JP2005223204A5 - - Google Patents
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- Publication number
- JP2005223204A5 JP2005223204A5 JP2004030906A JP2004030906A JP2005223204A5 JP 2005223204 A5 JP2005223204 A5 JP 2005223204A5 JP 2004030906 A JP2004030906 A JP 2004030906A JP 2004030906 A JP2004030906 A JP 2004030906A JP 2005223204 A5 JP2005223204 A5 JP 2005223204A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004030906A JP4364001B2 (ja) | 2004-02-06 | 2004-02-06 | 搬送ロボット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004030906A JP4364001B2 (ja) | 2004-02-06 | 2004-02-06 | 搬送ロボット |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005223204A JP2005223204A (ja) | 2005-08-18 |
| JP2005223204A5 true JP2005223204A5 (es) | 2007-03-01 |
| JP4364001B2 JP4364001B2 (ja) | 2009-11-11 |
Family
ID=34998582
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004030906A Expired - Lifetime JP4364001B2 (ja) | 2004-02-06 | 2004-02-06 | 搬送ロボット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4364001B2 (es) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5059573B2 (ja) * | 2007-12-06 | 2012-10-24 | 東京エレクトロン株式会社 | 基板保持具、基板搬送装置および基板処理システム |
| KR101338858B1 (ko) | 2011-01-31 | 2013-12-16 | 주식회사 나온테크 | 개별적으로 구동되는 핸드를 갖는 기판 이송 장치 및 그 제어 방법 |
| JP5727823B2 (ja) * | 2011-03-15 | 2015-06-03 | 株式会社アルバック | 回転駆動装置 |
| JP5663638B2 (ja) | 2012-10-11 | 2015-02-04 | 株式会社ティーイーエス | 基板移送装置 |
| TWI725115B (zh) | 2016-01-29 | 2021-04-21 | 日商達誼恆股份有限公司 | 基板移載用機器手 |
| KR101837647B1 (ko) * | 2016-01-29 | 2018-03-13 | (주)씨엔원 | 로드락 챔버용 기판 이송장치 |
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2004
- 2004-02-06 JP JP2004030906A patent/JP4364001B2/ja not_active Expired - Lifetime