JP2005243710A5 - - Google Patents
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- Publication number
- JP2005243710A5 JP2005243710A5 JP2004048174A JP2004048174A JP2005243710A5 JP 2005243710 A5 JP2005243710 A5 JP 2005243710A5 JP 2004048174 A JP2004048174 A JP 2004048174A JP 2004048174 A JP2004048174 A JP 2004048174A JP 2005243710 A5 JP2005243710 A5 JP 2005243710A5
- Authority
- JP
- Japan
- Prior art keywords
- measurement
- measurement point
- substrate
- pattern surface
- reticle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005259 measurement Methods 0.000 claims 34
- 230000003287 optical effect Effects 0.000 claims 11
- 239000000758 substrate Substances 0.000 claims 11
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004048174A JP2005243710A (ja) | 2004-02-24 | 2004-02-24 | 露光装置及びその制御方法、デバイス製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004048174A JP2005243710A (ja) | 2004-02-24 | 2004-02-24 | 露光装置及びその制御方法、デバイス製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005243710A JP2005243710A (ja) | 2005-09-08 |
| JP2005243710A5 true JP2005243710A5 (fr) | 2007-04-12 |
Family
ID=35025155
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004048174A Withdrawn JP2005243710A (ja) | 2004-02-24 | 2004-02-24 | 露光装置及びその制御方法、デバイス製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005243710A (fr) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7853067B2 (en) | 2006-10-27 | 2010-12-14 | Asml Holding N.V. | Systems and methods for lithographic reticle inspection |
| JP2017139339A (ja) * | 2016-02-04 | 2017-08-10 | 株式会社アドバンテスト | 露光装置 |
| CN111180378B (zh) * | 2019-12-31 | 2023-12-29 | 中芯集成电路（宁波）有限公司 | 一种检测晶舟内晶圆斜插的方法及装置 |
-
2004
- 2004-02-24 JP JP2004048174A patent/JP2005243710A/ja not_active Withdrawn
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