JP2005246255A - Ozone thermal decomposition method and ozone thermal decomposition apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ozone thermal decomposition method and an ozone thermal decomposition apparatus which can reduce a consumption energy required for the ozone thermal decomposition of ozone-containing gas. <P>SOLUTION: The apparatus is provided with: a heating part 3 communicated with an inlet 7 for the ozone-containing gas; a heater 11 which heats the heating part 3 to a constant temperature in the range of 100°C to 350°C; a packed part 4 which is communicated with the heating part 3, is communicated with an outlet 8 for ozone-removed gas and is packed with either of particulate silica gel, zeolite, porous glass, porous ceramic and porous metal crystallite; and a temperature holding heater 12 which holds the packed part 4 at a constant temperature in the range of 100°C to 350°C. The ozone-containing gas continuously injected into the heating part 3 from the inlet 7 for the ozone-containing gas is heated and is allowed to pass through the packed part 4, and thereby ozone thermal decomposition is performed and ozone-removed gas is discharged from the outlet 8 for ozone-removed gas. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to an ozone pyrolysis method and an ozone pyrolysis apparatus for pyrolyzing ozone in an ozone-containing gas.

  In recent years, ozone-containing gas, that is, ozone gas, is widely used for sterilization of water and sewage, wastewater treatment, sterilization and cleaning of processed foods and medical instruments, deodorization, and the like. Here, ozone gas having a high concentration may have various effects on the living body due to its strong oxidizing power, which may cause visual impairment or cause irritation in the respiratory tract. Therefore, it is necessary to decompose and discharge excess ozone that has not dissolved in water or reacted, into oxygen.

  Thermal decomposition apparatuses are widely used for conventional ozone treatment. As this type of thermal decomposition apparatus, for example, as shown in FIG. 4, a cylindrical ceramic heater 101 in which heater wiring is embedded in ceramic, and a stainless steel material provided so as to surround the outer periphery of the ceramic heater 101 A bottomed cylindrical case body 102 is provided, and a gas injection pipe 103 is inserted into the center portion of the ceramic heater 101 through the case main body 102, and a gas discharge port 104 is provided in the case main body 102. The ozone gas injected from the gas injection pipe 103 passes through an annular space in the center of the ceramic heater 101 and an annular gap formed by the outer periphery of the ceramic heater 101 and the case body 102, and is a gas discharge port. There is known a ceramic heater unit 100 for ozonolysis in which ozone gas is heated to about 500 ° C. by a ceramic heater 101 while being discharged from 104 to thermally decompose ozone (see, for example, Patent Document 1).

  Further, as shown in FIG. 5, a dehumidifying unit 114 is provided in an ozone gas supply path 113 that supplies ozone gas discharged from an ozone contact tank 111 in which treated water is stored to the thermal decomposition apparatus 112, and ozone gas from the ozone gas supply path 113 is provided. There is known an exhaust ozone gas treatment device that decomposes ozone by heating to about 500 ° C. in a heat treatment device 112 and supplies the high-temperature gas after the decomposition to a dehumidifying part 114 in a wet state to regenerate the adsorbent (for example, , See Patent Document 2).

Japanese Patent Laid-Open No. 10-180037 JP 2001-190930 A

  According to the ceramic heater unit for ozone decomposition 100 disclosed in Patent Document 1, ozone gas flows along the surface of the ceramic heater 101 made of ceramic, and corrosion of the heater wiring is prevented without the ozone gas contacting the heater wiring. Durability is improved.

  However, since ozone gas is heated to a high temperature of about 500 ° C. by the ceramic heater 101 and thermally decomposed, there is a concern that a great amount of electric energy is consumed for the heating. Further, heat resistance of peripheral members such as a member that holds the ceramic heater 101 heated to a high temperature of about 500 ° C. is also required.

  Further, according to the exhaust ozone gas treatment device disclosed in Patent Document 2, a dehumidifying portion 114 is provided in the ozone gas supply passage 113 for supplying ozone gas to the thermal decomposition device 112, and the decomposed high-temperature gas discharged from the thermal decomposition device 112 Is supplied to the dehumidifying unit 114 to regenerate the adsorbent, so that the energy consumption required for dehumidifying the ozone gas supplied to the thermal decomposition apparatus 112 in advance and decomposing ozone by the thermal decomposition apparatus 112 can be suppressed. .

  However, since ozone is thermally decomposed by being heated to a high temperature of about 500 ° C. by the thermal decomposition apparatus 112, there is a concern that a large amount of electric energy is required for the thermal decomposition, and heat resistance is also required.

  Here, as a result of diligent research and experiments, the present inventors have thermally decomposed ozone in the presence of silica gel, zeolite, porous glass, porous ceramic or porous metal sintered body, It has been found that the heating temperature can be reduced.

  Accordingly, an object of the present invention made in view of such a point is to provide an ozone pyrolysis method and an ozone pyrolysis apparatus that can reduce the heating temperature required for the ozone pyrolysis of an ozone-containing gas and can reduce energy consumption. There is.

  The invention of the ozone pyrolysis method according to claim 1, which achieves the above object, is an ozone pyrolysis method for pyrolyzing ozone in an ozone-containing gas, wherein the ozone-containing gas is kept at a constant temperature in the range of 100 ° C to 350 ° C. And the heated ozone-containing gas is filled with granular silica gel, zeolite, porous glass, porous ceramic or porous metal crystal, and a constant temperature in the range of 100 ° C to 350 ° C. The ozone is thermally decomposed by passing through the filling portion held in the container.

  The invention of the ozone pyrolysis method according to claim 2 is an ozone pyrolysis method in which ozone in an ozone-containing gas is pyrolyzed, wherein the ozone-containing gas is granular silica gel, zeolite, porous glass, porous ceramic or One of the porous metal crystals is filled and heated by passing through a filling portion maintained at a constant temperature in the range of 100 ° C. to 350 ° C., and ozone is thermally decomposed.

  According to a third aspect of the present invention, in the ozone pyrolysis method of the second aspect, the filled portion filled with any one of the above-mentioned granular silica gel, zeolite, porous glass, porous ceramic, or porous metal crystal is infrared. It is characterized by heating with a heater.

  The invention of the ozone pyrolysis apparatus according to claim 4 is the ozone pyrolysis apparatus for thermally decomposing ozone in the ozone-containing gas, wherein the heating unit communicates with the ozone-containing gas inlet, and the heating unit is 100 ° C to 350 ° C. A heater for heating to a constant temperature in the range of any one of the above, the heating part and the ozone-removed gas outlet and any of granular silica gel, zeolite, porous glass, porous ceramic or porous metal crystal An ozone-containing gas that is continuously injected from the ozone-containing gas inlet to the heating unit, and a filling portion filled with a temperature holding heater that holds the filling portion at a constant temperature in the range of 100 ° C. to 350 ° C. Is heated to a constant temperature in the range of 100 ° C. to 350 ° C., and the ozone-containing gas heated in the heating unit is kept in the above-described filling portion maintained at a constant temperature in the range of 100 ° C. to 350 ° C. Ozone by passing the sheet by the filling portion, characterized in that the pyrolyzed discharged from the ozone-removed gas outlet.

  According to a fifth aspect of the present invention, in the ozone pyrolysis apparatus according to the fourth aspect, the heating part and the filling part have bottoms with one end communicating with the ozone-containing gas inlet and the other end communicating with the ozone-removed gas outlet. It is characterized by being continuously formed by a cylindrical container.

  The invention of the ozone pyrolysis apparatus according to claim 6 is the ozone pyrolysis apparatus for thermally decomposing ozone in the ozone-containing gas, wherein one end communicates with the ozone-containing gas inlet and the other end communicates with the ozone-removed gas outlet. Then, a filled portion filled with any of granular silica gel, zeolite, porous glass, porous ceramic or porous metal crystal, and the filled portion are heated and held at a constant temperature in the range of 100 ° C to 350 ° C. Heating means, and continuously injecting the ozone-containing gas from the ozone-containing gas inlet into a filling part heated and held at a constant temperature in the range of 100 ° C. to 350 ° C. and heated by passing through the filling part; and The ozone is thermally decomposed and discharged from the ozone-removed gas outlet.

  The ozone pyrolysis apparatus according to claim 7 is an ozone pyrolysis apparatus for thermally decomposing ozone in an ozone-containing gas, wherein one end communicates with an ozone-containing gas inlet and the other communicates with an ozone-removed gas outlet. Any one of granular silica gel, zeolite, porous glass, porous ceramic or porous metal crystal formed by a bottomed cylindrical container, a bottomed cylindrical heater cover extending in the container, and the container. And a heating means that is disposed in the heater cover and heats and holds the filling portion at a constant temperature in the range of 100 ° C. to 350 ° C., and the ozone-containing gas is introduced into the ozone-containing gas inlet. To 100 ° C to 350 ° C, continuously injected into the filled portion heated and held at a constant temperature, heated by passing through the filled portion, and ozone is thermally decomposed to remove ozone. Characterized by discharging from the body outlet.

  The invention according to claim 8 is the ozone pyrolysis apparatus according to claim 6 or 7, wherein the heating means is an infrared heater.

  According to invention of Claim 1, the ozone containing gas inject | poured into the heating part is heated to the fixed temperature of the range of 100 to 350 degreeC with a heater, The heated ozone containing gas is granular silica gel, zeolite. Passes through the filled portion filled with either porous glass, porous ceramic or porous metal crystal, and the presence of either silica gel, zeolite, porous glass, porous ceramic or porous metal crystal The temperature required for ozone pyrolysis can be set very low compared to the temperature required for conventional ozone pyrolysis, which is about 500 ° C. A significant reduction in energy required for the thermal decomposition of ozone can be obtained, and a reduction in energy consumption can be achieved.

  According to the invention of claim 2, ozone-containing gas is injected into the filling portion, and the ozone-containing gas is filled with any of granular silica gel, zeolite, porous glass, porous ceramic, or porous metal crystal, and The temperature required for ozone pyrolysis is set lower than conventional ozone pyrolysis because it is heated by passing through the filling section maintained at a constant temperature in the range of 100 ° C to 350 ° C and ozone is pyrolyzed. It is possible to achieve a significant reduction in energy required for ozone pyrolysis, and to achieve a reduction in energy consumption. Further, since heating and ozone pyrolysis of the ozone-containing gas are performed in the filling portion, the heating portion for preheating the ozone-containing gas in addition to the invention of claim 1 can be omitted, and the configuration is simplified and made compact. Is possible.

  According to the invention of claim 3, granular silica gel, zeolite, porous glass, porous ceramic or porous metal crystal, and ozone-containing gas are also heated by the radiant heat of the infrared heater, and the heat of ozone is more efficiently Decomposition is promoted and energy consumption required for ozone pyrolysis can be further reduced.

  According to the invention of claim 4, a heating part communicating with the ozone-containing gas inlet, and communicating with the heating part and communicating with the ozone-removed gas outlet and granular silica gel, zeolite, porous glass, porous ceramic or The above-mentioned claim by including a filling portion filled with any of the porous metal crystal, a heating heater and a temperature holding heater for heating and holding the heating portion and the filling portion at a constant temperature in the range of 100 ° C to 350 ° C. The ozone pyrolysis method of item 1 can be carried out.

  Further, as the temperature required for ozone pyrolysis decreases, the durability of the components of the ozone pyrolysis apparatus improves, and the ozone pyrolysis apparatus is kept warm by the heating section heated by the heater and the temperature holding heater. It is a relatively simple structure with a filling portion filled with any one of granular silica gel, zeolite, porous glass, porous ceramic, or porous metal crystal, and a reduction in equipment cost can be expected.

  According to invention of Claim 5, a heating part and a filling part can be continuously formed integrally by a single bottomed cylindrical container.

  According to the invention of claim 6, one end is connected to the ozone-containing gas inlet and the other end is connected to the ozone-removed gas outlet, so that granular silica gel, zeolite, porous glass, porous ceramic or porous metal crystal is formed. The ozone pyrolysis method according to claim 2 can be carried out by providing a filling portion filled with any one and heating means for heating and maintaining the filling portion at a constant temperature in the range of 100 ° C to 350 ° C.

  According to the invention of claim 7, granular silica gel, zeolite, porous glass by a container having one end communicating with an ozone-containing gas inlet and the other end communicating with an ozone-removed gas outlet, and a bottomed cylindrical heater cover, By forming a filling portion filled with either a porous ceramic or a porous metal crystal, and disposing a heating means for heating and holding the filling portion at a constant temperature in the range of 100 ° C. to 350 ° C. in the heater cover. The ozone pyrolysis method of claim 2 can be carried out.

  According to the invention of claim 8, granular silica gel, zeolite, porous glass, porous ceramic or porous metal crystal, and ozone-containing gas can be directly heated by the radiant heat of the infrared heater, and more efficiently. The thermal decomposition of ozone is promoted and the energy consumption required for the thermal decomposition can be further reduced.

  Hereinafter, embodiments of an ozone pyrolysis method and an ozone pyrolysis apparatus according to the present invention will be described with reference to the drawings.

(First embodiment)
A first embodiment of an ozone pyrolysis method and an ozone pyrolysis apparatus will be described with reference to FIGS. 1 and 2.

  FIG. 1 is a cross-sectional view schematically showing an ozone pyrolysis apparatus 1. The ozone pyrolysis apparatus 1 has a bottomed cylindrical container 2 made of a stainless steel material having excellent corrosion resistance against ozone-containing gas, that is, ozone gas. The heating part 3 is formed, and the filling part 4 which is a heat treatment part is continuously formed in the lower range continuously to the heating part 3. In other words, the heating unit 3 and the filling unit 4 are continuously formed with a simple configuration using a single container 2. A cylindrical spacer 5 is inserted into the heating unit 3. A conduit 6 extends from the upper end of the container 2, and an ozone-containing gas inlet 7 is formed in the conduit 6. An ozone-removed gas outlet 8 made of a thin tube is extended at the lower end of the container 2.

  The container 2 is surrounded by a bottomed cylindrical outer cylinder 9, and a heat insulating material 10 is filled between the container 2 and the outer cylinder 9. A heater 11 serving as a heating unit is wound around the outer periphery of the heating unit 3 of the container 2, and a temperature holding heater 12 serving as a heat retaining unit is wound around the outer periphery of the filling unit 4 of the container 2. Yes.

  Furthermore, a thermocouple 13 serving as a temperature detecting means for detecting the temperature in the vicinity of the continuous portion of the heating unit 3 and the filling unit 4 in the container 2 is disposed. The thermocouple 13 is inserted from a thermocouple insertion port 6 a formed in the conduit 6, penetrates the conduit 6 and the spacer 5, and a tip 13 a serving as a temperature detection unit is located near the continuous portion of the heating unit 3 and the filling unit 4. Is set.

  Based on the temperature detection in the container 2 by the thermocouple 13, the heater 11 and the temperature holding heater 12 are controlled by control means (not shown) to set the heating unit 3 and the filling unit 4 in the container 2 to preset temperatures. Control the temperature. That is, in the present embodiment, the heating unit 3 is heated to a constant temperature in the range of 100 ° C. to 350 ° C. by controlling the outputs of the heater 11 and the temperature holding heater 12 based on temperature detection by the thermocouple 13, and The filling part 4 is maintained at a constant temperature in the range of 100 ° C to 350 ° C.

  The filling portion 4 is filled with fine particles having a large number of pores and having a large surface area, for example, silica gel 15 having a diameter of 3 mm to 4 mm.

  As indicated by arrows in FIG. 1, ozone-containing gas, that is, ozone gas, is continuously injected from the ozone-containing gas inlet 7 into the heating unit 3 of the container 2 through the conduit 6. The ozone gas injected into the heating unit 3 is heated to a constant temperature in the range of 100 ° C. to 350 ° C. by the heater 11.

  The ozone gas heated to 100 ° C. to 350 ° C. by the heating unit 3 passes through the filling unit 4 continuously formed and filled with the silica gel 15 and is continuously released from the ozone-removed gas outlet 8 into the atmosphere. . At this time, the ozone gas passing through the filling unit 4 is held at a constant temperature in the range of 100 ° C. to 350 ° C. by the temperature holding heater 12 in the presence of the silica gel 15, and the ozone is thermally decomposed into oxygen.

  Further, in place of the silica gel 15, it is possible to fill the filling portion 4 with a porous zeolite having fine and many pores and ensuring a large surface area.

  FIG. 2 shows the primary reaction rate constant indicating the ozonolysis capability in the ozone pyrolysis apparatus 1 configured as described above, the case 1 in which the filling part 4 of the container 2 is filled with silica gel 15, and the filling part 4 is filled with zeolite. The experimental result acquired with respect to the case 2 of the empty state which did not fill the filling part 4 and the filling part 4 with the filling material is shown.

  Here, the primary reaction rate constant is the natural logarithm of the ratio of the inlet ozone concentration at the ozone-containing gas inlet 7 and the outlet ozone concentration at the ozone-removed gas outlet 8 of the ozone gas to be treated. It is a value divided by the gas residence time up to the outlet 8, and is an index generally used to express the chemical reaction rate that proceeds at a rate proportional to the concentration.

  According to FIG. 2, the case 1 in which the packing part 4 is filled with silica gel has a primary reaction rate constant that is 5 times or more that of the case 3 in which the packing part 4 is not filled with a filler. It can be confirmed that the case 2 filled has a primary reaction rate constant that is equal to or higher than that of the case 1 filled with silica gel.

  That is, in the ozone pyrolysis apparatus 1, according to the case 1 or the case 2 in which the filler 4 is filled with silica gel or zeolite, the filling part 4 is less than one fifth of the case 3 in which the filler 4 is not filled with the filler. An equivalent ozonolysis rate can be achieved with a volume of 4.

  Furthermore, it has been confirmed that practical ozone pyrolysis is possible in a temperature range of 100 ° C. to 350 ° C., whereas conventional pyrolysis of ozone requires a high temperature of about 500 ° C.

  Therefore, according to the present embodiment, the ozone gas is preliminarily heated in the heating unit 3 to a temperature range of 100 ° C. to 350 ° C., and the ozone gas heated in the heating unit 3 is filled with silica gel or zeolite and is heated to 100 ° C. to 350 ° C. Since the ozone is pyrolyzed into oxygen while passing through the filling section 4 kept in the temperature range and passing through the filling section 4, the temperature required for ozone pyrolysis is extremely low compared to conventional pyrolysis. It can be set, a great reduction in electrical energy required for ozone pyrolysis can be obtained, and reduction in energy consumption can be achieved. Moreover, durability of the structural member used for the ozone pyrolysis apparatus 1, such as the container 2, is improved as the temperature required for the ozone pyrolysis is reduced.

  In addition, the ozone pyrolysis apparatus 1 has a relatively simple structure in which the heating unit 3 heated by the heater 11 and the filling unit 4 filled with silica gel, zeolite, or the like are kept warm by the temperature holding heater 12. Reduction can be expected.

  In addition, as a filling material to be filled in the filling portion 4, a porous glass, a porous ceramic, or a porous metal sintered body may be used instead of silica gel or zeolite, and the temperature range of 100 ° C. to 350 ° C. Practical ozone pyrolysis is possible.

  In addition, silica gel, zeolite, porous glass, porous ceramic, porous metal sintered body, etc. have no toxicity that affects the human body, and in the case of replacement after deterioration due to long-term use, industrial waste without toxicity This process has very little impact on the environment.

(Second Embodiment)
A second embodiment of the ozone pyrolysis method and the ozone pyrolysis apparatus will be described with reference to FIG.

  FIG. 3 is a cross-sectional view showing an outline of the ozone pyrolysis apparatus 20 in the present embodiment. The ozone pyrolysis apparatus 20 includes a bottomed cylindrical container 21 made of a stainless steel material having excellent corrosion resistance against ozone gas and having a long bottomed cylindrical container 21, and contains ozone at the lower side which is one end of the container 21. A conduit 22 having a gas inlet 23 is extended. On the other hand, an ozone-removed gas outlet 24 made of a thin tube is extended to the upper side which is the other end of the container 21. The container 21 is surrounded by an outer cylinder 25, and a heat insulating material 26 is filled between the container 21 and the outer cylinder 25.

  A cylindrical heater cover 27 made of an infrared transmitting material is provided extending upward from the bottom center of the container 21. The heater cover 27 and the container 21 form an annular filling portion 28 that is continuous in the vertical direction, and the filling portion 28 is filled with granular silica gel 15.

  An infrared heater 29 serving as a heating unit is provided inside the heater cover 27, and the output of the infrared heater 29 is controlled based on the temperature of the filling unit 28 detected by a temperature detection unit (not shown) so that the inside of the filling unit 28 is 100 ° C. It is heated and held at a constant temperature in the range of ˜350 ° C.

  In the ozone pyrolysis apparatus 20 configured as described above, ozone gas is continuously injected from the ozone-containing gas inlet 23 into the lower portion of the filling portion 28 of the container 21 through the conduit 22 as indicated by arrows in FIG. The ozone gas injected into the lower portion of the filling unit 28 is heated by the silica gel 15 heated by the infrared heater 29 and the radiant heat of the infrared heater 29, and rises in the filling unit 28 and fills the silica gel 15. Pass through. At this time, the ozone gas that has passed through the filling unit 28 is heated and maintained at 100 ° C. to 350 ° C. in the presence of the silica gel 15, and the ozone is thermally decomposed into oxygen, and continues to the atmosphere from the ozone-removed gas outlet 24. Released.

  According to the present embodiment, the ozone gas continuously injected from the ozone-containing gas inlet 23 to the lower portion of the container 21 is heated and maintained at 100 ° C. to 350 ° C. in the presence of the silica gel 15 heated by the infrared heater 29. As in the first embodiment, the ozone is thermally decomposed, and the silica gel 15 and the ozone gas are also directly heated by the radiant heat of the infrared heater 29, so that the thermal decomposition of ozone is promoted more efficiently. A significant reduction in the required electrical energy can be obtained, and a further reduction in energy consumption can be achieved.

  In addition, since heating and thermal decomposition of ozone gas are performed in the filling unit 28 filled with the silica gel 15, a heating unit for preheating ozone gas in addition to the first embodiment can be omitted, and the configuration can be simplified and Compactness is possible.

  Also in the present embodiment, zeolite, porous glass, porous ceramic or porous metal sintered body can be filled in the filling portion 28 instead of silica gel.

  The present invention is not limited to the first embodiment and the second embodiment, and various modifications can be made without departing from the spirit of the invention. For example, in the above embodiment, a thermocouple is used as the temperature detecting means, but a thermistor may be used.

It is sectional drawing which shows the outline of the ozone pyrolysis apparatus concerning 1st Embodiment of this invention. It is comparison explanatory drawing of a primary reaction rate constant. It is sectional drawing which shows the outline of the ozone pyrolysis apparatus concerning 2nd Embodiment of this invention. It is explanatory drawing of the conventional waste ozone gas processing apparatus. It is explanatory drawing of the conventional ceramic heater unit for ozonolysis.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Ozone pyrolysis apparatus 2 Container 3 Heating part 4 Filling part 7 Ozone containing gas inlet 8 Ozone-removed gas outlet 9 Outer cylinder 11 Heater (heating means)
12 Heater for temperature maintenance (heat insulation means)
13 Thermocouple (Temperature detection means)
15 silica gel 20 ozone pyrolysis apparatus 21 container 23 ozone-containing gas inlet 24 ozone-removed gas outlet 25 outer cylinder 27 heater cover 28 filling section 29 infrared heater (heating means)

Claims (8)

In an ozone pyrolysis method for pyrolyzing ozone in an ozone-containing gas,
Heating the ozone-containing gas to a constant temperature ranging from 100 ° C to 350 ° C;
The heated ozone-containing gas was filled with granular silica gel, zeolite, porous glass, porous ceramic, or porous metal crystal, and maintained at a constant temperature in the range of 100 ° C to 350 ° C. An ozone pyrolysis method, wherein ozone is thermally decomposed by passing through a filling portion. In an ozone pyrolysis method for pyrolyzing ozone in an ozone-containing gas,
A filling portion in which the ozone-containing gas is filled with granular silica gel, zeolite, porous glass, porous ceramic, or porous metal crystal, and is maintained at a constant temperature in the range of 100 ° C to 350 ° C. An ozone pyrolysis method characterized by heating by passing and ozone pyrolyzing.   3. The ozone pyrolysis method according to claim 2, wherein the filled portion filled with any one of the granular silica gel, zeolite, porous glass, porous ceramic or porous metal crystal is heated by an infrared heater. . In an ozone pyrolysis device that thermally decomposes ozone in an ozone-containing gas,
A heating unit communicating with the ozone-containing gas inlet;
A heater for heating the heating unit to a constant temperature in the range of 100 ° C to 350 ° C;
A packed portion that communicates with the heating unit and communicates with the ozone-removed gas outlet and is filled with any of granular silica gel, zeolite, porous glass, porous ceramic, or porous metal crystal;
A temperature holding heater for holding the filling portion at a constant temperature in the range of 100 ° C to 350 ° C,
The ozone-containing gas continuously injected from the ozone-containing gas inlet to the heating unit is heated to a constant temperature in the range of 100 ° C to 350 ° C, and the ozone-containing gas heated in the heating unit is 100 ° C to 350 ° C. An ozone pyrolysis apparatus, wherein ozone is thermally decomposed and discharged from an ozone-removed gas outlet by being supplied to and passing through the filling section held at a constant temperature in the range.   The said heating part and a filling part were continuously formed by the bottomed cylindrical container which one end connected to the said ozone containing gas inlet and the other end connected to the ozone-removed gas outlet. Ozone pyrolysis device. In an ozone pyrolysis device that thermally decomposes ozone in an ozone-containing gas,
One end is connected to the ozone-containing gas inlet and the other end is connected to the ozone-removed gas outlet and filled with granular silica gel, zeolite, porous glass, porous ceramic, or porous metal crystal. When,
Heating means for heating and holding the filling portion at a constant temperature in the range of 100 ° C to 350 ° C,
The ozone-containing gas is continuously injected from the ozone-containing gas inlet into a filling portion heated and held at a constant temperature in the range of 100 ° C. to 350 ° C., heated by passing through the filling portion, and ozone is thermally decomposed. An ozone pyrolysis apparatus that discharges from an ozone-removed gas outlet. In an ozone pyrolysis device that thermally decomposes ozone in an ozone-containing gas,
A bottomed cylindrical container with one end communicating with the ozone-containing gas inlet and the other end communicating with the ozone-removed gas outlet;
A bottomed cylindrical heater cover extending into the container, and a filling portion formed by the container and filled with granular silica gel, zeolite, porous glass, porous ceramic or porous metal crystal. ,
Heating means disposed in the heater cover and heating and holding the filling portion at a constant temperature in the range of 100 ° C to 350 ° C;
The ozone-containing gas is continuously injected from the ozone-containing gas inlet into a filling portion heated and held at a constant temperature in the range of 100 ° C. to 350 ° C., heated by passing through the filling portion, and ozone is thermally decomposed. An ozone pyrolysis apparatus that discharges from an ozone-removed gas outlet.   The ozone pyrolysis apparatus according to claim 6 or 7, wherein the heating means is an infrared heater.

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