JP2005283331A5

JP2005283331A5 -

Info

Publication number: JP2005283331A5
Application number: JP2004097638A
Authority: JP
Filing date: 2004-03-30
Publication date: 2007-03-29
Anticipated expiration: 2024-03-30

Claims

In a microchip comprising at least a first substrate on which a fine channel is formed and a facing substrate bonded to the fine channel forming surface of the first substrate,
A thin film of polydimethylsiloxane (PDMS) is bonded to the bonding surface of the facing substrate and the upper surface of the first substrate, and a second substrate is further bonded to the PDMS thin film on the upper surface of the first substrate. And
In the fine flow path, a check valve, a pressurizing part, and a micro valve are formed in this order along the fluid flow direction between the two thin films,
The pressurizing part is a space having a larger volume than the fine channel,
The micro valve is composed of a valve seat having the same width and height as the width and height of the fine flow path, and each PDMS thin film attached to and detached from the upper and lower surfaces of the valve seat,
2. The microchip according to claim 1, wherein a portion of the second substrate and the facing substrate corresponding to the position where the valve seat is disposed is cut out to a predetermined size.

2. The microchip according to claim 1, wherein the check valve is formed of a dam plate that is shorter than two flow channel widths facing each other so as to rub against each other in a lateral direction with respect to the fine flow channel. .

2. The microchip according to claim 1, wherein the check valve is configured by a dam plate that is shorter than two flow channel heights facing each other so as to rub against each other in the vertical direction with respect to the fine flow channel. .

The check valve is composed of a plurality of beads housed in a valve chamber, and the valve chamber is narrower than the flow channel width of the fine flow channel on the upstream side of the fine flow channel, and more than the outer diameter of the beads. Are connected by one or more first connection flow paths that are smaller than the first connection flow path, and the valve chamber is downstream of the fine flow path and is formed of a plurality of second connection flow streams that are narrower than the first connection flow path. The microchip according to claim 1, wherein the microchip is connected by a path.

In a microchip consisting of an upper substrate and a facing substrate bonded to the upper substrate,
The upper substrate has a structure in which a first substrate and a second substrate are bonded together, and the first substrate is bonded to the facing substrate,
A fine flow path is formed between the bonding surfaces of the first substrate and the second substrate, and an upstream first check valve and a downstream second reverse flow are formed in the fine flow path. A stop valve and a pressurizing part between the first check valve and the second check valve;
The check valve includes a stationary weir plate shorter than the height of the fine channel formed on the fine channel forming surface side of the first substrate and a fine channel forming surface side of the second substrate. The movable dam plate that is shorter than the height of the fine channel formed downward is rubbed against each other, and the movable dam plate is disposed so as to be located downstream of the fine channel. Microchip characterized by being made.

A micro pump composed of PDMS,
Sandwiching a glass plate having an inlet hole and an outlet hole in between, and defining a sealed pump chamber by bonding the PDMS lower half mold and the PDMS upper half mold;
In the lower half of the PDMS, there are a feed hole and a discharge hole .
The PDMS upper half mold is provided with a PDMS valve piece through a spacer, and the PDMS valve piece has a size necessary and sufficient to shield the inlet hole of the glass plate. pump.

A feed pipe is connected to the feed hole provided in the lower half mold of the PDMS, and a discharge pipe is connected to the discharge hole provided in the lower half mold of the PDMS. The micropump according to claim 6.

A micro pump composed of PDMS,
Sandwiching a glass plate having an inlet hole and an outlet hole in between, and defining a sealed pump chamber by bonding the PDMS lower half mold and the PDMS upper half mold;
The lower half mold of the PDMS is formed with a separate suction air chamber and discharge air chamber, and a suction hole is provided in the suction air chamber, and a discharge hole is formed in the discharge air chamber. And a PDMS valve piece is provided in the discharge air chamber, and the PDMS valve piece has a size sufficient to shield the outlet hole of the glass plate from below. And
A PDMS valve piece is disposed in the pump chamber in the PDMS upper half mold, and the PDMS valve piece has a size necessary and sufficient to shield the inlet hole of the glass plate from the upper side. Micro pump.

The delivery pipe is connected to the delivery hole provided in the suction air chamber, and the delivery pipe is connected to the delivery hole provided in the delivery air chamber. 8. The micropump according to 8.

9. The micro of claim 8 , wherein a PDMS diaphragm piece that seals the pump chamber is disposed above the pump chamber, and a piezoelectric element is disposed above the PDMS diaphragm piece. pump.