JP2005291893A - Cooling device and mirror cooled sensor - Google Patents

Abstract

An object of the present invention is to prevent the cooling performance from being lowered.
A bottom surface 22-2 of a heat sink cover 22 has an arc shape. Thus, when the bottom surface 22-2 of the heat sink cover 22 is placed in contact with the horizontal plane 400, the center of gravity of the mirror-cooled sensor 201A is unstable. That is, when the bottom surface 22-2 of the heat sink cover 22 is placed in contact with the horizontal plane 400, the mirror-cooled sensor 201A cannot maintain its posture and rolls in the front-rear direction and the left-right direction. As a result, it is not natural that the thermoelectric cooling element 2 is placed on the upper side in the vertical direction and the heat sink 16 is placed on the lower side in the vertical direction, and the heat transfer efficiency in the heat pipe 13 is unconsciously placed. It becomes like this. The shape of the bottom surface 22-2 may be hemispherical, trapezoidal, triangular pyramid, conical, or the like.
[Selection] Figure 9

Description

  This invention uses a thermoelectric cooling element in which one surface is a low temperature side and the other surface is a high temperature side. The present invention relates to a mirror-cooled sensor.

  Conventionally, as a humidity measurement method, a dew point detection method is known in which a dew point is detected by measuring the temperature when the temperature of a gas to be measured is reduced and a part of water vapor contained in the gas to be measured is condensed. ing. For example, in Non-Patent Document 1, a mirror is cooled using a cryogen, a refrigerator, an electronic cooler, or the like, a change in the intensity of reflected light on the mirror surface of the cooled mirror is detected, and the temperature of the mirror surface at this time is detected. A mirror-cooled dew point meter that detects the dew point of the moisture in the gas to be measured is described.

  There are two types of mirror-cooled dew point meters depending on the type of reflected light used. One is a specularly reflected light detection method that uses specularly reflected light (see, for example, Patent Document 1), and the other is a scattered light detection method that uses scattered light (see, for example, Patent Document 2).

[Specular reflection detection method]
FIG. 15 shows the configuration of a sensor section (mirror-cooled sensor) in a conventional mirror-cooled dew point meter that employs a regular reflection light detection method. The mirror-cooled sensor 101 includes a chamber 1 into which a gas to be measured is introduced, and a thermoelectric cooling element (Peltier element) 2 provided at the bottom of the chamber 1. A mirror 3 is attached to the cooling surface 2-1 of the thermoelectric cooling element 2, and a radiation fin 5 is attached to the heating surface 2-2 of the thermoelectric cooling element 2 via a heat conductor (heat pipe) 4. Yes. That is, one end 4-1 of the heat pipe 4 is attached to the heating surface 2-1 of the thermoelectric cooling element 2, and the radiating fin 5 is attached to the other end 4-2 of the heat pipe 4 separated from the thermoelectric cooling element 2. It has been.

  Further, a heat insulating member 6 is provided at one end 4-1 of the thermoelectric cooling element 2 and the heat pipe 4 so as to cover the periphery thereof, and a temperature detecting element 7 is attached to the upper surface (mirror surface) 3-1 of the mirror 3. It has been. In addition, a light emitting element 8 that irradiates light obliquely onto the mirror surface 3-1 of the mirror 3 and a regular reflection light of the light emitted from the light emitting element 8 to the mirror surface 3-1 are provided on the upper portion of the chamber 1. A light receiving element 9 for receiving light is provided.

  In this mirror cooled sensor 101, the mirror surface 3-1 in the chamber 1 is exposed to the gas to be measured that flows into the chamber 1. If condensation does not occur on the mirror surface 3-1, almost all of the light emitted from the light emitting element 8 is regularly reflected and received by the light receiving element 9. Therefore, when there is no condensation on the mirror surface 3-1, the intensity of the reflected light received by the light receiving element 9 is high.

  When the current to the thermoelectric cooling element 2 is increased and the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is lowered, water vapor contained in the measured gas is condensed on the mirror surface 3-1, and the water molecules Part of the light emitted from the light emitting element 8 is absorbed or irregularly reflected. Thereby, the intensity of the reflected light (regularly reflected light) received by the light receiving element 9 is reduced. By detecting the change in the specularly reflected light on the mirror surface 3-1, it is possible to know the change in the state on the mirror surface 3-1, that is, that moisture (water droplets) has adhered to the mirror surface 3-1. Further, by measuring the temperature of the mirror surface 3-1 at this time with the temperature detecting element 7, the dew point of the moisture in the gas to be measured can be known.

(Scattered light detection method)
FIG. 16 shows a configuration of a sensor section (mirror-cooled sensor) in a conventional mirror-cooled dew point meter that employs the scattered light detection method. The mirror-cooled sensor 102 has substantially the same configuration as the mirror-cooled sensor 101 that employs the regular reflection light detection method, but the mounting position of the light receiving element 9 is different. In this mirror-cooled sensor 102, the light receiving element 9 is provided at a position for receiving scattered light, not at a position for receiving specularly reflected light emitted from the light emitting element 8 to the mirror surface 3-1. .

  In the mirror-cooled sensor 102, the mirror surface 3-1 is exposed to the gas to be measured that flows into the chamber 1. If there is no condensation on the mirror surface 3-1, almost all of the light emitted from the light emitting element 8 is regularly reflected, and the amount of light received by the light receiving element 9 is extremely small. Therefore, when no condensation occurs on the mirror surface 3-1, the intensity of the reflected light received by the light receiving element 9 is small.

  When the current to the thermoelectric cooling element 2 is increased and the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is lowered, water vapor contained in the measured gas is condensed on the mirror surface 3-1, and the water molecules Part of the light emitted from the light emitting element 8 is absorbed or irregularly reflected. Thereby, the intensity | strength of the irregularly reflected light (scattered light) received by the light receiving element 9 increases. By detecting the change in the scattered light on the mirror surface 3-1, it is possible to know the change in the state on the mirror surface 3-1, that is, that moisture (water droplets) has adhered to the mirror surface 3-1. Further, by measuring the temperature of the mirror surface 3-1 at this time with the temperature detecting element 7, the dew point of the moisture in the gas to be measured can be known.

  In the dew point meter described above, the example of detecting condensation (moisture) generated on the mirror surface 3-1 has been described. However, it is also possible to detect frost (water) generated on the mirror surface 3-1 with the same configuration. is there.

  In the mirror surface cooling type sensors 101 and 102 shown in FIGS. 15 and 16, the dew point measurement lower limit is determined by how many times the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 can be cooled. For this reason, in this mirror surface cooling type sensor 101 or 102, one end 4 of the heat pipe 4 is placed on the heating surface 2-2 of the thermoelectric cooling element 2 so that the cooling surface 2-1 of the thermoelectric cooling element 2 can be further cooled. -1 is attached, and the heat radiating member 5 is attached to the other end 4-2 of the heat pipe 4 separated from the thermoelectric cooling element 2. Thereby, the heat generated on the heating surface 2-2 moves from the one end 4-1 to the other end 4-2 of the heat pipe 4 and is radiated through the heat radiating member 5. Further, by providing the heat insulating member 6, heat radiation from the heating surface 2-2 of the thermoelectric cooling element 2 and the heat pipe 4 is prevented from flowing back to the chamber 1 and the mirror 3.

JP-A-61-75235 Japanese Examined Patent Publication No. 7-104304 JP-A-9-307030 Industrial Measurement Handbook, Showa 51.9.30, Asakura Shoten, P297.

  However, since the above-described conventional mirror-cooled sensors 101 and 102 have a flat bottom surface (end surface) 5-1 of the heat radiating member 5, the bottom surface 5-1 is easily placed on the bottom. That is, the thermoelectric cooling element 2 is easily placed on the upper side in the vertical direction and the heat radiating member 5 is placed on the lower side in the vertical direction. When the thermoelectric cooling element 2 is placed on the upper side in the vertical direction and the heat radiating member 5 is placed on the lower side in the vertical direction, that is, when the bottom surface 5-1 of the heat radiating member 5 is placed in contact with the horizontal plane, the heat that moves in the heat pipe 4 The moving efficiency of the is worse. For this reason, the cooling efficiency of the thermoelectric cooling element 2 falls, and the problem that cooling performance fell occurred.

  Patent Document 3 describes a cooling device that cools an electronic device (such as a CPU) that generates heat by using a thermoelectric cooling element. In this cooling device, a CPU is attached to the cooling surface of the thermoelectric cooling element, and a heat sink is attached to the heating surface of the thermoelectric cooling element. From the configuration shown in Patent Document 3, the member to be cooled 10 is attached to the cooling surface 2-1 of the thermoelectric cooling element 2 as shown in FIG. 17, and the heat pipe 4 is attached to the heating surface 2-2 of the thermoelectric cooling element 2. It is conceivable to attach one end 4-1 and attach the heat radiating member 5 to the other end 4-2 of the heat pipe 4 separated from the thermoelectric cooling element 2. Even in such a configuration, if the bottom surface 5-1 of the heat radiating member 5 is flat, the heat pipe 4 can be easily placed with the thermoelectric cooling element 2 on the upper side in the vertical direction and the heat radiating member 5 on the lower side in the vertical direction. There is a problem in that the efficiency of heat moving inside deteriorates and the cooling performance decreases.

  The present invention has been made to solve such problems, and an object of the present invention is to provide a cooling device and a mirror-cooled sensor that are not placed in such a manner that the cooling performance is lowered. There is.

  In order to achieve such an object, the first invention (the invention according to claim 1) includes a thermoelectric cooling element in which one surface is a low temperature side and the other surface is a high temperature side, and a low temperature side of the thermoelectric cooling element. A member to be cooled attached to the surface, a heat conductor having one end attached to the surface on the high temperature side of the thermoelectric cooling element and the other end separated from the thermoelectric cooling element, and attached to the other end of the heat conductor In a cooling device provided with a heat radiating member, the shape of the end face of the heat radiating member is such that the center of gravity becomes unstable when the end face is placed in contact with a horizontal plane.

  A fourth invention (invention according to claim 4) includes a mirror whose mirror surface is exposed to the gas to be measured, a thermoelectric cooling element in which a low temperature side surface is attached to a surface opposite to the mirror surface of the mirror, and the mirror surface of the mirror A light emitting means for irradiating light, a light receiving means for receiving reflected light of the light emitted from the light emitting means to the mirror surface, and one end of the thermoelectric cooling element attached to the high temperature side surface, and the other end being a thermoelectric In a mirror-cooled sensor having a heat conductor separated from the cooling element and a heat radiating member attached to the other end of the heat conductor, the shape of the end face of the heat radiating member is placed in contact with the horizontal plane. The center of gravity is unstable.

  According to the first and fourth inventions, the shape of the end surface of the heat dissipation member is, for example, hemispherical, trapezoidal, triangular pyramid, conical, etc., and the center of gravity when the end surface of the heat dissipation member is placed in contact with the horizontal plane is It is considered unstable. This naturally eliminates the fact that the thermoelectric cooling element is placed on the upper side in the vertical direction and the heat dissipating member is placed on the lower side in the vertical direction, and the direction in which heat transfer efficiency in the heat conductor (heat pipe) is improved unconsciously. Will be put on.

  The second invention (the invention according to claim 2) is a thermoelectric cooling element in which one surface is a low temperature side and the other surface is a high temperature side, and a member to be cooled attached to a low temperature side surface of the thermoelectric cooling element; A heat conductor having one end attached to the high temperature side surface of the thermoelectric cooling element and the other end separated from the thermoelectric cooling element, a holding member provided between one end and the other end of the heat conductor, In a cooling device comprising a heat radiating member attached to the other end of the conductor, a heat radiating member and a cover covering the heat conductor from the heat radiating member to the holding member, the shape of the end face of the cover is in contact with the horizontal plane. The center of gravity of the cover is unstable and the vent hole is formed in the peripheral wall of the cover facing the heat radiating member.

  A fifth invention (invention according to claim 5) includes a mirror whose mirror surface is exposed to the gas to be measured, a thermoelectric cooling element in which a low-temperature side surface is attached to the surface opposite to the mirror surface of the mirror, and the mirror surface of the mirror A light emitting means for irradiating light, a light receiving means for receiving reflected light of the light emitted from the light emitting means to the mirror surface, and one end of the thermoelectric cooling element attached to the high temperature side surface, and the other end being a thermoelectric A heat conductor separated from the cooling element, a holding member provided between one end and the other end of the heat conductor, a heat radiating member attached to the other end of the heat conductor, a heat radiating member, and the heat radiating member In a mirror-cooled sensor having a cover covering the heat conductor from the holding member to the holding member, the shape of the end surface of the cover is made unstable so that the center of gravity becomes unstable when the end surface is placed in contact with a horizontal surface. Ventilation holes are formed in the peripheral wall opposite to.

  According to the second and fifth aspects of the invention, the shape of the end face of the cover is, for example, an arc shape, a hemispherical shape, a trapezoidal shape, a triangular pyramid shape, a conical shape, and the center of gravity when the end face of the cover is placed in contact with a horizontal plane Is considered unstable. As a result, it is not natural that the thermoelectric cooling element is placed on the upper side in the vertical direction and the heat dissipation member is placed on the lower side in the vertical direction, and the direction in which heat transfer efficiency in the heat conductor (heat pipe) is improved unconsciously. Will be put on. Further, since a vent hole is formed in the peripheral wall facing the heat radiating member of the cover, cold air is naturally drawn into the cover through this vent hole, and warm air in the cover is naturally discharged, and the cover The inside heat dissipation member is naturally cooled.

  The third invention (the invention according to claim 3) is a thermoelectric cooling element in which one surface is a low temperature side and the other surface is a high temperature side, and a member to be cooled attached to a low temperature side surface of the thermoelectric cooling element; A heat conductor having one end attached to the high temperature side surface of the thermoelectric cooling element and the other end separated from the thermoelectric cooling element, a holding member provided between one end and the other end of the heat conductor, In a cooling device comprising a heat radiating member attached to the other end of the conductor, a heat radiating member and a cover covering the heat conductor from the heat radiating member to the holding member, the shape of the end face of the cover is in contact with the horizontal plane. The center of gravity of the cover is unstable, the vent hole is formed in the end wall of the cover and the peripheral wall between the holding member and the heat radiating member, and the fan is provided in the cover.

  A sixth invention (invention according to claim 6) includes a mirror whose mirror surface is exposed to the gas to be measured, a thermoelectric cooling element in which a low-temperature side surface is attached to a surface opposite to the mirror surface of the mirror, and the mirror surface of the mirror A light emitting means for irradiating light, a light receiving means for receiving reflected light of the light emitted from the light emitting means to the mirror surface, and one end of the thermoelectric cooling element attached to the high temperature side surface, and the other end being a thermoelectric A heat conductor separated from the cooling element, a holding member provided between one end and the other end of the heat conductor, a heat radiating member attached to the other end of the heat conductor, a heat radiating member, and the heat radiating member In a mirror-cooled sensor having a cover covering the heat conductor from the holding member to the holding member, the end surface of the cover is shaped to make the center of gravity unstable when the end surface is placed in contact with a horizontal surface, and the end surface of the cover And vents in the peripheral wall between the holding member and the heat dissipation member , It is provided with a fan in the cover.

  According to the third and sixth aspects of the invention, the shape of the end surface of the cover is, for example, an arc shape, a hemispherical shape, a trapezoidal shape, a triangular pyramid shape, a conical shape, and the center of gravity when the end surface of the cover is placed in contact with a horizontal plane Is considered unstable. This naturally eliminates the fact that the thermoelectric cooling element is placed on the upper side in the vertical direction and the heat dissipating member is placed on the lower side in the vertical direction, and the direction in which heat transfer efficiency in the heat conductor (heat pipe) is improved unconsciously. Will be put on. In addition, since the vent hole is formed in the end face of the cover and the peripheral wall between the holding member and the heat radiating member, and the fan is provided in the cover, the air that is cooled in the cover through the vent hole by the rotation of the fan. Is forcibly drawn in, the warm air in the cover is forcibly discharged, and the heat radiating member in the cover is forcibly cooled. Further, since the end face of the cover is difficult to be placed in contact with the horizontal plane, the vent hole formed in the end face is not blocked. In the present invention, since an empty space can be generated in the cover between the end surface of the cover and the heat radiating member, a fan may be provided in this empty space.

  According to the first and fourth inventions, since the shape of the end face of the heat radiating member is such that the center of gravity becomes unstable when the end face is placed in contact with a horizontal plane, the thermoelectric cooling element is placed vertically above the heat radiating member. Is placed in the direction where the heat transfer efficiency in the heat conductor is improved, and the cooling performance is lowered. It will not be.

  According to the second and fifth inventions, the shape of the end face of the cover is made unstable when the end face is placed in contact with a horizontal plane, and the vent hole is formed in the peripheral wall facing the heat radiating member of the cover. Therefore, cold air is naturally drawn into the cover through this vent hole, and warm air in the cover is naturally discharged, and in addition to the effects of the first and fourth inventions, the heat radiating member and the heat radiating member are retained. The heat conductor up to the member can be protected, and at the same time, the heat dissipating member in the cover can be naturally cooled.

  According to the third and sixth inventions, the shape of the end surface of the cover is such that the center of gravity becomes unstable when the end surface is placed in contact with a horizontal plane, and the peripheral surface between the end surface of the cover and the holding member and the heat dissipation member The air vent is formed in the cover and the fan is provided in the cover, so that the cold air is forcibly drawn into the cover through the air hole by the rotation of the fan, and the warm air in the cover is forcibly discharged. In addition to the effects of the first and fourth inventions, the heat radiating member and the heat conductor from the heat radiating member to the holding member can be protected, and at the same time, the heat radiating member in the cover can be forcibly cooled. By this forced cooling, the heat radiation efficiency is improved and the cooling performance can be further enhanced. Moreover, since it can cool rapidly, measurement time, such as a dew point temperature, can be shortened.

Hereinafter, the present invention will be described in detail with reference to the drawings.
[Embodiment 1: Mirror surface dew point meter (with fan)]
FIG. 1 is a schematic configuration diagram of a mirror-cooled dew point meter using an embodiment of a mirror-cooled sensor according to the present invention. The mirror-cooled dew point meter 201 has a sensor unit (mirror-cooled sensor) 201A and a control unit 201B.

  In the mirror surface cooling type sensor 201 </ b> A, the mirror 11 is attached to the cooling surface 2-1 of the thermoelectric cooling element (Peltier element) 2. The mirror 11 is, for example, a silicon chip, and the surface 11-1 is a mirror surface. A thin film resistance temperature detector (temperature detection element) 12 made of platinum, for example, is formed between the mirror 11 and the cooling surface 2-1 of the thermoelectric cooling element 2. Further, one end 13-1 of the heat pipe (heat conductor) 13 is attached to the heating surface 2-2 of the thermoelectric cooling element 2, and the other end 13-2 of the heat pipe 13 is separated from the thermoelectric cooling element 2. . Although omitted in FIG. 1, the thermoelectric cooling element 2 integrated with the mirror 11 is detachably attached to one end 13-1 of the heat pipe 13.

  The heat pipe 13 is obtained by vacuum-sealing a small amount of liquid (working fluid) in a sealed container, and has a capillary structure on the inner wall. When a part of the heat pipe 13 is heated, the hydraulic fluid evaporates in the heating part (absorption of latent heat of vaporization), the vapor moves to the low temperature part, and this vapor condenses (releases the latent heat of vaporization) in the low temperature part. A series of phase changes in which the condensed liquid circulates to the heating part due to capillary action occurs continuously, and heat quickly moves from the heating part to the low temperature part.

  In this embodiment, one end 13-1 of the heat pipe 13 is raised with an inclination of 30 ° to 45 °, and the thermoelectric cooling element 2 is formed on the upper surface of the one end 13-1 of the heat pipe 13 raised obliquely. It is attached. Therefore, the mirror surface 11-1 of the mirror 1-1 attached to the cooling surface 2-1 of the thermoelectric cooling element 2 is also inclined at an angle of 30 ° to 45 °.

  Moreover, the holding member 14 is provided in the linear part 13-3 by the side of the one end 13-1 between the one end (heating part) 13-1 and the other end (low temperature part) 13-2 of the heat pipe 13. . The holding member 14 includes a first holding member 14-1 and a second holding member 14-2 that can be divided in a direction (vertical direction in FIG. 1) perpendicular to the heat conduction direction of the heat pipe 13 (FIG. 1). 2 (refer to II-II sectional view in FIG. 1), the heat pipe 13 is sandwiched between the first holding member 14-1 and the second holding member 14-2. In addition, the first holding member 14-1 and the second holding member 14-2 are coupled to each other by a screw 15, whereby the heat pipe 13 is connected to the first holding member 14-1 and the second holding member 14. -2 is fixed so that its position (front-rear direction, rotation direction) can be adjusted.

  A heat sink 16 is attached to the other end 13-2 of the heat pipe 13. The heat sink 16 has a plurality of fins 16a extending radially from the axial center thereof, as shown in the sectional view taken along the line III-III in FIG. In addition, the other end 13-2 of the heat pipe 13 is not an extension of the straight portion 13-3 as it is, but the middle of the straight portion 13-3 is bent at a right angle to the rising direction of the one end 13-1. After that, it extends substantially parallel to the straight portion 13-3 and penetrates the axis of the heat sink 16.

  As described above, the holding member 14 includes the first holding member 14-1 and the second holding member 14-2, and the first holding member 14-1 and the second holding member 14-2. The heat pipe 13 is located between the two. In this embodiment, the second holding member 14-2 is provided with a lead wire 17 to the thermoelectric cooling element 2 and an optical fiber 18 coaxial with light transmission / reception, and the tip surface 18a of the optical fiber 18 is a mirror surface. 11-1. As a result, the irradiation direction of the light from the optical fiber 18 (the optical axis on the light emitting side) and the light receiving direction (the optical axis on the light receiving side) are parallel to each other and adjacent to each other with the same inclination angle.

  The lead wire 17 to the thermoelectric cooling element 2 is composed of a lead wire for supplying current to the thermoelectric cooling element 2 and a lead wire for derivation of a signal from the temperature detection element 12, and is formed on the holding member 14-2. The through hole 14-2a is passed through. The optical fiber 18 has an optical axis substantially parallel to the straight portion 13-3 of the heat pipe 13. That is, in this embodiment, the heat conduction path from the one end 13-1 to the other end 13-2 of the heat pipe 13 is substantially parallel along the optical axis of the optical fiber 18. In other words, the shape of the heat pipe 13 is determined so that the heat conduction path from the one end 13-1 to the other end 13-2 is substantially parallel along the optical axis of the optical fiber 18.

  The optical fiber 18 is attached to the holding member 14-2 so that its position in the optical axis direction can be adjusted. In this example, a screw portion (male screw portion) 18b for position adjustment is formed on the peripheral surface of the base portion of the optical fiber 18, and this screw portion 18b is formed at the entrance of the through hole 14-2b of the holding member 14-2. By screwing into the formed screw portion (female screw portion) 14-2c, the position (position in the optical axis direction) of the tip surface 18a of the optical fiber 18 with respect to the mirror surface 11-1 can be finely adjusted. Yes.

  In this mirror-cooled sensor 201A, when the thermoelectric cooling element 2 side facing the holding member 14 is the detection unit 19 and the heat sink 16 side is the heat dissipation unit 20, the detection unit 19 has a bottomed cylindrical mirror cover 21. A bottomed cylindrical heat sink cover 22 is attached to the heat radiating portion 20.

  The mirror cover 21 is made of a material having good heat conduction, and a plurality of vent holes 21a are formed around the mirror cover 21 (see FIG. 4). The mirror cover 21 is attached to the detection unit 19 by screwing a screw portion 21b formed at the lower end of the inner wall surface of the mirror cover 21 into a screw portion 14a formed at the peripheral edge on one end side of the holding member 14. Has been done.

  The reason why the mirror cover 21 is made of a material having good heat conduction is as follows. That is, since the detection unit 19 is placed in the gas to be measured, when the gas to be measured is changed from low temperature and low humidity to high temperature and high humidity, if the mirror cover 21 has poor heat conduction, condensation occurs on the cover. It becomes impossible to measure the amount of water. In addition, when the measurement gas is highly humid, it is necessary to heat the entire mirror cover to prevent condensation. In this case as well, it is desirable that the material has good thermal conductivity to warm uniformly. .

  The heat sink cover 22 has a plurality of vent holes 22 a formed on the peripheral wall of the outer peripheral surface 22-1 facing the space between the holding member 14 and the heat sink 16. In addition, a plurality of vent holes 22b are formed in the bottom surface (end surface) 22-2 of the heat sink cover 2. The bottom surface 22-2 of the heat sink cover 22 is an arcuate curved surface and protrudes outward. The heat sink cover 22 is attached to the heat radiating portion 20 by screwing a screw portion 22c formed at the lower end of the inner wall surface of the heat sink cover 22 into a screw portion 14b formed at the peripheral edge on the other end side of the holding member 14. Has been done.

  In the mirror surface cooling type sensor 201 </ b> A, an empty space 23 is generated in the heat sink cover 22 between the bottom surface 22-2 of the heat sink cover 22 and the heat sink 16. In the present embodiment, a fan 24 is provided in this empty space 23. The functions of the heat sink cover 22 are to protect the heat pipe 13 and the heat sink 16 and to pass the air from the fan 24 through the heat sink 16 evenly. Therefore, even if the material of the heat sink cover 22 is not a material with good heat conduction. Good.

  In the present embodiment, the heat sink cover 22 is not in contact with the heat sink 16, and a slight gap is provided between the heat sink cover 22 and the heat sink 16. Further, in a state where the heat sink cover 22 is attached to the heat radiating portion 20, the axis of the heat sink 16 and the rotation center of the fan 24 are in agreement.

  In the present embodiment, a screw portion 14d and a flange portion 14e are formed on the outer periphery of the central portion 14c of the holding member 14. The screw part 14d and the flange part 14e are located at the abutting part (the boundary part between the detection part 19 and the heat radiation part 20) between the mirror cover 21 and the heat sink cover 22, and are exposed to the outer surface. The threaded portion 14d is substantially in the same position as the outer peripheral surface of the mirror cover 21 or the heat sink cover 22, and the flange portion 14e protrudes from the outer peripheral surface of the mirror cover 21 or the heat sink cover 22.

  In the present embodiment, various optical fibers as shown in FIG. 5 can be used as the optical fiber 18. In FIG. 5A, a light-emitting side optical fiber 18-1 and a light-receiving side optical fiber 18-2 are coaxially provided in the optical fiber 18. 5B, in the optical fiber 18, the light-emitting side (or light-receiving side) optical fiber 18-1 and the light-receiving side (or light-emitting side) optical fibers 18-21 to 18-24 are provided coaxially. . In FIG. 5C, the left half of the optical fiber 18 is the light-emitting side optical fiber 18A, and the right half is the light-receiving side optical fiber 18B. In FIG. 5D, the optical fiber 18 is mixed with a light-emitting side optical fiber 18C and a light-receiving side optical fiber 18D. In FIG. 5 (e), the center of the optical fiber 18 is a light emitting side (or light receiving side) optical fiber 18E, and the periphery of the optical fiber 18E is a light receiving side (or light emitting side) optical fiber 18F.

  The control unit 201B includes a dew point temperature display unit 25, a dew condensation detection unit 26, a Peltier output control unit 27, and a signal conversion unit 28. The dew point temperature display unit 25 displays the temperature of the mirror 11 detected by the temperature detection element 12. The dew condensation detection unit 26 irradiates the mirror surface 11-1 of the mirror 11 with pulse light at a predetermined period from the tip of the optical fiber 18 and also receives reflected pulsed light (scattered light) received through the optical fiber 18. The difference between the upper limit value and the lower limit value is obtained as the intensity of the reflected pulsed light, and a signal S1 corresponding to the intensity of the reflected pulsed light is sent to the Peltier output control unit 27. The Peltier output control unit 27 receives the signal S1 from the dew condensation detection unit 26, compares the intensity of the reflected pulse light with a predetermined threshold value, and if the intensity of the reflected pulse light has not reached the threshold value. The control signal S2 for increasing the current to the thermoelectric cooling element 2 according to the value of the signal S1, and when the intensity of the reflected pulse light exceeds the threshold value, the current to the thermoelectric cooling element 2 is set to the value of the signal S1. The control signal S2 to be decreased in response to the signal is output to the signal converter 28. The signal converter 28 supplies the thermoelectric cooling element 2 with a current S3 indicated by the control signal S2 from the Peltier output controller 27.

  In this specular cooling type dew point meter 201, for example, when detecting the dew point of moisture in the gas to be measured flowing in the duct, the specular cooling type sensor 201A is attached to the duct 300 in the form shown in FIG. That is, the detection unit 19 is inserted from the outside of the duct 300 into the mounting hole 301 opened on the side surface of the duct 300. Then, the screw portion 14 d formed in the central portion 14 c of the holding member 14 is screwed into the screw portion 301 a formed in the mounting hole 301 of the duct 300, and tightened until the flange of the flange portion 14 e hits the side surface of the duct 300.

  Thereby, in the state which attached mirror surface type sensor 201A to duct 300, detection part 19 is located in duct 300, and heat dissipation part 20 is located outside duct 300. In addition, the gas under measurement flowing through the duct 300 enters the detection unit 19 through the vent hole 21a of the mirror cover 21, and the mirror surface 11-1 of the mirror 11 is exposed to the gas under measurement. Further, the thermoelectric cooling element 2 and the mirror 11 of the detection unit 19 are protected by the mirror cover 21 in the state exposed to the gas to be measured.

  In the attachment state of the mirror-cooled sensor 201A to the duct 300, the dew condensation detection unit 26 irradiates the mirror surface 11-1 of the mirror 11 with pulse light at a predetermined cycle from the tip of the optical fiber 18 (see FIG. 7 (a)). If the mirror surface 11-1 is exposed to the gas to be measured and no condensation occurs on the mirror surface 11-1, almost all of the pulsed light irradiated from the tip of the optical fiber 18 is specularly reflected. The amount of reflected pulsed light (scattered light) from the mirror surface 11-1 received through 18 is extremely small. Therefore, when no condensation occurs on the mirror surface 11-1, the intensity of the reflected pulse light received through the optical fiber 18 is small.

  In the dew condensation detection unit 26, the difference between the upper limit value and the lower limit value of the reflected pulse light received through the optical fiber 18 is obtained as the intensity of the reflected pulse light, and the signal S1 corresponding to the intensity of the reflected pulse light is subjected to Peltier output control. Send to part 27. In this case, since the intensity of the reflected pulse light is almost zero and does not reach a predetermined threshold value, the Peltier output control unit 27 converts the control signal S2 for increasing the current to the thermoelectric cooling element 2 into a signal. Send to part 28. Thereby, the current S3 from the signal conversion unit 28 to the thermoelectric cooling element 2 increases, and the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is lowered.

  When the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is lowered, that is, the temperature of the mirror 11, the water vapor contained in the gas to be measured is condensed on the mirror surface 11-1 of the mirror 11, and the optical fiber is attached to the water molecules. Part of the pulsed light irradiated from the tip of 18 is absorbed or irregularly reflected. Thereby, the intensity | strength of the reflected pulse light (scattered light) from the mirror surface 11-1 light-received via the optical fiber 18 increases.

  The dew condensation detection unit 26 obtains the difference between the upper limit value and the lower limit value of each pulse of the received reflected pulse light, and uses this difference as the intensity of the reflected pulse light. That is, as shown in FIG. 7B, a difference ΔL between the upper limit value Lmax and the lower limit value Lmin of one pulse of the reflected pulse light is obtained, and this ΔL is set as the intensity of the reflected pulse light. By the processing in the dew condensation detection unit 26, the disturbance light ΔX included in the reflected pulse light is removed, and malfunction due to the disturbance light is prevented. A processing method for preventing malfunction due to disturbance light using pulsed light in the dew condensation detection unit 26 is referred to as a pulse modulation method. With this process, in the mirror-cooled dew point meter 201, the chamber intended to block light from the mirror-cooled sensor 201A can be eliminated.

  Here, when the intensity of the reflected pulse light received through the optical fiber 18 exceeds the threshold value, the Peltier output control unit 27 sends a control signal S2 for reducing the current to the thermoelectric cooling element 2 to the signal conversion unit 28. . Thereby, the fall of the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is suppressed, and generation | occurrence | production of dew condensation is suppressed. By suppressing the dew condensation, the intensity of the reflected pulse light received through the optical fiber 18 becomes small. When the intensity falls below the threshold value, a control signal S2 for increasing the current from the Peltier output control unit 27 to the thermoelectric cooling element 2 is a signal. The data is sent to the conversion unit 28. By repeating this operation, the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is adjusted so that the intensity of the reflected pulsed light received via the optical fiber 18 is approximately equal to the threshold value. The adjusted temperature, that is, the temperature at which the dew condensation that has occurred on the mirror surface 11-1 has reached an equilibrium state (dew point temperature) is displayed on the dew point temperature display unit 25 as the dew point temperature.

  In this embodiment, the condensation (moisture) generated on the mirror surface 11-1 is detected. However, it is also possible to detect frost (water) generated on the mirror surface 11-1 with the same configuration.

  In this dew point detection operation, in the mirror surface cooling type sensor 201A, when the temperature of the cooling surface 2-1 of the thermoelectric cooling element 2 is decreased, the temperature of the heating surface 2-2 increases, and the one end 13-1 of the heat pipe 13 is Heated. When the one end 13-1 of the heat pipe 13 is heated, the working fluid evaporates at the heated one end 13-1, the steam moves to the other end 13-2 on the low temperature side, and the steam enters the other end 13-. 2, a series of phase changes in which the condensed liquid circulates to one end 13-1 by capillary action continuously occurs, and heat quickly moves from one end 13-1 to the other end 13-2 of the heat pipe 13. . The heat that has moved to the other end 13-2 is radiated through the heat sink 16.

  Here, the heat sink cover 22 has a plurality of vent holes 22a on the peripheral wall of the outer peripheral surface 22-1 facing the space between the holding member 14 and the heat sink 16, and a plurality of vent holes 22b on the bottom surface 22-2. Since the fan 24 rotates in the empty space 23 between the bottom surface 22-2 of the heat sink cover 22 and the heat sink 16, cold air outside from the vent hole 22a of the outer peripheral surface 22-1 is caused by the rotation of the fan 24. The air is drawn into the heat sink cover 22, and the air passes through the space between the fins 16 a of the heat sink 16 and is forcibly discharged from the vent hole 22 b of the bottom surface 22-2. Thereby, the heat sink 16 in the heat sink cover 22 is forcibly cooled, the heat radiation efficiency is improved, and the cooling performance is further improved. Further, since the wind from the fan 24 can be evenly passed through the heat sink 16 and the mirror 11 can be rapidly cooled, the measurement time of the dew point temperature can be shortened.

  In this embodiment, since a slight gap is provided between the heat sink cover 22 and the heat sink 16, heat from the heat sink 16 is not hindered when heat is applied to the heat sink cover 22 from the outside. It is possible to do so. In the present embodiment, a case where heat is applied to the heat sink cover 22 from outside is assumed as a possible environment. However, in the case where the heat sink cover 22 is cooled in reverse, the heat sink cover 22 It is considered better to be in contact with the heat sink 16.

  Further, in this embodiment, no vent hole is provided at a position facing the heat sink 16 on the outer peripheral surface 22-1 of the heat sink cover 22. This is because if a vent hole is provided at a position facing the heat sink 16, air is sucked there, and ventilation does not flow to the holding member 14 side of the heat sink 16, which may deteriorate cooling efficiency. .

  Further, in this embodiment, after the middle of the straight portion 13-3 of the heat pipe 13 is bent at a substantially right angle, it is extended substantially parallel to the straight portion 13-3 to form the other end 13-2. The end 13-2 penetrates the axis of the heat sink 16 because the position of the other end 13-2 of the heat pipe 13 and the axis of the heat sink 16 coincide with each other. This is because the heat from 2 is released without being biased in all directions around the axis of the heat sink 16. Further, since the rotation center of the fan 24 is a windless zone, the other end 13-2 of the heat pipe 13 and the axis of the heat sink 16 are positioned in the windless zone so that heat can be efficiently released from the heat sink 16.

  In this embodiment, the fan 24 is provided in the empty space 23 between the bottom surface 22-2 of the heat sink cover 22 and the heat sink 16, but the space between the holding member 14 and the heat sink 16 is allowed if space permits. It may be provided between them. Alternatively, the rotation direction of the fan 24 may be reversed, and outside cold air may be drawn from the vent hole 22b of the bottom surface 22-2 of the heat sink cover 22 and discharged from the vent hole 22a of the outer peripheral surface 22-1.

  Further, in this embodiment, the light projecting and receiving coaxial optical fiber 18 is used as the light emitting means and the light receiving means, so that the light emitting side optical fiber and the light receiving side optical fiber mounting portion are integrated into one place for miniaturization. We can plan. Further, since the optical fiber on the light emitting side and the optical fiber on the light receiving side are accommodated in one optical fiber 18, positioning between the light emitting side optical fiber and the light receiving side optical fiber is not necessary. Workability is improved.

  Moreover, in this embodiment, since the temperature detection element 12 is provided on the joint surface between the cooling surface 2-1 of the thermoelectric cooling element 2 and the mirror 11, the thermal resistance is small, and the mirror 11 has high accuracy and responsiveness. The temperature can be measured. Thereby, the measurement accuracy of the dew point temperature is increased, and the responsiveness is also improved. The temperature detection element 12 does not have to be provided on the entire surface as a thin film layer, and may be a belt-like pattern or the like.

  In this embodiment, one end 13-1 of the heat pipe 13 is attached to the heating surface 2-2 of the thermoelectric cooling element 2, and conduction of heat from the one end 13-1 to the other end 13-2 of the heat pipe 13 is performed. Since the path is substantially parallel along the optical axis of the optical fiber 18, the facing distance (the width in the direction perpendicular to the optical axis) between the optical axis of the optical fiber 18 and the heat conduction path of the heat pipe 13 is narrowed. Further downsizing (thinning) has been achieved. Further, the lead wire 17 and the optical fiber 18 are provided through the holding member 14-2 to reduce the size.

  Further, in this embodiment, the mirror-cooled sensor 201A is attached to the duct 300, the detection unit 19 is located in the duct 300, and the heat radiation unit 20 is located outside the duct 300. The heat radiation performance can be improved by taking out from the measurement environment which is a lower temperature atmosphere.

[Maintenance]
Further, in this embodiment, the mirror-cooled sensor 201A is attached to the duct 300 via the screw portion 14d formed on the holding member 14, so that it can be easily attached to and detached from the duct 300. That is, there is no need to remove a part of the duct 300 and insert it into the inside, and the mirror-cooled sensor 201A can be easily attached or removed.

  Further, in this embodiment, the holding member 14 of the mirror-cooled sensor 201A is composed of a first holding member 14-1 and a second holding member 14-2, and the first holding member 14-1 Since the heat pipe 13 is positioned between the second holding member 14-2, the connection between the first holding member 14-1 and the second holding member 14-2 by the screw 15 is loosened. The position of the heat pipe 13 in the front-rear direction and the rotational direction can be adjusted.

  Further, in this embodiment, the first holding member 14-1 and the second holding member 14-2 are removed, and the thermoelectric cooling element 2 (the thermoelectric cooling element 2 integrated with the mirror 11) can be removed from the heat pipe 13. For example, the heat pipe 13 to which the heat sink 16 is attached can be replaced alone. It is also possible to replace the thermoelectric cooling element 2 and the optical fiber 18 together with the holding member 14-2.

  In this embodiment, the position of the tip surface 18a of the optical fiber 18 with respect to the mirror surface 11-1 can be adjusted by turning the screw portion 18b at the root of the optical fiber 18. That is, in this embodiment, the coaxial optical fiber 18 is provided so as to pass through the holding member 14 so that its position in the optical axis direction can be adjusted, and the screw portion 18b at the root of the optical fiber 18 is provided. By turning left and right, the positions of the mirror surface 11-1 of the mirror 11 attached to the thermoelectric cooling element 2 and the tip surface 18 a of the optical fiber 18 can be finely adjusted from the outside of the holding member 14. Further, the optical fiber 18 can be replaced as a single unit by turning the screw portion 18 b at the base of the optical fiber 18 and removing it from the holding member 14.

  This type of mirror-cooled dew point meter adjusts and replaces the internal components of the mirror-cooled sensor (mirror and projector, light receiver, heat pipe, etc.) in order to cope with differences in installation location and required measurement accuracy. In some cases, fine adjustment of the alignment and replacement of parts) are required in the field. The mirror surface cooling type sensor 201A of the present embodiment can easily cope with such on-site adjustment and replacement by the method described above, and has excellent maintainability.

  Note that the lead wire 17 and the optical fiber 18 to the thermoelectric cooling element 2 may be provided not through the second holding member 14-1 but through the first holding member 14-1. In this case, the shape of the first holding member 14-1 may be larger than that of the first holding member 14-2 so that the shape can be changed and the lead wire 17 and the optical fiber 18 can be provided. In addition, the lead wire 17 and the optical fiber 18 may be provided separately for the first holding member 14-1 and the second holding member 14-2.

  In this embodiment, the holding member 14 is provided with the screw portion 14d as an engaging portion to the attachment portion of the duct 300. However, the holding member 14 is not necessarily provided. The engaging portion of the duct 300 to the attaching portion may be provided anywhere as long as it is a boundary portion between the detecting portion 19 and the heat radiating portion 20 that are opposed to each other with the holding member 14 interposed therebetween. For example, the outer peripheral surface of the mirror cover 21 or the heat sink cover You may make it provide a screw part in the outer peripheral surface of 22. FIG. Further, the engagement with the mounting portion of the duct 300 is not limited to the engagement with screws, but may be an engagement that can be attached and detached with one touch.

  In the above-described embodiment, the example in which the mirror-cooled sensor 201A is attached to the duct 300 has been described. However, the mirror-cooled sensor 201A may be used by placing the entire mirror-cooled sensor 201A in the measurement atmosphere. In this case, the mirror-cooled sensor 201A according to the present embodiment does not have a chamber for light shielding, and is equipped with a suction pump, a suction tube, an exhaust tube, a flow meter, etc. Therefore, it can be easily installed in the measurement atmosphere. The mirror-cooled sensor 201A is not equipped with a suction pump, a suction tube, an exhaust tube, a flow meter, etc., and has two configurations of the mirror-cooled sensor 201A and the control unit 201B, so it is easy to carry. It becomes.

  FIG. 8 shows a configuration of the mirror-cooled dew point meter 201 in which the control unit 201B is accommodated in the control box 29. In the control box 29, the power supply to the accommodated control unit 201B is a battery. The control box 29 and the mirror-cooled sensor 201A are set as one set, and then the mirror-cooled sensor 201A is installed in the measurement atmosphere. By doing so, measurement can be started immediately.

  When the mirror-cooled sensor 201A is installed in the measurement atmosphere, care must be taken in placing the mirror-cooled sensor 201A. For example, as shown in FIG. 9, when the mirror-cooled sensor 201A is placed on the horizontal surface 400 with the bottom surface 22-2 of the heat sink cover 22 facing down, the thermoelectric cooling element 2 is placed on the upper side in the vertical direction and the heat sink 16 is placed on the lower side in the vertical direction It is considered as a side. In this mirror-cooled sensor 201A, since the heat sink 16 is heavy, it is often placed like this. If placed in such a manner, the heat tends to rise from the bottom to the top, so that the efficiency of movement of the heat moving through the heat pipe 13 is deteriorated. Further, the air hole 22-2b on the bottom surface 22-2 of the heat sink cover 22 is blocked, and the air circulation in the heat sink cover 22 is deteriorated. For this reason, the cooling efficiency of the thermoelectric cooling element 2 falls and cooling performance falls.

  On the other hand, in this embodiment, since the shape of the bottom surface 22-2 of the heat sink cover 22 is an arc shape, when the bottom surface 22-2 of the heat sink cover 22 is placed in contact with the horizontal surface 400, the mirror surface cooling is performed. The center of gravity of the type sensor 201A is unstable. That is, when the bottom surface 22-2 of the heat sink cover 22 is placed in contact with the horizontal plane 400, the mirror-cooled sensor 201A cannot maintain its posture and rolls in the front-rear direction and the left-right direction. As a result, it is not natural that the thermoelectric cooling element 2 is placed on the upper side in the vertical direction and the heat sink 16 is placed on the lower side in the vertical direction, and it is unconsciously placed in the direction in which the heat transfer efficiency in the heat pipe 13 is improved. It becomes like this.

[Embodiment 2: Mirror surface dew point meter (no fan)]
FIG. 9 shows an example in which the fan 24 is provided inside the heat sink cover 22, but the mirror-cooled sensor 201A ′ of the type in which the fan 24 is not provided inside the heat sink cover 22 as shown in FIG. By making the shape of the bottom surface 22-2 of the heat sink cover 22 into an arc shape, it can be unconsciously placed in a direction in which the heat transfer efficiency in the heat pipe 13 is improved.

  In this case, as shown in FIG. 11, when the mirror-cooled sensor 201 </ b> A ′ is placed on the horizontal surface 400, for example, sideways, the heat sink cover 22 is communicated via the vent holes 22 d provided on the outer peripheral surface 22-1 of the heat sink cover 22. Cold air is naturally drawn in, and warm air in the heat sink cover 22 is naturally discharged, so that the heat sink 16 is naturally cooled.

  Further, as shown in FIG. 12, when the mirror-cooled sensor 201A ′ is placed on the horizontal surface 400 with the bottom surface 22-2 of the heat sink cover 22 facing up, for example, the outside of the vent holes 22a and 22d on the outer peripheral surface 22-1. Cold air is drawn into the heat sink cover 22, this air passes through the space between the fins 16a of the heat sink 16, and is naturally discharged from the vent holes 22b of the bottom surface 22-2, so that the heat sink 16 is naturally cooled.

[Embodiment 3: Mirror surface cooling type dew point meter (no fan, no heat sink cover)]
Although FIG. 10 shows an example in which the fan 24 is not provided, as shown in FIG. 13, not only the fan 24 but also the heat sink cover 22 may be omitted. In this mirror-cooled sensor 201A ″, the shape of the bottom surface (end surface) 16-1 of the heat sink 16 is circular, so that the heat transfer efficiency in the heat pipe 13 is unconsciously placed in a direction that improves. can do.

[Embodiment 4: Cooling device (no cover, no fan)]
In the above description, a mirror-cooled dew point meter has been described as an example, but in a cooling device that cools a member to be cooled such as a CPU, the heat pipe is unconsciously formed by making the bottom surface of the heat radiating member arc-like. It can be placed in a direction that improves the efficiency of heat transfer inside. An example is shown in FIG. In FIG. 14A, the bottom surface 30-1 of the heat radiating member 30 attached to the other end 4-2 of the heat pipe 4 is formed in an arc shape and the bottom surface 30-1 of the heat radiating member 30 is prevented from being placed downward. Yes.

[Embodiment 5: Cooling device (with cover, without fan)]
14B, the holding member 31 is provided between the one end 4-1 and the other end 4-2 of the heat pipe 4, and the heat radiating member 30 and the heat radiating member 30 to the holding member 31 are provided. A cover 32 that covers the heat pipe 4 may be provided, vent holes 32d may be formed in the outer peripheral surface 32-1 of the cover 32, and the bottom surface 32-2 may be arcuate.

[Embodiment 6: Cooling device (with cover, with fan)]
14C, the holding member 31 is provided between the one end 4-1 and the other end 4-2 of the heat pipe 4, and the heat radiating member 30 and the heat radiating member 30 to the holding member 31 are provided. A cover 32 that covers the heat pipe 4 is provided, vent holes 32a and 32b are formed in the outer peripheral surface 32-1 and the bottom surface (end surface) 32-2 of the cover 32, and the bottom surface 32-2 is formed in an arc shape. You may make it provide the fan 34 in the empty space 33 between the bottom face 32-2 and the thermal radiation member 30. FIG.

Moreover, in Embodiment 1-6 mentioned above, the bottom face 22-2 of the heat sink cover 22, the bottom face 16-1 of the heat sink 16, the bottom face 30-1 of the heat radiating member 30, and the bottom face 32-2 of the cover 32 are circular. However, it may be hemispherical, trapezoidal, triangular pyramid, conical or the like.
In the first to third embodiments described above, the configuration of the mirror-cooled sensors 201A, 201A ′, 201A ″ is the scattered light detection method, but the present invention can also be applied to the regular reflection light detection method.
Moreover, in Embodiment 1-3 mentioned above, although the holding member 14 was comprised with the 1st holding member 14-1 and the 2nd holding member 14-2, the holding member 14 is not necessarily set as the structure divided | segmented. Also good.

It is a schematic block diagram of the specular cooling type dew point meter using one embodiment of the specular cooling type sensor concerning the present invention. It is the II-II sectional view taken on the line in FIG. It is the III-III sectional view taken on the line in FIG. It is a perspective view of the mirror surface cooling type sensor (sensor part) used for this mirror surface cooling type dew point meter. It is a figure which shows the structural example of the optical fiber of a light projection / reception coaxial. It is a figure which shows the attachment state to the duct of the mirror surface cooling type sensor which concerns on this invention. It is a figure which shows the pulsed light irradiated with respect to a mirror surface, and the reflected pulsed light received from a mirror surface. It is a figure which shows the structure of the mirror surface dew point meter which accommodated the control part in the control box. It is a figure which shows the state which put the mirror surface cooling type sensor which concerns on this invention in the horizontal surface with the bottom face of the heat sink cover facing down. It is a figure which shows other embodiment (Embodiment 2: No fan) of the mirror surface cooling type sensor which concerns on this invention. It is a figure which shows the state which set | placed the mirror surface cooling type sensor of Embodiment 2 sideways. It is a figure which shows the state which set | placed the mirror surface cooling type sensor of Embodiment 2 with the bottom face of the heat sink cover facing up. It is a figure which shows other embodiment (Embodiment 3: No fan, No heat sink cover) of the mirror surface cooling type sensor which concerns on this invention. It is a figure which shows embodiment (Embodiment 4, 5, 6) of the cooling device which concerns on this invention. It is a figure which shows the structure of the sensor part (mirror surface cooling type sensor) in the conventional mirror surface cooling type dew point meter which employ | adopted the regular reflection light detection system. It is a figure which shows the structure of the sensor part (mirror surface cooling type sensor) in the conventional mirror surface cooling type dew point meter which employ | adopted the scattered light detection system. It is a figure which shows the structure of the cooling device considered from the structure shown by patent document 3. FIG.

Explanation of symbols

2 ... thermoelectric cooling element (Peltier element), 2-1 ... cooling surface, 2-2 ... heating surface, 4 ... heat pipe, 4-1 ... one end, 4-2 ... other end, 10 ... member to be cooled, 11 ... Mirror, 11-1 ... Mirror surface, 12 ... Temperature detection element (thin film resistance thermometer), 13 ... Heat pipe, 13-1 ... One end, 13-2 ... Other end, 13-3 ... Linear part, 14 ... Holding member 14a, 14b, 14d ... Screw part, 14c ... Center part, 14e ... Flange part, 14-1 ... First holding member, 14-2 ... Second holding member, 14-2a, 14-2b ... Through hole 14-2c ... screw part, 15 ... screw, 16 ... heat sink, 16a ... fin, 17 ... lead wire, 18 ... optical fiber, 18a ... tip surface, 18b ... screw part, 19 ... detection part, 20 ... heat dissipation part, 21 ... Mirror cover, 21a ... Vent hole, 21b ... Screw part, 22 ... Heat sink cover -, 22-1 ... outer peripheral surface, 22-2 ... bottom surface, 22a, 22b, 22d ... vent hole, 22c ... screw part, 23 ... empty space, 24 ... fan, 25 ... dew point temperature display part, 26 ... dew condensation detection part 27 ... Peltier output control unit, 28 ... signal conversion unit, 29 ... control box, 30 ... heat radiating member, 30-1 ... bottom surface, 31 ... holding member, 32 ... cover, 32a, 32b, 32d ... vent hole, 32- DESCRIPTION OF SYMBOLS 1 ... Outer peripheral surface, 32-2 ... Bottom surface, 33 ... Empty space, 34 ... Fan, 201 ... Mirror surface cooling type dew point meter, 201A, 201A ', 201A "... Mirror surface cooling type sensor (sensor part), 201B ... Control part.

Claims (6)

A thermoelectric cooling element in which one surface is a low temperature side and the other surface is a high temperature side;
A member to be cooled attached to a low-temperature surface of the thermoelectric cooling element;
A heat conductor having one end attached to the surface of the thermoelectric cooling element on the high temperature side and the other end separated from the thermoelectric cooling element;
A heat dissipating member attached to the other end of the heat conductor,
The cooling device according to claim 1, wherein the shape of the end face of the heat dissipating member is such that the center of gravity becomes unstable when the end face is placed in contact with a horizontal plane. A thermoelectric cooling element in which one surface is a low temperature side and the other surface is a high temperature side;
A member to be cooled attached to a low-temperature surface of the thermoelectric cooling element;
A heat conductor having one end attached to the surface of the thermoelectric cooling element on the high temperature side and the other end separated from the thermoelectric cooling element;
A holding member provided between one end and the other end of the heat conductor;
A heat dissipating member attached to the other end of the heat conductor;
The heat dissipation member and a cover that covers the heat conductor from the heat dissipation member to the holding member,
The shape of the end surface of the cover is a shape that makes the center of gravity unstable when the end surface is placed in contact with a horizontal plane,
A cooling device, wherein a vent hole is formed in a peripheral wall of the cover facing the heat radiating member. A thermoelectric cooling element in which one surface is a low temperature side and the other surface is a high temperature side;
A member to be cooled attached to a low-temperature surface of the thermoelectric cooling element;
A heat conductor having one end attached to the surface of the thermoelectric cooling element on the high temperature side and the other end separated from the thermoelectric cooling element;
A holding member provided between one end and the other end of the heat conductor;
A heat dissipating member attached to the other end of the heat conductor;
The heat dissipation member and a cover that covers the heat conductor from the heat dissipation member to the holding member,
The shape of the end surface of the cover is a shape that makes the center of gravity unstable when the end surface is placed in contact with a horizontal plane,
A vent hole is formed in the end surface of the cover and the peripheral wall between the holding member and the heat dissipation member,
A cooling device, wherein a fan is provided in the cover. A mirror whose mirror surface is exposed to the gas to be measured;
A thermoelectric cooling element in which a low-temperature side surface is attached to a surface opposite to the mirror surface of the mirror;
A light emitting means for irradiating the mirror surface of the mirror with light;
A light receiving means for receiving reflected light of the light emitted from the light emitting means to the mirror surface;
A heat conductor having one end attached to the surface of the thermoelectric cooling element on the high temperature side and the other end separated from the thermoelectric cooling element;
A heat dissipating member attached to the other end of the heat conductor,
The shape of the end surface of the heat radiating member is a shape that makes the center of gravity unstable when the end surface is placed in contact with a horizontal plane. A mirror whose mirror surface is exposed to the gas to be measured;
A thermoelectric cooling element in which a low-temperature side surface is attached to a surface opposite to the mirror surface of the mirror;
A light emitting means for irradiating the mirror surface of the mirror with light;
A light receiving means for receiving reflected light of the light emitted from the light emitting means to the mirror surface;
A heat conductor having one end attached to the surface of the thermoelectric cooling element on the high temperature side and the other end separated from the thermoelectric cooling element;
A holding member provided between one end and the other end of the heat conductor;
A heat dissipating member attached to the other end of the heat conductor;
The heat dissipation member and a cover that covers the heat conductor from the heat dissipation member to the holding member,
The shape of the end surface of the cover is a shape that makes the center of gravity unstable when the end surface is placed in contact with a horizontal plane,
The mirror surface cooling type sensor characterized by the vent hole being formed in the surrounding wall facing the said heat radiating member of the said cover. A mirror whose mirror surface is exposed to the gas to be measured;
A thermoelectric cooling element in which a low-temperature side surface is attached to a surface opposite to the mirror surface of the mirror;
A light emitting means for irradiating the mirror surface of the mirror with light;
A light receiving means for receiving reflected light of the light emitted from the light emitting means to the mirror surface;
A heat conductor having one end attached to the surface of the thermoelectric cooling element on the high temperature side and the other end separated from the thermoelectric cooling element;
A holding member provided between one end and the other end of the heat conductor;
A heat dissipating member attached to the other end of the heat conductor;
The heat dissipation member and a cover that covers the heat conductor from the heat dissipation member to the holding member,
The shape of the end surface of the cover is a shape that makes the center of gravity unstable when the end surface is placed in contact with a horizontal plane,
A vent hole is formed in the end surface of the cover and a peripheral wall between the holding member and the heat dissipation member,
A mirror cooled sensor, wherein a fan is provided in the cover.

Images