JP2005286162A5 - - Google Patents

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Publication number
JP2005286162A5
JP2005286162A5 JP2004099129A JP2004099129A JP2005286162A5 JP 2005286162 A5 JP2005286162 A5 JP 2005286162A5 JP 2004099129 A JP2004099129 A JP 2004099129A JP 2004099129 A JP2004099129 A JP 2004099129A JP 2005286162 A5 JP2005286162 A5 JP 2005286162A5
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JP
Japan
Prior art keywords
processing
substrate
space
liquid
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004099129A
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English (en)
Japanese (ja)
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JP2005286162A (ja
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Publication date
Application filed filed Critical
Priority to JP2004099129A priority Critical patent/JP2005286162A/ja
Priority claimed from JP2004099129A external-priority patent/JP2005286162A/ja
Priority to US10/909,977 priority patent/US20050028929A1/en
Publication of JP2005286162A publication Critical patent/JP2005286162A/ja
Publication of JP2005286162A5 publication Critical patent/JP2005286162A5/ja
Pending legal-status Critical Current

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JP2004099129A 2003-08-07 2004-03-30 基板処理装置およびその処理方法 Pending JP2005286162A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2004099129A JP2005286162A (ja) 2004-03-30 2004-03-30 基板処理装置およびその処理方法
US10/909,977 US20050028929A1 (en) 2003-08-07 2004-08-03 Substrate processing apparatus and method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004099129A JP2005286162A (ja) 2004-03-30 2004-03-30 基板処理装置およびその処理方法

Publications (2)

Publication Number Publication Date
JP2005286162A JP2005286162A (ja) 2005-10-13
JP2005286162A5 true JP2005286162A5 (enExample) 2007-05-17

Family

ID=35184185

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004099129A Pending JP2005286162A (ja) 2003-08-07 2004-03-30 基板処理装置およびその処理方法

Country Status (1)

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JP (1) JP2005286162A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009054174A1 (ja) * 2007-10-22 2009-04-30 Sharp Kabushiki Kaisha 液晶パネル用基板の製造方法及び液晶パネル用基板の製造装置
JP5861696B2 (ja) * 2013-03-28 2016-02-16 ウシオ電機株式会社 光照射装置
JP6550235B2 (ja) * 2015-02-03 2019-07-24 株式会社ブルー・スターＲ＆Ｄ 薄板状被洗浄物の洗浄装置
KR102433558B1 (ko) * 2019-07-11 2022-08-19 세메스 주식회사 기판 처리 장치 및 기판 처리 방법

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