JP2005147984A - Fluorescent x-ray spectrometer added with detector-moving mechanism - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluorescent X-ray spectrometer, capable of bringing a sample and a fluorescent X-ray detector within a close distance in fluorescent X-ray measurement to heighten fluorescent X-ray detection efficiency, while precluding the fluorescent X-ray detector from disturbing an observation, when observing the sample by a sample observing camera, and which is capable of improving thereby precision for analysis and measurement. <P>SOLUTION: A detector-moving mechanism 4 is added which can change the distance between the fluorescent X-ray detector 2 and the sample 3. The distance between the fluorescent X-ray detector 2 and the sample 3 is made large, when the sample 3 is observed by the sample observing camera 1, and the distance between the sample 3 and the fluorescent X-ray detector 2 is made short in the fluorescent X-ray measurement, by controlling the detector-moving mechanism 4. An image storing and regenerating device 7 is equipped further to display an image stored in the sample-observing camera 1, in the fluorescent X-ray measurement. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a fluorescent X-ray apparatus used for analysis and measurement equipped with a sample observation camera.

In a conventional fluorescent X-ray apparatus equipped with a sample observation camera, a sample observation camera is arranged directly above the sample vertical direction, and an excitation X-ray source and a fluorescent X-ray detector are arranged on both sides of the sample observation camera. The excitation X-rays are incident on the sample obliquely, and the excited fluorescent X-rays are detected from the oblique direction with respect to the sample. In this case, the fluorescent X-ray detector is fixed away from the sample so that the detection unit of the X-ray detector does not interfere with observation (see, for example, Patent Document 1).
JP-A 2000-46763, page 1-2, FIG.

  In a conventional fluorescent X-ray apparatus equipped with a sample observation camera, the fluorescent X-ray detector is removed from the sample so that the fluorescent X-ray detector detector does not interfere with the observation when the sample is observed with the sample observation camera. Since they are fixed apart, there is a problem in that the fluorescent X-ray detection efficiency decreases according to the distance, the fluorescent X-ray measurement intensity decreases, and the accuracy decreases.

  The present invention solves the above problems, and the fluorescent X-ray detector does not interfere with the observation when observing the sample with the sample observation camera, but the distance between the sample and the fluorescent X-ray detector when measuring the fluorescent X-ray. It is an object of the present invention to provide a fluorescent X-ray apparatus in which the accuracy of fluorescent X-ray detection is increased and the accuracy of analysis and measurement is improved.

  In the fluorescent X-ray apparatus equipped with the sample observation camera of the present invention, a detector moving mechanism capable of changing the distance between the fluorescent X-ray detector and the sample is added. Further, by controlling the detector moving mechanism, the distance between the fluorescent X-ray detector and the sample is increased when observing the sample with the sample observation camera, and between the sample and the fluorescent X-ray detector when measuring the fluorescent X-ray. A detector moving mechanism for reducing the distance was provided.

  Furthermore, an image storage / reproduction device for displaying an image captured by the sample observation camera at the time of fluorescent X-ray measurement is provided.

  In a fluorescent X-ray apparatus equipped with a sample observation camera, a detector moving mechanism that can change the distance between the fluorescent X-ray detector and the sample is added. The X-ray detector does not interfere with observation, and the distance between the sample and the X-ray fluorescence detector can be reduced during X-ray fluorescence measurement. Therefore, the X-ray detection efficiency is large and the accuracy is improved. can get. Further, at the time of fluorescent X-ray measurement, since the image stored by the sample observation camera is displayed, it is possible to easily reconfirm the measurement position.

  Furthermore, by changing the distance between the fluorescent X-ray detector and the sample, an effect of increasing the detectable fluorescent X-ray intensity range beyond the control range of the tube current of the X-ray tube can be obtained.

  Embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a configuration diagram of a fluorescent X-ray apparatus according to the present invention. In FIG. 1, the sample observation camera 1 and the fluorescent X-ray detector 2 face the sample 3. The sample observation camera 1 is disposed directly above the sample. The excitation X-ray source 5 and the fluorescent X-ray detector 2 are arranged on both sides of the sample observation camera 1 and face the sample obliquely. The sample 3 is irradiated with primary X-rays from the excitation X-ray source 5, and the excited fluorescent X-rays are detected by the fluorescent X-ray detector 2. Although the distance between the sample observation camera 1 and the sample 3 is fixed, the fluorescent X-ray detector 2 is fixed on the detector moving mechanism 4, and the distance between the fluorescent X-ray detector 2 and the sample 3 is the detector. It can be changed by the moving mechanism 4. The detector moving mechanism 4 increases the distance between the fluorescent X-ray detector and the sample when observing the sample with the sample observation camera 1 based on a signal from the control device 6, and the end of the detector moving mechanism 4 is the sample. Do not enter the field of view of the observation camera.

  In addition, the distance between the sample and the fluorescent X-ray detector is reduced in order to increase the detection efficiency during fluorescent X-ray measurement. The detector moving mechanism 4 can use an electric stage or a solenoid that can be stopped at the two or more positions. Since the electric stage or solenoid can be easily controlled electrically, the distance between the fluorescent X-ray detector 2 and the sample 3 can be easily changed between the sample observation with the sample observation camera and the fluorescent X-ray measurement. Can be changed. An image taken by the sample observation camera is stored in the image storage / reproduction device 7, and the stored image is output and displayed on the image display device 8.

  Furthermore, by changing the distance between the fluorescent X-ray detector 2 and the sample 3, the fluorescent X-ray intensity range that can be detected exceeds the control range of the tube current of the X-ray tube.

It is a block diagram of the fluorescent X-ray apparatus by this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Sample observation camera 2 Fluorescent X-ray detector 3 Sample 4 Detector moving mechanism 5 Excitation X-ray source 6 Control device 7 Image storage / reproduction device 8 Image display device

Claims (3)

  In a fluorescent X-ray apparatus comprising a sample observation camera disposed directly above a sample, and an excitation X-ray source and a fluorescent X-ray detector respectively disposed on both sides of the camera obliquely facing the sample, An X-ray fluorescence apparatus to which a detector moving mechanism for moving the X-ray fluorescence detector is added to change the distance between the X-ray fluorescence detector and the sample.   When the sample is observed with the sample observation camera, the distance between the fluorescent X-ray detector and the sample is increased, and when the fluorescent X-ray measurement is performed, the detector is controlled to reduce the distance between the sample and the fluorescent X-ray detector. The fluorescent X-ray apparatus according to claim 1, wherein a control device for performing the movement mechanism is provided.   The fluorescent X-ray apparatus according to claim 1, further comprising an image storage / reproduction device for storing and reproducing an image taken by the sample observation camera.

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