JP2005147384A - Valve and fluid system having the valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a compact valve, easily assembled without a metallic bolt, and a system having the valve. <P>SOLUTION: This valve includes: a driving part 2 having a piston 4 for driving a valve element in the axial direction; a valve body 1 having a valve chest 17 storing the valve element 7 at one end in the axial direction; and a pedestal 3. The driving part 2 includes a leg part 11 hung down from one end in the axial direction, and the leg part 11 forms a receiving part for storing the valve body 1 inside. The valve body 1 is inserted in the receiving part, the valve element 7 of the driving part 2 is stored in the valve chest 17 of the valve body 1, the pedestal 3 is fixed to the leg part 11 with the pedestal 3 abutted on the other end of the valve body 1 in the axial direction, whereby the valve body 1 is held between the pedestal 3 and the driving part 2. This type of valve can be used in a fluid system such as a fluid supply system and a fluid discharge system. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a valve that does not use a metal bolt or the like for connection between a valve body and a drive unit and a fluid system having the valve so that the valve body can be used in an atmosphere of highly corrosive fluid or corrosive gas. More particularly, the present invention relates to a compact and easy to assemble valve and a fluid system having the valve.

  Conventionally, a valve used in a line for transporting fluids such as various chemical solutions, pure water, and electrolytic solution has a structure in which a valve body 67 and a drive unit 68 are connected by a metal bolt 69 as shown in FIG. (For example, see Patent Document 1 and Patent Document 2).

JP-A-8-159307 (page 1-4, FIG. 1) Japanese Patent Laid-Open No. 11-304030 (page 1-7, FIG. 4)

  In the conventional valve, the metal bolt 69 is corroded by corrosive fluid leaking or permeating through the gap between the valve body 67 and the drive unit 68 or corrosive gas contained in the atmosphere in which the valve is installed. Then, there is a problem that the metal bolt 69 breaks and the valve breaks. As means for solving this problem, a method of applying a corrosion resistant coating to the metal bolt 69 and a method of converting the metal bolt 69 into a resin have been tried. However, in the former method, it is difficult to completely coat the portion that is screwed with the nut, and the cost is greatly increased. In the latter method, since the resin bolt does not have sufficient strength, there is a problem that the pressure range of the fluid that can be used is limited.

  The present invention has been made in view of the above-described problems of the prior art, and an object thereof is to provide a compact valve that can be easily assembled without using a metal bolt and a fluid system having the valve.

  The present invention provides, as a first aspect, a valve including a drive unit that drives a valve body in an axial direction and a valve body that has a valve chamber that houses the valve body at one end in the axial direction. A pedestal, and the drive unit includes a leg portion that hangs down in the axial direction, the leg portion forming a receiving portion for accommodating the valve body therein, and the valve body is inserted into the receiving portion; The valve body of the drive unit is accommodated in the valve chamber of the valve body, and the base is fixed to the leg in a state where the base is in contact with the other end of the valve body in the axial direction. The valve main body is sandwiched between the pedestal and the drive unit.

  In the valve, it is preferable that the leg part is a pair of leg parts that hang down from the driving part in the axial direction, and the receiving part is formed between the pair of leg parts.

  Moreover, in the said valve, it is possible to fix the said leg part and the said base by adhesion | attachment or welding.

  In the valve, one of a convex portion protruding in the direction perpendicular to the axial direction and a concave portion engaging with the convex portion is provided on the leg portion, and the other of the convex portion and the concave portion is provided on the pedestal. It is possible to fix the leg part and the pedestal by engaging the part and the concave part.

  In a preferred embodiment, the pedestal has a recess that accommodates one end portion of the leg portion in the axial direction, and one of the convex portion and the concave portion is formed on an outer surface of the one end portion of the leg portion. And the other of the recesses is formed on the side wall of the recess.

  In another preferred embodiment, the pedestal has a protruding portion inserted into the receiving portion, and one of the convex portion and the concave portion is formed on an inner surface of the leg portion, and the other of the convex portion and the concave portion is the It is formed in the part which faces the inner surface of the said leg part in the surrounding surface of a protrusion part.

  Moreover, this invention provides the fluid system which has one of said valves as a 2nd aspect. Such fluid systems include fluid supply systems or fluid discharge systems.

  The valve of the present invention and the fluid system having the valve have the above-described structure, and the following excellent effects can be obtained.

  Since the valve of the present invention holds the valve body by sandwiching the valve body between the drive unit and the pedestal, there is no need to use a bolt for joining the valve body and the drive unit, and corrosive fluid or gas can be used. There is no risk of damage to the fastening part causing damage to the valve. In particular, it is effective to fix the pedestal and the leg portion by engaging, bonding, and welding the cooperating convex and concave portions because a fastener such as a bolt is not required for assembling the valve. Further, the valve of the present invention is compact because of its simple structure, is easy to assemble and has excellent maintainability. Therefore, for example, a fluid system having the valve of the present invention such as a fluid supply system or a fluid discharge system can accommodate the system itself in a small size, and can save labor in maintenance work.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. However, it is needless to say that the present invention is not limited to the embodiments.

  FIG. 1 is a longitudinal sectional view showing a closed state of the valve of the present invention. FIG. 2 is a longitudinal sectional view of FIG. 1 viewed from the side (flow channel vertical direction). FIG. 3 is a longitudinal sectional view showing an open state of the valve of the present invention. FIG. 4 is a perspective view of the present invention. FIG. 5 is a perspective view of the drive portion of the valve of the present invention. FIG. 6 is a perspective view of the pedestal of the valve of the present invention. FIG. 7 is a perspective view showing a state in which the valve drive unit of the present invention and the valve body are combined. FIG. 8 is a perspective view showing the valve assembly method of the present invention. FIG. 9 is a perspective view showing a second embodiment of the valve of the present invention. FIG. 10 is a perspective view showing a drive unit of a third embodiment of the valve of the present invention. FIG. 11 is a perspective view showing a pedestal of a third embodiment of the valve of the present invention. FIG. 12 is a conceptual configuration diagram showing a fluid supply system having the valve of the present invention. FIG. 13 is a conceptual block diagram showing another fluid supply system having the valve of the present invention. FIG. 14 is a conceptual diagram showing a fluid discharge system having the valve of the present invention.

  In FIG. 1, reference numeral 1 denotes a valve body, which has a valve chamber 17 and an inlet channel 9 and an outlet channel 10 communicating with the valve chamber 17 at the center of the upper end in the axial direction. An annular groove 18 is provided outside the valve chamber 17 on the upper surface of the valve body 1.

  2 is a drive unit, a cylindrical cylinder part 13 is provided inside, a pair of legs 11 is provided at the lower part of the drive part 2 so as to extend the side surface of the drive part 2 downward, The lower inner wall of the leg portion 11 has a groove 12 that extends in the channel axis direction and is formed in a rectangular cross section. A receiving portion into which the valve body 1 is inserted is formed between the both leg portions 11, and the lower portion of the leg portion is set so that the upper surface of the groove 12 is flush with the lower end surface of the valve body 1. Further, a pair of working fluid supply ports 14 and 15 communicating with the upper side and the lower side of the cylinder unit 13 are provided on the side surface of the drive unit 2.

  Reference numeral 3 denotes a pedestal, which includes a base and a protrusion that is provided above the base and is inserted between the legs 11. On both sides of the upper portion of the projecting portion, there are provided rectangular convex portions 16 for fitting extending in the flow path axis direction. Further, the base portion extends further outward in the horizontal direction than the protruding portion, and the width thereof may be the same as or longer than the width of the driving portion 2. The rectangular convex portion 16 has a shape complementary to the groove 12 of the drive unit 2, and the valve main body 1 is fitted to or engaged with the groove 12 of the drive unit 2 so that the valve body 1 is connected to the drive unit 2 and the pedestal 3. Clamp between them.

  Reference numeral 4 denotes a piston, which is fitted into the cylinder portion 13 of the drive portion 2 so as to be sealed and movable up and down in the axial direction, and a rod portion 5 is provided in a suspended manner at the center of the bottom surface.

  A diaphragm retainer 6 has a through hole 19 through which the rod portion 5 of the piston 4 penetrates at the center, and is sandwiched between the valve body 1 and the drive portion 2.

  7 is a valve body accommodated in the valve chamber 17, which is screwed to the tip of the rod portion 5 of the piston 4 that penetrates the through hole 19 of the diaphragm retainer 6 and protrudes from the lower surface of the diaphragm retainer 6. As the piston 4 moves up and down, it moves up and down in the axial direction. The valve body 7 has a diaphragm 8 on the outer periphery, and the outer peripheral edge of the diaphragm 8 is inserted into the annular groove 18 of the valve body 1 and is sandwiched between the diaphragm retainer 6 and the valve body 1. The internal fluid is prevented from leaking outside.

  In the present invention, the type of the drive unit is not limited to an air drive type but may be a manual type or an electric type. The type of the valve is not limited to a diaphragm valve but may be a needle valve, a pinch valve, or the like.

  In the present invention, fluororesins such as PTFE (polytetrafluoroethylene) and PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer) are preferably used as members such as the main body, but polyvinyl chloride, polypropylene, etc. Other plastics may be used and are not particularly limited.

  As described above, the valve of the present invention has a small number of parts, a simple structure, and a compact configuration.

  Next, a method for assembling the valve according to the present embodiment will be described.

  First, the valve body 1 is fitted between the pair of leg portions 11 of the drive unit 2, and the valve body 7 is accommodated in the valve chamber 17 of the valve body 1 (state of FIG. 7). At this time, the tip of the leg 11 protrudes downward from the lower surface of the valve body 1, and the upper surface of the groove 12 on the inner wall of the leg 11 is flush with the lower surface of the valve body 1. The diaphragm 8 is sandwiched between the valve body 1 and the drive unit 2 via the diaphragm presser 6.

  Further, in a state where the upper end of the protruding portion of the pedestal 3 is in contact with the lower end of the valve body 1, the rectangular convex portion 16 of the pedestal 3 having a shape corresponding to the groove 12 is formed in the groove 12 of the leg portion 11. Fit (state of FIG. 8). As a result, the valve body 1 is clamped and fixed by the drive unit 2 and the base 3 (state shown in FIG. 4).

  Thus, the valve of the present invention is extremely easy to assemble and does not require any fasteners such as bolts. Therefore, the valve is made of metal by corrosive fluid or corrosive gas contained in the atmosphere in which the valve is installed. Corrosion of the bolt does not break the bolt and the valve does not break. Furthermore, since each part of the valve is made of resin, it can be used in various chemical liquid lines according to the characteristics of the resin. In particular, when a fluororesin is used, it can be used without worrying about corrosion. As for the disassembling method, the above assembling method may be performed in the reverse order, disassembling is extremely easy, and the maintenance is excellent.

  In addition, the fixing of the leg portion 11 and the pedestal 3 is not limited to fitting, but may be welding such as adhesion, heat welding, ultrasonic welding, or vibration welding. Furthermore, fitting and adhesion or welding may be used in combination.

  In the assembly method by bonding, an adhesive is applied to at least one of the end surface of the leg portion and the upper surface (that is, the joint surface) of the extension portion of the pedestal, and the leg portion is inserted into the valve body between the two leg portions. And the base are pressed together to cure the adhesive. In addition, the kind of adhesive agent used here is not specifically limited, What is necessary is just a sufficient adhesive strength with respect to the material of a leg part and a base.

  In the assembly method by welding, the end surfaces of the leg portions and the joint surfaces of the extension portions of the pedestal are melted by heating with a heater or the like, frictional heat using vibration or ultrasonic waves, etc., and then joined by pressure welding.

  The operation of the valve of the present embodiment having the above-described configuration is as follows.

  1 and 2 show a closed state of the valve. When a working fluid (for example, compressed air) is injected from the outside through a working fluid supply port 14 provided on the side surface of the drive unit 2, the operation is performed. Since the piston 4 is pushed up by the pressure of the fluid, the rod part 5 joined to the piston 4 is lifted upward, and the valve body 7 joined to the lower end of the rod part 5 is also lifted upward to open the valve. (State of FIG. 3).

  On the other hand, when the working fluid is injected from the working fluid supply port 15, the piston 4 is pushed down, and accordingly, the rod portion 5 and the valve body 7 joined to the lower end portion thereof are also pushed down, and the valve is closed. It becomes. (The state of FIGS. 1 and 2).

  FIG. 9 shows a second embodiment of the valve of the present invention.

  In FIG. 9, reference numeral 20 denotes a valve body, but since its constituent parts are the same as those in the first embodiment, description thereof will be omitted.

  Reference numeral 21 denotes a driving portion, which is different from the first embodiment in that a rectangular convex portion 23 protruding outward is formed at the tip of the leg portion 22.

  Reference numeral 24 denotes a pedestal, which has a groove shape with a central portion extending in the channel axis direction and recessed in a rectangular cross section, and has an inner wall having a shape corresponding to the rectangular convex portion 23 of the drive portion 21 and A concave groove 25 having a rectangular cross section extending in the direction of the flow path axis to which the rectangular convex portion 23 is fitted is provided.

  As in the first embodiment, the base 24 and the leg 22 are fitted and fixed, so that the valve body 20 fitted between the legs 22 of the drive 21 is connected to the drive 21 and the base 24. Between them.

  Thus, like the first embodiment, the second embodiment has a simple structure, is compact, and can be easily assembled.

  Since the operation of the valve of the second embodiment is the same as that of the first embodiment, description thereof will be omitted.

  10 and 11 show a third embodiment of the valve of the present invention.

  In FIG. 10, reference numeral 26 denotes a drive portion, which is different from the first embodiment in that the groove 28 of the leg portion 27 is formed in an annular shape.

  Reference numeral 29 denotes a pedestal, the central portion of which protrudes in a cylindrical shape from a plate-like base, and a pair of convex portions 30 protruding in the radial direction are provided on the outer periphery of the upper portion of the column.

  The leg 27 and the pedestal 29 are fixed as follows.

  First, the leg 27 and the pedestal 29 are fitted in a state in which the convex portion 30 is oriented in the same direction as the flow path axis direction of the valve body.

  Next, the pedestal is rotated 90 degrees to fit the convex portion 30 into the groove 28 of the leg portion 27, thereby fixing the leg portion 28 and the pedestal 29 and sandwiching the valve body.

  Thus, like the first embodiment, the third embodiment has a simple structure, is compact, and can be easily assembled.

  Since the operation of the valve of the third embodiment is the same as that of the first embodiment, the description thereof is omitted.

  FIG. 12 shows a fourth embodiment which is a fluid supply system having the valve of the present invention.

  As shown in FIG. 12, the circulation line 31 is arranged to circulate from the tank 32 to the tank 32 via the pump 33 and the valve 34. Further, the supply line 35 extends from the middle of the circulation line 31, and a valve 36, a regulator 37, a flow meter 38, and an electric pinch valve 39 are arranged in series in this order from the upstream side. A pressure gauge 40 may be disposed on the downstream side of the pump 33 in the circulation line 31, and a pressure sensor 41 may be disposed on the downstream side of the regulator 37 in the supply line 35. Moreover, the chemical | medical solution is used as the fluid which flows through each line. The members arranged in each line will be described in detail below.

  The tank 32 stores a chemical solution to be supplied to the use point. In this embodiment, a chemical solution (hydrochloric acid, sulfuric acid, nitric acid, hydrofluoric acid, sodium hydroxide, ammonia water, etc.) is used as the fluid. However, pure water, resist, CMP slurry, etc. may be used. The fluid is not particularly limited as long as it is suitably used.

  The pump 33 is a bellows pump that pumps fluid to each line. In this embodiment, a bellows pump is used, but any pump may be used regardless of whether or not pulsation occurs, and is not particularly limited.

  The valves 34 and 36 are, for example, the valves of the present invention as shown in the first embodiment, and the operation thereof is the same as that of the first embodiment, so that the description thereof is omitted.

  The regulator 37 is for suppressing the pulsation of the fluid and controlling the pressure substantially constant.

  The flow meter 38 is an ultrasonic flow meter that measures the flow rate of a fluid using a difference in propagation time of ultrasonic waves. In this embodiment, an ultrasonic flow meter is used, but a Karman vortex flow meter, an impeller flow meter, an electromagnetic flow meter, a differential pressure flow meter, a positive displacement flow meter, a hot wire flow meter, or a mass flow meter. Other flow meters such as may be used.

  The electric pinch valve 39 is an electric drive type automatic pinch valve that performs flow rate control by changing the opening degree by electric drive. Although this embodiment is an electric drive type, an air drive type or the like may be used as long as it can automatically open and close, and is not particularly limited.

  The operation of the fourth embodiment having the above-described configuration is as follows.

  When the valve 36 is in the open state, the chemical liquid fed from the pump 33 also flows to the supply line 35 branched from the circulation line 31. After being controlled to a constant pressure by the regulator 37, the measured value measured by the flow meter 38 is converted into an electrical signal, and feedback controlled by a control unit (not shown) to change the opening of the electric pinch valve 39, The electric pinch valve 39 is controlled to converge the flow rate of the fluid to a set flow rate value. For this reason, the chemical | medical solution which passed the supply line 35 is stably supplied to a use point with the flow volume set arbitrarily.

  At this time, since the valve of the present invention is compact and the configuration for performing flow rate control is also compact, the system itself can be kept small. Further, since the maintenance of the valve of the present invention is easy, it is possible to save labor in the maintenance of the system.

  FIG. 13 shows a fifth embodiment which is another fluid supply system having the valve of the present invention.

  As shown in FIG. 13, reference numeral 42 denotes a first supply line. Along the first supply line 42, a tank 43, a pump 44, a valve 45, a flow meter 46, and a valve 47 are arranged in this order from the upstream side. They are arranged in series. Reference numeral 48 denotes a second supply line. Along the second supply line 48, a tank 49, a pump 50, a valve 51, a flow meter 52, and a valve 53 are arranged in series in this order from the upstream side. The valve 54 is disposed on a line that connects the first supply line 42 and the second supply line 48. Further, the pressure gauge 55 may be disposed on the downstream side of the pump 44 in the first supply line 42, and the pressure gauge 56 may be disposed on the downstream side of the pump 50 in the second supply line 48. Moreover, the chemical | medical solution is used as the fluid which flows through each line.

  Since the tanks 43 and 49, the pumps 44 and 50, the valves 45 and 47, 51, 53 and 54, and the flow meters 46 and 52, which are the components arranged in each line, are the same as those in the fourth embodiment, the description will be given. Omitted.

  The operation of the fifth embodiment having the above-described configuration is as follows.

  First, when the valve 54 is closed and the valves 45, 47, 51, 53 are used in an open state, the chemical stored in the tank 43 is pumped by the pump 44, passes through the first supply line 42, and is used. To be supplied. Similarly, the chemical solution stored in the tank 49 is pumped by the pump 50, passes through the second supply line 48, and is supplied to the use point.

  Next, when the valve 54 is in an open state, the valve 45, 47, 51, 53 can be used in various forms depending on the application by opening and closing operations. For example, by using the valves 45 and 53 in the open state and the valves 47 and 51 in the closed state, the use point of the chemical solution can be changed and supplied. Further, for example, by opening the valves 45, 51 and 53 and closing the valve 47, the respective chemical solutions in the tanks 43 and 49 can be mixed and supplied to the use point.

  The chemical solutions stored in the tanks 43 and 49 may be the same or different, and the flow rates of the first supply line 42 and the second supply line 48 may be the same or different.

  At this time, a large number of valves of the present invention are used in the system of the present embodiment. However, since the valve of the present invention is compact, it does not take up space in the arrangement in the system, and the system itself can be kept small. . Further, since the maintenance of the valve of the present invention is easy, it is possible to save labor in the maintenance of the system.

  The fluid supply system having the valve of the present invention is not limited to the fluid supply system shown in the fourth and fifth embodiments, and the system configuration is provided if the valve of the present invention is provided. May be of any type.

  FIG. 14 shows a sixth embodiment which is a fluid discharge system having the valve of the present invention.

  As shown in FIG. 14, a discharge line 57 extends from the tank 58 via the pump 59 to the concentration tank 60. Further, the circulation line 61 is arranged so as to circulate from the concentration tank 60 to the concentration tank 60 via the pump 62, the filtering device 63 and the valve 64. Further, the valve 65 is arranged on a line for diverting the concentrated liquid from between the pump 62 and the filtration device 63, and the valve 66 is arranged on the line for discharging the permeated liquid permeated by the filtration device 63. Has been. A CMP slurry is used as the fluid flowing through each line. The members arranged in each line will be described in detail below.

  The tank 58 stores the drainage of the CMP slurry discharged from the use point. In this embodiment, a slurry for CMP is used as the fluid, but a chemical solution (hydrochloric acid, sulfuric acid, nitric acid, hydrofluoric acid, sodium hydroxide, ammonia water, etc.), pure water, resist, etc. may be used. The fluid is not particularly limited as long as it is suitably used.

  The concentration tank 60 stores the CMP slurry drainage from the discharge line 57, and stores the CMP slurry concentrate that is not permeated by the filtration device 63 in the circulation line 61 by circulation.

  The filtering device 63 filters the drainage liquid of the CMP slurry and separates it into a permeated liquid and a non-permeated CMP slurry concentrate. In the present embodiment, there is a single filtering device, but it may be configured such that the fluid passes through a plurality of filtering devices.

  Since the pumps 59 and 62 and the valves 64, 65 and 66 are the same as the pump and valves of the fourth embodiment, description thereof will be omitted.

  The operation of the sixth embodiment having the above-described configuration is as follows.

  The CMP slurry drained from the use point is temporarily stored in the tank 58 and is first pumped from the tank 58 to the concentration tank 60 by the pump 59. Next, the CMP slurry is circulated through the circulation line 61 by the pump 62. At this time, the permeate filtered by the filtration device 63 passes through the open valve 66 and is discharged. The discharged permeate is recycled and used, or drained and discharged. Further, the concentrated slurry of CMP slurry that is not permeated is circulated through the circulation line 61 and stored in the concentration tank 60 in a concentrated state. The concentrated liquid stored in the concentration tank 60 is discharged with the valve 65 opened. The discharged concentrate is processed for industrial waste.

  As described above, the system using the valve of the present invention uses a compact valve, so that it does not take a place in the arrangement in the system. Especially in the fluid discharge system, complicated piping is often built, and valves are provided everywhere in the piping. However, if the valve of the present invention is used, no space is taken in the system, so the system itself can be kept small. . In addition, since the maintenance of the valve of the present invention is easy, in the fluid discharge system using many of the valves of the present invention, the greater the proportion of the valves of the present invention occupied in the installed valves, the more labor saving work for maintenance is achieved. be able to.

  The fluid discharge system having the valve of the present invention is not limited to the fluid discharge system shown in the sixth embodiment, and any configuration of the system may be used as long as it has the valve of the present invention. It may be of a type.

  The valve of the present invention is used in production lines in chemical factories, food fields, pharmaceutical fields, etc., semiconductor manufacturing equipment, FPD manufacturing equipment such as liquid crystal, and various equipment such as plating and chemical supply. It can be used in a fluid supply system or a fluid discharge system in which the fastening portion may be damaged due to corrosion by fluid or gas. In addition, since it is compact, it can be used in a small piping space. In the system using the valve of the present invention, the system itself can be accommodated in a small size, and labor saving in maintenance work can be achieved.

It is a longitudinal cross-sectional view which shows the closed state of the valve of this invention. It is the longitudinal cross-sectional view which looked at FIG. 1 from the side surface (direction perpendicular | vertical to a flow-path axis). It is a longitudinal cross-sectional view which shows the open state of the valve of FIG. It is a perspective view of the present invention. It is a perspective view of the drive part of this invention. It is a perspective view of the base of this invention. In Example 1 of this invention, it is a perspective view which shows the state which fitted the valve main body. In Example 1 of this invention, it is a perspective view which shows the state which fitted the base. It is a perspective view which shows the other Example of this invention. It is a perspective view which shows the other Example of this invention. It is a perspective view of the base of the other Example of this invention. It is a conceptual lineblock diagram showing a fluid supply system which has a valve of the present invention. It is a conceptual block diagram which shows the other fluid supply system which has a valve of this invention. It is a conceptual lineblock diagram showing a fluid discharge system which has a valve of the present invention. It is a longitudinal cross-sectional view which shows the conventional valve.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Valve main body 2 ... Drive part 3 ... Base 4 ... Piston 5 ... Rod part 6 ... Diaphragm presser 7 ... Valve body 8 ... Diaphragm 9 ... Inlet flow path 10 ... Outlet flow path 11 ... Leg part 12 ... Groove 13 ... Cylinder part DESCRIPTION OF SYMBOLS 14 ... Working fluid supply port 15 ... Working fluid supply port 16 ... Rectangular convex part 17 ... Valve chamber 18 ... Annular groove 19 ... Through hole 20 ... Valve body 21 ... Drive part 22 ... Leg part 23 ... Rectangular convex part 24 ... Pedestal 25 ... Groove 26 ... Driver 27 ... Leg 28 ... Groove 29 ... Pedestal 30 ... Convex 31 ... Circulation line 32 ... Tank 33 ... Pump 34 ... Valve 35 ... Supply line 36 ... Valve 37 ... Regulator 38 ... Flow meter 39 ... electric pinch valve 40 ... pressure gauge 41 ... pressure sensor 42 ... first supply line 43 ... tank 44 ... pump 45 ... valve 46 ... flow meter 47 ... valve 48 ... second supply line 49 ... tank 50 ... pump 51 ... valve 52 ... Flow meter 53 ... Valve 54 ... Valve 5 ... Pressure gauge 56 ... Pressure gauge 57 ... Discharge line 58 ... Tank 59 ... Pump 60 ... Concentration tank 61 ... Circulation line 62 ... Pump 63 ... Filtration device 64 ... Valve 65 ... Valve 66 ... Valve 67 ... Valve body 68 ... Drive unit 69 ... Metal bolt

Claims (8)

In a valve comprising: a drive unit that drives a valve body in the axial direction; and a valve body having a valve chamber that houses the valve body at one end in the axial direction.
The valve further includes a pedestal, and the drive unit includes a leg portion that hangs down in the axial direction. The leg portion forms a receiving portion that accommodates the valve main body therein, and the valve main body is disposed in the receiving portion. The valve body of the drive unit is accommodated in the valve chamber of the valve body, and the base is fixed to the leg in a state where the base is in contact with the other end of the valve body in the axial direction. Thus, the valve main body is sandwiched between the pedestal and the drive unit.   2. The valve according to claim 1, wherein the leg portions are a pair of leg portions depending from the driving portion in the axial direction, and the receiving portion is formed between the pair of leg portions.   The valve according to claim 1 or 2, wherein the leg portion and the pedestal are fixed by adhesion or welding.   One of a convex part protruding in the direction perpendicular to the axial direction and a concave part engaging with the convex part is provided on the leg part, the other of the convex part and the concave part is provided on the base, and the convex part and the concave part are provided. The valve according to claim 1 or 2, wherein the leg and the pedestal are fixed by being engaged.   The said base has a hollow in a center part, The said convex part is formed in the outer surface of the one end part of the said leg part in the said axial direction, The said recessed part is formed in the inner wall of the said hollow. valve.   The pedestal has a protruding portion inserted into the receiving portion, the concave portion is formed on the inner side surface of the leg portion, and the convex portion faces the inner side surface of the leg portion on the peripheral surface of the protruding portion. The valve according to claim 4, wherein the valve is formed.   A fluid system comprising the valve according to any one of claims 1 to 6.   The fluid system of claim 7, wherein the fluid system is a fluid supply system or a fluid discharge system.

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