JP2005144600A - Onboard measuring device - Google Patents

Onboard measuring device Download PDF

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JP2005144600A
JP2005144600A JP2003385527A JP2003385527A JP2005144600A JP 2005144600 A JP2005144600 A JP 2005144600A JP 2003385527 A JP2003385527 A JP 2003385527A JP 2003385527 A JP2003385527 A JP 2003385527A JP 2005144600 A JP2005144600 A JP 2005144600A
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workpiece
measuring device
processing
machine
grinding
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JP4310579B2 (en
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Kenjiro Kodama
健治郎 児玉
Joji Kitani
譲治 木谷
Koichi Urushizaki
功一 漆崎
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YUASA TECHNICAL ENGINEERING CO
YUASA TECHNICAL ENGINEERING CO Ltd
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YUASA TECHNICAL ENGINEERING CO
YUASA TECHNICAL ENGINEERING CO Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an onboard measuring device capable of measuring a horizontal directional and vertical directional dimension of a processing object part of a workpiece by grinding, capable of coping with processing from both the horizontal and vertical directions of the processing object part of the workpiece, having a processing means of a processing machine and the onboard measuring device such as grinding in a near position, and preventing the deterioration in workability when measuring the dimension while performing processing such as grinding. <P>SOLUTION: This measuring device of the processing object part Wa of the workpiece W, is arranged in a side part of the processing means of the processing machine so as to be freely movable to a measuring position and a retreat position by longitudinally moving, and to be vertically freely movable in the measuring position. An expanding means 9 is coaxially installed with a photographing means 8 of the processing object part Wa. One has a prism 10 downward and expands the processing object part Wa in the vertical direction of the workpiece W, and the other expands the processing object part Wa in the horizontal direction of the workpiece W. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

この発明は、研削加工機などの機上に取り付けられ、研削加工などされた被加工物を計測する装置に関するものである。   The present invention relates to an apparatus for measuring a workpiece that is mounted on a machine such as a grinding machine and is ground.

従来、研削加工機などにおいては、加工途中に被加工物の被加工部の寸法を計測しながら最終目的寸法に加工するための計測装置が必要とされている。ところが、加工機と計測装置とはまったく別個に据え付けられており、加工途中に被加工物の被加工部の寸法を計測装置で計測するには、被加工物を加工機のテーブルから取り外さなけれならず、計測が終わり再び加工が必要になった場合には、被加工物を再び加工機のテーブルに取り付けなければならないため、この再度の取り付けによって加工寸法精度に誤差が生じるという問題点を有していた。また、この再度の取り付けに手間隙がかかり、作業効率が悪くなるという問題点を有していた。   2. Description of the Related Art Conventionally, in a grinding machine or the like, there is a need for a measuring device for processing to a final target dimension while measuring the dimension of a processed part of a workpiece during the processing. However, the processing machine and the measuring device are installed completely separately, and in order to measure the dimension of the workpiece part of the workpiece with the measuring device during processing, the workpiece must be removed from the table of the processing machine. However, when measurement is completed and machining is required again, the workpiece must be mounted on the table of the processing machine again. It was. Further, this re-attachment takes time, and there is a problem that work efficiency is deteriorated.

そのため、図8に示したような、被加工物の加工途中にテーブルから取り外さないで被加工物の寸法を計測し、取り外し取り付けによる誤差をなくして高精度な加工を行えるようにした機上計測装置を備えた研削機が発明されている。   Therefore, as shown in Fig. 8, on-machine measurement that measures the dimensions of the workpiece without removing it from the table during machining of the workpiece, and eliminates errors due to detachment and attachment, allowing high-precision machining. A grinding machine with an apparatus has been invented.

この研削機は、被研削物31が取り付けられるテーブル32と、砥石33と、この砥石33に対して前記テーブル32を相対的に水平に移動させる移動手段34と、前記テーブル32上に取り付けられた被研削物31上の被研削部31aの水平方向の寸法を測定する工具顕微鏡35を含む測定手段36と、この測定手段36により測定された被研削部31aの寸法に応じて研削時に前記移動手段34を制御する制御手段(図示せず)を備えたものとしている(特許文献1)。
特開平6−15567号公報(第2頁、図2)
This grinding machine is mounted on a table 32 to which an object to be ground 31 is attached, a grindstone 33, a moving means 34 for moving the table 32 relatively horizontally with respect to the grindstone 33, and the table 32. Measuring means 36 including a tool microscope 35 for measuring the horizontal dimension of the portion 31a to be ground on the workpiece 31 and the moving means during grinding according to the dimension of the portion 31a to be ground measured by the measuring means 36 It is assumed that a control means (not shown) for controlling 34 is provided (Patent Document 1).
Japanese Patent Laid-Open No. 6-15567 (2nd page, FIG. 2)

しかしながら、上記従来の研削機に備えられた機上計測装置では、テーブル32上に取り付けられた被研削物31の被研削部31aの水平方向の寸法しか計測することができず、その被研削物31の被研削部31aの上下方向の寸法は計測することができず、被研削物31を水平、上下の両方向から切削する場合には対応することができないという課題を有していた。   However, the on-machine measuring device provided in the conventional grinding machine can measure only the horizontal dimension of the portion to be ground 31a of the workpiece 31 mounted on the table 32, and the workpiece to be ground. The vertical dimension of the portion 31a to be ground 31 cannot be measured, and there is a problem that it cannot be handled when the workpiece 31 is cut from both the horizontal and vertical directions.

さらに、上記従来の研削機に備えられた機上計測装置は、図8に示されたように研削手段である砥石33とは離れた位置に備えられているので、移動手段34によるテーブル32の移動幅が大きくなって、機上計測装置で被研削物31の被研削部31aの寸法を計測しつつ研削機で研削する場合には作業性が悪くなるという課題を有していた。   Further, since the on-machine measuring device provided in the conventional grinding machine is provided at a position away from the grindstone 33 as the grinding means as shown in FIG. When the grinding is performed with a grinding machine while measuring the dimension of the portion 31a to be ground with the on-machine measuring device with the on-machine measuring device, there is a problem that workability is deteriorated.

そこで、この発明は、上記従来の研削機などに備えられた機上計測装置が有する課題を解決するものであり、研削などによる被加工物の被加工部の水平方向および上下方向の寸法を計測することができ、被加工物の被加工部の水平、上下の両方向からの加工にも対応することができ、しかも研削などの加工機の加工手段と機上計測装置を近い位置に備えたものとし、研削などの加工をしつつ寸法計測をする場合の作業性が悪くならないようにした機上計測装置を提供することを目的としてなされたものである。   Accordingly, the present invention solves the problems of the on-machine measuring device provided in the conventional grinding machine and measures the horizontal and vertical dimensions of the workpiece part of the workpiece by grinding or the like. It can handle both horizontal and vertical machining of the workpiece part, and it is equipped with processing means for processing machines such as grinding and on-machine measuring devices at close positions. The purpose of the present invention is to provide an on-machine measuring device that does not deteriorate the workability when measuring dimensions while processing such as grinding.

そのため、この発明の機上計測装置は、加工機の加工手段の側部に、前後動することにより計測位置と退避位置に移動自在とし、計測位置で上下動自在として設けられた被加工物Wの被加工部Waの計測装置であって、前記被加工部Waの撮影手段8と同一軸上に取り付けられる拡大手段9を、一方は下方にプリズム10を備えて被加工物Wの上下方向の被加工部Waを拡大するものとし、他方は被加工物Wの水平方向の被加工部Waを拡大するものとしている。   For this reason, the on-machine measuring device of the present invention can be moved to the measurement position and the retreat position by moving back and forth on the side of the processing means of the processing machine, and the workpiece W provided to be movable up and down at the measurement position. Measuring device Wa of the processing portion Wa, and an enlargement means 9 attached on the same axis as the photographing means 8 of the processing portion Wa, one of which is provided with a prism 10 on the lower side in the vertical direction of the work W. The workpiece portion Wa is enlarged, and the other is to enlarge the workpiece portion Wa in the horizontal direction of the workpiece W.

そして、この発明の機上計測装置では、前記拡大手段9を、それぞれレボルバ11に取り付け、被加工物Wの上下方向の被加工部Waの拡大と、被加工物Wの水平方向の被加工部Waの拡大を切り換え自在としている。   And in the on-machine measuring device of this invention, the said expansion means 9 is attached to the revolver 11, respectively, the expansion of the workpiece part Wa of the up-down direction of the workpiece W, and the workpiece part of the workpiece W in the horizontal direction Wa enlargement can be switched freely.

さらに、この発明の機上計測装置では、前記プリズム10を上下方向および水平方向に微調整可能としたものとしている。   Further, in the on-machine measuring device of the present invention, the prism 10 can be finely adjusted in the vertical direction and the horizontal direction.

この発明の機上計測装置は、以上に述べたように構成されているので、研削などによる被加工物の被加工部の水平方向および上下方向の寸法を計測することができ、被加工物の被加工部の水平、上下の両方向からの加工にも対応することができ、しかも研削などの加工機の加工手段と機上計測装置を近い位置に備えたものとしたので、研削などの加工をしつつ寸法計測をする場合の作業性が悪くならないものとなった。   Since the on-machine measuring device according to the present invention is configured as described above, it can measure the horizontal and vertical dimensions of the processed portion of the workpiece by grinding or the like. The machined part can be processed from both the horizontal and vertical directions, and the processing means of the processing machine, such as grinding, and the on-machine measuring device are provided close to each other. However, the workability in measuring dimensions was not deteriorated.

以下、この発明の機上計測装置を実施するための最良の形態を、図面に基づいて詳細に説明する。   The best mode for carrying out the on-machine measuring device of the present invention will be described below in detail with reference to the drawings.

図1、2は、この発明の機上計測装置を研削加工機に備えつけた場合の実施の形態を示している。研削加工機は、機台1上に図1中の前後方向に移動自在としたYテーブル2が設けられ、このYテーブル2の上に図1中の左右方向に移動自在としたXテーブル3が設けられている。さらに、Xテーブル3の上面には、被加工物Wが着脱自在に取り付けられている。また、前記機台1の後側には、加工手段である研削盤4が備えつけられている。この研削盤4には、前記被加工物Wに上方から対向し、図1中の上下方向に移動自在とした砥石ヘッド5が設けられている。そして、この砥石ヘッド5には、回転駆動する円盤状の砥石6が取り付けられている。   1 and 2 show an embodiment in which the on-machine measuring device of the present invention is provided in a grinding machine. The grinding machine is provided with a Y table 2 that is movable in the front-rear direction in FIG. 1 on a machine base 1, and an X table 3 that is movable in the left-right direction in FIG. Is provided. Further, a workpiece W is detachably attached to the upper surface of the X table 3. A grinding machine 4 as a processing means is provided on the rear side of the machine base 1. The grinding machine 4 is provided with a grindstone head 5 that faces the workpiece W from above and is movable in the vertical direction in FIG. The grindstone head 5 is provided with a disk-shaped grindstone 6 that is rotationally driven.

前記研削盤4の側部には、図1において前後動することにより、計測位置と退避位置に移動自在とし、計測位置で上下動自在とした被加工物Wの被加工部Waの計測装置7が設けられている。この計測装置7は、被加工部Waの撮影手段8と同一軸上に取り付けられる拡大手段9を、一方は下方にプリズム10を備えて被加工物Wの上下方向の被加工部Waを拡大するものとし、他方は被加工物Wの水平方向の被加工部Waを拡大するものとして、それぞれをレボルバ11に取り付け、被加工物Wの上下方向の被加工部Waの拡大と、被加工物Wの水平方向の被加工部Waの拡大を切り換え自在としている。   The measuring device 7 of the workpiece Wa of the workpiece W that is movable to the measurement position and the retreat position by moving back and forth in FIG. Is provided. This measuring device 7 has an enlargement means 9 attached on the same axis as the photographing means 8 of the workpiece Wa, and one of them has a prism 10 below to enlarge the workpiece Wa in the vertical direction of the workpiece W. Assuming that the other is to enlarge the horizontal workpiece portion Wa of the workpiece W, each is attached to the revolver 11, and the workpiece W in the vertical direction of the workpiece W is enlarged, and the workpiece W The horizontal enlargement of the work portion Wa can be switched.

前記計測装置7は、その支持体12の側部に設けられたガイド13aが研削盤4の側部に設けられた水平レール14aをスライドすることにより前後動し、支持体12の前部に設けられた縦レール14bを計測手段7の後部に設けられたガイド13bがスライドすることにより上下動するようにして、前記したように計測位置と退避位置に移動自在としている。   The measuring device 7 moves forward and backward by sliding a horizontal rail 14 a provided on the side of the grinding machine 4 by a guide 13 a provided on the side of the support 12, and provided on the front of the support 12. The vertical rail 14b is moved up and down by sliding a guide 13b provided at the rear part of the measuring means 7 so as to be movable between the measurement position and the retreat position as described above.

前記撮影手段8は、CCDカメラ等としており、拡大手段9によって拡大された被加工物Wの被加工部Waを撮影する。この撮影手段8で撮影された被加工部Waの撮像は、画像処理装置(図示せず)に取り込まれて画像信号となり、演算処理装置(図示せず)によって計測寸法に数値化される。   The photographing means 8 is a CCD camera or the like, and photographs the workpiece Wa of the workpiece W enlarged by the enlargement means 9. The image of the workpiece Wa photographed by the photographing means 8 is taken into an image processing device (not shown) and becomes an image signal, and is converted into a measured dimension by an arithmetic processing device (not shown).

前記拡大手段9は、顕微鏡等としており、レボルバ11に対向して二個取り付けられており、一方は前記したように下方にプリズム10を備えている。レボルバ11は、手動操作または自動操作されるものとしており、図示したものは斜めに回転する形式としているが、水平に回転する形式としてもよい。   The magnifying means 9 is a microscope or the like, and two magnifying means 9 are attached to face the revolver 11, and one of the magnifying means 9 includes the prism 10 below as described above. The revolver 11 is assumed to be manually operated or automatically operated. The revolver 11 is configured to rotate obliquely, but may be configured to rotate horizontally.

前記プリズム10は、拡大手段9に保持された微調整手段15に上下方向および水平方向に微調整可能として取り付けられている。微調整手段15は、図3に示したように、拡大手段9の上下部を保持する保持孔16aを設けた上下保持体16と、この上下保持体16の支持板17に取り付けた受け体18と、この受け体18を上下方向にスライドするスライド体19と、このスライド体19の下端に取り付けられたプリズム保持体20とからなる。そして、前記プリズム10は、このプリズム保持体20に水平方向にスライド自在として取り付けられ、拡大手段9の下方に位置するようにしている。前記スライド体19は、上端のネジ孔19aに螺合し、下端を受け体18の上面18aに押し当てた調整ネジ21を緩めたり締め付けたりすることによって、上下方向にスライドするようにしている。さらに、前記スライド体19は、そのスライドした適宜位置において、スリット19bに挿入されて支持板17に螺合する固定ネジ22によって固定されるようにしている。前記プリズム保持体20は、二分割体としてそれぞれにプリズム10の両側ガイド10aがスライドするレール20aを形成したものとし、スライド体19の下端に固定ネジ23によって固定されている。そして、前記プリズム10は、その後端に調整ネジ24が固着されており、この調整ネジ24がスライド体19の下端のネジ孔19cに螺合して貫通され、その調整ネジ24の後端に螺合した調整摘み25を緩めたり締め付けたりすることによって、水平方向にスライドするようにしている。なお、図3中の符号26は、上下保持体16を支持板17に固定しておくための固定ネジであり、符号27は支持板17に受け体18を固定しておくための固定ネジである。   The prism 10 is attached to a fine adjustment means 15 held by the enlargement means 9 so that it can be finely adjusted in the vertical and horizontal directions. As shown in FIG. 3, the fine adjustment means 15 includes an upper and lower holding body 16 provided with holding holes 16 a that hold the upper and lower portions of the enlarging means 9, and a receiving body 18 attached to a support plate 17 of the upper and lower holding body 16. And a slide body 19 that slides the receiving body 18 in the vertical direction and a prism holder 20 attached to the lower end of the slide body 19. The prism 10 is attached to the prism holder 20 so as to be slidable in the horizontal direction, and is positioned below the magnifying means 9. The slide body 19 is adapted to slide in the vertical direction by being screwed into the screw hole 19a at the upper end and loosening or tightening the adjusting screw 21 pressed against the upper surface 18a of the receiving body 18 at the lower end. Further, the slide body 19 is fixed by a fixing screw 22 inserted into the slit 19b and screwed into the support plate 17 at an appropriate position where the slide body 19 is slid. The prism holding body 20 is formed by forming a rail 20a on which the both side guides 10a of the prism 10 slide respectively as a two-part body, and is fixed to the lower end of the slide body 19 by a fixing screw 23. An adjustment screw 24 is fixed to the rear end of the prism 10, and the adjustment screw 24 is threaded into a screw hole 19 c at the lower end of the slide body 19, and is screwed to the rear end of the adjustment screw 24. The combined adjustment knob 25 is loosened or tightened to slide in the horizontal direction. 3 is a fixing screw for fixing the upper and lower holding bodies 16 to the support plate 17, and 27 is a fixing screw for fixing the receiving body 18 to the support plate 17. is there.

以上のように構成したこの発明の機上計測装置を用いて、被加工物Wの加工途中にテーブルから取り外さないで被加工物Wの寸法を計測するには、次のようにして行う。   In order to measure the dimension of the workpiece W without removing it from the table during the processing of the workpiece W, the on-machine measuring device of the present invention configured as described above is performed as follows.

先ず、被加工物Wの被加工部Waの上下方向の寸法を計測するには、Xテーブル3を移動させてこの被加工物Wを計測装置7に接近させると共に、計測装置7を退避位置からスライドさせて、その被加工部Waの側方である計測位置に移動させる。この場合、計測装置7は研削盤4の側部に設けられているので、被加工物Wの被加工部Waの加工後、Xテーブル3の移動も少なくてすみ、その被加工部Waの側方に直ぐに移動させることができる。そして、レボルバ11を回転させて、撮影手段8と同一軸上に取り付けられる拡大手段9を、プリズム10を備えたものに切り換える。次に、前記被加工部Waの側方で計測装置7を図5中のYZ軸方向に移動させながら、被加工部Waを拡大手段9により拡大させ、撮影手段8によって、図5に一点鎖線で囲まれた部分づつを連続撮影していき、YZ軸方向の被加工部Waの全体を撮影する。この撮影された被加工部Waの撮像は、画像処理装置に取り込まれて画像信号となり、演算処理装置で計測寸法に数値化される。これにより被加工物Wの被加工部Waである溝の高さh、溝の幅w、溝のピッチp1 などを計測することができる。なお、前記プリズム10に取り付けられた微調整手段15は、光軸の水平、垂直、前後、左右、傾斜を調整するためのものである。   First, in order to measure the vertical dimension of the workpiece Wa of the workpiece W, the X table 3 is moved to bring the workpiece W closer to the measuring device 7 and the measuring device 7 is moved from the retracted position. It slides and moves to the measurement position which is the side of the to-be-processed part Wa. In this case, since the measuring device 7 is provided on the side portion of the grinding machine 4, the X table 3 can be moved less after the workpiece portion Wa of the workpiece W is processed. Can be moved immediately. Then, the revolver 11 is rotated to switch the magnifying means 9 attached on the same axis as the photographing means 8 to the one provided with the prism 10. Next, while moving the measuring device 7 in the YZ-axis direction in FIG. 5 on the side of the processed part Wa, the processed part Wa is enlarged by the magnifying means 9, and the photographic means 8 is shown in FIG. The portions surrounded by are continuously photographed, and the entire processed portion Wa in the YZ axis direction is photographed. The captured image of the processed portion Wa is captured by the image processing apparatus to become an image signal, which is converted into a measurement dimension by the arithmetic processing apparatus. As a result, the height h of the groove, the width w of the groove, the pitch p1 of the groove, and the like, which are the processed portion Wa of the workpiece W, can be measured. The fine adjustment means 15 attached to the prism 10 is for adjusting the horizontal, vertical, front and rear, left and right, and inclination of the optical axis.

次に、被加工物Wの被加工部Waの水平方向の寸法を計測するには、Xテーブル3を移動させてこの被加工物Wを計測装置7に接近させると共に、計測装置7を退避位置からスライドさせて、その被加工部Waの上方である計測位置に移動させる。この場合も前記したのと同様に、計測装置7は研削盤4の側部に設けられているので、被加工物Wの被加工部Waの加工後、Xテーブル3の移動も少なくてすみ、その被加工部Waの上方に直ぐに移動させることができる。そして、レボルバ11を回転させて、撮影手段8と同一軸上に取り付けられる拡大手段9を、プリズム10を備えていないものに切り換える。次に、前記被加工部Waの上方で計測装置7を図7図中のXY軸方向に移動させながら、被加工部Waを拡大手段9により拡大させ、撮影手段8によって、図7に一点鎖線で囲まれた部分づつを連続撮影していき、XY軸方向の被加工部Waの全体を撮影する。この撮影された被加工部Waの撮像は、画像処理装置に取り込まれて画像信号となり、演算処理装置で計測寸法に数値化される。これにより被加工物Wの被加工部Waである穴径d、穴のピッチp2 、p3 などを計測することができる。   Next, in order to measure the horizontal dimension of the workpiece portion Wa of the workpiece W, the X table 3 is moved to bring the workpiece W closer to the measuring device 7 and the measuring device 7 is retracted. And is moved to the measurement position above the workpiece Wa. In this case as well, since the measuring device 7 is provided on the side of the grinding machine 4, the movement of the X table 3 can be reduced after processing the workpiece Wa of the workpiece W. The workpiece can be moved immediately above the workpiece Wa. Then, the revolver 11 is rotated to switch the magnifying means 9 attached on the same axis as the photographing means 8 to one not provided with the prism 10. Next, while moving the measuring device 7 in the XY axis direction in FIG. 7 above the workpiece Wa, the workpiece Wa is magnified by the magnifying means 9, and the photographing means 8 causes the dash-dotted line in FIG. The portions surrounded by are continuously photographed, and the entire processed portion Wa in the XY axis directions is photographed. The captured image of the processed portion Wa is captured by the image processing apparatus to become an image signal, which is converted into a measurement dimension by the arithmetic processing apparatus. As a result, the hole diameter d, the hole pitches p2, p3, and the like, which are the workpiece Wa of the workpiece W, can be measured.

したがって、この発明の機上計測装置は、研削などによる被加工物の被加工部の水平方向および上下方向の寸法を計測することができるようになった。   Therefore, the on-machine measuring device according to the present invention can measure the horizontal and vertical dimensions of the processed portion of the workpiece by grinding or the like.

この発明の機上計測装置を備えた研削加工機の正面図である。It is a front view of the grinding machine provided with the on-machine measuring device of this invention. この発明の機上計測装置を備えた研削加工機の側面図である。It is a side view of the grinding machine provided with the on-machine measuring device of this invention. この発明の機上計測装置の微調整手段の分解斜視図である。It is a disassembled perspective view of the fine adjustment means of the on-machine measuring device of this invention. この発明の機上計測装置で被加工物の被加工部の上下方向の寸法計測状態を示す説明図である。It is explanatory drawing which shows the dimension measurement state of the up-down direction of the to-be-processed part of a workpiece with the on-machine measuring device of this invention. この発明の機上計測装置で測定する被加工物の被加工部の一部省略側面図である。す説明図である。It is a partially-omitted side view of the workpiece part of the workpiece measured by the on-machine measuring device of this invention. FIG. この発明の機上計測装置で被加工物の被加工部の水平方向の寸法計測状態を示す説明図である。It is explanatory drawing which shows the dimension measurement state of the horizontal direction of the to-be-processed part of a workpiece with the on-machine measuring device of this invention. この発明の機上計測装置で測定する被加工物の被加工部の一部省略平面図である。す説明図である。It is a partially omitted plan view of a part to be processed of a workpiece to be measured by the on-machine measuring device of the present invention. FIG. 従来の機上計測装置を備えた研削加工機の正面図である。It is a front view of the grinding machine provided with the conventional on-machine measuring device. 従来の機上計測装置で計測する被研削物の斜視図である。It is a perspective view of the to-be-ground object measured with the conventional on-machine measuring device.

符号の説明Explanation of symbols

4 研削盤
8 撮影手段
9 拡大手段
10 プリズム
11 レボルバ
4 Grinding machine 8 Photographing means 9 Enlarging means 10 Prism 11 Revolver

Claims (3)

加工機の加工手段の側部に、前後動することにより計測位置と退避位置に移動自在とし、計測位置で上下動自在として設けられた被加工物(W)の被加工部(Wa)の計測装置であって、前記被加工部(Wa)の撮影手段(8)と同一軸上に取り付けられる拡大手段(9)を、一方は下方にプリズム(10)を備えて被加工物Wの上下方向の被加工部(Wa)を拡大するものとし、他方は被加工物(W)の水平方向の被加工部(Wa)を拡大するものとしたことを特徴とする機上計測装置。   Measurement of the workpiece (Wa) of the workpiece (W) provided to be movable to the measurement position and the retreat position by moving back and forth on the side of the processing means of the processing machine and movable up and down at the measurement position. The apparatus includes an enlarging means (9) attached on the same axis as the photographing means (8) of the workpiece (Wa), one of which is provided with a prism (10) on the lower side, and the vertical direction of the workpiece W An on-machine measuring device characterized in that the processing portion (Wa) of the workpiece is enlarged and the other processing portion (Wa) in the horizontal direction of the workpiece (W) is enlarged. 前記拡大手段(9)を、それぞれレボルバ(11)に取り付け、被加工物(W)の上下方向の被加工部(Wa)の拡大と、被加工物(W)の水平方向の被加工部(Wa)の拡大を切り換え自在としたことを特徴とする請求項1記載の機上計測装置。   The enlargement means (9) is attached to the revolver (11), respectively, and the workpiece (W) in the vertical direction of the workpiece (W) is enlarged, and the workpiece (W) in the horizontal direction ( 2. The on-machine measuring device according to claim 1, wherein the enlargement of Wa) is switchable. 前記プリズム(10)を上下方向および水平方向に微調整可能としたことを特徴とする請求項1記載の機上計測装置。
The on-machine measuring device according to claim 1, wherein the prism (10) can be finely adjusted in a vertical direction and a horizontal direction.
JP2003385527A 2003-11-14 2003-11-14 On-machine measuring device Expired - Fee Related JP4310579B2 (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007320001A (en) * 2006-06-02 2007-12-13 Disco Abrasive Syst Ltd Method and apparatus for verifying annular reinforcement part formed in outer periphery of wafer
JP2007319965A (en) * 2006-05-31 2007-12-13 Canon Inc Working method and apparatus
KR20200130984A (en) * 2019-05-13 2020-11-23 유로프리시젼 주식회사 Grinding Machine Having Automotive Driving Function

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007319965A (en) * 2006-05-31 2007-12-13 Canon Inc Working method and apparatus
JP2007320001A (en) * 2006-06-02 2007-12-13 Disco Abrasive Syst Ltd Method and apparatus for verifying annular reinforcement part formed in outer periphery of wafer
KR20200130984A (en) * 2019-05-13 2020-11-23 유로프리시젼 주식회사 Grinding Machine Having Automotive Driving Function
KR102301934B1 (en) 2019-05-13 2021-09-15 유로프리시젼 주식회사 Grinding Machine Having Automotive Driving Function

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