JP2005289015A - Metal masking plate for screen printing - Google Patents

Metal masking plate for screen printing Download PDF

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Publication number
JP2005289015A
JP2005289015A JP2004111771A JP2004111771A JP2005289015A JP 2005289015 A JP2005289015 A JP 2005289015A JP 2004111771 A JP2004111771 A JP 2004111771A JP 2004111771 A JP2004111771 A JP 2004111771A JP 2005289015 A JP2005289015 A JP 2005289015A
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Japan
Prior art keywords
metal mask
mask plate
hole
electronic component
diameter hole
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JP2004111771A
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Japanese (ja)
Inventor
Kazuo Imai
一夫 今井
Yoshiaki Yamaguchi
義秋 山口
Isamu Saito
勇 才藤
Naomi Nakayama
尚美 中山
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SMK Corp
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SMK Corp
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Priority to JP2004111771A priority Critical patent/JP2005289015A/en
Priority to TW93127898A priority patent/TW200534410A/en
Priority to KR1020040080517A priority patent/KR100589119B1/en
Priority to CN 200410081787 priority patent/CN1680873A/en
Priority to KR1020050021743A priority patent/KR100817639B1/en
Priority to TW094108137A priority patent/TWI342052B/en
Priority to US11/083,253 priority patent/US7026180B2/en
Priority to EP05005967A priority patent/EP1577740A3/en
Priority to CNB2005100564289A priority patent/CN100511608C/en
Publication of JP2005289015A publication Critical patent/JP2005289015A/en
Pending legal-status Critical Current

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a metal masking plate for screen printing which hardly generates an angular protrusion even when the periphery of an electronic component (120) is sealed with resin by screen printing. <P>SOLUTION: The metal masking plate has a through hole (2) which forms a resin inflow space (4) between the periphery of the electronic component (120) and the metal masking plate, the through hole (2) being constituted of a lower small-diameter hole (2B) and an upper large-diameter hole (2A) communicating with a spot above the lower small-diameter hole (2B), and a stepped part (6) is formed inside the through hole (2). When the metal masking plate (1) for screen plating is removed, only the inside surface of the lower small-diameter hole (2B) comes into contact with a sealing resin (3) sticking to the electronic component (120). Therefore, the shear area is small and the sealing resin (3) is cut apart before the angular protrusion could be generated. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

本発明は、基板上に搭載した電子部品の周囲をスクリーン印刷により樹脂封止する際に用いるスクリーン印刷用メタルマスク版に関する。   The present invention relates to a metal mask plate for screen printing that is used when the periphery of an electronic component mounted on a substrate is resin-sealed by screen printing.

プリント配線基板などの基板上に搭載された電子部品は、その表面に電極などが露出し、酸化、硫化などの経年変化を起こしやすく、また、電極間や他の導電体とショートする恐れがあるので、一般にその全体を絶縁性の樹脂により封止している。   Electronic components mounted on a printed circuit board or other substrate have electrodes exposed on the surface, which are subject to aging, such as oxidation and sulfidation, and may short-circuit between electrodes and other conductors. Therefore, the whole is generally sealed with an insulating resin.

従来、電子部品を樹脂で封止する樹脂封止方法として、メタルマスク版を用いたスクリーン印刷法が知られている(特許文献1参照)。   Conventionally, a screen printing method using a metal mask plate is known as a resin sealing method for sealing an electronic component with a resin (see Patent Document 1).

特許第3128612号公報(第2頁、図9)Japanese Patent No. 3128612 (2nd page, FIG. 9)

このスクリーン印刷を用いた樹脂封止方法は、絶縁性の封止樹脂をスクリーン印刷のインクにみたてて電子部品の周囲に付着させるもので、図10に示すように、エッチング加工等で電子部品120の輪郭よりわずかに大きく深い通孔105を形成したメタルマスク版103で、電子部品120が実装された基板102を覆い、メタルマスク版103の表面に沿ってスキージ104を摺動させて、通孔105と電子部品120との隙間へ封止樹脂106を充填する。   In this resin sealing method using screen printing, an insulating sealing resin is applied to the periphery of an electronic component in the form of ink for screen printing. As shown in FIG. A metal mask plate 103 in which a through hole 105 slightly larger than the outline of 120 is formed covers the substrate 102 on which the electronic component 120 is mounted, and the squeegee 104 is slid along the surface of the metal mask plate 103 to pass through the substrate. The sealing resin 106 is filled in the gap between the hole 105 and the electronic component 120.

その後、メタルマスク版103を取り除き、電子部品120の周囲に付着する封止樹脂106を加熱硬化し、電子部品120の周囲に定着させて封止するものである。   Thereafter, the metal mask plate 103 is removed, and the sealing resin 106 attached to the periphery of the electronic component 120 is heat-cured and fixed around the electronic component 120 for sealing.

スクリーン印刷法によれば、メタルマスク版103を再利用でき、基板102上に固着する全ての電子部品を同時に樹脂封止できるので、量産に適し、工程が単純なので自動化にも適している。   According to the screen printing method, the metal mask plate 103 can be reused, and all the electronic components fixed on the substrate 102 can be simultaneously sealed with resin, so that it is suitable for mass production and the process is simple, and therefore suitable for automation.

この従来の樹脂封止方法では、スキージ104を用いて通孔105へ充填させるために、封止樹脂106には、流動性と粘性のある材料が用いられる。その為、メタルマスク版103を電子部品120の周囲から取り除く際には、図11に示すように、電子部品103のエッジ部周囲に付着する封止樹脂106の一部が通孔105の内側面に付着して引っ張られ、メタルマスク版103を完全に引き離し加熱硬化した図12に示す状態では、電子部品103のエッジ部に封止樹脂106が溜まることによる角状の突起107が形成される。   In this conventional resin sealing method, a material having fluidity and viscosity is used for the sealing resin 106 in order to fill the through hole 105 using the squeegee 104. Therefore, when the metal mask plate 103 is removed from the periphery of the electronic component 120, a part of the sealing resin 106 adhering to the periphery of the edge portion of the electronic component 103 is removed from the inner surface of the through hole 105 as shown in FIG. In the state shown in FIG. 12 in which the metal mask plate 103 is completely separated and heat-cured by being attached to and pulled on, a rectangular protrusion 107 is formed due to the sealing resin 106 remaining on the edge portion of the electronic component 103.

その結果、外観が劣るものとなるばかりか、角状の突起107が他の部品などに当接して、高密度実装の障害となったり、絶縁不良や接触不良などの原因ともなるものであった。   As a result, not only the appearance is inferior, but also the angular protrusion 107 comes into contact with other parts, which causes an obstacle to high-density mounting, and causes an insulation failure or a contact failure. .

特に、透明なタッチパネルの背面側に液晶表示素子などの表示板が積層されたタッチパネル入力装置において、タッチパネルの震動源としてその背面に固着した圧電基板を樹脂封止する場合には、角状の突起107が圧電基板上に形成されると、表示板に当接して表示板をタッチパネルに接近させて配置することができず、表示板が見ずらいものとなる。   In particular, in a touch panel input device in which a display panel such as a liquid crystal display element is laminated on the back side of a transparent touch panel, when a piezoelectric substrate fixed on the back side is used as a vibration source of the touch panel, When 107 is formed on the piezoelectric substrate, the display plate cannot be disposed in contact with the touch panel and close to the touch panel, and the display plate is difficult to see.

また、角状の突起107が表示板に当接すると、圧電基板の振動が拘束され、タッチパネルを十分な振幅で振動させることができないという問題があった。   Further, when the square projection 107 is in contact with the display board, the vibration of the piezoelectric substrate is restrained, and there is a problem that the touch panel cannot be vibrated with sufficient amplitude.

本発明は、このような従来の問題点を考慮してなされたものであり、スクリーン印刷により電子部品の周囲を樹脂封止する場合であっても、角状の突起が発生しにくいスクリーン印刷用メタルマスク版を提供することを目的とする。   The present invention has been made in consideration of the above-described conventional problems. For screen printing, even when the periphery of an electronic component is resin-sealed by screen printing, square projections are unlikely to occur. The object is to provide a metal mask version.

上述の目的を達成するため、請求項1のスクリーン印刷用メタルマスク版は、基板上に搭載された電子部品の全体を収容する通孔が形成され、基板上を覆った状態で、電子部品の周囲と通孔との間に形成される樹脂流入空間へ封止樹脂を充填した後、基板上から取り除き、電子部品の周囲に封止樹脂を付着させるスクリーン印刷用メタルマスク版であって、少なくとも基板上に搭載された電子部品の高さより厚いスクリーン印刷用メタルマスク版に、電子部品の基板上に投影させた輪郭の外側で、付着させようとする封止樹脂の厚みに相当する間隔を隔てた輪郭の下側小径孔と、下側小径孔の上方で連通し、下側小径孔の輪郭を包含する輪郭の上側大径孔とからなる通孔が形成され、通孔内の下側小径孔と上側大径孔の境界に段部が形成されることを特徴とする。   In order to achieve the above-described object, the metal mask plate for screen printing according to claim 1 is provided with a through-hole for accommodating the entire electronic component mounted on the substrate, and covers the substrate in a state where the electronic component is covered. A metal mask plate for screen printing in which a sealing resin is filled into a resin inflow space formed between a periphery and a through hole, then removed from the substrate, and the sealing resin is attached to the periphery of the electronic component, An interval corresponding to the thickness of the sealing resin to be attached to the metal mask plate for screen printing thicker than the height of the electronic component mounted on the substrate, outside the contour projected on the substrate of the electronic component. A lower small diameter hole in the through hole is formed, and a lower small diameter hole communicating with the lower small diameter hole above the lower contour and the upper large diameter hole including the contour of the lower small diameter hole is formed. A step is formed at the boundary between the hole and the upper large-diameter hole. It is characterized in.

基板上に搭載された電子部品の側面と通孔の下側小径孔との間に、封止樹脂の厚みに相当する間隔の樹脂流入空間が形成されるので、スクリーン印刷用メタルマスク版を基板に対して鉛直方向に取り除くと、電子部品の側面に所定の厚みの封止樹脂が付着する。   Since a resin inflow space having an interval corresponding to the thickness of the sealing resin is formed between the side surface of the electronic component mounted on the substrate and the lower small diameter hole of the through hole, the metal mask plate for screen printing is used as the substrate. If the resin is removed in the vertical direction, a sealing resin having a predetermined thickness adheres to the side surface of the electronic component.

電子部品の上面エッジ部上に付着する封止樹脂は、スクリーン印刷用メタルマスク版を鉛直方向に取り除く際に、その一部が通孔内の段部上に付着する封止樹脂の粘性で引っ張られ、スクリーン印刷用メタルマスク版の通孔側に付着する。   The sealing resin adhering to the upper surface edge of the electronic component is partially pulled by the viscosity of the sealing resin adhering to the stepped portion in the through hole when removing the screen printing metal mask plate in the vertical direction. And adheres to the through hole side of the screen printing metal mask plate.

また、電子部品の上面エッジ部に付着する封止樹脂は、剪断方向に沿った面積が小さい下側小径孔でスクリーン印刷用メタルマスク版と切り離されるので、通孔の内側面全体に全体に接触してエッジ部から大きく引き上げられる場合に比べて、すぐに切断される。   In addition, the sealing resin adhering to the upper edge of the electronic component is cut off from the metal mask plate for screen printing with a lower small-diameter hole with a small area along the shearing direction, so it contacts the entire inner surface of the through-hole. Then, it is cut immediately compared to the case where it is pulled up largely from the edge portion.

請求項2のスクリーン印刷用メタルマスク版は、スクリーン印刷用メタルマスク版は、電子部品の搭載部位に対応させて下側小径孔が形成された下層メタルマスク版と、下層メタルマスク版の上方に積層され、下側小径孔に連通する上側大径孔が形成された上層メタルマスク版とからなることを特徴とする。   The metal mask plate for screen printing according to claim 2, wherein the metal mask plate for screen printing is formed above the lower layer metal mask plate and the lower layer metal mask plate in which a lower small-diameter hole is formed corresponding to the mounting part of the electronic component. And an upper metal mask plate having an upper large-diameter hole that is laminated and communicated with the lower small-diameter hole.

下側小径孔と上側大径孔は、それぞれ下層メタルマスク版と上層メタルマスク版にエッチング加工工程を施すことにより形成することができ、段部を有する通孔は、両者を積層させることにより、電子部品の搭載位置に対応させて精度良く簡単に形成することができる。   The lower small-diameter hole and the upper large-diameter hole can be formed by applying an etching process to the lower metal mask plate and the upper metal mask plate, respectively. It can be easily formed with high accuracy corresponding to the mounting position of the electronic component.

請求項3のスクリーン印刷用メタルマスク版は、電子部品が、タッチパネルに固着され、タッチパネルへの押圧操作を検出した際に振動する圧電基板であることを特徴とする。   According to a third aspect of the present invention, there is provided a metal mask plate for screen printing, wherein the electronic component is a piezoelectric substrate that is fixed to the touch panel and vibrates when a pressing operation on the touch panel is detected.

電子部品のエッジ部に封止樹脂による角状の突起が生じにくいので、タッチパネルへの入力操作の指標を表示する表示板を電子部品の上面側に密着させて配置させることができる。   Since an angular protrusion due to the sealing resin is unlikely to occur at the edge portion of the electronic component, a display board for displaying an index of an input operation to the touch panel can be disposed in close contact with the upper surface side of the electronic component.

請求項1の発明によれば、電子部品のエッジ部に付着する封止樹脂は、スクリーン印刷用メタルマスク版を取り除く際に、その一部がスクリーン印刷用メタルマスク版側に付着するとともに、大きく引き上げられる前に切断されるので、硬化させた後に角状の突起として残りにくい。   According to the first aspect of the present invention, the sealing resin adhering to the edge portion of the electronic component partially adheres to the screen printing metal mask plate side when removing the screen printing metal mask plate, Since it is cut before it is pulled up, it is hard to remain as a horn-shaped projection after being cured.

従って、封止した後の電子部品の外観を損なうことがなく、また、他の部品などに接触して絶縁耐圧不良や接続不良を引き起こすことがない。   Therefore, the appearance of the electronic component after sealing is not impaired, and it does not contact other components and cause breakdown voltage failure or connection failure.

また、請求項2の発明によれば、スクリーン印刷用メタルマスク版に対して、段部を有する通孔を、簡単にかつ精度よく形成することができる。   According to the invention of claim 2, the through-hole having the step portion can be easily and accurately formed in the metal mask plate for screen printing.

また、請求項3の発明によれば、更に圧電基板が固着されるタッチパネル側に近接して表示板を配置することができ、表示板による表示が見やすいものとなる。また、圧電基板を封止する封止樹脂に角状の突起が、タッチパネルに近接して配置される他の部品や基板に触れることがなく、圧電基板の振動が制約されることがない。   According to the invention of claim 3, the display plate can be further arranged close to the touch panel side to which the piezoelectric substrate is fixed, and the display on the display plate is easy to see. In addition, the angular protrusions on the sealing resin that seals the piezoelectric substrate do not touch other components or the substrate disposed in the vicinity of the touch panel, and the vibration of the piezoelectric substrate is not restricted.

以下、本発明の一実施の形態に係るスクリーン印刷用メタルマスク版(以下、メタルマスク版1という)を、図1乃至図9を用いて説明する。本実施の形態に係るメタルマスク版1は、図3と図4に示すタッチパネル入力装置100に振動部品として備えられる圧電基板120を樹脂封止する際に用いられるもので、始めに、このタッチパネル入力装置100とその震動源となる圧電基板120について図3,図4で説明する。図3は、タッチパネル入力装置100の分解斜視図、図4は、その背面図である。   Hereinafter, a screen printing metal mask plate (hereinafter referred to as a metal mask plate 1) according to an embodiment of the present invention will be described with reference to FIGS. The metal mask plate 1 according to the present embodiment is used when a piezoelectric substrate 120 provided as a vibration component in the touch panel input device 100 shown in FIGS. 3 and 4 is resin-sealed. The apparatus 100 and the piezoelectric substrate 120 as the vibration source will be described with reference to FIGS. 3 is an exploded perspective view of the touch panel input device 100, and FIG. 4 is a rear view thereof.

タッチパネル入力装置100は、デジタイザとも呼ばれるもので、操作パネル101と支持基板102とを僅かな間隙を隔てて積層して構成されるタッチパネル内に押圧位置を検出する操作エリア100Aが設定されている。図示するタッチパネル入力装置100は、抵抗感圧方式により押圧位置を検出するもので、その為に操作パネル101と支持基板102の対向面に均一な抵抗皮膜からなる導電体層101a、102aが被着され、一対の圧電基板120,120が、操作エリア100Aの周囲で支持基板102の背面側に固着されている。   The touch panel input device 100 is also called a digitizer, and an operation area 100A for detecting a pressed position is set in a touch panel configured by laminating an operation panel 101 and a support substrate 102 with a slight gap therebetween. The illustrated touch panel input device 100 detects a pressing position by a resistance pressure-sensitive method. For this purpose, conductor layers 101a and 102a made of a uniform resistance film are deposited on the opposing surfaces of the operation panel 101 and the support substrate 102. The pair of piezoelectric substrates 120 and 120 are fixed to the back side of the support substrate 102 around the operation area 100A.

操作パネル101と支持基板102及びこれらの対向面に被着される導電体層101a、102aは、操作者が操作エリア100Aを通してその下方に配置される表示装置(図示せず)の表示画面を見ながら押圧操作が可能なように、いずれも透明材料で形成されている。   The operation panel 101, the support substrate 102, and the conductor layers 101a and 102a attached to the opposing surfaces of the operation panel 101 and the support layer 102 are displayed on the display screen of a display device (not shown) arranged below the operator through the operation area 100A. However, both are made of a transparent material so that a pressing operation is possible.

圧電基板120は、細長帯状に形成され、表裏両面に一組の駆動電極120a、120bが形成され、表面側を、接着剤などを用いてタッチパネルとなる支持基板102の背面側で、操作者の表示装置への視線を遮らないように、操作エリア100Aと支持基板102の周辺との間のわずかな隙間に固着している。   The piezoelectric substrate 120 is formed in an elongated band shape, a pair of drive electrodes 120a and 120b is formed on both front and back surfaces, and the front side is the back side of the support substrate 102 that becomes a touch panel using an adhesive or the like. In order not to block the line of sight to the display device, it is fixed in a slight gap between the operation area 100A and the periphery of the support substrate 102.

操作エリア100Aへの押圧操作は、導電体層101a、102a間の接触により検出され、押圧操作が検出されると、一組の駆動電極120a、120bに駆動電圧が印加され、伸縮する圧電基板120を固着した支持基板102を含むタッチパネル全体を振動させ、操作者はその振動から押圧操作が受け付けられたことを確認する。   The pressing operation on the operation area 100A is detected by contact between the conductor layers 101a and 102a. When the pressing operation is detected, a driving voltage is applied to the pair of driving electrodes 120a and 120b, and the piezoelectric substrate 120 expands and contracts. The entire touch panel including the support substrate 102 to which is attached is vibrated, and the operator confirms that the pressing operation is accepted from the vibration.

このように支持基板102の背面に固着された圧電基板120は、その駆動電極120a、120bが表裏、若しくは側面に露出するので、他の部品との絶縁や駆動電極120a、120b自体の経年変化による劣化を防止するために、その周囲全体を絶縁性の封止樹脂で封止する。   Since the drive electrodes 120a and 120b of the piezoelectric substrate 120 fixed to the back surface of the support substrate 102 are exposed on the front, back, and side surfaces, the insulation from other components and the aging of the drive electrodes 120a and 120b themselves are caused. In order to prevent deterioration, the entire periphery is sealed with an insulating sealing resin.

尚、以下の説明では、図1に示すように、支持基板102の背面側を上方に向けて、背面をメタルマスク版1で覆うので、図3に示すタッチパネル入力装置100の背面方向を上方と、すなわち圧電基板120の背面を上面120Aとして説明する。   In the following description, as shown in FIG. 1, the back side of the support substrate 102 faces upward and the back side is covered with the metal mask plate 1, so that the back direction of the touch panel input device 100 shown in FIG. That is, the back surface of the piezoelectric substrate 120 is described as the upper surface 120A.

メタルマスク版1は、それぞれアルミニウム、ステンレス鋼などの金属材料からなる金属板で、図2(a)、(b)に示すように、同一の長方形状の輪郭に形成された下層メタルマスク版1Bと上層メタルマスク版1Aとからなり、下層メタルマスク版1Bの上方に上層メタルマスク版1Aを積層して構成されるメタルマスク版1の厚さは、支持基板102上に固着された圧電基板120の高さより、厚いものとなっている。   The metal mask plate 1 is a metal plate made of a metal material such as aluminum or stainless steel, and as shown in FIGS. 2A and 2B, the lower metal mask plate 1B formed in the same rectangular shape. And the upper metal mask plate 1A, and the thickness of the metal mask plate 1 formed by stacking the upper metal mask plate 1A above the lower metal mask plate 1B is the piezoelectric substrate 120 fixed on the support substrate 102. It is thicker than the height.

下層メタルマスク版1Bには、支持基板102上に固着された圧電基板120に対応する部位に、下側小径孔2Bが上下方向に筒状に穿設されている。下側小径孔2Bは、支持基板102上に固着された圧電基板120の周囲を、封止樹脂3の厚みに相当する間隔dを隔て取り囲む輪郭形状に形成される。すなわち、下側小径孔2Bの支持基板102上に投影させた輪郭は、圧電基板120を支持基板102上に投影させた輪郭(図2(a)の破線で表示)の外側で、圧電基板120の側面に付着させようとする封止樹脂3の厚みに相当する間隔dを隔てたものとなっている。   In the lower metal mask plate 1B, a lower small-diameter hole 2B is formed in a cylindrical shape in the vertical direction at a portion corresponding to the piezoelectric substrate 120 fixed on the support substrate 102. The lower small-diameter hole 2 </ b> B is formed in a contour shape that surrounds the periphery of the piezoelectric substrate 120 fixed on the support substrate 102 with a gap d corresponding to the thickness of the sealing resin 3. That is, the outline projected on the support substrate 102 of the lower small-diameter hole 2B is outside the outline (indicated by the broken line in FIG. 2A) where the piezoelectric substrate 120 is projected on the support substrate 102. The distance d corresponding to the thickness of the sealing resin 3 to be attached to the side surface is separated.

また、上層メタルマスク版1Aには、下側小径孔2Bが穿設された部位に対応し、上側大径孔2Aが上下方向に筒状に穿設されている。上側大径孔2Aは、下層メタルマスク版1Bに穿設された下側小径孔2Bの周囲を、所定の間隔を隔てて更に取り囲む輪郭形状に形成される。すなわち、図2(b)に示すように、支持基板102上に投影させた上側大径孔2Aの輪郭は、下側小径孔2Bの輪郭(図中破線で表示)の外側で一定の間隔を隔てたものとなり、これにより、下層メタルマスク版1B上に上層メタルマスク版1Aを積層させると、下側小径孔2Bの周囲に階段状の段部6が形成される(図1参照)。   In addition, the upper metal mask plate 1A has an upper large-diameter hole 2A formed in a cylindrical shape in the vertical direction corresponding to a portion where the lower small-diameter hole 2B is formed. The upper large-diameter hole 2A is formed in a contour shape that further surrounds the periphery of the lower small-diameter hole 2B formed in the lower metal mask plate 1B at a predetermined interval. That is, as shown in FIG. 2B, the contour of the upper large-diameter hole 2A projected on the support substrate 102 is spaced apart from the contour of the lower small-diameter hole 2B (indicated by a broken line in the figure). Thus, when the upper metal mask plate 1A is laminated on the lower metal mask plate 1B, a stepped step portion 6 is formed around the lower small-diameter hole 2B (see FIG. 1).

上側大径孔2Aと下側小径孔2Bは、例えばエッチング処理を施して2枚のメタルマスク版1A、1Bのそれぞれに形成し、その後2枚のタルマスク版1A、1Bを重ね合わせることにより、両者を溶接、接着などにより固着し一体化し、メタルマスク版1としている。これにより、メタルマスク版1に、下側小径孔2Bと上側大径孔2Aが上下方向で連通する通孔2が、圧電基板120の固着部位に対応して形成される。このように形成されたメタルマスク版1で支持基板102を覆うと、通孔2内に圧電基板120の全体が収容され、通孔2の内側面と圧電基板120との間に、封止樹脂3を充填する樹脂流入空間4が形成される(図5(a)、(b)参照)。   The upper large-diameter hole 2A and the lower small-diameter hole 2B are formed, for example, on each of the two metal mask plates 1A and 1B by performing an etching process, and then the two tall mask plates 1A and 1B are overlapped. Are bonded and integrated by welding, bonding, etc. to form a metal mask plate 1. Thereby, the through hole 2 in which the lower small diameter hole 2 </ b> B and the upper large diameter hole 2 </ b> A communicate with each other in the vertical direction is formed in the metal mask plate 1 corresponding to the fixing portion of the piezoelectric substrate 120. When the support substrate 102 is covered with the metal mask plate 1 formed in this way, the entire piezoelectric substrate 120 is accommodated in the through hole 2, and a sealing resin is interposed between the inner surface of the through hole 2 and the piezoelectric substrate 120. 3 is formed (see FIGS. 5A and 5B).

樹脂流入空間4の間隔、特に圧電基板120と下側小径孔2Bとの間隔は、圧電基板120の側面に付着する封止樹脂3が操作エリア100A側に突出しないように、操作エリア100Aと圧電基板120との隙間d以下とされ、ここでは、その間隔dに等しい0.5mmとなっている。また、通孔2の高さは、圧電基板120の高さが0.7mmとして、その高さより高い1mmとなっている。   The interval between the resin inflow space 4, particularly the interval between the piezoelectric substrate 120 and the lower small-diameter hole 2 </ b> B, is such that the sealing resin 3 attached to the side surface of the piezoelectric substrate 120 does not protrude toward the operation area 100 </ b> A. The gap d is equal to or less than the gap d with respect to the substrate 120, which is 0.5 mm, which is equal to the distance d. The height of the through hole 2 is 1 mm, which is higher than the height of the piezoelectric substrate 120, assuming that the height of the piezoelectric substrate 120 is 0.7 mm.

樹脂流入空間4に充填される封止樹脂3は、少なくとも絶縁性とチキソ性と熱硬化性を有する合成樹脂が用いられ、ここではこれらの特性を有するエポキシ樹脂を用いる。絶縁性は、1組の駆動電極120a、120bが露出する圧電基板120の表面全体を覆うので、これらの電極間を短絡させないため、熱硬化性は、充填後に加熱し、圧電基板120の周囲で硬化させる為に、それぞれ封止樹脂3の特性として要求される。また、チキソ性は、チキソトロピー(thixotropy)、揺変性ともいわれ、流動中は粘度が低下し、静置すると元の粘度の高い状態に戻るの性質をいい、後述するように、樹脂流入空間4へ充填しやすく、充填後は、加熱硬化工程までその形状を維持するために、要求される。   As the sealing resin 3 filled in the resin inflow space 4, a synthetic resin having at least insulating properties, thixotropic properties, and thermosetting properties is used. Here, an epoxy resin having these characteristics is used. The insulating property covers the entire surface of the piezoelectric substrate 120 where the pair of drive electrodes 120a and 120b are exposed, so that these electrodes are not short-circuited. Therefore, the thermosetting property is heated after filling and around the piezoelectric substrate 120. In order to be cured, each is required as a characteristic of the sealing resin 3. The thixotropy is also called thixotropy or thixotropy, which means that the viscosity decreases during flow and returns to the original high viscosity state when left standing. It is easy to fill, and after filling, it is required to maintain its shape until the heat curing step.

加えて、封止樹脂3は、熱硬化の際の低収縮率、熱硬化後に一定の弾性があること、つまり弾性係数が小さい値であること、低温で熱硬化することが好ましい。熱硬化の際の低収縮率が求められるのは、樹脂流入空間4へ充填される際に、封止樹脂3が圧電基板120から引き出される配線パターン(図4の120c、120d、120e、120f)上にも付着し、収縮率が高いと熱硬化の際にこれらの配線パターンを引き込み、パターン剥離や切断の原因となるからである。また、一定の弾性が求められるのは、硬化後には、振動発生源となる圧電基板120の歪みを拘束しないためであり、低温硬化が望まれるのは、硬化させるために高温とすると、圧電素子120がキュリー点に達して分極が乱れ、駆動電圧を印加しても歪まなくなるからである。   In addition, it is preferable that the sealing resin 3 has a low shrinkage rate upon thermosetting, a certain elasticity after thermosetting, that is, a value having a small elastic modulus, and thermosetting at a low temperature. A low shrinkage rate upon thermosetting is required because a wiring pattern (120c, 120d, 120e, 120f in FIG. 4) in which the sealing resin 3 is drawn from the piezoelectric substrate 120 when the resin inflow space 4 is filled. This is because, if it adheres to the top and the shrinkage rate is high, these wiring patterns are pulled in at the time of thermosetting, resulting in pattern peeling or cutting. Further, a certain degree of elasticity is required in order not to constrain the distortion of the piezoelectric substrate 120 that becomes a vibration generation source after curing, and low-temperature curing is desired when a high temperature is required for curing. This is because 120 reaches the Curie point, polarization is disturbed, and no distortion occurs even when a drive voltage is applied.

この封止樹脂3は、図1に示すように、メタルマスク版1の一端上に流動する状態で載せられ、スキージ5を用いたスクリーン印刷法で通孔2の樹脂流入空間4へ充填される。スキージ5は、封止樹脂3を樹脂流入空間4へ押し出すことができれば、任意の材質でよいが、ここではゴム製のスキージ5を用いる。   As shown in FIG. 1, the sealing resin 3 is placed in a state of flowing on one end of the metal mask plate 1 and is filled into the resin inflow space 4 of the through hole 2 by screen printing using a squeegee 5. . The squeegee 5 may be made of any material as long as the sealing resin 3 can be pushed out to the resin inflow space 4, but here, a rubber squeegee 5 is used.

以下、本実施の形態に係るメタルマスク版1を用いて、電子部品である圧電基板120を封止樹脂3で封止する各工程を、図1と図5乃至図9を用いて説明する。   Hereinafter, each process of sealing the piezoelectric substrate 120 which is an electronic component with the sealing resin 3 using the metal mask plate 1 according to the present embodiment will be described with reference to FIGS. 1 and 5 to 9.

始めに、図示しないスクリーン印刷機のスライドテーブル上に圧電基板120の固着側を表側として支持基板102をセットし、図1と図5に示すように、セットした支持基板102を覆うように、通孔2を有するメタルマスク版1を重ねる。重ねた状態で、圧電基板120と通孔2の間に樹脂流入空間4が形成される。圧電基板120の周囲と下側小径孔2Bとの間の樹脂流入空間4の間隔は、0.5mmと狭く、また圧電基板120の高さは、通孔2より低いが下側小径孔2Bより高く、下側小径孔2Bよりわずかに突き出た状態となっている。   First, a support substrate 102 is set on a slide table of a screen printing machine (not shown) with the fixing side of the piezoelectric substrate 120 as a front side, and as shown in FIG. 1 and FIG. A metal mask plate 1 having holes 2 is overlaid. In the stacked state, a resin inflow space 4 is formed between the piezoelectric substrate 120 and the through hole 2. The interval of the resin inflow space 4 between the periphery of the piezoelectric substrate 120 and the lower small-diameter hole 2B is as narrow as 0.5 mm, and the height of the piezoelectric substrate 120 is lower than the through-hole 2 but lower than the lower small-diameter hole 2B. It is high and slightly protrudes from the lower small-diameter hole 2B.

その後、スキージ5をメタルマスク版1の表面に沿って摺動させ、メタルマスク版1の一側に載せた封止樹脂3を樹脂流入空間4へ充填する。この封止樹脂3の充填工程では、図6(a)(b)に示すように、スキージ5をメタルマスク版1の表面に沿って摺動させ、メタルマスク版1の一側に載せた流動状態の封止樹脂3をメタルマスク版1の表面に沿って押し出し、圧電基板120の表面側を含む樹脂流入空間4にむらなく充填する
(図7(a)(b)参照)。
Thereafter, the squeegee 5 is slid along the surface of the metal mask plate 1 to fill the resin inflow space 4 with the sealing resin 3 placed on one side of the metal mask plate 1. In the filling process of the sealing resin 3, as shown in FIGS. 6A and 6B, the squeegee 5 is slid along the surface of the metal mask plate 1 and is placed on one side of the metal mask plate 1. The sealing resin 3 in the state is extruded along the surface of the metal mask plate 1 to uniformly fill the resin inflow space 4 including the surface side of the piezoelectric substrate 120 (see FIGS. 7A and 7B).

その後、図8(a)(b)に示すように、メタルマスク版1を支持基板102に直交する鉛直方向に引き上げ、図9(a)(b)に示すように、粘性のある封止樹脂3が完全に圧電基板120側と分離するまで引き上げる。圧電基板120の周囲に付着する封止樹脂3とメタルマスク版1との切り離しの際には、圧電基板120上面120Aのエッジ部周辺に充填された封止樹脂3の一部が、図8(a)(b)に示すように段部6上に残された封止樹脂3の粘性でメタルマスク版1側に引き上げられ、エッジ部に付着する封止樹脂3の量が減少する。また、封止樹脂3を切断する剪断方向(鉛直方向)で封止樹脂3に接するのは、メタルマスク版1の通孔2全体より接触面積が小さい下側小径孔2Bの内側面であるので、封止樹脂3のメタルマスク版1側との粘着力は弱く、メタルマスク版1をわずかに引き上げるだけで切り離される。   Thereafter, as shown in FIGS. 8A and 8B, the metal mask plate 1 is pulled up in the vertical direction orthogonal to the support substrate 102, and as shown in FIGS. 9A and 9B, a viscous sealing resin is used. 3 is pulled up until it completely separates from the piezoelectric substrate 120 side. When the sealing resin 3 adhering to the periphery of the piezoelectric substrate 120 and the metal mask plate 1 are separated, a part of the sealing resin 3 filled around the edge portion of the upper surface 120A of the piezoelectric substrate 120 is shown in FIG. a) As shown in (b), the viscosity of the sealing resin 3 left on the step portion 6 is pulled up to the metal mask plate 1 side, and the amount of the sealing resin 3 adhering to the edge portion is reduced. In addition, the contact with the sealing resin 3 in the shearing direction (vertical direction) for cutting the sealing resin 3 is the inner surface of the lower small-diameter hole 2B having a smaller contact area than the entire through hole 2 of the metal mask plate 1. The adhesive strength of the sealing resin 3 to the metal mask plate 1 side is weak, and the sealing resin 3 can be separated by slightly lifting the metal mask plate 1.

その結果、メタルマスク版1を完全に取り除いた後には、圧電基板120上面120Aのエッジ部周辺に角状の突起が発生せず、発生したとしても低い高さの突起に押さえられ、圧電基板120の全周に封止樹脂3がほぼ0.5mmの均一な厚みで付着する。   As a result, after the metal mask plate 1 is completely removed, no angular protrusions are generated around the edge portion of the upper surface 120A of the piezoelectric substrate 120. The sealing resin 3 adheres to the entire circumference with a uniform thickness of approximately 0.5 mm.

このように封止樹脂3を付着させた圧電基板120は、支持基板102ごと、180℃程度の高温炉内に移動し、封止樹脂3を熱硬化させて定着させる。この熱硬化させるまでの間、圧電基板120に付着した封止樹脂3は静置した状態にあるので、元の高い粘度の状態に戻ってその形状を維持する。従って、圧電基板120の側面に沿って下方にだれることがなく、0.5mmの薄肉でありながら、圧電基板120の全周を完全に覆った状態でその形状を維持する。   The piezoelectric substrate 120 to which the sealing resin 3 is attached in this manner is moved into the high-temperature furnace at about 180 ° C. together with the support substrate 102, and the sealing resin 3 is thermally cured and fixed. Until the heat curing, the sealing resin 3 attached to the piezoelectric substrate 120 is in a stationary state, so that it returns to the original high viscosity state and maintains its shape. Therefore, the shape of the piezoelectric substrate 120 is maintained in a state where the entire circumference of the piezoelectric substrate 120 is completely covered while the thickness is 0.5 mm without being inclined downward along the side surface of the piezoelectric substrate 120.

熱硬化した封止樹脂3で封止された圧電基板120は、外気と接触せず、経年変化による劣化が防止され、また、電極が絶縁性の封止樹脂3で覆われるので、他と短絡する恐れもない。また、その上面120Aのエッジ部に角状の突起が表れないので、支持基板102の背面側に接近させて液晶表示板などの表示板を配置することができ、タッチパネルを通しての表示板による表示が操作者に見やすいものとなる。   The piezoelectric substrate 120 sealed with the thermosetting sealing resin 3 does not come into contact with the outside air, prevents deterioration due to aging, and the electrodes are covered with the insulating sealing resin 3, so that they are short-circuited with others. There is no fear of doing. In addition, since a square-shaped protrusion does not appear on the edge portion of the upper surface 120A, a display panel such as a liquid crystal display panel can be arranged close to the back side of the support substrate 102, and display on the display panel through the touch panel can be performed. It will be easy for the operator to see.

上述の実施の形態では、樹脂封止する電子部品として振動部品である圧電基板で説明したが、基板に搭載されるものであれば、種々の電子部品を樹脂封止する際に用いるメタルマスク版に適用できる。   In the above-described embodiment, the piezoelectric substrate which is a vibration component is described as an electronic component to be resin-sealed. However, a metal mask plate used for resin-sealing various electronic components as long as it is mounted on the substrate. Applicable to.

また、メタルマスク版1は、2枚の金属板からなるメタルマスク版1A、1Bを重ねて段部を有する通孔を形成したが、1枚のメタルマスク版1に切削など他の加工方法を用いて段部を有する通孔を形成するものであってもよい。   Further, the metal mask plate 1 is formed with a through hole having a step portion by overlapping the metal mask plates 1A and 1B made of two metal plates. However, other processing methods such as cutting may be applied to the single metal mask plate 1. It may be used to form a through hole having a stepped portion.

本発明は、プリント配線基板などに搭載される電子部品の周囲に、スクリーン印刷法を用いて封止樹脂を付着させるメタルマスク版に適している。   The present invention is suitable for a metal mask plate in which a sealing resin is attached around an electronic component mounted on a printed wiring board or the like using a screen printing method.

支持基板102に固着された圧電基板120とメタルマスク版1の配置関係を示す斜視図である。FIG. 3 is a perspective view showing an arrangement relationship between the piezoelectric substrate 120 fixed to the support substrate 102 and the metal mask plate 1. メタルマスク版1の(a)は、下層メタルマスク版1Bの平面図、(b)は、上層メタルマスク版1Aの平面図、である。(A) of the metal mask plate 1 is a plan view of the lower layer metal mask plate 1B, and (b) is a plan view of the upper layer metal mask plate 1A. タッチパネル入力装置100の分解斜視図である。2 is an exploded perspective view of a touch panel input device 100. FIG. 圧電基板120が固着する支持基板102の背面図である。It is a rear view of the support substrate 102 to which the piezoelectric substrate 120 adheres. 封止樹脂3を樹脂流入空間4へ充填する充填工程を開始する前の状態を示し、(a)は、通孔3の短手方向に沿って切断した縦断面図、(b)は、通孔3の長手方向に沿って切断した一部省略縦断面図、である。The state before starting the filling process which fills the resin inflow space 4 with the sealing resin 3 is shown, (a) is a longitudinal sectional view cut along the short direction of the through-hole 3, and (b) is a through-passage. FIG. 4 is a partially omitted longitudinal sectional view cut along the longitudinal direction of a hole 3. 封止樹脂3を樹脂流入空間4へ充填する充填工程を示し、(a)は、通孔3の短手方向に沿って切断、スキージ5の摺動方向の後方からみた縦断面図、(b)は、通孔3の長手方向に沿って切断した一部省略縦断面図、である。The filling process of filling the sealing resin 3 into the resin inflow space 4 is shown, (a) is a longitudinal sectional view as seen from the rear in the sliding direction of the squeegee 5, cut along the short direction of the through hole 3. ) Is a partially omitted longitudinal sectional view cut along the longitudinal direction of the through-hole 3. 充填工程が終了した封止樹脂3の充填状況を示し、(a)は、通孔3の短手方向に沿って切断した縦断面図、(b)は、通孔3の長手方向に沿って切断した一部省略縦断面図、である。The filling state of the sealing resin 3 after the filling process is shown, (a) is a longitudinal sectional view cut along the short direction of the through hole 3, and (b) is along the longitudinal direction of the through hole 3. It is the partially abbreviate | omitted longitudinal cross-sectional view cut | disconnected. メタルマスク版1を鉛直方向に引き上げる工程を示し、(a)は、通孔3の短手方向に沿って切断した縦断面図、(b)は、通孔3の長手方向に沿って切断した一部省略縦断面図、である。The process of pulling up the metal mask plate 1 in the vertical direction is shown, (a) is a longitudinal sectional view cut along the short direction of the through hole 3, and (b) is cut along the long direction of the through hole 3. FIG. 圧電基板120側とメタルマスク版1側の封止樹脂3を分離させた工程を示し、(a)は、通孔3の短手方向に沿って切断した縦断面図、(b)は、通孔3の長手方向に沿って切断した一部省略縦断面図、である。The process which isolate | separated the sealing resin 3 of the piezoelectric substrate 120 side and the metal mask plate 1 side is shown, (a) is the longitudinal cross-sectional view cut | disconnected along the transversal direction of the through-hole 3, (b) is a through-passage. FIG. 4 is a partially omitted longitudinal sectional view cut along the longitudinal direction of a hole 3. 従来のメタルマスク版103を用いて電子部品120の周囲に封止樹脂106を付着させるスクリーン印刷工程の縦断面図である。It is a longitudinal cross-sectional view of the screen printing process which adheres sealing resin 106 to the circumference | surroundings of the electronic component 120 using the conventional metal mask plate 103. FIG. メタルマスク版103を引き上げた状態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the state which pulled up the metal mask plate 103. FIG. 電子部品120に付着する封止樹脂106からメタルマスク版103を完全に引き離した状態を示す縦断面図である。It is a longitudinal cross-sectional view which shows the state which pulled apart the metal mask plate 103 from the sealing resin 106 adhering to the electronic component 120 completely.

符号の説明Explanation of symbols

1 スクリーン印刷用メタルマスク版
1A 上層メタルマスク版
1B 下層メタルマスク版
2 通孔
2A 上側大径孔
2B 下側小径孔
3 封止樹脂
4 樹脂流入空間
6 段部
100 タッチパネル入力装置
100A 操作エリア
102 タッチパネル(支持基板)
120 電子部品(圧電基板)
DESCRIPTION OF SYMBOLS 1 Metal mask plate for screen printing 1A Upper metal mask plate 1B Lower metal mask plate 2 Through hole 2A Upper large diameter hole 2B Lower small diameter hole 3 Sealing resin 4 Resin inflow space 6 Step part 100 Touch panel input device 100A Operation area 102 Touch panel (Support substrate)
120 Electronic components (piezoelectric substrates)

Claims (3)

基板(102)上に搭載された電子部品(120)の全体を収容する通孔(2)が形成され、基板(102)上を覆った状態で、電子部品(120)の周囲と通孔(2)との間に形成される樹脂流入空間(4)へ封止樹脂(3)を充填した後、基板(102)上から取り除き、電子部品(120)の周囲に封止樹脂(3)を付着させるスクリーン印刷用メタルマスク版であって、
少なくとも基板(102)上に搭載された電子部品(120)の高さより厚いスクリーン印刷用メタルマスク版(1)に、電子部品(120)の基板(102)上に投影させた輪郭の外側で、付着させようとする封止樹脂(3)の厚み(d)に相当する間隔を隔てた輪郭の下側小径孔(2B)と、下側小径孔(2B)の上方で連通し、下側小径孔(2B)の輪郭を包含する輪郭の上側大径孔(2A)とからなる通孔(2)が形成され、通孔(2)内の下側小径孔(2B)と上側大径孔(2A)の境界に段部(6)が形成されることを特徴とするスクリーン印刷用メタルマスク版。
A through hole (2) for accommodating the entire electronic component (120) mounted on the substrate (102) is formed, and the periphery of the electronic component (120) and the through hole ( 2) After the sealing resin (3) is filled into the resin inflow space (4) formed between the substrate and the substrate (102), the sealing resin (3) is removed around the electronic component (120). A metal mask plate for screen printing to be attached,
Outside the contour projected onto the substrate (102) of the electronic component (120) on the metal mask plate (1) for screen printing that is thicker than at least the height of the electronic component (120) mounted on the substrate (102), The lower small-diameter hole (2B) having an interval corresponding to the thickness (d) of the sealing resin (3) to be attached communicates with the lower small-diameter hole (2B) above the lower small-diameter hole (2B). A through hole (2) including an upper large-diameter hole (2A) having an outline including the outline of the hole (2B) is formed, and a lower small-diameter hole (2B) and an upper large-diameter hole (2) in the through-hole (2) are formed. A metal mask plate for screen printing, wherein a step (6) is formed at the boundary of 2A).
スクリーン印刷用メタルマスク版(1)は、電子部品(120)の搭載部位に対応させて下側小径孔(2B)が形成された下層メタルマスク版(1B)と、下層メタルマスク版(1B)の上方に積層され、下側小径孔(2B)に連通する上側大径孔(2A)が形成された上層メタルマスク版(1A)とからなることを特徴とする請求項1記載のスクリーン印刷用メタルマスク版。 The metal mask plate for screen printing (1) includes a lower metal mask plate (1B) in which a lower small-diameter hole (2B) is formed corresponding to the mounting part of the electronic component (120), and a lower metal mask plate (1B). The upper layer metal mask plate (1A) formed with an upper large-diameter hole (2A) that is laminated above and communicates with the lower small-diameter hole (2B). Metal mask version. 電子部品は、タッチパネル(102)に固着され、タッチパネル(102)への押圧操作を検出した際に振動する圧電基板(120)であることを特徴とする請求項1または請求項2に記載のスクリーン印刷用メタルマスク版。 The screen according to claim 1 or 2, wherein the electronic component is a piezoelectric substrate (120) that is fixed to the touch panel (102) and vibrates when a pressing operation on the touch panel (102) is detected. Metal mask version for printing.
JP2004111771A 2004-03-19 2004-04-06 Metal masking plate for screen printing Pending JP2005289015A (en)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2004111771A JP2005289015A (en) 2004-04-06 2004-04-06 Metal masking plate for screen printing
TW93127898A TW200534410A (en) 2004-04-06 2004-09-15 Metal masking plate for screen printing
KR1020040080517A KR100589119B1 (en) 2004-04-06 2004-10-08 Metal mask plate for screen printing
CN 200410081787 CN1680873A (en) 2004-04-06 2004-12-29 Screen-printing metal mask plate
KR1020050021743A KR100817639B1 (en) 2004-03-19 2005-03-16 Screen-printing metal mask plate and method of resin-sealing vibrating part
TW094108137A TWI342052B (en) 2004-03-19 2005-03-17 Screen-printing metal mask plate and method of resin-sealing vibrating part
US11/083,253 US7026180B2 (en) 2004-03-19 2005-03-17 Screen-printing metal mask plate and method of resin-sealing vibrating part
EP05005967A EP1577740A3 (en) 2004-03-19 2005-03-18 Screen-printing metal mask plate and method of resin-sealing vibration part
CNB2005100564289A CN100511608C (en) 2004-03-19 2005-03-21 Metal mask plate

Applications Claiming Priority (1)

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JP2004111771A JP2005289015A (en) 2004-04-06 2004-04-06 Metal masking plate for screen printing

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JP2005289015A true JP2005289015A (en) 2005-10-20

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JPWO2016136357A1 (en) * 2015-02-27 2017-11-30 富士フイルム株式会社 Flexographic printing plate and method for producing flexographic printing plate
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JPH01270325A (en) * 1988-04-22 1989-10-27 Seiko Epson Corp Mask for potting seal
JPH036731A (en) * 1989-06-05 1991-01-14 Matsushita Electric Ind Co Ltd Message display device
JP2519378B2 (en) * 1992-09-10 1996-07-31 ミサワホーム株式会社 Roofing panel
TW434850B (en) 1998-12-31 2001-05-16 World Wiser Electronics Inc Packaging equipment and method for integrated circuit
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TW200534410A (en) 2005-10-16

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