JP2005285592A - 積層体の製造方法、有機el装置、有機半導体装置、ならびに電子機器 - Google Patents
積層体の製造方法、有機el装置、有機半導体装置、ならびに電子機器 Download PDFInfo
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Abstract
【解決手段】 積層体の製造方法は、基体の上方に機能性有機物層を、液相プロセスによって成膜して、積層体400,500を形成する工程と、前記機能性有機物層と超臨界流体300とを接触させる工程と、を含む。前記超臨界流体は、二酸化炭素であることができる。
【選択図】 図6
Description
基体の上方に機能性有機物層を、液相プロセスによって成膜して、積層体を形成する工程と、
前記機能性有機物層と超臨界流体とを接触させる工程と、
を含む。
本実施形態では、本発明にかかる積層体の製造方法を有機EL装置に適用した例について述べる。この例では、機能性有機物層は、有機発光層、正孔注入層および電子注入層から選択される少なくともひとつの層に相当する。
次に、本実施形態にかかる有機EL装置1の製造方法の一例を、図3(a)〜(c)、図4(a)、(b)を参照して説明する。なお、図3、図4に示す各断面図は、図1中のA−A線の断面図の部分に対応した図である。
以下に、液相プロセスによって形成された機能性有機物層について超臨界流体を用いて処理を行った例について述べる。
本実施形態では、本発明にかかる積層体の製造方法を有機半導体装置に適用した例について述べる。この例では、機能性有機物層は、有機半導体層に相当する。
次に、本発明の電子機器の例を説明する。本発明の電子機器は、前述した有機EL装置1を表示部として有したものであり、具体的には、例えば図5に示すような携帯電話が挙げられる。
Claims (13)
- 基体の上方に機能性有機物層を、液相プロセスによって成膜して、積層体を形成する工程と、
前記機能性有機物層と超臨界流体とを接触させる工程と、
を含む、積層体の製造方法。 - 請求項1において、
前記超臨界流体は、二酸化炭素である、積層体の製造方法。 - 請求項1または2において、
前記機能性有機物層は、有機EL装置を構成する有機発光層、正孔注入層および電子注入層の少なくとも1層である、積層体の製造方法。 - 請求項3において、
前記機能性有機物層は、正孔注入層である、積層体の製造方法。 - 請求項4において、
前記正孔注入層は、トリフェニルアミン系高分子からなる、積層体の製造方法。 - 請求項1または2において、
前記機能性有機物層は、有機半導体層である、積層体の製造方法。 - 請求項1ないし6のいずれかにおいて、
前記機能性有機物層と前記超臨界流体とを接触させる工程は、密閉可能な容器に、該機能性有機物層が形成された前記積層体と該超臨界流体と入れることにより行われる、積層体の製造方法。 - 請求項1ないし7のいずれかにおいて、
前記機能性有機物層は、有機材料を含む溶液あるいは分散液を用いた液相プロセスで形成される、積層体の製造方法。 - 請求項1ないし8のいずれかにおいて、
前記液相プロセスは、スピンコート法、ディップ法、または液滴吐出法である、積層体の製造方法。 - 請求項1ないし5,7ないし9のいずれかに記載の積層体の製造方法によって得られた、有機EL装置。
- 請求項1,2,6ないし9のいずれかに記載の積層体の製造方法によって得られた、有機半導体装置。
- 請求項10に記載の有機EL装置を含む、電子機器。
- 請求項11に記載の有機半導体装置を含む、電子機器。
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2012015241A (ja) * | 2010-06-30 | 2012-01-19 | Konica Minolta Holdings Inc | 有機エレクトロルミネッセンス素子およびその製造方法 |
JP2012243856A (ja) * | 2011-05-17 | 2012-12-10 | Murata Mfg Co Ltd | 固体電解コンデンサの製造方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2012015241A (ja) * | 2010-06-30 | 2012-01-19 | Konica Minolta Holdings Inc | 有機エレクトロルミネッセンス素子およびその製造方法 |
JP2012243856A (ja) * | 2011-05-17 | 2012-12-10 | Murata Mfg Co Ltd | 固体電解コンデンサの製造方法 |
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