JP2005190822A - Dehydrating method for substrate and dehydrating device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a dehydrating method for a substrate and a dehydrating device, which obtain an enough dehydrating effect by suppressing the readsorption of water to a component of an organic electroluminescence element after thermal dehydration process. <P>SOLUTION: The dehydrating device A dehydrates a substrate (supporting substrate) 10 provided with the organic electroluminescence element where a first electrode formed in a predetermined shape, an insulating layer, an organic layer having at least a light-emitting layer, and a second electrode, are sequentially laminated. The dehydrating device A comprises a heat chamber 3 for performing thermal dehydration process by heating the substrate 10 provided with at least the insulating layer, and a temperature-lowering chamber 4 for a temperature-lowering process where the temperature of the substrate 10 is lowered while keeping an atmosphere in a low dew point after the thermal dehydration process. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a substrate dehydration method and a dehydration apparatus in which an organic EL (electroluminescence) element in which an organic layer having at least a light emitting layer is sandwiched between a pair of electrodes is disposed.

  As an organic EL panel using an organic EL element, a transparent electrode (first electrode) made of ITO (Indium Tin Oxide) or the like serving as an anode is insulated on a translucent support substrate (substrate) made of a glass material. An organic layer composed of a layer, a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, and the like, and a non-transparent back electrode (second electrode) composed of aluminum (Al) or the like serving as a cathode, The organic EL element is formed by sequentially laminating layers, and a sealing member made of a glass material is disposed so as to hermetically cover the organic EL element. (For example, see Patent Document 1)

  In such an organic EL panel, the organic EL element is hermetically covered by the sealing member, so that moisture penetrates into the organic EL element, thereby generating a non-light-emitting portion called a dark spot and expanding its area. It is preventing.

In addition, the water that causes dark spots is adsorbed to the constituent members of the organic EL panel itself, and at least a part of the constituent members of the organic EL panel is formed to desorb the water. A method is known in which heat dehydration is performed on the support substrate in a low dew point atmosphere. (See, for example, Patent Document 2) In particular, the insulating layer often uses a highly adsorbing polyimide-based or phenol-based insulating material, and a large amount of moisture is adsorbed, so there is a high need for dehydration treatment. .
JP-A-11-162635 JP 2000-150147 A

  However, in the heat dehydration process, when the temperature of the support substrate is lowered after heating, the temperature of the atmosphere is reduced, so that moisture in the atmosphere is solidified and adsorbed again to the constituent members. There was a problem that sufficient effects could not be obtained. Note that the moisture in the atmosphere includes moisture desorbed from the component members by heating.

  In view of such a problem, the present invention provides a substrate dehydration method and a dehydration apparatus capable of suppressing re-adsorption of moisture to components of an organic EL panel after heat dehydration and obtaining a sufficient dehydration effect. The purpose is to provide.

  In order to solve the above problems, the substrate dehydration method of the present invention sequentially stacks a first electrode formed in a predetermined shape, an insulating layer, an organic layer having at least a light emitting layer, and a second electrode. A method for dehydrating a substrate on which an organic EL element is provided, the method comprising heating at least the substrate after the insulating layer is formed and performing a heat dehydration process, and maintaining the atmosphere at a low dew point after the heat dehydration process. And a step of performing a temperature lowering process for lowering the temperature of the substrate.

  Further, the temperature lowering process is performed while exhausting a gas in the atmosphere and introducing a new low dew point gas into the atmosphere.

  In the temperature lowering process, the new low dew point gas is blown onto the substrate.

  In addition, the substrate includes the first electrode formed in a stripe shape, and a partition formed on the first electrode and the insulating layer so as to intersect the first electrode, and the insulating After the formation of the layer and the partition wall, the substrate is subjected to the heat dehydration treatment and the temperature lowering treatment.

  In order to solve the above-described problem, the dehydrating apparatus of the present invention is formed by sequentially laminating a first electrode formed in a predetermined shape, an insulating layer, an organic layer having at least a light emitting layer, and a second electrode. A dehydrating apparatus for dehydrating a substrate on which an organic EL element is disposed, wherein a heating chamber for heating and dehydrating the substrate on which at least the insulating layer is formed is heated, and an atmosphere is lowered after the heating and dehydrating process. It is characterized by comprising a temperature-decreasing room for performing a temperature-falling process for lowering the temperature of the substrate while keeping a dew point, and a transport means for transporting the substrate.

  Further, the present invention is characterized in that it comprises transport means for transporting the substrate to the heating chamber or the descending room.

  The descending greenhouse is characterized by comprising an exhaust part for exhausting gas in the atmosphere and an introduction part for introducing new low dew point gas into the atmosphere.

  In addition, the introduction unit includes an introduction port that is provided so as to face the substrate and blows the new low dew point gas onto the substrate.

  The present invention relates to a substrate dehydration method and a dehydration apparatus in which an organic EL element having at least an organic layer having a light-emitting layer sandwiched between a pair of electrodes is provided, and relates to a method for dehydrating water to components of an organic EL panel after heat dehydration. It is possible to suppress re-adsorption and obtain a sufficient dehydration effect.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. As shown in FIG. 1, the dehydrating apparatus A is mainly composed of an input chamber 1, a transfer robot (transfer means) 2, a heating chamber 3, a descending greenhouse 4, and a carry-out chamber 5. The support substrate (substrate) 10 described in detail in FIG.

  The input chamber 1 is connected to the substrate input device B, and the support substrate 10 is input via a conveying means such as a conveyor provided in the substrate input device B.

  The transfer robot 2 is rotatably provided by a driving means (not shown) such as a servo motor, and is provided so as to be movable in the depth direction and the height direction of the input chamber 1, the heating chamber 3, the descending chamber 4, and the carry-out chamber 5. Is. The transfer robot 2 has a fixing member (not shown) made of a claw for holding the support substrate 10 at the tip, for example, and transfers the support substrate 10 from the input chamber 1 to the heating chamber 3 in the heat dehydration process described later. In the temperature lowering process, which will be described later, the support substrate is transferred from the heating chamber 3 to the descending chamber 4, and after the temperature lowering process, the support substrate 10 is transferred from the descending chamber 4 to the unloading chamber 5.

  As shown in FIG. 2, the heating chamber 3 includes a cylindrical storage member 3a for storing the support substrate 10 and a heating coil 3b wound around the outer surface of the storage member 3a. When the support substrate 10 is transferred into the heating chamber 3 by the transfer robot 2, the heating chamber 3 heats the storage member 3a by applying a predetermined current to the heating coil 3b, and is supported by the heat from the storage member 3a. The substrate 10 is heated to, for example, 250 ° C., and a heat dehydration process is performed to desorb moisture adsorbed on the support substrate 10 and the constituent members of the organic EL element formed on the support substrate 10. The heating temperature may be any temperature that can evaporate moisture adsorbed on the support substrate 10 and the constituent members. In the present embodiment, the heat dehydration process is performed in the air, but may be performed in a low dew point atmosphere having a dew point of, for example, −35 ° C. or less.

  As shown in FIG. 3, the descending room 4 includes a storage member 4 a that houses a support substrate, an introduction part 4 b, and an exhaust part 4 c, and is transported into the descending room 3 by the transport robot 2 after the heating and dehydrating process. A temperature lowering process is performed to lower the temperature of the support substrate 10 to 100 ° C. or lower, for example. In the temperature lowering process, the temperature may be lowered to a level at which the support substrate 10 is not damaged in a later process. The descending greenhouse 3 introduces nitrogen from the introduction part 4a to make the atmosphere in the descending greenhouse 4 a low dew point lower than the dew point of the atmosphere, and also removes nitrogen and moisture in the atmosphere in the descending greenhouse 4 from the exhaust part 4b. The air is exhausted by natural convection and the atmosphere in the descending greenhouse 4 is changed. In the present embodiment, the dew point of the atmosphere in the descending greenhouse 4 is kept at −35 ° C. or lower. The introduction part 4b is provided so that the introduction port 4d into which new nitrogen is introduced faces the support substrate 10 so that the introduction air generated by the introduction of new nitrogen is blown to the support substrate 10, and the temperature drop As a processing method, a method is used in which the temperature of the support substrate 10 is lowered by lowering the temperature of the atmosphere in the descending greenhouse 4 by replacing nitrogen and the introduced air. Since the temperature lowering process is performed while replacing the nitrogen in the atmosphere in the descending greenhouse 4, the atmosphere in the descending greenhouse 4 is maintained at a low dew point during the temperature lowering process. Re-adsorption can be suppressed.

  Note that the method of replacing the atmosphere in the descending room 4 is not limited to the present embodiment, and a dedicated pump is provided for introducing or exhausting nitrogen, and this pump is used in the atmosphere in the descending room 4. Nitrogen may be replaced. Further, a dehydration mechanism for removing moisture exhausted together with nitrogen may be provided, and nitrogen may be circulated in the descending greenhouse 4. Further, as a method for the temperature lowering process, for example, a method of lowering the temperature of the support substrate 10 by bringing the support substrate 10 into contact with or in proximity to a cooled flat plate member may be used. Further, the gas introduced into the descending room 4 is not limited to nitrogen. For example, by using a method in which the atmosphere in the descending room 4 is lowered by introducing air (dry air) from which moisture has been removed. Also good.

  In the carry-out chamber 5, the support substrate 10 that has been subjected to the heat dehydration process and the temperature lowering process and from which moisture has been desorbed is disposed by the transport robot 2, and the component of the organic EL element is disposed on the support substrate 10. It connects with the vapor deposition apparatus (not shown) which vapor-deposits the organic layer and back electrode (2nd electrode) which are mentioned later. The carry-out chamber 5 is a chamber in which a vacuum atmosphere is provided when the support substrate 10 is delivered to the vapor deposition apparatus.

  Next, the support substrate 10 subjected to the heat dehydration process and the temperature lowering process by the dehydrator 1 will be described in detail.

  The support substrate 10 is made of a light-transmitting material such as a glass material, and the constituent member of the organic EL element is formed on one surface. In the present embodiment, at the time of the heat dehydration process and the temperature lowering process, as shown in FIGS. 4 and 5, a transparent electrode (first electrode) is provided on the support substrate 10 as the component of the organic EL element. (One electrode) 11, a connection wiring portion 12, an insulating layer 13, and a partition wall portion 14 are sequentially stacked.

  For example, ITO (Indium Tin Oxide) in which indium oxide (In2O3) is doped into tin oxide (SnO2) is formed in layers on the support substrate 10 by a method such as sputtering or vapor deposition. Patterning in stripes. As shown in FIG. 5, the transparent electrode 11 has an anode wiring part 11a and an anode part 11b, and the anode wiring part 11a includes an anode terminal part 11c for electrical connection to an external power source at the terminal part.

  The connection wiring part 12 is formed together with the transparent electrode 11 and is made of the same material ITO. The connection wiring part 12 has a cathode terminal part 12a formed at the terminal part and the other end connected to a cathode wiring part described later.

  The insulating layer 13 is made of an insulating material such as polyimide or phenol, and is formed in a predetermined shape on a non-light emitting portion on the support substrate 10 by means such as photolithography. The insulating layer 13 is formed between the anode portions 11b of the transparent electrode 11 and is formed so as to slightly overlap the transparent electrode 11, and insulates the transparent electrode 11 from a back electrode (second electrode) described later. Is.

  The partition wall portion 14 is made of, for example, a phenol-based insulating material, and is formed in a reverse taper shape by means such as a photolithography method. The partition wall portion 14 is formed on the transparent electrode 11 and the insulating layer 13 so as to intersect the anode portion 11b at a substantially right angle, and the portion corresponding to the later-described cathode wiring portion on the support substrate 10 is as shown in FIG. The support substrate 10 is formed to have an arc shape when viewed from the organic EL element forming surface side.

  Next, a method for dehydrating the support substrate 10 will be described.

  First, the transparent substrate 11, the connection wiring part 12, the insulating layer 13, and the partition wall part 14 are formed, and the support substrate 10 that has been subjected to the cleaning process is put into the loading chamber 1 of the dehydrating apparatus A through the substrate loading apparatus B. .

  Next, the support substrate 10 is transferred into the heating chamber 3 by the transfer robot 2, and the support substrate 10 is heated in the heating chamber 3 to perform the heating and dehydration treatment, and the support substrate 10, the transparent electrode 11, and the connection wiring portion 12. The water adsorbed on the insulating layer 13 and the partition wall 14 is evaporated (heat dehydration process, see FIG. 2).

  Further, after the heat dehydration treatment, the support substrate 10 is transported into the descending greenhouse 4 by the transport robot 2, and nitrogen and moisture in the atmosphere are exhausted by the exhaust section 4 c in the descending greenhouse 4 and new nitrogen is introduced by the introducing section 4 b. Then, the support substrate 10 is cooled in the temperature-lowering greenhouse 4 to perform the temperature-lowering process (temperature-lowering process, see FIG. 3).

  By the above method, the moisture adsorbed on the support substrate 10 and the transparent electrode 11 formed on the support substrate 10, the connection wiring portion 12, the insulating layer 13, and the partition wall portion 14 can be desorbed.

  The support substrate 10 is formed by sequentially stacking a hole injection layer, a hole transport layer, a light emitting layer, and an electron transport layer by the vapor deposition apparatus after the heat dehydration process and the temperature lowering process, thereby forming the organic layer 15. A layered back electrode (second electrode) 16 is formed by laminating aluminum (see FIG. 6A). Note that the back electrode 16 is cut into stripes by the partition wall portion 14 when forming the stacked layers, and the arcuate cathode wiring portion 16a and the cathode portion 16b that intersects the transparent electrode 11 substantially at right angles are formed (see FIG. 7). Further, the cathode wiring portion 16 a is electrically connected to the connection wiring portion 12.

  Next, the concave sealing member 17 is disposed on the support substrate 10 via the adhesive 17a so as to surround the organic EL element, and the adhesive 17a is cured by irradiating ultraviolet rays. And the sealing member 17 are hermetically joined (see FIG. 6B). By the above method, a dot matrix type organic EL panel using the organic EL element in which the pixels including the opposing portions of the anode portion 11b and the cathode portion 16b are provided in a matrix form is obtained.

  Such a method of dehydrating the support substrate 10 includes heating the support substrate 10 after the formation of the moisture-containing insulating layer 13 and the partition wall 14 and performing the heat dehydration process, and maintaining the atmosphere at a low dew point after the heat dehydration process. The temperature lowering process is performed to lower the temperature of the support substrate 10. Further, the temperature lowering process is performed while exhausting gas (nitrogen) in the atmosphere and introducing new gas (nitrogen) into the atmosphere.

  As described above, the dehydrating method of the support substrate 10 is performed when the temperature of the support substrate 10 is lowered after heating by lowering the support substrate 10 from a high temperature state by the heat dehydration process to a predetermined temperature while keeping the atmosphere at a low dew point. In addition, even when the temperature in the atmosphere is lowered, it is possible to suppress the moisture in the atmosphere from solidifying and adsorbing to the constituent members, and to sufficiently obtain the dehydration effect by the heat dehydration treatment. Therefore, in the manufacture of the organic EL panel, it is possible to suppress the generation of dark spots in the light emitting portion due to moisture contained in the constituent members of the organic EL element, and the yield of the organic EL panel can be improved.

  Further, the dehydrating method of the support substrate 10 uses the introduced air generated by introducing new nitrogen by blowing a new gas (nitrogen) introduced by the introduction portion 4b onto the support substrate 10 during the temperature lowering process. The support substrate 10 can be cooled, the support substrate 10 can be lowered to a predetermined temperature in a shorter time, and production efficiency can be improved.

  The dehydrating apparatus A includes a heating chamber 3 that heats the supporting substrate 10 to perform the heating and dehydrating process, and a cooling chamber that performs the temperature-decreasing process for lowering the temperature of the supporting substrate 10 while maintaining an atmosphere at a low dew point after the heating and dehydrating process. 4. In addition, a transporting means 2 for transporting the support substrate 10 to the heating chamber 3 or the descending room 4 is provided. Further, the descending room 4 includes an introduction part 4b for introducing new nitrogen into the atmosphere and an exhaust part 4c for exhausting nitrogen and moisture in the atmosphere.

  As described above, the dehydrating apparatus A performs the temperature lowering process in the temperature descending chamber 4 different from the heating chamber 3 that performs the heat dehydrating process, so that the moisture generated by the heat dehydrating process is not contained in the atmosphere. The support substrate 10 can be lowered from a high temperature state by the heat dehydration process to a predetermined temperature, and when the temperature of the support substrate 10 is lowered after the heating, the atmosphere is desorbed from the constituent members of the organic EL element 3 by heating. It is possible to suppress the re-adsorption of water to the constituent members and to sufficiently obtain the dehydration effect by the heat dehydration treatment. Further, when the temperature of the support substrate 10 is lowered after heating by lowering the support substrate 10 from the high temperature state by the heat dehydration process to a predetermined temperature while keeping the atmosphere in the descending room 4 at a low dew point, the temperature in the atmosphere is reduced. Even when the water content is lowered, it is possible to suppress the moisture in the atmosphere from solidifying and adsorbing to the constituent members, and to sufficiently obtain the dehydration effect by the heat dehydration treatment.

  Further, the dehydrating apparatus A is provided with the introduction port 4d of the introduction part 4b so as to face the support substrate 10, and by blowing new nitrogen introduced from the introduction port 4d onto the support substrate 10 during the temperature lowering process, The support substrate 10 can be cooled by using the introduction air generated by the introduction of fresh nitrogen, the support substrate 10 can be lowered to a predetermined temperature in a shorter time, and the production efficiency can be improved. .

  In this embodiment, the support substrate 10 constituting the dot matrix type organic EL panel is dehydrated, but it goes without saying that the present invention can also be applied to the support substrate constituting the segment type organic EL panel. . Further, in the present embodiment, one organic EL element is formed on the support substrate 10, but the present invention can also be applied to a substrate on which a plurality of organic EL elements are formed.

  Moreover, although this Embodiment performed the said heat | fever dehydration process and the said temperature-fall process after formation of the insulating layer 13 and the partition part 14, this invention of Claim 1-3 of this invention is this. As long as the heat dehydration treatment and the temperature lowering treatment are performed at least after the insulating layer is formed. Moreover, this invention may perform a heat | fever dehydration process and a temperature fall process after formation of an organic layer or a 2nd electrode. Moreover, the frequency | count of performing the heat | fever dehydration process and temperature-fall process in this invention is not limited to 1 time, You may perform several times.

  Moreover, although this Embodiment provided the heating chamber 3 and the temperature falling room 4, and performed the said heat | fever dehydration process and the said temperature-falling process in a different chamber, the board | substrate of Claim 1 of this invention is used. In the dehydration method, the heating chamber has a low dew point atmosphere, and after the heat dehydration process, the gas and moisture in the atmosphere are exhausted and moisture generated by the heat dehydration process is introduced by introducing a new low dew point gas. A temperature lowering process may be performed in the same heating chamber.

The figure which shows the spin-drying | dehydration apparatus which is embodiment of this invention. The figure which shows a heating chamber same as the above. The figure which shows a descending greenhouse. Sectional drawing which shows the support substrate dehydrated by the same dehydration apparatus. The figure which shows the support substrate dehydrated by the same dehydration apparatus. Sectional drawing which shows the manufacturing process of the organic electroluminescent panel which has a support substrate same as the above. The figure which shows the organic electroluminescent panel which has a support substrate same as the above.

Explanation of symbols

A Dehydrator B Substrate input device 2 Transfer robot (transfer means)
3 Heating room 4 Falling room 4b Introduction part 4c Exhaust part 4d Introduction port 10 Support substrate (substrate)
11 Transparent electrode (first electrode)
13 Insulating layer 14 Partition 15 Organic layer 16 Back electrode (second electrode)

Claims (8)

This is a method for dehydrating a substrate in which an organic EL element in which a first electrode formed in a predetermined shape, an insulating layer, an organic layer having at least a light emitting layer, and a second electrode are sequentially laminated is disposed. And a step of performing a heat dehydration process by heating the substrate after forming the insulating layer and a step of performing a temperature lowering process for lowering the temperature of the substrate while maintaining an atmosphere at a low dew point after the heat dehydration process. A method for dehydrating a substrate. 2. The substrate dehydration method according to claim 1, wherein the temperature lowering process is performed while exhausting a gas in the atmosphere and introducing a new low dew point gas into the atmosphere. The substrate dehydration method according to claim 2, wherein in the temperature lowering process, the new low dew point gas is blown onto the substrate. The substrate includes the first electrode formed in a stripe shape, and a partition formed on the first electrode and the insulating layer so as to intersect the first electrode, and the insulating layer and The substrate dehydration method according to claim 1, wherein the substrate is subjected to the heat dehydration treatment and the temperature lowering treatment after the partition wall is formed. Dehydration for dehydrating a substrate on which an organic EL element in which a first electrode formed in a predetermined shape, an insulating layer, an organic layer having at least a light emitting layer, and a second electrode are sequentially stacked is disposed. A device,
A heating chamber that heats and dehydrates the substrate on which the insulating layer is formed; and a greenhouse that performs a temperature-decreasing process that lowers the temperature of the substrate while maintaining an atmosphere at a low dew point after the heating and dehydration. A dehydrating apparatus comprising the dehydrating device. 6. The dehydrating apparatus according to claim 5, further comprising transport means for transporting the substrate to the heating chamber or the descending room. The said descending greenhouse is equipped with the exhaust part which exhausts the gas in the said atmosphere, and the introducing | transducing part which introduces a new low dew point gas in the said atmosphere, The Claim 5 or Claim 6 characterized by the above-mentioned. Dehydration apparatus as described. The dehydrating apparatus according to claim 7, wherein the introduction unit includes an introduction port that is provided so as to face the substrate and blows the new low dew point gas onto the substrate.

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