JP2005151267A - Capacitor microphone unit and manufacturing method thereof - Google Patents

Capacitor microphone unit and manufacturing method thereof Download PDF

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JP2005151267A
JP2005151267A JP2003387328A JP2003387328A JP2005151267A JP 2005151267 A JP2005151267 A JP 2005151267A JP 2003387328 A JP2003387328 A JP 2003387328A JP 2003387328 A JP2003387328 A JP 2003387328A JP 2005151267 A JP2005151267 A JP 2005151267A
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diaphragm
fixed pole
conductive
microphone unit
fixed
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JP4125664B2 (en
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Yutaka Akino
裕 秋野
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Audio Technica KK
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Abstract

<P>PROBLEM TO BE SOLVED: To assemble a push-pull type capacitor microphone unit with an inexpensive part cost and with satisfactory workability by eliminating the necessity of screws and a conductive spacer. <P>SOLUTION: The push-pull type capacitor microphone unit 10A comprises first and second fixed poles 20a, 20b having the same diameter to which an electrode leading ring 22 is engaged via an electric insulating body 21 therearound; a single diaphragm 40 having a metallic film on each of both surfaces; and conductive spacers 300 disposed on each circumferential edge of both the surfaces of the diaphragm 40 oppositely to the ring 22. The first fixed pole 20a and the second fixed pole 20b are coaxially disposed oppositely to each other on both the surfaces of the diaphragm 40 via the conductive spacers 300. In this unit 10A, a conductive adhesive in which conductive particles are contained in a thermosetting composite resin is used as the conductive spacers 300. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

本発明はコンデンサマイクロホンユニットおよびその製造方法に関し、さらに詳しく言えば、一対の固定極の間に振動板を配置したプッシュプル型のコンデンサマイクロホンユニットおよびその製造方法に関するものである。   The present invention relates to a condenser microphone unit and a manufacturing method thereof, and more particularly to a push-pull type condenser microphone unit in which a diaphragm is disposed between a pair of fixed poles and a manufacturing method thereof.

特許文献1にも記載されているように、プッシュプル型のコンデンサマイクロホンは固定極がひとつであるシングル型のコンデンサマイクロホンに比べて入力歪みなどが少なく特性的にはかなり優れているが、組立および調整が困難であり、かつ、高価であることが難点とされている。   As described in Patent Document 1, the push-pull type condenser microphone has less input distortion and the like as compared with a single type condenser microphone having a single fixed pole, but is considerably superior in characteristics. Adjustment is difficult and expensive.

プッシュプル型コンデンサマイクロホンにも特許文献1に記載のものを含めて種々の構造のものが存在するが、ここでは従来例として特異な固定極(周辺に電気絶縁体を介して環状の電極引出リングが嵌着された固定極)を備えているマイクロホンユニットについて説明する。   There are various types of push-pull condenser microphones, including those described in Patent Document 1, but here, as a conventional example, a specific fixed pole (annular electrode extraction ring is formed via an electric insulator around the periphery). A microphone unit provided with a fixed pole) is described.

図8はその完成体を示す断面図で、このマイクロホンユニット10は第1および第2の2つの固定極20a,20bと、それらの間に一対の導電性スペーサ30,30を介して挟持される1枚の振動板(ダイヤフラム)40とを備えている。図9(a)に第1固定極20aの平面図,同図(b)にその断面図を示し、図10(a)に第2固定極20bの平面図,同図(b)にその断面図を示す。また、図11(a)に導電性スペーサ30の平面図,同図(b)にその断面図を示す。   FIG. 8 is a cross-sectional view showing the completed body. The microphone unit 10 is sandwiched between the first and second fixed poles 20a and 20b and a pair of conductive spacers 30 and 30 therebetween. One diaphragm (diaphragm) 40 is provided. 9A is a plan view of the first fixed pole 20a, FIG. 10B is a sectional view thereof, FIG. 10A is a plan view of the second fixed pole 20b, and FIG. The figure is shown. FIG. 11A shows a plan view of the conductive spacer 30, and FIG. 11B shows a cross-sectional view thereof.

第1固定極20aと第2固定極20bはともに例えば真鍮製の円盤体からなり、この円盤体には振動板40に対して音波を伝える複数の音孔20hが形成されている。第1固定極20aと第2固定極20bの周りには、例えばポリカーボネイトからなる電気絶縁体21を介して例えば真鍮製の電極引出リング22がそれぞれ嵌着されている。   Both the first fixed pole 20a and the second fixed pole 20b are made of, for example, a brass disk, and a plurality of sound holes 20h for transmitting sound waves to the diaphragm 40 are formed in the disk. Around the first fixed pole 20a and the second fixed pole 20b, for example, brass electrode extraction rings 22 are fitted via electric insulators 21 made of, for example, polycarbonate.

この場合、第1固定極20a側の電極引出リング22には雌ネジ孔22aが形成されているのに対して、第2固定極20b側の電極引出リング22にはネジ挿通孔22bが穿設されている。導電性スペーサ30は電極引出リング22と同径に形成された例えばステンレス材のリング体からなり、複数のネジ挿通孔30aを備えている。   In this case, a female screw hole 22a is formed in the electrode lead-out ring 22 on the first fixed pole 20a side, whereas a screw insertion hole 22b is formed in the electrode lead-out ring 22 on the second fixed pole 20b side. Has been. The conductive spacer 30 is formed of, for example, a stainless steel ring body having the same diameter as the electrode extraction ring 22 and includes a plurality of screw insertion holes 30a.

雌ネジ孔22a,ネジ挿通孔22bおよびネジ挿通孔30aは同一ピッチで配置されている。なお、振動板40には例えばポリエチレンテフタレート(PET)もしくはポリフェニレンサルファイド(PPS)などをベースフィルムとし、その両面に金属膜(例えば金)を蒸着した薄膜が用いられる。   The female screw hole 22a, the screw insertion hole 22b, and the screw insertion hole 30a are arranged at the same pitch. The diaphragm 40 is a thin film in which, for example, polyethylene terephthalate (PET) or polyphenylene sulfide (PPS) is used as a base film and a metal film (for example, gold) is vapor-deposited on both surfaces thereof.

組立は次のようにして行われる。図12に示すように、振動板40を固定極20a,20bよりも大径の支持リング41に貼り付け、その両面側に導電性スペーサ30,30を介して第1固定極20aと第2固定極20bとを配置する。   The assembly is performed as follows. As shown in FIG. 12, the diaphragm 40 is affixed to a support ring 41 having a diameter larger than that of the fixed poles 20a and 20b, and the first fixed pole 20a and the second fixed pole are provided on both sides thereof via conductive spacers 30 and 30. The pole 20b is disposed.

そして、支持リング41に荷重をかけて振動板40の張力を調整したのち、第1固定極20aと第2固定極20bとの間に振動板40を挟み込み、第2固定極20b側のネジ挿通孔22bより雄ネジ50を挿通して第1固定極20a側の雌ネジ孔22aに強固に締め付ける。最後に、振動板40のはみ出している余剰部分を切断する。   After the load is applied to the support ring 41 to adjust the tension of the diaphragm 40, the diaphragm 40 is sandwiched between the first fixed pole 20a and the second fixed pole 20b, and the screw is inserted into the second fixed pole 20b. The male screw 50 is inserted through the hole 22b and firmly tightened into the female screw hole 22a on the first fixed pole 20a side. Finally, the protruding excess portion of the diaphragm 40 is cut.

これにより、図8において振動板10の上面側の金属膜は上側の導電性スペーサ30および第2固定極20b側の電極引出リング22から引き出され、図示しないインピーダンス変換器などに接続される。また、下面側の金属膜は下側の導電性スペーサ30および第1固定極20a側の電極引出リング22から引き出され、図示しない別のインピーダンス変換器などに接続される。   8, the metal film on the upper surface side of the diaphragm 10 is drawn out from the upper conductive spacer 30 and the electrode lead-out ring 22 on the second fixed pole 20b side, and is connected to an impedance converter (not shown). Further, the metal film on the lower surface side is extracted from the lower conductive spacer 30 and the electrode extraction ring 22 on the first fixed pole 20a side, and is connected to another impedance converter (not shown).

実願昭61−56612号(実開昭62−169599号)のマイクロフィルムMicrofilm of Japanese Utility Model No. 61-56612 (Japanese Utility Model Application No. 62-169599)

しかしながら、上記従来例によると、まず組立が困難であるという問題点がある。すなわち、ネジを多用しているため組立に時間がかかる。そればかりでなく、振動板40に雄ネジ50を通す孔を開けるときに張力が変化してしまう。また、振動板40に孔を開ける必要があるため6μm以上の膜厚が必要であり、薄い振動板を用いることができない。   However, according to the above conventional example, there is a problem that assembly is difficult first. That is, since many screws are used, it takes time to assemble. In addition, the tension changes when a hole for passing the male screw 50 through the diaphragm 40 is opened. Moreover, since it is necessary to make a hole in the diaphragm 40, a film thickness of 6 μm or more is necessary, and a thin diaphragm cannot be used.

次に、別の問題点として高価な部品が必要とされる。これに該当する部品とは導電性スペーサ30である。導電性スペーサ30には、上記したように例えばステンレス製のリング体が用いられるが、これにはきわめて高い平坦度が求められるため、エッジングなどの方法で作成する必要があり、これがコストアップの要因となっている。   Next, as another problem, expensive parts are required. The part corresponding to this is the conductive spacer 30. As described above, for example, a stainless steel ring body is used for the conductive spacer 30. However, since this requires extremely high flatness, it is necessary to prepare the ring by a method such as edging. It has become.

したがって、本発明の課題は、プッシュプル型のコンデンサマイクロホンユニットにおいて、ネジおよび導電性スペーサを不要として、部品コストが安価でしかも作業性よく組み立てることができるようにすることにある。   Accordingly, it is an object of the present invention to eliminate the need for screws and conductive spacers in a push-pull type condenser microphone unit, so that the parts can be assembled at low cost and with good workability.

上記課題を解決するため、本願の第1発明は、周辺に電気絶縁体を介して電極引出リングが嵌着された同一径の第1および第2固定極と、両面に金属膜を有する1枚の振動板と、上記振動板の両面の各周縁部に上記電極引出リングと対向的に配置される導電性スペーサとを含み、上記導電性スペーサを介して上記振動板の両面側に上記第1固定極と上記第2固定極とを同軸的に対向配置してなるプッシュプル型のコンデンサマイクロホンユニットにおいて、上記導電性スペーサとして、熱硬化性合成樹脂内に導電性粒子を含有させた導電性接着材を用いることを特徴としている。   In order to solve the above-mentioned problem, the first invention of the present application is a single sheet having first and second fixed electrodes having the same diameter with an electrode extraction ring fitted through an electric insulator in the periphery, and metal films on both surfaces. And a conductive spacer disposed opposite to the electrode extraction ring at each peripheral edge of both sides of the diaphragm, and the first diaphragm is disposed on both sides of the diaphragm via the conductive spacer. In a push-pull condenser microphone unit in which a fixed electrode and the second fixed electrode are coaxially opposed to each other, a conductive adhesive containing conductive particles in a thermosetting synthetic resin as the conductive spacer It is characterized by using materials.

本発明において、上記導電性接着材は、液状の塗布型もしくはフィルム状のいずれであってもよい。上記導電性接着材に含まれる導電性粒子は、金属球もしくは合成樹脂製の球体を核としてその表面に金属皮膜を形成した球体のいずれであってもよい。   In the present invention, the conductive adhesive may be either a liquid coating type or a film. The conductive particles contained in the conductive adhesive may be metal spheres or spheres having a metal film formed on the surface of a sphere made of a synthetic resin as a nucleus.

また、本願の第2発明は、上記プッシュプル型のコンデンサマイクロホンユニットの製造方法において、上記第1固定極の電極引出リングの片面に熱硬化性合成樹脂内に導電性粒子を含有させた導電性接着材を配置する第1工程と、上記振動板を上記固定極よりも大径の支持リングに貼り付け、上記支持リングよりも小径でかつ上記固定極よりも大径であって表面が平坦な基台上に載置して上記振動板にかける張力を調整した状態で、上記振動板の一方の面上に上記第1固定極を載置し加圧して上記導電性接着材により上記振動板と上記第1固定極とを電気的,機械的に接続する第2工程と、上記第2固定極の電極引出リングの片面に上記導電性接着材を配置し、上記基台から取り外した上記振動板の他方の面に対して加圧して上記導電性接着材により上記振動板と上記第2固定極とを電気的,機械的に接続する第3工程とを含むことを特徴としている。   According to a second aspect of the present invention, in the method for manufacturing the push-pull type condenser microphone unit, a conductive material in which conductive particles are contained in a thermosetting synthetic resin on one side of the electrode extraction ring of the first fixed electrode. A first step of arranging an adhesive and the diaphragm is attached to a support ring having a diameter larger than that of the fixed pole, and is smaller in diameter than the support ring and larger in diameter than the fixed pole and has a flat surface. In a state where the tension applied to the diaphragm is adjusted by placing on the base, the first fixed electrode is placed on one surface of the diaphragm and pressed, and the diaphragm is applied by the conductive adhesive. A second step of electrically and mechanically connecting the first fixed pole and the first fixed pole; and the vibration in which the conductive adhesive is disposed on one side of the electrode lead-out ring of the second fixed pole and removed from the base Apply pressure to the other side of the plate to It is characterized in that it comprises a third step of electrically and mechanically connecting the diaphragm and the second fixed electrode by wood.

上記第2発明において、上記第2工程後もしくは上記第3工程後に上記固定極からはみ出している上記振動板の余剰部分が切断される。   In the second invention, after the second step or the third step, the surplus portion of the diaphragm protruding from the fixed pole is cut.

本発明によれば、ネジ止め作業が一切不要であるため組立作業性を大幅に改善することができる。また、振動板と固定極との間隔は、導電性接着材に含まれている導電性粒子によって確保されるため、平坦度の高い金属板からなる導電性スペーサが不要で、その分コストダウンを図ることができる。   According to the present invention, since no screwing work is required, the assembly workability can be greatly improved. In addition, since the distance between the diaphragm and the fixed electrode is ensured by the conductive particles contained in the conductive adhesive, there is no need for conductive spacers made of a metal plate with high flatness, and the cost can be reduced accordingly. Can be planned.

また、振動板にネジを通すための孔開け加工が不要となるため、より薄い振動板を用いることができ、その結果として低域限界が低くなり性能を向上させることができる。径方向の寸法ではネジ挿通孔が不要であるため、同一口径のユニットを対比した場合、相対的に有効振動板面積を大きく設計することができるため、感度およびS/N比の改善が図れることになる。   In addition, since a drilling process for passing a screw through the diaphragm is not required, a thinner diaphragm can be used, and as a result, the low-frequency limit is lowered and the performance can be improved. Since screw insertion holes are not required for radial dimensions, when comparing units with the same diameter, the effective diaphragm area can be designed to be relatively large, so that sensitivity and S / N ratio can be improved. become.

次に、図1ないし図7を参照して本発明の実施形態について説明するが、本発明はこれに限定されるものではない。なお、この実施形態の説明において、先に説明した従来例と実質的に同一であってよい構成要素にはそれと同じ参照符号を用いている。   Next, embodiments of the present invention will be described with reference to FIGS. 1 to 7, but the present invention is not limited thereto. In the description of this embodiment, the same reference numerals are used for components that may be substantially the same as those of the conventional example described above.

図1に本発明によるプッシュプル型のコンデンサマイクロホンユニット10Aの完成体の断面を示すが、その各構成要素を組立手順の一例にしたがって説明する。まず、図2((a)は平面図,(b)はその断面図)に示す構成の固定極を2つ用意する。その一方を第1固定極20a,他方を第2固定極20bとすると、本発明において第1,第2固定極20a,20bは同一構成であってよい。   FIG. 1 shows a cross section of a finished product of a push-pull type condenser microphone unit 10A according to the present invention. Each component will be described according to an example of an assembly procedure. First, two fixed poles having the structure shown in FIG. 2 ((a) is a plan view and (b) is a sectional view thereof) are prepared. If one of them is the first fixed pole 20a and the other is the second fixed pole 20b, in the present invention, the first and second fixed poles 20a and 20b may have the same configuration.

すなわち、第1,第2固定極20a,20bはともに例えば真鍮製の円盤体からなり、この円盤体には振動板40に対して音波を伝える複数の音孔20hが形成されている。第1固定極20aと第2固定極20bの周りには、例えばポリカーボネイトからなる電気絶縁体21を介して例えば真鍮製の電極引出リング22がそれぞれ嵌着されているが、本発明においては、いずれの電極引出リング22にも雌ネジ孔やネジ挿通孔を設ける必要はない。   That is, the first and second fixed poles 20 a and 20 b are both made of, for example, a brass disk, and a plurality of sound holes 20 h for transmitting sound waves to the diaphragm 40 are formed in the disk. For example, brass electrode lead-out rings 22 are fitted around the first fixed pole 20a and the second fixed pole 20b via an electrical insulator 21 made of polycarbonate, for example. The electrode lead-out ring 22 need not be provided with a female screw hole or a screw insertion hole.

次に、図3に示すように、第1固定極20a側の電極引出リング22の片面に導電性接着材300を塗布する。図7(a)の拡大図に電極引出リング22の片面に導電性接着材300を塗布した状態を示す。   Next, as shown in FIG. 3, a conductive adhesive 300 is applied to one surface of the electrode extraction ring 22 on the first fixed electrode 20 a side. The enlarged view of FIG. 7A shows a state in which the conductive adhesive 300 is applied to one surface of the electrode extraction ring 22.

導電性接着材300は、例えばエポキシ系などの熱硬化性樹脂310内に多数の導電性粒子320を混合した接着材(異方性導電接着材)で、この例では液状の塗布型を用いているが、フィルム状とした導電性接着フィルムも使用できる。   The conductive adhesive 300 is an adhesive (an anisotropic conductive adhesive) in which a large number of conductive particles 320 are mixed in a thermosetting resin 310 such as an epoxy-based resin. In this example, a liquid coating mold is used. However, a film-like conductive adhesive film can also be used.

導電性粒子320は、金属球,合成樹脂製の球体を核としてその表面に金属皮膜(例えば金めっき)を形成した導電性樹脂ボールのいずれであってもよい。導電性樹脂ボールとしては積水化学工業社製の導電性微粒子「ミクロパールAU(商品名)」などがある。本発明において、導電性粒子320の粒径は0.1mm程度であることが好ましい。   The conductive particles 320 may be either metal spheres or conductive resin balls having a synthetic resin sphere as a core and a metal film (for example, gold plating) formed on the surface thereof. Examples of the conductive resin ball include conductive fine particles “Micropearl AU (trade name)” manufactured by Sekisui Chemical Co., Ltd. In the present invention, the particle size of the conductive particles 320 is preferably about 0.1 mm.

次に、図4に示すように、振動板40を支持リング41に貼り付けて表面が平坦な基台100上に載置する。振動板40は、先に説明した従来例と同じく、例えばポリエチレンテフタレート(PET)もしくはポリフェニレンサルファイド(PPS)などをベースフィルムとし、その両面に金属膜(例えば金)を蒸着した薄膜(一例としてPETの場合4μm,PPSの場合2μm)であってよいが、本発明においては振動板40にネジ挿通孔を設ける必要はない。   Next, as shown in FIG. 4, the diaphragm 40 is attached to the support ring 41 and placed on the base 100 having a flat surface. The diaphragm 40 is a thin film (for example, PET as an example) in which, for example, polyethylene terephthalate (PET) or polyphenylene sulfide (PPS) is used as a base film, and a metal film (for example, gold) is vapor-deposited on both sides thereof. In the present invention, it is not necessary to provide a screw insertion hole in the diaphragm 40.

そして、支持リング41に所定の荷重をかけて振動板40の張力を調整した状態で、第1固定極20aの導電性接着材300が塗布された面を振動板40と対向させて好ましくは加熱下において圧着する。   Then, in a state where a predetermined load is applied to the support ring 41 and the tension of the diaphragm 40 is adjusted, the surface of the first fixed electrode 20a to which the conductive adhesive 300 is applied is preferably opposed to the diaphragm 40 and heated. Crimp below.

これにより、図7(b)の拡大図に示すように、熱硬化性樹脂310内において導電性粒子320がほぼ平面的に並べられ、振動板40と第1固定極20aとの間隔が導電性粒子320の粒子径である例えば0.1mmに規定されるとともに、導電性粒子320を介して振動板40の一方の面側の金属膜と第1固定極20a側の電極引出リング22とが電気的に接続される。   As a result, as shown in the enlarged view of FIG. 7B, the conductive particles 320 are arranged almost planarly in the thermosetting resin 310, and the distance between the diaphragm 40 and the first fixed electrode 20a is made conductive. The particle diameter of the particle 320 is specified to be, for example, 0.1 mm, and the metal film on one surface side of the diaphragm 40 and the electrode extraction ring 22 on the first fixed electrode 20a side are electrically connected via the conductive particle 320. Connected.

なお、支持リング41を介して振動板40の張力を調整し、また、振動板40上に第1固定極20aを載置する関係上、支持リング41,基台100および第1固定極20aの大きさは、第1固定極20a<基台100<支持リング41の順となる。   The tension of the diaphragm 40 is adjusted via the support ring 41, and the support ring 41, the base 100, and the first fixed pole 20a are placed on the diaphragm 40 because the first fixed pole 20a is placed on the diaphragm 40. The size is in the order of the first fixed pole 20a <base 100 <support ring 41.

熱硬化性樹脂310の硬化をまって、一体化された振動板40と第1固定極20aとを基台100から取り出して、図5に示すように、振動板40の第1固定極20aからはみ出している余剰部分を切断する。   After the thermosetting resin 310 is cured, the integrated diaphragm 40 and the first fixed pole 20a are taken out from the base 100, and as shown in FIG. 5, from the first fixed pole 20a of the diaphragm 40. Cut off the excess part that protrudes.

次に、図6に示すように、第2固定極20bの電極引出リング22の片面に導電性接着材300を塗布し、第1固定極20aを支持台として第2固定極20bを振動板40の他方の面に圧着する。   Next, as shown in FIG. 6, a conductive adhesive 300 is applied to one surface of the electrode extraction ring 22 of the second fixed electrode 20 b, and the second fixed electrode 20 b is used as a support base and the second fixed electrode 20 b is used as the diaphragm 40. Crimp to the other side of

この圧着により、上記と同じく振動板40と第2固定極20bとの間隔が導電性粒子320の粒子径である例えば0.1mmに規定されるとともに、導電性粒子320を介して振動板40の他方の面側の金属膜と第2固定極20b側の電極引出リング22とが電気的に接続され、図1に示すプッシュプル型のコンデンサマイクロホンユニット10Aの完成体が得られる。   As a result of this pressure bonding, the distance between the diaphragm 40 and the second fixed electrode 20b is regulated to 0.1 mm, which is the particle diameter of the conductive particles 320, as described above, and the diaphragm 40 is interposed via the conductive particles 320. The metal film on the other surface side and the electrode lead-out ring 22 on the second fixed pole 20b side are electrically connected to obtain a finished product of the push-pull type capacitor microphone unit 10A shown in FIG.

以上、本発明の構成を組立手順の一例とともに説明したが、例えば振動板40の余剰部分の切断については図6の工程後に行ってもよいし、場合によっては図4での圧着工程後に行うこともできる。また、本発明においては、電極引出リング22にネジ挿通孔や雌ネジ孔を積極的に設ける必要はないが、本発明は電極引出リング22にネジ挿通孔や雌ネジ孔が設けられている場合にも適用可能である。   As described above, the configuration of the present invention has been described together with an example of the assembling procedure. For example, the cutting of the surplus portion of the diaphragm 40 may be performed after the process of FIG. 6, or may be performed after the crimping process of FIG. You can also. In the present invention, it is not necessary to positively provide a screw insertion hole or a female screw hole in the electrode lead-out ring 22, but in the present invention, a screw insertion hole or a female screw hole is provided in the electrode lead-out ring 22. It is also applicable to.

本発明によるプッシュプル型のコンデンサマイクロホンユニットの実施形態を説明するための断面図。Sectional drawing for demonstrating embodiment of the push pull type | mold condenser microphone unit by this invention. 上記コンデンサマイクロホンユニットが備える固定極を示す(a)平面図,(b)断面図。The (a) top view and (b) sectional view showing the fixed pole with which the above-mentioned condenser microphone unit is provided. 上記コンデンサマイクロホンユニットの組立手順を示す説明図。Explanatory drawing which shows the assembly procedure of the said capacitor | condenser microphone unit. 上記コンデンサマイクロホンユニットの組立手順を示す説明図。Explanatory drawing which shows the assembly procedure of the said capacitor | condenser microphone unit. 上記コンデンサマイクロホンユニットの組立手順を示す説明図。Explanatory drawing which shows the assembly procedure of the said capacitor | condenser microphone unit. 上記コンデンサマイクロホンユニットの組立手順を示す説明図。Explanatory drawing which shows the assembly procedure of the said capacitor | condenser microphone unit. 本発明において、上記固定極の電極引出リングに塗布された導電性接着材の(a)圧着前の状態を示す拡大断面図,(b)圧着後の状態を示す拡大断面図。In this invention, (a) The expanded sectional view which shows the state before the crimping | compression-bonding of the conductive adhesive apply | coated to the electrode extraction ring of the said fixed pole, (b) The expanded sectional view which shows the state after a crimping | compression-bonding. 従来例として挙げたプッシュプル型のコンデンサマイクロホンユニットを示す断面図。Sectional drawing which shows the push pull type | mold condenser microphone unit mentioned as a prior art example. 上記従来例が備えている第1固定極を示す(a)平面図,(b)断面図。The (a) top view and (b) sectional view showing the 1st fixed pole with which the above-mentioned conventional example is provided. 上記従来例が備えている第2固定極を示す(a)平面図,(b)断面図。The (a) top view and (b) sectional view showing the 2nd fixed pole with which the above-mentioned conventional example is provided. 上記従来例が備えている導電性スペーサを示す(a)平面図,(b)断面図。The conductive spacer with which the said prior art example is equipped, (a) Top view and (b) Sectional drawing. 上記従来例の組立手順を説明する分解断面図。The exploded sectional view explaining the assembly procedure of the above-mentioned conventional example.

符号の説明Explanation of symbols

10A プッシュプル型コンデンサマイクロホンユニット
20a,20b 固定極
20h 音孔
21 電気絶縁体
22 電極引出リング
40 振動板
41 支持リング
100 基台
300 導電性接着材
310 熱硬化性樹脂
320 導電性粒子
10A Push-pull condenser microphone unit 20a, 20b Fixed electrode 20h Sound hole 21 Electrical insulator 22 Electrode extraction ring 40 Diaphragm 41 Support ring 100 Base 300 Conductive adhesive 310 Thermosetting resin 320 Conductive particle

Claims (5)

周辺に電気絶縁体を介して電極引出リングが嵌着された同一径の第1および第2固定極と、両面に金属膜を有する1枚の振動板と、上記振動板の両面の各周縁部に上記電極引出リングと対向的に配置される導電性スペーサとを含み、上記導電性スペーサを介して上記振動板の両面側に上記第1固定極と上記第2固定極とを同軸的に対向配置してなるプッシュプル型のコンデンサマイクロホンユニットにおいて、
上記導電性スペーサとして、熱硬化性合成樹脂内に導電性粒子を含有させた導電性接着材を用いることを特徴とするコンデンサマイクロホンユニット。
First and second fixed poles having the same diameter with an electrode extraction ring fitted in the periphery via an electrical insulator, one diaphragm having metal films on both surfaces, and each peripheral portion on both surfaces of the diaphragm And a conductive spacer disposed opposite to the electrode extraction ring, and the first fixed pole and the second fixed pole are coaxially opposed to both surfaces of the diaphragm via the conductive spacer. In the push-pull type condenser microphone unit,
A capacitor microphone unit characterized in that a conductive adhesive containing conductive particles in a thermosetting synthetic resin is used as the conductive spacer.
上記導電性接着材が液状の塗布型である請求項1に記載のコンデンサマイクロホンユニット。   The condenser microphone unit according to claim 1, wherein the conductive adhesive is a liquid coating type. 上記導電性接着材がフィルム状である請求項1に記載のコンデンサマイクロホンユニット。   The condenser microphone unit according to claim 1, wherein the conductive adhesive is a film. 周辺に電気絶縁体を介して電極引出リングが嵌着された同一径の第1および第2固定極と、両面に金属膜を有する1枚の振動板と、上記振動板の両面の各周縁部に上記電極引出リングと対向的に配置される導電性スペーサとを含み、上記導電性スペーサを介して上記振動板の両面側に上記第1固定極と上記第2固定極とを同軸的に対向配置してなるプッシュプル型のコンデンサマイクロホンユニットの製造方法において、
上記第1固定極の電極引出リングの片面に熱硬化性合成樹脂内に導電性粒子を含有させた導電性接着材を配置する第1工程と、
上記振動板を上記固定極よりも大径の支持リングに貼り付け、上記支持リングよりも小径でかつ上記固定極よりも大径であって表面が平坦な基台上に載置して上記振動板にかける張力を調整した状態で、上記振動板の一方の面上に上記第1固定極を載置し加圧して上記導電性接着材により上記振動板と上記第1固定極とを電気的,機械的に接続する第2工程と、
上記第2固定極の電極引出リングの片面に上記導電性接着材を配置し、上記基台から取り外した上記振動板の他方の面に対して加圧して上記導電性接着材により上記振動板と上記第2固定極とを電気的,機械的に接続する第3工程と、
を含むことを特徴とするコンデンサマイクロホンユニットの製造方法。
First and second fixed poles having the same diameter with an electrode extraction ring fitted in the periphery via an electrical insulator, one diaphragm having metal films on both surfaces, and each peripheral portion on both surfaces of the diaphragm And a conductive spacer disposed opposite to the electrode extraction ring, and the first fixed pole and the second fixed pole are coaxially opposed to both surfaces of the diaphragm via the conductive spacer. In the manufacturing method of the push-pull type condenser microphone unit formed,
A first step of disposing a conductive adhesive containing conductive particles in a thermosetting synthetic resin on one side of the electrode extraction ring of the first fixed electrode;
The vibration plate is affixed to a support ring having a diameter larger than that of the fixed pole, and is placed on a base having a smaller diameter than the support ring and a diameter larger than the fixed pole and having a flat surface. With the tension applied to the plate adjusted, the first fixed pole is placed on one surface of the diaphragm and pressed to electrically connect the diaphragm and the first fixed pole with the conductive adhesive. A second step of mechanically connecting;
The conductive adhesive is disposed on one surface of the electrode lead-out ring of the second fixed pole, and the other surface of the diaphragm removed from the base is pressurized and the diaphragm is connected to the diaphragm by the conductive adhesive. A third step of electrically and mechanically connecting the second fixed pole;
A method of manufacturing a condenser microphone unit.
上記第2工程後もしくは上記第3工程後に上記固定極からはみ出している上記振動板の余剰部分を切断する請求項4に記載のコンデンサマイクロホンユニットの製造方法。   5. The method of manufacturing a condenser microphone unit according to claim 4, wherein an excess portion of the diaphragm protruding from the fixed pole after the second step or the third step is cut.
JP2003387328A 2003-11-18 2003-11-18 Condenser microphone unit and manufacturing method thereof Expired - Fee Related JP4125664B2 (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006203749A (en) * 2005-01-24 2006-08-03 Audio Technica Corp Electrostatic type electroacoustic transducer, condenser microphone using the same, and manufacturing method of electrostatic type electroacoustic transducer
JP2007060337A (en) * 2005-08-25 2007-03-08 Seiko Epson Corp Electrostatic ultrasonic wave transducer and ultrasonic speaker using the same
JP2007068148A (en) * 2005-08-03 2007-03-15 Seiko Epson Corp Electrostatic ultrasonic transducer, ultrasonic speaker, audio signal reproduction method, electrode manufacturing method for use in ultrasonic transducer, ultrasonic transducer manufacturing method, superdirective acoustic system, and display device
JP2009218688A (en) * 2008-03-07 2009-09-24 Audio Technica Corp Electrostatic electroacoustic transducer, method of manufacturing the same and capacitor microphone

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006203749A (en) * 2005-01-24 2006-08-03 Audio Technica Corp Electrostatic type electroacoustic transducer, condenser microphone using the same, and manufacturing method of electrostatic type electroacoustic transducer
JP4601436B2 (en) * 2005-01-24 2010-12-22 株式会社オーディオテクニカ Electrostatic electroacoustic transducer, condenser microphone using the same, and manufacturing method of electrostatic electroacoustic transducer
JP2007068148A (en) * 2005-08-03 2007-03-15 Seiko Epson Corp Electrostatic ultrasonic transducer, ultrasonic speaker, audio signal reproduction method, electrode manufacturing method for use in ultrasonic transducer, ultrasonic transducer manufacturing method, superdirective acoustic system, and display device
JP4682927B2 (en) * 2005-08-03 2011-05-11 セイコーエプソン株式会社 Electrostatic ultrasonic transducer, ultrasonic speaker, audio signal reproduction method, ultrasonic transducer electrode manufacturing method, ultrasonic transducer manufacturing method, superdirective acoustic system, and display device
JP2007060337A (en) * 2005-08-25 2007-03-08 Seiko Epson Corp Electrostatic ultrasonic wave transducer and ultrasonic speaker using the same
JP4508040B2 (en) * 2005-08-25 2010-07-21 セイコーエプソン株式会社 Electrostatic ultrasonic transducer and ultrasonic speaker using the same
JP2009218688A (en) * 2008-03-07 2009-09-24 Audio Technica Corp Electrostatic electroacoustic transducer, method of manufacturing the same and capacitor microphone

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