JP2005300628A - Exposure apparatus having local alignment function - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an exposure apparatus which draws patterns by correcting deformation caused in each drawing area in accordance with the deformation of an object for drawing with respect to the drawing data to draw a plurality of drawing areas including a face pattern on the object. <P>SOLUTION: The drawing data are corrected on the basis of the displacement between the original positions of first to 16th alignment holes 40 to 55 formed in an object for drawing where first to fourth drawing areas 60 to 63 are to be drawn and the positions of first to 16th measured alignment holes 80 to 95 actually measured by the deformation of the object drawing body 38. That is, the drawing data corresponding to the first to fourth drawing areas 60 to 63 are corrected on the basis of the location offset off[G], scale ratios scx[G] and scy[G], and rotation angle θ[G], where G represents 0, 1, 2 or 3, calculated from the displacement of positions of the alignment holes to obtain the corrected drawing data. Further, the data in each drawing area are unified to continuously draw patterns on the surface of the object drawing body 38. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to an exposure apparatus that draws a predetermined pattern on an object to be drawn, and more particularly to an exposure apparatus that draws a plurality of patterns on a single substrate.

  A typical example of conventional drawing is printing of a circuit pattern on a printed circuit board by a photolithographic technique. In this case, the object to be drawn is a substrate having a photoresist layer formed on the upper surface, and an imposition pattern is drawn on the photoresist layer on the substrate by a drawing apparatus. And after drawing a circuit pattern (surface pattern), a printed circuit board is obtained by performing various processes.

  The imposition pattern needs to be drawn at a predetermined position on the printed circuit board, but the substrate undergoes minute deformation due to heat treatment after the drawing. Therefore, for example, positioning marks are set in advance at predetermined positions such as the four corners on the substrate, the positional deviation of the positioning marks due to the deformation of the substrate is measured in advance, and the positional deviation is corrected by correcting the positional deviation. Has been.

In addition, when a plurality of areas (hereinafter referred to as drawing areas) including several relatively small size imposition patterns are allocated on the same substrate, positioning marks for correcting the positions of the respective drawing areas are provided. Provided. It is known to correct the drawing position by detecting the shift of the center of gravity of each drawing area and correcting the arrangement of each drawing area on the substrate (see, for example, Patent Document 1).
JP 2000-122303 A (pages 5 to 6)

  When only the arrangement of the drawing area with respect to the substrate is corrected based on the shift of the center of gravity of each drawing area, correction that reflects the deformation of the drawing area itself is not performed. Therefore, when the substrate is deformed in a complicated manner such as extending along a plurality of directions, distortion and distortion in the drawing region may become a problem, and accurate alignment correction is difficult.

  Therefore, in the present invention, when drawing a plurality of drawing areas on the same substrate, in addition to correcting the arrangement of each drawing area, the deformation generated in each drawing area itself is individually corrected, thereby enabling high-precision drawing. An object of the present invention is to provide an exposure apparatus capable of adjusting the position.

  The exposure apparatus of the present invention draws an object to be drawn on which marks for defining the positions and contours of a plurality of drawing areas including an imposition pattern are represented on the surface. An exposure apparatus exposes a surface of a drawing object with mark position detection means for detecting an actual position of the mark, mark position data generation means for generating mark position data indicating the actual position of the mark, and an imposition pattern. Drawing means for drawing. The exposure apparatus further includes drawing data recording means for recording drawing data including vector data indicating an imposition pattern to be drawn and mark position information indicating an original position of the mark, and drawing data reading for reading the drawing data Detecting the actual drawing area position and contour based on the means and the mark position data, and correcting the drawing data by correcting the drawing data for each corresponding drawing area based on the actual drawing area position and contour Drawing data correction means for data, and draws the imposition pattern on the object to be drawn based on the corrected drawing data.

  The drawing data correction means determines whether the drawing data is based on the size ratio between the actual drawing area and the drawing area in the drawing data, the difference in the position of the center of gravity, and the rotation angle of the actual drawing area with respect to the drawing area in the drawing data. Is preferably used as corrected drawing data.

  The drawing area has, for example, a rectangular area. Further, the mark is preferably at the end of the drawing area, and more preferably at least three for each drawing area.

  The exposure apparatus preferably further includes a drawing table for installing the drawing object, and a drawing object moving unit that moves the drawing table in a predetermined direction. The mark position detection unit includes, for example, a predetermined direction. This is a camera for photographing a moving drawing object. In this case, it is preferable that the mark position data generation unit generates the mark position data based on the position of the mark in the coordinate system of the shooting range of the camera.

  It is desirable that the drawing data correction unit corrects the drawing data for each corresponding drawing area and sets it as a single corrected drawing data. In this case, it is more desirable that the drawing unit draws all the imposition patterns by continuously exposing the drawing object to the drawing object.

  The drawing method of the present invention is a method of drawing an object to be drawn in which marks that define the positions and contours of a plurality of drawing regions including an imposition pattern are represented on the surface. In the drawing method, the drawing data including the vector data indicating the imposition pattern to be drawn and the mark position information indicating the original position of the mark is recorded, the drawing data is read out, and the actual mark is determined based on the drawing data. Detects the position, generates mark position data indicating the actual position of the mark, detects the position and contour of the actual drawing area based on the mark position data, and based on the position and contour of the actual drawing area The drawing data is corrected for each corresponding drawing area to obtain corrected drawing data as corrected drawing data. The exposure apparatus draws the imposition pattern by exposing the object to be drawn based on the corrected drawing data.

  According to the present invention, it is possible to provide an exposure apparatus capable of performing highly accurate drawing by correcting the deformation in the drawing area in addition to correcting the arrangement of each drawing area on the same substrate.

  Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 schematically shows an exposure apparatus 10 of the present embodiment.

  The exposure apparatus 10 exposes and draws a drawing object, and the drawing control unit 12 performs editing of drawing data including vector data indicating an imposition pattern to be drawn and transmission to the drawing apparatus 14. With. The drawing control unit 12 includes a first sequence control unit 18, a communication processing unit 20, a control unit side data processing unit 22, and a data recording unit 23. The user gives a predetermined instruction to the drawing control unit 12 by operating the operation panel 16 of the drawing control unit 12. The first sequence control unit 18 causes the communication processing unit 20 to transmit various instruction signals for the drawing device 14 based on a user instruction via the operation panel 16, and the control unit side data processing unit 22 processes the drawing data. Let The data recording unit 23 records drawing data.

  The drawing device 14 includes a second sequence control unit 24, a device-side data processing unit 26, and the like. The second sequence control unit 24 controls the apparatus side data processing unit 26, the measurement control unit 28, the drawing table control unit 30, and the exposure control unit 32 according to the instruction signal transmitted from the communication processing unit 20. The apparatus-side data processing unit 26 receives drawing data via the second sequence control unit 24, and generates image image data and the like for drawing on the drawing object based on the drawing data. The measurement control unit 28 shoots the alignment hole with a hole measurement camera (not shown here) in order to detect the position of the alignment hole provided in advance on the drawing object based on the drawing data before correction. Control to do. The drawing table control unit 30 controls the movement of the drawing table 36 on which the drawing object is installed. The exposure control unit 32 controls a light source 37 that emits beam light for exposure of the drawing object.

  FIG. 2 is a top view showing the drawing object installed on the drawing table 36.

  The drawing object 38 having a rectangular plate surface has a contour parallel to the X axis and the Y axis of the XY coordinate system (hereinafter referred to as a drawing coordinate system) of the drawing table 36 with the origin P as a reference. And placed on the drawing table 36. The drawing object 38 has first to sixteenth alignment holes 40 to 55 which are reference holes for correcting drawing data. The imposition pattern to be drawn on the surface of the drawing object 38 is divided into first to fourth drawing areas 60 to 63 which are four independent areas each having the same rectangular area. The first to sixteenth alignment holes 40 to 55 are located at the ends of the first to fourth drawing regions 60 to 63 so as to be on four straight lines parallel to the X axis and four straight lines parallel to the Y axis. Provided in the department. Here, the same surfaced pattern is formed in each of the F shapes in the first to fourth drawing regions 60 to 63.

The drawing data recorded in the data recording unit 23 includes drawing object information indicating the installation position of the drawing object 38, vector data indicating the imposition pattern that the drawing device 14 should draw on the drawing object, And hole information, which is information indicating the positions and the like of the first to sixteenth alignment holes 40 to 55 provided in the drawing body 38. That is, in addition to the vector data for drawing the F-shaped figure in each of the first to fourth drawing areas 60 to 63, the coordinates on the drawing coordinate system indicating the position where the end point Q of the drawing target 38 is to be arranged. (BOX, BOY), the number HN of the first to sixteenth alignment holes 40 to 55 exemplified in the expressions (1) and (2), the diameter HR, and the coordinate system with the end point Q as the origin in the drawing object 38 ( In the following, the coordinates of the center points of the first to sixteenth alignment holes 40 to 55 are included.

HN = 16 (1)
HR = 1.0 (mm) (2)

  FIG. 3 is a top view showing a drawing object 38 installed on the drawing table 36, and FIG. 4 is a perspective view showing the drawing object 38 installed on the drawing table 36. FIG. 5 is a diagram showing the amount of movement of the drawing table 36 for photographing the drawing object 38.

  The first to sixteenth alignment holes 40 to 55 are provided to grasp in advance the amount of fine deformation generated in the drawing object 38 by the processing process, and the drawing object 38 is subjected to an actual processing process in advance. Yes. Therefore, the coordinates (HX [G] [N], HY [G] [] of the point H [G] [N] where the center point of the first to sixteenth alignment holes 40 to 55 should be located included in the drawing data. N]) (see FIG. 3) is slightly different from the coordinates of the center positions of the first to sixteenth alignment holes 40 to 55 on the drawing object 38 actually measured.

  “G” and “N” are subscripts, “G” is a drawing area number corresponding to the first to fourth drawing areas 60 to 63, and “N” is an alignment hole in each drawing area. This is a hole number for identifying. Then, the coordinates of all the alignment holes are identified using the drawing area number “G” and the hole number “N”, which are four integers of 0 to 3. That is, the point where the center of the first to fourth alignment holes 40 to 43 of the first drawing area 60 should be located is H [0] [0] (HX [0] [H] using the drawing area number G = 0. 0], HY [0] [0]) to H [0] [3] (HX [0] [3], HY [0] [3]), and fifth to fifth included in the second drawing area 61. The points where the centers of the eighth alignment holes 44 to 47 should be positioned are H [1] [0] (HX [1] [0], HY [1] [0]) using the drawing area number G = 1. ~ H [1] [3] (HX [1] [3], HY [1] [3]). Hereinafter, the same applies to the third and fourth drawing regions 62 and 63.

  As will be described below, each drawing in the first to fourth drawing regions 60 to 63 is calculated by calculating the difference between the actual positions of the first to sixteenth alignment holes 40 to 55 and the positions where they should originally be located. Data is corrected. The calculation of the position shift of the first to sixteenth alignment holes 40 to 55 is performed by the apparatus side data processing unit 26, and the correction of the drawing data is performed by the control unit side data processing unit 22 as described later. To be implemented.

First, in order to photograph the first to sixteenth alignment holes 40 to 55 on the actual drawing object, drawing data is transmitted via the control unit side data processing unit 22, the communication processing unit 20, and the second sequence control unit 24. To the control unit side data processing unit 22. Then, as shown in the equations (3) and (4), the coordinates (HX [G] [N] of the point H [G] [N] at which the center point of the first to sixteenth alignment holes 40 to 55 should be located. ], HY [G] [N]) are added with the coordinates (BOX, BOY) of the end point Q of the drawing object 38, and the coordinates (HX [G], HY [N]) in the drawing object coordinate system are It is converted into coordinates (HX ′ [G] [N], HY ′ [G] [N]) in the drawing coordinate system.

HX ′ [G] [N] = HX [G] [N] + BOX (G, N = 0, 1, 2, 3) (3)
HY ′ [G] [N] = HY [G] [N] + BOY (G, N = 0, 1, 2, 3) (4)

  Subsequently, the second sequence control unit 24 performs measurement based on the coordinates (HX ′ [G] [N], HY ′ [G] [N]) in the drawing coordinate system of the first to sixteenth alignment holes 40 to 55. The control unit 28 and the drawing table control unit 30 are controlled so that the first to sixteenth alignment holes 40 to the first to third hole measurement cameras 56 to 58 (see FIGS. 3 and 4) are as follows. 55 is photographed.

  The drawing table control unit 30 moves the drawing table 36 along the positive direction of the X axis indicated by the arrow A, and any one of the first to sixteenth alignment holes 40 to 55 is used for the first to third hole measurement. The drawing table 36 is stopped when it is located within the photographing range of the cameras 56 to 58. Then, under the control of the measurement control unit 28, the first to third hole measurement cameras 56 to 58 photograph one of the first to sixteenth alignment holes 40 to 55 included in each of the photographing ranges 56A to 58A. . First to third movement distances X1 to X3 that are movement distances of the drawing table 36 are calculated as described later. The first to third hole measuring cameras 56 to 58 are installed in parallel to the Y axis of the drawing coordinate system, and the imaging range of the first to third hole measuring cameras 56 to 58 in the drawing coordinate system is set. The center X coordinates are all equal, and these X coordinates are represented by COX (see FIG. 5).

The drawing table control unit 30 first photographs the eleventh and twelfth alignment holes 50 and 51, the fifteenth and sixteenth alignment holes 54 and 55 (hereinafter referred to as a first alignment hole group) after the drawing object 38 is installed. Therefore, the drawing table 36 is moved until HX3 which is the X coordinate of these center points coincides with the X coordinate COX of the first to third hole measurement cameras 56 to 58. Accordingly, the first movement distance X1, which is the first movement amount of the drawing table 36, is calculated as shown in the equation (5). Since the X coordinate of each alignment hole in the first alignment hole group may be slightly different with the deformation of the drawing target 38, any one position of the predetermined first alignment hole group is determined. Based on the above, the first movement distance X1 is calculated. The same applies to the calculation of the movement amount below.

X1 = COX−HX3 (5)

When the drawing table 36 moves by the first movement distance X1 and stops, the first to third hole measurement cameras 56 to 58 photograph the first alignment hole group.

  Based on this imaging result, coordinates indicating the actual positions of the center points of the eleventh and twelfth alignment holes 50 and 51, the fifteenth and sixteenth alignment holes 54 and 55 belonging to the first alignment hole group in the drawing coordinate system ( hx [G] [N], hy [G] [N]) are calculated as follows. First, alignment holes in a coordinate system having an origin R (hereinafter referred to as an imaging coordinate system) in the first to third imaging ranges 56A to 58A, which are the imaging ranges of the first to third hole measuring cameras 56 to 58, respectively. The position occupied by the center point (cx [G] [N], cy [G] [N]) is calculated by analyzing the captured image using the diameter HR of the alignment hole. Taking the eleventh alignment hole 51 photographed within the first photographing range 56A of the first hole measurement camera 56 as an example, the positions in the drawing coordinate system are (hx [2] [3], hy [2] [3]. The coordinates of the center point in the imaging coordinate system are (cx [2] [3], cy [2] [3]) (see FIG. 5).

Note that the X coordinate of the origin R in the imaging coordinate system coincides with COX, which is the X coordinate of the first to third hole measuring cameras 56 to 58 in the drawing coordinate system. Further, although the first to third hole measurement cameras 56 to 58 are the same cameras, although the installation locations are different, the first shooting range is also the same for the second shooting range 57A and the third shooting range 58A. The same coordinate system as 56A is defined. Therefore, the coordinates (hx [G] [N], hy [G] [N]) indicating the actual positions of the center points of the eleventh and twelfth alignment holes 50 and 51, and the fifteenth and sixteenth alignment holes 54 and 55. Is expressed as in equations (6) and (7).

hx [G] [N] = COX−HX3 + cx [G] [N] (6)
hy [G] [N] = cy [G] [N] (7)

Following the photographing of the first alignment hole group, the third and fourth alignment holes 42 and 43, the seventh to tenth alignment holes 46 to 49, the thirteenth and fourteenth alignment holes 52 and 53 (hereinafter referred to as the second alignment hole group). ) Is shot. For this reason, the drawing table control unit 30 determines that HX2, which is the X coordinate of the center point of the third and fourth alignment holes 42, 43, seventh, and eighth alignment holes 46, 47, is used for measuring the first to third holes. The drawing table 36 is moved until it matches the X coordinate COX of the cameras 56-58. Therefore, the second movement distance X2, which is the second movement amount of the drawing table 36, is calculated as shown in equation (8).

X2 = HX3-HX2 (8)

When the drawing table 36 moves and stops by the second movement distance X2, the first to third hole measurement cameras 56 to 58 photograph the second alignment hole group.

Based on the imaging result, coordinates (hx [G] [N], hy [G] [N]) indicating the actual position of the center point of each alignment hole belonging to the second alignment hole group in the drawing coordinate system are It is calculated in the same manner as for one alignment hole group, and is expressed as in equations (9) and (10).

hx [G] [N] = COX−HX2 + cx [G] [N] (9)
hy [G] [N] = cy [G] [N] (10)

In the second alignment hole group, the ninth and tenth alignment holes 48 and 49, the thirteenth and fourteenth alignment holes 52 and 53 having the same X-coordinate value at the center point are also the first to third. Since it is included in the imaging ranges 56A to 58A, all the alignment holes constituting the second alignment hole group can be simultaneously imaged.

After photographing the second alignment hole group, in order to photograph the first and second alignment holes 40 and 41, the fifth and sixth alignment holes 44 and 45 (hereinafter referred to as the third alignment hole group), The drawing table 36 is controlled so that HX1, which is the X coordinate of the center point, moves until it matches the X coordinate COX of the first to third hole measurement cameras 56-58. Therefore, the movement amount X3 of the third movement of the drawing table 36 is calculated as shown in the equation (11).

X3 = HX2-HX1 (11)

When the drawing table 36 moves and stops by the movement amount X3, the first to third hole measuring cameras 56 to 58 photograph the third alignment hole group.

Based on the imaging result, coordinates (hx [G] [N], hy [G] [N]) indicating the actual position of the center point of each alignment hole belonging to the third alignment hole group in the drawing coordinate system are It is calculated in the same manner as the first and second alignment hole groups, and is expressed as in Expression (12) and Expression (13).

hx [G] [N] = COX−HX1 + cx [G] [N] (12)
hy [G] [N] = cy [G] [N] (13)

  As described above, the movement of the drawing table 36 and the photographing by the first to third hole measuring cameras 56 to 58 after the stop are repeated under the control of the second sequence control unit 24, and the first to the 16th. Calculation of the coordinates indicating the actual positions of the alignment holes 40 to 55 ends. The coordinate values calculated in this way are used as mark position data indicating the actual positions of the first to sixteenth alignment holes 40 to 55 on the drawing object 38 via the second sequence control unit 24 and the communication processing unit 20. And sent to the control unit side data processing unit 22.

  FIG. 6 is a diagram schematically showing a drawing area based on the drawing data and an actual drawing area based on the mark position data.

  The control unit side data processing unit 22 detects the positions and contours of the first to fourth actually measured drawing areas 70 to 73 that are actual drawing areas from the mark position data (see FIG. 6A). The difference in the center of gravity between the first to fourth actual drawing areas 70 to 73 and the first to fourth drawing areas 60 to 63, the size ratio, and the first to the first to fourth drawing areas 60 to 63. The control unit side data processing unit 22 corrects the drawing data based on the rotation angles of the fourth measured drawing regions 70 to 73. Hereinafter, with reference to the first drawing area 60 and the first actually measured drawing area 70, correction of the drawing data by the control unit side data processing unit 22 will be described (see FIG. 6B). Note that the difference between the first to fourth drawing areas 60 to 63 and the corresponding first to fourth actually measured drawing areas 70 to 73 is actually slight, but here, for ease of explanation. Have been exaggerated.

The coordinates GCX [0], GCY [0] in the drawing coordinate system of the center of gravity C of the first drawing area 60 are the coordinates of the first to fourth alignment holes 40-43 (HX ′ [G] [N], HY ′ [ G] [N]) (G = 0, N = 0, 1, 2, 3), and is expressed as in equations (14) and (15).

GCX [0] = (HX ′ [0] [0] + HX ′ [0] [3]) / 2 (14)
GCY [0] = (HY ′ [0] [0] + HY ′ [0] [1]) / 2 (15)

On the other hand, the coordinates gcx [0] and gcy [0] of the center of gravity C ′ of the first actually measured drawing area 70 are the first to fourth alignment holes 40 to 43 that are actually measured points, respectively. 4 Using the position coordinates (hx [G] [N], hy [G] [N]) (G = 0, N = 0, 1, 2, 3) of the measured alignment holes 80 to 83, the equation (16) And (17).

gcx [0] = (hx [0] [0] + hx [0] [1] + hx [0] [2] + hx [0] [3]) / 4 (16)
gcy [0] = (hy [0] [0] + hy [0] [1] + hy [0] [2] + hy [0] [3]) / 4 (17)

Since the second to fourth drawing areas 61 to 63 and the second to fourth actual drawing areas 71 to 73 are calculated in the same manner, the difference between the center positions of the actual drawing areas and the corresponding drawing areas is shown. The arrangement offset off [G] (offx [G], offy [G]), which is vector data, is expressed as in equations (18) to (23) (G = 0, 1, 2, 3).

offx [G] = gcx [G] −GCX [G] (18)
gcx [G] = (hx [G] [0]) + hx [G] [1] + hx [G] [2] + hx [G] [3]) / 4 (19) GCX [G] = ( HX ′ [G] [0] + HX ′ [G] [3]) / 2 (20)

offy [G] = gcy [G] −GCY [G] (21)
gcy [G] = (hy [G] [0] + hy [G] [1] + hy [G] [2] + hy [G] [3]) / 4 (22)
GCY [G] = (HY ′ [G] [0] + HY ′ [G] [1]) / 2 (23)

Next, calculation of correction data based on a size ratio (scale ratio) between the first to fourth actual drawing areas 70 to 73 and the first to fourth drawing areas 60 to 63 will be described. When the length of the long side (side parallel to the X axis) is MDX and the length of the short side (side parallel to the Y axis) is MDY in the outline of the first drawing region 60, these are expressed by the following equation (24). And (25).

MDX = (HX ′ [0] [3] −HX ′ [0] [0]) (24)
MDY = (HY ′ [0] [1] −HY ′ [0] [0]) (25)

On the other hand, the average length mdx [0] of the long side and the average length mdy [0] of the short side of the first actually measured drawing area 70 are the position coordinates (hx [ G] [N], hy [G] [N]) (G = 0, N = 0, 1, 2, 3), and are expressed as in Equation (26) and Equation (27).

mdx [0] = (hx [0] [3] −hx [0] [0] + hx [0] [2] −hx [0] [1]) / 2 (26)
mdy [0] = (hy [0] [1] −hy [0] [0] + hy [0] [2] −hy [0] [3]) / 2 (27)

Accordingly, the X-axis scale ratio scx [0] and the Y-axis scale ratio scy [0] indicating the ratio of the contour length of the first actual measurement drawing area 70 to the contour length of the first drawing area 60 are ( 28) and (29).

scx [0] = mdx [0] / MDX (28)
scy [0] = mdy [0] / MDY (29)

The second to fourth drawing areas 61 to 63 and the second to fourth actually measured drawing areas 71 to 73 are similarly calculated, and the long side length MDX and the short side length MDY are the first to fourth. Since the drawing areas are common to the drawing areas 60 to 63, the X-axis scale ratio scx [G], which is the ratio of the contour length of each actually measured drawing area to the contour length of the corresponding drawing area, and the Y-axis The scale ratio scy [G] is expressed by the equations (30) and (31) (G = 0, 1, 2, 3).

scx [G] = mdx [G] / MDX
= ((Hx [G] [3] −hx [G] [0] + hx [G] [2] −hx [G] [1]) / 2) / (HX ′ [0] [3] −HX ′ [0] [0]) (30)
scy [G] = mdy [G] / MDY
= ((Hy [G] [1] -hy [G] [0] + hy [G] [2] -hy [G] [3]) / 2) / (HY '[0] [1] -HY' [0] [0]) (31)

Next, calculation of the rotation angle θ, which is the inclination of the corresponding first to fourth actual drawing areas, for the first to fourth drawing areas 60 to 63 will be described. Of the four sides forming the contour of the first measured drawing area 70, the side connecting the outer periphery of the first measured alignment hole 80 and the outer periphery of the fourth measured alignment hole 83 corresponds to the contour side of the corresponding first drawing region 60. The slope θ ₀ (dy / dx) with respect to is expressed as in equation (32). The rotation angle θ [0] (rad) of the first actually measured drawing area 70 with respect to the first drawing area 60 is an inclination of four sides θ _{0 to} θ ₃ (dy) forming the contour of the actually measured drawing area. / Dx), it is obtained by performing the calculation of equation (32) for all four sides and averaging them. Therefore, the rotation angle θ [0] (rad) of the first actually measured drawing area 70 is expressed as in the equations (33) to (35).

θ ₀ = (hy [0] [3] −hy [0] [0]) / (hx [0] [3] −hx [0] [0]) (32)
θ [0] (rad) = ATAN (dy / dx) (33)
dx = (hx [0] [3] −hx [0] [0] + hy [0] [2] −hy [0] [3] + hx [0] [2] −hx [0] [1] + hy [ 0] [1] -hy [0] [0])
... (34)
dy = (hy [0] [3] −hy [0] [0] + hx [0] [3] −hx [0] [2] + hy [0] [2] −hy [0] [1] + hx [ 0] [0] -hx [0] [1])
... (35)

Since the rotation angle θ [1-3] is calculated for the second to fourth drawing regions 71 to 73 as in the first actual measurement drawing region 70, the general formula of the rotation angle θ [G] is (36). To (38).

θ [G] (rad) = ATAN (dy / dx) (36)
dx = (hx [G] [3] −hx [G] [0] + hy [G] [2] −hy [G] [3] + hx [G] [2] −hx [G] [1] + hy [ G] [1] -hy [G] [0])
... (37)
dy = (hy [G] [3] −hy [G] [0] + hx [G] [3] −hx [G] [2] + hy [G] [2] −hy [G] [1] + hx [ G] [0] -hx [G] [1])
... (38)

  Thus, the arrangement offset off [G], the X-axis and Y-axis scale ratios scx [G], scy [G] rotation angle θ [G] calculated for each of the first to fourth actually measured drawing regions 70 to 73 (whichever Also, based on G = 0, 1, 2, 3), the vector data indicating all imposition patterns included in the first to fourth drawing areas 60 to 63 as the original drawing data is corrected, and the corrected drawing is performed. Convert to data. That is, first, the arrangement offset off [G] is added to the coordinates of the starting point of the drawing data, which is vector data composed of the starting point and the ending point, to obtain the corrected starting point coordinates. Next, with the corrected start point as a reference, the lengths in the X-axis direction and the Y-axis direction from the new end point are changed to the original lengths, respectively, and the X-axis and Y-axis scale ratios scx [G], scy [G] The coordinates of the new end point are tentatively determined so as to have a length multiplied by. Further, the corrected end point is finally determined so that the corrected vector data including the corrected start and end points is rotated by the rotation angle θ [G] with respect to the original vector data. In this way, the drawing data corresponding to the first to fourth drawing areas 60 to 63 is converted into corrected drawing data composed of the corrected start and end points, respectively.

  As described above, when the drawing data corresponding to each drawing area is converted into the corrected drawing data, the control unit side data processing unit 22 further integrates the corrected drawing data for each drawing area, A single corrected drawing data is generated. The single corrected drawing data generated in this way is sent to the apparatus-side data processing unit 26 via the communication processing unit 20 and the second sequence control unit 24. The apparatus-side data processing unit 26 forms an image for drawing on the drawing object 38 based on the corrected drawing data. As a result, the exposure control unit 32 controls the light source 37 so as to continuously expose all imposition patterns on the drawing object 38, thereby drawing the drawing object 38.

  FIG. 7 is a flowchart showing a drawing data notification routine performed in the drawing control unit 12.

  When the user operates the operation panel 16 to instruct to measure the positions (mark positions) of the first to sixteenth alignment holes 40 to 55 of the drawing target 38, the drawing data notification routine is started. In step S701, the control unit side data processing unit 22 reads the hole information and the drawing object information from the drawing data recorded in the data recording unit 23, and proceeds to step S702. In step S702, the communication processing unit 20 transmits the hole information and the drawing object information read by the control unit side data processing unit 22 to the second sequence control unit 24 on the drawing device 14 side, and the process proceeds to step S703. In step S703, the communication processing unit 20 transmits a signal for transmitting an instruction to measure the mark position to the second sequence control unit 24, and the drawing data notification routine ends.

  FIG. 8 is a flowchart showing a mark position measurement routine performed in the drawing apparatus 14.

  The mark position measurement routine is started when the second sequence control unit 24 on the drawing apparatus 14 side receives a signal prompting the start of mark position measurement. In step S801, the second sequence control unit 24 transmits the hole information and drawing object information received from the communication processing unit 20 to the apparatus-side data processing unit 26, and the process proceeds to step S802. In step S802, the apparatus-side data processing unit 26 determines the mark position coordinates (HX [G] [N], HY [G] [N]) (G, N = 0, 1, 2, and 3) are converted into a drawing coordinate system (see equations (3) and (4)), and the process proceeds to step S 803. In step S803, the apparatus-side data processing unit 26 uses the drawing table 36 necessary for alignment hole photographing by the first to third hole measurement cameras 56 to 58 based on the mark position converted into the drawing coordinate system. First to third movement distances X1 to X3, which are movement amounts, are calculated (see equations (5), (8), and (11)), and the process proceeds to step S804. In step S804, the apparatus-side data processing unit 26 transmits the mark position in the drawing coordinate system and the first to third movement distances X1 to X3 to the second sequence control unit 24, and the process proceeds to step S805.

  In step S805, based on the number HN of the first to sixteenth alignment holes 40 to 55 included in the drawing data, the second sequence control unit 24 determines whether or not photographing of all mark positions has been completed. If it is determined that shooting at all mark positions has not been completed, the process proceeds to step S806. If it is determined that shooting at all mark positions has been completed, the process proceeds to step S808. In step S806, the second sequence control unit 24 controls the drawing table control unit 30 so as to move the drawing table 36 by a predetermined movement amount, and marks the first to third hole measuring cameras 56 to 58. The measurement control unit 28 is controlled to photograph the position, and the process proceeds to step S807. In step S807, the measurement control unit 28 calculates the actual coordinates of the alignment hole based on the mark position calculated by analyzing the captured image (expressions (6), (7), (9), (10)). Equation (12) and the calculated coordinate data are transmitted to the second sequence control unit 24, and the process again proceeds to step S805.

  On the other hand, in step S808, the second sequence control unit 24 transmits data (mark position data) indicating all the calculated mark positions to the communication processing unit 20 on the drawing control unit 12 side, and the mark position measurement routine is performed. finish.

  FIG. 9 is a flowchart showing a drawing data correction routine performed in the drawing control unit 12.

  The drawing data correction routine is started when the control unit side data processing unit 22 receives the mark position data via the communication processing unit 20. In step S901, the control unit side data processing unit 22 calculates an arrangement offset off [G], which is vector data indicating the difference in the center of gravity between each measured drawing area and the corresponding drawing area (Equations (14) to (23). ), And the process proceeds to step S902.

  In step S902, the control unit side data processing unit 22 calculates the scale ratios scx [G] and scy [G], which are the size ratios between the respective actually measured drawing areas and the corresponding drawing areas (formulas (24) to (31)). Then, go to step S903.

  In step S903, the control unit side data processing unit 22 calculates the rotation angle θ [G] that is the inclination of the first to fourth actually measured drawing regions with respect to each drawing region (see equations (32) to (38)). Then, the process proceeds to step S904.

  In step S904, based on the calculated arrangement offset off [G], scale ratio scx [G], scy [G], and rotation angle θ [G] (G = 0, 1, 2, 3), the control unit side The data processing unit 22 corrects the drawing data for each of the first to fourth drawing regions 60 to 63 to convert it into corrected drawing data, and the process proceeds to step S905. In step S905, the control unit side data processing unit 22 integrates the corrected drawing data for each drawing region, thereby generating a single corrected drawing data for the entire drawing target 38. Then, the control unit side data processing unit 22 transmits the generated corrected drawing data to the data recording unit 23 to record it, thereby completing the drawing data correction routine.

  FIG. 10 is a flowchart showing a drawing routine performed in the drawing device 14.

  When the user operates the operation panel 16 to instruct to start drawing of the drawing object 38, the drawing routine is started. In step S101, under the control of the first sequence control unit 18, the corrected drawing data transmitted from the data recording unit 23 via the control unit side data processing unit 22 and the communication processing unit 20 is subjected to the second sequence control. The unit 24 receives the process and proceeds to step S102. In step S102, the second sequence control unit 24 controls the exposure control unit 32 to draw a predetermined imposition pattern on the drawing object 38 based on the corrected drawing data, and as a result, the light source 37 is drawn. Drawing is performed by exposing the body 38 to light beams. When the drawing of the drawing object 38 is finished, the exposure control unit 32 sends a signal for indicating the end of drawing to the operation panel 16 to the communication processing unit 20 on the drawing control unit 12 side via the second sequence control unit 24. By sending the data, the drawing routine ends.

  As described above, according to the present embodiment, not only the arrangement of the first to fourth drawing areas 60 to 63 on the drawing object 38 but also the drawing data corrected for the deformation in each drawing area is obtained. Can be generated. By exposing the object to be drawn based on the corrected drawing data, highly accurate drawing can be performed.

  The alignment holes that are opened in the first to fourth drawing areas 60 to 63 are preferably provided at the end of each drawing area in order to increase the accuracy of the corrected drawing data. It is not limited to the embodiment. However, in order to maintain the accuracy of the corrected drawing data, it is necessary to provide three or more alignment holes for each drawing region. Further, a part of the alignment hole may be shared by the drawing areas adjacent to each other. For example, as shown by the drawing object 36 in FIG. 11, three alignment holes are included in each drawing area, including those shared by drawing areas adjacent to each other among the first to fourth drawing areas 60 to 63. May be provided.

  The shape and number of drawing areas are not limited to this embodiment.

  The number and arrangement of hole measurement cameras are not limited to this embodiment, but in order to increase the accuracy of alignment hole measurement and shorten the measurement time, all alignment holes are not moved without moving the hole measurement camera. It is preferable that photography can be performed. For this reason, it is preferable to install a plurality of hole measurement cameras.

It is a figure which shows exposure apparatus roughly. It is a top view which shows the to-be-drawn body installed in the drawing table. It is a top view which shows the to-be-drawn body installed in the drawing table. It is a perspective view which shows the to-be-drawn body installed in the drawing table. It is a figure which shows the movement amount which a drawing table moves for imaging | photography of a to-be-drawn body. It is a figure which shows roughly the drawing area based on drawing data, and an actual drawing area. It is a flowchart which shows the drawing data notification routine in a drawing control part. It is a flowchart which shows the mark position measurement routine in a drawing apparatus. It is a flowchart which shows the drawing data correction routine in a drawing control part. It is a flowchart which shows the drawing routine in a drawing apparatus. It is a figure which shows the to-be-drawn body which provided the alignment hole of 3 points | pieces in each drawing area | region.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Exposure apparatus 12 Drawing control part 14 Drawing apparatus 20 Communication processing part 22 Control part side data processing part (Drawing data reading means and drawing data correction means)
23 Data recording unit (drawing data recording means)
24 second sequence control unit 26 apparatus side data processing unit (mark position data generating means)
30 Drawing table control unit (drawing object moving means)
32 Exposure control unit (drawing means)
36 Drawing table 37 Light source (drawing means)
40 to 55 1st to 16th alignment holes (marks)
56-58 Cameras for measuring first to third holes (mark position detecting means / camera)
60-63 1st-4th drawing area (drawing data drawing area)
70-73 1st-4th measurement drawing area (actual drawing area)

Claims (10)

An exposure apparatus for drawing an object to be drawn in which marks for defining positions and contours of a plurality of drawing areas including an imposition pattern are represented on the surface,
Mark position detecting means for detecting the actual position of the mark;
Mark position data generating means for generating mark position data indicating the actual position of the mark;
Drawing means for exposing the surface of the drawing object with the imposition pattern;
Drawing data recording means for recording drawing data including vector data indicating the imposition pattern to be drawn and mark position information indicating an original position of the mark;
Drawing data reading means for reading the drawing data;
Based on the mark position data, the actual drawing area position and outline are detected, and the drawing data is corrected for each corresponding drawing area based on the actual drawing area position and outline, thereby correcting the drawing data. Drawing data correction means
An exposure apparatus that draws the imposition pattern by exposing the object to be drawn based on the corrected drawing data.   The drawing data correction means includes a size ratio between the actual drawing area and the drawing area of the drawing data, a difference in the position of the center of gravity, and a rotation angle of the actual drawing area with respect to the drawing area of the drawing data. The exposure apparatus according to claim 1, wherein the drawing data is corrected to obtain the corrected drawing data.   The exposure apparatus according to claim 1, wherein the drawing area has a rectangular area.   The exposure apparatus according to claim 1, wherein the mark is at an end of the drawing area.   5. The exposure apparatus according to claim 4, wherein there are at least three marks for each drawing area. A drawing table for installing the drawing object; and a drawing object moving means for moving the drawing table in a predetermined direction;
The exposure apparatus according to claim 1, wherein the mark position detection unit is a camera that photographs the drawing object moving in the predetermined direction.   The exposure apparatus according to claim 6, wherein the mark position data generation unit generates the mark position data based on the position of the mark in a coordinate system of a shooting range of the camera.   2. The exposure apparatus according to claim 1, wherein the drawing data correction unit sets the drawing data to a single corrected drawing data after correcting the drawing data for each corresponding drawing area.   The exposure apparatus according to claim 8, wherein the drawing unit draws all the imposition patterns by continuously exposing the drawing object to the drawing object. A drawing method for drawing a drawing object in which marks for defining positions and contours of a plurality of drawing areas including an imposition pattern are represented on a surface,
Recording drawing data including vector data indicating the imposition pattern to be drawn and mark position information indicating an original position of the mark;
Read the drawing data,
Detecting the actual position of the mark based on the drawing data;
Generating mark position data indicating the actual position of the mark;
Based on the mark position data, the actual drawing area position and outline are detected, and the drawing data is corrected for each corresponding drawing area based on the actual drawing area position and outline, thereby correcting the drawing data. age,
A drawing method comprising: drawing the imposition pattern by exposing the object to be drawn based on the corrected drawing data.

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