JP2005154427A5 - - Google Patents

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Publication number
JP2005154427A5
JP2005154427A5 JP2004314525A JP2004314525A JP2005154427A5 JP 2005154427 A5 JP2005154427 A5 JP 2005154427A5 JP 2004314525 A JP2004314525 A JP 2004314525A JP 2004314525 A JP2004314525 A JP 2004314525A JP 2005154427 A5 JP2005154427 A5 JP 2005154427A5
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JP
Japan
Prior art keywords
group
carbon atoms
alkyl group
cyclic hydrocarbon
hydrocarbon group
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2004314525A
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English (en)
Japanese (ja)
Other versions
JP5022563B2 (ja
JP2005154427A (ja
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Publication date
Application filed filed Critical
Priority to JP2004314525A priority Critical patent/JP5022563B2/ja
Priority claimed from JP2004314525A external-priority patent/JP5022563B2/ja
Publication of JP2005154427A publication Critical patent/JP2005154427A/ja
Publication of JP2005154427A5 publication Critical patent/JP2005154427A5/ja
Application granted granted Critical
Publication of JP5022563B2 publication Critical patent/JP5022563B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2004314525A 2003-10-31 2004-10-28 (メタ)アクリル酸エステルおよびその原料化合物 Active JP5022563B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2004314525A JP5022563B2 (ja) 2003-10-31 2004-10-28 (メタ)アクリル酸エステルおよびその原料化合物

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003372356 2003-10-31
JP2003372356 2003-10-31
JP2004314525A JP5022563B2 (ja) 2003-10-31 2004-10-28 (メタ)アクリル酸エステルおよびその原料化合物

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011023175A Division JP2011137163A (ja) 2003-10-31 2011-02-04 (メタ)アクリル酸エステルおよびその原料化合物

Publications (3)

Publication Number Publication Date
JP2005154427A JP2005154427A (ja) 2005-06-16
JP2005154427A5 true JP2005154427A5 (US20040106767A1-20040603-C00005.png) 2007-08-16
JP5022563B2 JP5022563B2 (ja) 2012-09-12

Family

ID=34741269

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004314525A Active JP5022563B2 (ja) 2003-10-31 2004-10-28 (メタ)アクリル酸エステルおよびその原料化合物

Country Status (1)

Country Link
JP (1) JP5022563B2 (US20040106767A1-20040603-C00005.png)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW200604740A (en) * 2004-03-08 2006-02-01 Rohm & Haas Elect Mat Cyanoadamantyl compounds and polymers and photoresists comprising same
EP1586944A1 (en) * 2004-03-09 2005-10-19 Rohm and Haas Electronic Materials, L.L.C. Cyanoadamantyl compounds and polymers
EP1731504A4 (en) * 2004-04-02 2007-11-28 Idemitsu Kosan Co ADAMANTAN DERIVATIVE AND METHOD FOR THE PRODUCTION THEREOF
JP4810111B2 (ja) * 2005-03-22 2011-11-09 株式会社トクヤマ アルコラート化合物の製造方法
TWI477909B (zh) 2006-01-24 2015-03-21 Fujifilm Corp 正型感光性組成物及使用它之圖案形成方法
JP4991326B2 (ja) * 2006-01-24 2012-08-01 富士フイルム株式会社 ポジ型感光性組成物及びそれを用いたパターン形成方法
JP6074834B2 (ja) * 2012-03-15 2017-02-08 三菱レイヨン株式会社 レジスト材料の評価方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4296033B2 (ja) * 2003-05-15 2009-07-15 富士フイルム株式会社 ポジ型レジスト組成物

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