JP2005253187A5 - - Google Patents

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Publication number
JP2005253187A5
JP2005253187A5 JP2004059820A JP2004059820A JP2005253187A5 JP 2005253187 A5 JP2005253187 A5 JP 2005253187A5 JP 2004059820 A JP2004059820 A JP 2004059820A JP 2004059820 A JP2004059820 A JP 2004059820A JP 2005253187 A5 JP2005253187 A5 JP 2005253187A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004059820A
Other languages
Japanese (ja)
Other versions
JP2005253187A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004059820A priority Critical patent/JP2005253187A/ja
Priority claimed from JP2004059820A external-priority patent/JP2005253187A/ja
Publication of JP2005253187A publication Critical patent/JP2005253187A/ja
Publication of JP2005253187A5 publication Critical patent/JP2005253187A5/ja
Pending legal-status Critical Current

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JP2004059820A 2004-03-03 2004-03-03 静電アクチュエータの駆動装置及び駆動方法 Pending JP2005253187A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004059820A JP2005253187A (ja) 2004-03-03 2004-03-03 静電アクチュエータの駆動装置及び駆動方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004059820A JP2005253187A (ja) 2004-03-03 2004-03-03 静電アクチュエータの駆動装置及び駆動方法

Publications (2)

Publication Number Publication Date
JP2005253187A JP2005253187A (ja) 2005-09-15
JP2005253187A5 true JP2005253187A5 (zh) 2007-03-08

Family

ID=35033142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004059820A Pending JP2005253187A (ja) 2004-03-03 2004-03-03 静電アクチュエータの駆動装置及び駆動方法

Country Status (1)

Country Link
JP (1) JP2005253187A (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4537429B2 (ja) * 2006-07-27 2010-09-01 日本電信電話株式会社 ミラー制御装置
JP4723680B2 (ja) * 2006-07-27 2011-07-13 日本電信電話株式会社 ミラー制御装置
JP2009022108A (ja) * 2007-07-12 2009-01-29 Olympus Corp 超音波モータ駆動回路及び超音波モータの駆動信号生成方法
JP5160935B2 (ja) * 2008-03-31 2013-03-13 日本電信電話株式会社 ミラー装置およびミラーアレイ
JP6289091B2 (ja) * 2013-12-26 2018-03-07 オリンパス株式会社 硬度可変アクチュエータ
JP6546576B2 (ja) * 2016-10-11 2019-07-17 矢崎総業株式会社 電圧センサ

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