JP2005300252A5 - - Google Patents

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JP2005300252A5
JP2005300252A5 JP2004113999A JP2004113999A JP2005300252A5 JP 2005300252 A5 JP2005300252 A5 JP 2005300252A5 JP 2004113999 A JP2004113999 A JP 2004113999A JP 2004113999 A JP2004113999 A JP 2004113999A JP 2005300252 A5 JP2005300252 A5 JP 2005300252A5
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wavelength
sample
measurement light
measuring
intensity
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JP2005300252A (en
JP4455130B2 (en
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分光器によって波長分解された計測光を試料に照射し、該試料を経由した前記計測光の強度を検出して前記試料の分光光学特性を計測する方法において、
前記分光器において設定された設定波長と前記分光器から出射される前記計測光の波長との波長ずれを予め求めるステップと、
前記波長ずれに基づいて前記試料の分光光学特性を求めるステップとを有することを特徴とする分光光学特性計測方法。 In a method of irradiating a sample with wavelength-resolved measurement light by a spectroscope, detecting the intensity of the measurement light passing through the sample, and measuring the spectroscopic optical characteristics of the sample,
Obtaining in advance a wavelength shift between the set wavelength set in the spectrometer and the wavelength of the measurement light emitted from the spectrometer;
And obtaining a spectral optical characteristic of the sample based on the wavelength shift. 前記波長ずれが最小となる設定波長を選定するステップをさらに有し、
前記試料の分光光学特性を求めるステップにおいて、該選定された設定波長の計測光で前記試料を経由した該計測光の強度を検出することを特徴とする請求項１に記載の分光光学特性計測方法。 Selecting a set wavelength that minimizes the wavelength shift;
The method for measuring a spectroscopic optical characteristic according to claim 1, wherein in the step of obtaining the spectroscopic optical characteristic of the sample, the intensity of the measurement light passing through the sample is detected with the measurement light having the selected set wavelength. . 前記試料の分光光学特性を求めるステップにおいて、前記設定波長に前記波長ずれの量を加味して前記計測光の波長とし、その計測光の波長と前記計測光の強度とを対応づけることを特徴とする請求項１に記載の分光光学特性計測方法。   In the step of obtaining the spectroscopic optical characteristics of the sample, the wavelength of the measurement light is taken into account by adding the amount of the wavelength shift to the set wavelength, and the wavelength of the measurement light is associated with the intensity of the measurement light, The spectroscopic optical property measurement method according to claim 1. 前記波長ずれを予め求めるステップは、前記試料の分光光学特性を計測する際の前記分光器の波長分解能よりも高い波長分解能において前記計測光の波長分解を行うステップを含むことを特徴とする請求項１に記載の分光光学特性計測方法。   The step of obtaining the wavelength shift in advance includes a step of performing wavelength decomposition of the measurement light at a wavelength resolution higher than the wavelength resolution of the spectrometer when measuring the spectroscopic optical characteristics of the sample. 1. The method for measuring spectroscopic optical characteristics according to 1. 分光器によって波長分解された計測光を試料に照射し、該試料を経由した前記計測光の強度を検出して前記試料の分光光学特性を計測する方法において、
該試料の分光光学特性計測時の波長分解能において前記計測光の波長ごとの光強度を予め計測するステップと、
該光強度が極大又は極小となる前記設定波長を選定するステップと、
該選定された設定波長の計測光で前記試料を経由した該計測光の強度を検出するステップを有することを特徴とする分光光学特性計測方法。 In a method of irradiating a sample with wavelength-resolved measurement light by a spectroscope, detecting the intensity of the measurement light passing through the sample, and measuring the spectroscopic optical characteristics of the sample,
Measuring in advance the light intensity for each wavelength of the measurement light in the wavelength resolution at the time of measuring the spectral optical characteristics of the sample;
Selecting the set wavelength at which the light intensity is maximized or minimized;
A method for measuring spectroscopic optical characteristics, comprising a step of detecting the intensity of the measurement light passing through the sample with the measurement light having the selected set wavelength. 前記計測光が輝線スペクトルを有する光であって、前記選定された設定波長が実質的に該輝線スペクトルの波長を含むことを特徴とする請求項２又は請求項５に記載の分光光学特性計測方法。   6. The spectroscopic optical characteristic measurement method according to claim 2, wherein the measurement light is light having an emission line spectrum, and the selected set wavelength substantially includes the wavelength of the emission line spectrum. . 複数の前記選定された設定波長における前記試料の分光光学特性結果を用いて、波長補間により前記選定された設定波長以外の波長における前記試料の分光光学特性を求めるステップをさらに有することを特徴とする請求項２又は請求項５に記載の分光光学特性計測方法。   The method further comprises the step of obtaining spectral optical characteristics of the sample at wavelengths other than the selected set wavelength by wavelength interpolation using a plurality of spectral optical characteristics results of the sample at the selected set wavelengths. 6. The spectroscopic optical property measurement method according to claim 2 or 5. 前記分光光学特性は、反射率、透過率、光電子スペクトルのうち少なくともいずれか１であることを特徴とする請求項１から請求項７のうちいずれか１項に記載の分光光学特性計測方法。   The spectral optical characteristic measurement method according to claim 1, wherein the spectral optical characteristic is at least one of reflectance, transmittance, and a photoelectron spectrum. 計測光を射出する光源と、
前記計測光を設定波長に基づいて波長分解する分光器と、
波長分解されて前記分光器から出射される前記計測光を試料に向けて照射する光学系と、
前記試料を経由した計測光の強度を検出する検出器と、
前記設定波長と前記分光器から出射される前記計測光の波長との波長ずれを算出し、その波長ずれに基づいて前記設定波長を決定する制御部とを有することを特徴とする分光光学特性計測システム。 A light source that emits measurement light;
A spectrometer for wavelength-resolving the measurement light based on a set wavelength;
An optical system for irradiating the measurement light emitted from the spectroscope after being wavelength-resolved toward a sample;
A detector for detecting the intensity of measurement light passing through the sample;
Spectral optical characteristic measurement, comprising: a controller that calculates a wavelength shift between the set wavelength and the wavelength of the measurement light emitted from the spectrometer, and determines the set wavelength based on the wavelength shift system.
JP2004113999A 2004-04-08 2004-04-08 Spectral optical characteristic measurement method and spectral optical characteristic measurement system Expired - Fee Related JP4455130B2 (en)

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JP2010001837A Division JP4878393B2 (en) 2010-01-07 2010-01-07 Spectral optical characteristic measurement method and spectral optical characteristic measurement system

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JP2005300252A JP2005300252A (en) 2005-10-27
JP2005300252A5 true JP2005300252A5 (en) 2007-06-07
JP4455130B2 JP4455130B2 (en) 2010-04-21

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JP2008008852A (en) * 2006-06-30 2008-01-17 Osaka Electro-Communication Univ Work function microscope and photoelectric microscope

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