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オゾンとオゾン分解触媒を用いて被処理ガスに含まれる被処理成分ガスを分解処理するガス分解処理装置において、上記オゾン分解触媒よりも前段に上記被処理ガスに含まれる水分濃度を制御する水分調節器を備えたことを特徴とするガス分解処理装置。
In a gas decomposition treatment apparatus that decomposes a component gas contained in a treatment gas using ozone and an ozone decomposition catalyst, moisture control for controlling a moisture concentration contained in the treatment gas before the ozone decomposition catalyst A gas decomposition treatment apparatus comprising a vessel.
上記水分調節器は、上記被処理ガスに含まれる水分濃度を５〜２０ｇ／ｍ３に制御するものであることを特徴とする請求項１に記載のガス分解処理装置。
2. The gas decomposition treatment apparatus according to claim 1, wherein the moisture regulator controls a moisture concentration contained in the gas to be treated to 5 to 20 g / m 3 .
上記オゾン分解触媒の後段に設けられた、一酸化炭素、及び二酸化炭素を検知し得るガスセンサを備え、上記水分調節器は、このガスセンサの検知結果に応じて被処理ガスに含まれる水分を制御するものであることを特徴とする請求項１または請求項２に記載のガス分解処理装置。
A gas sensor that can detect carbon monoxide and carbon dioxide is provided after the ozonolysis catalyst, and the moisture regulator controls moisture contained in the gas to be treated according to the detection result of the gas sensor. The gas decomposition treatment apparatus according to claim 1 or 2, wherein the gas decomposition treatment apparatus is a thing.
上記オゾン分解触媒の後段に設けられた、全炭素を検知し得るガスセンサと、このガスセンサの検知結果に応じて上記被処理成分ガスの炭素数に対して分解に必要なオゾンの１〜３倍の濃度になるようにオゾン投入量を制御するオゾン制御器とを備えてなることを特徴とする請求項１ないし請求項３の何れかに記載のガス分解処理装置。
A gas sensor provided at the subsequent stage of the ozone decomposition catalyst and capable of detecting total carbon, and 1 to 3 times the ozone required for decomposition with respect to the carbon number of the component gas to be treated according to the detection result of the gas sensor The gas decomposition treatment apparatus according to any one of claims 1 to 3, further comprising an ozone controller that controls an ozone input amount so as to achieve a concentration.
上記被処理ガスに含まれる被処理成分ガスの濃度変化を緩和する濃度変化緩和手段を備えたことを特徴とする請求項１ないし請求項４の何れかに記載のガス分解処理装置。
The gas decomposition treatment apparatus according to any one of claims 1 to 4, further comprising concentration change mitigation means for mitigating a concentration change of the component gas to be treated contained in the gas to be treated.
上記オゾン分解触媒は、上記被処理ガスの通流方向に多段に分割して設置すると共に、各段のオゾン分解触媒毎にオゾンを注入するようにしてなることを特徴とする請求項１ないし請求項５の何れかに記載のガス分解処理装置。
The ozone decomposing catalyst is divided and installed in multiple stages in the flow direction of the gas to be treated, and ozone is injected into each stage of the ozone decomposing catalyst. Item 6. The gas decomposition treatment device according to any one of Items 5 to 6.
上記オゾン分解触媒は、ハニカム数１００〜１０００ｃｅｌｌｓ／ｉｎｃｈ２の範囲のものを用いるようにしてなることを特徴とする請求項１ないし請求項６の何れかに記載のガス分解処理装置。
The ozone decomposition catalyst, gas decomposition apparatus according to any one of claims 1 to 6, characterized in that as used in the range of honeycomb number 100~1000cells / inch 2.
被処理ガスに含まれる水分濃度を制御した後、オゾンとオゾン分解触媒を用いて該被処理ガスに含まれる被処理成分ガスを分解処理することを特徴とするガス分解処理方法。
A gas decomposition treatment method comprising: decomposing a component gas to be treated contained in the gas to be treated by using ozone and an ozone decomposition catalyst after controlling a moisture concentration contained in the gas to be treated.
JP2004061481A2004-03-052004-03-05
Gas decomposition processing equipment
Expired - Fee RelatedJP4471684B2
(en)
The design of the monitoring tools of clean air condition and dangerous gas co, co2 ch4 in chemical laboratory by using fuzzy logic based on microcontroller