JP2005230681A - Gas piping equipment and detoxification system provided with the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide gas piping equipment which gets along without stopping the discharge of a gas when cleaning and exchanging a check valve of gas piping and, thereby, makes it possible to avoid the lowering of operation rate of treatment equipment, as to the gas piping equipment which is connected with the gas discharging side of the treatment equipment of discharging the gas while performing the prescribed treatment and discharges the gas through the gas piping. <P>SOLUTION: A plurality of the gas piping 22a, 22b having at least one check valve 23a, 23b respectively are arranged in parallel to each other and, thereby, plural series of discharge paths are formed. An arbitrary discharge path is selected from the plural series of the discharge paths and can be used. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a gas piping device having a gas piping for discharging a foreign substance-containing gas such as a residual powder-containing gas after the powder is removed from the exhaust gas of a CVD apparatus or a dry etching apparatus, and particularly accompanying maintenance. The present invention relates to measures for avoiding gas emission stoppage.

  In general, a gas exhausted from a processing apparatus such as a CVD apparatus or a dry etching apparatus used in manufacturing a liquid crystal display device includes, for example, powder as described in Patent Document 1, For this reason, as schematically shown in the block diagram of FIG. 3, a powder removing device 200 having a removal processing device 250 and a gas piping device 300 is provided on the gas exhaust side of the processing device 100 via a vacuum pump 110. Then, after the powder is removed from the gas by the removal processing device 250, the gas is discharged by the gas piping 310 of the gas piping device 300.

  At that time, a check valve 320 is installed in the gas pipe 310 mainly for the purpose of preventing the back flow of the gas.

When the check valve 320 is closed due to residual powder as a foreign substance in the gas, the closed check valve 320 is cleaned or replaced. Examples of the removal processing apparatus 250 that removes the powder in the gas include those described in Patent Document 2 and Patent Document 3.
JP-A-8-127874 (2nd page) JP 2003-105543 A (pages 4 and 5; FIGS. 1 to 7) Japanese Patent Application Laid-Open No. 62-141718 (Pages 2 and 3; FIGS. 1 and 2)

  However, in the conventional gas piping device 300, it is necessary to stop not only the removal processing device 250 and the vacuum pump 110 but also the processing device 100 every time the check valve 320 is cleaned or replaced. For this reason, there is a problem that the operating rate of the processing apparatus 100 is lowered.

  The present invention has been made in view of such a point, and its main object is to provide a powder-containing gas discharged from a processing apparatus such as a CVD apparatus and a dry etching apparatus used in manufacturing a liquid crystal display device. In a gas piping device equipped with a gas pipe for discharging a gas containing foreign matter such as a residual powder-containing gas discharged from a detoxifying device such as a powder removing device that removes powder in the exhaust gas, Therefore, it is not necessary to stop the gas discharge during the cleaning or replacement of the check valve that regulates the discharge direction of the gas, so that a reduction in the operating rate of the processing apparatus can be avoided.

  In order to achieve the above object, in the present invention, a plurality of gas discharge paths are provided, and one or more arbitrary discharge paths can be selected and used from the plurality of discharge paths.

  Specifically, in the present invention, a gas pipe for discharging gas is provided, and the gas is discharged through the gas pipe connected to the gas exhaust side of a processing apparatus that exhausts the gas while performing a predetermined treatment. This is based on the assumption that the gas piping device is made. A plurality of the gas pipes are arranged in parallel with each other, and each gas pipe has a reverse that regulates passage of the gas in the direction opposite to the predetermined discharge direction of the gas. It is assumed that a stop valve is provided. In addition, upstream opening / closing means for opening and closing the gas pipe corresponding to each check valve on the upstream side in the discharge direction of the check valve, and the gas pipe corresponding to each check valve to the check valve A downstream opening / closing means that opens and closes downstream in the discharge direction is provided for each check valve.

  In the above configuration, the plurality of check valves, the plurality of upstream side opening / closing means, and the plurality of downstream side opening / closing means can be accommodated in a container. And detecting means for detecting whether or not each of the check valves is blocked by a foreign substance in the gas, and the check valves detected to be closed based on a detection result of the detecting means. The plurality of upstream side opening / closing means and the control means for controlling the plurality of downstream side opening / closing means may be provided so that the gas passes without passing through.

  In the above configuration, the gas pipes are plural, but when the gas pipe is one, the plurality of check valves are arranged in the discharge direction with respect to the gas pipe. can do. For each check valve, a bypass pipe having both ends connected to the upstream and downstream portions of the check valve in the gas pipe is provided, and the bypass pipe is opened and closed for each bypass pipe. Bypass opening / closing means is provided. Furthermore, for each of the check valves, an upstream side opening / closing means for opening and closing the gas pipe between the check valve and a connection portion with the bypass pipe immediately upstream of the check valve in the discharge direction is provided. Further, a downstream opening / closing means is provided for opening and closing the gas pipe between the check valve and a connection portion with the bypass pipe immediately downstream of the check valve in the discharge direction. In this case as well, the plurality of check valves, the plurality of upstream side opening / closing means, the plurality of downstream side opening / closing means and the plurality of bypass opening / closing means may be accommodated in a container, or the detection means The plurality of upstream opening / closing means, the plurality of downstream opening / closing means, and the plurality of bypasses so that the gas passes without passing through the check valve that is detected to be blocked based on a detection result The opening / closing means can be controlled by the control means.

  Further, the gas piping apparatus having the above-described configuration is connected to a removal processing unit that removes the foreign matter from the gas containing foreign matter and exhausts the gas so as to discharge the gas exhausted from the removal processing unit. Harmful devices can also be constructed.

  According to the present invention, in the gas piping apparatus in which the gas exhausted from the processing apparatus is allowed to pass only in the discharging direction by the check valve of the gas pipe, the plurality of discharge paths each having at least one check valve When one of the check valves becomes obstructed by a foreign substance in the gas, the gas can be discharged through a discharge route other than the discharge route via the check valve. As a result, the check valve can be maintained without interrupting the passage of gas, and therefore the operating rate of the processing apparatus connected to the gas piping apparatus is prevented from being lowered by the above-described maintenance. be able to.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
FIG. 1 is a block diagram schematically showing an overall configuration of a powder removing apparatus as a detoxifying apparatus including a gas piping apparatus according to Embodiment 1 of the present invention, including a connection state with a processing apparatus. The powder removing apparatus 10 exhausts a gas containing the powder while performing a predetermined process with generation of powder as a foreign substance such as a CVD apparatus or a dry etching apparatus in a manufacturing process of a liquid crystal display device. The processing device 40 is used by being connected to the gas exhaust side.

  The powder removing apparatus 10 includes a removal processing apparatus 11 as a detoxification processing means for removing powder from the gas introduced by the operation of the vacuum pump 50 from the processing apparatus 40 and exhausting the gas, and the gas of the removal processing apparatus 11. A gas piping device 20 that is connected to the exhaust side and exhausts the gas exhausted from the removal processing device 11 is provided.

  The gas pipe device 20 includes first and second gas pipes 22a and 22b for discharging gas, and the gas pipes 22a and 22b are arranged in parallel to each other. In the middle of each gas pipe 22a, 22b, the gas is restricted from moving in a direction opposite to a predetermined discharge direction (the right direction in FIG. 1), while allowing movement in the discharge direction. First and second check valves 23a and 23b are provided.

  On the upstream side in the discharge direction of the check valves 23a and 23b in each gas pipe 22a and 22b (left side in FIG. 1; hereinafter simply referred to as “upstream side”), the upstream side that opens and closes the corresponding gas pipe 22a and 22b, respectively. Open / close valves 24a and 24b are provided. In addition, the corresponding gas pipes 22a and 22b are opened and closed on the downstream side in the discharge direction of the check valves 23a and 23b in the respective gas pipes 22a and 22b (left side in the figure, hereinafter simply referred to as “downstream side”). Downstream opening / closing valves 25a and 25b are provided. These open / close valves 24a, 24b, 25a, 25b have built-in actuators (not shown) for opening / closing the corresponding gas pipes 22a, 22b, and the actuators open / close in response to control signals described later. It is supposed to be.

  Furthermore, between each check valve 23a, 23b and the upstream opening / closing valve 24a, 24b, an upstream side for detecting the gas pressure on the upstream side of the check valve 23a, 23b and outputting the detected value, respectively. Pressure gauges 26a and 26b are provided. On the other hand, gas pressures on the downstream side of the check valves 23a and 23b are respectively set between the check valves 23a and 23b and the downstream opening / closing valves 25a and 25b. Downstream pressure gauges 27a and 27b for detecting and outputting the detected values are provided. These upstream and downstream pressure gauges 26a, 26b, 27a, and 27b constitute detection means in the present invention.

  The removal processing apparatus 11, the first and second gas pipes 22a and 22b, the first and second check valves 23a and 23b, the upstream opening / closing valves 24a and 24b, and the downstream opening / closing valves 25a and 25b, The upstream pressure gauges 26 a and 26 b and the downstream pressure gauges 27 a and 27 b are accommodated in a common container 60.

  The output signals of the upstream and downstream pressure gauges 26a, 26b, 27a, and 27b are input to the outside of the housing 60, and the upstream and downstream opening / closing valves 24a and 24b are based on the output signals. , 25a, 25b are provided with a control unit 30 as a control means for outputting the above-described control signal. The control unit 30 calculates a differential pressure between the upstream gas pressure and the downstream gas pressure of each check valve 23a, 23b, and the differential pressure reaches a predetermined value (differential pressure ≧ predetermined value). When the determination result is YES, a control signal for closing both the upstream side and downstream side opening / closing valves 24a, 24b, 25a, and 25b is output. Here, “closed” includes not only the state of being completely closed but also the state of being closed to such an extent that the corresponding check valves 23a and 23b need to be cleaned or replaced.

  In this embodiment, as shown by a thick solid arrow in FIG. 1, the discharge path by the first gas pipe 22a when both the upstream and downstream on-off valves 24a and 25a of the first check valve 23a are opened. And the second gas pipe 22b when both the upstream and downstream opening / closing valves 24b and 25b of the second check valve 23b are opened, as shown by the thick broken arrows in FIG. Two discharge paths are formed together with a second discharge path as a discharge path, and the two discharge paths are selectively switched for use.

  Next, the operation of the powder removing apparatus 10 configured as described above will be described. In the initial state, the upstream and downstream opening / closing valves 24a and 25a of the first check valve 23a are both open, while the upstream and downstream opening / closing valves 24b and 25b of the second check valve 23b are both closed. It is assumed that the first discharge route is used.

  The powder-containing gas generated with the operation of the processing device 40 is introduced into the powder removing device 10 by the operation of the vacuum pump 50. The introduced gas is exhausted toward the first and second gas pipes 22 a and 22 b of the gas pipe device 20 after the powder is removed by the removal processing device 11. At this time, the upstream side open / close valve 24a of the first gas pipe 22a is open, while the upstream side open / close valve 24b of the second gas pipe 22b is closed. The gas is discharged after passing through one gas pipe 22a.

  At that time, the gas exhausted from the removal processing device 11 contains a small amount of residual powder as foreign matter, and the residual powder gradually accumulates on the first check valve 23a. Eventually, the first check valve 23a is closed. As the residual powder accumulates, the upstream gas pressure of the first check valve 23a gradually increases, while the downstream gas pressure gradually decreases. On the other hand, in the control unit 30, the differential pressure between the upstream gas pressure detected by the upstream pressure gauge 26a of the first check valve 23a and the downstream gas pressure detected by the downstream pressure gauge 27a. Are sequentially performed, and it is sequentially determined whether or not the differential pressure has reached a predetermined value. When the differential pressure reaches a predetermined value, it is assumed that the first check valve 23a is closed, and a control signal that opens to the upstream and downstream on-off valves 24b and 25b of the second check valve 23b. Is output to the upstream side and downstream side on-off valves 24a and 25a of the first check valve 23a. As a result, the gas exhausted from the removal processing apparatus 11 passes through the second gas pipe 22b instead of the first gas pipe 22a and is discharged. Thereby, the cleaning or replacement of the first check valve 23a is performed without interrupting the discharge of gas accompanying the removal process of the removal processing apparatus 11.

  Therefore, according to the present embodiment, the processing apparatus 40 that performs a predetermined process while generating a gas containing powder, such as a CVD apparatus or a dry etching apparatus used when manufacturing a liquid crystal display device, In the powder removing device 10 used by being connected to the gas exhaust side, the first check valve 23a is used as the gas piping device 20 that discharges the gas exhausted by removing the powder by the removal processing device 11. The two gas discharge paths are formed by the first gas pipe 22a having the second gas pipe 22b and the second gas pipe 22b having the second check valve 23b, and the two gas discharge paths are selectively switched for use. Therefore, when the check valve 23a (or 23b) in use is blocked by residual powder in the gas, the check valve 23a (or 23b) of the check valve 23a (or 23b) is not stopped without stopping the processing of the removal processing device 11. Maintenance such as sweeping or replacement can be performed. Therefore, it is possible to avoid a decrease in the operating rates of the processing device 40 and the removal processing device 11 due to the maintenance, thereby improving the productivity of the liquid crystal display device. Can contribute.

  Further, since the switching of the discharge path can be automatically performed based on the differential pressure between the upstream side gas pressure and the downstream side gas pressure of the check valves 23a, 23b, such a switching operation is performed. It is possible to avoid an increase in labor due to the above.

  In the above embodiment, the upstream side pressure gauges 26a and 26b of the gas piping device 20 are arranged on the downstream side of the upstream side opening / closing valves 24a and 24b, respectively, but may be arranged on the upstream side. Similarly, the downstream pressure gauges 27a and 27b may be arranged on the downstream side of the downstream opening / closing valves 25a and 25b, respectively.

  In the above embodiment, the pressure gauges 26a, 26b, 27a, and 27b are disposed on the upstream side and the downstream side of the check valves 23a and 23b, respectively, but only on the upstream side of the check valves 23a and 23b. Each of the pressure gauges may be arranged so that the control signal is output when the pressure detected by the upstream pressure gauge reaches a predetermined value (pressure ≧ predetermined value). That is, the detection means in the present invention can be configured only by the upstream pressure gauges 26a and 26b.

  Further, in the above embodiment, the two discharge paths including the first discharge path passing through the first check valve 23a and the second discharge path passing through the second check valve 23b are selectively switched. However, when these two systems of discharge paths are combined and used simultaneously, for example, when the first check valve 23a is closed, the use of only the second discharge path may be switched. .

  In the above embodiment, the first and second gas pipes 22a and 22b form two systems of discharge paths. However, three or more gas pipes provide three or more systems of discharge paths. You may make it form.

  Furthermore, in the above-described embodiment, the upstream ends of the two gas pipes 22a and 22b of the gas pipe device 20 are connected to the removal processing device 11, respectively, so that the two-system discharge path is excluded from the downstream end portion. Although they are formed independently of each other, only the upstream end of one gas pipe is connected to the removal processing apparatus 11, and the upstream end of the second gas pipe is connected to the downstream portion of the upstream end. Alternatively, the second gas pipe may be branched from the middle of the one gas pipe, so that the two discharge paths may be shared with each other in the upstream portion.

(Embodiment 2)
The block diagram of FIG. 2 schematically shows the entire configuration of the powder removing apparatus as a detoxifying apparatus including the gas piping apparatus according to Embodiment 2 of the present invention, including the connection state with the processing apparatus, The same parts as those in the first embodiment are denoted by the same reference numerals.

  In the present embodiment, the gas piping device 20 includes one gas piping 22, and the first and second check valves 23 a and 23 b are arranged in series in the discharge direction in the gas piping 22. Is arranged.

  As in the case of the first embodiment, upstream and downstream opening / closing valves 24a, 24b, 25a, and 25b are provided on the upstream and downstream sides of the check valves 23a and 23b, respectively. Further, between the check valves 23a and 23b and the upstream side open / close valves 24a and 24b, and between the check valves 23a and 23b and the downstream side open / close valves 25a and 25b, this is also the case of the first embodiment. Similarly, upstream and downstream pressure gauges 26a, 26b, 27a, 27b are provided, respectively.

  In this embodiment, both ends of the check valves 23a and 23b in the gas pipe 22 are upstream of the upstream opening / closing valves 24a and 24b and downstream of the downstream opening / closing valves 25a and 25b. And two bypass pipes 28a and 28b connected to each other, and bypass opening / closing valves 29a and 29b provided in the respective bypass pipes 28a and 28b for opening and closing the bypass pipes 28a and 28b.

  On the other hand, as in the case of the first embodiment, the controller 30 outputs the output signals from the upstream and downstream pressure gauges 26a and 27a of the first check valve 23a, the upstream of the second check valve 23b, Based on the output signals from the downstream pressure gauges 26b and 27b, the differential pressure between the upstream gas pressure and the downstream gas pressure of the check valves 23a and 23b is calculated, and the respective differential pressures are calculated. It is determined whether or not a predetermined value has been reached. When the differential pressure of one check valve 23a (or 23b) reaches a predetermined value, the upstream and downstream on-off valves 24a and 25a (or 24b and 25b) of the check valve 23a (or 23b) The bypass opening / closing valve 29a (or 29b) of the check valve 23a (or 23b) is opened, and the upstream and downstream opening / closing valves 24b, 25b (or 24a, 24a, and the other check valve 23b (or 23a) are opened. 25a) are both opened and a control signal for the on / off valves 24a, 24b, 25a, 25b, 29a, 29b is output so that the bypass on / off valve 29b (or 29a) of the check valve 23b (or 23a) is closed. ing.

  That is, in the present embodiment, as indicated by a thick solid line arrow in FIG. 2, the first discharge path passing through the first check valve 23a and the second bypass pipe 28b and the thick broken line arrow in FIG. As described above, the two discharge paths are selectively switched to the second discharge path via the first bypass pipe 28a and the second check valve 23b.

  Next, the operation of the powder removing apparatus 10 configured as described above will be described. In the initial state, the upstream and downstream on-off valves 24a and 25a of the first check valve 23a are both open and the bypass on-off valve 29a of the first bypass pipe 28a is closed, while the second check valve 23b It is assumed that both the upstream and downstream opening / closing valves 24b and 25b are closed and the bypass opening / closing valve 29b of the second bypass pipe 28b is open, and the first discharge path is used.

  The powder-containing gas generated with the operation of the processing device 40 is introduced into the powder removing device 10 by the operation of the vacuum pump 50. The introduced gas is exhausted toward the gas piping 22 of the gas piping device 20 after the removal processing device 11 removes the powder. At this time, the upstream and downstream on-off valves 24a and 25a of the first check valve 23a are open, while the bypass on-off valve 29a of the first bypass pipe 28a is closed. It goes to the second check valve 23b via the check valve 23a. Next, on the second check valve 23b side, both the upstream side and downstream side open / close valves 24b and 25b are closed, while the bypass open / close valve 29b of the second bypass pipe 28b is open. Instead of passing through the check valve 23b, the exhaust gas is discharged through the second bypass pipe 28b that bypasses the second check valve 23b.

  On the other hand, the control unit 30 sequentially calculates the differential pressure based on the output signals of the upstream and downstream pressure gauges 26a and 27a of the first check valve 23a, and whether or not the differential pressure has reached a predetermined value. Determine. When the determination is YES, the upstream and downstream on / off valves 24b and 25b of the second check valve 23b are both opened and the bypass on / off valve 29b of the second bypass pipe 28b is closed, while the first bypass pipe 28a is closed. A control signal is output so that the bypass opening / closing valve 29a is opened and both the upstream and downstream opening / closing valves 24a, 25a of the first check valve 23a are closed. Thereby, the discharge path is changed from the first discharge path passing through the first check valve 23a and the second bypass pipe 28b to the second discharge path passing through the first bypass pipe 28a and the second check valve 23b. Switch. Accordingly, the first check valve 23a can be cleaned or replaced while the gas from which the powder has been removed by the removal processing device 11 is continuously discharged.

  Therefore, the present embodiment can achieve the same effects as those of the first embodiment.

  In the above embodiment, the two discharge paths are switched. However, the third discharge path that passes through the first and second check valves 23a and 23b is added to the two discharge paths. In addition, three systems may be used, and the discharge paths of these three systems may be switched.

  In the above embodiment, the first and second check valves 23a and 23b are provided. However, three or more check valves are provided, and three or four systems are provided accordingly. For example, three or more discharge paths may be formed.

  In the first embodiment and the second embodiment, some components of the gas piping device 20 are accommodated in the container 60 together with the removal processing device 11. You may make it accommodate in a container.

  Furthermore, in Embodiment 1 and Embodiment 2 above, the removal of the powder removing apparatus 10 that removes powder from the exhaust gas of the processing apparatus 40 such as a CVD apparatus or a dry etching apparatus used in the manufacturing process of the liquid crystal display device Although the case where it connects with the processing apparatus 11 is demonstrated, this invention is applied to the gas piping apparatus connected and used for the gas exhaust side of the various processing apparatuses which perform a predetermined | prescribed process with gas exhaustion. be able to.

It is a block diagram which shows typically the whole structure of the powder removal apparatus provided with the gas piping apparatus which concerns on Embodiment 1 of this invention including a connection state with a processing apparatus. It is the FIG. 1 equivalent view which shows typically the whole structure of the powder removal apparatus provided with the gas piping apparatus which concerns on Embodiment 2 of this invention including the connection state with a processing apparatus. FIG. 2 is a view corresponding to FIG. 1 schematically showing an overall configuration of a powder removing apparatus including a conventional gas piping device including a connection state with a processing apparatus.

Explanation of symbols

10 Powder removal device (harm removal device)
11 Removal processing device (abatement processing means)
20 Gas piping device 22 Gas piping 22a First gas piping (gas piping)
22b Second gas pipe (gas pipe)
23a First check valve (check valve)
23b Second check valve (check valve)
24a, 24b Upstream opening / closing valve (upstream opening / closing means)
25a, 25b Downstream opening / closing valve (downstream opening / closing means)
26a, 26b Upstream pressure gauge (detection means)
27a, 27b Downstream pressure gauge (detection means)
28a, 28b Bypass piping 29a, 29b Bypass opening / closing valve (bypass opening / closing means)
30 Control unit (control means)
60 container

Claims (7)

A gas piping device comprising a gas piping for discharging gas, connected to a gas exhaust side of a processing device for exhausting gas while performing a predetermined treatment, and discharging the gas through the gas piping,
The gas pipes are arranged in parallel with each other,
A check valve that is provided in each gas pipe and restricts passage of the gas pipe in a direction opposite to the gas discharge direction;
An upstream side opening / closing means provided for each check valve and opening and closing the gas pipe corresponding to the check valve on the upstream side in the discharge direction of the check valve;
A gas piping device comprising a downstream side opening / closing means provided for each check valve and opening / closing the gas piping corresponding to the check valve on the downstream side in the discharge direction of the check valve. . In the gas piping device according to claim 1,
A gas piping device comprising: a housing for housing the plurality of check valves, the plurality of upstream opening / closing means, and the plurality of downstream opening / closing means. In the gas piping device according to claim 1,
Detecting means for detecting whether or not each check valve is blocked by a foreign substance in the gas; and passing through the check valve detected to be blocked based on the detection result of the detecting means. And a control means for controlling the plurality of upstream side opening / closing means and the plurality of downstream side opening / closing means so that the gas passes therethrough. A gas piping device comprising a gas piping for discharging gas, connected to a gas exhaust side of a processing device for exhausting gas while performing a predetermined treatment, and discharging the gas through the gas piping,
A plurality of check valves provided in the gas pipe so as to be aligned in the gas discharge direction, each regulating passage in a direction opposite to the discharge direction in the gas pipe;
A bypass pipe provided for each check valve, both ends of which are respectively connected to an upstream portion and a downstream portion of the check valve in the gas pipe;
A bypass opening / closing means provided on each bypass pipe for opening and closing the bypass pipe;
An upstream opening / closing means that is provided for each check valve, and that opens and closes the gas pipe between the check pipe and a connecting portion with the bypass pipe immediately upstream in the discharge direction of the check valve;
Provided for each of the check valves, and a connection part between the gas pipe and the bypass pipe immediately downstream in the discharge direction of the check valve, and a downstream opening / closing means that opens and closes between the check valve. A gas piping device characterized by comprising. In the gas piping device according to claim 4,
A gas piping device comprising: a housing for housing the plurality of check valves, the plurality of upstream opening / closing means, the plurality of downstream opening / closing means, and the plurality of bypass opening / closing means. In the gas piping device according to claim 4,
Detecting means for detecting whether or not each check valve is blocked by a foreign substance in the gas; and passing through the check valve detected to be blocked based on the detection result of the detecting means. And a control means for controlling the plurality of upstream opening / closing means, the plurality of downstream opening / closing means and the plurality of bypass opening / closing means so that the gas passes therethrough. A detoxifying device comprising the gas piping device according to any one of claims 1, 2, 3, 4, 5, and 6.
A removal processing means for removing the foreign matter from the gas containing the foreign matter and exhausting the gas,
The abatement apparatus, wherein the gas piping device is connected to the removal processing means so as to discharge the gas exhausted from the removal processing means.

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