JP2005223204A5 - - Google Patents

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Publication number
JP2005223204A5
JP2005223204A5 JP2004030906A JP2004030906A JP2005223204A5 JP 2005223204 A5 JP2005223204 A5 JP 2005223204A5 JP 2004030906 A JP2004030906 A JP 2004030906A JP 2004030906 A JP2004030906 A JP 2004030906A JP 2005223204 A5 JP2005223204 A5 JP 2005223204A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004030906A
Other languages
Japanese (ja)
Other versions
JP2005223204A (ja
JP4364001B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2004030906A priority Critical patent/JP4364001B2/ja
Priority claimed from JP2004030906A external-priority patent/JP4364001B2/ja
Publication of JP2005223204A publication Critical patent/JP2005223204A/ja
Publication of JP2005223204A5 publication Critical patent/JP2005223204A5/ja
Application granted granted Critical
Publication of JP4364001B2 publication Critical patent/JP4364001B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2004030906A 2004-02-06 2004-02-06 搬送ロボット Expired - Fee Related JP4364001B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004030906A JP4364001B2 (ja) 2004-02-06 2004-02-06 搬送ロボット

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004030906A JP4364001B2 (ja) 2004-02-06 2004-02-06 搬送ロボット

Publications (3)

Publication Number Publication Date
JP2005223204A JP2005223204A (ja) 2005-08-18
JP2005223204A5 true JP2005223204A5 (cg-RX-API-DMAC10.html) 2007-03-01
JP4364001B2 JP4364001B2 (ja) 2009-11-11

Family

ID=34998582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004030906A Expired - Fee Related JP4364001B2 (ja) 2004-02-06 2004-02-06 搬送ロボット

Country Status (1)

Country Link
JP (1) JP4364001B2 (cg-RX-API-DMAC10.html)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5059573B2 (ja) * 2007-12-06 2012-10-24 東京エレクトロン株式会社 基板保持具、基板搬送装置および基板処理システム
KR101338858B1 (ko) 2011-01-31 2013-12-16 주식회사 나온테크 개별적으로 구동되는 핸드를 갖는 기판 이송 장치 및 그 제어 방법
JP5727823B2 (ja) * 2011-03-15 2015-06-03 株式会社アルバック 回転駆動装置
JP5663638B2 (ja) 2012-10-11 2015-02-04 株式会社ティーイーエス 基板移送装置
KR101837647B1 (ko) * 2016-01-29 2018-03-13 (주)씨엔원 로드락 챔버용 기판 이송장치
TWI725115B (zh) * 2016-01-29 2021-04-21 日商達誼恆股份有限公司 基板移載用機器手
KR102941713B1 (ko) * 2023-05-26 2026-03-19 주식회사 로웨인 자동화 식물공장을 위한 스태커 로봇

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