JP2005184019A5 - - Google Patents
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- Publication number
- JP2005184019A5 JP2005184019A5 JP2005000826A JP2005000826A JP2005184019A5 JP 2005184019 A5 JP2005184019 A5 JP 2005184019A5 JP 2005000826 A JP2005000826 A JP 2005000826A JP 2005000826 A JP2005000826 A JP 2005000826A JP 2005184019 A5 JP2005184019 A5 JP 2005184019A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- surface treatment
- electrode body
- dielectric
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004381 surface treatment Methods 0.000 claims 3
- 239000004020 conductor Substances 0.000 claims 1
- 230000005684 electric field Effects 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005000826A JP4361495B2 (ja) | 2005-01-05 | 2005-01-05 | プラズマ表面処理装置の電極構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005000826A JP4361495B2 (ja) | 2005-01-05 | 2005-01-05 | プラズマ表面処理装置の電極構造 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002294125A Division JP3686647B2 (ja) | 2002-10-07 | 2002-10-07 | プラズマ表面処理装置の電極構造 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2005184019A JP2005184019A (ja) | 2005-07-07 |
| JP2005184019A5 true JP2005184019A5 (https=) | 2005-11-10 |
| JP4361495B2 JP4361495B2 (ja) | 2009-11-11 |
Family
ID=34792698
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005000826A Expired - Fee Related JP4361495B2 (ja) | 2005-01-05 | 2005-01-05 | プラズマ表面処理装置の電極構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4361495B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112009000131T5 (de) * | 2008-01-18 | 2010-12-09 | Kyocera Corporation | Plasma-Generator und Entladungsvorrichtung und Reaktor, der einen Plasma-Generator verwendet |
-
2005
- 2005-01-05 JP JP2005000826A patent/JP4361495B2/ja not_active Expired - Fee Related
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