JP2005302707A5 - - Google Patents

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JP2005302707A5
JP2005302707A5 JP2005068877A JP2005068877A JP2005302707A5 JP 2005302707 A5 JP2005302707 A5 JP 2005302707A5 JP 2005068877 A JP2005068877 A JP 2005068877A JP 2005068877 A JP2005068877 A JP 2005068877A JP 2005302707 A5 JP2005302707 A5 JP 2005302707A5
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electrode
opening
interlayer insulating
insulating film
pixel portion
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JP2005302707A (en
JP4776949B2 (en
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Claims (14)

画素部及び駆動回路部と、
前記画素部に設けられた、第1の電極と第2の電極とを有する発光素子と、
前記第1の電極上に設けられた膜と、
前記第1の電極の端部を覆い、且つ前記膜上に設けられた隔壁と、
前記画素部と前記駆動回路部との間において前記画素部の外周を囲むよう前記隔壁に設けられた開口部と、を有し、
前記開口部は前記隔壁を厚さ方向に貫通して設けられ、
前記開口部の側面及び底面は、前記第2の電極が接していることを特徴とする発光装置。
A pixel portion and a drive circuit portion;
A light-emitting element provided in the pixel portion and having a first electrode and a second electrode;
A film provided on the first electrode ;
A partition wall covering an end of the first electrode and provided on the film;
So as to surround the periphery of the pixel portion in between the driver circuit portion and the pixel portion has a an opening provided in the partition wall,
The opening is provided through the partition wall in the thickness direction,
The light emitting device, wherein the second electrode is in contact with a side surface and a bottom surface of the opening.
画素部及び駆動回路部と、
前記画素部に設けられた、第1の電極と第2の電極とを有する発光素子及び薄膜トランジスタと
前記薄膜トランジスタ上に設けられた第1の層間絶縁膜と、
前記第1の層間絶縁膜に設けられた膜と、
前記膜上に設けられた第2の層間絶縁膜と、
前記第2の層間絶縁膜上に設けられた前記第1の電極と、
前記画素部と前記駆動回路部との間において前記画素部の外周を囲むよう前記第2の層間絶縁膜に設けられた第1の開口部と、
前記第1の電極の端部を覆うように設けられた隔壁と、
前記隔壁にけられた第2の開口部と、を有し、
前記第1の開口部は前記第2の層間絶縁膜を厚さ方向に貫通して設けられ、
前記第2の開口部は前記隔壁を厚さ方向に貫通して設けられ、
前記第1の開口部と前記第2の開口部は重なるように設けられ、
前記第2の開口部の側面及び底面は、前記第2の電極が接していることを特徴とする発光装置。
A pixel portion and a drive circuit portion;
Provided in the pixel portion, a light emitting element及 beauty thin film transistor capacitor having a first electrode and a second electrode,
A first interlayer insulating film provided on the thin film transistor;
A film provided on the first interlayer insulating film ;
A second interlayer insulating film provided on the film;
The first electrode provided on the second interlayer insulating film;
So as to surround the periphery of the pixel portion in between said pixel portion and the driver circuit portion, a first opening formed in the second interlayer insulating film,
A partition provided to cover an end of the first electrode;
A second opening disposed in the partition wall,
The first opening is provided through the second interlayer insulating film in the thickness direction,
The second opening is provided through the partition wall in the thickness direction,
The first opening and the second opening are provided to overlap,
The light emitting device, wherein the second electrode is in contact with a side surface and a bottom surface of the second opening.
画素部及び駆動回路部と、
前記画素部に設けられた、第1の電極と第2の電極とを有する発光素子と、
前記第1の電極上に、前記発光素子へ水分が到達しないように設けられた膜と、
前記第1の電極の端部を覆い、且つ前記膜上に設けられた隔壁と、
前記画素部と前記駆動回路部との間において前記画素部の外周を囲むよう前記隔壁に設けられた開口部と、を有し、
前記開口部は前記隔壁を厚さ方向に貫通して設けられ、
前記開口部の側面及び底面は、前記第2の電極が接していることを特徴とする発光装置。
A pixel portion and a drive circuit portion;
A light-emitting element provided in the pixel portion and having a first electrode and a second electrode;
A film provided on the first electrode so that moisture does not reach the light-emitting element;
A partition wall covering an end of the first electrode and provided on the film;
So as to surround the periphery of the pixel portion in between the driver circuit portion and the pixel portion has a an opening provided in the partition wall,
The opening is provided through the partition wall in the thickness direction,
The light emitting device, wherein the second electrode is in contact with a side surface and a bottom surface of the opening.
画素部及び駆動回路部と、
前記画素部に設けられた、第1の電極と第2の電極とを有する発光素子及び薄膜トランジスタと、
前記薄膜トランジスタ上に設けられた第1の層間絶縁膜と、
前記第1の層間絶縁膜上に、前記発光素子へ水分が到達しないように設けられた膜と、
前記膜上に設けられた第2の層間絶縁膜と、
前記第2の層間絶縁膜上に設けられた前記第1の電極と、
前記画素部と前記駆動回路部との間において前記画素部の外周を囲むよう前記第2の層間絶縁膜に設けられた第1の開口部と、
前記第1の電極の端部を覆うように設けられた隔壁と、
前記隔壁にけられた第2の開口部と、を有し、
前記第1の開口部は前記第2の層間絶縁膜を厚さ方向に貫通して設けられ、
前記第2の開口部は前記隔壁を厚さ方向に貫通して設けられ、
前記第1の開口部と前記第2の開口部は重なるように設けられ、
前記第2の開口部の側面及び底面は、前記第2の電極が接していることを特徴とする発光装置。
A pixel portion and a drive circuit portion;
Provided in the pixel portion, a light emitting element及 beauty thin film transistor having a first electrode and a second electrode,
A first interlayer insulating film provided on the thin film transistor;
A film provided on the first interlayer insulating film so that moisture does not reach the light emitting element;
A second interlayer insulating film provided on the film;
The first electrode provided on the second interlayer insulating film;
So as to surround the periphery of the pixel portion in between said pixel portion and the driver circuit portion, a first opening formed in the second interlayer insulating film,
A partition provided to cover an end of the first electrode;
A second opening disposed in the partition wall,
The first opening is provided through the second interlayer insulating film in the thickness direction,
The second opening is provided through the partition wall in the thickness direction,
The first opening and the second opening are provided to overlap,
The light emitting device, wherein the second electrode is in contact with a side surface and a bottom surface of the second opening.
画素部及び駆動回路部と、
前記画素部に設けられた、第1の電極と第2の電極とを有する発光素子と、
前記第1の電極上に設けられた金属膜、窒化珪素膜、又は酸化珪素膜と、
前記第1の電極の端部を覆い、且つ前記金属膜、窒化珪素膜、又は酸化珪素膜上に設けられた隔壁と、
前記画素部と前記駆動回路部との間において前記画素部の外周を囲むよう前記隔壁に設けられた開口部と、を有し、
前記開口部は前記隔壁を厚さ方向に貫通して設けられ、
前記開口部の側面及び底面は、前記第2の電極が接していることを特徴とする発光装置。
A pixel portion and a drive circuit portion;
A light-emitting element provided in the pixel portion and having a first electrode and a second electrode;
A metal film, a silicon nitride film, or a silicon oxide film provided on the first electrode ;
A partition wall covering an end portion of the first electrode and provided on the metal film, the silicon nitride film, or the silicon oxide film;
So as to surround the periphery of the pixel portion in between the driver circuit portion and the pixel portion has a an opening provided in the partition wall,
The opening is provided through the partition wall in the thickness direction,
The light emitting device, wherein the second electrode is in contact with a side surface and a bottom surface of the opening.
画素部及び駆動回路部と、
前記画素部に設けられた、第1の電極と第2の電極とを有する発光素子及び薄膜トランジスタと
前記薄膜トランジスタ上に設けられた第1の層間絶縁膜と、
前記第1の層間絶縁膜に設けられた金属膜、窒化珪素膜、又は酸化珪素膜と、
前記金属膜、窒化珪素膜、又は酸化珪素膜上に設けられた第2の層間絶縁膜と、
前記第2の層間絶縁膜上に設けられた前記第1の電極と、
前記画素部と前記駆動回路部との間において前記画素部の外周を囲むよう前記第2の層間絶縁膜に設けられた第1の開口部と、
前記第1の電極の端部を覆うように設けられた隔壁と、
前記隔壁にけられた第2の開口部と、を有し、
前記第1の開口部は前記第2の層間絶縁膜を厚さ方向に貫通して設けられ、
前記第2の開口部は前記隔壁を厚さ方向に貫通して設けられ、
前記第1の開口部と前記第2の開口部は重なるように設けられ、
前記第2の開口部の側面及び底面は、前記第2の電極が接していることを特徴とする発光装置。
A pixel portion and a drive circuit portion;
Provided in the pixel portion, a light emitting element及 beauty thin film transistor capacitor having a first electrode and a second electrode,
A first interlayer insulating film provided on the thin film transistor;
A metal film, a silicon nitride film, or a silicon oxide film provided on the first interlayer insulating film ;
A second interlayer insulating film provided on the metal film, silicon nitride film, or silicon oxide film;
The first electrode provided on the second interlayer insulating film;
So as to surround the periphery of the pixel portion in between said pixel portion and the driver circuit portion, a first opening formed in the second interlayer insulating film,
A partition provided to cover an end of the first electrode;
A second opening disposed in the partition wall,
The first opening is provided through the second interlayer insulating film in the thickness direction,
The second opening is provided through the partition wall in the thickness direction,
The first opening and the second opening are provided to overlap,
The light emitting device, wherein the second electrode is in contact with a side surface and a bottom surface of the second opening.
画素部及び駆動回路部と、
前記画素部に設けられた、第1の電極と第2の電極とを有する発光素子と、
前記第1の電極上に設けられた透水性の小さい膜と、
前記第1の電極の端部を覆い、且つ前記透水性の小さい膜上に設けられた隔壁と、
前記画素部と前記駆動回路部との間において前記画素部の外周を囲むよう前記隔壁に設けられた開口部と、を有し、
前記透水性の小さい膜は、前記隔壁よりも透水性が小さく、
前記開口部は前記隔壁を厚さ方向に貫通して設けられ、
前記開口部の側面及び底面は、前記第2の電極が接していることを特徴とする発光装置。
A pixel portion and a drive circuit portion;
A light-emitting element provided in the pixel portion and having a first electrode and a second electrode;
A membrane with low water permeability provided on the first electrode ;
A partition wall covering an end portion of the first electrode and provided on the film having a small water permeability;
So as to surround the periphery of the pixel portion in between the driver circuit portion and the pixel portion has a an opening provided in the partition wall,
The membrane having a small water permeability is smaller in water permeability than the partition wall,
The opening is provided through the partition wall in the thickness direction,
The light emitting device, wherein the second electrode is in contact with a side surface and a bottom surface of the opening.
画素部及び駆動回路部と、
前記画素部に設けられた、第1の電極と第2の電極とを有する発光素子及び薄膜トランジスタと
前記薄膜トランジスタ上に設けられた第1の層間絶縁膜と、
前記第1の層間絶縁膜に設けられた、前記第1の層間絶縁膜よりも透水性の小さい膜と、
前記透水性の小さい膜上に設けられた第2の層間絶縁膜と、
前記第2の層間絶縁膜上に設けられた前記第1の電極と、
前記画素部と前記駆動回路部との間において前記画素部の外周を囲むよう前記第2の層間絶縁膜に設けられた第1の開口部と、
前記第1の電極の端部を覆うように設けられた隔壁と、
前記隔壁にけられた第2の開口部と、を有し、
前記第1の開口部は前記第2の層間絶縁膜を厚さ方向に貫通して設けられ、
前記第2の開口部は前記隔壁を厚さ方向に貫通して設けられ、
前記第1の開口部と前記第2の開口部は重なるように設けられ、
前記第2の開口部の側面及び底面は、前記第2の電極が接していることを特徴とする発光装置。
A pixel portion and a drive circuit portion;
Provided in the pixel portion, a light emitting element及 beauty thin film transistor capacitor having a first electrode and a second electrode,
A first interlayer insulating film provided on the thin film transistor;
A film having a smaller water permeability than the first interlayer insulating film provided on the first interlayer insulating film ;
A second interlayer insulating film provided on the low water-permeable film;
The first electrode provided on the second interlayer insulating film;
So as to surround the periphery of the pixel portion in between said pixel portion and the driver circuit portion, a first opening formed in the second interlayer insulating film,
A partition provided to cover an end of the first electrode;
A second opening disposed in the partition wall,
The first opening is provided through the second interlayer insulating film in the thickness direction,
The second opening is provided through the partition wall in the thickness direction,
The first opening and the second opening are provided to overlap,
The light emitting device, wherein the second electrode is in contact with a side surface and a bottom surface of the second opening.
画素部及び駆動回路部と、
前記画素部に設けられた、第1の電極と第2の電極とを有する発光素子及び薄膜トランジスタと
前記薄膜トランジスタ上に設けられた第1の層間絶縁膜と、
前記第1の層間絶縁膜に設けられた前記第1の層間絶縁膜よりも透水性の小さい膜と、
前記透水性の小さい膜上に設けられた第2の層間絶縁膜と、
前記第2の層間絶縁膜上に設けられた前記第1の電極と、
前記画素部と前記駆動回路部との間において前記画素部の外周を囲むよう前記第2の層間絶縁膜に設けられた第1の開口部と、
前記第1の電極の端部を覆うように設けられた隔壁と、
前記隔壁にけられた第2の開口部と、を有し、
前記第1の開口部は前記第2の層間絶縁膜を厚さ方向に貫通して設けられ、
前記第2の開口部は前記隔壁を厚さ方向に貫通して設けられ、
前記第1の開口部と前記第2の開口部は重なるように設けられ、
前記第2の開口部の側面及び底面は、前記第2の電極が接していることを特徴とする発光装置。
A pixel portion and a drive circuit portion;
Provided in the pixel portion, a light emitting element及 beauty thin film transistor capacitor having a first electrode and a second electrode,
A first interlayer insulating film provided on the thin film transistor;
A film having a lower water permeability than the first interlayer insulating film provided on the first interlayer insulating film;
A second interlayer insulating film provided on the low water-permeable film;
The first electrode provided on the second interlayer insulating film;
So as to surround the periphery of the pixel portion in between said pixel portion and the driver circuit portion, a first opening formed in the second interlayer insulating film,
A partition provided to cover an end of the first electrode;
A second opening disposed in the partition wall,
The first opening is provided through the second interlayer insulating film in the thickness direction,
The second opening is provided through the partition wall in the thickness direction,
The first opening and the second opening are provided to overlap,
The light emitting device, wherein the second electrode is in contact with a side surface and a bottom surface of the second opening.
画素部及び駆動回路部と、
前記画素部に設けられた、第1の電極と第2の電極とを有する発光素子及び薄膜トランジスタと
前記薄膜トランジスタ上に設けられた透水性の小さい膜よりなる第1の層間絶縁膜と、
前記第1の層間絶縁膜上に設けられた第2の層間絶縁膜と、
前記第2の層間絶縁膜の上に設けられた第1の電極と、
前記画素部と前記駆動回路部との間において前記画素部の外周を囲むよう前記第2の層間絶縁膜に設けられた第1の開口部と、
前記第1の電極の端部を覆うように設けられた隔壁と、
前記隔壁に設けられた第2の開口部と、を有し、
前記透水性の小さい膜は、前記第2の層間絶縁膜及び前記隔壁よりも透水性が小さく、
前記第1の開口部は前記第2の層間絶縁膜を厚さ方向に貫通して設けられ、
前記第2の開口部は前記隔壁を厚さ方向に貫通して設けられ、
前記第1の開口部と前記第2の開口部は重なるように設けられ、
前記第2の開口部の側面及び底面は、前記第2の電極が接していることを特徴とする発光装置。
A pixel portion and a drive circuit portion;
Provided in the pixel portion, a light emitting element及 beauty thin film transistor capacitor having a first electrode and a second electrode,
A first interlayer insulating film made of a film having low water permeability provided on the thin film transistor;
A second interlayer insulating film provided on the first interlayer insulating film;
A first electrode provided on the second interlayer insulating film;
So as to surround the periphery of the pixel portion in between said pixel portion and the driver circuit portion, a first opening formed in the second interlayer insulating film,
A partition provided to cover an end of the first electrode;
A second opening provided in the partition,
The water-permeable film has a water permeability smaller than that of the second interlayer insulating film and the partition wall,
The first opening is provided through the second interlayer insulating film in the thickness direction,
The second opening is provided through the partition wall in the thickness direction,
The first opening and the second opening are provided to overlap,
The light emitting device, wherein the second electrode is in contact with a side surface and a bottom surface of the second opening.
画素部及び駆動回路部と、
前記画素部に設けられた、第1の電極と第2の電極とを有する発光素子及び薄膜トランジスタと
前記薄膜トランジスタ上に形成されている層間絶縁膜と、
前記層間絶縁膜の上に形成されている前記第1の電極と、
前記駆動回路部の外側において前記画素部の外周の少なくとも一部に、前記層間絶縁膜に設けられた開口部と、
前記第1の電極の端部を覆うように設けられた隔壁と、を有し、
前記開口部の側面及び底面は、前記隔壁よりも透水性の小さい膜で覆われており、
前記隔壁の端部は前記透水性の小さい膜に接し、且つ当該隔壁の上面前記第2の電極が接していることを特徴とする発光装置。
A pixel portion and a drive circuit portion;
Provided in the pixel portion, a light emitting element及 beauty thin film transistor capacitor having a first electrode and a second electrode,
An interlayer insulating film formed on the thin film transistor;
The first electrode formed on the interlayer insulating film;
An opening provided in the interlayer insulating film on at least a part of the outer periphery of the pixel portion outside the drive circuit portion ;
A partition provided so as to cover an end of the first electrode,
The side and bottom surfaces of the opening are covered with a film having a smaller water permeability than the partition wall,
End of the partition wall is in contact with a small film of said water permeability, and the upper surface of the partition wall is a light-emitting device, wherein the second electrode is in contact.
画素部及び駆動回路部と、
前記画素部に設けられた、第1の電極と第2の電極とを有する発光素子及び薄膜トランジスタと
前記薄膜トランジスタ上に設けられた第1の層間絶縁膜と、
前記駆動回路部の外側において前記画素部の外周の少なくとも一部に、前記第1の層間絶縁膜に設けられた開口部と、
前記第1の層間絶縁膜上に設けられた第2の層間絶縁膜と、
前記第1の電極の端部を覆って設けられた隔壁と、を有し、
前記開口部の側面及び底面は、前記隔壁よりも透水性の小さい膜で覆われており、
前記第2の層間絶縁膜の端部は前記透水性の小さい膜に接し、且つ当該第2の層間絶縁膜の上面には前記第1の電極が設けられており、
前記隔壁の端部は前記透水性の小さい膜に接し、且つ当該隔壁の上面前記第2の電極が接していることを特徴とする発光装置。
A pixel portion and a drive circuit portion;
Provided in the pixel portion, a light emitting element及 beauty thin film transistor capacitor having a first electrode and a second electrode,
A first interlayer insulating film provided on the thin film transistor;
An opening provided in the first interlayer insulating film on at least a part of the outer periphery of the pixel portion outside the drive circuit portion ;
A second interlayer insulating film provided on the first interlayer insulating film;
A partition wall provided to cover an end of the first electrode,
The side and bottom surfaces of the opening are covered with a film having a smaller water permeability than the partition wall,
An end of the second interlayer insulating film is in contact with the film having low water permeability, and the first electrode is provided on the upper surface of the second interlayer insulating film,
End of the partition wall is in contact with a small film of said water permeability, and the upper surface of the partition wall is a light-emitting device, wherein the second electrode is in contact.
請求項11又は請求項12において、
記開口部は、前記画素及び駆動回路部が形成される基板が露出するように設けられたことを特徴とする発光装置。
In claim 11 or claim 12 ,
Prior Symbol opening, the light emitting device, characterized in that the substrate to the pixel and the driver circuit portion are formed is provided so as to be exposed.
請求項2、4、6、8、9、10及び12のいずれか一において、
前記第1の層間絶縁膜の端部は、前記第1の層間絶縁膜よりも透水性の小さい膜により覆われていることを特徴とする発光装置。
In any one of claims 2, 4, 6, 8 , 9 , 10, and 12 ,
An end portion of the first interlayer insulating film is covered with a film having a water permeability smaller than that of the first interlayer insulating film .
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