JP2005156224A - Manufacturing method for radiographic image conversion panel, and manufacturing equipment of radiographic image conversion panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manufacturing method for radiographic image conversion panel and manufacturing equipment for radiographic image conversion panel with high productivity. <P>SOLUTION: The manufacturing equipment of radiographic image conversion panel 3 has a first manufacturing part 35 for forming a stimulable phosphor layer 12 on the formed surface of a substrate 11, a second manufacturing part 38 for sealing the surface of the stimulable phosphor layer 12 with a protective film and a second selection chamber 36 for selecting the substrate 11. In the second selection chamber 36, the surface roughness A of the formed surface of the substrate 11 before forming the stimulable phosphor layer 12 and the surface roughness of the stimulable phosphor layer 12 are compared. When the average value Rab[μm] of ¾A-B¾ and the maximum value RabZ[μm] fulfill 0≤Rab<2.0 and 0≤Rab Z<3.0, the substrate 11 is carried to the first manufacturing part 35. When they do not satisfy, the substrate 11 is to be carried out of a load lock chamber 34. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a method for manufacturing a radiation image conversion panel and a device for manufacturing a radiation image conversion panel, which manufacture a radiation image conversion panel using a stimulable phosphor.

  In recent years, a radiation image conversion panel in which a photostimulable phosphor layer and a sealing layer are provided on a substrate has been used as a recording medium for recording a radiation image (see, for example, Patent Document 1).

  The radiation image conversion panel absorbs radiation transmitted through a subject with a stimulable phosphor layer. The radiation energy accumulated in the radiation image conversion panel is excited by a certain kind of energy, and as a result, is emitted as stimulated emission and converted into an image.

  In such a radiation image conversion panel, a stimulable phosphor layer is formed on the surface of a substrate by a vapor deposition method or a coating method, and then the surface of the stimulable phosphor layer is formed by a moisture-proof protective film or the like. It is manufactured by sealing.

By the way, an organic electroluminescent element (henceforth an organic EL element) as what has a board | substrate, the deposition layer formed by vapor-phase deposition, and sealing layers, such as a film, similarly to a radiation image conversion panel. is there. As a method for manufacturing this organic EL element, there is a method in which a voltage is applied after vapor deposition to inspect the light emission characteristics of the deposited layer, and a sealing layer is provided only for those having good inspection results (see, for example, Patent Document 2). ). According to this method, when the inspection result is bad, the productivity can be increased by the amount that the sealing layer is not provided.
US Pat. No. 3,859,527 JP 2001-291585 A

  However, since the photostimulable phosphor layer of the radiation image conversion panel does not emit light when a voltage is applied, the technique disclosed in Patent Document 2 cannot be directly applied to the radiation image conversion panel. Further, in order to inspect the state of the photostimulable phosphor layer, if an X-ray latent image is simply formed on the photostimulable phosphor layer and read with reading light, reading is performed after the latent image is formed. It takes time and effort.

  Therefore, in the production of the radiation image conversion panel, the state of the photostimulable phosphor layer cannot be inspected, and thus a protective film may be provided on the surface of the poorly formed photostimulable phosphor layer. , Productivity is lowered accordingly.

  The subject of this invention is providing the manufacturing method of a radiographic image conversion panel with high productivity, and the manufacturing apparatus of a radiographic image conversion panel.

The invention described in claim 1
A first step of forming a photostimulable phosphor layer on at least one of the front and back surfaces of the substrate;
A method for producing a radiation image conversion panel comprising a second step of sealing the surface of the photostimulable phosphor layer with a protective film,
Of the front and back surfaces of the substrate, after measuring a first physical quantity related to the shape of the surface on which the photostimulable phosphor layer is formed, the first step is performed,
Next, a second physical quantity related to the shape of the surface of the photostimulable phosphor layer is measured,
The second step is performed when a comparison result between the first physical quantity and the second physical quantity satisfies a predetermined condition.

  According to the first aspect of the present invention, for a substrate in which the comparison result between the first physical quantity and the second physical quantity does not satisfy a predetermined condition, that is, a substrate that is expected to be a radiological image conversion panel with poor quality, The trouble of sealing can be saved. Therefore, the productivity of the radiation image conversion panel can be increased by the amount that it is not necessary to form a poor stimulable phosphor layer. In addition, the radiation image conversion panel can be stabilized with high quality.

Invention of Claim 2 is a manufacturing method of the radiation image conversion panel of Claim 1,
As the first physical quantity, the surface roughness A of the surface to be formed is
As the second physical quantity, the surface roughness B of the surface of the photostimulable phosphor layer,
As the predetermined condition,
0 ≦ Rab <2.0, and 0 ≦ Rab · Z <3.0
(However, Rab is the average value of | A−B | [μm], Rab · Z is the maximum value of | A−B | [μm])
It is characterized by using.

Here, in the case of 2.0 ≦ Rab and 3.0 ≦ Rab · Z, the thickness of the stimulable phosphor layer is not uniform, so that the quality of the radiation image conversion panel is deteriorated. Is expected.
According to the invention described in claim 2, the same effect as that of the invention described in claim 1 can be obtained.

  In addition, as surface roughness, average roughness Ra, maximum roughness Rz * D, etc. can be used. These roughnesses are measured using the lowest part of the surface as a reference plane. For the measurement of the surface roughness, a dial gauge, an optical displacement meter, an optical microscope, a dark field optical measuring instrument, or the like can be used. As the optical displacement meter, a surface roughness meter “Surfcom 1600A” manufactured by Tokyo Seimitsu Co., Ltd. can be used.

Invention of Claim 3 is a manufacturing method of the radiographic image conversion panel of Claim 1 or 2,
As the substrate, the shape of the surface to be formed is 0.05 <Ra <2.0, and (where Ra is the average roughness [μm] of the surface to be formed)
0.1 <Rz · D <3.0
(However, Rz · D is the maximum roughness of the surface to be formed [μm])
It is characterized by using what satisfies.

Here, when the average roughness Ra of the surface to be formed is 0.05 or less and when the maximum roughness Rz · D is 0.1 or less, the smoothness of the surface to be formed is too good. Since the adhesive property between the phosphor layer and the substrate is deteriorated, the stimulable phosphor layer is easily peeled off.
Further, when the average roughness Ra is 2.0 or more and when the maximum roughness Rz · D is 3.0 or more, the film thickness of the photostimulable phosphor layer is uneven, resulting in good image quality. Cannot be obtained.

  According to the invention described in claim 3, by forming the photostimulable phosphor layer after selecting the substrate, the shape of the surface to be formed does not satisfy the above condition, and a radiological image conversion panel with poor quality is manufactured. It is possible to save the trouble of forming the photostimulable phosphor layer on the substrate expected to be formed. Therefore, the productivity of the radiation image conversion panel can be further increased by the amount that it is not necessary to form a poor photostimulable phosphor layer. Further, the radiation image conversion panel can be stabilized with higher quality.

Invention of Claim 4 is a manufacturing method of the radiographic image conversion panel of Claim 3,
The first step is performed on a substrate whose shape of the surface to be formed satisfies the condition after cleaning the substrate whose shape of the surface to be formed does not satisfy the condition.

According to the fourth aspect of the present invention, the waste of the substrate can be eliminated by performing the first step on the substrate that satisfies the condition after cleaning.
A cleaning method includes a method of blowing air.

The invention according to claim 5
A first step of forming a photostimulable phosphor layer on at least one of the front and back surfaces of the substrate;
A method for producing a radiation image conversion panel comprising a second step of sealing the surface of the photostimulable phosphor layer with a protective film,
Performing the first step after measuring the position of the concavo-convex portion on the surface on which the photostimulable phosphor layer is formed, on the front and back surfaces of the substrate,
Next, the position of the uneven portion on the surface of the photostimulable phosphor layer is measured,
The second step is performed when the position of the uneven portion on the surface of the photostimulable phosphor layer corresponds to the position of the uneven portion on the surface to be formed.

  Here, when the position of the concavo-convex portion on the surface of the photostimulable phosphor layer corresponds to the position of the concavo-convex portion on the surface to be formed, the concave portion is formed between the surface of the photostimulable phosphor layer and the surface to be formed of the substrate. In addition, including the case where there is no at least one of the convex portions, it means that the thickness of the photostimulable phosphor layer is substantially uniform.

  According to the invention described in claim 5, when the position of the uneven portion on the surface of the stimulable phosphor layer does not correspond to the position of the uneven portion on the surface to be formed, that is, the thickness of the stimulable phosphor layer. If it is expected that a radiological image conversion panel with poor quality will be manufactured because of non-uniformity, it is possible to save the trouble of performing the second step. Therefore, the productivity of the radiation image conversion panel can be increased. In addition, the radiation image conversion panel can be stabilized with high quality.

The invention described in claim 6
A first manufacturing part for forming a stimulable phosphor layer on at least one of the front and back surfaces of the substrate;
A radiation image conversion panel manufacturing apparatus having a second manufacturing unit that seals the surface of the photostimulable phosphor layer with a protective film,
A first measuring device that measures a physical quantity related to a shape of a surface on which the photostimulable phosphor layer is formed, of the front and back surfaces of the substrate before the photostimulable phosphor layer is formed;
A second measuring device for measuring a second physical quantity related to the shape of the surface of the photostimulable phosphor layer;
And a second sorting device that sorts a substrate that satisfies a predetermined result of a comparison between the first physical quantity and the second physical quantity and supplies the selected substrate to the second manufacturing unit.

  According to the sixth aspect of the present invention, the second physical quantity is selected and the second physical quantity is supplied to the second manufacturing unit by selecting the substrate that satisfies the predetermined result of the comparison between the first physical quantity and the second physical quantity. And the second physical quantity can be saved with respect to a substrate that does not satisfy a predetermined condition, that is, a substrate that is expected to be a poor quality radiation image conversion panel. Therefore, the productivity of the radiation image conversion panel can be increased by the amount that it is not necessary to form a poor stimulable phosphor layer. In addition, the radiation image conversion panel can be stabilized with high quality.

A seventh aspect of the present invention is the radiation image conversion panel manufacturing apparatus according to the sixth aspect,
The first physical quantity is a surface roughness A of the surface to be formed,
The second physical quantity is a surface roughness B of the surface of the photostimulable phosphor layer,
The predetermined condition is
0 ≦ Rab <2.0, and 0 ≦ Rab · Z <3.0
(However, Rab is the average value of | A−B | [μm], Rab · Z is the maximum value of | A−B | [μm])
It is characterized by being.
According to the seventh aspect of the invention, the same effect as that of the sixth aspect of the invention can be obtained.

Invention of Claim 8 is a manufacturing apparatus of the radiographic image conversion panel of Claim 6 or 7,
Based on the measurement result of the first measuring device, the shape of the surface to be formed is 0.05 <Ra <2.0, and (where Ra is the average roughness [μm] of the surface to be formed)
0.1 <Rz · D <3.0
(However, Rz · D is the maximum roughness of the surface to be formed [μm])
It has the 1st sorter | sorting apparatus which sort | selects the board | substrate which satisfy | fills and supplies to the said 1st manufacturing part.

  According to the eighth aspect of the present invention, since the first selection device that selects the substrate that satisfies the above criteria and supplies it to the first manufacturing unit is provided, the shape of the surface to be formed does not satisfy the predetermined condition, and the quality is poor. This eliminates the trouble of forming the photostimulable phosphor layer on the substrate on which the radiation image conversion panel is expected to be manufactured. Accordingly, the productivity of the radiation image conversion panel can be further increased by the amount that it is not necessary to form a poor photostimulable phosphor layer. Further, the radiation image conversion panel can be stabilized with higher quality.

The invention according to claim 9 is the manufacturing apparatus for the radiation image conversion panel according to claim 8,
A cleaning device for cleaning the substrate whose shape of the surface to be formed does not satisfy the predetermined condition;
The first measuring device measures the physical quantity related to the shape of the surface to be formed after cleaning by the cleaning device, and transmits the measurement result to the first sorting device.

  According to the ninth aspect of the present invention, it is possible to eliminate the waste of the substrate by forming the photostimulable phosphor layer on the substrate satisfying the predetermined condition after cleaning.

The invention according to claim 10 is:
A first manufacturing part for forming a stimulable phosphor layer on at least one of the front and back surfaces of the substrate;
A radiation image conversion panel manufacturing apparatus having a second manufacturing unit that seals the surface of the photostimulable phosphor layer with a protective film,
A third measuring device that measures the position of the concavo-convex portion on the surface on which the photostimulable phosphor layer is formed, of the front and back surfaces of the substrate before the photostimulable phosphor layer is formed;
A fourth measuring device for measuring the position of the concavo-convex portion on the surface of the photostimulable phosphor layer before sealing with the protective film;
A third sorting device for sorting the substrate and supplying it to the second manufacturing unit;
The third sorting device includes:
The substrate is supplied to the second manufacturing unit when the position of the uneven portion on the surface of the photostimulable phosphor layer corresponds to the position of the uneven portion on the surface to be formed.

  According to the invention described in claim 10, when the position of the uneven portion on the surface of the stimulable phosphor layer does not correspond to the position of the uneven portion on the surface to be formed, that is, the thickness of the stimulable phosphor layer. When it is expected that a radiological image conversion panel with poor quality due to non-uniformity will be produced, the trouble of providing a protective film can be saved. Therefore, the productivity of the radiation image conversion panel can be increased. In addition, the radiation image conversion panel can be stabilized with high quality.

The invention according to claim 11
A first manufacturing part for forming a stimulable phosphor layer on at least one of the front and back surfaces of the substrate;
A method for producing a radiation image conversion panel having a second production part for sealing the surface of the photostimulable phosphor layer with a protective film,
An observation device that observes the state of the surface of the photostimulable phosphor layer by an instantaneous light emission change or a transmission signal change of ultraviolet light before being sealed with the protective film;
And a fourth sorting device for sorting the substrate based on the observation result of the observation device and supplying the substrate to the second manufacturing unit.

Here, the instantaneous light emission change is a change in the instantaneous light emission amount on the surface of the photostimulable phosphor layer, and enables estimation of the luminance distribution of the manufactured radiation image conversion panel.
The transmission signal change is a change in the transmission signal amount on the surface of the photostimulable phosphor layer, and enables estimation of the X-ray absorption distribution of the manufactured radiation image conversion panel.

According to the eleventh aspect of the present invention, when the observed instantaneous light emission change or transmission signal change is poor, that is, when it is expected that a radiological image conversion panel with poor quality will be manufactured, the protective film is used. The trouble of providing can be saved. In addition, since the surface state of the photostimulable phosphor layer is evaluated by the instantaneous light emission change or transmission signal change of ultraviolet rays, unlike a case where a latent image such as an X-ray is formed on the photostimulable phosphor layer and read by reading light, The surface state of the photostimulable phosphor layer can be evaluated without taking time since there is no need to form a latent image. Therefore, the productivity of the radiation image conversion panel can be increased.
Also, unlike the case of using X-rays as light rays, the evaluation accuracy can be increased by the amount not affected by noise. Moreover, since a light beam can be made into a condensed beam, it is possible to evaluate each minute region of the photostimulable phosphor layer. Therefore, the radiation image conversion panel can be stabilized with high quality.

Invention of Claim 12 is a manufacturing method of the radiation image conversion panel of Claim 11,
The wavelength of the ultraviolet light is not more than the wavelength of instantaneous light emission energy.
According to the twelfth aspect, the same effect as that of the eleventh aspect can be obtained.

According to invention of Claim 1, 5, productivity of a radiographic image conversion panel can be improved. In addition, the radiation image conversion panel can be stabilized with high quality.
According to the invention described in claim 2, the same effect as that of the invention described in claim 1 can be obtained.

  According to the third aspect of the invention, the same effect as that of the first or second aspect of the invention can be obtained, and the productivity of the radiation image conversion panel can be increased. In addition, the radiation image conversion panel can be stabilized with high quality.

  According to the fourth aspect of the present invention, the same effect as the third aspect of the invention can be obtained, and the waste of the substrate can be eliminated.

According to invention of Claim 6,10,11, productivity of a radiographic image conversion panel can be improved. In addition, the radiation image conversion panel can be stabilized with high quality.
According to the seventh and twelfth aspects of the invention, the same effects as those of the sixth and eleventh aspects of the invention can be obtained.

  According to the invention described in claim 8, the same effects as those of the invention described in claim 6 or 7 can be obtained, and the productivity of the radiation image conversion panel can be increased. In addition, the radiation image conversion panel can be stabilized with high quality.

  According to the ninth aspect of the invention, the same effect as that of the eighth aspect of the invention can be obtained, and the waste of the substrate can be eliminated.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[First Embodiment]
FIG. 1 is a cross-sectional view showing a radiation image conversion panel 1 in the present embodiment.

  As shown in this figure, the radiation image conversion panel 1 has a substrate 11 having a photostimulable phosphor layer 12 formed on a surface to be formed (upper surface in FIG. 1).

  Various kinds of glass, polymer materials, metals, and the like are used for the substrate 11. As glass, plate glass, such as quartz glass, borosilicate glass, and chemically strengthened glass, is preferable. As the polymer material, a plastic film such as a cellulose acetate film, a polyethylene terephthalate film, a polyethylene naphthalate film, a polyamide film, a polyimide film, a triacetate film, or a polycarbonate film is preferable. The metal is preferably a metal sheet such as an aluminum sheet, an iron sheet or a copper sheet, or a metal sheet having a coating layer of an oxide of these metals.

  The surface of the substrate 11 may be a smooth surface or a mat surface. When the surface of the substrate 11 is a matte surface, the adhesion between the substrate 11 and the photostimulable phosphor layer 12 can be improved. In addition, an undercoat layer that improves adhesion to the photostimulable phosphor layer 12 may be provided on the surface on which the substrate 11 is formed.

  The thickness of the substrate 11 is generally 80 μm to 5000 μm, and preferably 80 μm to 3000 μm from the viewpoint of handling.

The stimulable phosphor layer 12 is formed from a columnar crystal 13 (see FIG. 5) of a stimulable phosphor. As the photostimulable phosphor, those represented by the general formula (1) can be used.
^{M 1 X · aM 2 X '} 2 · bM 3 X''3: eA ··· (1)

Here, M ¹ is at least one alkali metal selected from the group consisting of Li, Na, K, Rb and Cs, and in particular, is at least one alkali metal selected from the group consisting of K, Rb and Cs. preferable.

M ² is at least one divalent metal selected from the group consisting of Be, Mg, Ca, Sr, Ba, Zn, Cd, Cu and Ni, and in particular, selected from Be, Mg, Ca, Sr and Ba It is preferable that it is at least one divalent metal.

M ³ is selected from the group consisting of Sc, Y, La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, Al, Ga, and In. It is preferably at least one trivalent metal, and particularly preferably at least one trivalent metal selected from the group consisting of Y, La, Ce, Sm, Eu, Gd, Lu, Al, Ga, and In.

  X, X ′ and X ″ are at least one halogen selected from the group consisting of F, Cl, Br and I, and in particular, X is at least one halogen selected from the group consisting of Br and I. Is preferred.

  A is a group consisting of Eu, Tb, In, Ga, Cs, Ce, Tm, Dy, Pr, Ho, Nd, Yb, Er, Gd, Lu, Sm, Y, Tl, Na, Ag, Cu, and Mg. And at least one metal selected from the group consisting of Eu, Cs, Sm, Tl and Na.

A, b, and e are numerical values in the range of 0 ≦ a <0.5, 0 ≦ b <0.5, and 0 <e ≦ 0.2, respectively, and in particular, b is a numerical value in the range of 0 ≦ b ≦ 10 ⁻² Is preferred.

  The photostimulable phosphor layer 12 is formed to a thickness of 10 to 1000 μm, preferably 10 μm to 500 μm, by a vapor deposition method or a coating method. Here, as the vapor deposition method, an evaporation method, a sputtering method, a CVD method, an ion plating method, or the like can be used.

A moisture-proof protective film 20 that covers and seals the photostimulable phosphor layer 12 is provided on the surfaces of the substrate 11 and the photostimulable phosphor layer 12.
Examples of the moisture-proof protective film 20 include cellulose acetate, nitrocellulose, polymethyl methacrylate, polyvinyl butyral, polyvinyl formal, polycarbonate, polyester, polyethylene terephthalate, polyethylene naphthalate, polyethylene, polyvinylidene chloride, nylon, polytetrafluoroethylene, poly Resin films such as trifluoride-ethylene chloride, ethylene tetrafluoride-hexafluoropropylene copolymer, vinylidene chloride-vinyl chloride copolymer, vinylidene chloride-acrylonitrile copolymer can be used.

In addition, the moisture-proof protective film 20 may have a layer of an inorganic substance having low moisture permeability and oxygen permeability. Examples of such inorganic substances include SiO _x (SiO, SiO ₂ ), Al ₂ O ₃ , ZrO ₂ , SnO ₂ , SiC, and SiN. Among these inorganic substances, Al ₂ O ₃ and SiO _x are particularly preferable because they have high light transmittance and can form a dense film with few cracks and micropores.

Next, an apparatus for manufacturing a radiation image conversion panel according to the present invention will be described.
FIG. 2 is a diagram showing a schematic configuration of a radiation image conversion panel manufacturing apparatus (hereinafter referred to as a manufacturing apparatus) 3.

  As shown in this figure, the manufacturing apparatus 3 includes a load lock chamber 31 for carrying the substrate 11 therein, and load lock chambers 32, 34 for carrying out the substrate 11 and the manufactured radiation image conversion panel 1. 37.

These load lock chambers 31, 32, 34, and 37 are configured to block the inside of the manufacturing apparatus 3 from the outside air.
A first sorting chamber 33 for sorting the loaded substrate 11 is connected to the load lock chamber 31 via a transfer chamber 30a.

  As shown in FIG. 3, the first sorting chamber 33 includes a cleaning device (not shown) for cleaning the surface on which the substrate 11 is formed, and an optical displacement meter (first measuring device, first moving device) that moves above the substrate 11. 3 measuring device) 330.

  The cleaning device removes dust and the like on the surface to be formed by blowing air from the nozzle (not shown) to the surface to be formed of the substrate 11.

  The optical displacement meter 330 measures a physical quantity related to the shape of the surface on which the substrate 11 is formed, that is, the surface roughness A in the present embodiment.

Here, the surface roughness A makes it possible to predict the quality of the manufactured radiation image conversion panel 1.
Specifically, among the surface roughness A, the average roughness Ra [μm] is 0.05 <Ra <2.0, and the maximum roughness Rz · D [μm] is 0.1 <Rz · D <. In the case of 3.0, the quality of the radiation image conversion panel 1 is expected to be good.

  On the other hand, in the case of Ra ≦ 0.05 and Rz · D ≦ 0.1, the smoothness of the surface to be formed is too good, resulting in poor adhesion between the photostimulable phosphor layer and the substrate. Therefore, it is expected that the photostimulable phosphor layer is easily peeled off. In addition, in the case of 2.0 ≦ Ra and 3.0 ≦ Rz · D, it is expected that the film thickness of the photostimulable phosphor layer is uneven, so that good image quality cannot be obtained. The

An arithmetic device (first sorting device) 331 is connected to the cleaning device and the optical displacement meter 330.
The arithmetic device 331 is connected to a transport device (not shown) for the substrate 11, and determines the transport destination of the substrate 11 based on the measurement result of the optical displacement meter 330. Specifically, the arithmetic unit 331 determines that the average roughness Ra of the surface of the substrate 11 does not satisfy 0.05 <Ra <2.0, or the maximum roughness Rz · D is 0.1 <Rz · D. <3.0 is not satisfied, the substrate 11 is transferred to the load lock chamber 34 via the transfer chamber 30b. If both of these conditions are satisfied, the substrate 11 is transferred to the first manufacturing unit 35 via the transfer chamber 30c. It is designed to be transported.

  The 1st manufacture part 35 forms the photostimulable fluorescent substance layer 12 in the to-be-formed surface of the board | substrate 11 by a vapor deposition method. More specifically, as shown in FIG. 4, the first manufacturing unit 35 includes a vacuum pump 354 that keeps the inside of the vacuum vessel 350 in a vacuum.

The vacuum pump 354 is configured to exhaust the inside of the vacuum vessel 350 and introduce the atmosphere into the vacuum vessel 350.
A substrate holder 352 that holds the substrate 11 is disposed inside the vacuum vessel 350.

  The substrate holder 352 includes a heater (not shown) that heats the substrate 11. The heater is configured to heat and remove the adsorbate on the surface of the substrate 11 by heating the substrate 11. This prevents the generation of an impurity layer between the surface on which the substrate 11 is formed and the photostimulable phosphor, thereby enhancing the adhesion between the substrate 11 and the photostimulable phosphor layer 12 and stimulating fluorescence. The film quality of the body layer 12 is adjusted.

  The substrate holder 352 is rotated by a rotation mechanism 353. The rotation mechanism 353 includes, for example, a rotation shaft 353a that supports the substrate holder 352, and a motor (not shown) that is disposed outside the vacuum vessel 350 and rotates the rotation shaft 353a.

  Below the substrate holder 352, an evaporation source 351 that houses the stimulable phosphor and heats it by a resistance heating method is disposed. The evaporation source 351 may be composed of an alumina crucible around which a heater is wound, or may be composed of a heater or a boat made of a refractory metal. The method for heating the photostimulable phosphor is not limited to the resistance heating method, and may be a method such as heating by an electron beam or heating by high frequency induction. The evaporation source 351 may be a molecular beam source by a molecular source epitaxial method.

  A shutter (not shown) that blocks the space from the evaporation source 351 to the substrate 11 may be provided between the substrate 11 and the evaporation source 351. In this case, substances other than the target substance attached to the surface of the photostimulable phosphor by the shutter can be prevented from evaporating at the initial stage of vapor deposition and adhering to the substrate 11.

  The substrate 11 on which the photostimulable phosphor layer 12 is formed on the surface to be formed by the first manufacturing unit 35 is transferred to the second sorting chamber 36 via the transfer chamber 30d.

  As shown in FIG. 3, the second sorting chamber 36 includes an optical displacement meter (fourth measuring device) 360 and an arithmetic device (second sorting device) 361. The optical displacement meter 360 measures a physical quantity related to the shape of the surface of the photostimulable phosphor layer 12, that is, the surface roughness B in the present embodiment.

  The arithmetic device 361 is connected to the optical displacement meters 330 and 360, and the surface roughness A on the surface to be formed of the substrate 11 and the photostimulable phosphor layer based on the measurement results of the optical displacement meters 330 and 360. 12 are compared with the surface roughness B, and the average value Rab [μm] and the maximum value Rab · Z [μm] of | A−B | are calculated.

Here, the average value Rab and the maximum value Rab · Z enable the quality of the manufactured radiation image conversion panel 1 to be predicted.
Specifically, when the average value Rab and the maximum value Rab · Z satisfy 0.05 <Rab <2.0 and 0.1 <Rab · Z <3.0, the radiation image conversion panel 1 Quality is expected to be good.
On the other hand, when 2.0 ≦ Rab and 3.0 ≦ Rab · Z, the thickness of the photostimulable phosphor layer 12 is not uniform, so that the quality of the radiation image conversion panel 1 becomes poor. It is expected that.

  The arithmetic device 361 is also connected to a transfer device (not shown) for the substrate 11, and when the average value Rab and the maximum value Rab · Z do not satisfy the above condition, the calculation device 361 moves the substrate 11 through the transfer chamber 30 e. When the substrate 11 is transferred to the load lock chamber 37 and filled, the substrate 11 is transferred to the second manufacturing unit 38 via the transfer chamber 30f.

  The second manufacturing unit 38 seals the surface of the photostimulable phosphor layer 12 with the moisture-proof protective film 20. More specifically, the second manufacturing unit 38 seals the substrate 11 and the photostimulable phosphor layer 12 by heat-pressing the moisture-proof protective film 20 from above and below at a portion outside the outer peripheral portion of the substrate 11. It has a crimping device (not shown).

  The radiation image conversion panel 1 manufactured by the second manufacturing unit 38 is transported to the load lock chamber 32 via the transport chamber 30g and then unloaded from the load lock chamber 32.

Then, the manufacturing method of the photostimulable phosphor which is the raw material of the photostimulable phosphor layer 12 is demonstrated.
First, the following phosphor raw materials (a) to (d) are weighed so as to satisfy the ranges of a, b, and e in the general formula (1) and mixed with pure water. At this time, the mixture may be sufficiently mixed using a mortar, ball mill, mixer mill or the like.

  Here, the phosphor raw material (a) is LiF, LiCl, LiBr, LiI, NaF, NaCl, NaBr, NaI, KF, KCl, KBr, KI, RbF, RbCl, RbBr, RbI, CsF, CsCl, CsBr And at least one compound selected from the group consisting of CsI.

In addition, the phosphor material of _{(b), BeF 2, BeCl} 2, BeBr 2, BeI 2, MgF 2, MgCl 2, MgBr 2, MgI 2, CaF 2, CaCl 2, CaBr 2, CaI 2, SrF 2 _{, SrCl 2, SrBr 2, SrI} 2, BaF 2, BaCl 2, BaBr 2, BaI 2, ZnF 2, ZnCl 2, ZnBr 2, ZnI 2, CdF 2, CdCl 2, CdBr 2, CdI 2, CuF 2, CuCl ₂ , at least one compound selected from the group consisting of CuBr ₂ , CuI ₂ , NiF ₂ , NiCl ₂ , NiBr _2, and NiI ₂ .

In addition, the phosphor material of _{(c), ScF 3, ScCl} 3, ScBr 3, ScI 3, YF 3, YCl 3, YBr 3, YI 3, LaF 3, LaCl 3, LaBr 3, LaI 3, CeF 3 _{, CeCl 3, CeBr 3, CeI} 3, PrF 3, PrCl 3, PrBr 3, PrI 3, NdF 3, NdCl 3, NdBr 3, NdI 3, PmF 3, PmCl 3, PmBr 3, PmI 3, SmF 3, SmCl ₃ , SmBr ₃ , SmI ₃ , EuF ₃ , EuCl ₃ , EuBr ₃ , EuI ₃ , GdF ₃ , GdCl ₃ , GdBr ₃ , GdI ₃ , TbF ₃ , TbCl ₃ , TbBr ₃ , TbI ₃ , DyF ₃ , DyF ₃ , DyCl _{3 DyBr 3, DyI 3, HoF 3} , HoCl 3, HoBr 3, HoI 3, ErF 3, ErCl 3, ErBr 3, ErI 3, TmF 3, TmCl 3, TmBr 3, TmI 3, YbF 3, YbCl 3, YbBr 3 , YbI ₃ , LuF ₃ , LuCl ₃ , LuBr ₃ , LuI ₃ , AlF ₃ , AlCl ₃ , AlBr ₃ , AlI ₃ , GaF ₃ , GaCl ₃ , GaBr ₃ , GaI ₃ , InF ₃ , InCl ₃ , InBr ₃ and InI These are at least one compound or two or more compounds selected from the group consisting of ₃ .

  Furthermore, the phosphor material (d) includes Eu, Tb, In, Ga, Cs, Ce, Tm, Dy, Pr, Ho, Nd, Yb, Er, Gd, Lu, Sm, Y, Tl, Na, It is at least one or two or more metals selected from the group consisting of Ag, Cu and Mg.

  When these phosphor materials are mixed in pure water, a predetermined acid is added so that the pH value C of the obtained mixed solution is adjusted to 0 <C <7, and then water is evaporated.

  When the water in the mixed solution is evaporated, the obtained raw material mixture is filled in a heat-resistant container such as a quartz crucible or an alumina crucible and fired in an electric furnace. Thereby, a photostimulable phosphor is manufactured.

Here, the firing temperature is preferably 500 to 1000 ° C. The firing time varies depending on the filling amount of the raw material mixture, the firing temperature and the like, but is preferably 0.5 to 6 hours.
The firing atmosphere includes a nitrogen gas atmosphere containing a small amount of hydrogen gas, a weak reducing atmosphere such as a carbon dioxide gas atmosphere containing a small amount of carbon monoxide, a neutral atmosphere such as a nitrogen gas atmosphere and a rare gas atmosphere, or a small amount of oxygen gas. A weakly oxidizing atmosphere containing is preferable.

  After firing once under the above firing conditions, the fired product is taken out from the electric furnace and pulverized, and the fired product powder is again filled in a heat-resistant container and placed in the electric furnace, and refired under the same firing conditions as above. It's also good. Alternatively, the fired product may be moved from the heating unit to the cooling unit in an electric furnace and rapidly cooled in a weak reducing atmosphere, a neutral atmosphere, or a weak oxidizing atmosphere. In these cases, the light emission luminance of the photostimulable phosphor can be further increased.

Then, the manufacturing method of the radiographic image conversion panel which concerns on this invention is demonstrated.
First, the substrate 11 is carried into the manufacturing apparatus 3 from the load lock chamber 31. When the substrate 11 is carried into the load lock chamber 31, a transfer device (not shown) transfers the substrate 11 to the first sorting chamber 33.

When the substrate 11 is transferred to the first sorting chamber 33, the cleaning device cleans the surface on which the substrate 11 is formed. Thereby, dust on the surface to be formed is removed.
Next, the optical displacement meter 330 measures the surface roughness A of the formation surface of the substrate 11.

Of the measured surface roughness A, when the average roughness Ra does not satisfy 0.05 <Ra <2.0, or the maximum roughness Rz · D does not satisfy 0.1 <Rz · D <3.0. In this case, the cleaning device again cleans the surface on which the substrate 11 is formed, and the optical displacement meter 330 measures the surface roughness A of the surface to be formed. And even after cleaning, when the average roughness Ra does not satisfy 0.05 <Ra <2.0, or when the maximum roughness Rz · D does not satisfy 0.1 <Rz · D <3.0, that is, it is inferior. When it is expected that a radiographic image conversion panel 1 of a high quality will be manufactured, the arithmetic device 331 causes the substrate 11 to be transferred to the load lock chamber 34 by a transfer device (not shown). The substrate 11 transported to the load lock chamber 34 is unloaded from the manufacturing apparatus 3 and discarded.
Thereby, the effort which forms the photostimulable fluorescent substance layer 12 with respect to the board | substrate 11 which is expected to become the radiation image conversion panel 1 of inferior quality is saved.

  On the other hand, when the measured average roughness Ra satisfies 0.05 <Ra <2.0 and the maximum roughness Rz · D satisfies 0.1 <Rz · D <3.0, the arithmetic device 331 Transports the substrate 11 to the first manufacturing unit 35 by the transport device.

Next, the first manufacturing unit 35 forms the photostimulable phosphor layer 12 on the formation surface of the substrate 11 by vapor deposition.
Specifically, first, the substrate 11 is attached to the substrate holder 352 by a transfer device (not shown).
Next, the inside of the vacuum vessel 350 is evacuated by the vacuum pump 354 so that the degree of vacuum that allows vapor deposition is set, for example, about 1.333 × 10 ⁻⁴ Pa. Further, the substrate holder 352 is rotated together with the substrate 11 with respect to the evaporation source 351 by the rotation mechanism 353. Then, the photostimulable phosphor is evaporated from the heated evaporation source 351, and the photostimulable phosphor is grown on the formation surface of the substrate 11 to a desired thickness. Thereby, the photostimulable phosphor layer 12 is formed.

  In this case, the distance between the substrate 11 and the evaporation source 351 is preferably set to 100 mm to 1500 mm. The set temperature of the substrate 11 is preferably 50 ° C. to 400 ° C., and more preferably 100 ° C. to 250 ° C. in terms of the characteristics of the stimulable phosphor. Moreover, when using resin for the board | substrate 11, 50 to 150 degreeC is preferable and 50 to 100 degreeC is more preferable for the preset temperature of the board | substrate 11 in consideration of the heat resistance of resin.

The stimulable phosphor used as the evaporation source is preferably processed into a tablet shape by pressure compression.
Further, instead of the photostimulable phosphor, a raw material or a raw material mixture may be used.

FIG. 5 is a diagram showing a specific state in which the photostimulable phosphor layer 12 is deposited on the substrate 11. The incident angle of the vapor flow 15 of the stimulable phosphor with respect to the normal direction (R) of the surface of the substrate 11 fixed to the substrate holder 352 is θ ₂ (60 ° in the figure), and the columnar crystal 13 formed If the angle of the support surface relative to the normal direction (R) is θ ₁ (30 ° in the figure), empirically θ ₁ is about half of θ ₂ and the columnar crystal 13 is formed at this angle. In FIG. 5, the incident angle θ ₂ of the vapor flow 15 is set to 60 °.

  In the present embodiment, the photostimulable phosphor layer 12 containing no binder is formed, but the gap 14 formed between the columnar crystals 13 is filled with a filler such as a binder. Alternatively, a substance that reinforces the columnar crystal 13, a light-absorbing substance, or a light-reflecting substance may be filled. When filling a light-absorbing substance or a light-reflecting substance, it is possible to prevent the stimulated excitation light incident on the stimulable phosphor layer 12 from diffusing in the lateral direction.

When the photostimulable phosphor layer 12 is formed as described above, a transfer device (not shown) transfers the substrate 11 to the second sorting chamber 36.
When the substrate 11 is transported to the second sorting chamber 36, the optical displacement meter 360 measures the surface roughness B of the photostimulable phosphor layer 12.

  Next, the arithmetic unit 361 compares the surface roughness A of the formation surface of the substrate 11 with the surface roughness B of the stimulable phosphor layer 12 based on the measurement results of the optical displacement meters 330 and 360. , | A−B |, the average value Rab and the maximum value Rab · Z are calculated.

When the average value Rab and the maximum value Rab · Z do not satisfy 0.05 <Rab <2.0 and 0.1 <Rab · Z <3.0, that is, the radiological image conversion panel 1 having poor quality is obtained. In the case where it is expected to be manufactured, the arithmetic device 361 transports the substrate 11 to the load lock chamber 37 by a transport device (not shown). The substrate 11 transported to the load lock chamber 37 is unloaded from the manufacturing apparatus 3 and discarded.
Thereby, the effort which provides the moisture-proof protective film 20 with respect to the photostimulable light body layer 12 with which it is anticipated that the radiographic image conversion panel 1 of inferior quality is manufactured is saved.

  On the other hand, when the average value Rab and the maximum value Rab · Z satisfy the above conditions, the arithmetic device 361 causes the substrate 11 to be transported to the second manufacturing unit 38 by the transport device.

Next, the second manufacturing unit 38 seals the surfaces of the substrate 11 and the photostimulable phosphor layer 12 with the moisture-proof protective film 20. Thereby, the radiation image conversion panel 1 is manufactured.
Then, the manufactured radiation image conversion panel 1 is carried out from the load lock chamber 32.

  According to the above method for manufacturing a radiographic image conversion panel, it is possible to save the trouble of providing the photostimulable phosphor layer 12 on the substrate 11 on which the radiographic image conversion panel 1 of poor quality is expected to be manufactured. it can. Moreover, the trouble which provides the moisture-proof protective film 20 with respect to the photostimulable phosphor layer 12 with which it is anticipated that the radiation image conversion panel 1 of inferior quality is manufactured can be saved. Therefore, the productivity of the radiation image conversion panel can be increased accordingly. In addition, the radiation image conversion panel can be stabilized with high quality.

  Moreover, the waste of the substrate 11 can be eliminated by performing the first step on the substrate 11 that is expected to be a radiation image conversion panel 1 of good quality after cleaning by the cleaning device.

  In the above embodiment, the first sorting chamber 33 and the second sorting chamber 36 are described as including the optical displacement meters 330 and 360. However, the surface on which the substrate 11 is formed, the photostimulability, and the like. As a measuring device for measuring a physical quantity related to the shape of the surface of the phosphor layer 12, a dial gauge, an optical microscope, or the like may be provided.

  Moreover, although the 1st manufacturing part 35 demonstrated as forming the photostimulable phosphor layer 12 by a vapor deposition method, it is good also as forming by sputtering method, CVD method, an ion plating method, the apply | coating method.

  In the second sorting chamber 36, the substrate 11 is sorted by the average value Rab and the maximum value Rab · Z of | A−B |. However, the position and brightness of the uneven portion on the surface on which the substrate 11 is formed are described. The substrate 11 may be selected based on the position of the uneven portion on the surface of the stimulable phosphor layer 12. Specifically, when the position of the uneven portion on the surface of the photostimulable phosphor layer 12 does not correspond to the position of the uneven portion on the surface on which the substrate 11 is formed, the substrate 11 is transferred to the load lock chamber 37. If this is the case, the substrate 11 is transferred to the second manufacturing unit 38. Further, the irregularities on the surface of the photostimulable phosphor layer 12 may be irregularities due to scratches or streaks, or irregularities due to adhesion of foreign matters such as dust.

[Modification of First Embodiment]
Then, the modification of the manufacturing apparatus 3 is demonstrated. In addition, the same code | symbol is attached | subjected to the component same as the said 1st Embodiment, and the description is abbreviate | omitted.

As shown in FIG. 2, the manufacturing apparatus 3 </ b> A in this modification has a first sorting chamber 33 </ b> A instead of the first sorting chamber 33.
The first sorting chamber 33A has a dark field optical measurement device 4.

  As shown in FIG. 6, the dark field optical measuring instrument 4 includes a light source 40 that obliquely enters a light beam on the substrate 11 or the photostimulable phosphor layer 12.

Also, above the substrate 11, a photographing unit 41 that detects reflected light on the surface of the substrate 11 and creates image data is disposed. The photographing unit 41 includes a photographing lens 410 and a two-dimensional CCD 441. Have. The photographing lens 410 and the two-dimensional CCD 441 are movable above the substrate 11. Image data of an image photographed by the two-dimensional CCD 441 is transmitted to the arithmetic unit 442.

  The arithmetic device 442 calculates the surface roughness of the surface on which the substrate 11 is formed, the position of the uneven portion, and the like based on the image data. Further, the arithmetic device 442 determines the transport destination of the substrate 11 based on the calculation result.

  Even with the manufacturing apparatus 3A as described above, the same effects as those of the manufacturing apparatus 3 can be obtained.

[Second Embodiment]
Next, a second embodiment of the radiation image conversion panel manufacturing apparatus 3 will be described. In addition, the same code | symbol is attached | subjected to the component same as the said 1st Embodiment, and the description is abbreviate | omitted.

As shown in FIG. 2, the manufacturing apparatus 3 </ b> C in this modification includes a second sorting chamber 36 </ b> C instead of the second sorting chamber 36.
The second sorting chamber 36C has an ultraviolet light source (not shown).
The ultraviolet light source irradiates the stimulable phosphor layer 12 with ultraviolet rays. The wavelength of the ultraviolet light emitted from the ultraviolet light source is equal to or less than the wavelength of the instantaneous emission energy of the stimulable phosphor.

  An instantaneous light emission change or a transmission signal change generated in the photostimulable phosphor layer 12 by the irradiation of ultraviolet rays is observed by an observation device (not shown) and transmitted to an arithmetic device (not shown).

  The arithmetic unit estimates the luminance distribution of the stimulable phosphor layer 12 based on the instantaneous light emission change, or estimates the X-ray absorption distribution of the stimulable phosphor layer 12 based on the transmission signal change. ing. In addition, the arithmetic unit, based on the estimation result, places the substrate 11 on which the poor stimulable phosphor layer 12 is formed in the load lock chamber 34 and the substrate 11 on which the good stimulable phosphor layer 12 is formed. It is made to convey to the 2nd manufacturing part 38. FIG.

  Even with the manufacturing apparatus 3C as described above, the same effects as those of the manufacturing apparatus 3 can be obtained.

It is sectional drawing of a radiographic image conversion panel. It is a figure which shows schematic structure of the manufacturing apparatus of the radiographic image conversion panel which concerns on this invention. It is a figure which shows an optical displacement meter and a calculating device. It is a side view which shows schematic structure of a 1st manufacturing part. It is a figure which shows a mode that a photostimulable phosphor layer is formed on a board | substrate by vapor deposition. It is a figure which shows the measuring device and arithmetic unit of a dark field optical system.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Radiation image conversion panel 3, 3A, 3C Manufacturing apparatus 11 of Radiation image conversion panel Substrate 12 Stimulable phosphor layer 20 Moisture-proof protective film (protective film)
35 First manufacturing unit 38 Second manufacturing unit 330 Optical displacement meter (first measuring device, third measuring device)
331 Arithmetic device (first sorting device)
360 Optical displacement meter (4th measuring device)
361 Arithmetic device (second sorting device)

Claims (12)

A first step of forming a photostimulable phosphor layer on at least one of the front and back surfaces of the substrate;
A method for producing a radiation image conversion panel comprising a second step of sealing the surface of the photostimulable phosphor layer with a protective film,
Of the front and back surfaces of the substrate, after measuring a first physical quantity related to the shape of the surface on which the photostimulable phosphor layer is formed, the first step is performed,
Next, a second physical quantity related to the shape of the surface of the photostimulable phosphor layer is measured,
The method of manufacturing a radiation image conversion panel, wherein the second step is performed when a comparison result between the first physical quantity and the second physical quantity satisfies a predetermined condition. In the manufacturing method of the radiation image conversion panel according to claim 1,
As the first physical quantity, the surface roughness A of the surface to be formed is
As the second physical quantity, the surface roughness B of the surface of the photostimulable phosphor layer,
As the predetermined condition,
0 ≦ Rab <2.0, and 0 ≦ Rab · Z <3.0
(However, Rab is the average value of | A−B | [μm], Rab · Z is the maximum value of | A−B | [μm])
The manufacturing method of the radiographic image conversion panel characterized by using this. In the manufacturing method of the radiographic image conversion panel of Claim 1 or 2,
As the substrate, the shape of the surface to be formed is 0.05 <Ra <2.0, and (where Ra is the average roughness [μm] of the surface to be formed)
0.1 <Rz · D <3.0
(However, Rz · D is the maximum roughness of the surface to be formed [μm])
The manufacturing method of the radiographic image conversion panel characterized by using what satisfy | fills. In the manufacturing method of the radiation image conversion panel according to claim 3,
A radiation image conversion panel, wherein the first step is performed on a substrate whose shape of the surface to be formed satisfies the condition after cleaning the substrate whose shape of the surface to be formed does not satisfy the condition. Manufacturing method. A first step of forming a photostimulable phosphor layer on at least one of the front and back surfaces of the substrate;
A method for producing a radiation image conversion panel comprising a second step of sealing the surface of the photostimulable phosphor layer with a protective film,
Performing the first step after measuring the position of the concavo-convex portion on the surface on which the photostimulable phosphor layer is formed, on the front and back surfaces of the substrate,
Next, the position of the uneven portion on the surface of the photostimulable phosphor layer is measured,
The method of manufacturing a radiation image conversion panel, wherein the second step is performed when the position of the uneven portion on the surface of the photostimulable phosphor layer corresponds to the position of the uneven portion on the surface to be formed. A first manufacturing part for forming a stimulable phosphor layer on at least one of the front and back surfaces of the substrate;
A radiation image conversion panel manufacturing apparatus having a second manufacturing unit that seals the surface of the photostimulable phosphor layer with a protective film,
A first measuring device that measures a physical quantity related to a shape of a surface on which the photostimulable phosphor layer is formed, of the front and back surfaces of the substrate before the photostimulable phosphor layer is formed;
A second measuring device for measuring a second physical quantity related to the shape of the surface of the photostimulable phosphor layer;
Manufacturing a radiation image conversion panel, comprising: a second sorting device that sorts a substrate that satisfies a predetermined result of a comparison between the first physical quantity and the second physical quantity and that supplies the substrate to the second manufacturing unit. apparatus. In the manufacturing apparatus of the radiographic image conversion panel according to claim 6,
The first physical quantity is a surface roughness A of the surface to be formed,
The second physical quantity is a surface roughness B of the surface of the photostimulable phosphor layer,
The predetermined condition is
0 ≦ Rab <2.0, and 0 ≦ Rab · Z <3.0
(However, Rab is the average value of | A−B | [μm], Rab · Z is the maximum value of | A−B | [μm])
An apparatus for manufacturing a radiation image conversion panel, wherein In the manufacturing apparatus of the radiation image conversion panel of Claim 6 or 7,
Based on the measurement result of the first measuring device, the shape of the surface to be formed is 0.05 <Ra <2.0, and (where Ra is the average roughness [μm] of the surface to be formed)
0.1 <Rz · D <3.0
(However, Rz · D is the maximum roughness of the surface to be formed [μm])
An apparatus for producing a radiation image conversion panel, comprising: a first sorting device that sorts a substrate that satisfies the conditions and supplies the substrate to the first manufacturing unit. In the manufacturing apparatus of the radiographic image conversion panel according to claim 8,
A cleaning device for cleaning the substrate whose shape of the surface to be formed does not satisfy the predetermined condition;
The apparatus for manufacturing a radiation image conversion panel, wherein the first measuring device measures the physical quantity related to the shape of the surface to be formed after cleaning by the cleaning device, and transmits the measurement result to the first sorting device. . A first manufacturing part for forming a stimulable phosphor layer on at least one of the front and back surfaces of the substrate;
A radiation image conversion panel manufacturing apparatus having a second manufacturing unit that seals the surface of the photostimulable phosphor layer with a protective film,
A third measuring device that measures the position of the concavo-convex portion on the surface on which the photostimulable phosphor layer is formed, of the front and back surfaces of the substrate before the photostimulable phosphor layer is formed;
A fourth measuring device for measuring the position of the concavo-convex portion on the surface of the photostimulable phosphor layer before sealing with the protective film;
A third sorting device for sorting the substrate and supplying it to the second manufacturing unit;
The third sorting device includes:
The radiation image, wherein the substrate is supplied to the second manufacturing unit when the position of the uneven portion on the surface of the photostimulable phosphor layer corresponds to the position of the uneven portion on the surface to be formed. Conversion panel manufacturing equipment. A first manufacturing part for forming a stimulable phosphor layer on at least one of the front and back surfaces of the substrate;
A method for producing a radiation image conversion panel having a second production part for sealing the surface of the photostimulable phosphor layer with a protective film,
An observation device that observes the state of the surface of the photostimulable phosphor layer by an instantaneous light emission change or a transmission signal change of ultraviolet light before being sealed with the protective film;
A radiation image conversion panel manufacturing method comprising: a fourth sorting device that sorts the substrate based on an observation result of the observation device and supplies the substrate to the second manufacturing unit. In the manufacturing method of the radiographic image conversion panel of Claim 11,
The method for producing a radiation image conversion panel, wherein the wavelength of the ultraviolet light is equal to or less than the wavelength of instantaneous light emission energy.

Images