JP2005245055A5 - - Google Patents

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Publication number
JP2005245055A5
JP2005245055A5 JP2004047800A JP2004047800A JP2005245055A5 JP 2005245055 A5 JP2005245055 A5 JP 2005245055A5 JP 2004047800 A JP2004047800 A JP 2004047800A JP 2004047800 A JP2004047800 A JP 2004047800A JP 2005245055 A5 JP2005245055 A5 JP 2005245055A5
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JP
Japan
Prior art keywords
vibration
vibrating body
driving device
standing wave
respect
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Pending
Application number
JP2004047800A
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Japanese (ja)
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JP2005245055A (en
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Publication date
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Priority to JP2004047800A priority Critical patent/JP2005245055A/en
Priority claimed from JP2004047800A external-priority patent/JP2005245055A/en
Publication of JP2005245055A publication Critical patent/JP2005245055A/en
Publication of JP2005245055A5 publication Critical patent/JP2005245055A5/ja
Pending legal-status Critical Current

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Claims (6)

振動体の出力部に楕円運動を発生させ、該出力部と接触する被駆動体と前記振動体との間に相対運動を発生させる振動波駆動装置において、
少なくとも1つの対称面のうちの第1の対称面に対して対称形状となる振動体と、
前記第1の対称面に対して非対称姿態の振動モードとなる第1の定在波振動を励起する第1の振動励起手段と、
前記第1の対称面に対して対称姿態の振動モードとなる第2の定在波振動を励起する第2の振動励起手段と、
前記振動体上に、前記第1の対称面に対して対称の位置にそれぞれ形成され、前記振動体の振動状態の検出を行う第1及び第2の検出手段と、
前記第1及び第2の検出手段からそれぞれ出力される検出信号の和を算出する加算回路と、
前記第1及び第2の検出手段からそれぞれ出力される検出信号の差を算出する減算回路と、
前記加算回路及び前記減算回路からそれぞれ出力される和信号及び差信号に基づき、前記振動体の駆動制御を行なう制御手段と
を有することを特徴とする振動波駆動装置。
In the vibration wave driving device that generates an elliptical motion at the output portion of the vibrating body and generates a relative motion between the driven body and the driven body that is in contact with the output portion,
A vibrating body having a symmetrical shape with respect to a first symmetry plane of at least one symmetry plane;
A first vibration excitation means for exciting a first standing wave oscillation as the oscillation mode of the non-symmetrical figure with respect to the first plane of symmetry,
A second vibration excitation means for exciting the second standing wave oscillation as the oscillation mode of the symmetric figure and to said first plane of symmetry,
First and second detection means that are formed on the vibrating body at positions symmetric with respect to the first symmetry plane and detect the vibration state of the vibrating body;
An adder circuit for calculating a sum of detection signals respectively output from the first and second detection means;
A subtraction circuit for calculating a difference between detection signals respectively output from the first and second detection means;
And a control means for controlling the driving of the vibrating body based on the sum signal and the difference signal output from the adding circuit and the subtracting circuit, respectively.
前記第2の定在波振動は、前記第1の対称面に対して直交する第2の対称面に対して対称姿態の振動モードであることを特徴とする請求項1記載の振動波駆動装置。 2. The vibration wave driving device according to claim 1, wherein the second standing wave vibration is a vibration mode in a symmetric state with respect to a second symmetry plane orthogonal to the first symmetry plane. . 前記第1及び第2の検出手段は、前記振動体の厚さ方向に対して同方向に分極された圧電素子によって構成され、前記和信号が前記第2の定在波振動の振動状態を表し、前記差信号が前記第1の定在波振動の振動状態を表すことを特徴とする請求項1または請求項2記載の振動波駆動装置。   The first and second detection means are constituted by piezoelectric elements polarized in the same direction with respect to the thickness direction of the vibrating body, and the sum signal represents a vibration state of the second standing wave vibration. 3. The vibration wave driving device according to claim 1, wherein the difference signal represents a vibration state of the first standing wave vibration. 前記第1及び第2の検出手段は、前記振動体の厚さ方向に対して逆方向に分極された圧電素子によって構成され、前記和信号が前記第1の定在波振動の振動状態を表し、前記差信号が前記第2の定在波振動の振動状態を表すことを特徴とする請求項1または請求項2記載の振動波駆動装置。   The first and second detection means are constituted by piezoelectric elements polarized in a direction opposite to the thickness direction of the vibrating body, and the sum signal represents a vibration state of the first standing wave vibration. 3. The vibration wave driving device according to claim 1, wherein the difference signal represents a vibration state of the second standing wave vibration. 前記振動体は、前記第1及び第2の振動励起手段によって振動を励振される電気−機械エネルギー変換素子を備え、該電気−機械エネルギー変換素子は、前記第1及び第2の検出手段を併せ持つことを特徴とする請求項1または請求項2記載の振動波駆動装置。   The vibrating body includes an electro-mechanical energy conversion element that is excited by the first and second vibration excitation units, and the electro-mechanical energy conversion element has both the first and second detection units. The vibration wave driving device according to claim 1, wherein the vibration wave driving device is provided. 前記和信号と前記差信号との位相差を検出して前記制御手段に出力する位相差検出部を更に有することを特徴とする請求項1または請求項2記載の振動波駆動装置。   The vibration wave driving device according to claim 1, further comprising a phase difference detection unit that detects a phase difference between the sum signal and the difference signal and outputs the phase difference to the control unit.
JP2004047800A 2004-02-24 2004-02-24 Oscillatory wave drive unit Pending JP2005245055A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004047800A JP2005245055A (en) 2004-02-24 2004-02-24 Oscillatory wave drive unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004047800A JP2005245055A (en) 2004-02-24 2004-02-24 Oscillatory wave drive unit

Publications (2)

Publication Number Publication Date
JP2005245055A JP2005245055A (en) 2005-09-08
JP2005245055A5 true JP2005245055A5 (en) 2007-04-12

Family

ID=35026180

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004047800A Pending JP2005245055A (en) 2004-02-24 2004-02-24 Oscillatory wave drive unit

Country Status (1)

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JP (1) JP2005245055A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5344944B2 (en) * 2009-02-02 2013-11-20 富士フイルム株式会社 Vibration suppression film
JP5737845B2 (en) * 2009-04-10 2015-06-17 キヤノン株式会社 Control device for vibration type driving device
JP6370436B2 (en) * 2012-02-23 2018-08-08 キヤノン株式会社 Vibration type driving device and imaging device
JP2016025708A (en) * 2014-07-18 2016-02-08 Fdk株式会社 Piezoelectric actuator

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