JP2005288336A - Method of assembling pure water manufacturing apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of assembling a pure water manufacturing apparatus by which contaminants such as an organic substance can be prevented from eluting from a water treatment apparatus such as a reverse osmosis membrane apparatus when the pure water manufacturing apparatus is sterilized with hot water. <P>SOLUTION: The water treatment apparatus such as the reverse osmosis membrane apparatus 5 and a desalting apparatus 7 constituting a water treatment unit 10 included in the pure water manufacturing apparatus 1 is subjected to a hot water passing treatment. The hot water passing treatment comprises a hot water holding process of flowing hot water of predetermined temperature through the water treatment equipment for a predetermined time period. After the hot water holding process, a temperature lowering process for lowering temperature of these equipment is performed, the water treatment unit 10 is connected with a water to be treated pipe 21 to assemble the pure water manufacturing apparatus 1. Raw water is supplied to the assembled pure water manufacturing apparatus 1 from the water to be treated pipe 21 to manufacture pure water. Preferably a temperature raising process for raising temperature of the water treatment equipment is performed before the hot water flow treatment. Preferably temperature of the water treatment equipment is gradually changed in the temperature lowering process and the temperature raising process. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a method for assembling a pure water production apparatus including a water treatment unit including a reverse osmosis membrane apparatus, a membrane deaeration apparatus, and a desalination apparatus, and in particular, assembling a pure water production apparatus to be sterilized by hot water. Regarding the method.

  2. Description of the Related Art Conventionally, a pure water production apparatus including a primary pure water system and a subsystem (or “secondary pure water system”) is known as an apparatus for producing pure water used for manufacturing pharmaceuticals and semiconductor products. ing. The primary pure water system and subsystem are configured by combining a plurality of water treatment devices (hereinafter, simply referred to as “devices”) such as reverse osmosis membrane devices and desalination devices. It is a water treatment unit that performs a series of water treatments by a treatment device.

  A pure water production apparatus provided with a water treatment unit such as a primary pure water system or a subsystem is appropriately sterilized according to the state of use or the like in order to prevent bacteria from growing inside the apparatus. As a sterilization method of a pure water production apparatus, a method of passing a sterilizing agent such as hydrogen peroxide through the inside of the apparatus or a method of passing hot water of 60 ° C. or more into the inside of the apparatus is known (for example, Patent Documents). 1).

  As described in Patent Document 1, when the pure water production apparatus is sterilized with hot water, the water introduced into the water treatment unit is removed by a heater provided at the inlet of the water treatment unit of the pure water production apparatus. Heat and sequentially pass through a plurality of devices constituting the water treatment unit. According to such a hot water sterilization method, the sterilizing agent can be prevented from remaining in the pure water production apparatus and contaminating the pure water production apparatus, and the entire water treatment unit can be sterilized efficiently.

  However, when pure water is produced, organic substances are not substantially eluted from the equipment, but when the pure water production equipment is sterilized with hot water, the organic substances are eluted from the equipment and adhere to these equipment itself. It became clear to do. These substances (hereinafter referred to as “pollutants”) are placed in the subsequent stage because they are brought into the subsequent stage when the water introduced from the inlet of the water treatment unit is heated and sequentially passed through multiple units. It will also contaminate the equipment.

The device to which the eluted substance is attached cannot exhibit its original performance after the sterilization is completed, and the contaminants attached to the device are gradually discharged from the device, and the pure water produced by the pure water production device is used. There is a risk of deteriorating water quality.
Japanese Patent No. 3228053

  The present invention has been made in view of the above-described problems, and an assembly of a pure water production apparatus that can prevent contaminants from eluting from equipment constituting a water treatment unit and contaminating equipment during hot water sterilization. It aims to provide a method.

  The present invention relates to hot water flow that allows hot water to flow to equipment constituting the water treatment unit of the pure water production apparatus before the start of use of the pure water production apparatus, that is, when the pure water production apparatus is assembled and manufactured. Processing is performed. According to the present invention, before starting the use of the water treatment unit, by treating the equipment constituting the water treatment unit with hot water, it is possible to prevent organic substances that are pollutants from adhering to the equipment itself, It can be discharged to the outside. For this reason, according to this invention, when hot water sterilization is implemented after the use start of a pure water manufacturing apparatus, it can prevent that a pollutant elutes from equipment.

  Here, the “water treatment unit” means a system configured to include a plurality of water treatment devices and connect the water treatment devices to each other to perform a series of water treatments. The water to be treated was introduced into the water treatment unit, and the impurities contained in the water to be treated were removed and purified by sequentially treating the water to be treated sequentially with a plurality of devices constituting the water treatment unit. Get water. As a water treatment unit installed in a pure water production device, pretreatment system that obtains filtered water from which suspended matter is removed by introducing water containing suspended solids, raw water or filtered water is introduced as treated water There are a primary pure water system for producing primary pure water and a subsystem for producing ultrapure water by introducing primary pure water as treated water.

  Water treatment equipment constituting the water treatment unit included in the pure water production equipment includes activated carbon tower, desalting equipment, precision membrane filtration equipment, reverse osmosis membrane equipment, ultrafiltration membrane equipment, membrane degassing equipment, and ultraviolet oxidation. There are devices. In the present specification, the term “demineralization apparatus” means an ion exchange demineralization apparatus that includes an ion exchanger and demineralizes the liquid to be treated by ion exchange. Specifically, it is filled with an ion exchange resin. Ion exchange towers, and electric regenerative demineralizers.

  Examples of water treatment equipment constituting the pretreatment system include a coagulation sedimentation apparatus and a filtration apparatus. The primary pure water system includes at least a reverse osmosis membrane device and a desalinator, and may further include an activated carbon tower, a membrane deaerator, and the like. The subsystem includes at least an ultraviolet oxidation device, a desalting device, and an ultrafiltration membrane device, and may further include a membrane deaeration device and the like.

  The present invention can be suitably applied particularly to a pure water production apparatus including one or more water treatment devices of a reverse osmosis membrane device, a desalting device, or a membrane deaeration device. Two or more water treatment devices may be connected with hot water in a state where two or more are connected, or may be connected with other devices after the hot water is passed and the temperature is lowered without being connected with other devices. Hereinafter, the former is referred to as “collective water flow” and the latter is referred to as “divided water flow”. When performing collective water flow, it is preferable to discharge hot water drainage discharged from a certain device without supplying it to other devices.

  The hot water flow treatment includes a hot water holding step of passing hot water of a predetermined temperature to the water treatment device for a predetermined time, and a temperature lowering step of passing water for temperature lowering lower than the hot water to the water treatment device. Including. It is preferable that the hot water flow treatment further includes a temperature raising step for raising the temperature of the water treatment device as a step prior to the hot water holding step.

  In the hot water holding step, the hot water passing through the water treatment device is preferably 60 ° C. or higher, particularly 80 ° C. or higher. Since water with few impurities has a high cleaning effect, it is preferable that the water used in the hot water holding step is heated and used as water having a quality higher than that of primary pure water. However, hot water obtained by heating raw water can also be used for hot water flow of water treatment equipment constituting the pretreatment system and the primary pure water system.

  Here, “raw water” is water that can be used as domestic water or industrial water, and means water that has not been subjected to special water treatment such as desalination treatment. Specifically, well water, river water, Includes lake water, industrial water, and city water. “Pure water” means water obtained by removing impurities by filtering and desalting the raw water, and means having a specific resistance of 1 MΩ · cm or more. “Pure water” includes pure water (specific resistance of 17 MΩ · cm or more, referred to as “ultra pure water”) obtained by further removing impurities using pure water as treated water. When the pure water obtained by the treatment is distinguished from ultrapure water, it is particularly referred to as “primary pure water”.

  You may change the water quality of the water used for hot water flow according to the kind of apparatus. In particular, for the reverse osmosis membrane device, it is preferable to use dechlorinated water obtained by removing chlorine from raw water, or dehardened water obtained by removing hardness components from raw water. As for the desalting apparatus, it is preferable to use dechlorinated water, dehardened water, or demineralized water from which ions have been removed. Since pure water has chlorine and ions (including hardness components) removed, it can be suitably used for any device.

  In the hot water holding step, hot water at a predetermined temperature set within the above range is passed through the water treatment equipment for 10 to 120 minutes, preferably 30 to 60 minutes, without circulating the hot water that has passed through the water treatment equipment. Discharge as hot water drainage. When the hot water having a predetermined temperature is passed through the water treatment device for a predetermined time, the hot water holding step is terminated, and the temperature lowering step is performed by passing the temperature-lowering water having a temperature lower than that of the hot water through the water treatment device.

  In the hot water holding process, the organic matter concentration (TOC concentration) of the hot water drainage is measured, and when the TOC concentration exceeds a predetermined value, the water treatment device is passed through the water treatment device and the water treatment device is cooled to about 40 ° C. After that, it is preferable to return to the hot water holding step again. When returning from the temperature lowering step to the hot water holding step, it is preferable to perform a temperature raising step described later between the temperature lowering step and the hot water holding step in order to avoid a rapid temperature change of the water treatment device.

  If the TOC concentration of the hot water drainage discharged from the water treatment equipment at the end of the hot water holding process falls below the specified value, the temperature lowering process is continued without returning to the hot water holding process, Cool to the extent and finish the hot water flow treatment. The value of the TOC concentration of hot water drainage, which is the criterion for the end of the hot water flow treatment, specifically, in the case of water treatment equipment constituting the primary pure water system, the TOC concentration of hot water drainage is 5 mg / L. The following. Moreover, in the case of the water treatment apparatus which comprises a subsystem, if the TOC density | concentration of hot water drainage becomes 1 mg / L or less, a hot water flow process will be complete | finished, without returning to a hot water holding process from a temperature fall process.

  In addition, in the case of a device that discharges permeated water from which impurities have been removed and concentrated water from which impurities have been concentrated, such as a reverse osmosis membrane device and an electric regenerative desalination device, the hot water drainage is connected to the permeate outlet. It is discharged from the concentrated water outlet. Therefore, for these devices, measure the TOC concentration of the hot water drainage discharged from both the permeate outlet and the concentrated water outlet, and determine whether to return to the hot water holding process based on this TOC concentration. Is preferred. However, whether or not to return to the hot water holding step may be determined based on the TOC concentration of the hot water drainage discharged from either the permeate outlet or the concentrated water outlet. In this case, it is preferable to use the TOC concentration of the hot water drainage discharged from the permeate outlet as a criterion.

  At the end of the hot water holding step, the water treatment device is at a high temperature of about 60 to 95 ° C. For this reason, a temperature-falling process is implemented and a high-temperature water treatment apparatus is finally cooled to normal temperature of about 15-40 degreeC. The temperature lowering step may be naturally cooled by leaving a high-temperature water treatment unit, or may be cooled by passing raw water or pure water through a water treatment device. In addition, as described above, the temperature lowering process can be interrupted and the process can return to the hot water holding process. End water treatment.

  In the temperature lowering step, it is preferable to gradually decrease the temperature of the water treatment device. Therefore, when water-treating equipment is water-cooled, the temperature of the equipment can be gradually lowered by gradually lowering the temperature of water supplied to the equipment. The temperature of the water supplied to the device can be adjusted by adjusting the output of the heater. Alternatively, by supplying small amounts of room temperature water that is not heated to the device, the temperature of the device can be gradually lowered by mixing with hot water remaining in the device. The water used for water cooling is preferably pure water, and preferably has water quality at least equal to or higher than the water used for hot water flow.

  The water treatment equipment cooled by the temperature lowering process is installed at a predetermined position (hereinafter referred to as “installation place”) having a pure water pipe for supplying pure water to the place where pure water is used in the assembly process, Introduced into a state where pure water can be produced. In the assembly process, water treatment devices that have been subjected to hot water flow treatment including a hot water holding process and a temperature lowering process are connected to each other as necessary to form a water treatment unit, and a water pipe to be treated is connected to the water treatment unit. Is a process of assembling and producing a pure water production apparatus in a state capable of producing pure water by connecting the two. In the assembly process, a pure water pipe is connected to the end of the water treatment unit so that the pure water can be supplied to the place where the pure water is used.

  The equipment that makes up the water treatment unit is a place different from the installation location, for example, a water treatment unit manufacturing factory, etc. You may carry in to an installation place through a process and connect with a to-be-processed water pipe. In addition, in a water treatment unit manufacturing factory or the like, after splitting water for each individual device and performing a hot water holding step and a temperature lowering step, each device may be carried into the installation site as a connected water treatment unit. . Alternatively, each unit is transported to the installation location without being connected, each device is connected at the installation location to assemble the water treatment unit, and the water treatment unit and the water pipe to be treated are connected to assemble the pure water production apparatus. Also good. Furthermore, the hot water holding process and the temperature lowering process may be performed at the installation location, and then the assembly process may be performed.

  A member other than the water treatment device may be included between the treated water pipe and the water treatment unit, and similarly, a member other than the water treatment device may be included between the pure water pipe and the water treatment unit. . As a member included between the water treatment unit and the water pipe to be treated, a heater for heating the water to be treated, a liquid feeding means such as a pump for sending the water to be treated to the water treatment unit, or water to be treated is stored. Tanks to be used. Moreover, as a member arrange | positioned between a water treatment unit and a pure water pipe, the pure water tank etc. which store a pure water are mentioned.

  The hot water flow treatment preferably includes a temperature raising step before the hot water holding step. That is, rapid heating or cooling of water treatment equipment may degrade the performance of the equipment, so before starting the hot water holding process, a temperature raising step was provided to gradually raise the temperature of the equipment. Then, it is preferable to implement a hot water holding process. The temperature raising step can be performed by gradually raising the temperature of the temperature rising water supplied to the equipment while passing the temperature rising water heated to the water treatment equipment (for example, from about 30 ° C. to about 80 ° C.). It is preferable to use water having the same quality as the water for temperature lowering as the water for temperature rising.

  In addition, when pollutants are eluted in the hot water drainage discharged from the equipment at the end of the hot water holding step, that is, when the TOC concentration of the hot water drainage exceeds 5 mg / L, It is preferable to carry out the holding step. In this case, since the equipment has been cooled to about 40 ° C., it is preferable to perform the temperature raising step prior to the start of the hot water holding step.

  In the present invention, before assembling the pure water production apparatus, the water treatment equipment constituting the water treatment unit is subjected to hot water flow treatment, so that contaminants eluted from the equipment during hot water sterilization can be easily discharged out of the equipment. be able to. For this reason, when hot water sterilization is performed after the start of use of the pure water production apparatus, it is possible to prevent elution of contaminants from the equipment, prevent performance deterioration of the equipment, and enhance the sterilization effect.

  Next, the present invention will be described in detail with reference to the drawings. Hereinafter, the same components are denoted by the same reference numerals, and description thereof is omitted or simplified.

  FIG. 1 is a schematic diagram of a pure water production apparatus 1 according to an embodiment of the present invention. The pure water production apparatus 1 includes a water treatment unit (primary pure water system) 10 that introduces raw water and produces pure water (primary pure water). The water treatment unit 10 includes water treatment devices such as an activated carbon tower 4, a reverse osmosis membrane device 5, a membrane deaeration device 6, and an electric regeneration type desalination device 7. These water treatment devices are connected by pipes 32, 33, 34, and 35.

  A treated water pipe 21 to which raw water that is treated water is supplied is connected to the tip of the water treatment unit 10. A first heater 3 is provided between the water pipe 21 to be treated and the water treatment unit 10 via a pipe 31. A pure water pipe 22 for supplying pure water to the pure water use place 8 is connected to the end of the water treatment unit 10. Further, a second heater 9 is provided in the middle of the water treatment unit 10.

  The water treatment equipment constituting the water treatment unit 10 has been subjected to hot water flow treatment prior to assembly of the pure water production apparatus 1. Here, the assembly method of the pure water manufacturing apparatus 1 which concerns on 1st embodiment of this invention is demonstrated using FIG.

  In 1st embodiment, the water treatment equipment which comprises the water treatment unit 10 is the order of the apparatus arrange | positioned in the back | latter stage from the apparatus arrange | positioned in the front | former stage, ie, activated carbon tower 4, reverse osmosis membrane apparatus 5, membrane deaeration apparatus. 6. Next, hot water flow treatment is performed in the order of the desalting apparatus 7.

  Specifically, pure water is sent from the tank 50 and heated by the heater 3 with the end of the pipe 32 connected to the activated carbon tower 4 and the end open without being connected to the reverse osmosis membrane device 5. And supplied to the activated carbon tower 4. In this embodiment, the temperature of the pure water (temperature-raising water) supplied to the activated carbon tower 4 is increased from 30 ° C. by 1 to 5 ° C. per minute, for example, to hot water that is passed in the hot water holding step. The temperature raising step is carried out by adjusting the output of the heater 3 so as to obtain an approximate temperature.

  In the present embodiment, the hot water holding step is performed using 85 ° C. hot water, and after the temperature of the temperature rising water supplied from the heater 3 reaches about 82 to 83 ° C., 30 to 60 ° C. The hot water having a constant temperature of about 85 ° C. is supplied to the activated carbon tower 4 and the hot water holding step is performed. In addition, in the case of “constant temperature”, the vertical fluctuation of the temperature of about 1 to 5 ° C. is allowed, and in the hot water holding step of the present embodiment, the hot water of about 80 to 90 ° C. is “constant of 85 ° C. It is assumed that the temperature is hot water. Further, the temperature rising waste water discharged from the activated carbon tower 4 is discharged from the end of the pipe 32.

  The hot water holding process is terminated when a predetermined time has elapsed, and the temperature lowering process is started. In the temperature lowering process, the output of the heater 3 is adjusted, and the temperature of the pure water (temperature lowering water) supplied to the activated carbon tower 4 is decreased from 1 to 5 ° C. per minute from 85 ° C., for example, to about 40 ° C. The output of the heater 3 is adjusted so as to decrease to

  In the hot water holding step, hot water is discharged from the end of the pipe 32 as hot water drainage, and the TOC concentration of the hot water drainage is appropriately measured. If the TOC concentration exceeds 5 mg / L, the hot water is passed through the temperature lowering step. The operation of returning to the water flow process is repeated, and when the TOC concentration of the hot water drainage becomes 5 mg / L or less, the temperature lowering process is continued and the hot water flow process is completed.

  The end of the pipe 32 is connected to the reverse osmosis membrane device 5 when the activated carbon tower 4 is cooled to about room temperature by the above operation and the hot water flow treatment is completed. A pipe 32 is connected to the reverse osmosis membrane device 5, and a pipe 33 is connected to a permeate outlet from which permeate is discharged, and a pipe 43 is connected to a concentrate outlet from which concentrated water is discharged.

  In such a state, the above-described temperature raising process, hot water holding process, and temperature lowering process are performed on the reverse osmosis membrane device 5. In any process, the water for temperature rise, hot water, and water for temperature drop sent from the tank 50 and heated by the heater 3 are supplied to the reverse osmosis membrane device 5 via the activated carbon tower 4 and the pipe 32. The

  The hot water holding step and the temperature lowering step of the reverse osmosis membrane device 5 are performed when the TOC concentration becomes 5 mg / L or less with reference to the TOC concentration of the hot water drainage discharged from the pipes 33 and 43. The apparatus 5 is cooled to about room temperature, the hot water flow treatment is finished, and the process moves to the hot water flow treatment of the membrane deaeration device 6.

  Prior to the start of the hot water flow treatment of the membrane deaerator 6, the end of the pipe 33 is connected to the inlet of the membrane deaerator 6 and the pipe 34 is connected to the outlet of the membrane deaerator 6. The membrane degassing device 6 connected to the reverse osmosis membrane device 5 and the like via the pipe 33 is supplied with the heating water, hot water, and cooling water sent from the tank 50 and heated by the heater 3. 4, supplied through the pipe 32, the reverse osmosis membrane device 5, and the pipe 33, and discharged from the pipe 34.

  The membrane deaerator 6 performs the temperature raising process, the hot water holding process, and the temperature lowering process based on the TOC concentration of the liquid discharged from the pipe 34 as in the case where the activated carbon tower 4 is subjected to the hot water flow treatment. To do. Thereafter, the desalting apparatus 7 is connected to the end of the pipe 34 via the second heater 9 and the pipe 35. A pipe 44 is connected to the desalinator 7 at a concentrated water outlet from which concentrated water is discharged.

  In the demineralizer 7, the pure water sent from the tank 50 is supplied with the activated carbon tower 4, the pipe 32, the reverse osmosis membrane device 5, the pipe 33, the membrane deaerator 6, the pipe 34, the second heater 9 and the pipe 35. Is supplied through. Since the second heater 9 is disposed in the front stage of the desalting apparatus 7, the pure water sent from the tank 50 is heated by the second heater 9, and water for temperature rise, hot water, and You may adjust the water for temperature fall. When heating with the 2nd heater 9, the delay of the temperature rise and temperature fall by the retained water in the apparatus arrange | positioned in front | former stages, such as the activated carbon tower 4, can be avoided.

  In the present embodiment, the water treatment unit 10 performs collective water flow for performing hot water flow treatment sequentially from the device arranged in the previous stage to the device arranged in the subsequent stage. Although it takes a long time to complete the processing of all devices, the collective water flow can perform sufficient hot water flow treatment for each device, and the piping connecting each device can also be heated. Water flow treatment can be performed. In addition, when performing collective water flow, a bypass pipe that bypasses some of the devices may be provided, and some of the devices may be bypassed to shorten the required time.

  Through the above operation, the water treatment unit 10 that has been subjected to the hot water flow treatment with the activated carbon tower 4, the reverse osmosis membrane device 5, the membrane deaeration device 6, and the desalination device 7 connected is carried out from the water treatment unit manufacturing factory. And it arrange | positions in an installation place, connects with the to-be-processed water pipe | tube 21 and the pure water piping 22, and assembles the pure water manufacturing apparatus 1. FIG.

  In the pure water production apparatus 1, raw water as water to be treated by the water treatment unit 10 is introduced through the raw water tank 2 and the water pipe 21 to be treated, and is treated by the water treatment unit 10 to produce pure water. . A part of the concentrated water discharged from the reverse osmosis membrane device 5 and the desalting device 7 is discharged from the pipes 43 and 44, and the other part is circulated and returned to the raw water tank 2 through the circulation pipe 42 to be treated water. It is preferable to increase the recovery rate.

  After the pure water production as described above is performed for a certain period, the pure water production apparatus 1 is appropriately sterilized with hot water. As a hot water sterilization method, for example, the activated water 4, the reverse osmosis membrane device 5, and the membrane deaeration device are fed with hot water obtained by sending the raw water from the raw water tank 2 and the like and heating it with the first heater 3. 6 is sterilized. Next, the raw water sent from the raw water tank 2 is treated with the activated carbon tower 4, the reverse osmosis membrane device 5, etc. to remove impurities, and this is heated with the second heater 9 to remove it with hot water. The salt device 7 is sterilized.

  According to the present invention, since the water treatment equipment constituting the water treatment unit 10 of the pure water production apparatus 1 has been subjected to hot water flow treatment as described above, contaminants may be eluted from the equipment during hot water sterilization. The contamination of the pure water production apparatus 1 due to the elution and adhesion of contaminants can be prevented.

  Next, the assembly method of the pure water manufacturing apparatus 1 which concerns on 2nd embodiment of this invention is demonstrated using FIG. FIG. 3 shows a state in which the activated carbon tower 4 and the reverse osmosis membrane device 5 of FIG. 1 are connected in parallel via a pipe 51 to a tank 50 provided in a water treatment unit manufacturing factory. A pipe 31 is connected to the inlet of the activated carbon tower 4, and the pipe 31 is connected to the pipe 51 via a heater 3a and a pipe 52a. Similarly, the pipe 32 is connected to the inlet of the reverse osmosis membrane device 5, and the pipe 32 is connected to the pipe 51 via the heater 3b and the pipe 52b. A pipe 43 is connected to the concentrated water outlet of the reverse osmosis membrane device 5.

  In the present embodiment, pure water stored in the tank 50 is supplied from the pipe 51 to the heaters 3a and 3b via the pipes 52a and 52b. The pure water heated by the heaters 3a and 3b is supplied to the activated carbon tower 4 or the reverse osmosis membrane device 5 as water for raising temperature, hot water, and water for lowering temperature, and is discharged from the activated carbon tower 4 or the reverse osmosis membrane device 5. The The details of the temperature raising step, the hot water holding step, and the temperature lowering step are the same as in the first embodiment.

  According to this embodiment, the apparatus which comprises the water treatment unit 10 is each divided | segmented in the state which is not connected, and a hot water flow process is carried out. According to such divided water flow, the time required for the hot water water flow treatment can be shortened. In addition, although 2nd embodiment was taken as the example which connects the activated carbon tower 4 and the reverse osmosis membrane apparatus 5 in parallel, Furthermore, the membrane deaeration apparatus 6 etc. are connected in parallel, and a hot water flow treatment is carried out. Alternatively, after the activated carbon tower 4 is subjected to hot water flow treatment without providing the pipe 52b and the heater 3b, the reverse osmosis membrane device 5 and the like are replaced with the hot water flow treatment. You may make it do.

  The water treatment equipment subjected to the hot water flow treatment is carried into the installation place, arranged in the order shown in FIG. 1 and connected to each other by piping to constitute a water treatment unit 10, and this water treatment unit The treated water pipe 21 is connected to the tip of 10 to assemble the pure water production apparatus 1. Further, in the water treatment unit manufacturing factory, the above devices may be connected to each other to form the water treatment unit 10, and then the water treatment unit 10 may be carried into the installation place to assemble the pure water production apparatus 1. Moreover, you may carry out a hot water flow treatment after carrying in the water treatment unit 10 to an installation place.

  The present invention can be applied to a pure water manufacturing apparatus used for manufacturing semiconductor products such as LSIs and wafers, pharmaceutical manufacturing, and the like.

It is a schematic diagram of the pure water manufacturing apparatus which concerns on one Embodiment of this invention. It is a figure explaining the assembly method of the pure water manufacturing apparatus which concerns on 1st embodiment of this invention. It is a figure explaining the assembly method of the pure water manufacturing apparatus which concerns on 2nd embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Pure water production apparatus 4 Activated carbon tower 5 Reverse osmosis membrane apparatus 6 Membrane deaeration apparatus 7 Desalination apparatus 8 Use location of pure water 10 Water treatment unit 21 Water pipe to be treated

Claims (3)

A water treatment unit including a plurality of water treatment devices is provided, pure water is produced by introducing the water to be treated containing impurities into the water treatment unit, removing impurities contained in the water to be treated, A method for assembling a pure water production apparatus to be supplied to a place where pure water is used,
A hot water holding step of passing hot water through the water treatment device and discharging it as hot water drainage; and
A method of assembling a pure water production apparatus, comprising: a temperature lowering step of lowering a temperature of the water treatment device after stopping the supply of hot water and ending the hot water holding step. Prior to the hot water flow step, the water treatment device is supplied with heated temperature rising water, and the temperature of the water treatment device is increased by raising the temperature of the temperature rising water. In addition,
The method for assembling a pure water production apparatus according to claim 1, wherein the temperature lowering step lowers the temperature of the water treatment device by passing water for temperature lowering than the hot water through the water treatment device.   In the hot water holding step, the hot water at a predetermined temperature is passed for a predetermined time, and when the organic matter concentration of the hot water drainage at the time when the predetermined time has elapsed exceeds 5 mg / L, the temperature rising step is returned. The assembly method of the pure water manufacturing apparatus of Claim 2.

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