JP2005142483A - Multi-layer circuit board with built-in capacitor element and manufacturing method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To build a capacitor element having a capacity equal to the designed one in a multi-layer circuit board, regardless of the largeness of the lower electrode of the capacitor element. <P>SOLUTION: The multi-layer circuit board 25 with a built-in capacitor element includes first and second capacitor elements 23a, 23b in which lower electrodes 15a, 15b, a dielectric layer 18, upper electrodes 19a, 19b are laminated sequentially. The first and second capacitor elements include dummy patterns 22a, 22b, which are not connected with the lower electrode and are formed around the lower electrode. There is a relation of D1<D2 when S1>S2, and D1>D2 when S1<S2, where S1, S2 are each electrode area of the lower electrodes in the first and second capacitor elements, and D1, D2 are each area of dummy patterns of the first and second capacitor elements. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a multilayer circuit board with a built-in capacitor element in which a capacitor element is incorporated in a multilayer circuit board, and a method of manufacturing the multilayer circuit board with a built-in capacitor element.

  Electronic devices are becoming smaller, higher density, and higher performance. The demand for miniaturization, high density, and high speed is also increasing for multilayer circuit boards incorporated in electronic devices, and multilayer circuit boards that satisfy these requirements are demanded.

  As a technique for reducing the size of the multilayer circuit board, a technique for forming a capacitor element in the multilayer circuit board has been put into practical use. That is, a dielectric layer is provided inside the multilayer circuit board, and electrodes are formed on both surfaces of the dielectric layer. The capacitance of the capacitor element is roughly determined by the area of each electrode sandwiching the dielectric layer, the dielectric constant of the dielectric layer, and the distance between the electrodes.

  A multilayer circuit board with a built-in capacitor element having such a built-in capacitor element is configured, for example, as shown in a sectional view of FIG. Wiring layers 12 a and 12 b are formed on the upper surface and the lower surface of the insulating base material 11 to constitute the circuit board 10. The circuit board 10 is formed with through holes 14 for conducting the upper and lower wiring layers 12a and 12b.

  An insulating layer 13 is formed on the upper surface of the circuit board 10, and lower electrodes 15 a and 15 b of the capacitor elements 20 a and 20 b and a wiring layer 16 are formed on the upper surface of the insulating layer 13. The wiring layers 16 and 12 a existing above and below the insulating layer 13 are electrically connected by filled vias 17. A dielectric layer 18 that covers the lower electrodes 15a and 15b and the wiring layer 16 in common is formed on the upper surfaces of the lower electrodes 15a and 15b and the wiring layer 16, and the lower electrodes 15a and 15a on the upper surface of the dielectric layer 18 are formed. Upper electrodes 19a and 19b are formed at positions opposed to 15b, respectively. Lower electrodes 15a and 15b, part of dielectric layer 18, and upper electrodes 19a and 19b constitute capacitor elements 20a and 20b, respectively.

  A method for manufacturing each capacitor element 20a, 20b in the multilayer circuit board 21 with such a capacitor element will be described. An insulating layer 13 and a conductor layer are formed on the upper surface of the circuit board 10, the conductor layer is etched to form lower electrodes 15a and 15b, and a dielectric sheet with copper foil is laminated on the upper surfaces of the lower electrodes 15a and 15b. The dielectric layer 18 and the conductor layer are formed, and the conductor layers are etched to form the upper electrodes 19a and 19b.

  Thus, the upper electrodes 19a and 19b and the lower electrodes 15a and 15b are formed by a subtractive method in which a conductor layer made of copper foil or the like is formed by etching. It is also possible to form by a semi-additive method in which pattern plating is performed by electrolytic copper plating or the like.

  However, in the capacitor element built-in multilayer circuit board 21 shown in FIG. 5, the film of the dielectric layer 18 formed on the lower electrodes 15a and 15b due to the difference in size of the lower electrodes 15a and 15b of the capacitor elements 20a and 20b. The thickness fluctuated and it was difficult to obtain a desired capacitor capacity.

  For example, as shown in one capacitor element 20b, when the lower electrode 15b is small, before the viscosity of the dielectric increases during the lamination process of the dielectric sheet with copper foil in the manufacturing method described above, the lower electrode 15b The dielectric layer 18 tends to escape from the lower electrode 15b to the periphery, so that the thickness of the dielectric layer 18 on the lower electrode 15b tends to be thin.

  On the contrary, as shown in the other capacitor element 20a, when the lower electrode 15a is large, the dielectric on the periphery of the lower electrode 15b is lower electrode 15a when the dielectric sheet with copper foil is laminated in the manufacturing method described above. Although it is easy to escape from the top to the periphery, the dielectric thickness on the periphery of the lower electrode 15a is reduced, but the dielectric on the center of the lower electrode 15a is difficult to escape from above the lower electrode 15a. The thickness of the dielectric layer 18 tends to increase.

In order to solve these problems to some extent, a printed wiring board having a sandwich type capacitor in which the lower electrodes 15a and 15b of the capacitor elements 20a and 20b are made thin has been proposed (see Patent Document 1).
Japanese Patent Laid-Open No. 2002-176266

  However, in the recent trend of high density and thinning in multilayer circuit boards and interposers, there is a limit to the method of reducing the thickness of the lower electrode. Regardless of the size of the lower electrode, a further dielectric layer can be formed. It is required to improve the uniformity of thickness and the accuracy of the capacitance value of each capacitor element.

  The present invention has been made in view of such circumstances, and without complicating the manufacturing process, regardless of the size of the lower electrode, the dielectric layer existing between the lower electrode and the upper electrode. An object of the present invention is to provide a multilayer circuit board with a built-in capacitor element, which can always have a uniform thickness and can incorporate a plurality of capacitor elements each having a capacity as designed, and a method for manufacturing a multilayer circuit board with a built-in capacitor element.

  The present invention relates to a multi-layer circuit board with a built-in capacitor element that includes a plurality of capacitor elements in which a lower electrode, a dielectric layer, and an upper electrode are laminated in order, and is not electrically connected to the lower electrode and the lower electrode, respectively. The relationship between the lower electrode of each capacitor element and the dummy pattern, including the formed dummy pattern, will be described.

  Here, the first and second capacitor elements are not two capacitor elements, but mean different capacitor elements.

  In order to solve the above-mentioned problems, the present invention provides a multilayer circuit board with built-in capacitor elements, which includes first and second capacitor elements in which a lower electrode, a dielectric layer, and an upper electrode are sequentially stacked. The second capacitor element includes a dummy pattern which is not electrically connected to the lower electrode and is formed around the lower electrode, and the electrode areas of the lower electrodes of the first and second capacitor elements are S1 and S2, respectively. When the area of the dummy pattern of the second capacitor element is D1 and D2, there is a relationship of D1 <D2 when S1> S2, and D1> D2 when S1 <S2.

  In the multilayer circuit board with a built-in capacitor element thus configured, a dummy pattern not related to the capacitance value is formed around the lower electrode in the first and second capacitor elements. By setting the relationship between the electrode areas S1, S2 of the lower electrodes of the first and second capacitor elements and the areas of the dummy patterns of the first and second capacitor elements to D1, D2, as described above, 1. Areas (S1 + D1) and (S2 + D2) obtained by adding the electrode area of the lower electrode of the second capacitor element and the area of the dummy pattern can be approximated to each other. Therefore, even if the magnitude relationship between the electrode areas S1 and S2 of the lower electrodes of the first and second capacitor elements changes, the added areas (S1 + D1) and (S2 + D2) have approximate values.

  As a result, a dielectric layer is formed on the upper surface of the added areas (S1 + D1) and (S2 + D2) in the first and second capacitor elements under substantially the same conditions. However, the dielectric layer around the electrode is prevented from becoming thin, and when the electrode is small, the surrounding large dummy pattern also prevents the dielectric from flowing out from the electrode. Therefore, the thickness of the dielectric layer formed on each lower electrode of the first and second capacitor elements can be set substantially equal between the first and second capacitor elements.

According to another invention, in the multilayer circuit board with built-in capacitor elements according to the invention described above, the outer shapes of the first and second capacitor elements indicated by the outer shape of the dummy pattern are similar to each other.
In the capacitor element built-in multilayer circuit board configured as described above, the outer shapes of the first and second capacitor elements viewed from above are similar to each other, and therefore, on the lower electrodes of the first and second capacitor elements. The thicknesses of the dielectric layers formed in the above can be made more equal.

According to another aspect of the invention, the first and second capacitor elements are formed in the same plane on the same insulator.
In the multilayer circuit board with built-in capacitor elements configured as described above, the dielectric layers formed on the lower electrodes of the first and second capacitor elements can be formed of the same dielectric layer. The thicknesses of the dielectric layers formed in the above can be made more equal.

  According to another invention, there is provided a multilayer multilayer circuit board having a plurality of capacitor elements each including a lower electrode, a dielectric layer, and an upper electrode stacked in order, wherein each capacitor element of the plurality of capacitor elements is electrically connected to the lower electrode. In addition, the outer shape and the outer dimension of each capacitor element shown in the outer shape of the dummy pattern including the dummy pattern formed around the lower electrode are substantially equal to each other.

  In the multilayer circuit board with a built-in capacitor element configured as described above, the outer shape and the outer dimensions of the dummy pattern formed around the lower electrode of each capacitor element of the plurality of capacitor elements are substantially equal to each other. The thickness of the dielectric layer formed on the lower electrode can be made substantially equal.

In another invention, in the multilayer circuit board with a built-in capacitor element according to the invention described above, each capacitor element is formed on the same insulator in the same plane.
In the capacitor element built-in multilayer circuit board configured as described above, the dielectric layer formed on the lower electrode of each capacitor element can be formed of the same dielectric layer, so the dielectric formed on each lower electrode The layer thickness can be made more equal.

  In another method of manufacturing a multilayer circuit board with a built-in capacitor element, a plurality of lower electrodes are formed on an upper surface of an insulator, and are not electrically connected to the lower electrodes. Forming a plurality of equal dummy patterns, forming a dielectric layer covering the upper surfaces of the plurality of lower electrodes and the upper surfaces of the plurality of dummy patterns in common, and each lower electrode on the upper surface of the dielectric layer Capacitance values are determined by each lower electrode and a part of the dielectric layer, and a plurality of upper electrodes constituting each capacitor element are formed by each lower electrode, each dummy pattern, and a part of the dielectric layer. And a step of performing.

  In the manufacturing method of the multilayer circuit board with a built-in capacitor element configured as described above, a plurality of lower electrodes are formed on the upper surface of the insulator, around each lower electrode without being electrically connected to each lower electrode, and each outer shape and A plurality of dummy patterns having the same outer dimensions are formed. Accordingly, it is possible to obtain substantially the same operational effects as the capacitor element built-in multilayer circuit board of the invention described above.

  The multilayer circuit board in the present invention includes a printed wiring board, an interposer and the like.

  In the multilayer circuit board with a built-in capacitor element and the multilayer circuit board with a built-in capacitor element formed in this way, a dummy pattern provided around the lower electrode of each built-in capacitor element has an outer shape between the capacitor elements. The shape and the external dimensions are formed so as to be approximately equal to or close to each other.

  Therefore, without complicating the manufacturing process, the thickness of the dielectric layer existing between the lower electrode and the upper electrode can always be made uniform regardless of the size of the lower electrode, and a plurality of capacitors each having a designed capacity can be obtained. The capacitor element can be incorporated.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(First embodiment)
1A is a cross-sectional view of the multilayer circuit board with a built-in capacitor element according to the first embodiment of the present invention, and FIG. 1B is a cross-sectional view of the multilayer circuit board with a built-in capacitor element in FIG. It is sectional drawing cut | disconnected by the line and seen from upper direction. The same parts as those of the conventional capacitor element built-in multilayer circuit board 21 shown in FIG.

  Wiring layers 12 a and 12 b are formed on the upper surface and the lower surface of the insulating base material 11 to constitute the circuit board 10. The circuit board 10 is formed with through holes 14 for conducting the upper and lower wiring layers 12a and 12b.

  An insulating layer 13 as an insulator is formed on the upper surface of the circuit board 10, and the lower electrodes 15a and 15b of the capacitor elements 23a and 23b, the dummy patterns 22a and 22b, and the wiring layer 16 are formed on the upper surface of the insulating layer 13. It is formed with a thickness. The wiring layers 16 and 12 a existing above and below the insulating layer 13 are electrically connected by filled vias 17.

  As shown in FIG. 1B, the lower electrode 15a of the capacitor element 23a has a substantially square shape, and the electrode area of the lower electrode 15a is S1. A dummy pattern 22a is formed which has a gap 24a around the lower electrode 15a and is not electrically connected to the lower electrode 15a. The area of the dummy pattern 22a is D1. The outer shape of the dummy pattern 22a is a square. On the other hand, the lower electrode 15b of the capacitor element 23b has a rectangular shape, and the electrode area of the lower electrode 15b is S2. A dummy pattern 22b that has a gap 24b around the lower electrode 15b and does not conduct to the lower electrode 15b is formed. The area of the dummy pattern 22b is D2. The outer shape of the dummy pattern 22b is a square.

  In the first embodiment, the dummy patterns 22a and 22b have the same outer shape and the same outer size. The outer shapes of the dummy patterns 22a and 22b are the outer shapes of the capacitor elements 23a and 23b when the capacitor elements 23a and 23b are viewed from above. Furthermore, in the first embodiment, as shown in the figure, there are relationships of S1> S2 and D1 <D2.

  Note that the line width of the dummy patterns 22a and 22b is preferably 30 μm or more, and the gaps 24a and 24b between the lower electrodes 15a and 15b and the dummy patterns 22a and 22b are preferably 15 to 20 μm.

  A dielectric layer 18 that covers the lower electrodes 15a, 15b, the dummy patterns 22a, 22b, and the wiring layer 16 in common is formed on the upper surfaces of the lower electrodes 15a, 15b, the dummy patterns 22a, 22b, and the wiring layer 16. Upper electrodes 19a and 19b are formed at positions facing the lower electrodes 15a and 15b on the upper surface of the dielectric layer 18, respectively.

  Lower electrodes 15a and 15b, dummy patterns 22a and 22b, part of dielectric layer 18, and upper electrodes 19a and 19b constitute capacitor elements 23a and 23b, respectively. Since the electrode area S1 of the lower electrode 15a and the upper electrode 19a of the capacitor element 23a is larger than the electrode area S2 of the lower electrode 15b and the upper electrode 19b of the capacitor element 23b, the capacitance value C1 of the capacitor element 23a is the capacitance value of the capacitor element 23b. Greater than C2.

  In the multilayer circuit board 25 with a built-in capacitor element according to the first embodiment configured as described above, as shown in FIG. 1B, a capacitance value C1, around the lower electrodes 15a and 15b in the capacitor elements 23a and 23b, Dummy patterns 22a and 22b not related to C2 are formed. Since the outer shapes and the outer dimensions of the dummy patterns 22a and 22b are the same, the area (S1 + D1) and (S2 + D2) of each region obtained by adding the lower electrodes 15a and 15b and the dummy patterns 22a and 22b in the capacitor elements 23a and 23b are Almost equal. As a result, the dielectric layer 18 is formed on the upper surface of each region under substantially the same conditions.

  Therefore, regardless of the size of the lower electrodes 15a and 15b, the thickness of the dielectric layer 18 formed between the lower electrodes 15a and 15b and the upper electrodes 19a and 19b of the capacitor elements 23a and 23b is set to the capacitor elements 23a and 23b. 23b can be set approximately equal to each other. As a result, a plurality of capacitor elements 23a and 23b each having designed capacitances C1 and C2 can be incorporated in the multilayer circuit board 25 with built-in capacitor elements.

In addition, the multilayer circuit board with a built-in capacitor element of the present invention is not limited to the first embodiment described above.
In the first embodiment, the outer shapes and outer dimensions of the dummy patterns 22a and 22b formed around the lower electrodes 15a and 15b in the capacitor elements 23a and 23b are set equal. However, the relationship between the electrode areas S1 and S2 of the lower electrodes 15a and 15b of the capacitor elements 23a and 23b and the areas D1 and D2 of the dummy patterns can be set as follows.

When S1> S2, D1 <D2 and when S1 <S2, D1> D2
By setting such a magnitude relationship, the area (S1 + D1) and (S2 + D2) of each region obtained by adding the lower electrodes 15a and 15b and the dummy patterns 22a and 22b in the capacitor elements 23a and 23b can be approximated. A dielectric layer 18 is formed on the upper surface of the substrate under substantially the same conditions.

  As a result, when the electrodes 15a and 15b are large, the surrounding small dummy patterns 22a and 22b prevent the dielectric layer 18 in the peripheral portion of the electrode from becoming thin, and when the electrodes 15a and 15b are small, the surroundings are larger. The dummy pattern also prevents the dielectric material from flowing out on the electrode. Therefore, the thickness of the dielectric layer 18 formed on the lower electrodes 15a and 15b of the capacitor elements 23a and 23b can be set to be approximately equal between the capacitor elements 23a and 23b.

  Further, the outer shape of each of the dummy patterns 22a and 22b is a dielectric formed on the upper surfaces of the lower electrodes 15a and 15b and the dummy patterns 22a and 22b if the similar relationship is further maintained in the state where the above-described magnitude relationship is maintained. The thickness of the body layer 18 can be made more uniform.

  Further, the number of capacitor elements to be incorporated in the capacitor element built-in multilayer circuit board 25 is not limited to two, and any number of three or more can be provided as long as the outer shape and the outer dimension of each dummy pattern satisfy substantially the same conditions. Can be set.

(Second Embodiment)
2, 3 and 4 are manufacturing process diagrams showing a method of manufacturing a multilayer circuit board with a built-in capacitor element according to the second embodiment of the present invention. In the second embodiment, a manufacturing method by a build-up method of the capacitor element built-in multilayer circuit board 25 of the first embodiment shown in FIG. 1 will be described.

  First, a copper-clad laminate in which a copper foil is laminated on both surfaces of an insulating base material 11 made of an epoxy resin impregnated with a glass nonwoven fabric is patterned, and a wiring layer 12a is formed on the upper and lower surfaces of the insulating base material 11. , 12b are formed, and the two-layer circuit board 10 is manufactured. Through holes 14 are formed in the circuit board 10 to connect the upper and lower wiring layers 12a and 12b (FIG. 2A).

Next, an insulating layer 13 having a predetermined thickness is formed on the upper surface of the circuit board 10 by a method such as laminating an epoxy resin sheet or prepreg (FIG. 2B).
Next, via holes 26 are formed at predetermined positions of the insulating layer 13 by laser processing using a UVYAG laser (FIG. 2C).

  Next, desmear treatment, application of catalyst nuclei and electroless copper plating are performed to form a plating base conductive layer (particularly not shown), electrolytic copper plating is performed using the plating base conductive layer as a cathode, Conductive layer 27 and filled via 17 are formed (FIG. 2D).

  Next, a dry film is laminated on the conductive layer 27 to form a photosensitive layer, and a series of patterning processes such as pattern exposure and development are performed, so that the lower electrodes 15a and 15b, the dummy patterns 22a and 22b, Then, resist patterns 28a, 28b, 30a, 30b, and 29 for forming the wiring layer 16 are formed (FIG. 2E).

  Next, using the resist patterns 28a, 28b, 30a, 30b, and 29 as a mask, the conductor layer 27 is etched using a cupric chloride etchant or the like, and the resist patterns 28a, 28b, 30a, and 30b are removed with a dedicated stripping solution. 29 are peeled off to form the lower electrodes 15a and 15b, the dummy patterns 22a and 22b, and the wiring layer 16 electrically connected to the wiring layer 12a by the filled via 17 (FIG. 3F).

  FIG. 3F 'is a plan view of the state in which the lower electrodes 15a and 15b, the dummy patterns 22a and 22b, and the wiring layer 16 are formed on the insulating layer 13 shown in FIG. is there. Therefore, FIG. 3F is a cross-sectional view of the plan view of FIG. 3F ′ taken along line B-B ′.

  As shown in FIG. 3F ', the lower electrode 15a corresponding to the capacitor element 23a has a substantially square shape, and a dummy pattern 22a is formed with a gap 24a around the lower electrode 15a. . The outer shape of the dummy pattern 22a is a square. On the other hand, the lower electrode 15b corresponding to the capacitor element 23b has a rectangular shape, and a dummy pattern 22b is formed with a gap 24b around the lower electrode 15b. The outer shape of the dummy pattern 22b is a square. Each dummy pattern 22a, 22b has the same outer shape and the same outer size.

Next, a dielectric sheet with a copper foil is laminated on the lower electrodes 15a and 15b, the dummy patterns 22a and 22b, and the wiring layer 16 to form the dielectric layer 18 and the conductor layer 31 (FIG. 3G).
As the resin constituting the dielectric sheet, polyimide, polyamide, epoxy resin, phenol resin, PEEK, PTEF or the like can be employed.

  As the dielectric filler mixed in the dielectric sheet, known ones can be used, and those having a relative dielectric constant of 50 or more are preferable. Examples of such materials include titanium dioxide ceramics, barium titanate ceramics, calcium titanate ceramics, strontium titanate ceramics, zirconate ceramics, and the like. Can be used.

  Next, a photosensitive layer is formed by a method such as laminating a dry film photoresist on the conductor layer 31 or applying a photoresist, and a series of patterning processes such as pattern exposure and development are performed, and the upper electrode 19a, Resist patterns 32a and 32b are formed at positions corresponding to 19b (FIG. 4H).

  Next, using the resist patterns 32a and 32b as a mask, the conductor layer 31 is etched with a cupric chloride solution, and the resist patterns 32a and 32b are stripped with a special stripping solution to form the upper electrodes 19a and 19b. . As a result, the capacitor layers 23a and 23b and the wiring layer 16 via-connected to the wiring layer 12a via the insulating layer 13 are formed on the circuit board 10 on which the wiring layers 12a and 12b are formed on both surfaces of the insulating base material 11. The formed multilayer circuit board 25 with a built-in three-layer capacitor element was manufactured (FIG. 4I).

  In the method of manufacturing a multilayer circuit board with a built-in capacitor element according to the second embodiment, the lower electrodes 15a and 15b constituting the capacitor elements 23a and 23b are formed on the upper surface of the insulating layer 13, and the lower electrodes. Dummy patterns 22a and 22b are formed around 15a and 15b and have the same external shape and external dimensions. Therefore, the capacitor element built-in multilayer circuit board manufactured by this manufacturing method can exhibit substantially the same function and effect as the capacitor element built-in multilayer circuit board 25 of the first embodiment shown in FIG.

  Further, in the manufacturing method of the second embodiment, the lower electrodes 15a and 15b, the dummy patterns 22a and 22b, and the wiring layer 16 are formed on the upper surface of the insulating layer 13 with the same material and the same thickness. Therefore, the degree of integration of the capacitor element built-in multilayer circuit board 25 can be improved, the number of manufacturing steps can be reduced, and the manufacturing can be carried out more efficiently.

In addition, the multilayer circuit board with a built-in capacitor element and the manufacturing method thereof according to the present invention are not limited to the first and second embodiments described above.
In each embodiment, the case where a two-layer double-sided wiring board is used as the circuit board 10 has been described. However, the number of wiring layers of the circuit board 10 is not particularly limited, and an arbitrary number of layers may be used as necessary. A circuit board can be used.

  Furthermore, the number of wiring layers and the number of capacitor elements are not particularly limited when the multilayer wiring layer and the capacitor elements 23a and 23b are formed by the build-up method based on the circuit board 10. If necessary, an arbitrary number of wiring layers and an arbitrary number of capacitor elements can be formed.

  Further, the method of forming the lower electrodes 15a and 15b of the capacitor elements 23a and 23b may be a plating (semi-additive or the like) method or an etching (subtractive) method. The dielectric layer 18 is formed by laminating a dielectric sheet (including a copper foil), or further including the dielectric layer 18 (or its peripheral portion) on the lower electrodes 15a and 15b and the dummy patterns 22a and 22b. ) May be left, and the dielectric layer may be formed by printing such as screen printing, and is not particularly limited.

The method of forming the upper electrodes 19a and 19b of the capacitor elements 23a and 23b may be a plating (semi-additive etc.) method, an etching (subtractive) method, or a screen printing (conductive paste printing) method, and is not particularly limited. .
Furthermore, the dummy patterns 22a and 22b are in the periphery of the lower electrodes 15a and 15b. Many shapes are possible, such as a linear shape that is completely surrounded, a linear pattern on the floating island, and a round pattern. There is no particular limitation.

Sectional drawing which shows schematic structure of the multilayer circuit board with a built-in capacitor element concerning 1st Embodiment of this invention. Manufacturing process figure which shows the manufacturing method of the multilayer circuit board with a built-in capacitor element concerning 2nd Embodiment of this invention Similarly, a manufacturing process diagram showing a method of manufacturing a multilayer circuit board with a built-in capacitor element according to the second embodiment Similarly, a manufacturing process diagram showing a method of manufacturing a multilayer circuit board with a built-in capacitor element according to the second embodiment Sectional drawing which shows schematic structure of the conventional multilayer circuit board with a built-in capacitor element

Explanation of symbols

  DESCRIPTION OF SYMBOLS 10 ... Circuit board, 11 ... Insulating base material, 12a, 12b, 16 ... Wiring layer, 13 ... Insulating layer, 14 ... Through hole, 15a, 15b ... Lower electrode, 17 ... Filled via, 18 ... Dielectric layer, 19a, 19b ... Upper electrode, 22a, 22b ... Dummy pattern, 23a, 23b ... Capacitor element, 24a, 24b ... Gap, 25 ... Multi-layer circuit board with built-in capacitor element

Claims (6)

In a multilayer circuit board with a built-in capacitor element, each including a first capacitor element and a second capacitor element in which a lower electrode, a dielectric layer, and an upper electrode are sequentially stacked
Each of the first and second capacitor elements includes a dummy pattern that is not electrically connected to the lower electrode and is formed around the lower electrode;
When the electrode areas of the lower electrodes of the first and second capacitor elements are S1 and S2, and the areas of the dummy patterns of the first and second capacitor elements are D1 and D2, D1 <D2 when S1> S2. And a capacitor element built-in multilayer circuit board characterized by having a relationship of D1> D2 when S1 <S2.   2. The multilayer circuit board with a built-in capacitor element according to claim 1, wherein the outer shape of the first and second capacitor elements indicated by the outer shape of the dummy pattern is similar to each other.   3. The multilayer circuit board with built-in capacitor elements according to claim 1, wherein the first and second capacitor elements are formed on the same insulator in the same plane. In a multilayer circuit board with a built-in capacitor element, each including a plurality of capacitor elements in which a lower electrode, a dielectric layer, and an upper electrode are sequentially laminated,
Each capacitor element of the plurality of capacitor elements includes a dummy pattern that is not electrically connected to the lower electrode and is formed around the lower electrode;
A multilayer circuit board with a built-in capacitor element, wherein the outer shape and the outer dimension of each capacitor element indicated by the outer shape of the dummy pattern are equal to each other.   5. The multilayer circuit board with a built-in capacitor element according to claim 4, wherein the capacitor elements are formed on the same insulator in the same plane. Forming a plurality of lower electrodes on the upper surface of the insulator, and a plurality of dummy patterns that are not electrically connected to the lower electrodes and are around the lower electrodes and have the same outer shape and outer dimensions;
Forming a dielectric layer that commonly covers the top surfaces of the plurality of lower electrodes and the top surfaces of the plurality of dummy patterns;
A capacitance value is determined by each lower electrode and a part of the dielectric layer at a position opposed to each lower electrode on the upper surface of the dielectric layer, and each lower electrode, each dummy pattern, and a part of the dielectric layer Forming a plurality of upper electrodes constituting the capacitor element, and a method of manufacturing a multilayer circuit board with a built-in capacitor element.

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