EL display device 16, each of the already formed anodes 11 is electrically connected to the power source 22 by the common electrode 16a.
The organic EL display device 16 is fixed on the stage by a fixing mechanism (not shown), the probe 4b is connected to the common electrode 16a, and the probe 4a is connected to each of the anodes 11.

For example, the probe 4a is connected to each anode 11 corresponding to each of the R, G, and B light emitting layers 12R, 12G, and 12B.
That is, the probes 4 a are formed at a pitch corresponding to the width of three of the anodes 11, and are moved one pitch at a time by the moving stage 4.
Thereby, the moving stage 4 can select the anode 11 corresponding to any one of the light emitting layers 12R, 12G, and 12B and connect the probe 4a.

When the switch 24 is turned on, a predetermined voltage is supplied from the power supply 25 to each anode 11 to which the probe 4a is connected, and a current corresponding to the resistance value of the anode 11 flows, so that the temperature of each anode 11 is increased. The temperature is increased by Joule heat generated corresponding to the resistance value and the current value, and is controlled to a predetermined temperature (70 ° C. to 100 ° C.) (a voltage corresponding to the resistance value is applied).
The roll 21 is provided with a silicon resin on the surface, and an ink layer 21b, which is prepared by dissolving or dispersing R (red) light-emitting polymer fluorescent substance in an organic solvent, has a wire bar ( (Not shown) or the like.
The roll 22 is provided with a silicon resin on the surface, and an ink layer 22b prepared by dissolving or dispersing a G (green) light emitting polymer fluorescent substance in an organic solvent is provided on the surface of the silicon resin with a wire bar ( (Not shown) or the like.

The roll 23 is provided with a silicon resin on the surface, and an ink layer 23b prepared by dissolving or dispersing a B (blue) luminescent polymer phosphor in an organic solvent is provided on the surface of the silicon resin with a wire bar ( (Not shown) or the like. At this time, the ink layers 21b, 22b, and 23b are used in a state where they are not completely cured.
Here, methyl silicone rubber is used as the light emitting layer 12, and a poly [2-methoxy-5- (2'-ethyl-hexyloxy)-] is used as a red, green, and blue light emitting material by spin coating. 1,4-phenylene vinylene (Poly [2-methoxy-5- (2'-ethyl-hexyloxy) -1,4-phenylene vinylene], hereinafter referred to as MEH-PPV), Nile as a dye molecule (polymer phosphor) -The materials mixed with red, coumarin 6, 1,1,4,4-tetraphenyl-1,3-butadiene (TPB) were each coated with a solid.
Each of the rolls 21, 22, 23 is provided with a drive mechanism 21 a, 22 a, 23 a by a motor or the like, and can move on the rail 20 along the rail at a predetermined speed.

Accordingly, each of the rolls 21, 22, and 23 is relatively rotated while relatively rotating the surface of the hole transport layer 14 in a state where the ink is in close contact with the surface of the hole transport layer 14 of the organic EL display device 16. Will move.
As a result, the ink layers 21b, 222b, and 23b on the surfaces of the rolls 21, 22, and 23 (the surface of the silicon resin layer) are melted by the temperature of the anode 11 (the surface of the corresponding upper hole transport layer 10). Further, the adhesion to the surface of the hole transport layer 10 is increased, and the peeling from the silicon resin is facilitated, and the pattern is transferred to the surface of the hole transport layer 14 of the organic EL display device 16 as an ink layer pattern. .

Next, the operation of the above-described organic EL display device manufacturing apparatus will be described. Here, the light emitting layers 12R, 12G, and 12B are transferred in this order.
The moving mechanisms 21a, 22a, 23a, the moving station 4, and the switch 24 in each roll are controlled by a control unit (not shown).
The control unit controls the moving station 4 and connects the probe 4a to each of the anodes 11 corresponding to the position where the light emitting layer 12R is formed above.
Then, the control unit turns on the switch 24, connects the power source 25 to the anode 11 to which the probe 4a is connected, applies a predetermined voltage, and flows a current corresponding to the resistance value of the anode 11.

Next, Joule heat is selectively generated in each of the anodes 11 to which a voltage is applied, and after a predetermined time at which a predetermined temperature is reached, the control unit controls the moving mechanism 21a and organically moves the roll 21 with a predetermined pressure. The roll 21 is moved in the direction of the arrow relative to the organic EL display device 16 on the stage at a predetermined speed in close contact with the upper surface of the hole transport layer 10 of the EL display device 16.
Here, the roll 21 is coated with an ink layer 21b having a length corresponding to the width d of the organic EL display device.
As a result, as shown in FIGS. 2 and 3A, the ink layer 21 b corresponding to the anode 11 heated from the roll 21 is selectively peeled off and transferred onto the hole transport layer 10. A pattern of the light emitting layer 12R is formed.

  At this time, as shown in FIG. 3B, the ink layer 21b peels from the roll 21 on the upper surface of the hole transport layer 10 on the heated anode 11, but as shown in FIG. The ink layer 21b does not peel from the roll 21 on the upper surface of the hole transport layer 10 above the anode 11 that is not heated. FIG. 3B is a cross-sectional view of the portion corresponding to the heated anode 11 in FIG. 3A, that is, the line A, and FIG. 3C is the unheated anode 11 in FIG. FIG. 6 is a cross-sectional view taken along a line B corresponding to FIG.

Next, as shown in FIG. 4, when the roll 21 finishes forming the pattern of the light emitting layer 12 </ b> R on the organic EL display device 16, the control unit turns off the switch 24, and moves the probe to the mobile station 4. The probe 4a is connected to each of the anodes 11 corresponding to the position where the light emitting layer 12G is formed on the upper part.
Then, the control unit turns on the switch 24, connects the power source 25 to the anode 11 to which the probe 4a is connected, applies a predetermined voltage, and flows a current corresponding to the resistance value of the anode 11.

Next, Joule heat is generated in each of the anodes 11 to which a voltage is applied, and after a predetermined time when the temperature reaches a predetermined temperature, the control unit controls the moving mechanism 22a, and the roll 22 is moved to the organic EL display device with a predetermined pressure. Then, the roll 22 is moved in the arrow direction relative to the organic EL display device 16 on the stage at a predetermined speed.
Here, the roll 22 is coated with an ink layer 22b having a length corresponding to the width d of the organic EL display device.
As a result, as shown in FIG. 4, the portion of the ink layer 22b corresponding to the anode 11 heated from the roll 22 is peeled off and selectively transferred to the upper portion of the hole transport layer 10, and the pattern of the light emitting layer 12G Is formed.

Next, similarly to the processing of the rolls 21 and 22 described above, when the roll 22 finishes forming the pattern of the light emitting layer 12G on the organic EL display device 16, the control unit turns off the switch 24, and the mobile station 4 On the other hand, the probe 4a is moved laterally by one pitch of the anode 11, and the probe 4a is connected to each of the anodes 11 corresponding to the position where the light emitting layer 12B is formed.
Then, the control unit turns on the switch 24, connects the power source 25 to the anode 11 to which the probe 4a is connected, applies a predetermined voltage, and flows a current corresponding to the resistance value of the anode 11.

Next, Joule heat is generated in each of the anodes 11 to which a voltage is applied, and after a predetermined period of time when the temperature reaches a predetermined temperature, the control unit controls the moving mechanism 23a to move the roll 23 with a predetermined pressure to the organic EL display device. Then, the roll 23 is moved in the arrow direction relative to the organic EL display device 16 on the stage at a predetermined speed.
Here, the roll 23 is coated with an ink layer 23b having a length corresponding to the width d of the organic EL display device.
As a result, as shown in FIG. 5, the portion of the ink layer 23b corresponding to the anode 11 heated from the roll 23 is peeled off and selectively transferred to the upper portion of the hole transport layer 10, and the pattern of the light emitting layer 12B Is formed.

Then, as shown in FIG. 5, the control unit can turn off the switch 24 to form the full color electron transport light emitting layers 12R (for red), 12G (for green), and 12B (for blue), respectively. .
Next, a calcium (Ca) layer is formed on the upper surfaces of the light emitting layers 12R, 12G, and 12B by vacuum deposition or the like and patterning, and an aluminum (Al) layer as a main electrode is formed on the upper surface of the calcium layer 13. Further, an Au—Ge layer for improving the protection and bonding properties is formed on the upper surface of the aluminum layer, and the cathode layer 14 is formed with these multilayer structures (FIG. 1D). Finally, the common electrode 16a is disconnected electrically, and the organic EL display device 16 is completed.

By the above-described organic EL display device manufacturing apparatus, necessary portions of the ink layers 21b, 22b, and 23b can be easily transferred onto the upper surface of the organic hole transport layer 10 as a pattern of the light emitting layers 12R, 12G, and 12B. The transferred ink layer can be transferred with good adhesion without pattern breakage.
Even in the case of an element structure in which the hole transport layer 10 is not provided, since the base of the transfer is ITO, transfer by peeling of necessary portions of the ink layers 21b, 22b, and 23b is a system for the hole transport layer 10 described above. It becomes easy to control the peeling conditions.

In addition, since each anode 11 itself forms a necessary light emitting layer pattern on the upper portion, it is not necessary to previously form an electron transport light emitting layer pattern on the surface of the silicon resin of each roll. A highly accurate pattern can be formed without alignment.
In addition, since the Joule heat can be adjusted by the voltage of the power supply 25 for the thin pattern of the ink layer applied to the roll, the pattern shape can be processed into a suitable one. Therefore, the organic electric field that requires the transfer of the thin ink is required. It becomes more effective when used for a light emitting element.

  Further, as shown in FIG. 6, even if the roll traveling direction and the pattern to be formed are not parallel, that is, since the patterning is performed by heating the anode 11, the roll traveling direction and the pattern to be formed are parallel with high accuracy. There is no need to perform control.

<Second Embodiment>
In FIG. 7, the same parts as those of the conventional apparatus shown in FIG. The apparatus shown in this figure is different from the conventional apparatus in that a laser irradiation apparatus 30 is provided instead of a voltage application structure as a structure for heating a predetermined pattern region with respect to the heating of the pattern forming portion of the light emitting layer. This is the point.
In the first embodiment, self-patterning is performed by applying a voltage to the anode 11 and heating the anode 11 by Joule heat generated by the flowing current value and resistance value (voltage value). In the second embodiment, instead of Joule heat, the surface of the hole transport layer 10 to be transferred is formed into a desired pattern shape from the laser irradiation device 30 (or with respect to the pattern of the anode 11 below the hole transport layer 10). A laser beam is irradiated, and the surface of the hole transport layer 10 is heated to the pattern shape of the light emitting layer by radiant heat generated by the laser beam.

And it is the same as that of 1st Embodiment that a control part moves the roll 21 on a rail by the moving mechanism 21a, and performs transcription | transfer of the light emitting layer by peeling.
As described above, the control unit controls the laser irradiation device 30, and the light emitting layers 12R (for red), 12G (for green), and 12B (for blue) are respectively formed on the surface of the hole transport layer 10 by the emitted laser beam. In order to form the ink layers 21b and 22b, the anode 11 at the position where each electron transport emission pattern is formed is selectively irradiated with a laser beam in order, and the electron transport emission pattern on the heated anode 11 is made to correspond. , 23b is peeled off to transfer the ink pattern.

For example, a YAG laser device having an oscillation wavelength of 1 μm is used as the laser irradiation device 30, a laser beam having an irradiation light intensity of about 10 W is irradiated onto a line for transferring red, and a red material is applied after irradiation of all lines. With the roller 21 around which the material is wound, the moving speed of the roller 21 is transferred at 100 mm / second.
In the first and second embodiments, the ink layers 21b, 22b, and 23b are peeled into the pattern shape of the light emitting layer so that the temperature of the anode 11 is 100 ° C. or lower, and preferably about 70 ° C. In order to selectively transfer to the upper surface of the hole transport layer 10, the anode 11 below the light emitting layer is controlled to selectively apply Joule heat or radiant heat.

It is a conceptual diagram of the cross-sectional structure for each process showing the manufacturing process of the organic EL display device formed according to the present invention. It is a conceptual diagram which shows the structural example of the organic electroluminescence display by the 1st Embodiment of this invention. It is a conceptual diagram explaining the transcription | transfer of the pattern of the electron carrying light emitting layer of the organic electroluminescence display formed by this invention. It is a conceptual diagram which shows the structural example of the organic electroluminescence display by the 1st Embodiment of this invention. It is a conceptual diagram which shows the structural example of the organic electroluminescence display by the 1st Embodiment of this invention. It is a conceptual diagram which shows the structural example of the organic electroluminescence display by the 2nd Embodiment of this invention. It is a conceptual diagram which shows the structural example of the organic electroluminescent display apparatus by a prior art example. It is a conceptual diagram which shows the relief printing method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 4 ... Moving stage 4a, 4b ... Probe 10 ... Hole transport layer 11 ... Anode 12R, 12G, 12B ... Light emitting layer 13 ... Glass substrate 14 ... Cathode 15 ... Insulating layer 16 ... Organic EL display device 16a ... Common electrode 20 ... Rail 21, 22, 23 ... Rolls 21a, 22a, 23a ... Moving mechanism 25 ... Power supply 24 ... Switch 30 ... Laser irradiation device

Claims (6)

A manufacturing method for producing an organic EL display device having an organic EL layer sandwiched between electrodes,
A heating process for selectively heating a portion of the surface of the transfer medium where the organic medium is to be transferred;
A transfer process in which a transfer body coated with ink is brought into close contact with the surface of the transfer target and moved relatively, and the ink is selectively peeled off from the transfer body at a heated location. A method of manufacturing an organic EL display device, wherein an ink pattern is formed at a predetermined location.   2. The portion to be transferred is heated by selectively energizing an electrode corresponding to the pattern among the electrodes under the transferred body, and the portion to be transferred is heated by generated Joule heat. A method for manufacturing an organic EL display device.   2. The organic EL display according to claim 1, wherein the portion to be transferred is selectively heated by radiant heat generated by laser light irradiation to an electrode corresponding to the pattern among the electrodes under the transferred body. Device manufacturing method. A manufacturing apparatus for producing an organic EL display device having an organic EL layer sandwiched between electrodes,
A heating unit that selectively heats a portion of the surface of the transfer target to which the organic medium is to be transferred;
A transfer control unit that closely moves the transfer body on which the ink is applied to the surface of the transfer target and moves the transfer body relatively, and selectively peels the ink from the transfer body at a heated location. An organic EL display device manufacturing apparatus, wherein an ink pattern is formed at a predetermined location.   The electrode corresponding to the pattern is selected from among the electrodes under the transferred body of the heating unit, the selected electrode is energized, and the portion to be transferred is heated by Joule heat generated in the electrode. The apparatus for manufacturing an organic EL display device according to claim 4, wherein: The heating unit is selected as an electrode corresponding to the pattern among the electrodes under the transfer target, and the selected electrode is irradiated with laser light, and the transfer heat is generated by radiant heat generated at the electrode. The apparatus for manufacturing an organic EL display device according to claim 4, wherein a desired portion is heated.

Images