KR102057336B1 - Manifold for gas analyzer with gas pressure buffer - Google Patents

Abstract

The present invention relates to a manifold for a gas analyzer with a gas pressure buffer which alleviates the pressure of gas to prevent an impact caused by a pressure difference from being transferred to a gas analyzer if the pressure of gas flowing into the gas analyzer changes. According to the present invention, the manifold for a gas analyzer with a gas pressure buffer comprises: a main body (110) having a plurality of input ports (111) to which sample lines (20) connected to gas supply pipes receiving gas to be analyzed for each process in a one-to-one manner are connected, a first output port (112) connected to a gas analyzer (30), and a second output port (113) connected to a first vacuum pump (40); a first branch pipe (120) to connect the input ports and the first output port in the main body; a second branch pipe (125) branching from the first branch pipe to be connected to the second output port; a first bypass pipe (130) to connect the first branch pipe and the second output port in the main body; a second vacuum pump (50) connected to the gas analyzer; a valve (133) installed on the first branch pipe to regulate entry of gas for each input port; a second bypass pipe (140) branching from the first branch pipe to merge with the first bypass pipe; and a gas pressure buffer (150) installed on the second bypass pipe to alleviate a pressure impact of gas applied to the second branch pipe when switching the input ports.

Description

Manifold for gas analyzer with gas pressure buffer

The present invention is a gas analyzer manifold equipped with a gas pressure buffer device to relieve the pressure of the sample gas so that the impact of the pressure difference is not transmitted to the gas analyzer when the pressure of the sample gas flowing into the gas analyzer is changed It is about.

In general, a semiconductor device undergoes various processes such as a film forming process, a photo process, an etching process, an impurity injection process, and a metal process, and various types of gases are used in the process of performing this series of processes.

For example, argon gas is used for a sputtering process or an etching process, and helium gas is used for a cleaning process or a transfer process.

Gases used in the manufacture of semiconductor devices should be supplied with the correct composition and concentration for the process. Therefore, at the workplace, analyze the composition and concentration of the gas using a gas analyzer from time to time before or during the process. Doing.

Conventionally, after installing a gas analyzer at a rear end of a sample line connected to each gas supply pipe to which gas is supplied to each process, the sample lines are alternately connected to each gas supply pipe to perform gas analysis sequentially so that inconvenience in use is inconvenient. Was very big.

In addition, there was a problem that the flow rate and pressure of the gas flowing into each gas analyzer is unstable. If the flow rate and pressure of the gas flowing into the gas analyzer is not constant, the analysis reliability of the gas analyzer may not be able to produce a normal analysis result, thereby greatly reducing the analysis reliability.

In order to solve this problem, a manifold has recently been installed between the sample line and the gas analyzer.

As shown in FIG. 1, the conventional manifold 1 includes a main body 10 having a plurality of input ports 11, a first output port 12, and a second output port 13. do.

The input ports 11 are connected to the sample line 20 connected one-to-one to gas supply pipes for supplying gas to be analyzed for each process, and the gas analyzer 30 is connected to the first output port 12. Vacuum pumps 40 and 50 are connected to the gas analyzer 30 and the second output port 13, respectively.

In addition, a branch pipe 60 connecting each of the input ports 11 and the first output port 12 to the inside of the main body 10, and the branch pipe 60 and the second output port 13 are connected to each other. The bypass pipe 70 is provided. The branch pipe 60 is provided with a valve 80 to control the entry and exit of gas for each input port (11).

When the manifold 1 is used, there is no need to alternately connect the sample lines 20 to the respective gas supply pipes, and the flow rate and pressure of the gas discharged to the gas analyzer 30 through the bypass pipe 70. Since the constant is maintained, the analysis reliability of the gas analyzer 30 is increased.

However, in the conventional manifold 1 as described above, since the sample lines 20 are connected to gas supply pipes located in different processes, the lengths of the manifolds 1 are different from each other. The pressures of the 20 are different from each other, and thus, whenever the input port 11 is switched (a state in which other gas is introduced through the other input port 11), the gas analyzer 30 is caused by the pressure difference of the gas introduced therein. The problem that a shock occurs is generated.

When a pressure shock occurs in the gas analyzer 30, the gas analyzer 30 may not calculate a normal analysis result.

In addition, the conventional manifold 1 has a problem that the reliability of inspection decreases as time passes because the gas introduced into each input port 11 passes through the branch pipe 60 and contaminates the inside of the branch pipe 60. .

The contamination of the branch pipe 60 is the input port 11 far from the first output port 12, the longer the length passing through the branch pipe 60, the deeper the degree of contamination, so the position of the input port 11 In addition, there is a structural problem that causes a large difference in inspection performance.

KR 10-0251234 B1

The present invention has been made to solve the above problems, the gas analyzer provides a gas pressure buffer device of the gas analyzer manifold that can alleviate the impact caused by the pressure difference of the gas flowing into the gas analyzer whenever the input port is switched. Its purpose is to.

In addition, an object of the present invention is to provide a gas pressure buffer of the manifold for gas analyzer that can minimize the contamination inside the branch pipe.

In addition, an object of the present invention is to provide a gas pressure buffer device of the manifold for gas analyzer that can minimize the difference in the degree of contamination for each input port.

In order to achieve the above object, the gas pressure buffer device of the gas analyzer manifold of the present invention is a plurality of input ports are connected to the sample line connected to the gas supply pipe to which the gas to be analyzed for each process is supplied, and the gas A main body having a first output port connected to the analyzer and a second output port connected to the first vacuum pump; A first branch pipe connecting the respective input ports and the first output port inside the main body; A second branch pipe branched from the first branch pipe and connected to the second output port; A first bypass pipe connecting the first branch pipe and the second output port inside the main body; A second vacuum pump connected to the gas analyzer; A valve installed in the first branch pipe to control the entry and exit of gas for each input port; A second bypass pipe branched from the first branch pipe and joined to the first bypass pipe; And a gas pressure buffer device installed in the second bypass pipe to mitigate the pressure shock of the gas applied to the second branch pipe when the input port is switched.

In addition, the second branch pipe is preferably branched in the center of the first branch pipe.

In addition, the main body may further include a purge port through which purge gas is introduced, and a purge line connecting both ends of the purge port and the first branch pipe may be formed in the main body.

On the other hand, the gas pressure buffer device may be at least one bellows unit that is stretched in accordance with the pressure change in the second bypass pipe.

In this case, the bellows unit may include a bellows body, a weight body fixed to the lower portion of the bellows body, and a gas inlet and a gas outlet formed on an upper end of the bellows body.

In addition, when the bellows unit is provided in plural, the bellows unit is continuously connected through a connecting pipe connecting the adjacent gas discharge port and the gas inlet port, the weight body may be sequentially increased in weight for each bellows unit. .

On the other hand, the second bypass pipe is preferably further provided with a check valve for preventing the backflow between the gas pressure buffer and the branch pipe so that the gas discharged to the gas analyzer does not flow back through the first output port.

In this case, a pressure maintenance check valve is provided in the second bypass pipe so as to block gas flow in and out of the gas pressure buffer device while interlocking between the gas pressure buffer device and the first bypass pipe together with the check valve for preventing backflow. Can be installed further.

The present invention configured as described above has the effect of greatly improving the analysis reliability of the gas analyzer because the gas pressure buffer installed inside the body to mitigate the pressure shock of the gas generated when switching the input port.

In addition, the present invention is provided with a purge line connecting both ends of the first branch pipe to clean the interior of the first branch pipe has the effect of minimizing the contamination of the gas passing through the first branch pipe.

In addition, in the present invention, since the second branch pipe connected to the gas analyzer is configured to branch from the center of the first branch pipe, the first branch that must pass through the gas flowing into each of the input ports reaches the second branch pipe. Since the passage section of the engine is minimized, the possibility of gas contamination generated in the process of passing through the first branch pipe can be minimized, and the difference in the degree of contamination generated according to the position of the input port can be minimized. .

1 is a configuration diagram of a conventional gas analyzer manifold.
Figure 2 is a block diagram of a gas analyzer manifold equipped with a gas pressure buffer according to an embodiment of the present invention.
Figure 3 is a block diagram of a gas pressure buffer device constituting the present invention.
Figure 4 is a block diagram of a gas analyzer manifold equipped with a gas pressure buffer according to another embodiment of the present invention.

The features and advantages of the present invention will become more apparent from the following detailed description of preferred embodiments based on the accompanying drawings. Prior to this, the terms or words used in the present specification and claims are defined in the technical spirit of the present invention on the basis of the principle that the inventor can appropriately define the concept of the term in order to explain his invention in the best way. It must be interpreted to mean meanings and concepts.

DETAILED DESCRIPTION Hereinafter, one embodiment of the present invention will be described in detail with reference to the drawings. Like reference numerals refer to like elements, and only different parts will be mainly described so as not to overlap for clarity.

As shown in FIG. 2, the present invention includes a main body 110 having a plurality of input ports 111, a first output port 112, and a second output port 113.

The input port 111 is connected to the sample line 20 in one-to-one connection to the gas supply pipes to be supplied gas for each process, the gas analyzer 30 is connected to the first output port 112 The first vacuum pump 40 is connected to the gas analyzer 30. A second vacuum pump 40 is connected to the second output port 113.

On the other hand, the first branch pipe 120 is installed inside the main body 110. The first branch pipe 120 branches to the common channel 121 connected to the first output port 112 and the plurality of branches sequentially branched from the common channel 121 and connected to each input port 111 one-to-one. Consists of the flow path (122).

In addition, a second branch pipe 125 connected to the first output port 112 is installed in the common channel 121 of the first branch pipe 120.

In addition, a first bypass pipe 130 connecting the first branch pipe 120 and the second output port 113 is installed inside the main body 110. The first bypass pipe 130 has a plurality of branch passages 131 connected to each branch passage 122 of the first branch pipe 120 one-to-one and the common passage 132 to which the branch passages 131 join. ), The common channel 132 is connected to the second output port 113.

In addition, each branch flow passage 122 of the first branch pipe 120 is provided with a valve 133 for controlling the entry and exit of gas for each input port 111. The valve 133 is installed in a section closer to the common passage 121 of the first branch pipe 120 than the branch passage 131 of the first bypass pipe 130.

In addition, a second bypass pipe 140 is connected to the first branch pipe 120. The second bypass pipe 140 is branched from the common flow passage 121 of the first branch pipe 120 and connected to the first bypass pipe 130.

According to the present invention, the second bypass pipe 140 is provided with a gas pressure buffer 150 for mitigating the pressure shock of the gas flowing into the gas analyzer 30 when switching the input port.

In this case, the gas pressure buffer device 150 may be at least one bellows unit 151, 152, 153 that is stretched according to the pressure change in the second bypass pipe 140.

As shown in FIG. 3, the bellows units 151, 152, 153 are formed on a bellows body 151a, a weight body 151b fixed to the lower portion of the bellows body 151a, and formed on an upper end of the bellows body 151a. The gas inlet 151c and the gas outlet 151d are provided.

A second bypass pipe 140 is connected to the gas inlet 151c and the gas outlet 151d. In addition, the second bypass pipe 140 has a flow meter 160 installed at the rear of the gas pressure buffer device 150 to maintain a constant flow rate of the gas passing through the second bypass pipe 140. Is installed.

Therefore, the gas entering the second bypass pipe 140 flows into the bellows body 151a through the gas inlet 151c and then exits through the gas discharge port 151d. In this process, the bellows body The bellows main body 151a is contracted while a negative pressure is applied to the inside of the 151a. However, since the weight body 151b is fixed to the lower portion of the bellows body 151a, the bellows body 151a is not contracted any longer and maintains a constant height at all times while the sound pressure is in equilibrium with the weight body 151b. Done.

Meanwhile, the bellows units 151, 152, and 153 may be configured in plural.

In this case, the bellows units 151, 152, 153 are continuously connected via a connecting pipe 154. The connection pipe 154 connects the gas outlet 151d and the gas inlet 151c of the adjacent bellows main body 151a to each other.

In addition, the weight 151b is preferably configured such that the weight is sequentially increased for each bellows unit 151, 152, 153.

In this case, the bellows units 151, 152, 153 having a relatively small weight 151b are sensitive to small pressure shocks, and the bellows units 151, 152, 153 having a relatively large weight 151b have a small weight 151b. The bellows unit 151, 152, 153 having a) can be alleviated a large pressure shock that is not absorbed.

On the other hand, it is preferable that the second branch pipe 125 is branched at the center of the first branch pipe 120.

In this case, since the input ports 111 are disposed on both sides of the second branch pipe 125, the gas flowing through each of the input ports 111 passes through the second branch pipe 125 until it reaches the second branch pipe 125. It is possible to minimize the passage section of the first branch pipe (120).

As such, when the second branch pipe 125 is branched at the center of the first branch pipe 120, the possibility of contamination generated in the process of passing through the first branch pipe 120 may be minimized. According to the position of 111, the range in which the gas analysis reliability falls is minimized.

Meanwhile, the main body 110 may further include a purge port 114 through which purge gas is introduced.

In this case, a purge line 170 is installed inside the main body 110 to connect both ends of the common passage 121 of the purge port 114 and the first branch pipe 120.

Therefore, when the purge gas flows into the purge port 114, the purge gas is discharged through the second branch pipe 125 along the purge line 170 via the first branch pipe 120 and contaminated in this process. The common flow passage 121 of the first branch pipe 120 is cleaned so that the gas analysis reliability is increased.

The gas analyzer manifold 100 equipped with the gas pressure buffer of the present invention configured as described above is operated as follows.

First, when the first vacuum pump 40 is operated, various gases are introduced into the main body 110 through the sample lines 20, and these gases are first bypass pipes 130 installed in the main body 110. It is discharged through the second output port 113 through the branch flow path 131, the common flow path 132 and the second branch pipe 125 in order.

In this state, the second vacuum pump 50 is operated and at the same time, the valve 133 on one side of the branch passage 122 of the first branch pipe 120 is opened.

When the valve 133 on one side is opened, the first branch pipe (from the sample line 20 of the input port 111 connected to the branch flow passage 122 of the first branch pipe 120 on which the valve 133 is installed) is opened. Gas flows into the common flow passage 121 of 120. In addition, the gas introduced into the common flow passage 121 of the first branch pipe 120 may receive the second branch pipe 125 and the second via at the suction power of the first vacuum pump 40 and the second vacuum pump 50. Branched to the pass pipe 140, a part is discharged to the gas analyzer 30 via the second branch pipe 125 and the first output port 112, and the other part is discharged to the outside through the second output port 113. do.

At this time, the gas discharged to the gas analyzer 30 maintains a constant flow rate and pressure by the action of the first bypass pipe 130.

Therefore, the present invention is very high in the analysis reliability of the gas, it is possible to analyze a variety of gases using a single gas analyzer 30 while sequentially switching the input ports (111).

Meanwhile, in the process of switching the input ports 111, a pressure shock occurs due to a pressure difference between the gas introduced through the previous input port 111 and the gas newly introduced through the converted input port 111.

In this case, since the flow rate of the gas passing through the second bypass pipe 140 is kept constant by the flow meter 160 provided behind the second bypass pipe 140, the second bypass pipe. While the operation of the gas pressure buffer device 150 installed in the 140 is made smoothly, the above-mentioned pressure shock is immediately released or eliminated.

In addition, the gas discharged through the second branch pipe 125 by the action of the gas pressure buffer 150 is introduced into the gas analyzer 30 without any pressure shock, thereby increasing the reliability of the gas analysis.

As shown in Figure 4, as another embodiment of the present invention, the present invention can be used in connection to analyze more various kinds of gases.

In this case, each of the main bodies 110a and 110b is connected to each other by the first output port 112 and the second output port 113 to each other through separate branch lines (A, B, C), The purge ports 114 are connected to each other.

In addition, the second bypass pipe 140 further includes a check valve 180 for preventing a backflow between the gas pressure buffer device 150 and the branch pipe.

In this case, the non-return check valve 180 installed in the non-operating main body 110b maintains the closed state, and the non-return check check valve 180 installed in the main body 110a in operation maintains the open state.

The check valve 180 for preventing the backflow of the main body 110b in which the gas discharged to the gas analyzer 30 through the first output port 112 of the main body 110a that is in operation is not driven through the branch line A is not operated. To prevent the flow back to the first output port (112).

On the other hand, in the non-operation mode, since the gas is continuously discharged through the first bypass pipe 130 while the check valve 180 for preventing the backflow is closed, the internal pressure of the gas pressure buffer device 150 is continuously lowered. In this state, when the gas is switched to the operation mode, a relatively high pressure gas is suddenly introduced into the gas pressure buffer 150 through the second bypass pipe 140, and thus the gas pressure buffer 150 may be damaged. have.

In order not to cause such a problem, the second bypass pipe 140 maintains a pressure interlocking with the backflow prevention check valve 180 between the gas pressure buffer device 150 and the first bypass pipe 130. It is preferable that the check valve 190 is further installed.

In this case, the pressure maintenance check valve 190 installed in the non-operating main body 110b maintains the closed state, and the pressure maintenance check valve 190 installed in the main body 110a in operation maintains the open state.

Therefore, when the main body 110 is switched from the operation mode to the non-operation mode, the gas flow in and out of the gas pressure buffer device 150 is blocked while the check valve 180 for preventing the back flow and the check valve 190 for maintaining the pressure are simultaneously closed. The pressure inside the gas pressure shock absorber 150 is maintained in the operation mode.

As a result, the main body 110b, which was not in operation afterwards, is switched to the operation mode again, so that the check valve 180 and the pressure maintaining check valve 190 are simultaneously opened to allow gas to flow from the second bypass pipe 140. Even when the gas pressure buffer device 150 is introduced, the gas pressure buffer device 150 is in a pressure state in the operation mode, and thus, a difference in pressure from the gas flowing into the second bypass pipe 140 does not occur significantly, and thus no damage due to the pressure shock is generated.

As described above, preferred embodiments of the present invention are described above with reference to the drawings, but the present invention is not limited to the above-described embodiments, and those skilled in the art may modify the present invention without departing from the spirit of the present invention. Possible, such modifications will fall within the scope of the invention.

100 ... manifold 110 ... body
111 ... Input port 112 ... First output port
113 ... 2nd output port 114 ... purge port
120 ... first branch engine 125 ... second branch engine
130 1st bypass pipe 133 Valve
140 ... 2 bypass pipe 150 ... gas pressure buffer
151,152,153 Bellows unit 151a Bellows body
151b ... weight 151c ... gas inlet
151d ... gas outlet 154 ... connector
170 ... Purge line 180 ... Return check valve
190 ... Pressure maintenance check valve

Claims (7)

A plurality of input ports connected to the sample line connected to the gas supply pipes to be supplied gas for each process, a first output port connected to the gas analyzer, and a second output port connected to the first vacuum pump Main body with;
A first branch pipe connecting the respective input ports and the first output port inside the main body;
A second branch pipe branched from the first branch pipe and connected to the second output port;
A first bypass pipe connecting the first branch pipe and the second output port inside the main body;
A second vacuum pump connected to the gas analyzer;
A valve installed in the first branch pipe to control the entry and exit of gas for each input port;
A second bypass pipe branched from the first branch pipe and joined to the first bypass pipe; And
A gas pressure buffer device installed in the second bypass pipe to mitigate the pressure shock of the gas applied to the second branch pipe when the input port is switched;
The gas pressure buffer device is at least one bellows unit that is stretched according to a pressure change in the second bypass pipe;
The bellows unit is a manifold for a gas analyzer having a bellows body, a weight fixed to the lower portion of the bellows body, and a gas pressure buffer device including a gas inlet and a gas outlet formed on the top of the bellows body. The method of claim 1,
The second branch pipe is a gas analyzer manifold having a gas pressure buffer device branched from the center of the first branch pipe. The method of claim 1,
The main body is further provided with a purge port through which purge gas is introduced,
A gas analyzer manifold having a gas pressure buffer device having a purge line connecting both ends of the purge port and the first branch pipe to the inside of the main body. delete The method of claim 1,
When the bellows unit is provided in plurality,
Each bellows unit is connected continuously through a connecting pipe connecting an adjacent gas outlet and a gas inlet;
The weight body is a gas analyzer manifold having a gas pressure buffer, characterized in that the weight is sequentially larger for each bellows unit. The method of claim 1,
The second bypass pipe is provided with a gas pressure buffer device further comprises a check valve for preventing the backflow between the gas pressure buffer device and the branch pipe so that the gas discharged to the gas analyzer does not flow back through the first output port Manifold for gas analyzers. The method of claim 6,
The second bypass pipe is further provided with a pressure maintaining check valve between the gas pressure buffer device and the first bypass pipe, interlocking with the check valve for preventing the backflow, to block gas flow in and out of the gas pressure buffer device. Gas analyzer manifold equipped with a gas pressure buffer, characterized in that.

Images