JP2005240952A - 磁気軸受装置及びターボ型真空ポンプ - Google Patents

磁気軸受装置及びターボ型真空ポンプ Download PDF

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Publication number
JP2005240952A
JP2005240952A JP2004054281A JP2004054281A JP2005240952A JP 2005240952 A JP2005240952 A JP 2005240952A JP 2004054281 A JP2004054281 A JP 2004054281A JP 2004054281 A JP2004054281 A JP 2004054281A JP 2005240952 A JP2005240952 A JP 2005240952A
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Japan
Prior art keywords
rotating shaft
axial
axial displacement
magnetic bearing
vacuum pump
Prior art date
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Pending
Application number
JP2004054281A
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English (en)
Japanese (ja)
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JP2005240952A5 (enExample
Inventor
Toshiharu Ochiai
俊治 落合
Shinichi Sekiguchi
信一 関口
Matsutaro Miyamoto
松太郎 宮本
Toshiharu Nakazawa
敏治 中澤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Ebara Densan Ltd
Original Assignee
Ebara Corp
Ebara Densan Ltd
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Filing date
Publication date
Application filed by Ebara Corp, Ebara Densan Ltd filed Critical Ebara Corp
Priority to JP2004054281A priority Critical patent/JP2005240952A/ja
Publication of JP2005240952A publication Critical patent/JP2005240952A/ja
Publication of JP2005240952A5 publication Critical patent/JP2005240952A5/ja
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0476—Active magnetic bearings for rotary movement with active support of one degree of freedom, e.g. axial magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
JP2004054281A 2004-02-27 2004-02-27 磁気軸受装置及びターボ型真空ポンプ Pending JP2005240952A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004054281A JP2005240952A (ja) 2004-02-27 2004-02-27 磁気軸受装置及びターボ型真空ポンプ

Applications Claiming Priority (1)

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JP2004054281A JP2005240952A (ja) 2004-02-27 2004-02-27 磁気軸受装置及びターボ型真空ポンプ

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009067239A Division JP4965596B2 (ja) 2009-03-19 2009-03-19 ターボ型真空ポンプ

Publications (2)

Publication Number Publication Date
JP2005240952A true JP2005240952A (ja) 2005-09-08
JP2005240952A5 JP2005240952A5 (enExample) 2006-08-24

Family

ID=35022894

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JP2004054281A Pending JP2005240952A (ja) 2004-02-27 2004-02-27 磁気軸受装置及びターボ型真空ポンプ

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JP (1) JP2005240952A (enExample)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008157439A (ja) * 2006-11-28 2008-07-10 Jtekt Corp 磁気軸受装置及び燃料電池用コンプレッサ
JP2009210997A (ja) * 2008-03-06 2009-09-17 Ricoh Co Ltd トナー搬送装置及び画像形成装置
JP2009235921A (ja) * 2008-03-26 2009-10-15 Ebara Corp ターボ型真空ポンプ
CN103967829A (zh) * 2013-02-06 2014-08-06 株式会社岛津制作所 磁性轴承装置及真空泵
WO2018159645A1 (ja) * 2017-02-28 2018-09-07 三菱重工サーマルシステムズ株式会社 温度予測装置、磁気軸受搭載圧縮機、温度予測方法及びプログラム
JP2018151378A (ja) * 2017-02-09 2018-09-27 プファイファー・ヴァキューム・ゲーエムベーハー 位置検出装置
CN108757732A (zh) * 2018-08-06 2018-11-06 珠海格力电器股份有限公司 磁悬浮轴承控制设备、方法和存储介质
CN108869541A (zh) * 2018-01-12 2018-11-23 至玥腾风科技投资集团有限公司 一种径向轴承、转子系统及径向轴承的控制方法
CN112780584A (zh) * 2021-02-22 2021-05-11 珠海格力电器股份有限公司 磁悬浮压缩机
US11143191B2 (en) 2017-09-20 2021-10-12 Edwards Limited Drag pump and a set of vacuum pumps including a drag pump
CN115217844A (zh) * 2021-04-19 2022-10-21 青岛海特生物医疗有限公司 一种离心机
CN115388087A (zh) * 2022-08-15 2022-11-25 江苏明磁动力科技有限公司 基于轴向磁轴承电流的磁悬浮电机轴向悬浮位置控制方法
CN118622730A (zh) * 2024-08-12 2024-09-10 中磁(浙江)工业科技有限公司 磁悬浮真空泵及控制方法
CN118836160A (zh) * 2024-08-16 2024-10-25 北京通嘉宏瑞科技有限公司 监测方法、监测系统及真空泵

Cited By (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008157439A (ja) * 2006-11-28 2008-07-10 Jtekt Corp 磁気軸受装置及び燃料電池用コンプレッサ
JP2009210997A (ja) * 2008-03-06 2009-09-17 Ricoh Co Ltd トナー搬送装置及び画像形成装置
JP2009235921A (ja) * 2008-03-26 2009-10-15 Ebara Corp ターボ型真空ポンプ
CN103967829A (zh) * 2013-02-06 2014-08-06 株式会社岛津制作所 磁性轴承装置及真空泵
US9347489B2 (en) 2013-02-06 2016-05-24 Shimadzu Corporation Magnetic bearing device and vacuum pump
JP2018151378A (ja) * 2017-02-09 2018-09-27 プファイファー・ヴァキューム・ゲーエムベーハー 位置検出装置
CN110337548A (zh) * 2017-02-28 2019-10-15 三菱重工制冷空调系统株式会社 温度预测装置、搭载磁性轴承的压缩机、温度预测方法以及程序
WO2018159645A1 (ja) * 2017-02-28 2018-09-07 三菱重工サーマルシステムズ株式会社 温度予測装置、磁気軸受搭載圧縮機、温度予測方法及びプログラム
JP2018141708A (ja) * 2017-02-28 2018-09-13 三菱重工サーマルシステムズ株式会社 温度予測装置、磁気軸受搭載圧縮機、温度予測方法及びプログラム
US10951155B2 (en) 2017-02-28 2021-03-16 Mitsubishi Heavy Industries Thermal Systems, Ltd. Temperature prediction device, compressor with magnetic bearing mounted thereon, temperature prediction method and program
US11143191B2 (en) 2017-09-20 2021-10-12 Edwards Limited Drag pump and a set of vacuum pumps including a drag pump
CN108869541A (zh) * 2018-01-12 2018-11-23 至玥腾风科技投资集团有限公司 一种径向轴承、转子系统及径向轴承的控制方法
CN108869541B (zh) * 2018-01-12 2024-04-02 刘慕华 一种径向轴承、转子系统及径向轴承的控制方法
CN108757732A (zh) * 2018-08-06 2018-11-06 珠海格力电器股份有限公司 磁悬浮轴承控制设备、方法和存储介质
CN108757732B (zh) * 2018-08-06 2023-10-03 珠海格力电器股份有限公司 磁悬浮轴承控制设备、方法和存储介质
CN112780584A (zh) * 2021-02-22 2021-05-11 珠海格力电器股份有限公司 磁悬浮压缩机
CN112780584B (zh) * 2021-02-22 2025-04-01 珠海格力电器股份有限公司 磁悬浮压缩机
CN115217844A (zh) * 2021-04-19 2022-10-21 青岛海特生物医疗有限公司 一种离心机
CN115388087A (zh) * 2022-08-15 2022-11-25 江苏明磁动力科技有限公司 基于轴向磁轴承电流的磁悬浮电机轴向悬浮位置控制方法
CN118622730A (zh) * 2024-08-12 2024-09-10 中磁(浙江)工业科技有限公司 磁悬浮真空泵及控制方法
CN118836160A (zh) * 2024-08-16 2024-10-25 北京通嘉宏瑞科技有限公司 监测方法、监测系统及真空泵

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