JP2005247687A - ガラス基板の化学加工方法 - Google Patents

ガラス基板の化学加工方法 Download PDF

Info

Publication number
JP2005247687A
JP2005247687A JP2005059892A JP2005059892A JP2005247687A JP 2005247687 A JP2005247687 A JP 2005247687A JP 2005059892 A JP2005059892 A JP 2005059892A JP 2005059892 A JP2005059892 A JP 2005059892A JP 2005247687 A JP2005247687 A JP 2005247687A
Authority
JP
Japan
Prior art keywords
chemical processing
glass substrate
chemical
processing
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005059892A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005247687A5 (enExample
Inventor
Toshihiro Nishiyama
智弘 西山
Mikiro Deguchi
幹郎 出口
Katsuhiro Itokawa
勝博 糸川
Makoto Kotani
誠 小谷
Koichi Mizoguchi
幸一 溝口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nishiyama Stainless Chemical Co Ltd
Original Assignee
Nishiyama Stainless Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nishiyama Stainless Chemical Co Ltd filed Critical Nishiyama Stainless Chemical Co Ltd
Priority to JP2005059892A priority Critical patent/JP2005247687A/ja
Publication of JP2005247687A publication Critical patent/JP2005247687A/ja
Publication of JP2005247687A5 publication Critical patent/JP2005247687A5/ja
Pending legal-status Critical Current

Links

Images

Landscapes

  • Surface Treatment Of Glass (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Liquid Crystal (AREA)
  • Electroluminescent Light Sources (AREA)
JP2005059892A 2001-04-12 2005-03-04 ガラス基板の化学加工方法 Pending JP2005247687A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005059892A JP2005247687A (ja) 2001-04-12 2005-03-04 ガラス基板の化学加工方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001114498 2001-04-12
JP2005059892A JP2005247687A (ja) 2001-04-12 2005-03-04 ガラス基板の化学加工方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2003324189A Division JP2004002205A (ja) 2001-04-12 2003-09-17 ガラス基板の化学加工方法

Publications (2)

Publication Number Publication Date
JP2005247687A true JP2005247687A (ja) 2005-09-15
JP2005247687A5 JP2005247687A5 (enExample) 2006-01-26

Family

ID=35028536

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005059892A Pending JP2005247687A (ja) 2001-04-12 2005-03-04 ガラス基板の化学加工方法

Country Status (1)

Country Link
JP (1) JP2005247687A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008266135A (ja) * 2007-04-10 2008-11-06 Samsung Electronics Co Ltd フラットパネルディスプレイガラス基板エッチング装置
US7823595B2 (en) 2006-07-04 2010-11-02 Nec Corporation Apparatus for etching substrate and method of fabricating thin-glass substrate
JP5423674B2 (ja) * 2008-06-25 2014-02-19 旭硝子株式会社 無アルカリガラス基板のエッチング方法及び表示デバイス

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7823595B2 (en) 2006-07-04 2010-11-02 Nec Corporation Apparatus for etching substrate and method of fabricating thin-glass substrate
US8409451B2 (en) 2006-07-04 2013-04-02 Nec Corporation Apparatus for etching substrate and method of fabricating thin-glass substrate
JP2008266135A (ja) * 2007-04-10 2008-11-06 Samsung Electronics Co Ltd フラットパネルディスプレイガラス基板エッチング装置
JP5423674B2 (ja) * 2008-06-25 2014-02-19 旭硝子株式会社 無アルカリガラス基板のエッチング方法及び表示デバイス

Similar Documents

Publication Publication Date Title
KR100380844B1 (ko) 액정유리기판의 화학연마 방법 및 화학연마장치
JP3523239B2 (ja) ガラス基板の化学加工方法及びガラス基板
JP3577492B1 (ja) ガラスの切断分離方法、フラットパネルディスプレイ用ガラス基板及びフラットパネルディスプレイ
US8173228B2 (en) Particle reduction on surfaces of chemical vapor deposition processing apparatus
CN101062838B (zh) 研磨玻璃基板的制造方法
CN101681039A (zh) 显示装置及其制造方法
JP3524540B2 (ja) ガラス基板の化学加工方法・化学加工装置及びガラス基板
TW200837030A (en) Substrate slimming apparatus and method of slimming substrate
US20160067749A1 (en) Ultrasonic cleaning apparatus and method for cleaning
JP2005247687A (ja) ガラス基板の化学加工方法
JP2004002205A (ja) ガラス基板の化学加工方法
JP2005239546A (ja) ガラス基板の化学加工方法
JP2004099437A (ja) ガラス基板の化学加工方法及び化学加工装置
TW200407462A (en) Sealable surface method and device
TWI378906B (enExample)
JP2007294596A (ja) パネルのエッチング製作プロセスの方法及びその装置
TW201901146A (zh) 玻璃板、玻璃板的端面檢查方法以及玻璃板的製造方法
JPH06258608A (ja) ガラス基板洗浄保持装置
EP2620229A1 (en) Ultrasonic cleaning method
JP2005247687A5 (enExample)
JP4455018B2 (ja) ガラス製品表面のフロスト処理方法
CN109270082A (zh) 一种利用腐蚀方法及微观检测确定单晶硅晶线的方法
JP2006315929A (ja) ガラス表面の研磨方法
HK1084654A (en) Chemically polishing method, glass subtrate obtained thereby and chemically-polishing apparatus
KR102350244B1 (ko) 기판 처리 장치와 기판 처리 방법 및 진동발생장치

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20051205

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20051205

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20060207

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20060425

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060515

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20070327

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070608

A602 Written permission of extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A602

Effective date: 20070619

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20070710

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070906

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20071009

A912 Re-examination (zenchi) completed and case transferred to appeal board

Free format text: JAPANESE INTERMEDIATE CODE: A912

Effective date: 20071130