CN103308539A - Fluorescence X-ray analyzing apparatus and method of analyzing fluorescence X-ray - Google Patents
Fluorescence X-ray analyzing apparatus and method of analyzing fluorescence X-ray Download PDFInfo
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- CN103308539A CN103308539A CN2013100775496A CN201310077549A CN103308539A CN 103308539 A CN103308539 A CN 103308539A CN 2013100775496 A CN2013100775496 A CN 2013100775496A CN 201310077549 A CN201310077549 A CN 201310077549A CN 103308539 A CN103308539 A CN 103308539A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
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- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
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- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
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Abstract
A fluorescence X-ray analyzing apparatus and a method of analyzing fluorescence X-ray are disclosed. The object of the invention is to automatically detect movement of sample according to the change of sample images when the sample is moved during test. A sample image shooting portion for shooting the images of object to be detected is capable of comparing a sample image temporarily stored at the start of the test, and sample images during test and after test. If the difference of the image processing result is above a threshold, a notification is sent to a remote managing terminal through a display portion, buzzing sound and signal tower to warn the tester.
Description
Technical field
The present invention relates to fluorescent x-ray analyzer and analytical approach thereof, particularly the determination part bit position of determinand is proofreaied and correct.
Background technology
In recent years, various countries are improving law, stipulate to be present in the concentration of the carrying capacity of environment material in the parts of electric/electronic, component manufacturer need also can be carried out the means (for example with reference to patent documentation 1) of ultimate analysis more in nondestructive mode in product examination, Products Development process.
Especially, follow the restriction instruction of the RoHS(control objectionable impurities in Europe) restriction and cause the demand of the ultimate analysis of cadmium, lead, tribute, sexavalent chrome, bromine to increase, in order promptly to carry out the detection of carrying capacity of environment material, be extensive use of x-ray fluorescence analysis.
X-ray fluorescence analysis has the high sensitivity of ppm level, and can measure within a short period of time, as described nondestructive ultimate analysis means, also is commonly used in the detection beyond the detection of carrying capacity of environment material.
X-ray fluorescence analysis refers to, to determinand irradiation X ray, measures the fluorescent X-ray that produces from determinand, thereby the constituent content of determinand is analyzed.
In the mensuration of x-ray fluorescence analysis, have following setup parameter: the tube voltage of the employed X-ray tube of X ray generating unit and tube current, minute, be used for according to purposes change the parameter of the testing circuit of the shape of classification, primary X-ray collimating apparatus of a wave filter of character of primary X-ray and size, test section, at the disposal route of resulting fluorescent X-ray frequency spectrum etc.Fluorescent X-ray has the character of measuring the precision raising along with the prolongation of minute.This be because, the ionizing event of the X ray in the detecting device is the probability phenomenon, the variance of quantitative concentrations and the square root of minute are inversely proportional to.Therefore, for the mensuration precision that obtains expecting, need to set its corresponding minute.
General x-ray fluorescence analysis machine is operated in the following order.At first, mensuration person has selected to set the classification of determinand and the prescription of the condition determination prepared according to each analytic target element etc.In described prescription, except described setup parameter, also comprise with analysis result be considered as NG(by) concentration threshold etc.Mensuration person can select the best prescription that is suitable for this analytic target element by setting the classification of determinand.Sometimes install in the concentration of having passed through the laggard row element of minute that sets and calculate and the demonstration result.In addition, also can calculate error in theory according to the intensity of fluorescent X-ray sometimes, and based on this error, finish the moment that becomes below certain threshold value in this error.Under this situation, in described prescription, comprise the threshold value of described error.(with reference to patent documentation 2)
[patent documentation 1] TOHKEMY 2010-78592 communique
[patent documentation 2] international communique that discloses No. 2005/106440
Using under the situation of fluorescent x-ray analyzer with the purposes of the parts that check electric/electronic, determinand is the product after the assembling sometimes, and the shape of determinand is unsuitable for being arranged in the determination part sometimes.Fig. 1 illustrates the example of such determinand.For example, according to the product as determinand, have the product 11 of toroidal, rolling waits and causes the position to move in the mensuration machine sometimes.And, under the situation of powdery product 12, owing to the method that arranges causes movement.When determinand moves in mensuration, the situation of the different part of METHOD FOR CONTINUOUS DETERMINATION composition can appear, like this, not only can't obtain having the data of reliability, and the image of the sample that will record also possibly can't illustrate the tram as measuring point.In order to prevent this situation, the operator utilizes fixedly sample such as adhesive tape sometimes, still, because the inspection number of objects of electric/electronic is huge, so operator's burden is very big.And, also can not fix whole samples well.
, as its countermeasure, by preserve measuring the Sample Image of the zero hour, and compared the operator the is visual same section that judged whether METHOD FOR CONTINUOUS DETERMINATION with the Sample Image of measuring when finishing in the past.But, in this visual judgement, comprise the judgement deviation between the operator, and, need the difference of affirmation detected intensity in order to judge, so, wait for after a series of mensuration finishes and measure the problem of the non-constant of life period efficient again.
Summary of the invention
The present invention finishes in view of the above problems, its purpose is, following fluorescent x-ray analyzer is provided: to the image of measuring the zero hour and the image in measuring compare in real time, under the situation that sample moves, by detecting this situation automatically, get rid of the judgement deviation between the operator, and improve time efficiency, shorten the overhead time of measuring again, can carry out high precision and high efficiency mensuration.
In order to address the above problem, fluorescent x-ray analyzer of the present invention is characterised in that this fluorescent x-ray analyzer has: input part, the information that its input is necessary; Image pickup part, it obtains the determination part bit image of determinand; And operational part, it is to handling/preserve from the input information of input part with by the image that image pickup part is obtained, this operational part has mobile decision mechanism, this moves, and first image that decision mechanism obtains described operational part according to described image pickup part and the latest image in second image obtain, difference and predetermined reference value based on the characteristic value separately of the location status of the determinand in these 2 images compare, judge that described determinand has or not movement, wherein, described first image comprises the mensuration zone of described determinand, be the image before being about to begin to measure, described second image is to obtain every the stipulated time when the mensuration of the position corresponding with this first image.
And fluorescent x-ray analyzer of the present invention is characterised in that, this fluorescent x-ray analyzer has the result of determination accepted and the warning tones generator of the sound that gives a warning or accept result of determination and luminous light-emitting device.
And fluorescent x-ray analysis method of the present invention is characterised in that this fluorescent x-ray analysis method has following steps: the first shooting step, take the image that is about to measure preceding determinand; Determination step carries out x-ray fluorescence analysis by the x-ray bombardment of stipulated time; The second shooting step, in this determination step every the image of stipulated time ray measuring optical; And mobile determination step, one or more images in the image that will obtain by the first shooting image obtained of step with by the second shooting step compare, and judge that sample has or not movement.
According to fluorescent x-ray analyzer of the present invention, under the situation of a plurality of determinands, even under situation about measuring under the fixedly unsure state of each determinand, also can with mensuration person irrespectively, detection and comparison by locating under fixing criterion judge that sample has or not movement.Can improve the fiduciary level of the determination data of as a result of obtaining.In addition, at this moment, in the past before a succession of mensuration finishes during in be subjected to the mensuration person of time constraint can be by showing or warning tones be learnt can free the interruption origin of an incident of mensuration from monitor.
And in fluorescent x-ray analyzer of the present invention, judgement sample of the present invention has or not mobile function can be applied to existing multiple fluorescent x-ray analyzer, can realize the lifting of function with low cost.
Description of drawings
Fig. 1 is the figure that the example of determinand of the present invention is shown, and wherein, (1) is the determinand of toroidal, and (2) are pulverous determinands.
Fig. 2 is the figure that the software picture structure on the display part is shown.
Fig. 3 is the summary construction diagram of the fluorescent x-ray analyzer of embodiments of the present invention 1.
Fig. 4 is the process flow diagram for the action of the fluorescent x-ray analyzer of explanation embodiments of the present invention 1.
Fig. 5 is the summary construction diagram of the fluorescent x-ray analyzer of embodiments of the present invention 2.
Fig. 6 is the process flow diagram for the action of the fluorescent x-ray analyzer of explanation embodiments of the present invention 2.
Fig. 7 is the summary construction diagram of the fluorescent x-ray analyzer of embodiments of the present invention 3.
Fig. 8 is the figure of process flow diagram that illustrates for the action of the fluorescent x-ray analyzer of explanation embodiments of the present invention 3.
Fig. 9 is the summary construction diagram of the fluorescent x-ray analyzer of embodiments of the present invention 4.
Figure 10 is the process flow diagram for the action of the fluorescent x-ray analyzer of explanation embodiments of the present invention 4.
Figure 11 is the process flow diagram for the action of the fluorescent x-ray analyzer of explanation embodiments of the present invention 5.
Figure 12 is the figure that looks like to show the difference of detection be used to the sample that embodiments of the present invention 1,2,3,4,5 fluorescent x-ray analyzer are shown.
Label declaration
101: realtime graphic; 102: rest image; 103: analysis result shows; 104: the identifying information input field; 105: measure start button; 106: message area; 200,300,400,500: fluorescent x-ray analyzer; 312,512: database; 313,513: long-range office terminal; 314,514: the display part on the long-range office terminal; 315,515: the input part on the long-range office terminal; 412: sample bench; 519: the sample interchanger.
Embodiment
Below, use accompanying drawing that the specific embodiment of the present invention is described.
In addition, omit the explanation of the part of mark same numeral in the accompanying drawing sometimes.And for easy to understand, accompanying drawing schematically illustrates each textural element.Thus, shape etc. does not show accurately sometimes.
(embodiment 1)
At first, the structure to fluorescent x-ray analyzer 200 describes.
Fig. 3 is the summary construction diagram of the fluorescent x-ray analyzer 200 of embodiments of the present invention 1.
In Fig. 3, fluorescent x-ray analyzer 200 has: input part 201, and it imports data; As the arithmetical unit 202 of operational part, it carries out various computings; X ray generating unit 203, it is to determinand 205 irradiation primary X-raies 204; Test section 207, it detects the secondary x rays (fluorescent X-ray) 206 from determinand 205; Display part 208, it shows various data; Image pickup part 209, the mensuration position of its ray measuring optical 205; And throwing light on 210, it throws light on, so that can observe determinand 205 by image pickup part 209.
Arithmetical unit 202 is made of the various signal processing circuits that comprise aftermentioned detection unit 211, has according to setting the set-up function of x-ray tube voltage, tube current and irradiation times etc. or the calculation function that carries out the quantitative test of each element according to the frequency spectrum by test section 207 detected secondary x rays 206 by the condition determination of input part 201 input etc. at X ray generating unit 203.For arithmetical unit 202, can utilize personal computer etc.
Detection unit 211 judges at the analysis result of determinand 205 whether the content of the element-specific in each composition surpasses defined threshold.The pre-prepd prescription by selecting as data determines the appointment of element-specific.Prescription stores the classification of determinand, as the determination information of the setup parameter of the condition determination of each analytic target element (parameter of the testing circuit of the classification of the tube voltage of the employed X-ray tube of X ray generating unit and tube current, minute, a wave filter, the shape of primary X-ray collimating apparatus and size, test section, at the disposal route of resulting fluorescent X-ray frequency spectrum etc.) and analysis result etc.In the present embodiment, will be described as object by the carrying capacity of environment material of RoHS instruction restriction.
Display part 208 is display devices of LCD etc.When setting condition determination, display part 208 shows the input picture of condition determination for example, the sample picture of determinand 205 etc.And, after mensuration, show the analysis result of arithmetical unit 202 etc.
Image pickup part 209 is made of with camera lens and imaging apparatus etc. shooting.Image pickup part 209 is taken the image (rest image) at the mensuration position of the determinand 205 before the mensuration of sample bench (not shown) configuration, and it is presented on the display part 208.And image pickup part 209 can be in real time be presented at the determination part bit image (realtime graphic) of the determinand 205 in measuring on the display part 208.And, for the part of taking described determination part bit image is thrown light on, be provided with illumination 210.Its illumination intensity can change by setting.
Fig. 2 illustrates the structure of the software picture that shows on the display part 208.
To be made as identifying information for the information of distinguishing as the parts of determinand (ProductName, production code member, mensuration position etc.).
Identifying information input field 104 is the hurdles that can import the described identifying information that is associated with measurement result.
Can begin to measure by pressing mensuration start button 105.
More than be the explanation relevant with the structure of fluorescent x-ray analyzer 200.
Then, the action to determination part 200 describes.Fig. 4 utilizes flowcharting to measure the flow process of operation.Zone S114 is the scope that analytical equipment moves automatically.
In step S101, mensuration person will measure sample and be arranged on and locate.According to the difference of sample, the shape of some sample is rolled easily, and in the past, mensuration person utilized splicing tape etc. simply to fix.In the present invention, be used for to suppress that to a certain degree sample moves fixing also be effective.
In step S102, mensuration person adjusts 210 the intensity of throwing light on, so that observe the image of image pickup part 209 brightly.Owing to being the image that purpose is used image pickup part 209 with the irradiation area of confirming primary X-ray 204, so the illumination intensity that needs is which that identify determinand 205 as far as possible easily partly is the illumination intensity of determination object.Easily the illumination intensity of identification is very different according to the material of determinand or surface treatment, surface state, still, if similar sample then can be identified with roughly the same illumination intensity.
In step S103, before being about to mensuration, the image A that image pickup part 210 is taken samples.This image A is as data, measure before finishing during in be stored in the storer of arithmetical unit 202 temporarily.Then, device is automatically transferred to step S104, for mensuration person, transfers to S104 by single job.
In step S104, begin determinand 205 is carried out x-ray fluorescence analysis.Particularly, X ray generating unit 203 begins determinand 205 irradiation X ray, and test section 207 begins to detect the fluorescent X-ray that sends from determinand 205.In arithmetical unit 202, according to frequency spectrum of detected fluorescent X-ray etc., the concentration that contains element of determinand 205 is carried out quantitative test.Before measuring end, all can carry out this processing in real time, according to the load of handling, carry out computing with 1 second interval or 10 seconds intervals, be presented on the display part 208.
In step S105, in mensuration, image pickup part 210 is every the image B of stipulated time ray measuring optical 205.This a series of image B is stored in the storer of arithmetical unit 202 as data temporarily.
In step S106, become the action of following mechanism: carry out the data of image A and B relatively, judge the movement that whether has determinand.About algorithm relatively, obtain brightness value poor of each pixel of A and B according to each passage of RGB, at the aggregate value of whole its absolute values of pixels accumulative total, above under the situation of predetermined value, be judged to be image A and B there are differences in this aggregate value.
But, because the change of illumination intensity and be derived from the influence of the microvibration of device, image seems to change, for although the irradiation area that prevents X ray does not have to change but the situation of generation warning immediately, sometimes append following processing: for sample as B, the image of counting frame at the past calculates difference and is averaged, and perhaps calculates poor with the mean value of the brightness value of the image of the past frame of stated number, thereby reduces the influence of external disturbance.
Be set to pixel count according to image pickup part 210, illumination intensity and different values with value that aggregate value compares.In Figure 12, as example, the view data 701 when illustrating ball pen as determinand side by side and analytical equipment rock and view data 702 when determinand is moved, that the absolute value of the difference of the brightness value of image in is relatively obtained as image.
In step S107, handle according to the data comparative result of image A and B and branch.Being judged as under the situation about there are differences, transfer to S111.
In step S108, according to whether being to measure termination condition and branch.If not measuring termination condition, then return S104, proceed to measure.Described mensuration termination condition is that the stipulated time is when above from the time that mensuration begins normally, but, character according to determinand, also can carry out following high speed measures: calculate error in theory according to the intensity of fluorescent X-ray, and based on this error, be constantly below certain threshold value to finish in this error.
In step S109, measurement result is recorded in the arithmetical unit 202.
In step S110, whether has next sample and branch according to mensuration person.If there is next sample, then enter S101, from carrying out the setting of sample again.If there is no next sample then finishes to measure operation.
In step S111, analytical equipment warns determinand that movement has taken place to mensuration person.The auto-action pattern of this moment is following 2 patterns, and mensuration person or utilization responsible official can set which pattern of selection in advance before measuring.
First auto-action pattern refers to: only give a warning in display part 203, and proceed to measure and do not interrupt.According to the setting of software, warning also can change to buzz or based on the notice of the external modulation of signal tower etc. etc.
Second auto-action pattern refers to: stop to measure detecting the moment that sample moves, and produce warning.Display part 203 shows warning, and the mensuration machine such as becomes at the state that person to be determined replys.Identical with first pattern, warning also can change to other notification means.Mensuration person returns step S703, measures again.
In step S112, according to the described auto-action pattern that sets and branch.Under the situation of described first element pattern, enter S108, under the situation of described second auto-action pattern, enter S113, abandon measurement result before this, return S101, carry out the setting of sample again.
(embodiment 2)
Then, embodiment 2 is described.
Fig. 5 is the summary construction diagram of the fluorescent x-ray analyzer 200 of embodiments of the present invention 2.About structure, the display part 314 and input part 315 in supplemental data storehouse 312, long-range operating terminal 313, other structures are identical with embodiment 1.
The information of the mensuration date time relevant with measurement result, analysis result, mensuration person, appended document etc. is made as mensuration information.
For described identifying information and described mensuration information are associated reading/editor for the supvr, supplemental data storehouse 312 in embodiment 1.With described production code member or title or character string as identifying information from input part 301 inputs, store in the database 312 measuring when finishing.The supvr can be from the content of long-range operating terminal 313 reading databases 312, with reference to described mensuration information.
Long-range operating terminal 313 is used for reading, the editor of the information of measuring in the position of separating with device.Long-range operating terminal 313 carries out the reading/operation of the content of database 312.
Then, the action to determination part 300 describes.Fig. 6 utilizes process flow diagram that the flow process of measuring operation is shown.
Except following aspect, the action of determination part 300 is identical with embodiment 1.
In step S202, mensuration person imports identifying information.According to identifying information, with the employed illumination intensity of same identification information of the last mensuration that records in the database, 210 send illumination light from throwing light on, make on the determinand 205 and become bright near the x-ray bombardment.This illumination intensity is automatic setting, and still, mensuration person can change arbitrarily.
And, in step S211, in display part 308, show warning, still, also can receive warning by long-range display part 314 by database from the long-range people who monitors.In addition, be judged as under the situation that does not need to measure again, mensuration person also can proceed to measure, but, mensuration person need have can begin the authority measured again, and for not having the mensuration person who carries out the authority that risk judges, must measure again.
Described mensuration person's authority realizes by the subscriber management function of software, manages concentratedly by described database, sets by using the responsible official.Mensuration person logins when bringing into use device, can operate in own account's extent of competence.
(embodiment 3)
Then, the embodiment 3 to fluorescent x-ray analyzer 400 describes.
Fig. 7 is the summary construction diagram of fluorescent x-ray analyzer 400.About structure, except appending sample bench 412, identical with embodiment 1.
Can drive sample bench 412 at 3 direction of principal axis of XYZ by the actuator based on electro-motor, this sample bench 412 is for mounting determinand 405 and makes the moving structure division of determination part displacement.Sample bench 412 can be arranged a plurality of determinands, by measuring automatically respectively, can carry out the automatic mensuration of a plurality of samples.
Then, the action to determination part 400 describes.Fig. 8 utilizes process flow diagram that the flow process of measuring operation is shown.
Except following aspect, the action of determination part 400 is identical with embodiment 1.
Scope S316 represents the scope that analytical equipment moves automatically.
In step S302, analysis condition and the identifying information of disposable a plurality of determinands of measuring automatically wanted in mensuration person's input.Described analysis condition comprises the coordinate of objective table, correspondingly prepares different analysis conditions with the quantity of determinand.
In S303, set the illumination intensity of illumination 210.Because the illumination intensity of using in a series of automatic mensuration is constant, so mensuration person will observe the state of all determinands, judge appropriate illumination intensity.
In S304, according to the objective table coordinate of importing among the S302, moving stage 412.
In S315, abandon measurement result, still different with embodiment 1, because mensuration person can't carry out the setting of sample again, so, abandon the mensuration of this sample, in S304, transfer to next sample.Under this situation, the result of this sample is preserved as mistake so that later on as can be known the sample state exist and change.
In the present embodiment, compare with embodiment 1, it is also noted that the scope S316 that device moves automatically is bigger, mensuration person's burden is less.
And the function of appending at embodiment 1 in the embodiment 2 also can be applied to present embodiment.
(embodiment 4)
Then, the embodiment 4 to fluorescent x-ray analyzer 500 describes.
Fig. 9 is the summary construction diagram of fluorescent x-ray analyzer 500.About structure, locate 517 except appending sample retainer 516, sample, the sample pallet 518, sample interchanger 519, identical with embodiment 2.
Sample retainer 516 is the containers with a constant volume, is used for carrying out x-ray fluorescence analysis under the state of the determinand 505 of having taken in granular, powdery.Sample retainer 516 is designed to can not hinder at determinand irradiation primary X-ray or secondary x rays.
It 517 is positions that size is designed to arrange the device of sample retainer 516 that sample locates.Sample locates and 517 is determined to be in the position that can suitably analyze when being provided with sample retainer 516.
Sample pallet 518 is the special-purpose places to place that can arrange a plurality of sample retainers 516.The place to place is distributed sample number in advance, and as analysis condition, mensuration person can specify the sample retainer with which sample number to be transported to sample and locate and measure.
Be to locate at sample place to place 518 and sample to carry out the robot of sample exchange between 517 as the sample interchanger 519 of sample exchange mechanism, the arm that use could grip or decontrol sample retainer 516 carries out the sample exchange.Automatically carry out the sample exchange by using sample interchanger 519, thus, can carry out the automatic mensuration of a plurality of samples.
Then, the action to determination part 500 describes.Figure 10 utilizes process flow diagram that the flow process of measuring operation is shown.
Except following aspect, the action of determination part 500 is identical with embodiment 1.
Scope S416 represents the scope that analytical equipment moves automatically.
In step S402, analysis condition and the identifying information of disposable a plurality of determinands of measuring automatically wanted in mensuration person's input.Described analysis condition comprises the sample number of sample pallet, correspondingly prepares different analysis conditions with the quantity of determinand.
In S403, according to the sample number of the sample pallet of importing among the S402, exchange sample retainer 516.According to identifying information, with the employed illumination intensity of same identification information of the last mensuration that records in the database, 510 send illumination light from throwing light on, make on the determinand 505 and become bright near the x-ray bombardment.
In S415, abandon measurement result, still different with embodiment 2, because mensuration person can't carry out the setting of sample again, so, abandon the mensuration of this sample, in S403, transfer to next sample.Under this situation, the result of this sample is preserved as mistake so that later on as can be known the sample state exist and change.
In the present embodiment, same with mode 3, than embodiment 2, the scope S416 that device moves automatically is bigger, and mensuration person's burden is less.
(embodiment 5)
Then, use the embodiment 5 of Figure 11 to describe.
Figure 11 is the figure that following situation is shown, whether S407～S409 and the sample among S413～S415 that the process flow diagram (Figure 10) of the mensuration operation in the determination part 500 of embodiment 4 is shown mobile judgement has taken place, and carries out the shooting S407 of sample picture after mensuration.Therefore, label etc. is identical with Figure 10.
Like this, the situation of the sample picture in obtaining mensuration, can also judge whether sample movement has taken place according to the sample picture after measuring.In addition, this point can be applied to above-mentioned embodiment 1～3 equally.
As mentioned above, according to the present invention, have at the x-ray fluorescence analysis facility under the situation of image pickup part of the determination part bit image of obtaining determinand, by (for example software of in control computer, handling as image) in the control part that the present invention is applied to the x-ray fluorescence analysis machine, this function be can append, and cost or significantly change design can significantly do not increased.
And as an example, the fluorescent x-ray analyzer of application of the present invention is applicable to the analysis of the carrying capacity of environment material that is blended in the parts that use in the electric/electronic that is made of various starting material.
In addition, the invention is not restricted to the above content of putting down in writing, also contain the technology based on the thought identical with technological thought of the present invention certainly.
Claims (15)
1. fluorescent x-ray analyzer, it is measured the fluorescent X-ray that produces from described determinand, thereby the formation element of described determinand is analyzed the X ray of the irradiation of the determinand on the sample bench from x-ray source, it is characterized in that described fluorescent x-ray analyzer has:
Input part, the information that its input is necessary;
Image pickup part, it obtains the determination part bit image of described determinand; And
Operational part, it is to handling/preserve from the input information of described input part with by the image that described image pickup part is obtained,
This operational part has mobile decision mechanism, this moves, and first image that decision mechanism obtains described operational part according to described image pickup part and the latest image in second image obtain, difference and predetermined reference value based on the characteristic value separately of the location status of the determinand in these 2 images compare, judge that described determinand has or not movement, wherein, described first image comprises the mensuration zone of described determinand, be the image before being about to begin to measure, described second image is to obtain every the stipulated time when the mensuration of the position corresponding with this first image.
2. fluorescent x-ray analyzer according to claim 1, wherein,
Characteristic value based on the location status of described determinand is the brightness value of each pixel of described image.
3. fluorescent x-ray analyzer according to claim 1 and 2, wherein,
After finishing, the mensuration of the position corresponding with described first image obtains described second image.
4. fluorescent x-ray analyzer according to claim 1 and 2, wherein,
Described second image is a plurality of frames that comprise the past in being engraved in when it is judged,
The difference of described characteristic value is each the mean value of difference in described first image and a plurality of described second image.
5. according to any described fluorescent x-ray analyzer in the claim 1～4, wherein,
Described fluorescent x-ray analyzer has display part, this display part show the image obtained to the content of described input part input, by described image pickup part and handled by described operational part after the result,
This display part shows the described result of determination of described mobile decision mechanism.
6. according to any described fluorescent x-ray analyzer in the claim 1～5, wherein,
Described fluorescent x-ray analyzer has the warning tones generator, and this warning tones generator is accepted the described result of determination of described mobile decision mechanism and the sound that gives a warning.
7. according to any described fluorescent x-ray analyzer in the claim 1～6, wherein,
Described fluorescent x-ray analyzer has light-emitting device, and this light-emitting device is accepted the described result of determination of described mobile decision mechanism and luminous.
8. according to any described fluorescent x-ray analyzer in the claim 1～7, wherein,
Described operational part has communication terminal,
Described fluorescent x-ray analyzer has following communication function: described result of determination from this communication terminal to the 2nd operational part that is configured in remote location that issue described mobile decision mechanism via.
9. according to any described fluorescent x-ray analyzer in the claim 1～8, wherein,
Described sample bench have can a plurality of determinands of mounting structure,
Described fluorescent x-ray analyzer has driving mechanism, and this driving mechanism can be at the locating of one or more described determinand one or more appointments separately, and successively relative positioning is carried out in the ejaculation position of the X ray of described x-ray source.
10. fluorescent x-ray analyzer according to claim 9, wherein,
Be judged to be described determinand in described mobile decision mechanism and taken place when mobile, described driving mechanism can interrupt the mensuration of this measuring point, and the regulation that navigates to next determinand locates.
11. according to any described fluorescent x-ray analyzer in the claim 1～8, wherein,
Described fluorescent x-ray analyzer has:
The sample incorporating section, it stores a plurality of sample receivers of taking in described determinand; And
The sample exchange mechanism, it can make described determinand alternately mobile with the assigned position of this sample receiver from described sample incorporating section to described sample bench.
12. fluorescent x-ray analyzer according to claim 11, wherein,
Being judged to be described determinand in described mobile decision mechanism has taken place when mobile, described sample exchange mechanism interrupts the mensuration of this measuring point, this determinand is kept out of the way to described sample incorporating section, and, next determinand is moved to described sample bench from described sample incorporating section.
13. fluorescent x-ray analysis method, to determinand irradiation X ray, measure the fluorescent X-ray that produces from described determinand, thereby the formation element of described determinand is analyzed, it is characterized in that described fluorescent x-ray analysis method has following steps:
The first shooting step is taken the image that is about to measure preceding described determinand;
Determination step, x-ray fluorescence analysis is carried out in the irradiation of the X ray by the stipulated time;
The second shooting step is taken the image of described determinand every the stipulated time in described determination step; And
Mobile determination step, one or more images in the image that will obtain by the described first shooting image obtained of step with by the described second shooting step compare, and judge that sample has or not movement.
14. fluorescent x-ray analysis method, to determinand irradiation X ray, measure the fluorescent X-ray that produces from described determinand, thereby the formation element of described determinand is analyzed, it is characterized in that described fluorescent x-ray analysis method has following steps:
The first shooting step is taken the image that is about to measure preceding described determinand;
Determination step, x-ray fluorescence analysis is carried out in the irradiation of the X ray by the stipulated time;
The second shooting step finishes the image that described determinand is taken in the back at described determination step; And
Mobile determination step, one or more images in the image that will obtain by the described first shooting image obtained of step with by the described second shooting step compare, and judge that sample has or not movement.
15. according to claim 13 or 14 described fluorescent x-ray analysis methods, wherein,
The image of described mobile determination step relatively is the comparison of brightness value of each pixel of each image.
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| JP2012-054843 | 2012-03-12 | ||
| JP2012054843 | 2012-03-12 | ||
| JP2013-048276 | 2013-03-11 | ||
| JP2013048276A JP2013217915A (en) | 2012-03-12 | 2013-03-11 | Fluorescent x-ray analyzer and fluorescent x-ray analysis method |
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