JP2005215579A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2005215579A5 JP2005215579A5 JP2004025083A JP2004025083A JP2005215579A5 JP 2005215579 A5 JP2005215579 A5 JP 2005215579A5 JP 2004025083 A JP2004025083 A JP 2004025083A JP 2004025083 A JP2004025083 A JP 2004025083A JP 2005215579 A5 JP2005215579 A5 JP 2005215579A5
- Authority
- JP
- Japan
- Prior art keywords
- optical system
- imaging optical
- imaging
- projection
- light beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 claims 92
- 238000003384 imaging method Methods 0.000 claims 48
- 239000000758 substrate Substances 0.000 claims 6
- 238000005286 illumination Methods 0.000 claims 2
- 238000000034 method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004025083A JP2005215579A (ja) | 2004-02-02 | 2004-02-02 | 投影光学系、露光装置、および露光方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2004025083A JP2005215579A (ja) | 2004-02-02 | 2004-02-02 | 投影光学系、露光装置、および露光方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2005215579A JP2005215579A (ja) | 2005-08-11 |
| JP2005215579A5 true JP2005215579A5 (https=) | 2008-02-28 |
Family
ID=34907555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004025083A Withdrawn JP2005215579A (ja) | 2004-02-02 | 2004-02-02 | 投影光学系、露光装置、および露光方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2005215579A (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102768397B (zh) * | 2011-05-05 | 2014-11-12 | 上海微电子装备有限公司 | 一种投影光刻物镜 |
| JP6039292B2 (ja) * | 2012-08-02 | 2016-12-07 | キヤノン株式会社 | 露光装置及び物品の製造方法 |
-
2004
- 2004-02-02 JP JP2004025083A patent/JP2005215579A/ja not_active Withdrawn
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2003114387A5 (https=) | ||
| JP2002277742A5 (https=) | ||
| JP6221160B2 (ja) | ミラーの配置 | |
| US20110027724A1 (en) | Spatial light modulating unit, illumination optical system, exposure apparatus, and device manufacturing method | |
| JPWO2007058188A1 (ja) | 露光装置及び露光方法、並びにデバイス製造方法 | |
| CN108107685B (zh) | 曝光装置、曝光方法、器件制造方法及评价方法 | |
| JP2012168543A5 (ja) | 投影光学系、露光装置、露光方法、およびデバイス製造方法 | |
| JP2016001308A5 (ja) | 露光装置、およびデバイス製造方法 | |
| EP1293834A2 (en) | Illumination apparatus | |
| JP2012155330A5 (ja) | 露光装置、露光方法、およびデバイス製造方法 | |
| JP6651124B2 (ja) | 照明光学系、露光装置、およびデバイス製造方法 | |
| JP2011517786A5 (https=) | ||
| KR100904024B1 (ko) | 인코히런트 방사선을 생성하는 반사 루프 시스템 | |
| JP5283928B2 (ja) | 照明光学系、露光装置及びデバイス製造方法 | |
| JP2004071776A (ja) | 照明光学系、露光方法及び装置 | |
| KR20100095620A (ko) | 조명 광학계, 노광 장치, 및 디바이스 제조 방법 | |
| JP2004158786A5 (https=) | ||
| JP2000039557A5 (https=) | ||
| KR20070115940A (ko) | 접근 용이한 조리개 또는 구경 조리개를 구비한마이크로리소그래피 투영 시스템 | |
| JP3870093B2 (ja) | 露光方法及び装置 | |
| JP2002244035A5 (https=) | ||
| JP6263800B2 (ja) | 結像光学ユニット | |
| JP2005215579A5 (https=) | ||
| JP2021039282A5 (https=) | ||
| JP5531955B2 (ja) | 照明装置、露光装置及びデバイス製造方法 |