JP2005140510A - Displacement measurement method of long-distance target, and displacement measuring apparatus of the long-distance target - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To measure the position and the amount of displacement of an arbitrary number of measurement points which is to be displaced at a long distance, precisely and speedily with high resolution and in real time. <P>SOLUTION: A corner cube prism is arranged at a measurement point to be displaced. The measurement point is set to a position giving view of the measurement point to be displaced. Laser beams are projected from the measurement point to the measurement region to be displaced including the corner cube prism. The measurement region to be displaced is scanned to the left and the right, and vertically by the laser beams. One portion of the laser beams, emitted from the measurement point, is projected to a PSD. Retroreflection laser beams, reflected by the corner cube prism at the scanning process, are received by a photosensor element for detecting the position detection point of the measurement point to be displaced. The azimuth angle data of the measurement point to be displaced are detected from the light receiving position of laser beams that the PSD received at the position detection point. The amount of displacement at the measurement point to be displaced is computed, based on the azimuth angle data, and the displacement of the measurement point to be displaced is measured. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

This invention can measure the displacement of various objects such as tilt measurement due to aging of high-rise buildings, levee strain measurement, ground displacement measurement, tunnel cross-section deformation measurement, bridge vibration measurement, laser beam and corner cube prism. A displacement measurement method for detecting and measuring from a measurement point that is a considerable distance away from the displacement measurement object using a PSD (Position Sensitive Detecter), and a displacement measurement method for measuring displacement The present invention relates to a displacement measuring apparatus for a long-distance object.

Conventionally, as a device for detecting the position of a specific point (measurement point) of an object in a non-contact state with the object, a reflector (for example, a corner cube prism) is attached to the measurement point of the object, and the reflector The semiconductor laser light is irradiated toward the light, and the reflected laser light from the reflector is condensed at one point on the optical position detection element by the condenser lens, and the output from the optical position detection element is output by the position signal processing circuit. There has been proposed an apparatus that detects the azimuth of a reflector, that is, the azimuth of a point to be measured. (For example, see Patent Document 1)

However, in the conventional position detection apparatus as described above, the position of a certain point of the object is detected and measured by following, and the position detection apparatus is once installed and adjusted with respect to the object. In this state, it is impossible to measure the displacement of a plurality of measured points on the object at a time and measure the relative positional relationship between the measured points at high speed and with high resolution. When the object is a civil engineering / architecture structure, it is necessary to be able to measure the position and displacement of the measurement point from a measurement point 10 m to 1 km away from the object, and the measurement accuracy is 100 m ahead. High accuracy of about 1mm is required for objects that are 1mm ahead of the object, and 0.1mm for objects that are 100m away, and 1mm that is about 1mm ahead of objects that are 100m away. Real-time high-speed measurement is required for bridge vibration measurement, etc., but conventional measurement methods / equipment have many points to be measured with such high accuracy / resolution and real-time speed. The position and amount of displacement cannot be measured at once.
Japanese Patent Laid-Open No. 6-221853

The present invention meets the above-mentioned unsolved problems and practical requirements of the conventional position detection / measurement device as described above, and once installs the measurement device for a given displacement measurement object at a long distance. In the adjusted state, not only one point of the displacement measurement object but also the position / displacement amount of multiple points can be measured at a high speed at once, and the relative displacement of each point can be measured immediately. The position / displacement amount of a displacement measurement object at a long distance can be measured with high resolution, high accuracy, and high speed in real time.

In order to achieve the object according to the above problems, the present invention uses the following means. That is,
An arbitrary number of displacement measurement points are set on the displacement measurement object, and a corner cube prism is provided at the displacement measurement object, so that all of the displacement measurement points can be seen at a considerable distance from the displacement measurement object. A measurement point is set at a position, laser light is projected from the measurement point toward a displacement measurement region including all of the corner cube prisms, and the displacement measurement region is scanned left and right and up and down with the laser light. , And simultaneously projecting some of the laser beam toward the displacement measurement region onto the azimuth angle measurement PSD, and reflecting it by the corner cube prism in the scanning process of the laser beam to the laser beam projection origin of the measurement point The returned retroreflective laser beam is received by an optical sensor element (for example, a photo diode), and the corner cube plate at the displacement measurement point is received. Azimuth angle data of the displacement measurement point (that is, the displacement measurement point) from the light receiving position of the laser beam received by the light receiving surface of the azimuth angle measurement PSD at the time of sensing the position. Position data), and the amount of displacement at the displacement measurement point is calculated based on the azimuth angle data to measure the displacement of the displacement measurement point. The azimuth angle of the displacement measurement point is a projection angle from the laser light projection origin of the projection laser light that radiates the displacement measurement point.

In addition, in order to increase the resolution at the time of measurement, an arbitrary number of displacement measurement points are set on the displacement measurement object, and a corner cube prism is arranged at the displacement measurement object, and a considerable distance from the displacement measurement object. A measurement point is set at a position where the displacement measurement point can be seen away, and a laser beam is projected from the measurement point toward the displacement measurement region including the corner cube prism, and the displacement measurement region is defined by the laser beam. In addition to scanning left and right and up and down, simultaneously project some laser light toward the displacement measurement region onto the azimuth angle measurement PSD, and reflect it on the corner cube prism in the laser light scanning process. The retroreflective laser beam that has returned to the laser beam projection origin at the measurement point is received by the optical sensor element, and the corner cube sample at the displacement measurement point is received. The azimuth angle at the position sensing time point in a state where the laser light path length (M) from the laser light projection origin to the light receiving surface of the azimuth angle measurement PSD is extended. Measures the displacement by detecting the azimuth angle data of the displacement measurement point from the light receiving position of the laser beam received by the light receiving surface of the measurement PSD, and calculates the displacement amount of the displacement measurement point based on the azimuth angle data. Measure the displacement of the point.

When the distance (N) between the set measurement point and the displacement measurement object is unknown, the measurement points (A1, A2) are set at two positions separated by a known distance d, and each measurement point ( A1 and A2) respectively project laser beams toward the above-mentioned displacement measurement region, and scan the displacement measurement region left and right and up and down with each laser beam, and each laser directed to the displacement measurement region Some of the light is simultaneously projected onto the azimuth angle measurement PSD at each measurement point (A1, A2) and reflected by the same corner cube prism located at the same displacement measurement point in the scanning process of each laser beam. Then, the retroreflective laser beam returned to the laser beam projection origin at each measurement point (A1, A2) is received by the optical sensor element at each measurement point (A1, A2), and the corner cube at the displacement measurement point. The The position measurement point is detected from the light receiving position of the laser beam received at the light receiving surface of the azimuth angle measuring PSD at the two measurement points (A1, A2) at each position detection time point. Azimuth angle data is detected, and the displacement measurement point of the displacement measurement point is detected based on the azimuth angle data of the displacement measurement point detected by the azimuth angle measurement PSD of the two measurement points (A1, A2) and the known distance d. The displacement amount is calculated to measure the displacement of the displacement measurement point.

Furthermore, when asymmetrical molding distortion remains on the reflecting surface of the corner cube prism used for measurement, in order to eliminate the measurement error due to the asymmetrical molding distortion, in the process of scanning the above-mentioned displacement measurement area with laser light, The azimuth angle data of each part of the reflection surface of the corner cube prism detected by the PSD for measuring the azimuth angle is accumulated at each time the position of the corner cube prism detected by the sensor element is detected, and the reflection area surface data of the corner cube prism is generated. Based on the reflection area surface data, the center position of the reflection surface of the corner cube prism is calculated to generate the azimuth angle data of the displacement measurement point where the corner cube prism is located, and the azimuth angle data of the displacement measurement point Based on the above, calculate the displacement at the displacement measurement point and measure the displacement at the displacement measurement point. To.

Next, as a long-distance object displacement measuring apparatus for carrying out the long-distance object displacement measuring method according to the present invention, a laser emitter and laser light emitted from the laser emitter installed at a measurement point are received. The laser beam is projected toward the displacement measurement area including the corner cube prism at the displacement measurement point that is a considerable distance away from the measurement point, and the mirror is projected from the mirror by reciprocating left and right and up and down. And a scan driving device that scans the displacement measurement region with a laser beam that receives the retroreflective laser beam reflected by the corner cube prism and returned to the laser beam projection origin of the mirror during the scanning process. An optical sensor element for detecting a point of time when the position of the corner cube prism at the point is detected; and An azimuth angle that simultaneously receives some of the laser light projected toward the measurement region and detects the azimuth angle data of the measurement point to be displaced from the light receiving position of the laser light received at the position sensing time detected by the photosensor element. Displacement measuring apparatus comprising as main components a measurement PSD and a computer equipped with a calculation program for calculating the displacement amount of the displacement measurement point based on the azimuth angle data of the displacement measurement point detected by the azimuth angle measurement PSD Configure.

Further, in order to increase the resolution of the laser beam projection angle (azimuth angle of the measurement point to be displaced) at the time of measurement, an angle magnification switch is interposed between the mirror and the angle measurement PSD, and the angle magnification switch If necessary, the laser light path length (M) from the laser light projection origin of the mirror to the light receiving surface of the azimuth angle measuring PSD is extended.

  And in order to comprise a displacement measuring apparatus reasonably compactly, the said mirror is comprised as a half mirror. That is, a displacement measurement area including a laser emitter and a corner cube prism of a displacement measurement point that is installed at a measurement point and receives laser light emitted from the laser emitter and is separated from the measurement point by a considerable distance. A first half mirror that projects toward the screen, a scan drive device that scans the displacement measurement region with laser light that is projected from the first half mirror by reciprocatingly rotating the first half mirror left and right and up and down In the scanning process, when the retroreflective laser beam reflected by the corner cube prism and returned to the laser beam projection origin of the first half mirror is received to detect the position of the corner cube prism at the displacement measurement point An optical sensor element for detecting the amount of laser light projected from the first mirror toward the displacement measurement region. A second half mirror that redirects and reflects the laser beam, and the displacement measurement from the light receiving position of the laser light received at the position sensing time point that is received by the laser beam reflected by the second mirror and detected by the optical sensor element An azimuth angle measurement PSD for detecting azimuth angle data of a point, and the azimuth angle measurement PSD from the laser light projection origin of the first mirror placed between the second mirror and the azimuth angle measurement PSD Based on the angle magnification switch that extends the laser optical path length (M) to the light receiving surface and the azimuth angle data of the displacement measurement point detected by the azimuth angle measurement PSD, the displacement amount of the displacement measurement point is calculated. A displacement measuring device is provided that includes as a main part a computer on which an arithmetic program is mounted.

Furthermore, when asymmetrical molding distortion remains on the reflecting surface of the corner cube prism used in the displacement measuring device, the above-mentioned optical sensor element is used in the laser beam scanning process to eliminate the measurement error due to the asymmetrical molding distortion. Every time the reflection position of the prism is sensed, azimuth angle data of each part of the reflection surface of the corner cube prism detected by the azimuth angle measurement PSD is accumulated to generate reflection area surface data of the corner cube prism, and the corner cube Based on the prism reflection area surface data, the center position of the reflection area surface of the corner cube prism is calculated to generate the azimuth angle data of the displacement measurement point where the corner cube prism is located, and the azimuth angle data of the displacement measurement point Based on the above, a calculation program that calculates the displacement of the displacement measurement point Constituting a displacement measuring device equipped with a computer with a gram.

According to the displacement measuring method and the displacement measuring apparatus for a long-distance object according to the present invention, not only one point of the displacement measuring object but also a plurality of points in a state where the displacement measuring apparatus is once installed and adjusted with respect to the displacement measuring object. It is possible to quickly measure the position and displacement amount of each displacement measurement point and the relative position and displacement amount between each displacement measurement point at once. In addition, PSD has a very high resolution and very fast measurement. In addition, using an angle magnification switch, each displacement measurement is performed with the laser light path length M extended and the laser light projection angle amplified. Since the azimuth angle of the point is directly detected, the displacement measurement results of each displacement measurement point can be obtained accurately and with high resolution without being affected by errors caused by the operation of the left / right / up / down scan drive device, etc. The displacement amount of the displacement measurement object at a long distance of 10 m to 1 km can be measured with high resolution, high accuracy, and high speed in real time. Further, in the process of scanning the displacement measurement region with laser light, the azimuth angle of each part of the reflection surface of the corner cube prism detected by the azimuth angle measurement PSD at each position sensing time of the corner cube prism detected by the optical sensor element Data is collected to generate the reflection area surface data of the corner cube prism, and based on the reflection area surface data, the center position of the reflection area surface of the corner cube prism is calculated to measure the displacement where the corner cube prism is located. Since the azimuth angle data of a point is generated and the displacement of the displacement measurement point is calculated based on the azimuth angle data of the displacement measurement point, the displacement of the displacement measurement point is measured. Even if there is some asymmetrical molding distortion on the reflecting surface of the cube prism, the measurement error caused by this will be eliminated. It is.

  In the best embodiment of the displacement measuring method according to the present invention, a desired arbitrary number of displacement measurement points are set on a displacement measurement object, and a corner cube prism is disposed at the displacement measurement point, and the corner cube is arranged. Two measurement points (A1, A2) are set at a position where all the prisms can be seen and separated by a known distance d from each other, and from each of the measurement points (A1, A2), all the corner cube prisms are covered. A laser beam is projected toward the displacement measurement region, and the displacement measurement region is scanned left and right and up and down with each laser beam, and some of the laser beams directed to the measurement region are Each of the measurement points (A1, A2) is projected onto the azimuth angle measurement PSD, and the same corner cue located at the same displacement measurement point in the scanning process of each laser beam. The retroreflective laser beam reflected by the brilliant prism and returned to the laser beam projection origin at each measurement point (A1, A2) is received by the photosensor element at each measurement point (A1, A2), and its displacement is detected. While detecting the position sensing time of the corner cube prism at the measurement point, and extending the laser light path length (M) from the laser light projection origin to the light receiving surface of the azimuth angle measurement PSD, the respective positions At the time of sensing, the azimuth angle data of the displacement measurement point is detected from the light receiving position of the laser beam received by the light receiving surface of the azimuth angle measurement PSD at the two measurement points (A1, A2), and the azimuth angle data is obtained. This is a displacement measuring method for a long-distance object in which the displacement amount of the displacement measurement point is calculated based on the displacement amount of the displacement measurement point. In addition, since it is also possible that asymmetric molding distortion remains on the reflecting surface of the corner cube prism used and the asymmetric molding distortion causes a measurement error, a laser beam is used to eliminate the measurement error due to the asymmetric molding distortion. In the process of scanning the displacement measurement area, the azimuth angle data of each part of the reflecting surface of the corner cube prism detected by the azimuth angle measurement PSD is accumulated at each time the position of the corner cube prism detected by the optical sensor element is detected. Generates the reflection area surface data of the corner cube prism, calculates the center position of the reflection area surface of the corner cube prism based on the reflection area surface data, and the azimuth angle data of the displacement measurement point where the corner cube prism is located Based on the azimuth angle data of the displacement measurement point. A displacement measuring method for long distance object to measure the displacement of the displacement measurement point by calculating the amount of displacement of the position measuring point.

The best mode of the displacement measuring apparatus according to the present invention is a laser emitter and a laser beam installed at a measurement point and receiving laser light emitted from the laser emitter, and the laser beam is separated from the measurement point by a considerable distance. A first half mirror that projects toward the displacement measurement region including the corner cube prism at the displacement measurement point, and a laser that projects from the first half mirror by rotating the first half mirror back and forth and up and down. A scanning drive device that scans the displacement measurement region with light, and receives the retroreflective laser light reflected by the corner cube prism and returned to the laser light projection origin of the first half mirror in the scanning process; An optical sensor element that detects the position sensing time of the corner cube prism at the displacement measurement point, and the front from the first half mirror A second half mirror that redirects and reflects some of the laser light projected toward the displacement measurement region, and a position detection time point when the laser light reflected by the second half mirror is received and detected by the optical sensor element The azimuth angle measurement PSD for detecting the azimuth angle data of the displacement measurement point from the light receiving position of the laser beam received in step, and the second half mirror and the azimuth angle measurement PSD are placed between the second half mirror and the azimuth angle measurement PSD. An angle switch for extending the laser beam path length (M) from the laser beam projection origin of one half mirror to the light receiving surface of the azimuth angle measurement PSD;
The azimuth angle data of each part of the reflection surface of the corner cube prism detected by the azimuth angle measurement PSD is accumulated every time the reflection position of the corner cube prism detected by the optical sensor element is sensed, and the reflection area surface of the corner cube prism is stored. In addition to generating the data, the center position of the reflection surface of the corner cube prism is calculated based on the reflection area surface data of the corner cube prism to generate the azimuth angle data of the displacement measurement point where the corner cube prism is located and A displacement measuring apparatus for a long-distance object including a computer equipped with a calculation program for calculating a displacement amount of a displacement measuring point based on azimuth angle data of the displacement measuring point.

Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a basic configuration diagram (schematic plan view of the displacement measuring device) of a long-distance object displacement measuring apparatus according to the present invention, and the inclination (gradient degree) of a high-rise building that is a displacement measuring object. ) Is shown as an example of a device that measures from a measurement point considerably away from the high-rise building. FIG. 2 is a detailed view of the angle magnification switching unit in the displacement measuring apparatus. 3A and 3B are explanatory diagrams of the corner cube prism used in the present invention. FIG. 3A is a perspective view of the corner cube prism, FIG. 3B schematically shows a scanning state of the corner cube prism by laser light, and FIG. ) And (d) show the outline of the corner cube prism. 4 is a front view of the main part of the above-mentioned high-rise building as a displacement measurement object (view of the high-rise building in the Z-axis direction), and FIG. Fig. FIG. 6 is a displacement display screen diagram on the display on which the position of the displacement measurement point detected by the azimuth angle measurement PSD of the displacement measuring device is displayed. FIG. 7 is a basic explanatory view of displacement measurement by the displacement measuring method and apparatus according to the present invention, and FIG. 8 is also a basic explanatory view of displacement measurement by the displacement measuring method and apparatus.

1, 2, 3, 4, and 5, B is a displacement measuring object (high-rise building) constructed on the ground G, A is a measuring point for measuring the displacement of the displacement measuring object B, and measuring point A Is set on the ground G at a considerable distance N (distance of 10 m to 1 km) from the displacement measurement object (high-rise building) B, and the displacement measuring device E is installed at the measurement point A. In addition, the displacement measurement object B has an arbitrary number of required displacement measurement points P1, P2, P3, P4... Pn (displacement measurement points P1, P2, P3, P4. Displacement measurement point P) is set, and each corner measurement prism P1, P2, P3, P4 ... Pn has corner cube prisms C1, C2, C3, C4 ... Cn (corner cube prisms C1, C2,. C3, C4... Cn are collectively attached as corner cube prism C). An area including all the corner cube prisms C arranged for displacement measurement is defined as a displacement measurement area Ba, and a measurement point A is a position where all the corner cube prisms C can be seen, that is, the displacement measurement area Ba is defined as a measurement area Ba. The position is set so that it can be seen through. Therefore, the displacement measurement area Ba is in a three-dimensional area including all the corner cube prisms C as viewed from the measurement point A with the measurement point A as a vertex, and the three-dimensional coordinate axis direction of the displacement measurement area Ba The maximum widths in the X-axis direction, Y-axis direction, and Z-axis direction are indicated by Wx, Wy, and Wz, respectively. The widths Wx, Wy, and Wz of the displacement measurement area Ba in the three-dimensional coordinate axis direction are X-axis direction scan width, Y-axis direction scan width, respectively, in the scanning process of the displacement measurement area Ba by laser light described later. It is also the Z direction scan width. 4 and 5, H1 is the vertical distance from the ground G of the displacement measurement point P1, H2 is the vertical distance between the displacement measurement points P1 and P2, and H3 is the vertical distance between the displacement measurement points P2 and P3. The distance, P4, is the vertical distance between the displacement measurement points P3, P4. Further, as shown in FIG. 3, the corner cube prism C is a prism having three internal reflection surfaces orthogonal to each other, and has a function of returning and retroreflecting incident light by 180 ° regardless of the incident angle. Is a well-known one.

In FIG. 1, 1 is a laser emitter, 2 is a first half mirror, 3 is a second half mirror, 4 is an optical sensor element (for example, a photodiode), 5 is an azimuth measuring PSD, and 6 is an angular magnification. A switching device, 7 is a left / right scan drive device (X-axis direction scan drive device), 8 is a vertical scan drive device (Y-axis direction scan drive device), 11 is a computer, and these constitute the main part of the displacement measuring device E. ing. The first half mirror 2 and the optical sensor element 4 constitute a left / right scan unit (X-axis direction scan unit) 9 while maintaining a predetermined mutual positional relationship, and the left / right scan drive unit 7 is connected to the left / right scan unit 9. The left and right scan driving device 7 reciprocates the left and right scan unit 9 left and right (in the X-axis direction) about the vertical axis Ys passing through the center point F of the first half mirror 2. As a result, the first half mirror 2 also reciprocally rotates left and right (in the X-axis direction) about the vertical axis Ys. Further, the left / right scan unit 9 and the left / right scan drive device 7 constitute an upper / lower scan unit 10, and an upper / lower scan drive device 8 is connected to the upper / lower scan unit 10. The vertical scanning unit 10 is reciprocally rotated up and down (in the Y-axis direction) about the horizontal axis Xs passing through the point F. As a result, the first half mirror 2 also reciprocates up and down (in the Y-axis direction) about the horizontal axis Xs. A pulse motor or a direct current motor is used as a drive source for the left / right scan drive device 7 and the vertical scan drive device 8.

The first half mirror 2 is installed at the measurement point A, receives the laser light L emitted from the laser emitter 1, and projects the laser light L toward the displacement measurement area Ba. The center point F of the half mirror 2 is also the projection origin (laser beam projection origin F) of the laser beam L toward the displacement measurement area Ba. The left and right scan driving device 7 and the upper and lower scan driving device 8 include a corner cube prism C with a laser beam L projected from the first half mirror 2 by reciprocatingly rotating the first half mirror 2 left and right and up and down. The displacement measurement area Ba is scanned in the left-right direction (X-axis direction) and the up-down direction (Y-axis direction). The second half mirror 3 is disposed in front of the first half mirror 2 (on the side of the displacement measurement object B), and the second half mirror 3 is the first half mirror 3 in the scanning process. Some of the laser beam L projected from the laser beam projection origin F of the half mirror 2 toward the displacement measurement area Ba is deflected and reflected, and the laser beam L that is reflected and reflected is reflected on the displacement measurement area Ba. Simultaneously with the projection of the directed laser beam L, it is projected onto the azimuth angle measuring PSD 5 via the angle magnification switching unit 6.

The angle magnification switch 6 is placed between the second half mirror 3 and the azimuth angle measurement PSD 5, and lasers from the laser light projection origin F of the first half mirror 2 to the light receiving surface of the azimuth angle measurement PSD 5. The function of extending the optical path length M is achieved. That is, as shown in FIG. 2, the angle magnification switching unit 6 includes a 45 ° prism (equivalent to a reflection mirror placed at an angle of 45 °) and a 45 ° right-angle prism (equivalent to a reflection mirror having a right angle surface). Is a structure in which two W-shaped meandering reflectors 6a and 6b that are combined with each other are opposed to each other with a unit interval R, and the optical path of the unit interval R is formed in n stages in a meandering manner. . Then, by interposing the angle magnification measurement PSD 6 between the second half mirror 3 and the azimuth angle measurement PSD 5, the laser light L received from the second half mirror 3 is transmitted to the optical meander reflectors 6 a and 6 b. The laser light path length M from the laser light projection origin F to the light receiving surface of the azimuth angle measuring PSD 5 can be extended by M1 = n × R by reflecting the light in a meandering manner at n degrees. When there is no need to extend the laser optical path length M, the angle magnification switch 6 is short-circuited, and the laser light L is directly projected from the second half mirror 3 onto the azimuth angle measurement PSD 5. In addition, the angle magnification switching unit 6 arranges a plurality of angle magnification switching units having different number n of optical paths of unit interval R on the turntable, and selects a desired optical path number n from the plurality of angle magnification switching units. The unit provided is selected and incorporated into the displacement measuring device. That is, the laser beam path length M from the laser beam projection origin F of the first half mirror 2 to the light receiving surface of the azimuth angle measurement PSD 5 is equal to the optical path length M0 from the laser beam projection origin F to the angle magnification switch 6 and the angle. The sum of the optical path length M1 in the magnification switch 6 and the optical path length M2 from the angle magnification switch 6 to the light receiving surface of the azimuth angle measurement PSD 5 (M = M0 + M1 + M2). By using the device 6, the laser light path length M from the laser light projection origin F to the light receiving surface of the azimuth angle measurement PSD 5 can be extended in the range of M1 = n × R at the portion of the light path length M2. In this type of long-distance object displacement measurement method and apparatus, the greater the distance N between the displacement object and the measurement point, the smaller the amount of change in the measurement azimuth angle for the same measurement range. Therefore, when it is desired to perform azimuth angle measurement with high resolution, the resolution is increased as the laser light path length M from the laser light projection origin F of the first half mirror 2 to the light receiving surface of the azimuth angle measurement PSD 5 is increased. be able to. Therefore, the laser beam path length M can be extended by interposing the angle magnification switching unit 6 between the laser beam projection origin F and the light receiving surface of the azimuth angle measurement PSD 5 so that the displacement measurement object and the measurement point can be measured. An angular magnification corresponding to the distance N is obtained.

In the process of scanning the displacement measurement area Ba including the corner cube prism C with the laser light L projected from the first half mirror 2, the optical sensor element 4 is retroreflected by the corner cube prism C and first reflected. The retroreflective laser beam Lb having passed through the half mirror 2 is received, and the presence of the corner cube prism C (that is, the presence of the displacement measurement point P on which the corner cube prism C is placed) is sensed at the time of receiving the laser beam. The time point when the optical sensor element 4 receives the retroreflective laser beam Lb is referred to as “position detection time point” in the present application. Then, the projection direction angle of the laser beam L that is the basis of the retroreflective laser beam Lb received by the optical sensor element 4 at the time of position detection (from the first half mirror 2 toward the displacement measurement region at the time of position detection). By detecting the projection direction angle of the laser beam L projected onto the corner cube prism C by the azimuth angle measurement PSD 5, the azimuth angle data (position) of the corner cube prism C with the laser beam projection origin F as a reference point is detected. Data) will be detected and collected.

That is, some of the laser light L projected from the first half mirror 2 toward the displacement measurement region at the time of the position sensing is reflected by the second half mirror 3 and also to the azimuth angle measurement PSD 5. Since the light is projected, the laser beam L (the laser beam L that is the basis of the retroreflective laser beam Lb received by the optical sensor element 4 at the time of position detection) is emitted through the second half mirror 3. An azimuth angle of the corner cube prism C is detected from the light receiving position of the laser beam L received by the azimuth angle measurement PSD 5 and received by the light receiving surface of the azimuth angle measurement PSD 5, and the corner cube prism C is disposed. Further, it is possible to detect and collect azimuth angle data (position data) of the displacement measurement point P. The computer 11 also detects the amount of displacement of the displacement measurement point P based on the position sensing time detected by the optical sensor element 4 and the azimuth angle data (position data) of the displacement measurement point P detected by the azimuth angle measurement PSD 5. A calculation program that calculates

In the displacement measuring method and apparatus according to the present invention, it is essential to use the corner cube prism C. In order to obtain high measurement accuracy, the three reflecting surfaces of the corner cube prism C that are orthogonal to each other are accurately symmetrical. It must be processed into a shape and finished. However, the reflecting surfaces of all the corner cube prisms C to be used are not always processed and finished in an accurate symmetrical shape. As shown in FIGS. The reflective surface s may be a distorted reflective surface s slightly deviating from the exact symmetrical shape indicated by the two-dot chain line. Therefore, even if the reflecting surface of the corner cube prism C is slightly deviated from the exact symmetrical shape, a measure is taken so that the measurement accuracy is not substantially affected thereby. For example, as shown in FIGS. 3C and 3D, one reflecting surface of the corner cube prism C is shifted inward with respect to the regular reflecting surface (the reflecting surface indicated by a two-dot chain line), and the opening angle becomes small. In the case of the distorted reflection surface s in the state, as shown in FIG. 4C, when the laser light L is incident from below the center axis Cs of the corner cube prism C, as shown in FIG. When the laser beam L is incident from the upper side of the center axis Cs of the corner cube prism C, the retroreflected laser beam Lb reflected from the corner cube prism C just returns to the inside by the amount of the distorted reflection surface s. Because of the symmetrical relationship, the center value of the reflection area surface of the corner cube prism C does not change so much even if the distortion reflection surface s is present. Note that the symmetry is the same when the laser light L is incident from the left and right of the center axis Cs of the corner cube prism C. In the present invention, in the process of scanning the displacement measurement area Ba including the corner cube prism C with the laser light L projected from the first half mirror 2, as shown in FIG. The entire surface of the reflective surface is scanned with a fine laser beam, and the azimuth angle measurement PSD detects the data of each part of the reflective surface of the corner cube prism C at each of many position sensing points Q in the scanning. The azimuth angle data of each part of the reflecting surface of the cube prism C is accumulated to generate the reflecting area surface data of the corner cube prism C, and the center value of the reflecting area surface of the corner cube prism C is calculated based on the reflecting area surface data. Then, the displacement amount of the displacement measurement point P where the corner cube prism C is located is calculated, and the displacement of the displacement measurement point P is measured. The Thus, if the scan density of the corner cube prism C taken by the laser light L is made fine, the measurement data proportional to the shape and size of the corner cube prism C from the reflection position data of the laser light at the corner cube prism C, that is, The reflection area surface data can be obtained, and the reflection area center position of the corner cube prism C can be detected by averaging the reflection area surface data. As a result, even when a slight asymmetric distortion remains on the reflecting surface of the corner cube prism C, a measurement error due to the asymmetric distortion can be removed. When higher accuracy measurement is required, the reflection area surface data is measured in advance for each corner cube prism C, the center position deviation coefficient of the reflection area surface is obtained, and the center position deviation is determined. The coefficient can be used to remove a displacement measurement error due to asymmetric distortion of the reflection surface of the corner cube prism. In FIG. 3B, Cx indicates the horizontal scanning direction of the laser light with respect to the corner cube prism C, and Cy indicates the collection of azimuth angle data of each part of the reflection area surface of the corner cube prism C in the scanning process of the corner cube prism C. A time axis is indicated, and Q indicates a position detection time of each part of the reflection surface of the corner cube prism C in the scanning process of the corner cube prism C. Further, the computer 11 measures the azimuth angle at each reflection point sensing time of the corner cube prism detected by the optical sensor element in the laser beam scanning process in order to remove the displacement measurement error due to the asymmetric distortion of the reflection surface of the corner cube prism. The azimuth angle data of each part of the reflection surface of the corner cube prism detected by the PSD is accumulated to generate the reflection area surface data of the corner cube prism, and the corner cube prism is based on the reflection area surface data of the corner cube prism. The azimuth angle data of the displacement measurement point where the corner cube prism is located is generated by calculating the center position of the reflecting surface of the lens, and the displacement amount of the displacement measurement point is calculated based on the azimuth angle data of the displacement measurement point A calculation program is installed.

The operation and function of the long-distance object displacement measuring apparatus according to the present invention and the long-distance object displacement measuring method according to the present invention will be described in more detail. For example, when a high-rise building with a height of about 150 to 200 m is used as a displacement measurement object and the inclination due to the secular change is measured, as shown in FIG. Set any number of displacement measurement points P1, P2, P3, and P4 to the desired measurement points, and place each corner cube prism C1, C2, C3, and C4 at each of the displacement measurement points P1, P2, P3, and P4. A small area including all of these displacement measurement points P1, P2, P3, and P4 is defined as a displacement measurement area Ba. Next, the measurement point A is set at a point where all the displacement measurement points P1, P2, P3, and P4 in the displacement measurement area Ba can be seen, and the displacement measurement device E is installed and adjusted at the measurement point A.

As described above, when the displacement measuring device E is installed at the measurement point A and the laser light L is emitted from the laser emitter 1 toward the first half mirror 2, the laser light L is approximately emitted by the first half mirror 2. The light is reflected by 90 ° and projected onto the displacement measurement area Ba of the displacement measurement object B. The first half mirror 2 passes through the center point F of the first half mirror 2 by the left / right scan drive device (X-axis direction scan drive device) 7 and the vertical scan drive device (Y-axis direction scan drive device) 8. Since the vertical axis Ys and the horizontal axis Xs are used as axes respectively, the laser beam L reflected by the first half mirror 2 is measured for displacement since it is reciprocally rotated left and right (X-axis direction) and up and down (Y-axis direction). The region Ba is scanned over the X-axis direction scan width Wx (X-axis direction scan angle θx) and the Y-axis direction scan width Wy (Y-axis direction scan angle θy (not shown)). The center point F of the first half mirror 2 also serves as a laser beam projection origin for receiving the laser beam L from the laser emitter 1 at the measurement point A and reflecting and projecting it toward the displacement measurement area Ba. Further, for each scan in the X-axis direction by the X-axis direction scan driving device 7, the scan in the Y-axis direction is moved by an amount equivalent to 1 bit, and when the scan in the Y-axis direction reaches a predetermined total number of bits, X All scanning in both the axis and Y axis directions is completed.

In the scanning process using the laser beam L, the laser beam L projected toward the displacement measurement area Ba strikes another object and diverges at a location where the corner cube prisms C1, C2, C3, and C4 are not present. The energy disappears, or if there is no other object, it dissipates far away and the energy disappears. At each displacement measurement point P1, P2, P3, P4, the corner cube prisms C1, C2, C3, C4 Therefore, the laser light L incident on each of the corner cube prisms C1, C2, C3, and C4 is inverted 180 ° regardless of the incident angle and retroreflected as retroreflective laser light Lb. Is returned to the laser beam projection origin F of the first half mirror 2 along the reverse direction. Then, the retroreflective laser beam Lb that has returned to the laser beam projection origin F passes through the first half mirror 2 and is received by the light receiving surface of the photosensor element (for example, photo diode) 4, and the light reception point (this application) The laser beam L projected from the laser beam projection origin F of the first half mirror 2 toward the displacement measurement area Ba at the position sensing point in FIG. It is detected that the position of the point P has been sensed. At the same time, the laser beam L that is the basis of the retroreflective laser beam La sensed by the photosensor element 4 at the time of position detection (projected from the laser beam projection origin F toward the displacement measurement area Ba at the position detection time) Some of the laser light L) radiated from the corner cube prism C at the measurement point P is reflected by the second half mirror 3 and enters the angle magnification changer 6, and is meandered and reflected by the angle magnification changer 6. Since the projection is projected onto the azimuth angle measurement PSD 5 with the optical path length M extended, each displacement measurement in which the corner cube prisms C1, C2, C3, C4 are arranged on the light receiving surface of the azimuth angle measurement PSD 5 is performed. The azimuth angle data (position data) of the points P1, P2, P3, and P4 is detected. Then, the position sensing time point data detected by the optical sensor element 4 and the azimuth angle data detected by the azimuth angle measurement PSD 5 are sent to the computer 11 and the azimuth angles of the displacement measurement points P1, P2, P3, P4 ( Position) and displacement angle (displacement amount) are calculated, and displacements at each displacement measurement point P1, P2, P3, and P4 can be measured together. Further, the azimuth angle of each displacement measurement point P1, P2, P3, P4 is directly detected in a state where the laser light path length M is extended and the projection angle of the laser light L is amplified by using the angle magnification changer 6, so The displacement measurement result at each displacement measurement point can be accurately obtained with high resolution without being affected by errors caused by the operations of the vertical scan drive devices 7 and 8.

  5 shows the positions and displacements of the same displacement measurement P1, P2, P3, and P4 on the same displacement measurement object B as shown in FIG. 4 toward the side surface of the displacement measurement object B (X in FIG. 4). (From the direction) In FIG. 5, P10, P20, P30, and P40 indicate the initial positions of the displacement measurement points P1, P2, P3, and P4 set on the displacement measurement object B, respectively. P1t, P2t, P3t, and P4t Indicates the positions of the displacement measurement points P1, P2, P3, and P4 at the present time after the initial time and the year t. C10, C20, C30, and C40 indicate initial positions of the corner cube prisms C1, C2, C3, and C4 disposed at the displacement measurement points P1, P2, P3, and P4, respectively, and C1t, C2t, and C3t , C4t indicate the positions of the corner cube prisms C1, C2, C3, and C4 at the present time after the initial date and time t. Therefore, the difference between the initial position C10, C20, C30, C40 of the corner cube prism C1, C2, C3, C4 and the current position C1t, C2t, C3t, C4t is between the initial time and the present time. This is the displacement amount of each displacement measurement point P1, P2, P3, P4 accompanying the secular change of the displacement measurement object B, that is, the aging inclination of the displacement measurement object B. 4 and 5, the initial positions of the displacement measurement points P1, P2, P3, and P4 (that is, the initial positions of the corner cube prisms C1C2C3C4) P10 (C10), P20 (C20), P30 (C30), P40 (C40) and the current position P1t (C1t), P2t (C2t), P3t (C3t), P4t (C4t) are detected from the measurement point A and detected.・ If the measurement results are displayed on the display of the displacement measuring device, they are displayed as shown in Fig. 6 (a) and (b), respectively, and the actual 3D displacement of each displacement measurement point P1, P2, P3, P4 is displayed. Clearly visible.

  Next, the displacement measurement function has the function of calculating and measuring the displacement amount of the displacement measurement point P from the azimuth angle data (position data) of the displacement measurement point P detected by the displacement measuring device for a long distance object according to the present invention. A case where the distance N between the object and the measurement point is known will be described with reference to FIG. In FIG. 7, Pn0 and Pnt represent the positions of arbitrary displacement measurement points Pn set on the displacement measurement object B, and Pn0 and Pn0 are initial positions of the displacement measurement points Pn previously measured. Indicates the position of the displacement measuring point Pn at the present time after the initial date and time t. Ba is a displacement measurement region including the positions Pn0 and Pnt of the displacement measurement point Pn. Therefore, when the case where the laser beam L is projected from the measurement point A (laser beam projection origin F) toward the displacement measurement area Ba and scanned in the X-axis direction at each of the past initial time point and the present point of time is shown. In the process, the laser beam L incident on the corner cube prism disposed at the positions Pn0 and Pnt of the displacement measurement point Pn is reflected as the retroreflective laser beam Lb and returns to the laser beam projection origin F, and the retroreflected laser beam Lb Reaches the light receiving surface of the optical sensor element 4, and the positions Pn0 and Pnt of the displacement measurement point Pn at the time of light reception are detected as the positions Pn0 'and Pnt' on the light receiving surface of the azimuth angle measurement PSD 5, respectively, and the displacement measurement is performed. Position angles θxo and θxt of the positions Pn0 and Pnt of the point Pn in the X-axis direction are obtained by the displacement measuring device E. Further, a displacement amount (position difference) ΔWx in the X-axis direction between the positions Pn0 and Pnt of the displacement measurement point Pn is detected as a displacement amount ΔWx ′ on the light receiving surface of the azimuth angle measurement PSD 5. As apparent from FIG. 7, the azimuth angles (position angles) θxo and θxt in the X-axis direction of the two displacement measurement points Pn0 and Pnt, and between the displacement measurement object B and the measurement point A, respectively. Since there is a relationship represented by the following equation (1) between the distance N and the initial position Pn0 of the displacement measurement point Pn and the X-axis direction displacement amount ΔWx between the current position Pnt, By executing the calculation according to the equation (1) by the computer 11 of the displacement measuring device E, the X-axis direction displacement amount ΔWx can be easily calculated and the X-axis direction displacement amount ΔWx can be measured. The X-axis direction displacement amount ΔWx corresponds to the secular displacement of the displacement measurement point Pn due to the secular displacement of the displacement measurement object B generated from the initial time to the present time. Furthermore, by executing the calculation based on the following equation (2) with exactly the same measuring means, the Y-axis direction displacement amount ΔWy of the measurement point Pn to be displaced can be calculated and measured. The computer 11 then shifts the displacement measurement point P in the X-axis direction according to the equations (1) and (2) based on the position data of the displacement measurement point P detected by the optical sensor element 4 and the azimuth angle measurement PSD 5. A calculation program for calculating ΔWx and Y-axis direction displacement amount ΔWy is installed.

When the distance N between the displacement measurement object B and the measurement point A is known, the amount of displacement ΔWx in the X-axis direction of the measurement point to be displaced is expressed as shown in FIG. 7 and equations (1) and (2). The Y-axis direction ΔWy can be easily measured. However, when the distance N is unknown, the following formulas (3), (4), (5), (6), (7), and (8) are used. As shown, the X-axis direction displacement amount ΔWx, the Y-axis direction displacement amount ΔWy, and the Z-axis direction displacement amount ΔWz can be measured. That is, the measurement space is set to X, Y, and Z as described above, and the distance N in the Z direction from the XY plane is obtained. As shown in FIG. 8, if two measurement points A1 and A2 that are a known distance d apart from each other are set to the measurement points Pn0 and Pnt, the measurement points Pn0 and Pn
Between Pnt and measurement points A1 and A2, there is a relationship represented by the following formulas (3) (4) (5) (6) (7) (8)

  Therefore, if the distance to the displacement measurement point Pn0 is Npno and the distance to the displacement measurement point Pnt is Npnt, the distances Npno and Npnt are as shown in the following equations (9) and (10), respectively. Become. If these distances Npno and Npnt are used as the distance N in FIG. 7, even if the distance N is unknown, the X-axis direction displacement amount ΔWx and the Y-axis direction displacement amount ΔWy of the displacement measurement point can be obtained. Further, the Z-axis direction displacement amount ΔWz of the displacement measurement point can be obtained by the following equation (11).

Note that the measurement field of view through which all the corner cube prisms C can be seen from the measurement points A1 and A2, that is, the displacement measurement area Ba scanned with laser light, is easy depending on the distance to the displacement measurement object B and the required resolution. If the displacement measurement point P is included in the displacement measurement area Ba, the displacement of the many displacement measurement points P can be measured at once by setting and adjusting the displacement measurement device E once. be able to.

Displacement measuring method of long-distance object and displacement measuring apparatus of long-distance object according to the present invention, in addition to the measurement of the inclination displacement of the building shown in the above embodiment, the measurement of levee strain when the dam is full and drought, Measurement of secular change of dam embankment, measurement of ground subsidence and uplift, detection of ground displacement for prior detection of landslides, measurement of cross-sectional deformation of tunnels, existing structures accompanying civil engineering and construction work in the vicinity of existing structures Measurement of displacement and deformation of the ground, measurement of vibration and deformation of bridge, measurement of vibration of power pole, measurement of vibration of theater floor, measurement of three-dimensional movement of robot for performance evaluation of robot, work from crane truck It can be used in various industrial fields such as position recognition.

BRIEF DESCRIPTION OF THE DRAWINGS The basic block diagram of the displacement measuring apparatus of the long distance target object which shows one Example of this invention. Detailed explanatory drawing of the angle magnification switching part of the displacement measuring apparatus. Explanatory drawing of the corner cube prism used for this invention. The principal part front view of the high-rise building used as a displacement measuring object. The principal part side view of the same high-rise building. The displacement display screen figure on the display where the position of the to-be-displaced measurement point detected with PSD for azimuth angle measurement of the displacement measuring device which concerns on this invention was displayed. The basic explanatory view of the displacement measurement by the displacement measuring method and apparatus concerning this invention. The basic explanatory view of the displacement measurement by the displacement measuring method and apparatus concerning this invention.

Explanation of symbols

1: Laser emitter 2: First half mirror (mirror)
3: Second half mirror 4: Optical sensor element 5: PSD for azimuth measurement
6: Angle magnification switch
6a, 6b: Optical meandering reflector 7: Left-right scan drive device (X-axis direction scan drive device)
8: Vertical scan drive device (Y-axis direction scan drive device)
9: Left / right scan unit (X-axis direction scan unit)
10: Vertical scan unit (Y-axis direction scan unit)
11: Computer A, A1, A2: Measurement point B: Displacement measurement object (high-rise building)
Ba: Displacement measurement area C (C1, C2, C3, C4 ... Cn): Corner cube prism
Cn0 (C10, C20, C30, C40 ...): Initial position of the corner cube prism
Cnt (C1t, C2t, C3t, C4t ...): Current position of the corner cube prism
Cs: Center axis of corner cube prism
Cx: Left / right scanning direction of laser light to corner cube prism
Cy: Azimuth angle data collection point axis d in corner cube prism scanning process d: Distance between measurement points A1, A2 E: Displacement measuring device F: Center point of first half mirror / Laser light projection origin G: Ground
H1: Vertical distance from the ground of the displacement measurement point P1
H2, H3, H4: Vertical distance between displacement measurement points L: Laser light (projection laser light)
Lb: Retroreflective laser beam M (M0, M1, M2): Laser path length
N: Distance P (P1, P2, P3, P4... Pn) between the displacement measurement object and the measurement point: Displacement measurement point
Pn0 (P10, P20, P30, P40 ... Pn0): Initial position of the displacement measurement point Pn
Pn0 ': Initial position on the PSD light receiving surface for measuring the azimuth angle of the displacement measurement point Pn
Pnt (P1t, P2t, P3t, P4t ... Pnt): Current position of the displacement measurement point Pn
Pnt ': Current position Q at the azimuth angle PSD light-receiving surface of the displacement measurement point Pn: Position sensing time point R of each part of the reflecting surface of the corner cube prism in the scanning process with laser light R: Between the optical meandering reflectors of the angle magnification changer Interval (Unit length of angle magnification switch)
s: Distorted reflection surface of corner cube prism
Wx: X-axis direction scan width of the laser beam L (X-axis direction width of the displacement measurement region Ba)
Wy: Y axis direction scan width of the laser beam L (Y axis direction width of the displacement measurement region Ba)
ΔWx: X-axis direction displacement amount of the displacement measurement point ΔWx ′: X-axis direction displacement amount on the azimuth angle measurement PSD light receiving surface of the displacement measurement point X: X-axis of the orthogonal three-dimensional coordinate axis Y: X-axis of the orthogonal three-dimensional coordinate axis Y axis Z: Z axis of orthogonal 3D coordinate axis
Xs: horizontal axis passing through the center point F of the first half mirror
Ys: vertical axis θx passing through the center point F of the first half mirror: left-right scan angle (scan angle with respect to displacement in the X-axis direction)
θxo: Azimuth angle related to the initial displacement of the displacement measurement point in the X-axis direction θxt: Azimuth angle related to the current displacement of the displacement measurement point in the X-axis direction

Claims (9)

An arbitrary number of displacement measurement points are set on the displacement measurement object, and a corner cube prism is arranged at the displacement measurement object, so that the displacement measurement object can be seen from the displacement measurement object at a considerable distance. A measurement point is set, a laser beam is projected from the measurement point toward a displacement measurement region including the corner cube prism, and the displacement measurement region is scanned left and right and up and down with the laser light, and the displacement A part of the laser beam directed toward the measurement region is simultaneously projected onto the azimuth angle measurement PSD, and is reflected by the corner cube prism in the scanning process of the laser beam and returned to the laser beam projection origin at the measurement point. Laser light is received by the optical sensor element to detect the position sensing time of the corner cube prism at the displacement measurement point, and The azimuth angle data of the displacement measurement point is detected from the light receiving position of the laser beam received by the light receiving surface of the azimuth angle measurement PSD at the time of position sensing, and the displacement amount of the displacement measurement point is based on the azimuth angle data. A displacement measuring method for a long-distance object characterized by calculating the displacement at the displacement measuring point. An arbitrary number of displacement measurement points are set on the displacement measurement object, and a corner cube prism is arranged at the displacement measurement object, so that the displacement measurement object can be seen from the displacement measurement object at a considerable distance. A measurement point is set, a laser beam is projected from the measurement point toward a displacement measurement region including the corner cube prism, and the displacement measurement region is scanned left and right and up and down with the laser light, and the displacement Some reflexes of the laser beam directed to the measurement area are simultaneously projected onto the azimuth angle measurement PSD, reflected by the corner cube prism in the scanning process of the laser beam, and returned to the laser beam projection origin at the measurement point. The reflected laser beam is received by the optical sensor element to detect the position sensing time of the corner cube prism at the displacement measurement point, The laser light received by the light receiving surface of the azimuth angle measuring PSD at the time of position detection in a state where the laser optical path length (M) from the laser light projection origin to the light receiving surface of the azimuth angle measuring PSD is extended. Detecting azimuth angle data of the displacement measurement point from a light receiving position, calculating a displacement amount of the displacement measurement point based on the azimuth angle data, and measuring a displacement of the displacement measurement point. Displacement measurement method for long-distance objects. When the distance (N) between the set measurement point and the displacement measurement object is unknown, the measurement point (A1, A2) is set at two positions separated by a known distance d, and each measurement point (A1, A2) projects a laser beam toward the displacement measurement region and scans the displacement measurement region left and right and up and down with each laser beam, and some amount of each laser beam directed to the displacement measurement region. Are simultaneously projected onto the azimuth angle measurement PSDs of the respective measurement points (A1, A2) and reflected by the same corner cube prism located at the same displacement measurement point in the scanning process of each laser beam. The corner cue at the displacement measurement point by receiving the retroreflective laser beam returned to the laser beam projection origin at each measurement point (A1, A2) by the optical sensor element at each measurement point (A1, A2). The position detection time of the prism is detected, and the displacement measurement is performed from the light receiving position of the laser beam respectively received by the azimuth angle measurement PSD at the two measurement points (A1, A2) at each position detection time. Azimuth angle data of each point is detected, and the displacement is detected based on the azimuth angle data of the displacement measurement point detected by the azimuth angle measurement PSD of the two measurement points (A1, A2) and the known distance d. The displacement measurement method for a long-distance object according to claim 1 or 2, wherein a displacement amount of the measurement point is calculated to measure a displacement of the displacement measurement point. The azimuth angle data of each part of the reflecting surface of the corner cube prism detected by the PSD for measuring the azimuth angle at each point of time when the corner cube prism is detected by the optical sensor element in the scanning process of the laser beam is accumulated. Generate the reflection area surface data, calculate the reflection area surface center position of the corner cube prism based on the reflection area surface data, and generate the azimuth angle data of the displacement measurement point where the corner cube prism is located. 4. The displacement of the displacement measurement point is calculated by calculating the displacement amount of the displacement measurement point based on the azimuth angle data of the displacement measurement point, and measuring the displacement of the displacement measurement point. The displacement measuring method of the long-distance object described in 2. A laser emitter; receiving laser light emitted from the laser emitter installed at a measurement point and directing the laser light to a displacement measurement region including a corner cube prism at a measurement point that is distant from the measurement point A scanning drive device that scans the displacement measurement region with a laser beam projected from the mirror by reciprocating the mirror left and right and up and down; and reflected by the corner cube prism in the scanning process. An optical sensor element that receives retroreflected laser light returned to the laser beam projection origin of the mirror and detects the position sensing time of the corner cube prism at the displacement measurement point; and from the mirror toward the displacement measurement region A position where some of the projected laser beams are simultaneously received and detected by the optical sensor element An azimuth angle measurement PSD that detects azimuth angle data of the displacement measurement point from the light receiving position of the received laser beam at a known time; and based on the azimuth angle data of the displacement measurement point detected by the azimuth angle measurement PSD A displacement measuring device for a long-distance object, comprising: a computer having a calculation program for calculating a displacement amount of the displacement measuring point. A laser emitter; receiving laser light emitted from the laser emitter installed at a measurement point and directing the laser light to a displacement measurement region including a corner cube prism at a measurement point that is distant from the measurement point A scanning drive device that scans the displacement measurement region with a laser beam projected from the mirror by reciprocating the mirror left and right and up and down; and reflected by the corner cube prism in the scanning process. An optical sensor element that receives retroreflected laser light returned to the laser beam projection origin of the mirror and detects the position sensing time of the corner cube prism at the displacement measurement point; and from the mirror toward the displacement measurement region A position where some of the projected laser beams are simultaneously received and detected by the optical sensor element An azimuth angle measurement PSD for detecting azimuth angle data of the displacement measurement point from a light receiving position of the received laser beam at a known time; a laser of the mirror placed between the mirror and the azimuth angle measurement PSD An angle magnification switch for extending the laser optical path length (M) from the light projection origin to the light receiving surface of the azimuth angle measurement PSD; based on the azimuth angle data of the displacement measurement point detected by the azimuth angle measurement PSD A displacement measuring device for a long-distance object, comprising: a computer having a calculation program for calculating a displacement amount of the displacement measuring point. A laser emitter; receiving laser light emitted from the laser emitter installed at a measurement point and directing the laser light to a displacement measurement region including a corner cube prism at a measurement point that is distant from the measurement point A first mirror for projecting; and a scan drive device for scanning the displacement measurement region with a laser beam projected from the first mirror by reciprocatingly rotating the first mirror left and right and up and down; An optical sensor element that receives retroreflected laser light reflected by the corner cube prism in the process and returned to the laser light projection origin of the first mirror to detect the position sensing time of the corner cube prism at the displacement measurement point And a second reflection that redirects and reflects some of the laser light projected from the first mirror toward the displacement measurement region. An azimuth for detecting the azimuth angle data of the measurement point to be displaced from the light receiving position of the received laser light at the time of detecting the position of the laser beam reflected by the second mirror and detected by the optical sensor element. An angle measuring PSD; a laser light path length (between the second mirror and the azimuth angle measuring PSD, from the laser light projection origin of the first mirror to the light receiving surface of the azimuth angle measuring PSD ( An angle magnification switch for extending M); a computer equipped with a calculation program for calculating the displacement amount of the displacement measurement point based on the azimuth angle data of the displacement measurement point detected by the azimuth angle measurement PSD; A displacement measuring apparatus for a long distance object. The corner cube prism accumulates azimuth angle data of each part of the reflection surface of the corner cube prism detected by the azimuth angle measurement PSD at each reflection position sensing point of the corner cube prism detected by the optical sensor element in the laser beam scanning process. The reflection area surface data of the corner cube prism is generated, the center position of the reflection surface of the corner cube prism is calculated based on the reflection area surface data of the corner cube prism, and the azimuth angle data of the displacement measurement point where the corner cube prism is located 8. A computer having a calculation program that generates and calculates a displacement amount of the displacement measurement point based on the azimuth angle data of the displacement measurement point. 8. A displacement measuring apparatus for a long-distance object according to item 1. The displacement measuring apparatus for a long-distance object according to any one of claims 5 to 8, wherein the mirror is a half mirror.

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