JP2005242987A - Production analysis program, and computer-readable storage medium recording the program - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize improvement in productivity of a manufacturing device or appropriate subdivision of factory resources by enabling elicitation of personnel and temporal wastes in a semiconductor manufacturing process. <P>SOLUTION: When event data are reported from a semiconductor manufacturing device to a host (S102), it is determined the lot of which carry-in port the event data is related to (S103 and S104), and associating processing of the event data with the lot name and the carry-in port is performed based on a relation determined by a preliminarily prepared list (S105 and S106). The event data reported from the manufacturing device are converted to a standardized event name based on the definition of the list (S107, S108 and S109), and stored in a storage medium 2 (S110). <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a production analysis program for performing a detailed analysis of a lot progress status and a detailed analysis of an operating state of a manufacturing apparatus by a computer, and a computer-readable recording medium on which the program is recorded.

  When a detailed analysis of the lot progress situation is performed, it is usually performed using information registered in the production management system. Conventionally, for example, as in the process of Patent Document 1 shown in FIG. 7, a bar code reader is used to input lot state change information, the lot is set on the manufacturing apparatus, and the process is started. Only the progress of the process was reported to the production management system.

  Specifically, Key No. which is product identification information converted to barcode, Device ID (identification) No. which is device identification information (manufacturer name, model name, machine name) converted to barcode, The worker ID No., which is the encoded worker identification information, is read by the SS wireless barcode reader and transmitted to the PC server via the wireless base station.

  In the PC server that has received the above information, whether the process to be performed, the material to be used, the mold, the tool, the manufacturing conditions (recipe number), etc. can be set by the current bonding apparatus setting by the production error prevention function unit. Check for.

  At this time, the process ID is identified by the device ID No., the product identification by the Key No., and the operator name identification by the operator ID No. In addition, as conditions for determination, for example, registration of products and manufacturing conditions and correspondence between worker names and worker ID numbers are registered in advance by the master information registration function of the production error prevention function unit.

  If the result of the collation is good (OK), the OK information is returned to the SS wireless barcode reader via the wireless base station, and the above conditions are displayed on the screen of the SS wireless barcode reader for further confirmation. . On the other hand, if the result of collation is bad (NG), information on the product name to be exchanged is returned to, for example, an SS wireless barcode reader via the wireless base station, and displayed on the screen of the SS wireless barcode reader. And after exchanging the material which concerns on the said product name, an operator re-enters the collation content of NG part, completes a lot set, and starts work.

  After the bonding work is completed, a lot end work is performed by the worker. In the lot end operation, as in the case of the lot setting operation, information on the key number, device ID number, and worker ID number is read from the SS wireless barcode reader and transmitted to the PC server. After lot end work, move to next process.

  However, in this method, in order to know the operating status of the manufacturing equipment, even if lot processing information is acquired from the production management system and calculation is performed, the information input that is the source is input by human work. It was not a numerical value that accurately indicates whether the manufacturing equipment was occupied. Also, since only the process start and process end are recorded as history information, how the lot status has changed on the manufacturing equipment, or how the manufacturing equipment status has changed due to the lot being set up Could not know.

In addition, when trying to obtain the maximum efficiency of a factory, a manufacturing apparatus that is usually a bottleneck is identified and improved. For example, as in the process of Patent Document 2 shown in FIG. By substituting the number of each process into the general formula and obtaining a solution, it was possible to identify the manufacturing equipment that was the bottleneck in logistics. However, since it uses the history information of lot state changes registered in the production management system and does not use the event data reported to the online control device by SECS communication, manufacturing that becomes a distribution bottleneck It was not possible to identify the factors attributable to the device.
JP 2002-41124 A Japanese Patent Laid-Open No. 2004-13825

  Conventional means for investigating the details of the operating state of the manufacturing apparatus is generally that an engineer related to the manufacturing apparatus manually measures the individual operating time inside the manufacturing apparatus in the vicinity of the manufacturing apparatus. When such an investigation is to be performed instead of manual measurement as described above using event data reported from the manufacturing apparatus to the online control apparatus (hereinafter referred to as a host) using SECS communication, the manufacturing apparatus Since the event data reported from does not necessarily include the lot name, it is necessary for each lot, especially when multiple lots are processed continuously in one manufacturing device or when multiple lots are processed in parallel. It was very difficult to calculate the time. Event data is data that is reported to the host when a physical or logical state change occurs in the manufacturing equipment or material. Conventionally, only the fact that the event has changed is reported. Or, because it does not include information on the entrance, even if these event data are collected by the host, they cannot be used for analyzing the operation inside the apparatus.

  In addition, when performing manual measurement as described above, it is difficult to simultaneously measure the processing time of a plurality of processing modules in the manufacturing apparatus, and thus it is difficult to find a difference in processing capability between modules. .

  In addition, when trying to analyze the progress of lots, various computers belonging to the production system have information and history suitable for each purpose, and these information may not be stored in the database. It was difficult to analyze such information as lot-related information in an integrated manner. In addition, it is almost impossible to include the state of change occurring in the manufacturing apparatus in the contents of the lot progress status.

  In addition, since the basic data for performing the operation analysis and lot progress analysis of the manufacturing equipment differs depending on the purpose of the analysis, many man-hours are required for recollecting and re-verifying the basic data in solving various problems. It was necessary.

  In addition, when collecting and analyzing event data as described above, processing has been concentrated on a single computer in the past, but the amount of basic data for performing detailed analysis is enormous, which makes it extremely difficult. A high-performance computer is required, and the cost of system construction is extremely expensive.

  Also, in the past, the processing time of the production management system did not affect the production activity, or it was not possible to verify that it was given, so the computers that make up the production management system were properly selected or used. I did not know that.

  The present invention solves these problems, makes it possible to reveal human and time waste, and realizes production analysis that improves productivity of manufacturing equipment and optimizes subdivision of factory resources. The purpose is to provide a program and a production analysis method.

  In order to achieve the above object, the program according to the first aspect of the present invention provides an on-line control computer of a semiconductor manufacturing factory that is currently processing or evaluating event data reported from a semiconductor manufacturing apparatus during lot processing. The first procedure for determining which lot of event data is being processed. In the case of the lot processing, there is information associated with the lot (specific information such as an ID or in-process of a manufacturing device) from a computer belonging to the production management system. A second procedure for acquiring information that is only valid between the event data, a third procedure for associating the event data with the incidental information of the lot in real time, a fourth procedure for standardizing event names in the event data, This is for executing any one of the fifth procedures for storing the association processing result in a recording medium.

  According to a second aspect of the present invention, there is provided a program for an on-line control computer of a semiconductor manufacturing factory, which event data reported from a semiconductor manufacturing apparatus in association with lot processing is event data of a lot currently being processed or evaluated. A first means for determining the lot processing; a second means for acquiring the lot incidental information from the computer belonging to the production management system; the association between the event data and the lot incidental information in real time; The third means functions as one of a fourth means for standardizing an event name in the event data and a fifth means for saving the association processing result in a recording medium.

  According to a third aspect of the present invention, there is provided a program for an on-line control computer of a semiconductor manufacturing plant, which event data of a lot is currently being processed or evaluated in response to event data reported from a semiconductor manufacturing apparatus along with the lot processing. A first function for determining the lot processing; a second function for acquiring the incidental information of the lot from the computer belonging to the production management system; the association of the event data and the incidental information of the lot in real time. One of the third function, the fourth function for standardizing the event name in the event data, and the fifth function for saving the association processing result in a recording medium are realized.

  A program according to a fourth aspect of the present invention relates to the program according to the first, second, or third aspect, wherein the computer belonging to the production management system includes: a computer that manages the progress of a lot being manufactured; a computer that manages the state of a manufacturing apparatus; It is characterized by being a computer for instructing or a computer for controlling lot conveyance.

  According to a fifth aspect of the present invention, there is provided a program for storing, in a semiconductor manufacturing factory, a first procedure for acquiring various information related to a lot from a computer belonging to a production management system, and storing the various information in a fixed format. If not, this is for executing either the second procedure for converting this into a predetermined format or the third procedure for saving the processing result in the recording medium.

  According to a sixth aspect of the present invention, there is provided a program for storing a computer in a semiconductor manufacturing factory, a first means for acquiring various pieces of information relating to a lot from a computer belonging to a production management system, wherein the various pieces of information are stored in a predetermined format. If not, it is to function as either a second means for converting this into a predetermined format, or a third means for storing the processing result in a recording medium.

  According to a seventh aspect of the present invention, there is provided a program for storing, in a semiconductor manufacturing factory, a first function for acquiring various pieces of information related to a lot from a computer belonging to a production management system. If not, it is for realizing either a second function for converting this into a predetermined format or a third function for storing the processing result in a recording medium.

  According to an eighth aspect of the present invention, there is provided the program according to the fifth, sixth or seventh aspect, wherein the various information includes production instruction information, manufacturing apparatus maintenance information, and the state of the reticle including access to the exposure apparatus. It is information relating to lot progress such as transition information, lot transfer information between processes or within a process.

  The program of the invention according to claim 9 is the program of the invention according to any one of claims 1 to 8, wherein the first procedure for extracting records from the recording medium classifies the contents of the residence time for each lot. Second procedure, third procedure for determining classification priority according to separately defined information, fourth procedure for performing aggregation for each category, and fifth procedure for visualizing the aggregation results It is intended to execute one of the following.

  The program of the invention according to claim 10 is the program of the invention according to any one of claims 1 to 8, wherein the first means for extracting records from the recording medium classifies the contents of the residence time for each lot. Second means, third means for judging the priority of the classification according to separately defined information, fourth means for summing up each classification, and fifth means for visualizing the summing result It is for functioning as either.

  A program according to an eleventh aspect of the invention is the program according to any one of the first to eighth aspects, wherein the first function for extracting records from the recording medium classifies the contents of the residence time for each lot. Second function, third function for determining classification priority according to separately defined information, fourth function for performing aggregation for each classification, and fifth function for visualizing the aggregation result It is for realizing one of the following.

  According to a twelfth aspect of the present invention, in the program according to the ninth, tenth, or eleventh aspect of the invention, the dwell time is a time until the next manufacturing apparatus is carried in after the processing in the manufacturing apparatus is completed. It is characterized by that.

  A program according to a thirteenth aspect of the invention is the program of the invention according to any one of the first to eighth aspects, wherein the first procedure for extracting records from the recording medium, after lots are carried in for each manufacturing apparatus A second procedure for classifying the content of the time required to complete the process, a third procedure for prioritizing the classified information and removing duplicates when there are a plurality of the classified information at the same time, This is for executing either a fourth procedure for totalizing classified information for each processing condition or a fifth procedure for visualizing the result of the totalization.

  The program of the invention according to claim 14 is the program of the invention according to any one of claims 1 to 8, wherein the first means for extracting the record from the recording medium, after the lot is brought into each manufacturing apparatus A second means for classifying the content of the time required to complete the process, a third procedure for prioritizing the classified information and removing duplicates when there are a plurality of the classified information at the same time; This is to function as either a fourth means for totalizing classified information for each processing condition or a fifth means for visualizing the result of the totalization.

  A program according to a fifteenth aspect of the invention is the program of the invention according to any one of the first to eighth aspects, wherein the first function for extracting a record from the recording medium, after a lot is carried in for each manufacturing apparatus A second function for classifying the content of the time required to complete the process, a third function for prioritizing the classified information and removing duplicates when there are a plurality of the classified information at the same time, This is to realize either a fourth function for totalizing classified information for each processing condition or a fifth function for visualizing the result of the totalization.

  According to a sixteenth aspect of the present invention, in the program according to the thirteenth, fourteenth, or fifteenth aspect, the processing conditions are a recipe, the number of wafers, and a processing path.

  A recording medium of an invention according to claim 17 records the program according to any one of claims 1 to 16.

The present invention outputs the analysis result data based on the unique data with respect to the time axis and the device operation status, or visualizes the lot progress status and the equipment operating status.
1. By visualizing and quantifying the operating state of the manufacturing apparatus, it is possible to easily establish the production activity and the improvement cycle of the manufacturing apparatus, thereby drawing out the maximum capacity of the manufacturing apparatus.
2. By suppressing variation in production capacity of manufacturing equipment (module units), the maximum capacity of the manufacturing plant can be maintained by suppressing the pulsating flow.
3. By visualizing and quantifying the contents of the lot progress status and the stagnation status, a lead time improvement cycle can be easily established, thereby making it possible to reduce manufacturing inventory.
4). By automating the organic aggregation of data, the man-hour loss required for the aggregation performed individually for each department can be reduced.
5). By distributing the data creation processing used for analysis to computers already installed in the factory, the load on the backbone computer can be reduced and the system cost can be reduced.
6). By facilitating the determination of whether the production system in the manufacturing plant is operating properly and being used properly, the improvement cycle of the production system can be shortened.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is a block diagram of the entire system configuration according to the first embodiment of the present invention. 1 is a lot progress status totalization processing unit, 2 is a recording medium for storing event data, 3 is an apparatus operating status totalization processing unit, The progress status totalization processing unit 1 and the device operation status totalization processing unit 3 also serve as a visualization device. 4 is a client computer group, 5 is a production management system group consisting of computers constituting the production management system, 6 is a manufacturing data collection processing unit, 7 is a semiconductor manufacturing apparatus, 8 is a transport device data collection processing unit, and 9 is a lot It is a transport device.

  The manufacturing apparatus data collection processing unit 6 converts event data reported by SECS communication from the semiconductor manufacturing apparatus 7 into an event name standardized by the user, and obtains the event data and the lot name acquired from the production management system group 5. Associate processing is performed and stored in the recording medium 2. Information relating to a lot that is valid only on the semiconductor manufacturing apparatus 7 and universal information on the lot are acquired from the production management system group 5, processed, and stored in the recording medium 2. It works by the program.

  The transport device data collection processing unit 8 performs processing for associating event data reported from the transport device 9 with the lot name acquired from the production management system group 5 and storing it in the recording medium 2.

  The lot progress status totalization processing unit 1 obtains various event data from the recording medium 2 and the production management system group 5, classifies, summarizes, and visualizes the lot progress status. The unit 3 obtains various event data from the recording medium 2 and the production management system group 5 to classify, totalize, and visualize the operation status of the apparatus. The data visualized by the lot progress status totalization processing unit 1 and the apparatus operation status totalization processing unit 3 is displayed on the client computer group 4.

  In FIG. 1, the manufacturing apparatus data collection processing unit 6 receives event data described in the event definition table shown in FIG. 2 recorded on the computer on which the manufacturing apparatus data collection processing unit 6 operates from the semiconductor manufacturing apparatus 7. The transfer device data collection processing unit 8 acquires event data from the transfer device 9. Further, the manufacturing apparatus data collection processing unit 6 and the transfer apparatus data collection processing unit 8 are supplied from the production management system group 5 by a lot name, a processing recipe name, the number of wafers included in the lot, the number of wafers processed in each manufacturing apparatus, and the manufacturing. Acquire the number of in-process lots, the number of processing chambers capable of wafer processing, the name of the processing chamber, the transfer route, etc. at the time of loading lots for each device, and perform the association processing with the event data and the processing processing of the lot related information. Or a determination that the association cannot be performed, and a storage process to the recording medium 2 is performed.

  FIG. 2 is a definition table for each manufacturing apparatus showing the relationship between the event data recorded in the computer in which the manufacturing apparatus data collection processing unit 6 and the conveyance apparatus data collection processing unit 8 in FIG. 1 operate. In this table, when event data is reported from the manufacturing equipment, what event name is converted and saved, which lot data included in the event data is reflected in which event data does not include the lot name It is defined which event data included in which event data is to be reflected in which event data does not include the inlet information. By using this list, as long as the list is defined, it is possible to associate the lot name and the carry-in entrance information with the event data generated by the lot processing. Further, by using such a definition, it is possible to perform the association with all the existing semiconductor manufacturing apparatus 7 event data.

  In addition, since priority is given to the stable operation of the computer in which the manufacturing apparatus data collection processing unit 6 and the conveyance apparatus data collection processing unit 8 operate, the event data that becomes the information source of the lot name and the load port after the set time has elapsed. In the case where there is no report, it is better to perform the storing process in the recording medium 2 while ignoring the relation between the event data.

  FIG. 3 is a flowchart showing a method of associating a lot name and carry-in information with respect to event data generated by lot processing, which is executed by the manufacturing device data collection processing unit 6 and the conveyance device data collection processing unit 8.

  The preconditions of this processing method are that lot-related information has already been acquired from the production management system group, that the semiconductor manufacturing apparatus 7 has n lot loading ports, and information in the table of FIG. Is previously read into the memory of a computer in which the manufacturing apparatus data collection processing unit 6 and the conveyance apparatus data collection processing unit 8 operate.

  In FIG. 3, when event data is reported from the semiconductor manufacturing apparatus 7 to the host (S102), the manufacturing apparatus data collection processing section 6 and the transfer apparatus data collection processing section 8 relate to the lot of which carry-in entrance the event data relates to. Judgment is made (S103, S104). Here, as long as the host can normally control the semiconductor manufacturing apparatus 7 while collecting event data, it is not possible to determine which carry-in entrance is associated with an event of a plurality of lots. Therefore, the event data reported from the semiconductor manufacturing apparatus 7 makes the determination shown in steps S103 and S104. Next, based on the relationship defined by the list shown in FIG. 2, event data, lot name, and carry-in port are associated with each other (S105, S106). Next, the event data reported from the manufacturing apparatus is converted into standardized event names based on the definition of the list shown in FIG. 2 (S107, S108, S109), and the storage process to the recording medium 2 is performed (S110). The lot related information cannot be acquired due to a network failure or a server failure. However, if event data reporting by the semiconductor manufacturing apparatus 7 is continued, the semiconductor manufacturing apparatus 7 is notified by a status report other than the lot processing. As for events that are not related to the lot processing, the storage processing to the recording medium 2 is performed.

  From the processes shown in these steps S105, S106, S107, S108 and S109, the lot-related information already acquired from the production management system can be easily associated with the manufacturing apparatus event data, and the event name is standardized, so that the difference between the models is different. By eliminating, the analysis process described later is facilitated. Further, when event data is collected, association processing between event data, lot names, and carry-in entrances can be performed to reduce the load on a computer that performs analysis processing.

  FIG. 4 is a flowchart showing a processing method of the lot progress status totalization processing unit 1 that reads collected event data from the recording medium 2 and classifies and visualizes the lot progress status.

  The lot progress status totalization processing unit 1 first designates the time to be read from the saved event data, searches for event data that occurred in the designated time zone (S201, S202), and records device status history information and lot transportation. Non-lot event data such as container movement history information is read (S203). Next, lot event data is read (S204). This reading process is repeated as long as the data is within the time range specified in the process of step S202. Next, the read event data is classified by lot name (S205), the event data classified by lot name is matched with the event data immediately before the lot, and state definition information prepared separately from the program (hereinafter referred to as master information) Based on the above, the state of the gap between these two event data is classified (S206). This master information not only defines the state between the two event data, but also defines the priority of that state. Next, it is evaluated whether the state between the two event data classified as described above follows only the state based on the event data of the lot in the time zone when the state occurs (S207). A specific example of this process will be described below.

  When the two event data related to a certain lot are the lot unloading from the semiconductor manufacturing apparatus 7 and the lot loading into the inter-process transfer apparatus, the time zone is determined as the in-process transfer time based on the master information. In the time zone when this condition occurred, the lot processing status of the manufacturing equipment in the next process, the maintenance status, the status of the equipment not directly related to the current process such as the operating status of the transfer device, or the progress status of other lots By superimposing information on various states not directly related to lots with priorities based on master information, the validity of the determination of the in-process transfer time is evaluated, and higher priority states occur simultaneously. If it is, the judgment is changed as that state during the time period. Next, with respect to the time zone for which the above determination has been completed, accumulation processing of the classification duration is performed for each classification. This accumulation process is performed for each lot, for each state, and for each state. At the same time as accumulating time, the time when the classified state is generated is also stored in the memory for the visualization process described later (S208). Next, the output in the CSV format is performed for the time accumulated by the accumulation process (S210). Note that the output is not limited to the CSV format as long as the output is suitable for aggregation. Next, using the time information stored in the memory in the process of step S208, a lot-by-lot process time visualization process is performed (S211). The outline is as follows. The classification time is divided into colors for each classification within a fixed time range designated by the user using the client computer group 4 and displayed together on the screen along the time axis.

  In addition, this time, as a range of a fixed time, it is decided to analyze only batch processing that starts at a fixed time with 0:00 to 24:00 as one unit, but if an interface for specifying analysis conditions is prepared, an arbitrary user input It is also possible to make it possible to analyze only during the time period. In addition, the parts of the above-mentioned devices that are processing lots other than the own lot clearly distinguish the color from the own lot, and occupy one line for each manufacturing device that has processed the own lot and automatically follow the time axis. Displays the processing status of lots and other lots.

  In this embodiment, HTML format output is adopted from the viewpoint of ease of deployment to the entire manufacturing plant and cost. However, it is possible to realize a screen configuration that allows a user to see the progress of a lot, including the obstructions to the progress of the lot. If possible, it is not limited to the HTML format.

  By viewing the above processing results on the client computer group 4, for each lot or all lots present in the factory, you can see the progress and the factors that hindered the progress, or for each state related to the lot progress. By confirming the breakdown of the time in numerical values, it is possible to automatically and instantly understand the factors that hinder the progress of the lot, thereby facilitating the reduction of the time for taking countermeasures.

  FIG. 5 is a flowchart of a processing method of the apparatus operation status totalization processing unit 3 that acquires event data from the recording medium 2 and classifies, totals, and visualizes the apparatus operation status. In this process, the apparatus operating status totalization processing unit 3 first designates a time to be read from the saved event data, searches for event data for each manufacturing apparatus name that occurred in that time zone (S301, S302), and Event data for each manufacturing apparatus that occurred in the time zone is read (S303). This reading process is repeated as long as the data is within the time range specified in step S302. Next, the read event data is classified for each lot that generated the event data (S304). Note that when lots are continuously loaded, the lot processing state and the manufacturing apparatus state do not necessarily match, and therefore, the lots are stored in the memory even if they are not classified for each lot. Next, the event data classified for each lot is matched with the event data immediately before the lot, and the state of the gap between these two event data is classified based on the master information (S305).

  Next, the duration of the classified state is accumulated for each lot and for each classification. At the same time as accumulating time, the time at which the classified state is generated is also stored in the memory for the visualization process described later (S306).

  Next, the event data is matched with the previous event data, and the state of the gap between the two event data is classified based on the master information. Check if this classification and the status classified for each lot have occurred at the same time, and if so, determine which classification should be given priority for the time zone based on the priority defined in the master information. Then, the state as the manufacturing apparatus is determined (S307). Next, the duration of the classified state is accumulated for each manufacturing apparatus and for each classification. At the same time as the time is accumulated, the time when the classified state is generated is also stored in the memory for the visualization process described later (S308). Then, the processes in steps S303 to S308 are repeated until the event data is after the upper limit of the specified range (S309).

  Next, the time accumulated by the accumulation process is recounted for each manufacturing apparatus, each processing module, or each lot, and the result is output in CSV (comma separated data) format (S310). Note that the output is not limited to the CSV format as long as the output is suitable for aggregation.

  Next, processing time visualization processing for each manufacturing apparatus is performed (S311). The outline is as follows. Based on the information on the time of occurrence of the classified state stored in the memory in the process of step S308, the color is classified for each state within a certain time range specified by the user using the client computer group 4, and the color is displayed on the screen according to the time axis. By collectively displaying the information on one line, it is possible to check the operating status of the manufacturing apparatus in the specified time range by simply viewing the one line (S312). Further, based on the information on the time of occurrence for each classified state held in the recording medium 2 by the process of step S306, one manufacturing apparatus occupies one line for each lot processed in the specified time range, The state of the manufacturing apparatus that is processing the lot is displayed by the color based on the classification. This time, HTML format output was adopted because of its ease of deployment to the entire manufacturing plant and cost. However, the lot processing status of a manufacturing device can be overlooked, including conditions not directly related to lot processing such as maintenance and pre-processing preparation. The present invention is not limited to the HTML format as long as a possible screen configuration can be realized.

  As described above, by viewing the processing results in the client computer group 4, the operation status of a certain manufacturing apparatus or processing module is overlooked, or the time for each classification of the operating state is confirmed by a numerical value. Variations in processing modules can be grasped instantly, thereby facilitating a reduction in the time required to determine the necessity of handling.

  By introducing the present invention, human and time waste can be realized for general purposes. These can be improved, and the productivity of manufacturing equipment can be improved and the distribution of factory resources can be optimized.

The block diagram of the whole system in Embodiment 1 of this invention Conceptual diagram of definitions used in the association process between event data and lot information Flowchart of association processing method of event data and lot information Flow chart of lot progress summary and visualization processing method Flow chart of manufacturing apparatus operation status totalization and visualization processing method Output example of manufacturing device operation status summary results A flowchart showing an overview of conventional data input processing The flowchart which shows the outline of other conventional data input processing

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Lot progress status totalization processing unit 2 Recording medium 3 Manufacturing device operation status totalization processing unit 4 Client computer group 5 Production management system group 6 Manufacturing device data collection processing unit 7 Semiconductor manufacturing device 8 Transport device data collection processing unit 9 Transport device

Claims (17)

  A first procedure for determining which lot data is currently being processed or evaluated in the event data reported from the semiconductor manufacturing apparatus in accordance with the lot processing, to the online control computer of the semiconductor manufacturing factory, the lot A second procedure for acquiring incidental information of the lot from a computer belonging to the production management system during processing, a third procedure for associating the event data with the incidental information of the lot in real time, an event in the event data A program for executing any one of a fourth procedure for standardizing a name and a fifth procedure for storing the association processing result in a recording medium.   A first means for determining an on-line control computer of a semiconductor manufacturing factory to determine which event data is currently being processed or evaluated for event data reported from a semiconductor manufacturing apparatus in accordance with lot processing; A second means for acquiring incidental information of the lot from a computer belonging to the production management system, a third means for associating the event data with the incidental information of the lot in real time, and an event in the event data A program for functioning as either a fourth means for standardizing a name or a fifth means for saving the association processing result in a recording medium.   A first function for determining which event data is currently being processed or evaluated for event data reported from a semiconductor manufacturing apparatus in accordance with lot processing to an online control computer of a semiconductor manufacturing factory; A second function of acquiring incidental information of the lot from a computer belonging to the production management system during processing; a third function of associating the event data with the incidental information of the lot in real time; an event in the event data A program for realizing any one of a fourth function for standardizing a name and a fifth function for storing the association processing result in a recording medium.   The computer belonging to the production management system is a computer that manages the progress of a lot in manufacturing, a computer that manages the state of a manufacturing apparatus, a computer that instructs the progress of a lot, or a computer that controls lot transportation. The program according to 1, 2, or 3.   A first procedure for acquiring various information related to a lot from a computer belonging to a production management system in a computer in a semiconductor manufacturing factory. If the various information is not stored in a certain format, this is defined in a certain format. A program for executing one of a second procedure for converting to a third procedure and a third procedure for storing a processing result in a recording medium.   A first means for acquiring various information related to a lot from a computer belonging to a production management system in a semiconductor manufacturing factory, and when the various information is not stored in a certain format, A program for functioning as either a second means for converting to a third means or a third means for storing the processing result in a recording medium.   A first function for acquiring various information related to a lot from a computer belonging to a production management system in a computer in a semiconductor manufacturing factory. If the various information is not stored in a certain format, this is defined in a certain format. A program for realizing one of a second function for converting to a third function and a third function for storing a processing result in a recording medium.   The various information is information related to lot progress such as production instruction information, manufacturing apparatus maintenance information, reticle state transition information including entry / exit to the exposure apparatus, and lot transfer information between processes or within a process. 8. The program according to claim 5, 6 or 7.   A first procedure for extracting records from the recording medium, a second procedure for classifying the contents of residence time for each lot, and a third procedure for judging the priority of classification according to separately defined information during the classification, The program according to any one of claims 1 to 8, wherein the program executes any one of a fourth procedure for performing aggregation for each classification and a fifth procedure for visualizing the aggregation results.   A first means for extracting records from the recording medium; a second means for classifying the contents of the residence time for each lot; a third means for judging the priority of classification according to separately defined information in the classification; The program according to any one of claims 1 to 8, wherein the program functions as either a fourth means for summing up each classification or a fifth means for visualizing the summation results.   A first function for extracting records from the recording medium, a second function for classifying the contents of residence time for each lot, and a third function for determining the priority of classification according to separately defined information in the classification, The program according to any one of claims 1 to 8, which realizes any one of a fourth function for performing aggregation for each classification and a fifth function for visualizing the aggregation result.   12. The program according to claim 9, 10 or 11, wherein the residence time is a time until the next manufacturing apparatus is carried in after the processing in the manufacturing apparatus is completed.   A first procedure for extracting records from the recording medium, a second procedure for classifying the contents of the time taken from the delivery of a lot to each manufacturing apparatus until the processing is completed, and the classified information at the same time If there are multiple items, a third procedure for prioritizing classified information and removing duplicates, a fourth procedure for counting the classified information for each processing condition, and a fifth procedure for visualizing the results of the counting The program of any one of Claims 1-8 for performing either of these.   A first means for extracting records from the recording medium; a second means for classifying the content of the time taken from the time the lot is carried into each manufacturing apparatus to the completion of processing; and the classified information at the same time A third procedure for prioritizing the classified information and removing duplicates when there are a plurality, a fourth means for counting the classified information for each processing condition, and a fifth means for visualizing the result of the counting The program according to any one of claims 1 to 8, which is caused to function as any one of the above.   A first function for extracting records from the recording medium; a second function for classifying the content of the time taken from the delivery of a lot to each manufacturing device until the processing is completed; and the classified information at the same time A third function that prioritizes classified information and removes duplicates when there are multiple, a fourth function that aggregates the classified information for each processing condition, and a fifth function that visualizes the result of the aggregation The program according to any one of claims 1 to 8, for realizing any one of them.   16. The program according to claim 13, 14 or 15, wherein the processing conditions are a recipe, the number of wafers, and a processing path.   The computer-readable recording medium which recorded the program in any one of Claims 1-16.

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