JP2005194138A - Dielectric ceramic composition, and laminated ceramic capacitor - Google Patents

Dielectric ceramic composition, and laminated ceramic capacitor Download PDF

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JP2005194138A
JP2005194138A JP2004002354A JP2004002354A JP2005194138A JP 2005194138 A JP2005194138 A JP 2005194138A JP 2004002354 A JP2004002354 A JP 2004002354A JP 2004002354 A JP2004002354 A JP 2004002354A JP 2005194138 A JP2005194138 A JP 2005194138A
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dielectric ceramic
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ceramic composition
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ceramic capacitor
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JP4997685B2 (en
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Tomonori Muraki
智則 村木
Takashi Hiramatsu
隆 平松
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Murata Manufacturing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a dielectric ceramic composition of which the temperature characteristic of dielectric constant is flat, the insulation resistance and high temperature load reliability are superior, and the absolute value of DC bias change rate is small, while having a high dielectric constant, and a laminated ceramic capacitor constituted by using this dielectric ceramic composition. <P>SOLUTION: The dielectric ceramic composition is expressed by a composition formula: 100(Ba<SB>1-x</SB>Ca<SB>x</SB>)<SB>m</SB>TiO<SB>3</SB>+aMnO+bV<SB>2</SB>O<SB>5</SB>+cSiO<SB>2</SB>+dRe<SB>2</SB>O<SB>3</SB>(provided that Re is at least one kind of metal element selected from the group consisting of Y, La, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb; and a, b, c, and d express mole ratios), and also, x, m, a, b, c, and d are in the ranges of 0.030≤x≤0.20, 0.990≤m≤1.030, 0.010≤a≤5.0, 0.050≤b≤2.5, 0.20≤c≤8.0, 0.0050≤d≤2.5, respectively. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

この発明は、誘電体セラミック組成物、及びこの誘電体セラミック組成物を用いて構成される積層セラミックコンデンサに関する。   The present invention relates to a dielectric ceramic composition and a multilayer ceramic capacitor formed using the dielectric ceramic composition.

従来より、NiおよびNi合金を内部電極として使用するために、低酸素分圧下で焼成しても半導体化せず、しかも比誘電率の温度特性が平坦な積層コンデンサ用誘電体材料として、例えば、BaTiO3を主成分とし、副成分としてRe23(但し、ReはTb、Dy、Ho、及びErの内の1種類以上)、Co23、BaO、MnO、及びMgOを添加した誘電体セラミック組成物(特許文献1〜3参照)、BaTiO3を主成分とし、副成分としてRe(但し、ReはY、Eu、Gd、Tb、Dy、Ho、Er、Tm、及びYbの内の少なくとも1種類)、Ca、Mg、及びSiを添加した誘電体セラミック組成物(特許文献4参照)、(Ba、Ca)TiO3を主成分とし、副成分としてRe23(但し、ReはY、Gd、Tb、Dy、Ho、Er、及びYbの内の1種類以上)、MgO、及びMnOを添加した誘電体セラミック組成物(特許文献5参照)、(Ba、Ca)TiO3を主成分とし、副成分としてV25、SiO2、MnO、及びMgOを添加した誘電体セラミック組成物(特許文献6参照)等のセラミック組成物が、既に多数提案されている。
特開平5−9066号公報 特開平5−9067号公報 特開平5−9068号公報 特開2001−39765号公報 特開2000−58378号公報 特開2003−165768号公報 そして、これらの誘電体セラミック組成物を用いた積層セラミックコンデンサは、従来誘電体セラミック層厚みに対して印加電圧が小さい、例えば1V/μm程度の低電界強度の直流電圧下で使用されることが多かった。
Conventionally, in order to use Ni and Ni alloy as an internal electrode, as a dielectric material for a multilayer capacitor that does not become a semiconductor even when fired under a low oxygen partial pressure and has a flat temperature characteristic of relative dielectric constant, for example, Dielectric containing BaTiO 3 as a main component and Re 2 O 3 as a subcomponent (where Re is one or more of Tb, Dy, Ho, and Er), Co 2 O 3 , BaO, MnO, and MgO Body ceramic composition (see Patent Documents 1 to 3), BaTiO 3 as a main component, and Re as an auxiliary component (where Re is one of Y, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb) Dielectric ceramic composition to which Ca, Mg, and Si are added (see Patent Document 4), (Ba, Ca) TiO 3 as a main component, and Re 2 O 3 as a subcomponent (where Re is Y, Gd, Tb Dy, Ho, Er, and one or more of the Yb), MgO, and the dielectric ceramic composition obtained by adding MnO (see Patent Document 5), a main component (Ba, Ca) TiO 3, as a sub-component Many ceramic compositions such as a dielectric ceramic composition to which V 2 O 5 , SiO 2 , MnO, and MgO are added (see Patent Document 6) have already been proposed.
Japanese Patent Laid-Open No. 5-9066 Japanese Patent Laid-Open No. 5-9067 Japanese Patent Laid-Open No. 5-9068 JP 2001-39765 A JP 2000-58378 A JP, 2003-165768, A In a multilayer ceramic capacitor using these dielectric ceramic compositions, a DC voltage having a low electric field strength of, for example, about 1 V / μm, which has a small applied voltage with respect to the thickness of the conventional dielectric ceramic layer. Often used below.

近年のエレクトロニクス技術の発展により、電子機器の高機能化、及び高集積化が進展する中、積層セラミックコンデンサの使用条件はますます厳しいものとなりつつある。   With the progress of electronic technology in recent years and the progress of higher functionality and higher integration of electronic devices, the usage conditions of multilayer ceramic capacitors are becoming increasingly severe.

特に、電子機器の高集積化により、高周波で動作するCPU等、発熱体の近傍に実装された積層セラミックコンデンサの周辺温度は、従来よりもますます高くなっている。   In particular, due to the high integration of electronic devices, the ambient temperature of multilayer ceramic capacitors mounted in the vicinity of a heating element such as a CPU operating at high frequency is higher than before.

回路中に実装された積層セラミックコンデンサには、回路動作を安定させるための直流電圧(DCバイアス)が負荷されており、上述のような使用環境の高温化により、高温負荷信頼性の悪化、すなわち高温で電圧印加された環境における絶縁抵抗の劣化寿命が短くなることが懸念されている。   The multilayer ceramic capacitor mounted in the circuit is loaded with a DC voltage (DC bias) for stabilizing the circuit operation, and the high temperature load reliability is deteriorated due to the high use environment as described above, that is, There is a concern that the deterioration life of the insulation resistance in an environment where voltage is applied at a high temperature is shortened.

その一方で、前述したような積層セラミックコンデンサの小型大容量化の要求を満たすために、誘電体セラミック層をより薄層化し、かつ多層化する必要も生じている。   On the other hand, in order to satisfy the demand for the reduction in size and capacity of the multilayer ceramic capacitor as described above, it is necessary to make the dielectric ceramic layer thinner and multilayer.

このように、積層セラミックコンデンサには小型大容量化と、絶縁抵抗及び高温負荷信頼性の向上の両立が求められており、それに用いる高誘電率で、比誘電率の温度特性が平坦で、誘電体セラミック層を薄層化しても、絶縁抵抗と高温負荷信頼性に優れる、誘電体セラミック組成物が必要とされている。   As described above, multilayer ceramic capacitors are required to have both a small size and a large capacity, and an improvement in insulation resistance and high-temperature load reliability. There is a need for a dielectric ceramic composition that is excellent in insulation resistance and high temperature load reliability even when the body ceramic layer is made thin.

しかし、従来の誘電体セラミック組成物は、例えば1V/μm程度の低電界強度の直流電圧下で使用されることを前提に設計されていたので、用いられる積層セラミックコンデンサの薄層化が進んで、高電界強度の直流電圧下で使用されると、絶縁抵抗および高温負荷信頼性が極端に低下し、また、印加直流電界に対する静電容量の変化率(以下DCバイアス変化率)が大きくなるという問題があった。   However, the conventional dielectric ceramic composition has been designed on the assumption that it is used under a DC voltage with a low electric field strength of, for example, about 1 V / μm. When used under a high electric field strength DC voltage, the insulation resistance and high temperature load reliability are drastically reduced, and the capacitance change rate (hereinafter referred to as DC bias change rate) with respect to the applied DC electric field is increased. There was a problem.

高温負荷信頼性が低下すると、積層セラミックコンデンサが使用中に短絡、延いては焼損する可能性が高くなり、また、DCバイアス変化率が大きいと、積層セラミックコンデンサの実効容量が低下してしまい、設計の段階で必要としていた静電容量を満たさなくなるため、それが用いられている電子機器の動作が不安定になったり、延いては動作しなくなるという不具合が発生することが懸念される。   When the high temperature load reliability is reduced, there is a high possibility that the multilayer ceramic capacitor is short-circuited and then burned out during use, and when the DC bias change rate is large, the effective capacity of the multilayer ceramic capacitor is reduced. Since the electrostatic capacity required at the design stage is not satisfied, there is a concern that the operation of the electronic device in which it is used becomes unstable or eventually fails.

このため、従来の誘電体セラミック組成物を、誘電体セラミック層を薄層化した積層セラミックコンデンサに適用する際には、上述の不具合の発生を回避するため、その薄層化の程度に応じて、予め定格電圧を下げる、すなわち印加できる直流電圧を下げる必要があった。   For this reason, when applying the conventional dielectric ceramic composition to a multilayer ceramic capacitor having a thin dielectric ceramic layer, in order to avoid the occurrence of the above-mentioned problems, depending on the degree of thinning. It was necessary to lower the rated voltage in advance, that is, to reduce the DC voltage that can be applied.

従来技術として挙げた誘電体セラミック組成物は、特許文献1〜6に示されるように、2〜3μm程度までの誘電体セラミック層厚みにおいては、150℃で電界強度10V/μmの直流電圧が印加された際の高温負荷信頼性に優れるが、誘電体セラミック層を1μm程度まで薄層化した際の高温負荷信頼性は確保されていなかった。   As shown in Patent Documents 1 to 6, the dielectric ceramic composition cited as the prior art is applied with a DC voltage having an electric field strength of 10 V / μm at 150 ° C. with a dielectric ceramic layer thickness of about 2 to 3 μm. However, the high temperature load reliability when the dielectric ceramic layer is thinned to about 1 μm has not been ensured.

また、特許文献5に示されるように、DCバイアス変化率を小さくしようとすると比誘電率が3000未満に低下してしまうため、積層セラミックコンデンサの小型大容量化と、DCバイアス変化率の改善を両立させることは困難であった。   In addition, as shown in Patent Document 5, if the DC bias change rate is reduced, the relative dielectric constant decreases to less than 3000. Therefore, the multilayer ceramic capacitor is reduced in size and capacity, and the DC bias change rate is improved. It was difficult to achieve both.

さらに、特許文献6に示されるように、2μm程度まで誘電体セラミック層を薄層化できる誘電体セラミック組成物で、比誘電率の温度特性を平坦にしようとすると、比誘電率が3000未満に低下してしまい、積層セラミックコンデンサの小型大容量化と、静電容量の温度特性の平坦化を両立させることは困難であった。   Furthermore, as shown in Patent Document 6, when a dielectric ceramic composition capable of thinning a dielectric ceramic layer to about 2 μm is attempted to flatten the temperature characteristics of the relative dielectric constant, the relative dielectric constant becomes less than 3000. Thus, it has been difficult to achieve both the reduction in size and increase in capacity of the multilayer ceramic capacitor and the flattening of the temperature characteristics of the capacitance.

そこで、この発明の目的は、上述したような問題を解決し得る、すなわち積層コンデンサの小型大容量化に資する高い比誘電率でありながら、誘電体セラミック層を1μm程度まで薄層化しても、DCバイアス変化率の絶対値が小さく、比誘電率の温度特性が平坦で、また絶縁抵抗と高温負荷信頼性が良好な誘電体セラミック組成物、及びこの誘電体セラミック組成物を用いて構成される積層セラミックコンデンサを提供しようとすることである。   Therefore, the object of the present invention is to solve the above-mentioned problem, that is, even if the dielectric ceramic layer is thinned to about 1 μm while having a high relative permittivity contributing to the miniaturization and large capacity of the multilayer capacitor, A dielectric ceramic composition having a small absolute value of DC bias change rate, a flat temperature characteristic of a relative dielectric constant, a good insulation resistance and high temperature load reliability, and the dielectric ceramic composition It is to provide a multilayer ceramic capacitor.

上述した技術的課題を解決するため、この発明の誘電体セラミック組成物は、組成式:100(Ba1-xCaxmTiO3+aMnO+bV25+cSiO2+dRe23(但し、ReはY、La、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、及びYbの中から選ばれる少なくとも1種の金属元素であり、a、b、c、及びdはモル比を表わす)で表わされる、誘電体セラミック組成物であって、
0.030≦x≦0.20、0.990≦m≦1.030、0.010≦a≦5.0、0.050≦b≦2.5、0.20≦c≦8.0、0.050≦d≦2.5の範囲内にある。
To solve the technical problems described above, the dielectric ceramic composition of the present invention, the composition formula: 100 (Ba 1-x Ca x) m TiO 3 + aMnO + bV 2 O 5 + cSiO 2 + dRe 2 O 3 ( where, Re is Y, La, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb are at least one metal element, and a, b, c, and d represent molar ratios) A dielectric ceramic composition represented by:
0.030 ≦ x ≦ 0.20, 0.990 ≦ m ≦ 1.030, 0.010 ≦ a ≦ 5.0, 0.050 ≦ b ≦ 2.5, 0.20 ≦ c ≦ 8.0, It is in the range of 0.050 ≦ d ≦ 2.5.

また、この発明の積層セラミックコンデンサは、複数の誘電体セラミック層と、該誘電体セラミック層間に形成された内部電極と、該内部電極に電気的に接続された外部電極とを備える、積層セラミックコンデンサにおいて、前記誘電体セラミック層が上述した誘電体セラミック組成物で構成されていることを特徴としている。   The multilayer ceramic capacitor of the present invention comprises a plurality of dielectric ceramic layers, an internal electrode formed between the dielectric ceramic layers, and an external electrode electrically connected to the internal electrode. The dielectric ceramic layer is composed of the above-described dielectric ceramic composition.

また、前記内部電極は、Ni、Ni合金、Cu、及びCu合金の中から選ばれる少なくとも1種の導電性材料で構成されていることを特徴としている。   The internal electrode is made of at least one conductive material selected from Ni, Ni alloy, Cu, and Cu alloy.

この発明によれば、比誘電率が3000以上でありながら、誘電体セラミック層を1μm程度まで薄層化しても、2V/μmの直流電圧印加時のDCバイアス変化率の絶対値が20%以下と小さく、比誘電率の温度特性がEIA規格のX7R特性(25℃での比誘電率を基準として、−55℃から125℃の範囲内における比誘電率の温度変化率の絶対値が15%以内)を満足するよう平坦で、絶縁抵抗が25℃での抵抗率で1011Ω・m以上と高く、また高温負荷信頼性が150℃で電界強度10V/μmの直流電圧が印加された際の平均故障寿命で100h以上と高い、誘電体セラミック組成物を得ることができる。 According to the present invention, although the dielectric constant is 3000 or more, even if the dielectric ceramic layer is thinned to about 1 μm, the absolute value of the DC bias change rate when a DC voltage of 2 V / μm is applied is 20% or less. The temperature characteristic of relative permittivity is X7R characteristic of EIA standard (relative permittivity at 25 ° C as a reference, the absolute value of temperature change rate of relative permittivity within the range of -55 ° C to 125 ° C is 15% The insulation resistance is as high as 10 11 Ω · m or more at 25 ° C, and the high temperature load reliability is 150 ° C and a DC voltage of 10 V / μm is applied. A dielectric ceramic composition having an average failure life of as high as 100 hours or more can be obtained.

従って、この発明に係る誘電体セラミック組成物を積層セラミックコンデンサに適用することにより、電子機器の高機能化、及び高集積化により厳しくなっている使用条件に対しても、優れた高温負荷信頼性を確保することができる。   Therefore, by applying the dielectric ceramic composition according to the present invention to a multilayer ceramic capacitor, it has excellent high temperature load reliability even under the use conditions that are becoming stricter due to higher functionality and higher integration of electronic devices. Can be secured.

さらに、積層セラミックコンデンサの小型大容量化と、DCバイアス変化率の改善を両立させることができ、電気的特性が安定で、かつ優れたものとすることができる。   Furthermore, it is possible to achieve both a reduction in the capacity and the capacity of the multilayer ceramic capacitor and an improvement in the DC bias change rate, and the electrical characteristics can be stable and excellent.

図1は、この発明に係る誘電体セラミック組成物を用いて構成される積層セラミックコンデンサ1を図解的に示す断面図である。   FIG. 1 is a cross-sectional view schematically showing a multilayer ceramic capacitor 1 constituted by using a dielectric ceramic composition according to the present invention.

積層セラミックコンデンサ1は、積層体2を備えている。積層体2は、積層される複数の誘電体セラミック層3と、複数の誘電体セラミック層3の間の特定の複数の界面に沿ってそれぞれ形成される複数の内部電極4及び5とをもって構成される。内部電極4及び5は、積層体2の外表面にまで到達するように形成されるが、積層体2の一方の端面6にまで引き出される内部電極4と、他方の端面7にまで引き出される内部電極5とが、積層体2の内部において交互に配置されている。   The multilayer ceramic capacitor 1 includes a multilayer body 2. The multilayer body 2 includes a plurality of dielectric ceramic layers 3 to be laminated, and a plurality of internal electrodes 4 and 5 formed along a plurality of specific interfaces between the plurality of dielectric ceramic layers 3. The The internal electrodes 4 and 5 are formed so as to reach the outer surface of the multilayer body 2, but the internal electrode 4 that is led out to one end face 6 of the multilayer body 2 and the inner part that is led out to the other end face 7. Electrodes 5 are alternately arranged inside the laminate 2.

積層体2の外表面上であって、端面6及び7上には、外部電極8及び9がそれぞれ形成されている。また、必要に応じて、外部電極8及び9上には、Ni、Cu等からなる第1のめっき層10及び11がそれぞれ形成され、さらにその上には、はんだ、Sn等からなる第2のめっき層12及び13がそれぞれ形成されている。   External electrodes 8 and 9 are formed on the outer surface of the laminate 2 and on the end faces 6 and 7, respectively. Further, if necessary, first plating layers 10 and 11 made of Ni, Cu or the like are formed on the external electrodes 8 and 9, respectively, and further, a second plating layer made of solder, Sn or the like is formed thereon. Plating layers 12 and 13 are respectively formed.

次に、上述のような積層セラミックコンデンサ1の製造方法について、製造工程順に説明する。   Next, a method for manufacturing the multilayer ceramic capacitor 1 as described above will be described in the order of manufacturing steps.

まず、誘電体セラミック組成物のための原料粉末を用意し、これをスラリー化し、このスラリーをシート状に成形して、誘電体セラミック層3のためのグリーンシートを得る。ここで、誘電体セラミック原料粉末として、後に詳細に説明するように、この発明に係る誘電体セラミック組成物のための原料粉末が用いられる。   First, raw material powder for the dielectric ceramic composition is prepared, and this is slurried, and this slurry is formed into a sheet shape to obtain a green sheet for the dielectric ceramic layer 3. Here, as the dielectric ceramic raw material powder, the raw material powder for the dielectric ceramic composition according to the present invention is used as will be described in detail later.

次に、グリーンシートの特定のものの各一方主面に、内部電極4及び5を形成する。内部電極4及び5は、Ni、Ni合金、Cu、及びCu合金の中から選ばれる少なくとも1種の導電性材料により構成されるが、特にNiまたはNi合金により構成されることが好ましい。これら内部電極4及び5は、通常、上述のような導電性材料により構成される導電性ペーストを用いて、スクリーン印刷法や転写法により形成されるが、これらに限らずどのような方法によって形成されてもよい。   Next, the internal electrodes 4 and 5 are formed on each one main surface of a specific green sheet. The internal electrodes 4 and 5 are made of at least one conductive material selected from Ni, Ni alloy, Cu, and Cu alloy, and are particularly preferably made of Ni or Ni alloy. These internal electrodes 4 and 5 are usually formed by a screen printing method or a transfer method using a conductive paste made of a conductive material as described above, but not limited to these, and formed by any method. May be.

次に、内部電極4または5を形成した誘電体セラミック層3のためのグリーンシートを必要数積層すると共に、これらグリーンシートを、内部電極が形成されない適当数のグリーンシートによって挟んだ状態とし、これを熱圧着することによって、生の積層体を得る。   Next, a necessary number of green sheets for the dielectric ceramic layer 3 on which the internal electrodes 4 or 5 are formed are stacked, and these green sheets are sandwiched between an appropriate number of green sheets on which no internal electrodes are formed. Is thermocompression-bonded to obtain a raw laminate.

次に、この生の積層体を、所定の還元性雰囲気中で所定の温度にて焼成し、それによって、図1に示すような焼結後の積層体2を得る。   Next, this raw laminate is fired at a predetermined temperature in a predetermined reducing atmosphere, whereby a sintered laminate 2 as shown in FIG. 1 is obtained.

その後、積層体2の両端面6および7上に、内部電極4及び5とそれぞれ電気的に接続されるように、外部電極8及び9を形成する。これら外部電極8及び9の材料としては、Ni、Ni合金、Cu、Cu合金、Ag、またはAg合金等を用いることができる。外部電極8及び9は、通常、金属粉末にガラスフリットを添加して得られた導電性ペーストを、積層体2の両端面6及び7上に塗布し、これを焼き付けることによって形成される。   Thereafter, external electrodes 8 and 9 are formed on both end faces 6 and 7 of the laminate 2 so as to be electrically connected to the internal electrodes 4 and 5, respectively. As materials for these external electrodes 8 and 9, Ni, Ni alloy, Cu, Cu alloy, Ag, Ag alloy, or the like can be used. The external electrodes 8 and 9 are usually formed by applying a conductive paste obtained by adding glass frit to a metal powder on both end faces 6 and 7 of the laminate 2 and baking it.

なお、外部電極8及び9となるべき導電性ペーストは、通常、上述のように焼結後の積層体2に塗布され、焼き付けられるが、焼成前の生の積層体に塗布しておき、積層体2を得るための焼成と同時に焼き付けられてもよい。   The conductive paste to be the external electrodes 8 and 9 is usually applied to the laminated body 2 after sintering and baked as described above, but is applied to the raw laminated body before firing, It may be baked simultaneously with the baking for obtaining the body 2.

次に、外部電極8及び9上に、Ni、Cu等のめっきを施し、第1のめっき層10および11を形成する。最後に、これら第1のめっき層10及び11上に、はんだ、Sn等のめっきを施し、第2のめっき層12及び13を形成し、積層セラミックコンデンサ1を完成させる。   Next, plating of Ni, Cu or the like is performed on the external electrodes 8 and 9 to form first plating layers 10 and 11. Finally, solder, Sn, or the like is plated on the first plated layers 10 and 11 to form second plated layers 12 and 13 to complete the multilayer ceramic capacitor 1.

このような積層セラミックコンデンサ1において、誘電体セラミック層3は、組成式:100(Ba1-xCaxmTiO3+aMnO+bV25+cSiO2+dRe23(但し、ReはY、La、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、及びYbの中から選ばれる少なくとも1種の金属元素であり、a、b、c、及びdはモル比を表わす)で表わされる、誘電体セラミック組成物により構成される。 In such a multilayer ceramic capacitor 1, the dielectric ceramic layer 3, the composition formula: 100 (Ba 1-x Ca x) m TiO 3 + aMnO + bV 2 O 5 + cSiO 2 + dRe 2 O 3 ( where, Re is Y, La, At least one metal element selected from Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb, and a, b, c, and d represent a molar ratio). It is comprised with a dielectric ceramic composition.

但し、上記の組成式において、x、m、a、b、c、及びdは、0.030≦x≦0.20、0.990≦m≦1.030、0.010≦a≦5.0、0.050≦b≦2.5、0.20≦c≦8.0、0.050≦d≦2.5の範囲内にある。   However, in the above composition formula, x, m, a, b, c, and d are 0.030 ≦ x ≦ 0.20, 0.990 ≦ m ≦ 1.030, and 0.010 ≦ a ≦ 5. 0, 0.050 ≦ b ≦ 2.5, 0.20 ≦ c ≦ 8.0, and 0.050 ≦ d ≦ 2.5.

この誘電体セラミック組成物は、還元性雰囲気中で焼成しても、半導体化することなく、焼結することができる。   Even if this dielectric ceramic composition is fired in a reducing atmosphere, it can be sintered without becoming a semiconductor.

また、この誘電体セラミック組成物を用いて、前記積層セラミックコンデンサ1における誘電体セラミック層3を構成するようにすれば、比誘電率が3000以上でありながら、誘電体セラミック層を1μm程度まで薄層化しても、2V/μmの直流電圧印加時のDCバイアス変化率の絶対値を20%以下と小さく、比誘電率の温度特性をEIA規格のX7R特性を満足するよう平坦に、絶縁抵抗を25℃での抵抗率で1011Ω・m以上と高く、また高温負荷信頼性を150℃で電界強度10V/μmの直流電圧が印加された際の平均故障寿命で100h以上と高くすることができる。 Moreover, if the dielectric ceramic layer 3 is formed in the multilayer ceramic capacitor 1 using this dielectric ceramic composition, the dielectric ceramic layer is thinned to about 1 μm while the relative dielectric constant is 3000 or more. Even when layered, the absolute value of the DC bias change rate when a DC voltage of 2 V / μm is applied is as small as 20% or less, the temperature characteristics of the relative permittivity are flattened to satisfy the EIA standard X7R characteristics, and the insulation resistance is reduced. The resistivity at 25 ° C. is as high as 10 11 Ω · m or more, and the high temperature load reliability can be increased to an average failure life of 100 h or more when a DC voltage with an electric field strength of 10 V / μm is applied at 150 ° C. it can.

このような誘電体セラミック組成物の出発原料は、(Ba1-xCaxmTiO3で表わされる化合物、Mn化合物、V化合物、Si化合物、及びRe化合物(但し、Reは、Y、La、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、及びYbの中から選ばれる少なくとも1種の金属元素)を含むものであるが、誘電体セラミック組成物の原料粉末の製造方法としては、(Ba1-xCaxmTiO3で表わされる化合物を実現し得るものであればどのような方法を用いてもよい。 The starting materials for such a dielectric ceramic composition are a compound represented by (Ba 1-x Ca x ) m TiO 3 , a Mn compound, a V compound, a Si compound, and a Re compound (where Re is Y, La , Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb), the production method of the raw material powder of the dielectric ceramic composition, Any method may be used as long as it can realize the compound represented by (Ba 1-x Ca x ) m TiO 3 .

例えば、(Ba1-xCaxmTiO3で表わされる化合物を主成分、それ以外の成分を副成分と呼ぶ場合、BaCO3、CaCO3、及びTiO2を混合する工程と、主成分を合成するためにこの混合物を熱処理する工程と、得られた主成分に副成分を加えて混合する工程とを備える製造方法によって、誘電体セラミック組成物の原料粉末を得ることができる。 For example, when a compound represented by (Ba 1-x Ca x ) m TiO 3 is called a main component and the other components are called subcomponents, a step of mixing BaCO 3 , CaCO 3 , and TiO 2 , The raw material powder of the dielectric ceramic composition can be obtained by a manufacturing method including a step of heat-treating the mixture for synthesis and a step of adding and mixing the subcomponents to the obtained main component.

また、水熱合成法、加水分解法、あるいはゾル−ゲル法等の湿式合成法によって主成分を合成する工程と、得られた主成分に副成分を加えて混合する工程とを備える製造方法によっても、誘電体セラミック組成物の原料粉末を得ることができる。   Further, by a production method comprising a step of synthesizing a main component by a wet synthesis method such as a hydrothermal synthesis method, a hydrolysis method, or a sol-gel method, and a step of adding a subcomponent to the obtained main component and mixing. Also, a raw material powder for the dielectric ceramic composition can be obtained.

また、副成分であるMn化合物、V化合物、Si化合物、及びRe化合物(但し、ReはY、La、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、及びYbの中から選ばれる少なくとも1種の金属元素)としては、前記誘電体セラミック組成物を構成できるものであれば、酸化物粉末に限らず、アルコキシドや有機金属等の溶液を用いてもよく、これら用いられる副成分の形態によって、得られた誘電体セラミック組成物の特性が損なわれることはない。   In addition, subcomponents Mn compound, V compound, Si compound, and Re compound (where Re is selected from Y, La, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, and Yb) The at least one metal element) is not limited to oxide powder as long as it can constitute the dielectric ceramic composition, and a solution of an alkoxide or an organic metal may be used. Depending on the form, the properties of the obtained dielectric ceramic composition are not impaired.

また、上述したような誘電体セラミック組成物は、焼成されて、図1に示した積層セラミックコンデンサ1の誘電体セラミック層3となるが、このような焼成工程において、内部電極4及び5に含まれるNi、Ni合金、Cu、及びCu合金のような金属は、誘電体セラミック層3中に拡散する場合もあるが、上記の誘電体セラミック組成物によれば、このような金属成分が拡散しても、その電気的特性に実質的な影響がないことを確認している。   Further, the dielectric ceramic composition as described above is fired to form the dielectric ceramic layer 3 of the multilayer ceramic capacitor 1 shown in FIG. 1, and is included in the internal electrodes 4 and 5 in such a firing process. Metals such as Ni, Ni alloy, Cu, and Cu alloy may diffuse into the dielectric ceramic layer 3, but according to the above dielectric ceramic composition, such metal components diffuse. However, it has been confirmed that there is no substantial influence on the electrical characteristics.

次に、この発明を実施例に基づいてより具体的に説明する。この実施例は、この発明に係る組成範囲の限定の根拠を与えるためのものでもある。   Next, the present invention will be described more specifically based on examples. This example is also to provide a basis for limiting the composition range according to the present invention.

この実施例において、前記図1に示すような積層セラミックコンデンサを作製した。   In this example, a multilayer ceramic capacitor as shown in FIG. 1 was produced.

まず、主成分である(Ba1-xCaxmTiO3の出発原料として、高純度のBaCO3、CaCO3、及びTiO2の各粉末を準備し、以下の表1及び表2に示すCaの含有量、すなわち「Ca変性量:x」、および「(Ba、Ca)/Ti比:m」が得られるように、前記の各出発原料粉末を調合した。 First, as starting materials for the main component (Ba 1-x Ca x) m TiO 3, high-purity BaCO 3, CaCO 3, and to prepare each powder of TiO 2, shown in Tables 1 and 2 below Each of the above starting material powders was prepared so that the Ca content, that is, “Ca modification amount: x” and “(Ba, Ca) / Ti ratio: m” were obtained.

この調合粉末をボールミルを用いて湿式混合し、均一に分散させた後、乾燥処理を施して調整粉末を得た。   The blended powder was wet-mixed using a ball mill and uniformly dispersed, and then subjected to a drying treatment to obtain a adjusted powder.

得られた調整粉末を1000℃以上の温度で仮焼し、平均粒径0.20μmで、Ca含有量が表1及び表2に示すx及びmである主成分粉末を得た。なお、平均粒径は、走査型電子顕微鏡によって粉末を観察し、300個の粒子の粒子径を測長して求めた。   The obtained adjusted powder was calcined at a temperature of 1000 ° C. or higher to obtain a main component powder having an average particle size of 0.20 μm and Ca contents of x and m shown in Tables 1 and 2. The average particle size was determined by observing the powder with a scanning electron microscope and measuring the particle size of 300 particles.

また、副成分の出発原料として、MnCO3、V25、SiO2、及びRe23(但し、ReはY、La、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、及びYbの中から選ばれる少なくとも1種の金属元素)の各粉末を準備し、以下の表1及び表2に示すx、m、a、b、c、及びdにそれぞれ選ばれた、組成式:100(Ba1-xCaxmTiO3+aMnO+bV25+cSiO2+dRe23で表わされる組成が得られるように、前記主成分粉末と、前記各副成分の出発原料粉末を調合した。なお、試料No.65から70では、Reとして2種類の金属元素を同時に添加しているが、それぞれの金属元素は同量ずつ添加した。 In addition, as starting materials for subcomponents, MnCO 3 , V 2 O 5 , SiO 2 , and Re 2 O 3 (where Re is Y, La, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, And at least one metal element selected from Yb), and the composition formulas selected for x, m, a, b, c, and d shown in Tables 1 and 2 below, respectively. : 100 (Ba 1-x Ca x) m TiO 3 + aMnO + bV 2 O 5 + cSiO 2 + dRe as the composition represented by 2 O 3 obtained was formulated with the main component powder, a starting material powder of the respective subcomponents . Sample No. In 65 to 70, two kinds of metal elements were simultaneously added as Re, but the same amount of each metal element was added.

Figure 2005194138
Figure 2005194138

Figure 2005194138
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次に、この調合粉末をボールミルを用いて湿式混合し、均一に分散させた後、乾燥処理を施して、誘電体セラミック組成物の原料粉末を得た。   Next, this blended powder was wet-mixed using a ball mill and uniformly dispersed, and then subjected to a drying treatment to obtain a raw material powder for the dielectric ceramic composition.

次に、この誘電体セラミック原料粉末にポリビニルブチラール系のバインダ、可塑剤、及びエタノール等の有機溶剤を加え、ボールミルにより湿式混合して誘電体セラミック組成物のスラリーを得た。このスラリーをポリエチレンテレフタレート等からなるキャリアフィルム上にシート状に成形して、誘電体セラミック組成物のグリーンシートを得た。得られたグリーンシートの厚みは1.4μmであった。   Next, a polyvinyl butyral binder, a plasticizer, and an organic solvent such as ethanol were added to the dielectric ceramic raw material powder and wet mixed by a ball mill to obtain a dielectric ceramic composition slurry. This slurry was formed into a sheet on a carrier film made of polyethylene terephthalate or the like to obtain a green sheet of a dielectric ceramic composition. The thickness of the obtained green sheet was 1.4 μm.

次に、得られたグリーンシート上に、Niを主成分とする導電性ペーストを用いて内部電極パターンを印刷した後、互いに対向して複数の静電容量を構成するように6層積み重ね、さらにその上下面に内部電極パターンが形成されないセラミックグリーンシートを適当数積み重ねて熱圧着し、生の積層体を得た。   Next, on the obtained green sheet, after printing an internal electrode pattern using a conductive paste mainly composed of Ni, 6 layers are stacked so as to constitute a plurality of capacitances facing each other, and An appropriate number of ceramic green sheets with no internal electrode pattern formed on the upper and lower surfaces were stacked and thermocompression bonded to obtain a raw laminate.

この生の積層体をN2雰囲気中で350℃、3h保持して脱バインダし、その後、N2−H2−H2Oの混合ガスを用いて、Ni内部電極が酸化しない酸素分圧10-12〜10-9MPaの還元雰囲気中で、表3及び表4に示す温度でそれぞれ2h保持して焼成し、積層体を得た。 This raw laminate was debindered by holding at 350 ° C. for 3 hours in an N 2 atmosphere, and then using a mixed gas of N 2 —H 2 —H 2 O, the oxygen partial pressure at which the Ni internal electrode was not oxidized was 10 In a reducing atmosphere of −12 to 10 −9 MPa, the laminates were obtained by firing for 2 hours at the temperatures shown in Tables 3 and 4 respectively.

得られた焼成後の積層体の両端面に、Agを主成分とし、B23−SiO2−BaO系のガラスフリットを含有する導電性ペーストを塗布し、N2雰囲気中において600℃の温度で焼き付けた。 A conductive paste containing Ag as a main component and containing a B 2 O 3 —SiO 2 —BaO-based glass frit is applied to both end faces of the obtained fired laminate, and the temperature is 600 ° C. in an N 2 atmosphere. Baked at temperature.

焼き付けたAg電極上に、公知の方法にてNiめっき処理を施して第1のめっき層とし、その上にSnめっき処理を施して第2のめっき層とすることで、内部電極と電気的に接続された外部電極を形成した。   On the baked Ag electrode, Ni plating is performed by a known method to form a first plating layer, and Sn plating is performed thereon to form a second plating layer. A connected external electrode was formed.

このようにして得られた積層セラミックコンデンサの外形寸法は、幅が5.0mm、長さが5.7mm、及び厚さ2.4mmであった。また、有効な誘電体セラミック層の層数は5であり、1層当たりの対向電極面積は16.3mm2であり、セラミック誘電体層の厚さは1.0μmであった。 The outer dimensions of the multilayer ceramic capacitor thus obtained were 5.0 mm in width, 5.7 mm in length, and 2.4 mm in thickness. The number of effective dielectric ceramic layers was 5, the counter electrode area per layer was 16.3 mm 2 , and the thickness of the ceramic dielectric layer was 1.0 μm.

これら得られた試料について、静電容量(C)及び誘電損失(tanδ)を自動ブリッジ式測定器を用い、25℃において0.5Vrms、120Hzの交流電圧を印加して測定し、得られたCと、内部電極面積及びセラミック誘電体層厚さから比誘電率(εr)を算出した。 With respect to these obtained samples, the capacitance (C) and dielectric loss (tan δ) were measured by applying an alternating voltage of 0.5 V rms and 120 Hz at 25 ° C. using an automatic bridge type measuring device. The relative dielectric constant (ε r ) was calculated from C, the internal electrode area, and the ceramic dielectric layer thickness.

さらに、25℃において0.5Vrms、120Hzの交流電圧に対して2Vの直流電圧を重畳した場合の静電容量(CDC)を測定し、前記C、すなわち直流電圧を重畳しない場合の静電容量を基準としたDCバイアス変化率(ΔCDC)を、ΔCDC=((CDC−C)/C)の式に基づいて算出した。 Furthermore, the electrostatic capacity (C DC ) when a DC voltage of 2 V is superimposed on an AC voltage of 0.5 V rms and 120 Hz at 25 ° C. is measured. The DC bias change rate (ΔC DC ) based on the capacitance was calculated based on the equation: ΔC DC = ((C DC −C) / C).

また、−55℃から125℃の範囲内で、温度を変化させながら静電容量を測定し、25℃での静電容量(C25)を基準として、変化の絶対値が最大となった静電容量(CTC)について、その際の温度変化率(ΔCTC)を、ΔCTC=((CTC−C25)/C25)の式に基づいて算出した。 In addition, the electrostatic capacity was measured while changing the temperature within the range of −55 ° C. to 125 ° C., and the absolute value of the change was maximized based on the electrostatic capacity (C 25 ) at 25 ° C. Regarding the electric capacity (C TC ), the temperature change rate (ΔC TC ) at that time was calculated based on the formula of ΔC TC = ((C TC −C 25 ) / C 25 ).

また、絶縁抵抗(IR)を、絶縁抵抗計を用い、25℃において5Vの直流電圧を60s印加して測定し、得られたIRと積層セラミックコンデンサの構造に基づき抵抗率(ρ)を算出した。   Further, the insulation resistance (IR) was measured by applying a DC voltage of 5 V for 60 s at 25 ° C. using an insulation resistance meter, and the resistivity (ρ) was calculated based on the obtained IR and the structure of the multilayer ceramic capacitor. .

また、高温負荷信頼性試験として、温度150℃において10Vの直流電圧を印加して、その絶縁抵抗(RLife)の経時変化を測定し、各試料の絶縁抵抗値が105Ω以下になった時点を故障とし、それらの平均故障時間(MTTF)を求めた。 In addition, as a high temperature load reliability test, a DC voltage of 10 V was applied at a temperature of 150 ° C., and the change over time in the insulation resistance (R Life ) was measured, and the insulation resistance value of each sample became 10 5 Ω or less. Time points were taken as failures, and their mean failure time (MTTF) was determined.

以上の電気的特性の評価結果を表3及び表4に示す。   The evaluation results of the above electrical characteristics are shown in Tables 3 and 4.

Figure 2005194138
Figure 2005194138

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表3及び表4に示した各電気的特性についての好ましい範囲は、εrについては、3000以上であり、tanδについては、5%以下であり、ΔCDCについては、その絶対値が20%以下であり、ΔCTCについては、その絶対値が15%以下であり、ρについては、これをlog(ρ/Ω・m)で表わした場合に11以上であり、MTTFについては、100h以上である。 The preferable ranges for the electrical characteristics shown in Tables 3 and 4 are 3000 or more for ε r , 5% or less for tan δ, and the absolute value for ΔC DC is 20% or less. And ΔC TC has an absolute value of 15% or less, ρ is 11 or more when expressed in log (ρ / Ω · m), and MTTF is 100 h or more. .

以下に、この発明において、前記の組成範囲に限定した理由について説明する。   Hereinafter, the reason why the present invention is limited to the above composition range will be described.

表1〜4において、試料番号に*を付したものは、この発明に係る組成範囲から外れた試料である。   In Tables 1 to 4, the sample numbers marked with * are samples that are out of the composition range according to the present invention.

まず、x<0.030の場合は、試料1に示すように、εrが3000未満であり、log(ρ/Ω・m)が11未満となり、またMTTFが100h未満となる。他方、x>0.20の場合は、試料2に示すように、εrが3000未満となり、log(ρ/Ω・m)が11未満となり、またMTTFが100h未満となる。 First, when x <0.030, as shown in Sample 1, ε r is less than 3000, log (ρ / Ω · m) is less than 11, and MTTF is less than 100 h . On the other hand, when x> 0.20, as shown in Sample 2, ε r is less than 3000, log (ρ / Ω · m) is less than 11, and MTTF is less than 100 h.

次に、m<0.990の場合は、試料3に示すように、log(ρ/Ω・m)が11未満となり、またMTTFが著しく短くなる。他方、m>1.030の場合は、試料4に示すように、εrが3000未満となり、ΔCTCの絶対値が15%を超え、log(ρ/Ω・m)が11未満となり、またMTTFが著しく短くなる。 Next, when m <0.990, as shown in Sample 3, log (ρ / Ω · m) is less than 11, and MTTF is significantly shortened. On the other hand, when m> 1.030, as shown in Sample 4, ε r is less than 3000, the absolute value of ΔC TC exceeds 15%, and log (ρ / Ω · m) is less than 11, MTTF is significantly shortened.

次に、a<0.010の場合は、試料5に示すように、log(ρ/Ω・m)が11未満となり、またMTTFが100h未満となる。他方、a>5.0の場合は、試料6に示すように、ΔCDCの絶対値が20%を超え、ΔCTCの絶対値が15%を超え、またlog(ρ/Ω・m)が11未満となる。 Next, when a <0.010, as shown in Sample 5, log (ρ / Ω · m) is less than 11 and MTTF is less than 100 h. On the other hand, when a> 5.0, as shown in Sample 6, the absolute value of ΔC DC exceeds 20%, the absolute value of ΔC TC exceeds 15%, and log (ρ / Ω · m) is Less than 11.

次に、b<0.050の場合は、試料7に示すように、ΔCTCの絶対値が15%を超え、またlog(ρ/Ω・m)が11未満となる。他方、b>2.5の場合は、試料8に示すように、εrが3000未満となり、またMTTFが100h未満となる。 Next, when b <0.050, as shown in Sample 7, the absolute value of ΔC TC exceeds 15% and log (ρ / Ω · m) is less than 11. On the other hand, when b> 2.5, as shown in Sample 8, ε r is less than 3000, and MTTF is less than 100 h .

次に、c<0.20の場合は、試料9に示すように、εrが3000未満となり、tanδが5%を超え、ΔCTCの絶対値が15%を超え、log(ρ/Ω・m)が11未満となり、またMTTFが100h未満となる。他方、c>8.0の場合は、試料10に示すように、ΔCTCの絶対値が15%を超える。 Next, when c <0.20, as shown in Sample 9, ε r is less than 3000, tan δ exceeds 5%, the absolute value of ΔC TC exceeds 15%, and log (ρ / Ω · m) is less than 11, and MTTF is less than 100 h. On the other hand, when c> 8.0, as shown in Sample 10, the absolute value of ΔC TC exceeds 15%.

次に、d<0.050の場合は、試料11に示すように、εrが3000未満となり、ΔCDCの絶対値が20%を超え、MTTFが100h未満となる。他方、d>2.5の場合は、ΔCTCの絶対値が15%を超える。 Next, when d <0.050, as shown in Sample 11, ε r is less than 3000, the absolute value of ΔC DC exceeds 20%, and MTTF is less than 100 h. On the other hand, when d> 2.5, the absolute value of ΔC TC exceeds 15%.

これらに対して、表3及び表4に示すように、この発明の範囲内にある試料13〜70に係る誘電体セラミック組成物によれば、εrを3000以上と大きく、tanδを5%以下と小さく、ΔCDCについては、その絶対値が20%以下と小さく、ΔCTCについては、その絶対値が15%以下と小さく、ρについては、これをlog(ρ/Ω・m)で表わした場合に11以上と高く、MTTFについては、100h以上と長くすることができる。 On the other hand, as shown in Tables 3 and 4, according to the dielectric ceramic composition according to Samples 13 to 70 within the scope of the present invention, εr is as large as 3000 or more and tan δ is 5% or less. The absolute value of ΔC DC is as small as 20% or less, the absolute value of ΔC TC is as small as 15% or less, and ρ is expressed as log (ρ / Ω · m) 11 and higher, and MTTF can be as long as 100 h or longer.

この発明に係る誘電体セラミック組成物を用いて構成される積層セラミックコンデンサ1を図解的に示す断面図である。1 is a cross-sectional view schematically showing a multilayer ceramic capacitor 1 configured using a dielectric ceramic composition according to the present invention.

符号の説明Explanation of symbols

1 積層セラミックコンデンサ
2 積層体
3 誘電体セラミック層
4、5 内部電極
8、9 外部電極
10、11 第一めっき層
12、13 第二めっき層
DESCRIPTION OF SYMBOLS 1 Multilayer ceramic capacitor 2 Laminated body 3 Dielectric ceramic layer 4, 5 Internal electrode 8, 9 External electrode 10, 11 1st plating layer 12, 13 2nd plating layer

Claims (3)

組成式:100(Ba1-xCaxmTiO3+aMnO+bV25+cSiO2+dRe23(但し、ReはY、La、Sm、Eu、Gd、Tb、Dy、Ho、Er、Tm、及びYbの中から選ばれる少なくとも1種の金属元素であり、a、b、c、及びdはモル比を表わす)で表わされる、誘電体セラミック組成物であって、
0.030≦x≦0.20、
0.990≦m≦1.030、
0.010≦a≦5.0、
0.050≦b≦2.5、
0.20≦c≦8.0、
0.050≦d≦2.5、
の範囲内にある、誘電体セラミック組成物。
Composition formula: 100 (Ba 1-x Ca x) m TiO 3 + aMnO + bV 2 O 5 + cSiO 2 + dRe 2 O 3 ( where, Re is Y, La, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, And a dielectric ceramic composition represented by: at least one metal element selected from Yb and a, b, c, and d each representing a molar ratio;
0.030 ≦ x ≦ 0.20,
0.990 ≦ m ≦ 1.030,
0.010 ≦ a ≦ 5.0,
0.050 ≦ b ≦ 2.5,
0.20 ≦ c ≦ 8.0,
0.050 ≦ d ≦ 2.5,
A dielectric ceramic composition in the range of
複数の誘電体セラミック層と、該誘電体セラミック層間に形成された内部電極と、該内部電極に電気的に接続された外部電極とを備える、積層セラミックコンデンサにおいて、前記誘電体セラミック層が請求項1に記載の誘電体セラミック組成物で構成されていることを特徴とする、積層セラミックコンデンサ。   The multilayer ceramic capacitor comprising: a plurality of dielectric ceramic layers; an internal electrode formed between the dielectric ceramic layers; and an external electrode electrically connected to the internal electrode. 2. A multilayer ceramic capacitor comprising the dielectric ceramic composition according to 1. 前記内部電極は、Ni、Ni合金、Cu、及びCu合金の中から選ばれる少なくとも1種の導電性材料で構成されていることを特徴とする、請求項2に記載の積層セラミックコンデンサ。   The multilayer ceramic capacitor according to claim 2, wherein the internal electrode is made of at least one conductive material selected from Ni, Ni alloy, Cu, and Cu alloy.
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