JP2005147706A - Coating separation inspection apparatus and coating separation inspection method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coating separation inspection apparatus that reduces the detection limit dimensions of separation damage and is capable of inspection quickly. <P>SOLUTION: An infrared image is captured immediately after heating is completed for capturing the infrared image before the temperature difference between a separation section and a sound section generated by heating is relaxed. An infrared heating apparatus 102 for heating a desired location on the surface of a roll 101 while the roll 101 to be inspected is rotating, and an infrared camera 103 for capturing the location immediately after heating are provided. A location heated by the infrared heating apparatus 102 is moved to a location that can be captured by the infrared camera 103 by the rotation of the roll 101, and an infrared image at the location is captured. By rotating the roll 101, heating and the capturing of infrared images can be continued, thus inspecting the coating separation quickly. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a film peeling inspection apparatus and a film peeling inspection method for detecting peeling of a film on a surface layer of a base material.

  In order to protect a metal base material and improve its corrosion resistance, a technique for coating the base material with a film of ceramic or the like is known. However, when the base material is peeled off from the base material when the base material is coated or due to aging, the corrosion resistance is significantly reduced. Against this background, various methods have been proposed for detecting film peeling.

  Patent Document 1 discloses an ultrasonic wave propagation method as a method for nondestructively inspecting a ceramic spray coating for deterioration damage. The ultrasonic wave propagation method is a method in which an ultrasonic probe is brought into close contact with a ceramic film, and an elastic wave is directly propagated, and the form of delamination damage inside the ceramic film is grasped by the intensity of propagation. The critical dimension of delamination damage that can be detected by the ultrasonic wave propagation method is about 0.5 mm.

  According to the method of Patent Document 1, it is necessary to scan the surface of the inspection object with an ultrasonic probe, and it takes a long time to detect peeling damage. When performing the ultrasonic wave propagation method, a coupling agent is generally applied to the film in order to bring the ultrasonic probe into close contact with the ceramic film to be measured. However, when the coupling agent penetrates into the ceramic sprayed film, there is a problem that the film deteriorates.

  Patent Document 2 discloses an infrared thermography method as another method for nondestructively inspecting deterioration damage of a ceramic sprayed coating. The infrared thermography method is a method for grasping the form of peeling damage inside the ceramic film by regarding the heat transfer resistance generated at the peeling damage part of the ceramic film as a temperature difference on the surface of the ceramic layer. In this method, the temperature difference that appears on the surface of the ceramic layer is greatly affected by the area of the peeling damage portion of the thermal shielding coating and the distance between the peeling faces, so the critical dimension of the peeling damage that can be detected is large, being 1 to 2 mm or more. .

  Patent Document 3 discloses a method in which an ultrasonic wave propagation method and an infrared thermography method are used in combination as yet another method for nondestructively inspecting a ceramic spray coating for deterioration damage. In this method, first, an infrared thermography method is used to inspect the peeling damage, and the area to be inspected is an area where the existence of the peeling damage can be clearly grasped, an area where the presence or absence of the peeling damage cannot be clearly determined, and an area where there is no peeling damage It is divided into three areas. The result is transmitted to the inspected object life evaluation system together with the detected position information by the position measuring sensor of the inspected object. Among the above three areas, the ultrasonic probe is moved to a predetermined position for an area other than the area where the presence of peeling damage can be clearly grasped, and an inspection by the ultrasonic wave propagation method is performed. The peel damage situation captured by the ultrasonic wave propagation method is transmitted to the inspected object life evaluation system via the ultrasonic flaw detector signal processing unit. The actual life stress distribution acting on the part to be inspected is input to the system for evaluating the life of the inspected object, and the safety / risk of delamination damage of the ceramic coating on the part to be inspected is based on the information sent and the actual stress distribution. To be judged.

  According to said method, peeling damage can be test | inspected accurately in a comparatively short time. However, the above method needs to perform both the infrared thermography method and the ultrasonic wave propagation method, which increases the number of inspection steps and complicates the configuration of the inspection apparatus.

  Accordingly, there has been a demand for a film peeling inspection apparatus that has a small detection limit dimension for peeling damage, has a small number of inspection steps, and can perform inspection in a shorter time.

JP 2001-194348 A JP 62-126338 A JP 2000-206100 A

  An object of the present invention is to provide a film peeling inspection apparatus and a film peeling inspection method capable of detecting a peeling of 1 mm or less by improving the infrared thermography method.

  Furthermore, it aims at providing the film peeling test | inspection apparatus and film peeling test | inspection method with a short time required for a test | inspection.

  1st invention which solves the subject mentioned above image | photographs the heating apparatus which heats the desired location of the test target object in which the film | membrane was provided in the base material, and the infrared image of the said location immediately after the heating by the said heating device. The film peeling inspection apparatus is provided with an infrared camera provided as described above.

  The film peeling inspection apparatus according to the first aspect of the present invention takes an infrared image immediately after heating the surface of an inspection object having a film provided on the surface, and a temperature between a healthy part and a peeling damaged part free from peeling damage caused by heating. An infrared image is taken before the difference is reduced.

  When the surface of an object to be inspected with a coating provided on the surface is heated, heat is transferred to the base material through the coating in a healthy part where no peeling damage has occurred. At this time, in the peeling portion where the film is peeled off from the base material, since air exists between the base material and the film, heat is not easily transmitted to the base material, and heat is accumulated in the film, resulting in a high temperature. On the other hand, since the film is in close contact with the base material in the healthy part, the heat conduction between the film and the base material is smoothly performed, so that the temperature does not increase. As a result, the heat conduction characteristics are different between the peeled portion and the healthy portion. The conventional infrared thermography method detects the peeling damage of the film by detecting this temperature difference and temperature change, but when the film thickness is small, the heat capacity of the peeling part is extremely small, and the temperature difference is time-lapsed. At the same time, it disappears rapidly and the boundary between the peeled portion and the healthy portion cannot be determined. The smaller the dimension of the peeling damage, the more rapidly the boundary between the peeling part and the healthy part cannot be determined. In contrast, in the present invention, an infrared image is taken immediately after heating, that is, before the temperature difference generated between the peeled portion and the healthy portion caused by heating is reduced. The time for the temperature difference to relax depends on the film thickness of the film, but when the film thickness is several tens of μm to 3 mm, it is desirable to take an infrared image within 5 seconds from the end of heating. According to the present invention, an infrared image in which the boundary between the peeling portion and the healthy portion is clear can be taken, and a small peeling damage, for example, a peeling damage having a diameter of 1 mm can be detected. In order to capture an infrared image of the desired portion immediately after the heating of the desired portion, it is preferable that the heating device and the infrared camera are housed in one casing or placed on one pedestal. It is.

  According to a second aspect of the present invention, in the film peeling inspection apparatus according to the first aspect described above, the apparatus further includes a moving means for relatively moving the infrared camera and the inspection object. The moving means moves the infrared camera and the inspection object relative to each other, and moves the heated desired portion to a position where the infrared camera can shoot. By this relative movement, the desired portion that has been heated can be quickly moved to a position where the infrared camera can shoot. Further, the heat applied to the desired location from the heating device is instantaneously interrupted, and the influence of the heat generated by the heating device is eliminated. Since the moving means is means for relatively moving the inspection object and the infrared camera, not only the inspection object or the infrared camera but also both the inspection object and the infrared camera move. May be.

  In the second invention, when the heating device and the infrared camera are provided close to each other, the film peeling inspection can be continuously performed. When the infrared camera is capturing an infrared image of the desired location, the heating device heats other locations of the inspection object. When the moving means relatively moves the object to be inspected and the infrared camera, and the other part moves to a position where the infrared camera can take a picture, the heating device heats another part. Thus, by repeatedly heating and photographing while relatively moving the object to be inspected and the infrared camera, the film peeling inspection can be continuously performed, and the time required for the film peeling inspection is shortened. The

  According to a third invention, in the film peeling inspection apparatus according to the second invention, the moving means moves the inspection object. The moving means moves the inspection object so that the infrared camera captures an infrared image of the desired location immediately after the desired location is heated. The heating device and the infrared camera are provided along a direction in which the inspection object moves. The heating device is provided upstream of the infrared camera in the moving direction so that a desired spot heated by the heating device is moved by the moving means to a position where the infrared camera can be photographed. The interval between the heating device and the infrared camera is adjusted so that an infrared image can be taken with the infrared camera before the temperature difference generated between the healthy portion and the peeling portion is reduced by heating from the heating device. . The interval between the heating device and the infrared camera is adjusted based on the moving speed of the inspection object and the time from the set heating end to the infrared image capturing. If the infrared camera and the heating device are housed in one housing or placed on one frame, the position of the heating device and the infrared camera is fixed and the inspection object is moved. The film peeling inspection can be continuously performed. The present invention is particularly suitable when the inspection object can be easily moved, for example, a rotating body.

  According to a fourth invention, in the film peeling inspection apparatus according to the second invention, the moving means moves the heating device and the infrared camera. The moving means moves the inspection object so that the infrared camera captures an infrared image of the inspection target portion immediately after the portion is heated. The heating device and the infrared camera are provided along the direction of movement by the moving means. The heating device is provided upstream of the infrared camera in the moving direction so that a desired spot heated by the heating device is moved by the moving means to a position where the infrared camera can be photographed. The interval between the heating device and the infrared camera is adjusted so that an infrared image can be taken with the infrared camera before the temperature difference generated between the healthy portion and the peeling portion is reduced by heating from the heating device. . The interval between the heating device and the infrared camera is adjusted based on the moving speed of the inspection object and the time from the set heating end to the infrared image capturing. If the infrared camera and the heating device are housed in one housing or placed on one frame, the inspection object is fixed and the infrared camera and the heating device are moved. The film peeling inspection can be continuously performed. The present invention can perform a film peeling inspection even when it is difficult to move an inspection object.

  5th invention is the film peeling test | inspection apparatus of 4th invention, The said moving means has a rail, the mount which supports the said heating apparatus, and the said infrared camera, The drive device which makes the said mount run on the said rail It is characterized by providing. According to the sixth invention, the infrared heating device and the infrared camera can be easily moved, the inspection speed can be improved, and the film peeling inspection can be performed over a wide range in a short time.

  6th invention is the film peeling test | inspection apparatus of any one of 2nd thru | or 5th invention, The measurement means which measures the relative displacement amount of the said infrared camera produced by the said movement means, and the said test object, An arithmetic means for specifying the inspection position from the relative displacement amount is further provided. Here, the relative displacement amount of the inspection object is a relative movement distance between the infrared camera and the inspection object. The measurement unit converts the measured relative displacement amount into a relative displacement amount signal and transmits the relative displacement amount signal to the calculation unit, and the calculation unit calculates the infrared image based on the relative displacement amount from the measurement start point. It is possible to specify which position of the object is taken. The measuring means may be a means for measuring the distance itself, or a means for calculating the moving distance from the moving speed.

  According to a seventh aspect of the present invention, in the sixth film peeling inspection apparatus, the moving means further includes a control means for controlling a moving speed and the relative displacement amount for moving the inspection object or the infrared camera. . The control unit instructs the moving unit to change position and movement timing when the infrared camera and the inspection object are relatively moved. The control means stores inspection condition information such as the shape of the inspection object, the distance between the heating device and the infrared camera, and the thickness of the film. The relative displacement amount and the movement timing are determined based on the inspection condition information.

  The eighth invention includes a step of heating a desired portion of an inspection object, and a step of photographing an infrared image of the desired portion immediately after the heating step. Is the method. According to the ninth invention, since an infrared image is taken immediately after heating a desired portion of the inspection object, the size is detected by detecting before the temperature difference generated between the healthy portion and the peeled portion is reduced. Even small delamination damage can be detected.

According to a ninth aspect of the invention, in the film peeling inspection method according to the eighth aspect of the invention, the method further includes a step of relatively moving the infrared camera and the inspection object after the heating step. Since the infrared camera and the inspection object are relatively moved, heating of the inspection object portion can be stopped instantaneously. Further, immediately after heating, the infrared camera can be moved to a photographing range. In the moving step, since the inspection object and the infrared camera are relatively moved, both the inspection object and the infrared camera may move.
The tenth invention is characterized in that, in the moving step, the heating device moves together with the infrared camera. When the film peeling inspection apparatus according to the ninth aspect of the invention is performed while the heating apparatus moves together with the infrared camera, the heating apparatus moves the inspection object while the infrared camera is capturing an infrared image of the desired location. Other locations can be heated. When the moving means relatively moves the object to be inspected and the infrared camera, and the other part moves to a position where the infrared camera can take a picture, the heating device heats another part. In this way, by repeatedly heating and photographing while relatively moving the inspection object and the infrared camera, the film peeling inspection can be continuously performed, and the time required for the film peeling inspection is shortened. The

  An eleventh invention is characterized in that, in the film peeling inspection method according to the ninth or tenth invention, the moving step is a step of moving the inspection object. The inspection object is moved so that the infrared camera captures an infrared image of the inspection object portion immediately after the desired portion of the inspection object is heated. If the heating device is provided so as to move together with the infrared camera, the film peeling inspection is continuously performed by moving the inspection object by fixing the position of the heating device and the infrared camera together. It can be carried out. The present invention is particularly suitable when the inspection object can be easily moved, for example, a rotating body.

  A twelfth invention is characterized in that, in the film peeling inspection method of the ninth or tenth invention, the moving step is a step of moving the infrared camera. The infrared camera is moved so that the infrared camera captures an infrared image of the inspection object portion immediately after the desired portion of the inspection object is heated. If the heating device is provided so as to move together with the infrared camera, the film peeling inspection can be continuously performed by fixing the inspection object and moving the infrared camera and the heating device. The present invention can perform a film peeling inspection even when it is difficult to move an inspection object.

  A thirteenth invention is the film peeling inspection method according to any one of the ninth to twelfth inventions, wherein after the moving step, the relative displacement between the camera and the inspection object generated in the moving step is calculated. The method further comprises a step of measuring, and a step of specifying an inspection position from the relative displacement amount. The inspection position can be specified based on the relative displacement amount from the measurement start point, which position of the inspection object the infrared image is captured.

  According to the film peeling inspection apparatus and the film peeling inspection method of the present invention, an infrared image of a desired portion of the inspection object is taken immediately after heating, so that a temperature difference generated between a healthy site and a peeling damaged site is reduced. This can be detected before Thereby, the resolution which detects peeling damage improves and it can detect peeling damage with a small dimension.

  Furthermore, by heating the desired part of the inspection object and then relatively moving the infrared camera and the inspection object, the heating to the part is instantaneously interrupted and an infrared image immediately after the end of heating is taken. Can do. While taking another infrared image of the part, heating the other part, and similarly taking the infrared image of the other part, it is possible to perform a film peeling inspection over a wide area in a short time.

  Embodiments of a film peeling inspection apparatus and a film peeling inspection method according to the present invention will be described with reference to the drawings. Hereinafter, the film peeling inspection object will be described by using a roll in which a ceramic film is provided on a metal book, but this does not limit the application destination of the film peeling inspection apparatus and the film peeling inspection method of the present invention. . In addition to the ceramic film, the same film peeling inspection can be performed for a film made of plastic or rubber.

(Embodiment 1)
FIG. 1 is a schematic diagram of a film peeling inspection apparatus and an inspection object according to the first embodiment. In the first embodiment, the inspection object is a roll 101 in which a ceramic film is sprayed on a metal base material. The roll 101 is provided with a roll driving device 109 that rotates the roll 101. The roll driving device 109 is a moving unit that rotates the roll 101. As means for measuring the relative displacement amount between the infrared camera 103 and the roll 101, a tachometer 107 for measuring the rotational speed of the roll 101 and a computer 108 storing a program for calculating the relative displacement amount from the rotational speed are provided. .

  An infrared heating device 102 is provided to heat the surface of the roll 101. The infrared heating device 102 is supported by a gantry 104, and an infrared camera 103 is provided in the vicinity of the infrared heating device 102. The gantry 104 includes a gantry driving device 105 and is movably installed along the rail 106.

  The infrared camera 103, the tachometer 107, and the gantry driving device 105 are connected to a computer 108, and transmit an infrared image, the rotation speed of the roll 101, and the moving distance of the gantry 104, respectively. In addition to the program for calculating the relative displacement described above, the computer 108 stores a calculation program for specifying the inspection position and a program for controlling the operation of the film peeling inspection apparatus by a method to be described later. It also functions as a means.

  The film peeling inspection apparatus according to the first embodiment performs a film peeling inspection by the following operation. First, the position of the gantry 104 is fixed, and the roll 101 is rotated in the direction of the arrow at a constant speed. The rotation speed is measured by the tachometer 107. In the present embodiment, the tachometer 107 measures the rotation speed of the roll 101 by irradiating the mark 110 disposed on the side surface of the roll 101 with light and detecting the reflected light. After a desired portion of the roll 101 is heated by the infrared heating device 102, the heated portion is shielded from heat from the infrared heating device 102 by the rotation of the roll 101, and moves to a position where the infrared camera 103 can shoot. . The infrared camera 103 takes an infrared image of the heated portion, and the infrared image is transmitted to the computer 108. Since the roll 101 is continuously rotated, when the infrared camera 103 is capturing an infrared image of a desired location, the infrared heating device 102 is simultaneously heating other locations. The other part is then moved to a position where the infrared camera 103 can shoot and the infrared image is taken. In this way, heating by the infrared heating device 102 and photographing of an infrared image by the infrared camera 103 are continuously performed. When the roll 101 is rotated once in this way, the film peeling inspection for one round is performed with the width of the range in which the infrared camera 103 can shoot.

  A rotation speed signal of the roll 101 measured by the tachometer 107 is transmitted to the computer 108. In the computer 108, the relative displacement amount of the roll 101 with respect to the infrared camera is obtained based on the rotation speed and the shape of the roll. An infrared image captured by the infrared camera 103 is transmitted to the computer 108, and the position on the roll 101 where the captured infrared image is captured is specified based on the previous relative displacement amount.

  After the roll 101 is rotated once by the method described above and the film peeling inspection for one round is performed, the gantry driving device 105 moves the gantry 104 in the direction of the broken line arrow so as to shift the photographing range of the infrared camera 103, and the same A film peeling inspection for one round is performed. In this way, the film peeling inspection of the entire roll 101 can be performed by moving the photographing range of the infrared camera 103.

  The computer 108 is a control means for controlling the operations of the roll drive device 109 and the gantry drive device 105 as well as a calculation means. According to the shape of the roll 101 that is the inspection object, the distance between the infrared heating device 102 and the infrared camera 103, the infrared camera 103 rotational speed, A control signal in the rotation direction is transmitted to the roll driving device 109. Further, the computer 108 transmits a signal for controlling the displacement position and the moving speed on the rail 106 to the gantry driving device 105.

According to the inspection method described above, even when the film to be inspected is thin or the dimension of the peeled damaged portion is small, the film peeling inspection can be reliably performed. The time from the end of heating to infrared image capturing depends on the thickness of the film, but when the thickness is about several tens of μm to 3 mm, it is preferably within 5 seconds from the end of heating. For example, in the case of a film having a thickness of 100 μm, an infrared image is usually taken within 1 second from the end of heating.
The interval between the infrared heating device 102 and the infrared camera 103 and the rotation speed of the roll are set so that the heated portion is heated sufficiently and at the same time, the infrared image is taken immediately after the portion is heated.

  With the film peeling inspection apparatus of the present embodiment described above, a ceramic film peeling test was performed. A roll with a diameter of 1 m and a ceramic film thickness of 100 μm was rotated at a rotation speed of 30 [times / min], the distance between the infrared heating device and the infrared camera was set to 500 mm, and an infrared image was taken 0.5 seconds after the end of heating. Set to do. As a result of the inspection, peeling damage of 1 mm or less could be detected.

  According to the film peeling inspection apparatus of the present embodiment, since an infrared image immediately after heating is taken, it can be detected before the temperature difference generated between the healthy site and the peeled damaged site is reduced, and the peeling is small in size. Damage can be detected. In addition, the infrared heating device 102 and the infrared camera 103 can be integrated to easily perform the film peeling inspection while rotating the inspection object, and the inspection speed is improved.

(Embodiment 2)
FIG. 2 is a schematic diagram of a film peeling inspection apparatus and an inspection object according to the second embodiment. In the second embodiment, the inspection object is a roll 201 in which a ceramic film is thermally sprayed on a metal base material as in the first embodiment. In the second embodiment, the film peeling inspection apparatus has the same configuration except for the arrangement of the infrared heating apparatus 202 and the infrared camera 203. In the present embodiment, the infrared heating device 202 and the infrared camera 203 are supported by the gantry 204 and are arranged side by side along a direction parallel to the rail 206.

  The film peeling inspection apparatus according to the second embodiment performs a film peeling inspection by the following operation. First, a part of the roll 201 fixed by the infrared heating device 202 is heated. Thereafter, when the gantry 204 travels on the rail 206 by the gantry driving device 205, the heated portion moves to a position where the infrared camera 203 can be photographed. The infrared camera 203 captures an infrared image of the location. By continuously performing the above procedure while moving the gantry 204 from the end of the roll 201 to the other end, the film peeling inspection is performed with a width within the range that the infrared camera 203 can shoot.

  After the gantry 204 travels once on the rail 207, the gantry 204 is returned to the position at the start of the inspection, and the roll 201 is rotated in the direction of the broken line arrow in FIG. Similarly, a film peeling inspection may be performed. Thus, the film peeling inspection of the entire roll 201 can be performed by moving the photographing range of the infrared camera 203.

  The film peeling inspection of the ceramic film was performed with the film peeling inspection apparatus of the present embodiment described above. For the same roll 201 as in the first embodiment, the distance between the infrared heating device 202 and the infrared camera 203 is 50 mm, the traveling speed of the gantry 204 on the rail 206 is 100 mm / second, and the infrared image is 0.5 seconds after the end of heating. Was set to shoot. As a result of the inspection, peeling damage of 1 mm or less could be detected.

  According to the film peeling inspection apparatus of the present embodiment, since the infrared heating device 202 and the infrared camera 203 travel together, even when the inspection object cannot be moved or the movement of the inspection object is difficult, Immediately after heating the inspection target portion, an infrared image of the portion can be taken. Therefore, it can detect before the temperature difference which arises between a healthy site | part and a peeling damage site | part eases, and can detect the peeling damage with a small dimension. Further, the inspection speed is improved, and even if the inspection object is large, the film peeling inspection can be performed in a short time.

(Embodiment 3)
The film peeling inspection apparatus according to the present invention can have an embodiment as shown in FIGS. 3 and 4 in addition to the film peeling inspection apparatus as in the first or second embodiment. 3 and 4 are schematic views of an inspection unit 310 that is a part of the film peeling inspection apparatus according to the third embodiment of the present invention. An infrared heating device 302 and an infrared camera 303 are housed in the casing of the inspection unit 310. The infrared heating device 302 is provided with a shutter 301. The infrared camera 303 is installed so that the place heated by the infrared heating device 302 can be photographed. 3 shows a state where the shutter 301 is open, and FIG. 4 shows a state where the shutter 301 is closed.

  The inspection unit 310 performs a film peeling inspection by the following operation. In a state where the shutter 301 is opened, a desired portion of the inspection object is heated by the infrared heating device 302. Next, the shutter 301 is closed. Immediately after the shutter 301 is closed, the infrared camera 303 takes an infrared image of the portion. The opening and closing of the shutter 301 and the timing of shooting by the infrared camera 303 are controlled by a computer (not shown). According to the inspection unit of the present embodiment, it becomes easy to block the heat from the infrared heating device 302 with the shutter 301. The inspection unit 310 can be used with a rail and a driving device as in the first and second embodiments.

  Although the embodiments of the present invention have been described above, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the present invention.

FIG. 1 is a schematic diagram of a film peeling inspection apparatus and an inspection object according to the first embodiment. FIG. 2 is a schematic diagram of a film peeling inspection apparatus and an inspection object according to the second embodiment. FIG. 3 is a schematic view of an inspection unit 310 that is a part of the film peeling inspection apparatus according to the third embodiment of the present invention. FIG. 4 is a schematic view of an inspection unit 310 that is a part of the film peeling inspection apparatus according to the third embodiment of the present invention.

Explanation of symbols

101, 201 Roll 102, 202 Infrared heating device 103, 203 Infrared camera 104, 204 Base 105, 205 Base drive 106, 206 Rail 107, 207 Tachometer 108, 208 Computer 109, 209 Roll drive 110 Mark 301 Shutter 302 Infrared Heating device 303 Infrared camera 310 Inspection unit

Claims (13)

  A heating device that heats a desired portion of an inspection object provided with a film on a base material, and an infrared camera that is provided so as to take an infrared image of the portion immediately after heating by the heating device. A film peeling inspection device.   The film peeling inspection apparatus according to claim 1, further comprising moving means for relatively moving the infrared camera and the inspection object.   The said moving means moves the said test | inspection object so that the said infrared camera may image | photograph the infrared image of the said desired location immediately after the said desired location is heated. Film peeling inspection device.   The said moving means moves the said heating apparatus and the said infrared camera so that the said infrared camera may image | photograph the infrared image of the said desired location immediately after the said desired location is heated. 2. The film peeling inspection apparatus according to 2.   The film peeling inspection apparatus according to claim 4, wherein the moving unit includes a rail, a gantry that supports the heating device and the infrared camera, and a driving device that causes the gantry to travel on the rail. .   A measuring means for measuring a relative displacement amount of the infrared camera generated by the moving means and the inspection object; and a calculating means for specifying an inspection position from the relative displacement amount, wherein the measuring means includes the relative displacement amount. The film peeling inspection apparatus according to any one of claims 2 to 4, wherein the film is converted into a relative displacement amount signal and the relative displacement amount signal is transmitted to the arithmetic means.   The film peeling inspection apparatus according to claim 6, further comprising a control unit that controls a moving speed for moving the infrared camera and the inspection object relative to each other and the relative displacement position. . A film peeling inspection comprising a step of heating a desired portion of an inspection object with a heating device, and a step of photographing an infrared image of the desired portion with an infrared camera immediately after the heating step. Method.   The film peeling inspection method according to claim 8, further comprising a step of relatively moving the infrared camera and the inspection object after the heating step.   The film peeling inspection method according to claim 9, wherein in the moving step, the heating device moves together with the infrared camera.   The moving step is a step of moving the inspection object so that the infrared camera captures an infrared image of the desired location immediately after the desired location is heated. The film peeling inspection method according to claim 9 or claim 10.   The moving step is a step of moving the infrared camera so that the infrared camera captures an infrared image of the desired location immediately after the desired location is heated. Or the film peeling test | inspection method of Claim 10.   10. The method according to claim 9, further comprising a step of measuring a relative displacement position between the camera and the inspection object generated in the moving step, and a step of specifying an inspection position from the relative displacement position. Item 13. The film peeling inspection method according to any one of Items12.

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