JP2005255495A - Method for manufacturing silica glass - Google Patents

Method for manufacturing silica glass Download PDF

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JP2005255495A
JP2005255495A JP2004071549A JP2004071549A JP2005255495A JP 2005255495 A JP2005255495 A JP 2005255495A JP 2004071549 A JP2004071549 A JP 2004071549A JP 2004071549 A JP2004071549 A JP 2004071549A JP 2005255495 A JP2005255495 A JP 2005255495A
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silica
silica glass
glass
firing
sol
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Kenji Takahashi
研司 高橋
Takeshi Iwasaki
武士 岩崎
Hiroko Ueno
宏子 上野
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Coorstek KK
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Toshiba Ceramics Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing silica glass by which bubble-free silica glass is easily manufactured at high yield. <P>SOLUTION: In the method for manufacturing the silica glass, transparent silica glass is manufactured by mixing silica sol with silica powder having 1-10 μm particle diameter in a ratio of 1:2-2.3 by pts.wt., pouring the mixture into a forming die and gelating the mixture to form a silica formed body, drying the silica formed body and primarily firing the dried silica formed body at 1,000-1,400°C under the atmosphere to form a silica porous body and firing the silica porous body at a reduced pressure under an inert gas atmosphere in a vacuum pressurizing firing furnace. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明はシリカガラスの製造方法に係わり、特にゾル・ゲル法を用いるシリカガラスの製造方法に関する。   The present invention relates to a method for producing silica glass, and more particularly to a method for producing silica glass using a sol-gel method.

従来のゾル・ゲル法を用いるシリカガラスの製造方法には、特許文献1に提案されているように、テトラエトキシシラン・エタノール・アンモニア水を混合し、ゾル溶液にし、成形型に流し込み成形体とし、この成形体を600℃で残留有機物を除去した後、大気雰囲気中1350℃で焼成を行い、透明シリカガラスとする製造方法が記載されている。しかし、この特許文献1に記載の方法は、(a)成形体の乾燥時の温度、湿度コントロールをシビアに管理する必要がある。(b)ゲル化した成形体が脆く、ハンドリングが困難である。(c)ゾルを成形型に流し込む際に泡が混入し、閉気孔の泡の入ったシリカガラスになる。(d)成形体の乾燥時に開気孔が無いため形状変化、収縮が激しくクラックが発生する。このように多くの改良を必要とする点があった。
特開平1−65028号公報(第2頁右欄第5行〜17行、図4、図5)
In the conventional method for producing silica glass using the sol-gel method, as proposed in Patent Document 1, tetraethoxysilane / ethanol / ammonia water is mixed to form a sol solution, which is poured into a mold to form a molded body. In addition, there is described a production method in which a residual organic substance is removed from this molded body at 600 ° C. and then fired at 1350 ° C. in an air atmosphere to form transparent silica glass. However, in the method described in Patent Document 1, it is necessary to severely control (a) temperature and humidity control during drying of the molded body. (B) The gelled compact is fragile and difficult to handle. (C) When the sol is poured into the mold, bubbles are mixed into the silica glass with closed pores. (D) Since there are no open pores when the molded body is dried, shape change and shrinkage are severe and cracks occur. As described above, many improvements are required.
Japanese Patent Laid-Open No. 1-65028 (right column on page 2, lines 5 to 17, FIGS. 4 and 5)

本発明は上述した事情を考慮してなされたもので、製造が容易で歩留がよく、無気泡のシリカガラスを製造できるシリカガラスの製造方法を提供することを目的とする。   The present invention has been made in consideration of the above-described circumstances, and an object of the present invention is to provide a method for producing silica glass, which is easy to produce, has a good yield, and can produce bubble-free silica glass.

上記目的を達成するため、本発明の1つの態様によれば、シリカゾルと粒径1〜10μmのシリカ粉末を1:2〜2.3重量部の割合で混合し、成形型に流し込み、ゲル化させてシリカ成形体を作製し、このシリカ成形体を乾燥した後大気雰囲気中1000〜1400℃で一次焼成を行い、シリカ多孔体とし、このシリカ多孔体を真空加圧焼成炉で減圧状態、不活性ガス雰囲気で焼成を行い、透明なシリカガラスとすることを特徴とするシリカガラスの製造方法が提供される。これにより、製造が容易で歩留がよく、無気泡のシリカガラスを製造できるシリカガラスの製造方法が実現される。   In order to achieve the above object, according to one aspect of the present invention, silica sol and silica powder having a particle size of 1 to 10 μm are mixed at a ratio of 1: 2 to 2.3 parts by weight, poured into a mold, and gelled. A silica molded body is prepared, and after the silica molded body is dried, primary firing is performed at 1000 to 1400 ° C. in an air atmosphere to form a porous silica body. There is provided a method for producing silica glass, characterized by firing in an active gas atmosphere to form transparent silica glass. Thereby, the manufacturing method of the silica glass which can manufacture an air-free silica glass with easy manufacture and a good yield is implement | achieved.

本発明に係わるシリカガラスの製造方法によれば、製造が容易で歩留がよく、無気泡のシリカガラスを製造できるシリカガラスの製造方法を提供することができる。   According to the method for producing silica glass according to the present invention, it is possible to provide a method for producing silica glass that is easy to produce, has a good yield, and can produce bubble-free silica glass.

以下、本発明に係わるシリカガラスの製造方法の一実施形態について添付図面を参照して説明する。   Hereinafter, an embodiment of a method for producing silica glass according to the present invention will be described with reference to the accompanying drawings.

本発明に係わるシリカガラスの製造方法は、シリカゾルと粒径1〜10μmのシリカ粉末を1:2〜2.3重量部の割合で混合し、成形型に流し込み、ゲル化させてシリカ成形体を作製し、このシリカ成形体を乾燥した後大気雰囲気中1000〜1400℃で一次焼成を行い、シリカ多孔体とし、このシリカ多孔体を真空加圧焼成炉で減圧状態、不活性ガス雰囲気で焼成を行い、透明なシリカガラスとする製造方法である。   In the method for producing silica glass according to the present invention, silica sol and silica powder having a particle diameter of 1 to 10 μm are mixed in a ratio of 1: 2 to 2.3 parts by weight, poured into a mold, and gelled to obtain a silica molded body. After the silica molded body was prepared and dried, primary firing was performed at 1000 to 1400 ° C. in an air atmosphere to form a silica porous body, and this silica porous body was fired in a vacuum pressure and firing furnace under reduced pressure in an inert gas atmosphere. It is the manufacturing method which makes and makes transparent silica glass.

最初に加水分解する際にシリカゾルを酸性側にしておき、シリカ粉末を混ぜる前にアンモニア水(アルカリ)を投入しpH4.5〜5に調整する。pHを調整することでゲル化時間の調整が可能である(高速化)。シリカ粉末を球状とすることにより、乾燥時の形状変化、収縮が緩和されてクラックの発生を防止できる。真空焼成は、真空度10Torr以下、焼成温度1500℃以上、不活性ガス雰囲気で行う。これにより透明化が容易である。   When hydrolyzing for the first time, the silica sol is set to the acidic side, and ammonia water (alkali) is added to adjust the pH to 4.5 to 5 before mixing the silica powder. The gelation time can be adjusted by adjusting the pH (speeding up). By making the silica powder spherical, the shape change and shrinkage during drying are alleviated, and the generation of cracks can be prevented. The vacuum firing is performed in an inert gas atmosphere with a degree of vacuum of 10 Torr or less, a firing temperature of 1500 ° C. or more. This facilitates transparency.

本実施形態のシリカガラスの製造方法によれば、シリカ粉末とシリカゾルを混ぜてシリカ多孔体にすることにより無数の開気孔が存在するため乾燥時の形状変化、収縮が緩和されてクラック等が発生しない。また、1〜10μmのシリカ粉末で成形したシリカ多孔体であり成形体強度が高く、ハンドリングの高いものが得られる。さらに、真空焼成のため、泡が混入していても除去が可能である。従って、製造が容易で歩留がよく、無気泡のシリカガラスを製造できるシリカガラスの製造方法を提供できる。   According to the method for producing silica glass of the present embodiment, by mixing silica powder and silica sol into a porous silica body, there are innumerable open pores, so shape change and shrinkage during drying are alleviated and cracks are generated. do not do. Moreover, it is a silica porous body molded with silica powder of 1 to 10 μm, and a molded body having high strength and high handling can be obtained. Furthermore, since it is vacuum fired, it can be removed even if bubbles are mixed. Accordingly, it is possible to provide a method for producing silica glass, which is easy to produce, has a good yield, and can produce bubble-free silica glass.

本発明に係わるシリカガラスの製造方法を用いたφ9mmのシリカガラスむく棒を製造した。   A silica glass bar with a diameter of 9 mm was produced using the method for producing silica glass according to the present invention.

1.実施例
1)多孔体の作製: φ9mmシリカガラスむく棒の多孔体を作製する場合は、ゾル調整としてテトラエトキシシラン:水:0.1規定塩酸=12.4:9:1の割合(容積比)で混合して加水分解させ、さらに、プロピレングリコールを1.1規定塩酸1に対して3.1(容積比)加え、次いで、pH4.5〜5になるように0.01規定のアンモニア水を加えてシリカゾルとする。このシリカゾルに粒径1〜10μmのシリカ粉末粒子を、シリカゾル:シリカ粉末粒子=1:2の割合(重量比)で加えて混合し、成形型に流し込み3時間静置して離型し成形体とする。得られた成形体を大気雰囲気中1300〜1400℃で12時間焼成し、一次焼成したシリカ多孔体とする。
1. Example 1) Production of porous body: When producing a porous body of φ9 mm silica glass bar, a ratio (volume ratio) of tetraethoxysilane: water: 0.1 N hydrochloric acid = 12.4: 9: 1 was used as a sol adjustment. ) And then propylene glycol is added to the 1.1 N hydrochloric acid 3.1 (volume ratio) to 3.1 N hydrochloric acid, and then 0.01 N ammonia water so that the pH is 4.5 to 5. To obtain a silica sol. To this silica sol, silica powder particles having a particle diameter of 1 to 10 μm are added and mixed in a ratio (weight ratio) of silica sol: silica powder particles = 1: 2, poured into a mold, left to stand for 3 hours, and released from the mold. And The obtained molded body was fired at 1300 to 1400 ° C. for 12 hours in an air atmosphere to obtain a porous silica porous body that was primarily fired.

2)透明化: 上記1)で得られたシリカ多孔体を真空加圧焼結炉で表1の焼成条件で雰囲気、焼成温度、圧力で焼成を行い、透明シリカガラスを得た。

Figure 2005255495
2) Clarification: The silica porous body obtained in the above 1) was baked in a vacuum pressure sintering furnace under the baking conditions shown in Table 1 under the atmosphere, calcination temperature, and pressure to obtain transparent silica glass.
Figure 2005255495

2.比較例
特許2577572号(特許文献1)に記載のガラスの製造方法を用い適切な条件で実際にシリカガラスを作製した。
2. Comparative Example Silica glass was actually produced under suitable conditions using the glass production method described in Japanese Patent No. 2577572 (Patent Document 1).

テトラエトキシシラン、エタノール、アンモニア水をモル比で1:16:4の割合で3時間混合し、シリカゾル溶液とした。得られたゾルを成形型に流し込みゲル化させた。ゲル化して成形型から離型し、乾燥機で70℃乾燥中にクラックが発生した。また、ハンドリングが悪く、焼成炉に移す際も粉々に崩れた。   Tetraethoxysilane, ethanol, and aqueous ammonia were mixed at a molar ratio of 1: 16: 4 for 3 hours to obtain a silica sol solution. The obtained sol was poured into a mold and gelled. It gelled and released from the mold, and cracks occurred during drying at 70 ° C. with a dryer. Moreover, handling was bad and it shattered when transferred to a baking furnace.

Claims (1)

シリカゾルと粒径1〜10μmのシリカ粉末を1:2〜2.3重量部の割合で混合し、成形型に流し込み、ゲル化させてシリカ成形体を作製し、このシリカ成形体を乾燥した後大気雰囲気中1000〜1400℃で一次焼成を行い、シリカ多孔体とし、このシリカ多孔体を真空加圧焼成炉で減圧状態、不活性ガス雰囲気で焼成を行い、透明なシリカガラスとすることを特徴とするシリカガラスの製造方法。 After mixing silica sol and silica powder having a particle diameter of 1 to 10 μm in a ratio of 1: 2 to 2.3 parts by weight, pouring into a mold and gelling to prepare a silica molded body, and drying this silica molded body A primary firing is performed at 1000 to 1400 ° C. in an air atmosphere to form a porous silica material, and this porous silica material is fired in a vacuum pressure and firing furnace under reduced pressure in an inert gas atmosphere to form a transparent silica glass. A method for producing silica glass.
JP2004071549A 2004-03-12 2004-03-12 Method for manufacturing silica glass Pending JP2005255495A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2088128A1 (en) 2007-12-10 2009-08-12 Degussa Novara Technology S.p.A. Method for the production of glassy monoliths via the sol-gel process

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2088128A1 (en) 2007-12-10 2009-08-12 Degussa Novara Technology S.p.A. Method for the production of glassy monoliths via the sol-gel process

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