JP2005229697A - Motor for vacuum - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a motor for vacuum of high vacuum degree without increasing its work time. <P>SOLUTION: This motor includes: a stator housing 1 or a stator core 2; a coil 4 which is molded by mold resin; and plating 5 which is applied to the surface of the resin. At plating, a prepreg is stuck on the boundary between the stator housing or the stator core and the mold coil. Moreover, for the prepreg, an epoxy resin compound will do or a hot melt adhesive will do. Moreover, the surface exposed to the vacuum atmosphere of the prepreg may be covered with a hydrophobic macromolecular film such as polyethylene, polypropylene, polystyrene, vinyl chloride, fluororesin, polyimide resin, silicon resin, or the like. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a vacuum motor obtained by plating a mold resin used in a vacuum environment such as wafer conveyance in a semiconductor manufacturing apparatus.

A conventional vacuum motor in which the surface of a mold resin is plated is subjected to a plating process while the boundary between the stator housing or the stator core and the mold resin is not treated (for example, see Patent Document 1).
FIG. 3 is a side sectional view of a stator showing a conventional vacuum motor with plating. In FIG. 3, 5 is plating, and the coil 4 molded with the resin 3, the stator housing 1, and the stator core 2 are immersed in a plating solution for plating. As described above, the conventional vacuum motor is plated without sealing the gap between the stator housing 1 or the stator core 2 and the mold resin 3, or the surface of the mold resin 3 is plated by installing an O-ring. Yes.
In the case where the stator housing or the stator core is made of a material that is corroded by the plating solution, an O-ring may be provided between the jig for preventing the contact of the plating solution and the surface of the mold resin.
Further, when the gap between the stator housing 1 or the stator core 2 and the mold resin 3 is sealed and plating is also attached to the seal portion, the thermosetting resin to which the plating adheres is poured and cured, and then the plating treatment is performed. Some have been given.
Japanese Patent Laid-Open No. 2002-272086 (FIG. 2)

However, a conventional vacuum motor with plating has a high vacuum level because the plating solution penetrates into the gap between the stator housing or stator core and the mold resin and gradually vaporizes when exposed to a vacuum atmosphere during operation. There was a problem that it was not possible. Further, when the contact with the plating solution is prevented by the O-ring, there is a problem that a high degree of vacuum cannot be obtained because the surface of the mold resin in contact with the O-ring becomes a non-plated portion. Further, in any of the processing methods, there is a problem that a high vacuum cannot be obtained because the gap between the stator housing or the stator core and the mold resin is not sealed.
In addition, when the gap is sealed with a thermosetting resin, a work process of about one day is required for the liquid resin injection and curing.
The present invention has been made in view of such problems, and provides a vacuum motor that can obtain a high degree of vacuum without increasing the working time through a gap between a stator housing or a stator core and a mold resin. For the purpose.

In order to solve the above problems, the present invention is configured as follows.
According to a first aspect of the present invention, there is provided a vacuum motor comprising a stator housing or a stator core, a coil molded with a mold resin, and plating applied to a resin surface. A prepreg is stuck to the boundary between the stator core and the molded coil.
The invention according to claim 2 uses the prepreg as an epoxy resin composition.
According to a third aspect of the present invention, the prepreg is a hot melt adhesive.
According to a fourth aspect of the present invention, the material of the hot melt adhesive is at least one of polyethylene, polypropylene, polystyrene, vinyl chloride, and silicon resin.
According to a fifth aspect of the present invention, the surface of the prepreg exposed to a vacuum atmosphere is covered with a hydrophobic film.
According to a sixth aspect of the present invention, the material of the hydrophobic film is at least one of polyethylene, polypropylene, polystyrene, vinyl chloride, fluorine resin, polyimide resin, and silicon resin.
In the invention according to claim 7, the water absorption rate in ASTM-D570 of the material of the hot melt adhesive or the material of the hydrophobic polymer film is 0.1% or less.
According to an eighth aspect of the present invention, the surface of the prepreg or the hydrophobic polymer film that is exposed to a vacuum atmosphere is coated with a metal foil or a ceramic plate.

According to the first aspect of the present invention, the prepreg can be melt-cured during the plating process to seal the gap, and the sealing work time can be greatly shortened.
According to invention of Claim 2, hardening of a prepreg sealing material can be complete | finished during a plating process.
According to the third aspect of the present invention, curing can be finished immediately after sticking.
According to the fourth aspect of the present invention, the gas release rate from the prepreg seal in a vacuum can be reduced.
According to the fifth aspect of the present invention, gas release from the prepreg seal material can be suppressed.
According to the invention described in claim 6, the gas release rate from the polymer film in vacuum can be reduced.
According to the seventh aspect of the invention, the gas release rate from the prepreg seal material or the polymer film can be reduced.
According to the eighth aspect of the invention, the gas release rate from the prepreg seal material or the polymer film can be reduced.
As described above, the gas release rate from the vacuum motor can be reduced, and the ultimate vacuum can be increased.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  FIG. 1 is a side sectional view of a vacuum motor showing the configuration of the first embodiment of the present invention. In FIG. 1, the part from which this invention differs from patent document 1 is a part provided with the sealing material 6, and the penetration | invasion of the plating solution to a clearance gap can be prevented with this sealing material. Further, when the motor is placed in a vacuum atmosphere, the gap is shielded from the vacuum atmosphere, the total gas release rate from the stator is suppressed, and the ultimate vacuum is improved.

A method for treating the sealing material 6 will be described.
First, before the stator is immersed in the plating bath, a prepreg seal material is fixed on the gap with a jig (not shown) and pressed. Next, the stator was immersed in a plating solution together with a prepreg and a jig, and the surface of the mold resin 3 was plated. During this time, the prepreg is melted by the heat of the heated plating solution and enters the gap or covers the gap to seal it. When the melting point of the prepreg was higher than the temperature of the plating solution, the jig was preheated to a temperature equal to or higher than the melting point of the prepreg, and then fixed and pressed. When the prepreg is an epoxy resin composition, it is cured during the plating process time. In addition, when the prepreg is a thermoplastic resin composition such as a hot melt adhesive, the stator is taken out from the plating solution, and then cured at the time of cooling, or a preheated jig is fixed and immediately after the temperature decreases after pressing. Harden.

  Thus, since it is a dry operation using a prepreg, the operation time for setting the sealing material in the gap can be greatly reduced as compared with the conventional liquid resin injection operation. In addition, the curing time is several hours or more when using a liquid resin, and depending on the shape of the work, the work is performed multiple times and takes more than one day. Because it ends, it can be greatly shortened.

Next, in order to confirm the effect of the present embodiment, the stator shown in FIG. 1 was made of the following materials. The prepreg seal material is as follows.
Epoxy prepreg: bisphenol A type epoxy resin (solid, melting point 70 ° C.) / Triethylenetetraamine = 100/5 (parts by weight) mixture (cured product water absorption 0.7%)
Hot melt adhesive: polyethylene (water absorption rate 0.03%), vinyl chloride (water absorption rate 0.05%),
Silicone resin (water absorption 0.08%)
Table 1 shows the ultimate degree of vacuum (pressure) when the stator was evacuated at room temperature for 24 hours. From Table 1, the stator 1 has an ultimate vacuum of ½ that of the conventional example due to the sealing with the epoxy prepreg, and the stators 2 to 4 are made of a prepreg made of a hydrophobic resin. The ultimate vacuum was improved by an order of magnitude.

  FIG. 2 is a side sectional view of the stator of the vacuum motor showing the configuration of the second embodiment. The surface of the sealing material 6 shown in FIG. 1 of the first embodiment is coated with a covering material 7 with a hydrophobic polymer film having a low gas release rate in vacuum and a low gas permeability. The hydrophobic polymer film had ASTM-D570 water absorption of 0.1% or less.

The stator of this example was composed of the following materials.
Epoxy prepreg: bisphenol A type epoxy resin (solid, melting point 70 ° C.) /
Triethylenetetraamine = 100/5 mixture / covering material: polyethylene film (thickness 80 μm, water absorption 0.02%), silicone resin sheet (thickness 200 μm, water absorption 0.06%), fluorine resin film (thickness) 100 μm, water absorption 0.005%), polyimide film (thickness 100 μm, water absorption 0.03%)
Table 2 shows the ultimate degree of vacuum (pressure) when the stator was evacuated at room temperature for 24 hours. As can be seen from Table 2, the ultimate vacuum was ½ or less than that of the stator 1 by applying the coating with a hydrophobic polymer film.
In this way, the surface of the sealing material 6 is coated with the covering material 7 with a material having a low gas permeability and a low gas release rate in a vacuum called a hydrophobic polymer film. Gas release can also be suppressed and the ultimate vacuum can be improved.

  In the third embodiment, a coating material 7 is formed on the surface of the sealing material 6 shown in FIG. 1 of the first embodiment with a metal or ceramic having a lower gas release rate in vacuum than the hydrophobic polymer film. The shape is the same as that of FIG. 2 of the second embodiment.

The stator of this example was composed of the following materials.
Prepreg: bisphenol A type epoxy resin (solid, melting point 70 ° C.) / Triethylenetetraamine = 100/5 mixture, polyethylene coating material: aluminum foil (thickness 150 μm), copper foil (thickness 200 μm), alumina plate ( Thickness 0.5mm), glass plate (thickness 1mm)
Table 3 shows the ultimate degree of vacuum (pressure) when a stator manufactured by combining these materials is evacuated at room temperature for 24 hours. From Table 3, the ultimate vacuum was reduced from 1/2 to 1/10 as compared with the stators 1 and 5 by applying a coating material such as a metal foil or a ceramic plate.

このように、図１に示すモータのシール材６の表面を、金属箔またはセラミック板などの真空中でのガス放出速度が小さく、ガス透過率の小さな材質にて被覆材７を施しているので、シール材６からのガス放出も抑制し、到達真空度を良好にすることができる。

As described above, the surface of the motor sealing material 6 shown in FIG. 1 is coated with a coating material 7 made of a material having a low gas permeability and a low gas transmission rate in a vacuum such as a metal foil or a ceramic plate. Further, gas release from the sealing material 6 can be suppressed, and the ultimate vacuum can be improved.

  The covering material is not limited to the one used in this example, and any metal foil may be used. If the ceramic plate is not porous, any material such as silica may be used. Needless to say, a hydrophobic polymer having a low water absorption rate may be used.

  During plating, a prepreg seal is applied to the boundary between the stator housing or stator core and the molded coil, and the surface exposed to the vacuum atmosphere of the seal is covered with a metal foil, ceramic plate, or hydrophobic film. Therefore, the gas release rate in a vacuum can be suppressed, so that the canless motor can be applied to a high vacuum.

Side sectional view of the stator of the vacuum motor showing the first embodiment of the present invention. Side sectional view of vacuum motor showing second and third embodiments of the present invention Cross-sectional side view of stator of vacuum motor with conventional plating

Explanation of symbols

1 Stator Housing 2 Stator Core 3 Resin 4 Coil 5 Plating 6 Sealing Material 7 Covering Material

Claims (8)

In a vacuum motor comprising a stator housing or stator core, a coil molded with a mold resin, and plating applied to the resin surface,
A vacuum motor, wherein a prepreg is attached to a boundary between the stator housing or the stator core and the molded coil during the plating process.   The vacuum motor according to claim 1, wherein the prepreg is an epoxy resin composition.   The vacuum motor according to claim 1, wherein the prepreg is a hot melt adhesive.   4. The vacuum motor according to claim 3, wherein the material of the hot melt adhesive is at least one of polyethylene, polypropylene, polystyrene, vinyl chloride, and silicon resin.   5. The vacuum motor according to claim 1, wherein a surface of the prepreg exposed to a vacuum atmosphere is coated with a hydrophobic polymer film. 6.   6. The vacuum motor according to claim 5, wherein the material of the hydrophobic polymer film is at least one of polyethylene, polypropylene, polystyrene, vinyl chloride, fluorine resin, polyimide resin, and silicon resin.   The material of the hot melt adhesive or the material of the hydrophobic polymer film has a water absorption rate of 0.1% or less in ASTM-D570, according to any one of claims 4 to 6. Vacuum motor.   8. The vacuum motor according to claim 1, wherein a surface of the prepreg or the hydrophobic polymer film that is exposed to a vacuum atmosphere is covered with a metal foil or a ceramic plate.

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