JP2005136816A - Method of manufacturing piezoelectric vibrator - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing a small piezoelectric vibrator by supporting a piezoelectric raw plate and hermetically sealing the plate by a conductive adhesive. <P>SOLUTION: To attain the above purpose, a first plate in which a plurality of recessed containers of piezoelectric vibrators are integrally formed is covered with a second plate in which a plurality of lids of the piezoelectric vibrators are continuously formed, the piezoelectric vibrators are each hermetically sealed, and then the resulted product is separately cut into respective piezoelectric vibrators. Alternatively, a third plate in which a plurality of piezoelectric vibrators are formed on a planar substrate is covered with a fourth plate in which a plurality of U-shaped lids are continuously formed, the piezoelectric vibrators are each hermetically sealed, and the resulted product is separately cut into the respective piezoelectric vibrators. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

     The present invention relates to a method of manufacturing a small piezoelectric vibrator that hermetically seals a piezoelectric element plate supported by a conductive adhesive.

     In recent years, a piezoelectric vibrator is generally formed by hermetically sealing a piezoelectric base plate in a cantilevered state as shown in FIG. This is because, when the piezoelectric element plate is supported on a conductive pad formed on the insulating substrate of the piezoelectric vibrator in a state where both ends are supported, both ends of the piezoelectric element plate are fixed, and the frequency characteristics and the like are improved. This is because there is a risk of adverse effects.

     On the other hand, the recent trend is that there is a very rapid demand for miniaturization and low profile from the market, as well as weight reduction and price reduction, with the transmission system equipment in the communication field as the core. At present, however, it has become common to manufacture a piezoelectric vibrator in which the above piezoelectric element plate is hermetically sealed by forming a support structure in a cantilevered support state inside the container of the piezoelectric vibrator. .

JP 2000-249560

     In addition, the applicant has not found any prior art documents related to the present invention by the time of the filing of the application other than the prior art documents specified by the prior art document information described above.

     However, as described above, as the outer shape of the piezoelectric vibrator becomes smaller and the inner volume thereof decreases, the open end of the piezoelectric element plate facing the end of the piezoelectric element plate held by the conductive adhesive and the piezoelectric element The distance from the inner wall including the inside of the lid of the vibrator becomes smaller, and as a result, when the substrate on which the piezoelectric vibrator is mounted is deformed, the container of the piezoelectric vibrator on which the piezoelectric element plate is mounted is also deformed. In addition, the open end of the above-mentioned piezoelectric element plate mounted inside the piezoelectric vibrator contacts the inner wall of the piezoelectric vibrator, particularly the substrate below the piezoelectric element plate and the inner surface of the lid mounted above the piezoelectric element plate. There was a problem that there was a risk of it.

     In addition, as described above, the outer shape of the piezoelectric vibrator is reduced, the inner volume thereof is reduced accordingly, and the container and lid of the piezoelectric vibrator are naturally reduced in size, making it difficult to handle, and in a state in which a large number of pieces are cut into pieces. There was a problem that the manufacturing cost of the piezoelectric vibrator was increased.

     Here, when the open end of the piezoelectric element plate facing the end of the piezoelectric element plate held by the conductive adhesive comes into contact with the inner wall of the piezoelectric vibrator, the contact stress is generated in the piezoelectric element plate, and as a result This may cause a frequency shift.

     In addition, when a large number of small piezoelectric vibrators that are cut into pieces are manufactured, in order to handle each piezoelectric vibrator individually, foreign matter or the like adheres to the internal piezoelectric element plate, resulting in oscillation of the piezoelectric vibrator. There was a problem that the risk of causing a failure was high.

     The piezoelectric vibrator that causes the above-mentioned frequency deviation and oscillation failure cannot naturally be a product, and as a result, the production yield of the product may be reduced, and the reliability of the piezoelectric vibrator may be reduced. For this reason, at present, various measures have been taken to ensure a gap between the open end of the piezoelectric element plate inside the piezoelectric vibrator and the inner wall of the piezoelectric vibrator at the manufacturing stage. is there.

     The present invention has been made under the technical background as described above. Accordingly, the object of the present invention is to connect the piezoelectric element plate on the conductive pad on the insulating substrate inside the piezoelectric vibrator container. In a method for manufacturing a piezoelectric vibrator having a configuration in which the conductive vibrator is supported and hermetically sealed via a conductive adhesive, a method for manufacturing a small piezoelectric vibrator is provided.

     In order to achieve the above object, according to the present invention, a plurality of piezoelectric vibrator lids are continuously formed on a first plate formed by integrally forming a plurality of concave piezoelectric vibrator containers. The piezoelectric plate is covered with a second plate, each piezoelectric vibrator is hermetically sealed, and then divided into individual piezoelectric vibrators.

     In addition, a third plate formed by continuously forming a large number of piezoelectric vibrators on a flat substrate is covered with a fourth plate having a large number of U-shaped lids continuously formed. The piezoelectric vibrators are hermetically sealed, and then divided into individual piezoelectric vibrators.

     A first plate in which a large number of concave piezoelectric vibrator containers are integrally formed; and a third plate in which a large number of piezoelectric vibrators are continuously formed on a flat substrate; The second plate formed by continuously forming the lids of a large number of piezoelectric vibrators and the fourth plate formed by continuously forming a large number of U-shaped lids are pre-divided into pieces. It is characterized by a notch for

     According to the method for manufacturing a piezoelectric vibrator of the present invention, the production yield of the piezoelectric vibrator can be significantly increased.

     Further, according to the method for manufacturing a piezoelectric vibrator of the present invention, the container of the piezoelectric vibrator can be a flat plate, and as a result, the manufacturing cost of the container can be significantly reduced.

     In addition, according to the method for manufacturing a piezoelectric vibrator of the present invention, each piezoelectric vibrator is hermetically sealed, and then divided into individual piezoelectric vibrators by dicing. The dimensional accuracy is improved and the production yield of the piezoelectric vibrator can be remarkably increased.

     Further, according to the method for manufacturing a piezoelectric vibrator of the present invention, there are provided a plate in which a large number of piezoelectric vibrators are continuously formed and a plate in which a plurality of piezoelectric vibrator lids are continuously formed. Collectively, each piezoelectric vibrator is individually sealed up to hermetic sealing, so that the possibility of contamination can be greatly reduced.

      In addition, according to the method for manufacturing a piezoelectric vibrator of the present invention, a plate formed by continuously forming a lid of a large number of piezoelectric vibrators is collectively hermetically sealed as each piezoelectric vibrator. A load is applied to the entire plate during hermetic sealing, and as a result, the hermeticity of each piezoelectric vibrator is improved, and the sealing surface of the plate formed by continuously forming the lids of the plurality of piezoelectric vibrators is provided. Since they are connected, the wettability of the brazing material on the seal surface is improved, and the airtightness is improved more stably here.

     Further, according to the method for manufacturing a piezoelectric vibrator of the present invention, since a large number of very small piezoelectric vibrators are handled by a combined plate, workability is remarkably improved.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In addition, the same code | symbol in each figure shall show the same object.

FIG. 1 shows a first plate 9 in which a large number of concave piezoelectric vibrator containers 8 of the present invention are integrally formed. It is the schematic side surface figure which showed a mode that the board 11 was covered.
First, a first plate 9 in which a large number of concave piezoelectric vibrator containers 8 are integrally formed is manufactured, and then the piezoelectric element plate 1 is placed on each concave piezoelectric vibrator container 8, and then After covering the second plate 11 formed by continuously forming the lids 10 of a large number of piezoelectric vibrators 7 and hermetically sealing each piezoelectric vibrator 7, the piezoelectric vibrator 7 is divided into individual pieces. . The first embodiment shows a case of a piezoelectric vibrator 7 having a concave shape such that the container 2 of each piezoelectric vibrator 7 forming the first plate 9 is made of ceramic, for example. Nowadays, the outer size of individual piezoelectric vibrators 7 has become very small. In the present invention, the manufacturing method of handling a large number of piezoelectric vibrators 7 at a time as in the present invention facilitates the handling. 7 is reduced, and as a result, the dimensional accuracy is improved and the production yield of the piezoelectric vibrator 7 can be increased. It goes without saying that the case where the piezoelectric element plate 1 is made of quartz is also included in the technical scope of the present invention. The first plate 9 and the second plate 11 are preliminarily provided with scribe lines such as cuts in order to facilitate individual cutting into the respective piezoelectric vibrators 7.

     FIG. 2 shows a second plate in which a plurality of piezoelectric vibrators 7 are continuously formed on a first plate 9 in which a large number of concave piezoelectric vibrator containers 8 of the present invention are integrally formed. It is the outline top perspective view showing signs that the board 11 is covered. As shown in FIG. 2, in order to handle it as a single sheet-like plate on which a large number of piezoelectric vibrators 7 are formed, measures for removing foreign matters such as blowing air or nitrogen gas against foreign matters are simultaneously taken. Work efficiency is improved because a single process can be applied to a large number of pieces. An enlarged view of one piezoelectric vibrator 7 among the many piezoelectric vibrators 7 is shown in a dotted circle in FIG.

     FIG. 3 shows that a plurality of U-shaped lids 14 are continuously formed on a third plate 13 in which a large number of piezoelectric vibrators 7 are continuously formed on a flat substrate 12 of the present invention. It is the schematic side surface figure which showed a mode that the covered 4th board 15 was covered. The third plate 13 is made of a ceramic plate or the like. The fourth plate 15 on which the U-shaped lid 14 is continuously formed is made of metal or ceramic. According to the method for manufacturing the piezoelectric vibrator 7 of the present invention, a plate formed by continuously forming a plurality of lids 14 of the piezoelectric vibrator 7 is collectively sealed as each piezoelectric vibrator 7 individually. In addition, a plate is formed by applying a load to the entire plate during hermetic sealing to improve the airtightness of each piezoelectric vibrator 7 and continuously forming the lids 14 of the multiple piezoelectric vibrators 7. Since the sealing surfaces for sealing are connected, the wettability of the brazing material on the sealing surface is improved, and the airtightness is improved more stably here.

     FIG. 4 shows that a plurality of U-shaped lids 14 are continuously formed on a third plate 13 in which a large number of piezoelectric vibrators 7 are continuously formed on a flat substrate 12 of the present invention. It is the general | schematic upper surface perspective view which showed a mode that the covered 4th board 15 was covered. An enlarged view of one piezoelectric vibrator 7 among a large number of piezoelectric vibrators 7 is shown in a dotted circle in FIG. The third plate 13 and the fourth plate 15 are preliminarily provided with scribe lines such as cuts in order to facilitate individual cutting into the respective piezoelectric vibrators 7.

     Although not shown in the figure, a large number of U-shaped piezoelectric elements as shown in FIG. 3 are formed on a plate formed by integrally forming a large number of concave piezoelectric vibrator containers 8 as shown in FIG. It goes without saying that the case where a plate in which the lid 14 of the vibrator is continuously formed is covered is also included in the technical scope of the present invention. In addition, the present invention is not limited to the case where the support form of the piezoelectric element plate is cantilever support, and may be a case where the support is a both-end support.

     In the present invention, the piezoelectric element plate 1 in each piezoelectric vibrator 7 is placed on the conductive pad 4 using the conductive adhesive 6, but gold ( The case where the piezoelectric element plate 1 is placed on the piezoelectric vibrator 7 using Au) bumps is also included in the technical scope of the present invention.

     FIG. 5 is a schematic top perspective view showing a state in which a lid 10 is placed on a piezoelectric vibrator 7 having a conventional concave container 8.

     FIG. 6 is a schematic top perspective view showing a state in which a U-shaped lid 14 is put on a piezoelectric vibrator 7 in which the piezoelectric element plate 1 is mounted on a conventional flat substrate 12.

     FIG. 7 shows a general case in which the piezoelectric element plate 1 is cantilevered and supported by a conductive adhesive 6 on a conductive pad 4 on an insulating substrate 3 inside a piezoelectric vibrator container 2 via a connection electrode. FIG. 6 is a schematic side cross-sectional view of a piezoelectric vibrator 7 having a different configuration.

FIG. 2 shows a state in which a first plate in which a large number of concave piezoelectric vibrator containers of the present invention are integrally formed is covered with a second plate in which a plurality of piezoelectric vibrator lids are continuously formed. FIG. FIG. 2 shows a state in which a first plate in which a large number of concave piezoelectric vibrator containers of the present invention are integrally formed is covered with a second plate in which a plurality of piezoelectric vibrator lids are continuously formed. FIG. A fourth plate in which a large number of U-shaped lids are continuously formed on a third plate in which a large number of piezoelectric vibrators are continuously formed on the flat substrate of the present invention. It is the schematic side surface figure which showed a mode that it covered. A fourth plate in which a large number of U-shaped lids are continuously formed on a third plate in which a large number of piezoelectric vibrators are continuously formed on the flat substrate of the present invention. It is a schematic top perspective view showing a state of covering. FIG. 6 is a schematic top perspective view showing a state in which a conventional piezoelectric vibrator having one concave container is covered with a lid. FIG. 10 is a schematic top perspective view showing a state in which a U-shaped lid is put on a piezoelectric vibrator in which a piezoelectric element plate is mounted on a conventional flat substrate. Schematic side cross-section of a piezoelectric vibrator having a general configuration in which a piezoelectric element plate is hermetically sealed by supporting a conductive electrode on a conductive pad on an insulating substrate inside a piezoelectric vibrator container with a conductive electrode interposed therebetween FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Piezoelectric base plate 2 Piezoelectric vibrator container 3 Insulating substrate 4 Conductive pad 6 Conductive adhesive 7 Piezoelectric vibrator 8 Recessed piezoelectric vibrator container 9 First plate 10 Lid 11 Second plate 12 Flat substrate 13 Third plate 14 U-shaped lid 15 Fourth plate 16 Notch

Claims (3)

In the method of manufacturing a piezoelectric vibrator having a configuration in which the piezoelectric element plate is supported and hermetically sealed with a conductive adhesive via a connection electrode on a conductive pad on an insulating substrate inside the piezoelectric vibrator container.
A first plate in which a large number of concave piezoelectric vibrator containers are integrally formed is covered with a second plate in which a number of lids of the piezoelectric vibrator are continuously formed. A method of manufacturing a piezoelectric vibrator, wherein the vibrator is hermetically sealed, and then divided into individual piezoelectric vibrators.      A third plate in which a large number of the piezoelectric vibrators are continuously formed on a flat substrate is covered with a fourth plate in which a large number of U-shaped lids are continuously formed, 2. The method of manufacturing a piezoelectric vibrator according to claim 1, wherein each of the piezoelectric vibrators is hermetically sealed and then divided into individual piezoelectric vibrators.      A first plate in which a large number of concave piezoelectric vibrator containers are integrally formed, a third plate in which a large number of the piezoelectric vibrators are continuously formed on a flat substrate, and a large number The second plate in which the lids of the piezoelectric vibrators are continuously formed and the fourth plate in which a number of U-shaped lids are continuously formed are preliminarily cut into pieces. The method for manufacturing a piezoelectric vibrator according to claim 1, wherein a notch is provided.

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